CN115451863A - Laser measuring system for complex structure and profile antenna radiation unit - Google Patents
Laser measuring system for complex structure and profile antenna radiation unit Download PDFInfo
- Publication number
- CN115451863A CN115451863A CN202211006410.8A CN202211006410A CN115451863A CN 115451863 A CN115451863 A CN 115451863A CN 202211006410 A CN202211006410 A CN 202211006410A CN 115451863 A CN115451863 A CN 115451863A
- Authority
- CN
- China
- Prior art keywords
- light
- wave plate
- avalanche photodiode
- enters
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The antenna radiation unit is used as a key technology of the whole radar system, and plays an indispensable role in realizing high-resolution detection for the whole radar system. Along with the improvement of the detection precision of the radar, the size of an antenna radiation unit is reduced, the structure of the antenna radiation unit tends to be complex, and the precision requirement on the manufacturing process is higher and higher. Therefore, it is very important to accurately measure the dimensions of such parts in order to obtain a high-precision finished product. Therefore, the invention provides a laser measuring system for an antenna radiation unit with a complex structure and a profile, which adopts a galvanometer scanning and receiving and transmitting combined system optical path, uses a 1/4 wave plate to match with the galvanometer to obtain high-speed large-angle scanning, obtains vertical scanning by using an F-theta lens, obtains the surface size of an antenna by a heterodyne interference method with high precision and high sensitivity, reduces the volume of the system, improves the precision of the system and can be applied to surface profile measurement of irregular devices needing reference light backgrounds.
Description
Technical Field
The invention belongs to the field of optical measurement, and particularly relates to a laser measurement system for an antenna radiation unit with a complex structure and a profile.
Background
The antenna radiation unit is used as a key technology of the whole radar system, and plays an indispensable role in realizing high-resolution detection for the whole radar system. Along with the improvement of the detection precision of the radar, the size of an antenna radiation unit is reduced, the structure of the antenna radiation unit tends to be complex, and the precision requirement on the manufacturing process is higher and higher. Therefore, it is very important to accurately measure the dimensions of such parts in order to obtain a high-precision finished product.
The conventional dimension measuring methods are height gauges, two-dimensional measuring instruments and three-dimensional measuring instruments, and the three types of measuring methods are limited in application due to the fact that the parts are not of single-chip structures, the overall structure is complex, the requirement on dimension precision is high, and the characteristics of complex surface shapes exist. The complicated surface shapes of the antenna radiation unit such as a curved surface and a stepped hole can not be measured in a traditional mode, for example, when a traditional height gauge is used for measurement, if a workpiece has a suspended part and the rigidity is not high, a height gauge measuring needle touches a fin to enable the fin to shake, and therefore the measurement size generates larger deviation;
the two-dimensional length measuring instrument is a photographing type measuring instrument established on the basis of two-dimensional measurement, and cannot perform three-dimensional measurement, so that the measurable part and the measurement precision are limited. When a quadratic element length measuring instrument is used for measurement, the edge of a measured part needs to be manually selected, and because the measurement is carried out in a photographing mode, a measured area cannot be obviously distinguished from the whole part of a workpiece or a measuring table top under the illumination of the measuring instrument, so that the measurement cannot be carried out; meanwhile, if the edge of the detected part of the workpiece has processing burrs, the measurement software can automatically judge when the edge part is selected, and the judgment is easy to have deviation due to the existence of redundancy such as the burrs and the like, so that the measurement result is influenced; and the curved surface part of the antenna radiation unit cannot be subjected to curve fitting by a quadratic element measuring instrument, and the measurement method cannot measure the dimensions in other directions such as height, thickness and the like, so that the measurement range is limited when the antenna radiation unit workpiece with a more complex structural form is measured.
The three-coordinate measuring system can be used for space measurement, is contact measurement, is used for three-dimensional detection and curved surface detection of workpieces, messy 3D digital analogy and form and position tolerance detection and the like, can be used for measuring curved surfaces, special-shaped pieces, large-sized pieces and the like, and can also be used for non-contact measurement by using an image function. When a three-coordinate measuring system is used, the contact type measuring method causes deviation of the measuring result due to shaking of the measuring part as in the height gauge measuring method, and when non-contact type measurement is performed by using the image function, the same problem as that of the two-dimensional measuring system occurs.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a laser measuring system for an antenna radiation unit with a complex structure and a profile, which adopts a galvanometer scanning and receiving and transmitting combined system light path, uses a 1/4 wave plate to match with the galvanometer to obtain high-speed large-angle scanning, obtains vertical scanning by using an F-theta lens, obtains the surface size of an antenna with high precision and high sensitivity by a heterodyne interference method, reduces the volume of the system, improves the precision of the system, and can be applied to surface profile measurement of irregular devices needing a reference light background.
