CN115441147A - Method for constructing coplanar waveguide resonator layout and method for constructing air bridge layer - Google Patents

Method for constructing coplanar waveguide resonator layout and method for constructing air bridge layer Download PDF

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CN115441147A
CN115441147A CN202211224927.4A CN202211224927A CN115441147A CN 115441147 A CN115441147 A CN 115441147A CN 202211224927 A CN202211224927 A CN 202211224927A CN 115441147 A CN115441147 A CN 115441147A
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line
layer
air bridge
coplanar waveguide
constructing
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CN115441147B (en
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不公告发明人
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Origin Quantum Computing Technology Co Ltd
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Origin Quantum Computing Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/008Manufacturing resonators
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level
    • G06F30/392Floor-planning or layout, e.g. partitioning or placement
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/30Circuit design
    • G06F30/39Circuit design at the physical level
    • G06F30/394Routing
    • G06F30/3953Routing detailed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/003Manufacturing lines with conductors on a substrate, e.g. strip lines, slot lines

Abstract

The invention discloses a method for constructing a layout of a coplanar waveguide resonator and a method for constructing an air bridge layer, and belongs to the technical field of chip design. The construction method of the air bridge pattern layer comprises the steps of determining the central line of a central conductor of the coplanar waveguide transmission line; acquiring the width and the span of the air bridge and the distance between adjacent air bridges; according to the distance between adjacent air bridges, determining the insertion point of each air bridge on the central line; determining the tangent of the central line at each insertion point; and generating the air bridge image layer with the width and the span at each insertion point, wherein the air bridge image layer is perpendicular to the tangent line corresponding to each insertion point. The construction method of the coplanar waveguide resonator layout comprises the steps of generating a layer of a central conductor and a layer of a gap between the central conductor and the ground; and constructing an air bridge layer according to the method. The method has general applicability, and is particularly suitable for constructing the air bridge pattern layer in the coplanar waveguide resonator layout with the coplanar waveguide transmission line in a bent shape.

Description

Method for constructing coplanar waveguide resonator layout and method for constructing air bridge layer
The patent application is a divisional application of Chinese patent application with application number 202010473281.8, entitled "method for constructing coplanar waveguide resonator layout and method for constructing air bridge layer", which is filed on 29.05/29/2020.
Technical Field
The invention belongs to the technical field of chip design, and particularly relates to a method for constructing a layout of a coplanar waveguide resonator, and a method and a system for constructing an air bridge layer of the coplanar waveguide resonator.
Background
The coplanar waveguide resonator is mainly composed of a section of coplanar waveguide transmission line with a single end or two open ends, and in order to reduce radiation loss and enhance circuit stability, an air bridge is usually adopted above a central conductor of the coplanar waveguide transmission line to connect grounding plates on two sides of the central conductor. The coplanar waveguide transmission line is a structure supporting the propagation of electromagnetic waves on the same plane, can be manufactured by using a printed circuit board technology, and is mainly used for transmitting microwave frequency signals; the air bridge acts as a dielectric between the two conductors to effect a crossover of the coplanar waveguide ground (i.e., the aforementioned ground plate). The coplanar waveguide type resonator has been widely used in superconducting quantum computation and circuit quantum electrodynamics research due to its advantages of compact structure, flexible and simple design, easy coupling with superconducting quantum bit, easy expansion, etc.
Chip design and layout drawing are needed before quantum chip production and manufacturing, and in actual quantum chip design work, the more restrictive conditions are, the more complicated and complicated the construction of the coplanar waveguide resonator layout is, and the more difficult the construction of the air bridge pattern layer in the coplanar waveguide resonator layout is to be realized.
Disclosure of Invention
The invention provides a method for constructing a coplanar waveguide resonator layout, and a method and a system for constructing an air bridge layer thereof, aiming at the problems that the conventional method for constructing the air bridge layer in the coplanar waveguide resonator layout is poor in general applicability, low in efficiency and difficult to realize.
A method for constructing an air bridge layer in a coplanar waveguide resonator layout comprises the following steps:
determining the central line of the central conductor of the coplanar waveguide transmission line;
acquiring the width and the span of an air bridge and the distance between adjacent air bridges;
according to the distance between the adjacent air bridges, determining the insertion point of each air bridge on the central line;
determining a tangent to the centerline at each of the insertion points;
and generating the air bridge pattern layer with the width and the span at each insertion point, wherein the air bridge pattern layer is perpendicular to the tangent line corresponding to each insertion point.
Preferably, the step of generating an air bridge layer of the width and the span at each of the insertion points and perpendicular to the tangent line corresponding to each of the insertion points includes:
determining a first included angle formed by the air bridge and the horizontal direction or the vertical direction at each insertion point according to the tangent line of the central line at each insertion point;
and generating the air bridge image layers with the widths and the spans at the insertion points according to the corresponding first included angles.
In addition, the invention provides a method for constructing a layout of a coplanar waveguide resonator, which comprises the following steps:
generating a layer of the central conductor and a layer of the gap between the central conductor and the ground;
and constructing an air bridge layer according to the construction method of the air bridge layer in the coplanar waveguide resonator layout, wherein the air bridge layer is positioned on the layer of the central conductor and the layer of the gap between the central conductor and the ground.
