CN115441147B - Construction method of coplanar waveguide resonator layout and construction method of air bridge layer - Google Patents

Construction method of coplanar waveguide resonator layout and construction method of air bridge layer Download PDF

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CN115441147B
CN115441147B CN202211224927.4A CN202211224927A CN115441147B CN 115441147 B CN115441147 B CN 115441147B CN 202211224927 A CN202211224927 A CN 202211224927A CN 115441147 B CN115441147 B CN 115441147B
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CN115441147A (en
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Benyuan Quantum Computing Technology Hefei Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/008—Manufacturing resonators
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/392—Floor-planning or layout, e.g. partitioning or placement
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/394—Routing
    • G06F30/3953—Routing detailed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/003—Manufacturing lines with conductors on a substrate, e.g. strip lines, slot lines

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Abstract

The invention discloses a construction method of a coplanar waveguide resonator layout and a construction method of an air bridge layer, and belongs to the technical field of chip design. The construction method of the air bridge layer comprises the steps of determining the central line of the central conductor of the coplanar waveguide transmission line; acquiring the width and span of an air bridge and the distance between adjacent air bridges; determining the insertion point of each air bridge on the central line according to the distance between the adjacent air bridges; determining a tangent to the centerline at each insertion point; and generating an air bridge layer with the width and the span at each insertion point and perpendicular to the tangent line corresponding to each insertion point. The construction method of the coplanar waveguide resonator layout comprises the steps of generating a layer of a central conductor and a layer of a central conductor-to-ground gap; and constructing an air bridge layer according to the method. The invention has universal applicability, and is especially suitable for constructing the air bridge pattern layer in the layout of the coplanar waveguide resonator with the coplanar waveguide transmission line in a bent shape.

Description

Construction method of coplanar waveguide resonator layout and construction method of air bridge layer
The patent application is a divisional application of China patent application with the application number 202010473281.8, and the patent application is filed on the 29 th year of 2020 and has the invention name of a construction method of a coplanar waveguide resonator layout, a construction method of an air bridge layer.
Technical Field
The invention belongs to the technical field of chip design, and particularly relates to a construction method of a coplanar waveguide resonator layout, and a construction method and a construction system of an air bridge layer thereof.
Background
The coplanar waveguide resonator is mainly composed of a section of coplanar waveguide transmission line with single end or two open ends, and in order to reduce radiation loss and enhance circuit stability, an air bridge is usually adopted above the central conductor of the coplanar waveguide transmission line to connect the grounding plates at two sides of the central conductor. The coplanar waveguide transmission line is a structure supporting electromagnetic waves to propagate on the same plane, can be manufactured by using a printed circuit board technology and is mainly used for transmitting microwave frequency signals; the air bridge acts as a dielectric between the two conductors to effect bridging of the coplanar waveguide ground (i.e., the aforementioned ground plate). The coplanar waveguide resonator has the advantages of compact structure, flexibility, simplicity, easy coupling with superconducting quantum bits, easy expansion and the like, and is widely applied to superconducting quantum calculation and circuit quantum electrodynamics research.
The more the limiting conditions are, the more complicated and complex the construction of the coplanar waveguide resonator layout is, the more difficult the construction of the air bridge layer in the coplanar waveguide resonator layout is, for example, when the coplanar waveguide transmission line is determined, the coplanar waveguide transmission line is often bent to have an irregular shape in order to reduce the occupied area, and this situation leads to the increased difficulty and difficulty of constructing the air bridge layer, so it is highly desirable to develop a solution that has general applicability and can efficiently construct the air bridge layer connecting the two side floors.
Disclosure of Invention
Aiming at the problems that the prior method for constructing the air bridge layer in the coplanar waveguide resonator layout is generally poor in applicability, low in efficiency and difficult to realize, the invention provides a construction method of the coplanar waveguide resonator layout, and a construction method and a construction system of the air bridge layer.
A construction method of an air bridge layer in a coplanar waveguide resonator layout comprises the following steps:
determining the central line of the central conductor of the coplanar waveguide transmission line;
acquiring the width and span of an air bridge and the distance between adjacent air bridges;
determining the insertion point of each air bridge on the central line according to the distance between the adjacent air bridges;
determining a tangent to the centerline at each of the insertion points;
and generating an air bridge layer with the width and the span at each insertion point and perpendicular to a tangent line corresponding to each insertion point.
Preferably, the step of generating an air bridge layer having the width and the span at each of the insertion points and being perpendicular to a tangent line corresponding to each of the insertion points includes:
determining a first included angle formed between the air bridge and the horizontal direction or the vertical direction on each insertion point according to the tangent line of the central line at each insertion point;
and generating an air bridge layer with the width and the span at each insertion point according to the corresponding first included angle.
In addition, the construction method of the coplanar waveguide resonator layout provided by the invention comprises the following steps:
generating a layer of the center conductor and a layer of the center conductor-to-ground gap;
and constructing an air bridge layer according to the construction method of the air bridge layer in the coplanar waveguide resonator layout, wherein the air bridge layer is positioned on the layer of the central conductor and the layer of the central conductor-to-ground gap.
