CN115431153A - Disc repairing, liquid injection and cleaning three-in-one device and method for optical polishing - Google Patents
Disc repairing, liquid injection and cleaning three-in-one device and method for optical polishing Download PDFInfo
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- CN115431153A CN115431153A CN202211009533.7A CN202211009533A CN115431153A CN 115431153 A CN115431153 A CN 115431153A CN 202211009533 A CN202211009533 A CN 202211009533A CN 115431153 A CN115431153 A CN 115431153A
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- 239000007788 liquid Substances 0.000 title claims abstract description 91
- 238000005498 polishing Methods 0.000 title claims abstract description 50
- 230000003287 optical effect Effects 0.000 title claims abstract description 18
- 238000004140 cleaning Methods 0.000 title claims abstract description 16
- 238000002347 injection Methods 0.000 title claims abstract description 10
- 239000007924 injection Substances 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 title abstract description 9
- 238000005507 spraying Methods 0.000 claims abstract description 26
- 238000011010 flushing procedure Methods 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000008367 deionised water Substances 0.000 claims abstract description 12
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 12
- 238000007517 polishing process Methods 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 28
- 239000004579 marble Substances 0.000 claims description 22
- 239000007921 spray Substances 0.000 claims description 21
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 6
- 230000008439 repair process Effects 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 6
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 1
- 235000017491 Bambusa tulda Nutrition 0.000 claims 1
- 241001330002 Bambuseae Species 0.000 claims 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 1
- 239000011425 bamboo Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 claims 1
- 238000004080 punching Methods 0.000 abstract description 7
- 239000000243 solution Substances 0.000 abstract description 6
- 238000000889 atomisation Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract description 3
- 239000008187 granular material Substances 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract description 2
- 238000012937 correction Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000010426 asphalt Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
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- 239000007779 soft material Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
A three-in-one device for repairing a disc, injecting liquid and cleaning for optical polishing comprises a punching and spraying integrated head, a rotary bracket and a lifting mechanism; the internal liquid pipe is connected with a three-way valve inside the device and is a polishing liquid pump and a deionized water pump respectively. In the polishing process of the optical element, a polishing liquid pump is started, the polishing liquid is discharged from the flushing and spraying integrated head, and the flow of the polishing liquid can be changed according to the rotating speed of the pump, so that different liquid discharging requirements of liquid dropping, continuous liquid injection, atomization and the like are met; the clean in-process of deep bid, the deionized water pump is opened, dashes and spouts integrative head play deionized water, and the rotation of cooperation device self and support realizes the all-round washing of deep bid, and the polishing solution granule of remaining in the discharge line prevents to block up, deteriorate and pollute simultaneously.
Description
Technical Field
The invention relates to a technology of a precision polishing process of an optical element, in particular to an integrated device integrating functions of trimming, liquid spraying and flushing in high-precision polishing equipment and a using method thereof.
Background
In traditional optical polishing equipment, like a representative ring polishing machine, three functions of polishing liquid filling, large disc shape modification and large disc cleaning and flushing are independent from each other: the polishing solution is injected in two forms, namely dripping by a peristaltic pump and spraying by an atomizer; the shape correction is to correct the rubber disc through pressure generated by the self weight of the marble correction disc and rotating friction force, and when the shape correction is not needed, the marble needs to be taken down manually through the assistance of a suspension arm; the cleaning is a necessary maintenance means, and the subsequent processing quality can be ensured only by cleaning the asphalt or polyurethane with the rubber surface replaced each time. The three functions are mutually independent, and parts and pipelines are exposed outside, so that the problems of low integration level, complex operation, high equipment occupancy rate, poor attractiveness and the like are caused.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a shape correction, liquid spraying and flushing integrated device and method for high-precision polishing equipment.
The invention is realized by the following technical scheme:
the invention comprises the following steps: the device comprises a punching and spraying integrated head, a rotary support and a lifting mechanism.
The integrative head of dashing and spouting include: the polishing device comprises a cantilever plate, a spray head hollow rotary table, an internal liquid pipe, an external liquid pipe, a pipe clamp, a driving motor, a liquid separation block and a spray head, and is used for injecting polishing liquid and flushing a large disc during processing. Each part is installed according to the cooperation requirement, wherein: a cantilever plate is arranged on the top end face of the hollow rotary table of the spray head and is driven to rotate by a driving motor so as to adjust the spraying position; the inner liquid pipe penetrates through the cantilever plate and the spray head hollow rotary table so as to be connected with a liquid pump in the equipment; after the external liquid pipe is connected with the internal liquid pipe, the external liquid pipe is fixed in each pipe clamp to prevent the play and the water hammer effect; the liquid separation block is respectively connected with the end part of the external liquid pipe and the spray head.
The punching and spraying integrated head is arranged on the rotary support.
The rotary bracket comprises: mounting panel, bearing structure and the hollow revolving platform of support with motor. The supporting structure is provided with reinforcing ribs to increase the strength of the supporting structure; the mounting plate is arranged on the upper end surface of the supporting structure; the hollow rotary table of the bracket with the motor is arranged on the lower end surface of the supporting structure, so that the rotation of the whole mechanism is realized.
The lifting mechanism comprises: the device comprises a cylinder, a lifting hollow rotary table (with a motor), a disc repairing marble, a cylinder joint, a C-shaped clamp, a fixing pin, a transmission rod, a universal coupling, a limiting cylinder, a guide limiting rod, a flange plate and a shaft sleeve. Wherein: the cylinder is arranged on the mounting plate of the rotary bracket through the upright post frame; the cylinder extension rod is in threaded connection with the cylinder joint; the C-shaped clamp is sleeved on the thin rod of the cylinder joint, and the fixing pin penetrates through the transmission rod and the C-shaped clamp; the transmission rod completely penetrates through a shaft sleeve arranged on the lower end face of the lifting hollow rotary table; the bottom of the transmission rod is connected with a universal coupling, and the other end of the universal coupling is connected with a flange plate; the limiting cylinder is sleeved outside the universal coupling, and the end face of the limiting cylinder is installed on the flange plate; the guide limiting rod penetrates through the flange plate and is connected with a threaded steel sleeve of the repair plate marble.
The limiting cylinder is used for limiting the swinging amount of the universal coupling.
The direction gag lever post, guarantee that marble and ring flange are parallel all the time, ensure only a pin joint of universal joint, play the cushioning effect simultaneously, the impact when prevention cylinder is down. .
The section of the transmission rod is square, the transmission rod is precisely matched with the lifting hollow rotary table through a shaft sleeve with a square hole, the linear movement in the vertical direction is realized when the cylinder is lifted, and the transmission of the rotary torque is realized when the motor is driven during working.
The using method comprises the following steps: the inside liquid pipe of the device is connected with a three-way valve inside the equipment, namely a polishing liquid pump and a deionized water pump. In the polishing process of the optical element, a polishing liquid pump is started, the polishing liquid is discharged from the flushing and spraying integrated head, and the flow of the polishing liquid can be changed according to the rotating speed of the pump, so that different liquid discharging requirements of liquid dropping, continuous liquid injection, atomization and the like are met; the clean in-process of deep bid, the deionized water pump is opened, dashes and spouts integrative head play deionized water, and the rotation of cooperation device self and support realizes the all-round washing of deep bid, and the polishing solution granule of remaining in the discharge line prevents to block up, deteriorate and pollute simultaneously.
Compared with the prior art, the invention has the following beneficial effects:
1) The device is suitable for shape correction, liquid spraying and flushing in high-precision polishing equipment.
2) The precision disc repairing marble adopts natural marble with the precision of more than 00 grade, ensures the self-flatness, and simultaneously is matched with a universal flexible hinge to automatically attach the large polishing disc in a self-adaptive mode, thereby effectively ensuring the precision and the stability of the disc repairing; the flushing and spraying integrated head is highly integrated, 2 pipelines are combined into 1 pipeline, the occupancy rate of equipment is greatly reduced, no external pipeline exists, the attractiveness is increased, the automatic switching of liquid injection or flushing is realized by matching with a control system, the switching time is shortened, and the risk of residual blockage of polishing liquid particles in the pipelines is greatly reduced;
3) The cylinder is automatic to be played from top to bottom, and the cooperation revolving platform replaces former artifical hoist and mount, has effectively guaranteed the security of marble and has reduced the risk of artificial maloperation.
Drawings
FIG. 1 is a schematic diagram of the general structure of the present invention;
FIG. 2 is a schematic view of a portion of a punch and lance body of the present invention;
FIG. 3 is a schematic view of a portion of the rotatable mount of the present invention;
FIG. 4 is a schematic view of a portion of a pulling mechanism of the present invention 1;
FIG. 5 is a schematic view of a portion of a pulling mechanism of the present invention 2;
FIG. 6 is a schematic view of the present invention during installation;
fig. 7 is a schematic diagram of the present invention.
In the figure: the device comprises a punching and spraying integrated head 1, a rotary support 2, a lifting mechanism 3, a cantilever plate 4, a spray head hollow rotary table 5, an internal liquid pipe 6, an external liquid pipe 7, a pipe clamp 8, a driving motor 9, a liquid separation block 10, a spray head 11, an installation plate 12, a support structure 13, a support hollow rotary table with a motor 14, a cylinder 15, a column support 16, a lifting hollow rotary table (with a motor) 17, a repair plate marble 18, a cylinder joint 19, a C-shaped clamp 20, a fixing pin 21, a transmission rod 22, a universal coupling 23, a limiting cylinder 24, a guide limiting rod 25, a flange plate 26 and a shaft sleeve 27.
Detailed Description
The invention is described in further detail below with reference to the figures and examples, but the scope of the invention is not limited thereto.
As shown in figure 1, the invention provides a device integrating functions of shape modification, liquid spraying and flushing, which is used in high-precision polishing equipment, realizes safe, efficient, stable, clean and high-precision shape modification, liquid injection and flushing work in modes of a flushing and spraying integrated head, a rotary bracket, a lifting mechanism, an internal pipe and the like, and is suitable for polishing and processing of optical elements and equipment maintenance. The invention mainly comprises a punching and spraying integrated head 1, a rotary bracket 2 and a lifting mechanism 3.
As shown in fig. 2, the punching and spraying integrated head 1 mainly comprises: the polishing device comprises a cantilever plate 4, a spray head hollow rotary table 5, an inner liquid pipe 6, an outer liquid pipe 7, a pipe clamp 8, a driving motor 9, a liquid separation block 10 and a spray head 11, and is used for injecting polishing liquid during processing and flushing a large disc during cleaning. Each part is installed according to the cooperation requirement, wherein: the cantilever plate 4 is arranged on the top end face of the hollow rotary table 5 of the spray head and is driven to rotate by a driving motor 9 so as to adjust the spraying position; an internal liquid pipe 6 penetrates through the cantilever plate 4 and the spray head hollow rotary table 5 so as to be connected with a liquid pump inside the equipment; after being connected with the inner liquid pipe 6, the outer liquid pipe 7 is fixed in each pipe clamp 8 to prevent the play and the water hammer effect; the liquid separation block 10 is respectively connected with the end part of the external liquid pipe 7 and the spray head 11.
The inner liquid pipe 6 is made of soft materials, and torsion and breakage in the bending and rotating processes are prevented.
As shown in fig. 3, the rotating bracket 2 includes: mounting plate 12, support structure 13 and support hollow turntable (with motor) 14. The support structure 13 is provided with reinforcing ribs to increase the strength thereof; the mounting plate 12 is mounted on the upper end face of the support structure 13; a hollow rotary table (with a motor) 14 of the bracket is arranged on the end surface of the lower part of the supporting structure 13, so that the rotation of the whole mechanism is realized.
The supporting structure 13 is hollow inside, so that the inner liquid pipe 6 can penetrate into the device conveniently.
As shown in fig. 4 and 5, the lifting mechanism 3 includes: the device comprises an air cylinder 15, a column frame 16, a lifting hollow rotary table (with a motor) 17, a disc repairing marble 18, an air cylinder joint 19, a C-shaped clamp 20, a fixed pin 21, a transmission rod 22, a universal coupling 23, a limiting cylinder 24, a guide limiting rod 25, a flange 26 and a shaft sleeve 27. Wherein: the cylinder 15 is arranged on the mounting plate 12 of the rotary bracket 2 through a column bracket 16; the extending rod of the cylinder 15 is in threaded connection with a cylinder joint 19; the C-shaped clamp 20 is sleeved on a thin rod of the air cylinder joint 19, and the fixing pin 21 penetrates through the square transmission rod 22 and the C-shaped clamp 20; the transmission rod 22 is completely penetrated and arranged on a shaft sleeve 27 of the lower end surface of the lifting hollow rotary table (with a motor) 17; the bottom of the transmission rod 22 is connected with a universal coupling 23, and the other end of the universal coupling 23 is connected with a flange plate 26; the limiting cylinder 24 is sleeved outside the universal coupling 23, and the end face of the limiting cylinder is arranged on the flange plate 26; the guide limit rod 25 penetrates through the flange plate 26 to be connected with a threaded steel sleeve of the disc repairing marble 18.
The limiting cylinder 24 is used for limiting the swinging amount of the universal joint 23.
The direction gag lever post 25, guarantee that the precision is repaiied a set marble 18 and is parallel with ring flange 26 all the time, ensure only 23 pin joints of universal joint, play the cushioning effect simultaneously, the impact when prevention cylinder is down.
The section of the transmission rod 22 is square, the transmission rod is precisely matched with the lifting hollow rotary table (with a motor) 17 through a shaft sleeve 27 with a square hole, the linear movement in the vertical direction is realized when the cylinder 15 is lifted, and the transmission rod is driven by the lifting hollow rotary table (with the motor) 17 to realize the transmission of the rotary torque during the work. The transmission rod 22 is made of a material with a strong core part, the surface of the transmission rod is plated with hard chrome, and the transmission rod is straightened and polished after heat treatment.
As shown in fig. 6, the structure size of the present invention should satisfy the following conditions during the installation process:
if the stroke of the cylinder 15 is D, and the height difference between the cylinder joint 19 and the transmission rod 22 is h and the height difference between the guide limiting rod 25 and the flange 26 is L in the working state, the relationship should satisfy:
the operation method of the invention is as follows:
the device has two functions of repairing the disc and discharging liquid. The repairing plate part utilizes a servo motor to accurately control the rotary table, so that the integral accurate rotary positioning is realized, the repeated position accuracy of a working position and a standby position is ensured, the marble of the lifting repairing plate is attached to a large plate or separated from the large plate by utilizing the expansion of the air cylinder, and the switching between the working state and the non-working state is realized; the liquid inlet of going out the liquid structure is located the inside of the used equipment of this device, and liquid inlet department has installed the three-way valve, connects the pipeline of polishing solution and deionized water respectively, cooperates the check valve to prevent the refluence. The liquid pipe passes through the inside of the device, and the attractiveness of the table top of the equipment is not affected. The principle is shown in fig. 7.
1. And (3) polishing state: when the optical element is polished, the motor driving device rotates to a working position above the polishing large disc. At this moment, the rotation type support is little contained angle state with dashing and spouts integrative head, and the two simultaneous working: the air cylinder puts down the precision repair plate marble, so that the precision repair plate marble is attached to the end face of the large plate by means of self weight, and meanwhile, the polishing liquid pump is started, and the polishing liquid is fed into the liquid inlet. The flushing and spraying integrated head adopts a quick-change connector, an atomizing nozzle, a shower nozzle, a flat nozzle and the like can be installed according to requirements, the flow of polishing liquid can be changed by adjusting the rotating speed of a liquid pump and the valve switch size of a liquid outlet in a matching manner, and different liquid outlet requirements of liquid dropping, continuous liquid injection, atomization and the like required in the processing of different optical elements are met;
2. cleaning state: the large disc needs to be cleaned regularly to ensure the polishing quality. When the large plate is cleaned, the device is transferred to a waiting working area. At the moment, the rotary support and the punching and spraying integrated head are in a large included angle state, the disc repairing device does not work, and the air cylinder lifts the precision disc repairing marble away from the large polishing disc; the flushing and spraying integrated head still works, the polishing liquid pump is closed, the deionized water pump is opened, the liquid inlet enters deionized water, the flushing and spraying integrated head outputs the deionized water, and the large plate is flushed in all directions by matching with the rotation of the spray head support. When the polishing solution is washed, the deionized water discharges residual polishing solution particles in a pipeline, a valve, a spray head and the like, so that blockage, deterioration and pollution are prevented.
The invention is suitable for shape modification, liquid spraying and flushing in high-precision polishing equipment. The universal flexible self-adaptive precision disc repairing marble automatically attaches to a large polishing disc, and effectively ensures the precision and stability of the disc repairing; the flushing and spraying integrated head is highly integrated, so that the occupancy rate of equipment is greatly reduced, no external pipeline exists, the attractiveness is improved, the control system is matched for automatically switching liquid injection or flushing, the switching time is shortened, and the risk of residual and blockage of polishing liquid particles of the pipeline is greatly reduced; the cylinder is lifted and placed automatically up and down, and the rotary table is matched to replace the original manual hoisting, so that the safety of the marble is effectively guaranteed, and the risk of manual misoperation is reduced.
The foregoing embodiments may be modified in many different ways by one skilled in the art without departing from the spirit and scope of the invention, which is defined by the appended claims and not by the preceding embodiments, and all embodiments within their scope are intended to be limited by the scope of the invention.
Claims (8)
1. A disc repairing, liquid injection and cleaning three-in-one device for optical polishing processing is characterized by comprising a flushing and spraying integrated head (1), a rotary support (2) and a lifting and pulling mechanism (3);
the flushing and spraying integrated head (1) comprises a cantilever plate (4), a hollow rotary table (5) of the spray head, an internal liquid pipe (6), an external liquid pipe (7), a driving motor (9), a liquid separation block (10) and the spray head (11);
the external liquid pipe (7) is fixed on the cantilever plate (4), one end of the external liquid pipe (7) is connected with the spray head (11) through the liquid dividing block (10), the other end of the external liquid pipe is connected with one end of the internal liquid pipe (6), and the other end of the internal liquid pipe (6) is respectively connected with a polishing liquid pump and a deionized water pump through a three-way valve;
the cantilever plate (4) is arranged at the top of the spray head hollow rotary table (5), and the spray head hollow rotary table (5) is connected with the driving motor (9) so as to drive the cantilever plate (4) to rotate and control the spraying position of the spray head (11);
the rotary support (2) comprises a mounting plate (12), a supporting structure (13) and a support hollow rotary table (14) with a motor;
the mounting plate (12) is mounted on the support structure (13), and the bottom of the support structure (13) is connected with the support hollow rotary table (14) so as to drive the mounting plate (12) to rotate;
the lifting mechanism (3) comprises a cylinder (15), a column frame (16), a lifting hollow rotary table (17) with a motor, a repairing marble (18), a connecting mechanism (19-22), a limiting mechanism (23-25) and a flange plate (26);
the cylinder (15) is fixed on the upper part of one side of the mounting plate (12) through the upright post frame, the lower part of the same side of the mounting plate (12) is fixed with the lifting hollow rotary table (17), and the upper part of the other side of the mounting plate (12) is fixed with the spray head hollow rotary table (5);
the bottom of an extension rod of the air cylinder (15) is connected with one end of a transmission rod (22) through the connecting structure, the other end of the transmission rod (22) penetrates through the mounting plate (12) and a shaft sleeve (27) of the lifting hollow rotary table (17) and is connected with the upper end face of the flange plate (26) through the limiting mechanism, and the lower end face of the flange plate (26) is provided with the repair plate marble (18)
The transmission rod (22) is matched with the shaft sleeve (27), so that the cylinder (15) can move linearly in the vertical direction to be lifted, and the hollow rotary table (17) is lifted to realize the transmission of rotary torque.
2. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing processing as claimed in claim 1, wherein the connecting structure comprises a cylinder joint (19), a C-shaped clamp (20) and a fixing pin (21); the utility model discloses a pneumatic control system, including cylinder (15), cylinder joint (19), C shape card (20), fixed pin (21) pass C shape card (20) and transfer line (22), the extension bar bottom of cylinder (15) with cylinder joint (19) threaded connection, the cover is established to C shape card (20) on the pin rod of cylinder joint (19).
3. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing processing as claimed in claim 1, wherein the limiting mechanism comprises a universal coupling (23), a limiting cylinder (24) and a guiding limiting rod (25); the bottom of transfer line (22) with the one end of universal joint (23) is connected, this universal joint (23) other end with ring flange (26) are connected, spacing section of thick bamboo (24) cover is in outside universal joint (23), and end-face mounting in ring flange (26), direction gag lever post (25) run through ring flange (26) are connected with the screw thread steel bushing of repairing a set marble (18), direction gag lever post (25) ensure repair set marble (18) and ring flange (26) parallel all the time, and only a pin joint of universal joint (23), play the cushioning effect simultaneously, the impact when prevention cylinder is down.
4. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing machining as claimed in claim 1, wherein the transmission rod (22) is square, and a shaft sleeve (27) of the lifting hollow rotary table (17) is provided with a square hole matched with the transmission rod (22) to penetrate through.
5. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing processing as claimed in any one of claims 1 to 4, wherein a plurality of pipe clamps (8) are further provided outside the outer liquid pipe (7) for preventing the play and water hammer effect.
6. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing processing according to any one of claims 1 to 4, wherein the transmission rod (22) is made of a material with a strong core part and is coated with hard chrome on the surface, and is straightened and repaired after heat treatment.
7. The disc repairing, liquid injecting and cleaning three-in-one device for optical polishing processing according to any one of claims 1 to 4, wherein in the working state, the height difference h between the cylinder joint (19) and the transmission rod (22) and the height difference L between the guide limiting rod (25) and the flange plate (26) satisfy the following conditions:
wherein D is the stroke of the cylinder (15).
8. The device for optical polishing process, which is triple-unit type of disc repairing, liquid injection and cleaning according to any one of claims 1-4, wherein the supporting structure (13) is provided with a reinforcing rib for increasing the strength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211009533.7A CN115431153A (en) | 2022-08-22 | 2022-08-22 | Disc repairing, liquid injection and cleaning three-in-one device and method for optical polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211009533.7A CN115431153A (en) | 2022-08-22 | 2022-08-22 | Disc repairing, liquid injection and cleaning three-in-one device and method for optical polishing |
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| Publication Number | Publication Date |
|---|---|
| CN115431153A true CN115431153A (en) | 2022-12-06 |
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| CN202211009533.7A Pending CN115431153A (en) | 2022-08-22 | 2022-08-22 | Disc repairing, liquid injection and cleaning three-in-one device and method for optical polishing |
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| CN (1) | CN115431153A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117772685B (en) * | 2024-02-27 | 2024-04-26 | 浙江大铭汽车零部件有限公司 | Inner flange cleaning equipment |
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| JPH10180613A (en) * | 1996-12-24 | 1998-07-07 | Toshiba Mach Co Ltd | Polishing device |
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| CN113474121A (en) * | 2019-03-06 | 2021-10-01 | 株式会社荏原制作所 | Substrate processing apparatus |
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2022
- 2022-08-22 CN CN202211009533.7A patent/CN115431153A/en active Pending
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|---|---|---|---|---|
| JPH10180613A (en) * | 1996-12-24 | 1998-07-07 | Toshiba Mach Co Ltd | Polishing device |
| US6609962B1 (en) * | 1999-05-17 | 2003-08-26 | Ebara Corporation | Dressing apparatus and polishing apparatus |
| JP2001246550A (en) * | 2000-03-02 | 2001-09-11 | Ebara Corp | Polishing device |
| CN103839857A (en) * | 2008-06-04 | 2014-06-04 | 株式会社荏原制作所 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method |
| CN101786262A (en) * | 2009-01-28 | 2010-07-28 | 株式会社荏原制作所 | Be used to repair equipment, chemical-mechanical grinding device and the method for grinding pad |
| CN102528651A (en) * | 2010-12-21 | 2012-07-04 | 中国科学院微电子研究所 | Chemical mechanical polishing equipment and preheating method for same |
| CN208788326U (en) * | 2018-10-08 | 2019-04-26 | 杭州智谷精工有限公司 | The liquor charging and cleaning system of biplane polissoir |
| CN113474121A (en) * | 2019-03-06 | 2021-10-01 | 株式会社荏原制作所 | Substrate processing apparatus |
| CN111618736A (en) * | 2020-04-20 | 2020-09-04 | 北京烁科精微电子装备有限公司 | Chemical mechanical planarization equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117772685B (en) * | 2024-02-27 | 2024-04-26 | 浙江大铭汽车零部件有限公司 | Inner flange cleaning equipment |
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