Preferably, the step of generating the layer of the central conductor and the layer of the central conductor to ground gap includes:
acquiring a position parameter and a signal transmission direction of a first fixed point and a second fixed point respectively, and acquiring a line width parameter and a physical length of a transmission line, wherein the line width parameter comprises the width of a central conductor and the width of a gap between the central conductor and the ground;
generating a central line from the second fixed point to the first fixed point and having a length equal to the physical length of the transmission line, wherein a tangent of the central line at the first fixed point is parallel to the signal transmission direction of the first fixed point, and a tangent of the central line at the second fixed point is parallel to the signal transmission direction of the second fixed point;
generating a layer of a central conductor and a layer of a grounding gap according to the central line and the line width parameters, wherein the grounding gap is a gap between grounding plates on two sides of the central conductor;
and generating the layer of the central conductor to ground gap based on Boolean operation between the layer of the central conductor and the layer of the ground gap.
Preferably, the center line comprises at least one straight line segment and at least one arc with a preset radius, and/or comprises at least two arcs with a preset radius, wherein the straight line segment is tangent to the arc with the preset radius when connected, and the at least two arcs with the preset radius are tangent to each other when connected.
Preferably, the circular arcs include at least one type of a quarter circular arc and a half circular arc.
Preferably, the preset radii are all larger than 3 times the width of the central conductor.
The invention provides a system for constructing an air bridge in a coplanar waveguide resonator layout, which comprises the following components:
the center line determining module is used for determining the center line of the center conductor of the coplanar waveguide transmission line;
the parameter acquisition module is used for acquiring the width and the span of the air bridge and the distance between adjacent air bridges;
the position determining module is used for determining the insertion point of each air bridge on the central line according to the distance between the adjacent air bridges;
a tangent line determining module for determining a tangent line of the centerline at each of the insertion points;
and the inserting module is used for generating the air bridge pattern layer with the width and the span at each inserting point and vertical to the tangent line corresponding to each inserting point.
The present invention also provides a storage medium and an electronic apparatus, wherein:
the storage medium has stored therein a computer program, wherein the computer program is arranged to execute the method for constructing the air bridge layer in the coplanar waveguide resonator layout and/or the method for constructing the coplanar waveguide resonator layout described above when run.
The electronic device comprises a memory and a processor, wherein the memory stores a computer program, and the processor is configured to run the computer program to execute the method for constructing the air bridge layer in the coplanar waveguide resonator layout and/or the method for constructing the coplanar waveguide resonator layout.
Compared with the prior art, the method has the advantages that the center line of the center conductor of the coplanar waveguide transmission line is determined; secondly, acquiring the width and the span of the air bridge and the distance between adjacent air bridges; then, according to the distance between the adjacent air bridges, determining the insertion point of each air bridge on the central line; determining a tangent to the centerline at each of the insertion points; and finally, generating the air bridge pattern layer with the width and the span and perpendicular to the tangent line corresponding to each insertion point at each insertion point, thereby realizing the construction of the air bridge pattern layer connected with the grounding plates at two sides. The scheme has universal applicability, and is particularly suitable for constructing the air bridge pattern layer in the coplanar waveguide resonator layout with the coplanar waveguide transmission line in a bent shape.
Drawings
Fig. 1 is a partial schematic diagram of a chip layout, wherein fig. 1 (2) is an enlarged view of a region M in fig. 1 (1).
Fig. 2 is a schematic flow chart of a method for constructing an air bridge layer in a coplanar waveguide resonator layout according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a construction process corresponding to the steps in fig. 2.
FIG. 4 is a flowchart illustrating an embodiment of step 105 in FIG. 1.
Fig. 5 is a schematic diagram of a construction process corresponding to fig. 4.
Fig. 6 is a flow chart illustrating a method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention.
Fig. 7 is an embodiment of step 201 in fig. 3.
Fig. 8 is a schematic structural diagram of a system for constructing an air bridge layer in a coplanar waveguide resonator layout according to this embodiment.
Fig. 9 is a schematic diagram of a process for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention.
FIG. 10 is a schematic diagram of one embodiment of generating a centerline.
FIG. 11 is a schematic view of a second embodiment for generating a centerline.
FIG. 12 is a schematic view of a third embodiment for generating a centerline.
Detailed Description
The invention is further described with reference to the accompanying drawings and specific embodiments.
In the current design and construction work of a quantum chip layout, the position, size (such as area, length and the like) and other related parameters of each component need to be determined, and then a graph corresponding to each component needs to be designed and constructed at the determined position in the chip layout respectively, as a specific scene, for example, in combination with the design of fig. 1 (1), the layout design of a read signal control line 1 and a coupling electrode 2 is designed and completed, in order to connect the two signals, a coplanar waveguide resonator 3 needs to be constructed, the constructed coplanar waveguide resonator 3 needs to be between a determined starting point and a determined end point, and each parameter meets the requirements of signal transmission, and in order to reduce the occupied area, the coplanar waveguide transmission line is bent to be in an irregular shape and can be constructed only in an empty area without affecting the functions of other components. The coplanar waveguide transmission lines have irregular shapes, which increases difficulty in constructing air bridge layers and is difficult to implement.
It should be noted that the coplanar waveguide resonator includes a central conductor and ground plates located at two sides of the central conductor, and a space (called as a central conductor to ground gap) exists between the central conductor and the ground plates, on the chip layout, the ground plates and the central conductor may be made of aluminum, etc., and the width of the central conductor, the physical length of the transmission line, and the width of the central conductor to ground gap are determined according to the signal transmission requirements, the relevant parameters of the substrate, etc. As shown in fig. 1, the coplanar waveguide resonator 3 signal-connects the read signal control line 1 and the electrode 2, where W is the width of the central conductor and D is the width of the gap between the central conductor and ground.