Preferably, the step of generating the layer of the center conductor and the layer of the center conductor-to-ground gap includes:
acquiring position parameters and signal transmission directions of the first fixed point and the second fixed point, and acquiring line width parameters and physical length of a transmission line, wherein the line width parameters comprise width of a central conductor and width of a gap between the central conductor and the ground;
generating a central line from the second fixed point to the first fixed point, wherein the length of the central line is the physical length of the transmission line, a tangent line of the central line at the first fixed point is parallel to the signal transmission direction of the first fixed point, and a tangent line at the second fixed point is parallel to the signal transmission direction of the second fixed point;
generating a layer of a central conductor and a layer of a grounding gap according to the central line and the line width parameters, wherein the grounding gap is a gap between grounding plates at two sides of the central conductor;
and generating a layer of the center conductor-to-ground gap based on a boolean operation between the layer of the center conductor and the layer of the ground gap.
Preferably, the center line comprises at least one straight line segment and at least one circular arc with a preset radius, and/or comprises at least two circular arcs with preset radii, wherein the straight line segment and the circular arcs with the preset radii are tangent when connected, and the circular arcs with the preset radii are tangent when connected.
Preferably, the arc includes at least one type of quarter arc and half arc.
Preferably, the preset radii are each greater than 3 times the width of the center conductor.
The invention provides a system for constructing an air bridge in a coplanar waveguide resonator layout, which comprises:
the central line determining module is used for determining the central line of the central conductor of the coplanar waveguide transmission line;
the parameter acquisition module is used for acquiring the width and span of the air bridge and the distance between adjacent air bridges;
the position determining module is used for determining the insertion point of each air bridge on the central line according to the distance between the adjacent air bridges;
a tangent line determining module for determining a tangent line of the center line at each of the insertion points;
and the insertion module is used for generating the air bridge layer which is perpendicular to the tangent line corresponding to each insertion point and the width and the span at each insertion point.
The invention also provides a storage medium and an electronic device, wherein:
the storage medium has stored therein a computer program, wherein the computer program is arranged to perform the above-described method of constructing an air bridge layer in a coplanar waveguide resonator layout and/or the method of constructing a coplanar waveguide resonator layout when run.
The electronic device comprises a memory and a processor, wherein the memory stores a computer program, and the processor is configured to run the computer program to execute the method for constructing the air bridge layer in the coplanar waveguide resonator layout and/or the method for constructing the coplanar waveguide resonator layout.
Compared with the prior art, the method has the advantages that the central line of the central conductor of the coplanar waveguide transmission line is firstly determined; secondly, acquiring the width and span of the air bridge and the distance between adjacent air bridges; then, according to the interval between the adjacent air bridges, determining the insertion point of each air bridge on the central line; determining a tangent to said centerline at each of said insertion points; and finally, generating an air bridge layer with the width and the span at each insertion point and perpendicular to the tangent line corresponding to each insertion point, thereby realizing the construction of the air bridge layer connected with the grounding plates at two sides. The scheme has universal applicability, and is particularly suitable for constructing the air bridge pattern layer in the layout of the coplanar waveguide resonator with the coplanar waveguide transmission line in a bent shape.
Drawings
Fig. 1 is a partial schematic view of a chip layout, wherein fig. 1 (2) is an enlarged view of a region M in fig. 1 (1).
Fig. 2 is a schematic flow chart of a method for constructing an air bridge layer in a coplanar waveguide resonator layout according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of a construction process corresponding to the steps of FIG. 2.
FIG. 4 is a flow chart of one embodiment of step 105 of FIG. 1.
Fig. 5 is a schematic diagram of the construction process corresponding to fig. 4.
Fig. 6 is a schematic flow chart of a method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention.
Fig. 7 is an embodiment of step 201 in fig. 3.
Fig. 8 is a schematic structural diagram of a system for constructing an air bridge layer in a coplanar waveguide resonator layout according to the present embodiment.
Fig. 9 is a schematic diagram of a construction process of a method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention.
FIG. 10 is a schematic diagram of one embodiment of generating a centerline.
FIG. 11 is a schematic view of a second embodiment of generating a centerline.
Fig. 12 is a schematic view of a third embodiment for generating a centerline.
Detailed Description
The invention is further described below with reference to the drawings and specific embodiments.
The chip comprises different components, taking a superconducting quantum chip as an example, the chip comprises an inductor, a capacitor, a Josephson junction, a coupling electrode, a read signal control line, a resonator and the like, in the current quantum chip layout design construction work, the position, the size (such as area, length and the like) and other related parameters of each component need to be determined first, then patterns corresponding to each component need to be respectively designed and constructed at the determined positions in the chip layout, as a specific scene, for example, the layout design of the read signal control line 1 and the coupling electrode 2 is designed and completed, in order to connect the two signals, the constructed coplanar waveguide resonator 3 needs to be constructed between the determined starting point and the determined end point, and each parameter meets the requirement of signal transmission, and in order to reduce the occupied area, the coplanar waveguide transmission line is also bent to be in an irregular shape and can only be constructed in an empty area without affecting the functions of other components. The coplanar waveguide transmission line has an irregular shape, which results in increased difficulty in constructing an air bridge layer and difficult realization.