The laser measuring system of the present invention comprises: the device comprises a light source, a polarizer, a polarization beam splitter Prism (PBS), a 1/4 wave plate, a scanning galvanometer, an F-theta lens, a measuring reference surface, a first avalanche photodiode and a second avalanche photodiode which are coaxially arranged, wherein the first avalanche photodiode and the second avalanche photodiode are respectively and electrically connected with a signal processing system;
the light source emits non-linear polarized laser which vertically enters the polarizer to form quasi-linear polarized light which vertically enters the polarization splitting prism; the reflected light of the polarization splitting prism is vertically incident to the second avalanche photodiode (APD 2), and the second avalanche photodiode transmits an input signal to a signal processing system; the transmission light of the polarization beam splitter prism vertically enters the 1/4 wave plate, the polarization state of the transmission light is converted from linear polarization to circularly polarized light, the transmission light of the 1/4 wave plate enters the scanning galvanometer, and the reflected light enters the antenna to be measured and the reference surface through the lens;
the echo light vertically transmits through the lens, enters the scanning galvanometer, is reflected and then enters the 1/4 wave plate, the polarization state of the echo light is converted into linearly polarized light from circular polarization, and the vibration direction rotates by 90 degrees; the transmission light of the 1/4 wave plate vertically enters the polarization beam splitter prism, the reflection light of the polarization beam splitter prism vertically enters the first avalanche photodiode (APD 1), the first avalanche photodiode transmits echo signals to a signal processing system, and heterodyne interference is carried out on the signals output by the second avalanche photodiode.
And obtaining distance information by analyzing phase information in the heterodyne signal, and obtaining the high-precision antenna outline dimension by comparing the distance information of the reference plane.
Preferably, the quarter-wave plate is a WPQ10E-1550 type zero-order 1/4 wave plate, the scanning galvanometer is a galvanometer type galvanometer, and the lens is an F-theta lens.
The invention has the beneficial effects that
The invention adopts optical measurement, and non-contact measurement avoids extra errors caused by shaking of a touch workpiece. And scanning type active laser detection is adopted, the magnitude of the scanning points is large, and a more real antenna radiation unit surface type can be fitted. The heterodyne detection method has extremely high detection sensitivity and can detect extremely weak echo signals. The antenna size is measured by adopting phase discrimination, and the measurement precision is extremely high. The invention can be applied to the measurement of irregular radar antenna radiation units and complex precision parts.
Drawings
Fig. 1 is a schematic diagram of a system configuration.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
in this embodiment, the transmitting and receiving combined system for isolating the emitted light and the echo light of the present invention is adopted, as shown in fig. 1, the light source, the polarizer, the polarization splitting prism PBS, the 1/4 wave plate, the scanning galvanometer, the lens, the reference plane, and the first avalanche photodiode APD1 and the second avalanche photodiode APD2 electrically connected to the signal processing system respectively are coaxially arranged;
the light source emits non-linear polarized laser which vertically enters the polarizer to form quasi-linear polarized light which vertically enters the polarization splitting prism; the reflected light of the polarization beam splitter prism vertically enters a second avalanche photodiode, and the second avalanche photodiode is electrically connected with the signal processing system and transmits an input signal; the transmitted light of the polarization beam splitting prism vertically enters a 1/4 wave plate, the polarization state of the transmitted light is converted into circularly polarized light from linear polarization, the transmitted light of the 1/4 wave plate enters a scanning galvanometer, and the reflected light enters an antenna to be measured and a reference surface through the lens;
the echo light vertically transmits through the lens and is incident to the scanning galvanometer, the reflected echo light vertically enters the 1/4 wave plate, the polarization state of the reflected echo light is converted into linearly polarized light from circular polarization, and the vibration direction rotates 90 degrees to form linearly polarized light which is not matched with the polarization state of the polarization beam splitter prism; the transmitted light of the 1/4 wave plate vertically enters the polarization beam splitter prism, the reflected light of the polarization beam splitter prism vertically enters the first avalanche photodiode, the first avalanche photodiode is electrically connected with the signal processing system, and the echo signal is transmitted and heterodyne interference is carried out on the signal output by the second avalanche photodiode.
And obtaining distance information by analyzing phase information in the heterodyne signal, and obtaining the high-precision antenna outline dimension by comparing the distance information of the reference plane.
The further design of this embodiment lies in:
1. the 1/4 wave plate adopts WPQ10E-1550 type zero-order 1/4 wave plate zero-order produced by Thorlab company, and the wave plate can provide stable polarization performance in a certain wavelength range and a large incidence angle range.
2. The scanning galvanometer type galvanometer is used as the scanning galvanometer, the scanning speed is high, the scanning angle is large, the whole antenna can be covered, and a complete scanning surface type is obtained.
3. The lens uses an F-theta lens, so that the angular scanning light can be changed into vertical scanning light, and the system error is reduced.
4. Accurate distance information is obtained using the reference plane as a measurement reference.
5. The double avalanche photodiodes are used for heterodyne frequency mixing detection, and the detection sensitivity is extremely high.
The present invention is not limited to the above-described specific embodiments, and various modifications and changes can be made to the present invention. Any modifications, equivalent substitutions, improvements and the like of the above embodiments according to the technical essence of the present invention should be included in the scope of protection of the present invention.