The invention provides a method for constructing a coplanar waveguide resonator layout, a method and a system for constructing an air bridge layer, a storage medium and an electronic device, wherein the coplanar waveguide resonator layout comprises a central conductor layer and a second layer of a central conductor to ground gap. In addition, in the present embodiment, the two determination points are respectively referred to as a first fixed point and a second fixed point.
Example 1
Referring to fig. 2 and fig. 3, fig. 2 is a schematic flow chart of a method for constructing an air bridge layer in a coplanar waveguide resonator layout according to an embodiment of the present invention, fig. 3 is a schematic construction process diagram corresponding to each step in fig. 2, and the method for constructing an air bridge layer in a coplanar waveguide resonator layout according to the present embodiment includes steps S101 to S105:
s101, determining the central line of the coplanar waveguide transmission line central conductor, as shown in figure 3 (1); in this step, it is determined that the center line 31 of the center conductor is located at the center position of the center conductor layer, and as shown in fig. 1 (2), the area with the width W is used for representing the center conductor layer, and the distance from the center line 31 to the two boundaries of the center conductor layer is W/2.
S102, obtaining a width d of an air bridge, a span l and a distance S between adjacent air bridges, as shown in fig. 3 (4), where the span l is a distance between the air bridge and ground plate connection positions on both sides of the central conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the distance S between adjacent air bridges is a length of a center line 31 between adjacent air bridges, and the width d of the air bridge, the span l and the distance S between adjacent air bridges are preset values, and are determined according to signal transmission requirements, relevant parameters of a substrate and the like when an air bridge layer is constructed.
S103, determining insertion points of each air bridge on the central line according to the distance between the adjacent air bridges, and assuming that N determined position points are located between A and B and inserting points dot are sequentially located from A to B along the central line 31 as shown in (2) of FIG. 3 1 Insertion point dot 2 Insertion point dot 3 823060, 8230dot, insertion point dot i 823060, 82303060, and dot at insertion point n Wherein the insertion point dot 1 Dot between points A and B 2 And the insertion point dot 1 Between points, insertion point dot 3 And insertion point dot 2 Dot between dots and inserted dot i And insertion point dot i-1 The length of the central line 31 is S, and the insertion point dot n The length of the centerline 31 between points B is not less than S.
S104, determining the tangent of the central line at each insertion point, wherein the tangent of the central line at each insertion point represents the transmission direction of a signal at the insertion point when the coplanar waveguide resonator works; by the insertion point dot i For example, the tangent line of the center line determined in this step is shown in fig. 3 (3).
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing construction of the air bridge layer in the coplanar waveguide resonator layout, wherein the obtained layout is shown in a figure 3 (5); by the insertion point dot i For example, referring to fig. 3 (4), in this step, based on the determined tangent line, an air bridge layer is generated along the direction perpendicular to the tangent line, the dimension of the air bridge layer in the direction perpendicular to the tangent line is l, the dimension of the air bridge layer in the direction along the tangent line is d, and the way and the insertion point dot of the air bridge layer are generated at each of the other insertion points i The same is true.
The scheme of the embodiment has general applicability, and is particularly suitable for constructing air bridge pattern layers when coplanar waveguide transmission lines are in irregular shapes such as bending shapes, for coplanar waveguide transmission lines in any shapes, the embodiment firstly determines a central line 31 of a central conductor of the coplanar waveguide transmission lines, secondly obtains the width d, the span l and the space S of adjacent air bridges, secondly determines the insertion points of each air bridge on the central line 31 according to the space S of the adjacent air bridges, secondly determines the tangent of the central line 31 at each insertion point, and finally generates the air bridge pattern layers with the width d and the span l and perpendicular to the tangent corresponding to each insertion point at each insertion point, thereby realizing the construction of the air bridge pattern layers of the grounding plates connected with two sides.
As an embodiment, with reference to fig. 4 and fig. 5, the step of generating an air bridge image layer with the width d and the span i at each insertion point and perpendicular to a tangent line corresponding to each insertion point includes:
s1051, determining a first included angle formed by the air bridge and the horizontal direction or the vertical direction at each insertion point according to the tangent line of the central line 31 at each insertion point, for example, a first included angle theta formed by the air bridge and the vertical direction at each insertion point y Wherein, θ y The included angle between the tangent line of the central line at each insertion point and the horizontal direction is equal, and on the basis of the determination of the position (such as coordinate value) of each insertion point and the tangent line of the central line at each insertion point, the first included angle theta formed by the air bridge at each insertion point and the vertical direction can be calculated according to the geometric relationship y
And S1052, generating the air bridge image layers of the d and the span l at each insertion point according to the corresponding first included angle.
In the embodiment, a first included angle formed by the air bridge at each insertion point and the horizontal direction (X axis) or the vertical direction (Y axis) can be determined by means of the existing coordinate axes, and an air bridge image layer is generated based on the first included angle.
Example 2
Referring to fig. 6, fig. 6 is a schematic flow chart of a method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention, and the method for constructing a layout of a coplanar waveguide resonator according to an embodiment of the present invention includes steps S201 to S202:
s201, generating a layer of a central conductor and a layer of a gap between the central conductor and the ground;
s202 and a step of constructing an air bridge layer according to the method in embodiment 1, where the air bridge layer is located above the layer of the central conductor and the layer of the gap between the central conductor and the ground.
Referring to fig. 7 and 9, as an embodiment of this embodiment, the step of generating the layer of the central conductor and the layer of the gap between the central conductor and the ground includes steps S2011 to S2014:
s2011, as shown in fig. 9 (1), a line width parameter and a physical length L of the transmission line, and a position parameter and a signal transmission direction of each of the first fixed point a and the second fixed point B are obtained, where the line width parameter includes a width W of the central conductor and a width D of the ground gap of the central conductor, and the position parameters of each of the first fixed point a and the second fixed point B may be coordinate values corresponding to each of the first fixed point a and the second fixed point B in the XOY coordinate system.
As mentioned above, the width of the central conductor and the width of the gap between the central conductor and the ground are determined according to the signal transmission requirement, the relevant parameters of the substrate, etc., and the physical length of the transmission line can be determined according to the impedance matching requirement.
S2012, as shown in fig. 9 (2), a center line 31 is generated from the second fixed point B to the first fixed point a, and the length of the center line 31 is the physical length L of the transmission line, and a tangent of the center line 31 at the first fixed point a is parallel to the signal transmission direction of the first fixed point a, and a tangent at the second fixed point B is parallel to the signal transmission direction of the second fixed point B. As described in embodiment 1, the tangent line at each point on the centerline 31 characterizes the direction of propagation of the signal at that point in the operation of the coplanar waveguide resonator.
In order to reduce the occupied area and avoid signal reflection so that the signal can pass through almost without loss, the generated center line 31 is preferably a smooth curve, and specifically, the generated center line 31 includes: at least one straight line segment and at least one circular arc with the radius of a preset radius R; or comprises at least two circular arcs with the radius of a preset radius R; or comprises at least one straight line segment and at least one circular arc with the preset radius R, and at least two circular arcs with the preset radius R.
When the straight line section is connected with an arc with the radius of a preset radius R, the straight line section is tangent to the arc with the radius of the preset radius R, namely at the connection position; the tangency is also maintained at the connection between said at least two arcs of preset radius R.
The arcs comprise at least one type of quarter arcs and half arcs, and can also comprise arcs with any radian value according to the requirement of arrangement space.
In order to reduce the loss of the signal in transmission, R is more than 3W, namely the radius of the circular arc, such as the radius of a quarter circular arc and a half circular arc, is more than 3 times the width of the central conductor.
S2013, as shown in fig. 9 (3), generating a layer 33 of the central conductor and a layer 32 of the ground gap according to the central line 31 and the line width parameters W and D, where the ground gap is a gap between the ground plates on both sides of the central conductor. In this embodiment, the pattern layer 33 of the central conductor is located on the pattern layer 32 of the ground gap, and it needs to be described that: in this step, the layer 32 of the ground gap, i.e. the area formed between the two boundary lines farthest from the center line 31 as shown in fig. 9 (3), is used to represent the gap between the ground plates on both sides of the center conductor, and the width of the layer 32 of the ground gap is equal to W +2D; the layer 33 of the central conductor, i.e., the area formed between two boundary lines immediately adjacent to the central line 31 as in fig. 9 (3) (i.e., the area filled with "///" in the drawing) is used to characterize the central conductor in the coplanar waveguide resonator, and the width of the layer 33 of the central conductor is equal to the central conductor width W.
S2014, generating a layer of the center conductor to ground gap based on Boolean operation between the layer of the center conductor and the layer of the ground gap.
Specifically, in this step, the generated center conductor layer 33 and the grounding gap layer 32 are selected, respectively, and boolean operations are performed to delete the area overlapping with the center conductor layer 33 in the grounding gap layer 32 and generate a new layer, that is, a center conductor-to-ground gap layer 34, where the center conductor-to-ground gap layer 34 is an area formed between two borderlines located on the same side of the center line as in fig. 9 (4) (that is, an area filled with "+" in the drawing) to represent the center conductor-to-ground gap, and therefore, the width of the center conductor-to-ground gap layer 34 is equal to the width D of the center conductor-to-ground gap.
Compared with the prior art, the method can realize the construction of the coplanar waveguide resonator layout when the coplanar waveguide resonator layout is constructed according to the determined starting point, the determined end point, the line width parameter (the line width parameter comprises the width of the central conductor and the width of the gap between the central conductor and the ground) and the physical length of the transmission line, and the constructed coplanar waveguide resonator layout comprises the layer 33 of the central conductor, the layer 34 of the gap between the central conductor and the ground and the air bridge layer 35.
In specific implementation, the center line 31 may be constructed by using the straight line segment, the half arc with the radius of the preset radius R, and the quarter arc with the radius of the preset radius R, and as shown in fig. 10 to 12, the method for generating the center line in step S2012 according to the relationship between the signal transmission directions corresponding to the two determination points may include the following three methods:
as shown in fig. 10, as a first embodiment of generating the center line 31 from the second fixed point B to the first fixed point a and having a length of the physical length L of the transmission line in step S2012, it includes:
determining a reference line 30, wherein the reference line 30 is used as a reference in the layout construction process in the embodiment and is used for determining the direction, calculating intermediate parameters and the like;
calculating an integer quotient and a remainder obtained by dividing the distance projected by the first fixed point A and the second fixed point B on the reference line by 2 times of the preset radius;
if the reference line 30 is perpendicular to the signal transmission direction of the first fixed point a and the signal transmission direction of the second fixed point B;
when the remainder is zero, determining the number of the half arcs as the integer quotient;
determining the number of first straight line segments perpendicular to the datum line and the length of each first straight line segment according to the number of the half arcs and the physical length L of the transmission line;
and generating the center line 31, the two ends of which are respectively connected with the first fixed point a and the second fixed point B and which is formed by the first straight line segments and the half arcs which are distributed at intervals and are tangentially connected.
For the first embodiment described above, the following is described with reference to examples:
corresponding to an XOY coordinate system (in mm), assuming that the coordinates of a first fixed point A and a second fixed point B are A (0, 0) and B (0.05, 0.24), respectively, a signal is transmitted to A by B, the signal transmission directions at the two points A and B are parallel to an X axis, and relevant parameters of the coplanar waveguide resonator are determined from X + to X-: the preset radius R is 0.02mm, the physical length L of the transmission line is 0.62mm, and W =10um D =5um.
According to the steps in the first embodiment:
determining a reference line 30, wherein the reference line 30 is perpendicular to the signal transmission direction of the first fixed point a and the signal transmission direction of the second fixed point B;
calculating the distance S between the first fixed point a and the second fixed point B projected on the reference line, such that S =0.24mm, and therefore S ÷ 2r =0.24 ÷ (2 × 0.02) = 6-0;
determining the number of the half arcs to be 6;
the number of the first straight line segments perpendicular to the datum line 30 is equal to the number of the half arcs plus 1, namely 7, and the first straight line segments L connected with the point A are calculated according to the geometrical relationship 7 Has a length of 0.0411mm, and a first straight line segment L connected with the point B 1 Is 0.0411mm, and other first straight line segments L 2 、L 3 、L 4 、L 5 、L 6 The lengths of the two parts are respectively 0.0322mm;
a first one perpendicular to said reference line 30Straight line segment L 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 A central line 31 from a first fixed point A to a second fixed point B is formed by the two arc segments which are distributed at intervals and are tangentially connected, specifically, one end of L1 is connected with B, one end of L7 is connected with A, and L is connected with B 2 、L 3 、L 4 、L 5 、L 6 Is distributed at L 1 、L 7 And L is 1 And the other end of (A) and L 2 One end, L 2 And the other end of (A) and L 3 One end, L 3 And the other end of (A) and L 4 One end, L 4 And the other end of (A) and L 5 One end, L 5 And the other end of (A) and L 6 One end, L 6 And the other end of (A) and L 7 The other ends are connected by the half arc.
It should be noted that, in this embodiment, a straight line segment perpendicular to the reference line 30 is referred to as a first straight line segment, that is, the first straight line segment in this embodiment is a line segment type, and similarly, the second straight line segment in this embodiment is a straight line segment parallel to the reference line 30.
As shown in fig. 11, as a second embodiment of generating the center line from the second fixed point B to the first fixed point a and having a length equal to the physical length of the transmission line in step S2012, it is different from the first embodiment in that:
if the datum line 30 is parallel to the signal transmission direction of the first fixed point a and the signal transmission direction of the second fixed point B;
determining the number of the half arcs as a value obtained by subtracting 1 from the integer quotient;
generating a second straight-line segment which is parallel to the datum line 30, has a length value of the remainder, and has one end connected with the first fixed point A and the other end extending to the second fixed point B;
generating a first quarter circular arc with one end connected with the other end of the second straight-line segment and a second quarter circular arc with one end connected with the second fixed point B;
determining the number of first straight line segments perpendicular to the datum line 30 and the length of each first straight line segment according to the number of the half arcs and the physical length of the transmission line;
and generating a partial central line, wherein two ends of the partial central line are respectively in tangential connection with the other end of the first quarter circular arc and the other end of the second quarter circular arc, and the partial central line is formed by alternately distributing and tangentially connecting each first straight line segment and each half circular arc.
For the second embodiment described above, the following is described with reference to examples:
corresponding to an XOY coordinate system (in mm), assuming that the coordinates of a first fixed point A and a second fixed point B are A (0, 0) and B (0.29, 0.03), respectively, a signal is transmitted to A, the signal transmission directions at the two points A and B are parallel to an X axis, and relevant parameters of the coplanar waveguide resonator are determined from X + to X-: the preset radius R is 0.02mm, the physical length L of the transmission line is 0.62mm, and W =10.Um D =5um.
According to the steps in the second embodiment:
determining a reference line 30, wherein the reference line 30 is parallel to the signal transmission direction of the first fixed point A and the signal transmission direction of the second fixed point B;
calculating the distance S between the first fixed point a and the second fixed point B projected on the reference line, such that S =0.29mm, and therefore S ÷ 2r =0.29 ÷ (2 × 0.02) = 7-0.01;
determining the number of the half arcs to be 6;
generating a second straight line segment l1 which is parallel to the reference line 30 and has a length value of 0.01mm, wherein one end of the l1 is connected with the first fixed point A, and the other end of the l1 extends to the second fixed point B;
generating a first quarter circular arc with one end connected with the other end of the second straight line segment l1 and a second quarter circular arc with one end connected with the second fixed point;
the number of the first straight line segments perpendicular to the reference line 30 is the number of the half arcs plus 1, namely 7, and the straight line segments L connected with the other end of the first quarter arc are calculated according to the geometric relationship 7 Has a length of 0.0267mm of the connected straight line segment andstraight line segment L connected with the other end of two-quarter circular arc 1 Has a length of 0.0267mm 2 、L 3 、L 4 、L 5 、L 6 Are respectively 0.0234mm in length;
a first straight line segment L to be perpendicular to the reference line 30 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 The L1 end is connected with the other end of the second quarter circular arc, the L7 end is connected with the other end of the first quarter circular arc, and the L7 end is connected with the other end of the first quarter circular arc 2 、L 3 、L 4 、L 5 、L 6 Are respectively at L 1 、L 7 And L is 1 And the other end of (A) and L 2 One end, L 2 Another end of (a) and L 3 One end, L 3 Another end of (a) and L 4 One end, L 4 Another end of (a) and L 5 One end, L 5 Another end of (a) and L 6 One end, L 6 Another end of (a) and L 7 The other ends are connected by the half circular arc.
As shown in fig. 12, as a third embodiment of generating the center line from the second fixed point B to the first fixed point a and having a length equal to the physical length L of the transmission line in step S2012, it is different from the first embodiment in that:
if the reference line 30 is parallel to the signal transmission direction of the first fixed point a and perpendicular to the signal transmission direction of the second fixed point B;
determining the number of the half arcs as the integer quotient;
generating a second straight line segment which is parallel to the datum line 30, has a length value which is obtained by subtracting the preset radius R from the remainder, and has one end connected with the first fixed point A and the other end extending to the second fixed point B;
generating a first quarter circular arc with one end connected with the other end of the second straight-line segment;
determining the number of first straight line segments perpendicular to the datum line and the length of each first straight line segment according to the number of the half arcs and the physical length L of the transmission line;
and generating a partial central line, the two ends of which are respectively connected with the other end of the first quarter circular arc and the second fixed point B and which is formed by alternately distributing and tangentially connecting each first straight line segment and each half circular arc.
For the third embodiment described above, the following is explained with reference to examples:
corresponding to the XOY coordinate system (in mm), assuming that the coordinates of the first fixed point a and the second fixed point B are a (0, 0), B (0.27, 0.035), respectively, the signal is transmitted from B to a, and the signal transmission direction at B is parallel to the Y axis, and from Y + to Y-, the signal transmission direction at a point is parallel to the X axis, and from X + to X-, the parameters of the coplanar waveguide resonator determined are: the preset radius R is 0.02mm, the physical length L of the transmission line is 0.62mm, and W =10.Um D =5um.
According to the steps in the third embodiment:
determining a reference line 30, wherein the reference line 30 is parallel to the signal transmission direction of the first fixed point A;
calculating the distance S between the first fixed point a and the second fixed point B projected on the reference line, such that S =0.29mm, and therefore S ÷ 2r =0.27 ÷ (2 × 0.02) = 6-0.03;
determining the number of the half arcs to be 6;
generating a second straight-line segment l1 which is parallel to the reference line 30 and has a length value of 0.03-0.02=0.01mm, wherein one end of the l1 is connected with the first fixed point A, and the other end of the l1 extends towards a second fixed point B;
generating a first quarter circular arc with one end connected with the other end of the second straight line segment l 1;
the number of the first straight line segments perpendicular to the reference line 30 is the number of the half arcs plus 1, namely 7, and the straight line segments L connected with the other end of the first quarter arc are calculated according to the geometric relationship 7 Has a length of 0.03125mm, and a straight line segment L connected to the point B 1 Has a length of 0.03125mm 2 、L 3 、L 4 、L 5 、L 6 The lengths of the parts are respectively 0.0278mm;
a first straight line segment L to be perpendicular to the reference line 30 1 、L 2 、L 3 、L 4 、L 5 、L 6 、L 7 The first quarter circular arc and the second quarter circular arc are distributed at intervals and are tangentially connected to form a curve from the other end of the first quarter circular arc to a point B, specifically, one end of L1 is connected with the point B, one end of L7 is connected with the other end of the first quarter circular arc, and L 2 、L 3 、L 4 、L 5 、L 6 Are respectively at L 1 、L 7 And L is 1 And the other end of (A) and L 2 One end, L 2 And the other end of (A) and L 3 One end, L 3 Another end of (a) and L 4 One end, L 4 And the other end of (A) and L 5 One end, L 5 And the other end of (A) and L 6 One end, L 6 And the other end of (A) and L 7 The other ends are connected by the half arc.
In step 2012, the three embodiments of generating the center line from the first fixed point a to the second fixed point B and having a length equal to the physical length L of the transmission line may be implemented as one of parallel schemes. And after the central line is generated, generating a layer of the central conductor and a layer of the ground gap of the central conductor according to the W and D values.
Example 3
Referring to fig. 8, fig. 8 is a schematic structural diagram of a system for constructing an air bridge in a coplanar waveguide resonator layout according to an embodiment of the present invention, which corresponds to the process shown in fig. 1, and includes:
a center line determining module 801, configured to determine a center line 31 of a center conductor of the coplanar waveguide transmission line;
a parameter obtaining module 802, configured to obtain a width d of an air bridge, a span l, and a distance S between adjacent air bridges;
a position determining module 803, which determines the insertion point of each air bridge on the center line 31 according to the distance S between the adjacent air bridges;
a tangent determining module 804 for determining a tangent to the centerline 31 at each of the insertion points;
and an inserting module 805 configured to generate, at each of the insertion points, an air bridge image layer having the width and the span and perpendicular to a tangent line corresponding to each of the insertion points.
Wherein, as an implementation manner, the insertion module 805 includes:
an included angle determining unit, configured to determine, according to a tangent line of the center line 31 at each insertion point, a first included angle formed between the air bridge and the horizontal direction or the vertical direction at each insertion point;
and the layer generating unit is used for generating the air bridge layer with the width d and the span l at each insertion point according to the corresponding first included angle.
Example 4
A storage medium having a computer program stored therein, wherein the computer program is arranged to perform the steps described in embodiment 1 when run.
Specifically, in the present embodiment, the storage medium may be configured to store a computer program for executing the steps of:
s101, determining the central line of a coplanar waveguide transmission line central conductor, as shown in a figure 3 (1); in this step, it is determined that the center line 31 of the center conductor is located at the center position of the center conductor layer, and as shown in fig. 1 (2), the area with the width W is used for representing the center conductor layer, and the distance from the center line 31 to the two boundaries of the center conductor layer is W/2.
S102, obtaining a width d of an air bridge, a span l and a distance S between adjacent air bridges, as shown in fig. 3 (4), where the span l is a distance between the air bridge and ground plate connection positions on both sides of the central conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the distance S between adjacent air bridges refers to a length of a center line 31 between adjacent air bridges, and the width d of the air bridge, the span l and the distance S between adjacent air bridges are all preset values, and are determined according to signal transmission requirements, relevant parameters of a substrate, and the like when constructing an air bridge layer.
S103, determining insertion points of each air bridge on the central line according to the distance between the adjacent air bridges, and supposing that N determined position points between A and B are provided and insertion points dot are sequentially provided from A to B along the central line 31 as shown in (2) of FIG. 3 1 Insertion point dot 2 Insertion point dot 3 823060, 8230dot, insertion point dot i 823060, 8230dot, insertion point dot n Wherein the insertion point dot 1 And between points A and dot, insertion point dot 2 And insertion point dot 1 Between points, insertion point dot 3 And insertion point dot 2 Dot between dots and inserted dot i And insertion point dot i-1 The length of the central line 31 is S, the insertion point dot n The length of the center line 31 between the points B is not less than S.
S104, determining the tangent of the central line at each insertion point, wherein the tangent of the central line at each insertion point represents the transmission direction of a signal at the insertion point when the coplanar waveguide resonator works; by the insertion point dot i For example, the tangent line of the center line determined in this step is shown in fig. 3 (3).
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing the construction of the air bridge layer in the coplanar waveguide resonator layout, and obtaining the layout as shown in FIG. 3 (5); by the insertion point dot i For example, as shown in fig. 3 (4), in this step, based on the determined tangent line, an air bridge layer is generated along the direction perpendicular to the tangent line, where the dimension of the air bridge layer perpendicular to the tangent line is l, the dimension of the air bridge layer along the tangent line is d, and the manner and the insertion point dot of the air bridge layer are generated at each of the other insertion points i The same is true.
Specifically, in this embodiment, the storage medium may include, but is not limited to: various media capable of storing computer programs, such as a usb disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic disk, or an optical disk.
An embodiment of the present invention further provides an electronic device, which includes a memory and a processor, where the memory stores a computer program, and the processor is configured to run the computer program to perform the steps of the method in embodiment 1.
Specifically, the electronic apparatus may further include a transmission device and an input/output device, wherein the transmission device is connected to the processor, and the input/output device is connected to the processor.
Specifically, in this embodiment, the processor may be configured to execute the following steps by a computer program:
s101, determining the central line of the coplanar waveguide transmission line central conductor, as shown in figure 3 (1); in this step, it is determined that the central line 31 of the central conductor is located at the central position of the central conductor layer, and as shown in fig. 1 (2), an area with a width W is used to represent the central conductor layer, and the distance from the central line 31 to the two boundaries of the central conductor layer is W/2.
S102, obtaining a width d of an air bridge, a span l and a distance S between adjacent air bridges, as shown in fig. 3 (4), where the span l is a distance between the air bridge and ground plate connection positions on both sides of the central conductor, the width d is a dimension of the air bridge perpendicular to the span direction, the distance S between adjacent air bridges refers to a length of a center line 31 between adjacent air bridges, and the width d of the air bridge, the span l and the distance S between adjacent air bridges are all preset values, and are determined according to signal transmission requirements, relevant parameters of a substrate, and the like when constructing an air bridge layer.
S103, determining insertion points of each air bridge on the central line according to the distance between the adjacent air bridges, and assuming that N determined position points located between A and B are provided and located along the central line as shown in (2) of FIG. 331 has insertion points dot from A to B in sequence 1 Insertion point dot 2 Dot, insertion point 3 823060, 8230dot, insertion point dot i 823060, 82303060, and dot at insertion point n Wherein the insertion point dot 1 And between points A and dot, insertion point dot 2 And the insertion point dot 1 Between points, insertion point dot 3 And the insertion point dot 2 Between points, insertion point dot i And the insertion point dot i-1 The length of the central line 31 is S, the insertion point dot n The length of the center line 31 between the points B is not less than S.
S104, determining the tangent of the central line at each insertion point, wherein the tangent of the central line at each insertion point represents the transmission direction of a signal at the insertion point when the coplanar waveguide resonator works; by the insertion point dot i For example, the tangent line of the center line determined in this step is shown in fig. 3 (3).
S105, generating an air bridge layer with the width d and the span l at each insertion point and perpendicular to a tangent line corresponding to each insertion point, namely completing construction of the air bridge layer in the coplanar waveguide resonator layout, wherein the obtained layout is shown in a figure 3 (5); by the insertion point dot i For example, referring to fig. 3 (4), in this step, based on the determined tangent line, an air bridge layer is generated along the direction perpendicular to the tangent line, the dimension of the air bridge layer in the direction perpendicular to the tangent line is l, the dimension of the air bridge layer in the direction along the tangent line is d, and the way and the insertion point dot of the air bridge layer are generated at each of the other insertion points i The same is true.
Example 5
A storage medium having a computer program stored therein, wherein the computer program is arranged to perform the steps described in embodiment 2 when run.
Specifically, in the present embodiment, the storage medium may be configured to store a computer program for executing the steps of:
s201, generating a layer of a central conductor and a layer of a gap between the central conductor and the ground;
s202 and a step of constructing an air bridge layer according to the method in embodiment 1, where the air bridge layer is located on the layer of the central conductor and the layer of the gap between the central conductor and the ground.
Specifically, in this embodiment, the storage medium may include, but is not limited to: various media capable of storing computer programs, such as a usb disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic disk, or an optical disk.
An embodiment of the present invention further provides an electronic device, which includes a memory and a processor, where the memory stores a computer program, and the processor is configured to execute the computer program to perform the steps of the method in embodiment 2.
Specifically, the electronic apparatus may further include a transmission device and an input/output device, wherein the transmission device is connected to the processor, and the input/output device is connected to the processor.
Specifically, in this embodiment, the processor may be configured to execute the following steps by a computer program:
s201, generating a layer of a central conductor and a layer of a gap between the central conductor and the ground;
s202 and a step of constructing an air bridge layer according to the method in embodiment 1, where the air bridge layer is located above the layer of the central conductor and the layer of the gap between the central conductor and the ground.
In specific implementation, the step of generating the layer of the central conductor and the layer of the gap between the central conductor and the ground may also be performed according to the implementation manner in embodiment 2.
Based on the above steps, the present embodiment can implement the construction of the layout of the coplanar waveguide resonator for the determined start point and the determined end point, as well as the line width parameters (the line width parameters include the width of the central conductor and the width of the gap between the central conductor and the ground) and the physical length of the transmission line, where the constructed layout of the coplanar waveguide resonator includes the layer of the central conductor, the layer of the gap between the central conductor and the ground, and the air bridge layer.

Claims (10)

1. A method for constructing an air bridge pattern layer in a coplanar waveguide resonator layout is characterized by comprising the following steps:
determining the central line of the central conductor of the coplanar waveguide transmission line;
acquiring the width and the span of the air bridge and the distance between adjacent air bridges;
according to the distance between the adjacent air bridges, determining the insertion point of each air bridge on the central line;
determining a tangent to the centerline at each of the insertion points;
and generating an air bridge image layer with the width and the span and perpendicular to the tangent line corresponding to each insertion point at each insertion point.
2. A method of constructing air bridge patterns in a coplanar waveguide resonator layout as defined in claim 1 wherein said step of creating air bridge patterns of said width and said span at each of said insertion points and perpendicular to the tangent line corresponding to each of said insertion points comprises:
determining a first included angle formed by the air bridge and the horizontal direction or the vertical direction at each insertion point according to the tangent line of the central line at each insertion point;
and generating the air bridge image layers with the widths and the spans at the insertion points according to the corresponding first included angles.
3. A method of constructing a coplanar waveguide resonator layout, said coplanar waveguide resonator layout comprising a pattern layer of a center conductor and a pattern layer of a center conductor to ground gap, comprising:
acquiring a position parameter and a signal transmission direction of a first fixed point and a second fixed point respectively, and acquiring a line width parameter and a physical length of a transmission line, wherein the line width parameter comprises a width of a central conductor and a width of a ground gap of the central conductor;
generating a center line which is from the second fixed point to the first fixed point and has a length equal to the physical length of the transmission line, wherein a tangent of the center line at the first fixed point is parallel to the signal transmission direction of the first fixed point, and a tangent of the center line at the second fixed point is parallel to the signal transmission direction of the second fixed point;
generating a layer of a central conductor and a layer of a grounding gap according to the central line and the line width parameters, wherein the grounding gap is a gap between grounding plates on two sides of the central conductor;
and generating the layer of the central conductor to ground gap based on Boolean operation between the layer of the central conductor and the layer of the ground gap.
4. A method of constructing a coplanar waveguide resonator layout according to claim 3, wherein said method of construction further comprises:
and constructing an air bridge layer on the layer of the central conductor and the layer of the gap between the central conductor and the ground.
5. The method of claim 3, wherein the center line comprises at least one straight line segment and at least one arc of a predetermined radius, and/or at least two arcs of a predetermined radius, wherein the straight line segment and the arc of a predetermined radius are tangent when they are connected, and the arcs of at least two predetermined radii are tangent when they are connected.
6. A method of constructing a coplanar waveguide resonator layout according to claim 5, wherein said arcs comprise at least one type of quarter arcs, half arcs.
7. A method of constructing a coplanar waveguide resonator layout according to claim 5 wherein said predetermined radii are each greater than 3 times the width of said center conductor.
8. A system for constructing an air bridge in a coplanar waveguide resonator layout,
the center line determining module is used for determining the center line of the center conductor of the coplanar waveguide transmission line;
the parameter acquisition module is used for acquiring the width and the span of the air bridge and the distance between adjacent air bridges;
the position determining module is used for determining the insertion point of each air bridge on the central line according to the distance between the adjacent air bridges;
a tangent line determining module for determining a tangent line of the centerline at each of the insertion points;
and the inserting module is used for generating the air bridge image layer with the width and the span at each inserting point and vertical to the tangent line corresponding to each inserting point.
9. A storage medium having a computer program stored thereon, wherein the computer program is arranged to perform the method of any of claims 1 to 2, and/or the method of any of claims 3 to 7 when executed.
10. An electronic device comprising a memory and a processor, wherein the memory has stored therein a computer program, and wherein the processor is arranged to execute the computer program to perform the method of any of claims 1 to 2, and/or the method of any of claims 3 to 7.
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