It should be noted that, the coplanar waveguide resonator includes a central conductor and a ground plate located at two sides of the central conductor, and there is a space between the central conductor and the ground plate (referred to as a central conductor-to-ground gap), on the chip layout, the ground plate and the central conductor may be made of aluminum, etc., and the width of the central conductor and the physical length of the transmission line, the width of the central conductor-to-ground gap are determined according to the signal transmission requirement, relevant parameters of the substrate, etc. As shown in fig. 1, the coplanar waveguide resonator 3 connects the read signal control line 1 and the electrode 2 in a signal manner, where W is the width of the center conductor and D is the width of the center conductor-to-ground gap.
The invention provides a construction method of a coplanar waveguide resonator layout, a construction method and a construction system of an air bridge layer of the coplanar waveguide resonator layout, a storage medium and an electronic device, wherein the coplanar waveguide resonator layout comprises a central conductor layer and a central conductor-to-ground gap layer. In the present embodiment, the two determination points are respectively referred to as a first fixed point and a second fixed point.
Example 1
Referring to fig. 2 and 3, fig. 2 is a schematic flow chart of a method for constructing an air bridge layer in a coplanar waveguide resonator layout according to an embodiment of the present invention, and fig. 3 is a schematic flow chart of a construction process corresponding to each step in fig. 2, where the method for constructing an air bridge layer in a coplanar waveguide resonator layout according to the embodiment includes steps S101 to S105:
s101, determining the central line of a central conductor of the coplanar waveguide transmission line, as shown in fig. 3 (1); in this step, it is determined that the center line 31 of the center conductor is located at the center of the center conductor layer, and as shown in fig. 1 (2), the area with the width W is used to represent the center conductor layer, and then the distance between the center line 31 and the two boundaries of the center conductor layer is W/2.
S102, obtaining an air bridge width d, a span l and a spacing S between adjacent air bridges, and referring to FIG. 3 (4), where the span l is a distance between the air bridge and connection positions of the grounding plates at two sides of the center conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the spacing S between adjacent air bridges refers to a length of a center line 31 between adjacent air bridges, the air bridge width d, the span l and the spacing S between adjacent air bridges are all preset values, and when an air bridge layer is constructed, the shortest distance between the air bridge and two end points A, B of the center line may be set, as an implementation manner, in this embodiment, the shortest distance between the air bridge and two end points of the center line is not less than the spacing S between the adjacent air bridges.
S103, according to the distance between the adjacent air bridges, determining the insertion points of each air bridge on the central line, and, as shown in FIG. 3 (2), assuming N determined positions between A, B, sequentially having insertion points dot from A to B along the central line 31 1 Insertion point dot 2 Insertion point dot 3 … …, insertion Point dot i … …, insertion Point dot n Wherein the insertion point dot 1 Dot between the dot and the A dot 2 With the insertion point dot 1 Between points, insert point dot 3 With the insertion point dot 2 Between points, insert point dot i With the insertion point dot i-1 The lengths of the central lines 31 are S, and the insertion points dot n The length of the center line 31 between the point B and the point B is not less than S.
S104, determining the tangent line of the central line at each insertion point, wherein the tangent line of the central line at each insertion point in the step represents the transmission direction of the signal at the insertion point when the coplanar waveguide resonator works; at the insertion point dot i For example, a tangent to the center line determined in this step is shown in fig. 3 (3).
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing the construction of the air bridge layer in the coplanar waveguide resonator layout, wherein the obtained layout is shown in the figure 3 (5); at the insertion point dot i For example, as shown in fig. 3 (4), the air bridge layer is generated on the basis of a certain tangential line along the direction perpendicular to the tangential line, the dimension of the air bridge layer along the direction perpendicular to the tangential line is l, the dimension along the direction of the tangential line is d, and the other insertion points are the same as the insertion point dot i The same applies.
The scheme of the embodiment has universal applicability, is particularly suitable for constructing an air bridge layer when the coplanar waveguide transmission line is in an irregular shape such as bending, and is used for firstly determining the central line 31 of a central conductor of the coplanar waveguide transmission line in any shape, secondly obtaining the width d and the span l of the air bridge and the spacing S of adjacent air bridges, secondly determining the insertion point of each air bridge on the central line 31 according to the spacing S of the adjacent air bridges, thirdly determining the tangent line of the central line 31 at each insertion point, finally generating the air bridge layer with the width d and the span l at each insertion point and being perpendicular to the tangent line corresponding to each insertion point, and further realizing the construction of the air bridge layer connected with the grounding plates at two sides.
As an embodiment, as shown in fig. 4 and fig. 5, the step of generating, at each of the insertion points, the air bridge layer having the width d and the span l and being perpendicular to the tangent line corresponding to each of the insertion points includes:
s1051, determining a first angle formed by the air bridge and the horizontal direction or the vertical direction at each insertion point according to the tangent line of the central line 31 at each insertion point, for example, a first angle theta formed by the air bridge and the vertical direction at each insertion point y Wherein θ y The first included angle theta formed by the air bridge and the vertical direction on each insertion point can be calculated according to the geometric relationship on the basis of the positions (such as coordinate values) of the insertion points and the determination of the tangent line of the central line on each insertion point y ；
S1052, generating an air bridge layer of the d and the span l at each insertion point according to the corresponding first included angle.
In this embodiment, a first included angle formed between the air bridge and the horizontal direction (X axis) or the vertical direction (Y axis) at each insertion point may be determined by using the existing coordinate axes, and an air bridge layer may be generated based on the first included angle.
Example 2
Referring to fig. 6, fig. 6 is a schematic flow chart of a method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention, where the method for constructing a layout of a coplanar waveguide resonator includes steps S201 to S202:
s201, generating a layer of the center conductor and a layer of the center conductor-to-ground gap;
s202, and constructing an air bridge layer according to the method described in embodiment 1, wherein the air bridge layer is located above the layer of the center conductor and the layer of the center conductor-to-ground gap.
As shown in fig. 7 and 9, as an implementation manner of this embodiment, the step of generating the layer of the center conductor and the layer of the center conductor-to-ground gap includes steps S2011 to S2014:
as shown in fig. 9 (1), a line width parameter and a physical length L of the transmission line, and a position parameter and a signal transmission direction respectively provided at the first fixed point a and the second fixed point B are obtained, wherein the line width parameter includes a width W of the center conductor and a width D of a gap between the center conductor and the ground, and the position parameters respectively provided at the first fixed point a and the second fixed point B may be coordinate values respectively corresponding to each other in an XOY coordinate system.
As previously described, the width of the center conductor to ground gap, etc. are determined according to the signal transmission requirements, the relevant parameters of the substrate, etc., and the physical length of the transmission line can be determined according to the impedance matching requirements.
As shown in fig. 9 (2), a center line 31 having a length equal to the physical length L of the transmission line from the second fixed point B to the first fixed point a is generated, and a tangent line of the center line 31 at the first fixed point a is parallel to the signal transmission direction of the first fixed point a, and a tangent line at the second fixed point B is parallel to the signal transmission direction of the second fixed point B. As described in example 1, the tangent at each point on the centerline 31, i.e. the direction of signal propagation at that point, characterizes the coplanar waveguide resonator when in operation.
In practice, to reduce the area occupation and avoid generating signal reflections so that the signal can pass through nearly without loss, it is preferable that the generated center line 31 is a smooth curve, and in particular, the generated center line 31 includes: at least one straight line segment and at least one circular arc with a radius of a preset radius R; or at least two circular arcs with the radius being a preset radius R are included; or comprises at least one straight line segment and at least one circular arc with a radius of a preset radius R, and at least two circular arcs with a radius of the preset radius R.
The straight line segment is tangent to the circular arc with the radius of the preset radius R when the straight line segment is connected with the circular arc with the radius of the preset radius R, namely, the straight line segment is the tangent line of the circular arc with the radius of the preset radius R at the connecting position; the at least two arcs with the radius R are tangential when connected.
The arc comprises at least one type of quarter arc and half arc, and can also comprise any arc with radian value according to the arrangement space requirement.
In order to reduce the loss of the signal in transmission, R > 3W, i.e. the radius of the arc, e.g. the radius of a quarter arc, a half arc, is larger than 3 times the width of the central conductor.
S2013, as shown in fig. 9 (3), a layer 33 of the center conductor and a layer 32 of the ground gap between the ground plates on both sides of the center conductor are generated according to the center line 31 and the line width parameters W and D. In this embodiment, the layer 33 of the center conductor is located above the layer 32 of the ground gap, and it should be noted that: in this step, the layer 32 of the grounding gap is a region formed between two boundary lines farthest from the center line 31 in fig. 9 (3), and is used to represent the gap between the grounding plates at two sides of the center conductor, and the width of the layer 32 of the grounding gap is equal to w+2d; the layer 33 of the center conductor, i.e. the area formed between the two borderlines immediately adjacent to the center line 31 in fig. 9 (3) (i.e. the area filled with "////" in the drawing), is used to characterize the center conductor in the coplanar waveguide resonator, and the width of the layer 33 of the center conductor is equal to the center conductor width W.
S2014, generating a layer of the center conductor-to-ground gap based on Boolean operation between the layer of the center conductor and the layer of the ground gap.
Specifically, in this step, the generated layer 33 of the center conductor and the layer 32 of the ground gap are selected, respectively, and a boolean operation is performed to delete the region overlapping with the layer 33 of the center conductor in the layer 32 of the ground gap to generate a new layer, that is, the layer 34 of the center conductor-to-ground gap, that is, the region formed between two boundary lines on the same side as the center line as in fig. 9 (4) (that is, the region filled with "+" in the drawing) to characterize the center conductor-to-ground gap, and therefore, the width of the layer 34 of the center conductor-to-ground gap is equal to the width D of the center conductor-to-ground gap.
Compared with the prior art, the invention can realize the construction of the coplanar waveguide resonator layout when constructing the coplanar waveguide resonator layout aiming at the determined starting point, the determined ending point and the line width parameters (the line width parameters comprise the width of the central conductor and the width of the gap between the central conductor and the ground) and the physical length of the transmission line, wherein the constructed coplanar waveguide resonator layout comprises a layer 33 of the central conductor, a layer 34 of the gap between the central conductor and the ground and an air bridge layer 35.
In specific implementation, the centerline 31 may be constructed by using a straight line segment, a half arc with a radius of the preset radius R, and a quarter arc with a radius of the preset radius R, and as shown in fig. 10 to 12, the manner of generating the centerline in step S2012 according to the relationship between the signal transmission directions corresponding to the two determination points may include the following three manners:
as shown in fig. 10, as a first embodiment of generating a center line 31 from the second fixed point B to the first fixed point a and having a length of the physical length L of the transmission line in step S2012, it includes:
determining a reference line 30, wherein the reference line 30 is used as a reference standard in the layout construction process in the embodiment, and is used for determining the direction, calculating the intermediate parameters and the like;
calculating integer quotient and remainder obtained by dividing the projection distance of the first fixed point A and the second fixed point B on the reference line by 2 times of the preset radius;
if the reference line 30 is perpendicular to the signal transmission direction of the first fixed point a and the signal transmission direction of the second fixed point B;
when the remainder is zero, determining the number of the half arcs as the integer quotient;
determining the number of first straight line segments perpendicular to the datum line and the length of each first straight line segment according to the number of the half circular arcs and the physical length L of the transmission line;
and generating the center line 31, wherein two ends of the center line are respectively connected with the first fixed point A and the second fixed point B, and the center line 31 is formed by alternately distributing and tangentially connecting the first straight line segments and the half circular arcs.
For the first embodiment described above, the following is described in connection with an example:
corresponding to an XOY coordinate system (unit is mm), assuming that coordinates of a first fixed point A and a second fixed point B are A (0, 0) and B (0.05,0.24), a signal B is transmitted to A, signal transmission directions at two A, B points are parallel to an X axis, and relevant parameters of the coplanar waveguide resonator determined by X+ to X-are as follows: the preset radius R is 0.02mm, the transmission line physical length L is 0.62mm, w=10um d=5um.
According to the steps in the first embodiment:
determining a reference line 30, wherein the reference line 30 is perpendicular to the signal transmission direction of the first fixed point A and the signal transmission direction of the second fixed point B;
calculating the projected distance S of the first fixed point A and the second fixed point B on the reference line, s=0.24 mm, and therefore, S/2r=0.24/2×0.02) =more than 0;
determining the number of the half arcs to be 6;
the number of the first straight line segments perpendicular to the reference line 30 is 1 plus the number of the half arcs, namely 7, and the first straight line segment L connected with the point A is calculated according to the geometric relationship 7 A first straight line section L of 0.0411mm length and connected with the point B 1 Is 0.0411mm in length, other first straight line segment L 2 、L 3 、L 4 、L 5 、L 6 The lengths of (2) are 0.0322mm respectively;
a first line segment L to be perpendicular to the reference line 30 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 Is alternately distributed and tangentially connected with each half arc to form a central line 31 from a first fixed point A to a second fixed point B, specifically, one end of L1 is connected with B, one end of L7 is connected with A, and one end of L 2 、L 3 、L 4 、L 5 、L 6 Distributed at L 1 、L 7 Between, and L 1 L of the other end of 2 One end, L 2 L of the other end of 3 One end, L 3 L of the other end of 4 One end, L 4 L of the other end of 5 One end, L 5 L of the other end of 6 One end, L 6 L of the other end of 7 The other end is connected with the half arc.
In this embodiment, we refer to the straight line perpendicular to the reference line 30 as a first straight line, that is, the first straight line in this embodiment refers to a line type, and similarly, the second straight line in this embodiment refers to a straight line parallel to the reference line 30.
As shown in fig. 11, as a second embodiment of generating a center line from the second fixed point B to the first fixed point a and having a length equal to the physical length of the transmission line in step S2012, it is different from the first embodiment described above in that:
if the reference line 30 is parallel to the signal transmission direction of the first fixed point a and the signal transmission direction of the second fixed point B;
determining the number of the half arcs as a value obtained by subtracting 1 from the integer quotient;
generating a second straight line segment parallel to the reference line 30 and having a length value of the remainder, wherein one end of the second straight line segment is connected with the first fixed point A, and the other end of the second straight line segment extends to the second fixed point B;
generating a first quarter arc with one end connected with the other end of the second straight line segment and a second quarter arc with one end connected with the second fixed point B;
determining the number of first line segments perpendicular to the reference line 30 and the length of each first line segment according to the number of the half arcs and the physical length of the transmission line;
generating a part central line, wherein two ends of the part central line are respectively connected with the other end of the first quarter circular arc and the other end of the second quarter circular arc in a tangent way, and the part central line is formed by alternately distributing and tangentially connecting each first straight line segment and each half circular arc.
For the second embodiment described above, the following is described in connection with an example:
corresponding to an XOY coordinate system (unit is mm), assuming that coordinates of a first fixed point A and a second fixed point B are A (0, 0) and B (0.29,0.03), a signal B is transmitted to A, signal transmission directions at two A, B points are parallel to an X axis, and relevant parameters of the coplanar waveguide resonator determined by X+ to X-are as follows: the preset radius R is 0.02mm, the transmission line physical length L is 0.62mm, w=10. Um d=5 um.
According to the steps in the second embodiment:
determining a reference line 30, wherein the reference line 30 is parallel to the signal transmission direction of the first fixed point A and the signal transmission direction of the second fixed point B;
calculating the projected distance S of the first fixed point A and the second fixed point B on the reference line, s=0.29 mm, and therefore, S/2r=0.29/(2×0.02) =7 more than 0.01;
determining the number of the half arcs to be 6;
generating a second straight line segment l1 parallel to the datum line 30 and with the length value of 0.01mm, wherein one end of the second straight line segment l1 is connected with the first fixed point A, and the other end extends to the second fixed point B;
generating a first quarter arc with one end connected with the other end of the second straight line segment l1 and a second quarter arc with one end connected with the second fixed point;
the number of the first straight line segments perpendicular to the reference line 30 is 1 plus the number of the half arcs, namely 7, and the straight line segment L connected with the other end of the first quarter arc is calculated according to the geometric relation 7 The length of the straight line segment L is 0.0267mm and is connected with the other end of the second quarter circular arc 1 Length of 0.0267mm, L 2 、L 3 、L 4 、L 5 、L 6 The lengths of (3) are respectively 0.0234mm;
a first line segment L to be perpendicular to the reference line 30 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 Is alternately distributed and tangentially connected with each half circular arc to form a curve from the other end of the first quarter circular arc to the other end of the second quarter circular arc, specifically, one end of L1 is connected with the other end of the second quarter circular arc, one end of L7 is connected with the other end of the first quarter circular arc, and one end of L 2 、L 3 、L 4 、L 5 、L 6 Respectively at L 1 、L 7 Between, and L 1 L of the other end of 2 One end, L 2 L of the other end of 3 One end, L 3 L of the other end of 4 One end, L 4 L of the other end of 5 One end, L 5 L of the other end of 6 One end, L 6 L of the other end of 7 The other end is connected with the half arc.
As shown in fig. 12, as a third embodiment of generating a center line from the second fixed point B to the first fixed point a and having a length of the physical length L of the transmission line in step S2012, it is different from the above-described first embodiment in that:
if the reference line 30 is parallel to the signal transmission direction of the first fixed point a and perpendicular to the signal transmission direction of the second fixed point B;
determining the number of the half arcs as the integer quotient;
generating a second straight line segment which is parallel to the datum line 30, has a length value which is obtained by subtracting the preset radius R from the remainder, and has one end connected with the first fixed point A and the other end extending towards the second fixed point B;
generating a first quarter arc with one end connected with the other end of the second straight line segment;
determining the number of first straight line segments perpendicular to the datum line and the length of each first straight line segment according to the number of the half circular arcs and the physical length L of the transmission line;
and generating a part central line, of which the two ends are respectively connected with the other end of the first quarter arc and the second fixed point B, and formed by alternately distributing and tangentially connecting the first straight line segments and the half arcs.
For the third embodiment described above, the following is described in connection with an example:
corresponding to the XOY coordinate system (in mm), assuming that the coordinates of the first fixed point a and the second fixed point B are a (0, 0) and B (0.27,0.035), respectively, the signal is transmitted from B to a, the signal transmission direction at the B point is parallel to the Y axis, the signal transmission direction at the a point is parallel to the X axis from y+ to Y-, and the relevant parameters of the coplanar waveguide resonator determined by x+ to X-are: the preset radius R is 0.02mm, the transmission line physical length L is 0.62mm, w=10. Um d=5 um.
According to the steps in the third embodiment:
determining a reference line 30, wherein the reference line 30 is parallel to the signal transmission direction of the first fixed point A;
calculating the projected distance S of the first fixed point A and the second fixed point B on the reference line, s=0.29 mm, and therefore, S/2r=0.27/(2×0.02) =more than 0.03;
determining the number of the half arcs to be 6;
generating a second straight line segment l1 parallel to the datum line 30 and with the length value of 0.03-0.02=0.01 mm, wherein one end of the second straight line segment l1 is connected with the first fixed point A, and the other end extends to the second fixed point B;
generating a first quarter arc with one end connected with the other end of the second straight line segment l 1;
the number of the first straight line segments perpendicular to the reference line 30 is 1 plus the number of the half arcs, namely 7, and the straight line segment L connected with the other end of the first quarter arc is calculated according to the geometric relation 7 Length of straight line segment L connected with point B is 0.03125mm 1 Is 0.03125mm in length, L 2 、L 3 、L 4 、L 5 、L 6 The lengths of (2) are respectively 0.0278mm;
a first line segment L to be perpendicular to the reference line 30 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 Is alternately distributed and tangentially connected with each half circular arc to form a curve from the other end of the first quarter circular arc to the point B, specifically, one end of L1 is connected with the point B, one end of L7 is connected with the other end of the first quarter circular arc, L 2 、L 3 、L 4 、L 5 、L 6 Respectively at L 1 、L 7 Between, and L 1 L of the other end of 2 One end, L 2 L of the other end of 3 One end, L 3 Is connected with the other end ofL 4 One end, L 4 L of the other end of 5 One end, L 5 L of the other end of 6 One end, L 6 L of the other end of 7 The other end is connected with the half arc.
It should be noted that, in the above three embodiments of generating the center line from the first fixed point a to the second fixed point B and having the length of the physical length L of the transmission line in the step 2012, one implementation may be selected as a parallel scheme. After the center line is generated, a layer of the center conductor and a layer of the center conductor-to-ground gap are generated according to the W and D values.
Example 3
Referring to fig. 8, fig. 8 is a schematic structural diagram of a system for constructing an air bridge in a coplanar waveguide resonator layout according to an embodiment of the present invention, corresponding to the flow shown in fig. 1, including:
a centerline determination module 801 for determining a centerline 31 of a coplanar waveguide transmission line center conductor;
a parameter obtaining module 802, configured to obtain an air bridge width d, a span l, and a spacing S between adjacent air bridges;
a position determining module 803, configured to determine an insertion point of each air bridge on the center line 31 according to the space S between the adjacent air bridges;
a tangent determination module 804 for determining a tangent to the centerline 31 at each of the insertion points;
and an insertion module 805, configured to generate, at each of the insertion points, an air bridge layer having the width and the span and being perpendicular to a tangent line corresponding to each of the insertion points.
Wherein, as an embodiment, the inserting module 805 includes:
an included angle determining unit, configured to determine a first included angle formed between the air bridge and the horizontal direction or the vertical direction at each of the insertion points according to a tangent line of the center line 31 at each of the insertion points;
and the layer generating unit is used for generating the air bridge layer with the width d and the span l at each inserting point according to the corresponding first included angle.
Example 4
A storage medium having a computer program stored therein, wherein the computer program is arranged to perform the steps described in embodiment 1 when run.
Specifically, in the present embodiment, the above-described storage medium may be configured to store a computer program for executing the steps of:
s101, determining the central line of a central conductor of the coplanar waveguide transmission line, as shown in fig. 3 (1); in this step, it is determined that the center line 31 of the center conductor is located at the center of the center conductor layer, and as shown in fig. 1 (2), the area with the width W is used to represent the center conductor layer, and then the distance between the center line 31 and the two boundaries of the center conductor layer is W/2.
S102, obtaining an air bridge width d, a span l and a spacing S between adjacent air bridges, and referring to FIG. 3 (4), where the span l is a distance between the air bridge and connection positions of the grounding plates at two sides of the center conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the spacing S between adjacent air bridges refers to a length of a center line 31 between adjacent air bridges, the air bridge width d, the span l and the spacing S between adjacent air bridges are all preset values, and when an air bridge layer is constructed, the shortest distance between the air bridge and two end points A, B of the center line may be set, as an implementation manner, in this embodiment, the shortest distance between the air bridge and two end points of the center line is not less than the spacing S between the adjacent air bridges.
S103, according to the distance between the adjacent air bridges, determining the insertion points of each air bridge on the central line, and, as shown in FIG. 3 (2), assuming N determined positions between A, B, sequentially having insertion points dot from A to B along the central line 31 1 Insertion point dot 2 Insertion point dot 3 … …, insertion Point dot i … …, insertion Point dot n Wherein the insertion point dot 1 Dot between the dot and the A dot 2 With the insertion point dot 1 Between points, insert point dot 3 With the insertion point dot 2 Between points, insert point dot i With the insertion point dot i-1 The lengths of the central lines 31 are S, and the insertion points dot n The length of the center line 31 between the point B and the point B is not less than S.
S104, determining the tangent line of the central line at each insertion point, wherein the tangent line of the central line at each insertion point in the step represents the transmission direction of the signal at the insertion point when the coplanar waveguide resonator works; at the insertion point dot i For example, a tangent to the center line determined in this step is shown in fig. 3 (3).
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing the construction of the air bridge layer in the coplanar waveguide resonator layout, wherein the obtained layout is shown in the figure 3 (5); at the insertion point dot i For example, as shown in fig. 3 (4), the air bridge layer is generated on the basis of a certain tangential line along the direction perpendicular to the tangential line, the dimension of the air bridge layer along the direction perpendicular to the tangential line is l, the dimension along the direction of the tangential line is d, and the other insertion points are the same as the insertion point dot i The same applies.
Specifically, in the present embodiment, the storage medium may include, but is not limited to: a usb disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a removable hard disk, a magnetic disk, or an optical disk, or other various media capable of storing a computer program.
An embodiment of the invention also provides an electronic device comprising a memory in which a computer program is stored and a processor arranged to run the computer program to perform the steps of the method described in embodiment 1.
Specifically, the electronic apparatus may further include a transmission device and an input/output device, where the transmission device is connected to the processor, and the input/output device is connected to the processor.
Specifically, in the present embodiment, the above-described processor may be configured to execute the following steps by a computer program:
s101, determining the central line of a central conductor of the coplanar waveguide transmission line, as shown in fig. 3 (1); in this step, it is determined that the center line 31 of the center conductor is located at the center of the center conductor layer, and as shown in fig. 1 (2), the area with the width W is used to represent the center conductor layer, and then the distance between the center line 31 and the two boundaries of the center conductor layer is W/2.
S102, obtaining an air bridge width d, a span l and a spacing S between adjacent air bridges, and referring to FIG. 3 (4), where the span l is a distance between the air bridge and connection positions of the grounding plates at two sides of the center conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the spacing S between adjacent air bridges refers to a length of a center line 31 between adjacent air bridges, the air bridge width d, the span l and the spacing S between adjacent air bridges are all preset values, and when an air bridge layer is constructed, the shortest distance between the air bridge and two end points A, B of the center line may be set, as an implementation manner, in this embodiment, the shortest distance between the air bridge and two end points of the center line is not less than the spacing S between the adjacent air bridges.
S103, according to the distance between the adjacent air bridges, determining the insertion points of each air bridge on the central line, and, as shown in FIG. 3 (2), assuming N determined positions between A, B, sequentially having insertion points dot from A to B along the central line 31 1 Insertion point dot 2 Insertion point dot 3 … …, insertion Point dot i … …, insertion Point dot n Wherein the insertion point dot 1 Dot between the dot and the A dot 2 With the insertion point dot 1 Between points, insert point dot 3 With the insertion point dot 2 Between points, insert point dot i With the insertion point dot i-1 The lengths of the central lines 31 are S, and the insertion points dot n The length of the center line 31 between the point B and the point B is not less than S.
S104, determining the tangent line of the central line at each insertion point, wherein the tangent line of the central line at each insertion point in the step represents the transmission direction of the signal at the insertion point when the coplanar waveguide resonator works; at the insertion point dot i For example, the tangent to the center line determined in this step is as shown in FIG. 3 (3)As shown.
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing the construction of the air bridge layer in the coplanar waveguide resonator layout, wherein the obtained layout is shown in the figure 3 (5); at the insertion point dot i For example, as shown in fig. 3 (4), the air bridge layer is generated on the basis of a certain tangential line along the direction perpendicular to the tangential line, the dimension of the air bridge layer along the direction perpendicular to the tangential line is l, the dimension along the direction of the tangential line is d, and the other insertion points are the same as the insertion point dot i The same applies.
Example 5
A storage medium having a computer program stored therein, wherein the computer program is arranged to perform the steps described in embodiment 2 when run.
Specifically, in the present embodiment, the above-described storage medium may be configured to store a computer program for executing the steps of:
s201, generating a layer of the center conductor and a layer of the center conductor-to-ground gap;
s202, and constructing an air bridge layer according to the method described in embodiment 1, wherein the air bridge layer is located above the layer of the center conductor and the layer of the center conductor-to-ground gap.
Specifically, in the present embodiment, the storage medium may include, but is not limited to: a usb disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a removable hard disk, a magnetic disk, or an optical disk, or other various media capable of storing a computer program.
An embodiment of the invention also provides an electronic device comprising a memory, in which a computer program is stored, and a processor arranged to run the computer program to perform the steps of the method described in embodiment 2.
Specifically, the electronic apparatus may further include a transmission device and an input/output device, where the transmission device is connected to the processor, and the input/output device is connected to the processor.
Specifically, in the present embodiment, the above-described processor may be configured to execute the following steps by a computer program:
s201, generating a layer of the center conductor and a layer of the center conductor-to-ground gap;
s202, and constructing an air bridge layer according to the method described in embodiment 1, wherein the air bridge layer is located above the layer of the center conductor and the layer of the center conductor-to-ground gap.
In the embodiment, the step of generating the layer of the center conductor and the layer of the center conductor-to-ground gap may be performed according to the embodiment of example 2.
Based on the above steps, the present embodiment can implement construction of a coplanar waveguide resonator layout for the determined start point and the determined end point, and line width parameters (the line width parameters include the width of the center conductor and the width of the center conductor to ground gap) and the physical length of the transmission line, where the constructed coplanar waveguide resonator layout includes a layer of the center conductor, a layer of the center conductor to ground gap, and an air bridge layer.

Claims (6)

1. A method of constructing a coplanar waveguide resonator layout, the coplanar waveguide resonator layout comprising a layer of a center conductor and a layer of a center conductor-to-ground gap, comprising:
acquiring position parameters and signal transmission directions of the first fixed point and the second fixed point, and acquiring line width parameters and physical length of a transmission line, wherein the line width parameters comprise width of a central conductor and width of a gap between the central conductor and the ground;
generating a central line from the second fixed point to the first fixed point, wherein the length of the central line is the physical length of the transmission line, a tangent line of the central line at the first fixed point is parallel to the signal transmission direction of the first fixed point, a tangent line at the second fixed point is parallel to the signal transmission direction of the second fixed point, the central line comprises at least one straight line segment and at least one circular arc with a preset radius, and/or comprises at least two circular arcs with preset radius, wherein the straight line segment is tangent when connected with the circular arcs with the preset radius, and the circular arcs with the at least two preset radii are tangent when connected;
generating a layer of a central conductor and a layer of a grounding gap according to the central line and the line width parameters, wherein the grounding gap is a gap between grounding plates at two sides of the central conductor;
and generating a layer of the center conductor-to-ground gap based on a boolean operation between the layer of the center conductor and the layer of the ground gap.
2. The method of constructing a coplanar waveguide resonator layout as set forth in claim 1, further comprising:
and constructing an air bridge layer on the layer of the central conductor and the layer of the central conductor-to-ground gap.
3. The method of constructing a coplanar waveguide resonator layout as set forth in claim 1 wherein the arcs comprise at least one of quarter arcs and half arcs.
4. The method of constructing a coplanar waveguide resonator layout as set forth in claim 1 wherein the predetermined radii are each greater than 3 times the center conductor width.
5. A storage medium having a computer program stored therein, wherein the computer program is arranged to perform the method of any of claims 1 to 4 when run.
6. An electronic device comprising a memory and a processor, characterized in that the memory has stored therein a computer program, the processor being arranged to run the computer program to perform the method of any of claims 1 to 4.
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