Claims (4)
1. A laser measurement system for a complex structure and profile antenna radiating element, characterized by: the device comprises a light source, a polarizer, a polarization beam splitter prism, a 1/4 wave plate, a scanning galvanometer, a lens, a measurement reference surface, a first avalanche photodiode and a second avalanche photodiode which are coaxially arranged, wherein the first avalanche photodiode and the second avalanche photodiode are respectively and electrically connected with a signal processing system;
the light source emits non-linear polarized laser, the non-linear polarized laser vertically enters the polarizer to form quasi-linear polarized light, and the quasi-linear polarized light vertically enters the polarization splitting prism; the reflected light of the polarization beam splitter prism vertically enters the second avalanche photodiode, and the second avalanche photodiode sends an input signal to a signal processing system; the transmission light of the polarization beam splitter prism vertically enters the 1/4 wave plate, the polarization state of the transmission light is converted from quasi-linear polarization light to circular polarization light, the transmission light of the 1/4 wave plate enters the scanning galvanometer, and the reflection light of the scanning galvanometer enters the antenna to be measured and the reference surface through the lens;
the echo light vertically transmits through the lens, enters the scanning galvanometer, is reflected by the scanning galvanometer and then enters the 1/4 wave plate, the polarization state of the echo light is converted into quasi-linear polarization light from circular polarization light, and the vibration direction rotates by 90 degrees; the transmitted light of the 1/4 wave plate vertically enters the polarization beam splitter prism, the reflected light of the polarization beam splitter prism vertically enters the first avalanche photodiode, and the first avalanche photodiode sends an echo signal to a signal processing system.
2. A laser measurement system for a complex geometry and profile antenna radiating element according to claim 1, wherein: the 1/4 wave plate is a WPQ10E-1550 type zero-order 1/4 wave plate.
3. A laser measurement system for a complex geometry and profile antenna radiating element according to claim 1, wherein: the scanning galvanometer type galvanometer is used as the galvanometer type galvanometer.
4. A laser measurement system for a complex geometry and profile antenna radiating element according to claim 1, wherein: the lens is an F-theta lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211006410.8A CN115451863A (en) | 2022-08-22 | 2022-08-22 | Laser measuring system for complex structure and profile antenna radiation unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211006410.8A CN115451863A (en) | 2022-08-22 | 2022-08-22 | Laser measuring system for complex structure and profile antenna radiation unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115451863A true CN115451863A (en) | 2022-12-09 |
Family
ID=84298298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211006410.8A Pending CN115451863A (en) | 2022-08-22 | 2022-08-22 | Laser measuring system for complex structure and profile antenna radiation unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115451863A (en) |
-
2022
- 2022-08-22 CN CN202211006410.8A patent/CN115451863A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107255451B (en) | Angle compensation type laser heterodyne interference displacement measuring device and method | |
| CN106885535B (en) | Single-frequency interferes the device and method of straightness error and its position measurement and compensation | |
| CN104180776B (en) | High-resolution roll angle measurement method and device based on difference interference phase method | |
| US10837766B2 (en) | Laser measurement system and method for measuring six-degree-of-freedom geometric error of rotating shaft | |
| CN207180607U (en) | A kind of angle compensation formula laser heterodyne interference displacement measuring device | |
| CN109579780B (en) | Polarization-based light splitting auto-collimation three-dimensional angle measuring device and method | |
| CN102155927A (en) | Two-dimensional micro angle measuring device based on laser auto-collimation | |
| CN100460811C (en) | Method and device for improving straight line degree measurement sensitivity | |
| CN109855743B (en) | Device and method for measuring large-size optical plane by double-frequency laser heterodyne interference phase | |
| CN102003935B (en) | Environment compensation method for measurement employing laser tracker | |
| TWI641805B (en) | Laser interference calibrator | |
| CN107806821B (en) | With the difference single-frequency interference signal processing unit and method of integrated four photodetectors | |
| CN109470176B (en) | High-precision three-dimensional angle measuring method and device based on double gratings | |
| CN109579779B (en) | High-precision high-frequency-response anti-interference large-working-distance auto-collimation device and method | |
| CN101566459B (en) | Dual-frequency laser interferometer | |
| CN102679894A (en) | Method for measuring central thickness of reflecting type differential confocal lens | |
| CN103376055A (en) | High-resolution linear interferometer | |
| CN205942120U (en) | Autocollimatic optic system with polarization beam splitting element | |
| CN112284302A (en) | Device and method for measuring laser receiving and transmitting coaxiality of active photoelectric system by scanning method | |
| CN114252028B (en) | Compact four-facula two-dimensional corner detection device combined with laser triangulation method | |
| CN100365381C (en) | Method and apparatus for enhancing measuring sensitivity of rotating corner | |
| CN213147728U (en) | Online thickness measuring device for planar wood products based on collimation wide light beam | |
| CN209623647U (en) | A kind of straight line degree measurement system based on grating interference principle | |
| CN115451863A (en) | Laser measuring system for complex structure and profile antenna radiation unit | |
| CN114234854B (en) | Method and device for simultaneously measuring three-degree-of-freedom angles |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |