CN212705981U - Gallium arsenide crystal seed processing equipment - Google Patents

Gallium arsenide crystal seed processing equipment Download PDF

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Publication number
CN212705981U
CN212705981U CN202021507926.7U CN202021507926U CN212705981U CN 212705981 U CN212705981 U CN 212705981U CN 202021507926 U CN202021507926 U CN 202021507926U CN 212705981 U CN212705981 U CN 212705981U
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CN
China
Prior art keywords
dust
seat
fixed
fixedly arranged
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202021507926.7U
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Chinese (zh)
Inventor
郭辉
刘欣
蔡祗首
杨涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huizhou Zhonghuiyuhang Semiconductor New Material Co ltd
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Huizhou Zhonghuiyuhang Semiconductor New Material Co ltd
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Application filed by Huizhou Zhonghuiyuhang Semiconductor New Material Co ltd filed Critical Huizhou Zhonghuiyuhang Semiconductor New Material Co ltd
Priority to CN202021507926.7U priority Critical patent/CN212705981U/en
Application granted granted Critical
Publication of CN212705981U publication Critical patent/CN212705981U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model belongs to the technical field of gallium arsenide production technique and specifically relates to a gallium arsenide seed crystal processing equipment, including the dust-proof box, the fixed water conservancy diversion platform that is equipped with of dust-proof box, the water conservancy diversion platform rotates to be connected and is equipped with the transmission shaft, the fixed disk of polishing that is equipped with of transmission shaft, the fixed gear motor that is equipped with of transmission shaft, spout sliding connection is equipped with removes the seat, remove the fixed electro-hydraulic cylinder that is equipped with of seat, the fixed regulation fixing base that is equipped with of electro-hydraulic cylinder, it is equipped with the regulating spindle to adjust the fixing base rotation connection, the fixed step motor that is equipped with of regulating spindle, the fixed regulation seat that is. The utility model discloses on the basis of ordinary processing equipment, set up protection, drive and adjusting device, improved accuracy, work efficiency, feature of environmental protection and protectiveness, had wide market prospect, be fit for promoting.

Description

Gallium arsenide crystal seed processing equipment
Technical Field
The utility model relates to a gallium arsenide production technical field especially relates to a gallium arsenide seed crystal processing equipment.
Background
Gallium arsenide (galliumarsenide), chemical formula GaAs. Dark gray solid, melting point 1238 ℃. It is stable in air at temperatures below 600 deg.C and is not attacked by non-oxidizing acids. Gallium arsenide is an important semiconductor material. In the gallium arsenide crystal manufacturing field, after the primary processing is completed, the seed crystal length is required to be further processed to reach the target length, however, at present, manual sand paper polishing is usually used, the efficiency is low, dust is easily formed on polished waste materials, waste is caused, the body of workers is damaged, and aiming at the defects, a gallium arsenide seed crystal processing device is pushed out to replace an old processing device, and the living requirements of people are met.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects of low efficiency and environmental pollution existing in the prior art and providing gallium arsenide seed crystal processing equipment.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
design a gallium arsenide crystal seed processing device, which comprises a dust-proof box, wherein a flow guide table is fixedly arranged on one side of the bottom of the inner wall of the dust-proof box, the flow guide table is rotatably connected with a transmission shaft, a polishing disc is fixedly arranged at one end of the transmission shaft, which is far away from the polishing disc, sequentially penetrates through the flow guide table and the dust-proof box and is fixedly provided with a speed reduction motor, the speed reduction motor is fixedly connected with the dust-proof box, a chute is arranged in the middle of the upper surface of the dust-proof box, a moving seat is slidably connected with the inner wall of the chute, a driving assembly for enabling the moving seat to generate displacement is fixedly arranged on the upper surface of the dust-proof box, an electric hydraulic cylinder is fixedly arranged in the middle of the lower surface of the moving seat, an adjusting fixed seat is fixedly arranged at one end of the electric hydraulic, the fixed step motor that is equipped with of one end of regulating spindle, step motor and regulation fixing base fixed connection, the fixed regulation seat that is equipped with of regulating spindle, the lower fixed surface of adjusting the seat is equipped with the anchor clamps subassembly.
Preferably, a U-shaped supporting seat is fixedly arranged on one side of the lower surface of the dust-proof box, a flow guide pipeline is fixedly arranged on one side, away from the U-shaped supporting seat, of the lower surface of the dust-proof box, a through hole communicated with the flow guide pipeline is formed in one side, away from the flow guide platform, of the bottom of the inner wall of the dust-proof box, a water storage tank is fixedly arranged on the lower surfaces of the U-shaped supporting seat and the flow guide pipeline, a filtering assembly is arranged in the flow guide pipeline in an inserted mode, a water outlet pipe is fixedly arranged on one side of the water storage tank, a circulating water pump is fixedly arranged at one end, away from the water storage tank, of the water outlet pipe, the circulating water pump is fixedly connected with the dust-proof box, a.
Preferably, the driving assembly comprises two fixed blocks, the fixed blocks are fixedly connected with the dust-proof box, the two fixed blocks are rotatably connected with a threaded lead screw, one end of the threaded lead screw penetrates through the fixed blocks and is fixedly provided with a driving motor, the driving motor is fixedly connected with the fixed blocks, a moving block is arranged on the surface of the threaded lead screw in a threaded connection mode, and the moving block is fixedly connected with the moving base.
Preferably, the dustproof box is symmetrically provided with box doors in a rotating connection through hinges, and the box doors are fixedly provided with observation covers.
The utility model provides a pair of gallium arsenide seed crystal processing equipment, beneficial effect lies in: the utility model discloses a dust proof box, the water conservancy diversion platform, the water conservancy diversion pipeline, the through hole, the storage water tank, filtering component, the outlet pipe, circulating water pump, mutually support between spray pipe and the shower nozzle, can effectually prevent the phenomenon that the gallium arsenide seed crystal dust splashes when polishing, can recycle the water resource simultaneously, the feature of environmental protection performance preferred, through the transmission shaft, the polishing dish, gear motor, the spout, remove the seat, drive assembly, electric hydraulic cylinder, adjust the fixing base, the flexible post of direction, the regulating spindle, step motor, adjust mutually supporting between seat and the anchor clamps subassembly, can control the angle of polishing as required when having improved the accuracy of polishing, the intensity of labour who has reduced the staff has improved work efficiency, observe the cover through setting up, the staff of being convenient for carries out real-time observation to the condition of polishing.
Drawings
Fig. 1 is a front view of a gallium arsenide seed crystal processing apparatus according to the present invention;
fig. 2 is a cross-sectional view of the gallium arsenide seed crystal processing apparatus provided by the present invention.
In the figure: the device comprises a dust-proof box 1, a flow guide table 2, a transmission shaft 3, a polishing disc 4, a speed reducing motor 5, a chute 6, a moving seat 7, a driving component 8, an electric hydraulic cylinder 9, an adjusting fixed seat 10, a guiding telescopic column 11, an adjusting shaft 12, a stepping motor 13, an adjusting seat 14, a clamp component 15, a U-shaped supporting seat 16, a flow guide pipeline 17, a through hole 18, a water storage tank 19, a filtering component 20, a water outlet pipe 21, a circulating water pump 22, a water spray pipe 23, a spray head 24, a box door 25, an observation cover 26, a driving motor 801, a threaded screw rod 802, a fixed block 803 and a moving.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-2, a gallium arsenide seed crystal processing device comprises a dust-proof box 1, a flow guide table 2 is fixedly arranged on one side of the bottom of the inner wall of the dust-proof box 1, the flow guide table 2 is rotatably connected with a transmission shaft 3, a polishing disc 4 is fixedly arranged at one end of the transmission shaft 3, which is far away from the polishing disc 4, sequentially penetrates through the flow guide table 2 and the dust-proof box 1 and is fixedly provided with a speed reduction motor 5, the speed reduction motor 5 is fixedly connected with the dust-proof box 1, a chute 6 is arranged in the middle of the upper surface of the dust-proof box 1, a moving seat 7 is slidably connected with the inner wall of the chute 6, a driving assembly 8 for enabling the moving seat 7 to generate displacement is fixedly arranged on the upper surface of the dust-proof box 1, an electric hydraulic cylinder 9 is fixedly arranged in the middle of the lower surface of the moving seat 7, adjust fixing base 10 and rotate to connect and be equipped with regulating spindle 12, the fixed step motor 13 that is equipped with of one end of regulating spindle 12, step motor 13 and regulation fixing base 10 fixed connection, the fixed regulation seat 14 that is equipped with of regulating spindle 12, the lower fixed surface of regulation seat 14 is equipped with anchor clamps subassembly 15.
Referring to fig. 1-2, a gallium arsenide seed crystal processing device, a U-shaped supporting seat 16 is fixedly arranged on one side of the lower surface of a dust-proof box 1, a flow guide pipeline 17 is fixedly arranged on one side of the lower surface of the dust-proof box 1 away from the U-shaped supporting seat 16, a through hole 18 communicated with the flow guide pipeline 17 is arranged on one side of the inner wall bottom of the dust-proof box 1 away from the flow guide platform 2, a water storage tank 19 is fixedly arranged on the lower surfaces of the U-shaped supporting seat 16 and the flow guide pipeline 17, a filtering component 20 is inserted in the flow guide pipeline 17, a water outlet pipe 21 is fixedly arranged on one side of the water storage tank 19, a circulating water pump 22 is fixedly arranged on one end of the water outlet pipe 21 away from the water storage tank 19, the circulating water pump 22 is fixedly connected with the dust-proof box 1, a water spray pipe 23 is fixedly arranged at a water outlet of, fixed block 803 all with dust proof box 1 fixed connection, two fixed blocks 803 rotate to be connected and are equipped with screw lead screw 802, the one end of screw lead screw 802 runs through fixed block 803 and fixedly is equipped with driving motor 801, driving motor 801 and fixed block 803 fixed connection, the surface threaded connection of screw lead screw 802 is equipped with movable block 804, movable block 804 with remove seat 7 fixed connection, dust proof box 1 symmetry is connected through the hinge rotation and is equipped with chamber door 25, chamber door 25 all fixes being equipped with and observes cover 26.
The utility model provides a gallium arsenide seed crystal processing equipment, when using, the staff will wait to polish gallium arsenide seed crystal fix on anchor clamps subassembly 15, then close chamber door 25 and input relevant data on the controller, controller control driving motor 801 begins work and makes screw lead screw 802 begin to rotate, moving block 804 drives removal seat 7 to begin to move along with, electric hydraulic cylinder 9 begins work simultaneously and promotes gallium arsenide seed crystal to begin to move until moving gallium arsenide seed crystal to appropriate position, then gear motor 5 begins work makes polishing dish 4 begin to rotate, polish work, controller control step motor 13 begins work when needing to polish other angles of gallium arsenide seed crystal, adjust the angle of gallium arsenide seed crystal under the cooperation of regulating spindle 12 and regulating seat 14, then polish under the cooperation of driving assembly 8 and electric hydraulic cylinder 9, in the polishing process, the circulating water pump 22 starts to work, liquid in the water storage tank 19 sequentially passes through the water outlet pipe 21 and the water spraying pipe 23, is finally sprayed on the surface of the polishing disc 4 through the spray head 24, is prevented from splashing dust under the matching of the dust-proof box 1, and then falls back to the water storage tank 19 for recycling under the guiding of the guiding table 2 and the filtering of the filtering component 20.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (4)

1. Gallium arsenide crystal seed processing equipment comprises a dust box (1) and is characterized in that a flow guide table (2) is fixedly arranged on one side of the bottom of the inner wall of the dust box (1), the flow guide table (2) is rotatably connected with a transmission shaft (3), a polishing disc (4) is fixedly arranged at one end of the transmission shaft (3), one end, far away from the polishing disc (4), of the transmission shaft (3) sequentially penetrates through the flow guide table (2) and the dust box (1) and is fixedly provided with a speed reduction motor (5), the speed reduction motor (5) is fixedly connected with the dust box (1), a sliding groove (6) is arranged in the middle of the upper surface of the dust box (1), a moving seat (7) is arranged in sliding connection with the inner wall of the sliding groove (6), a driving assembly (8) enabling the moving seat (7) to generate displacement is fixedly arranged on the upper surface of the dust box (1), an electric hydraulic cylinder (9) is fixedly arranged in the middle of the lower surface of, the fixed regulation fixing base (10) that is equipped with of one end of keeping away from removal seat (7) in electric hydraulic cylinder (9), adjust fixing base (10) and remove between seat (7) the symmetry fixed direction flexible post (11) that is equipped with, it is equipped with regulating spindle (12) to adjust fixing base (10) rotation connection, the one end of regulating spindle (12) is fixed and is equipped with step motor (13), step motor (13) and regulation fixing base (10) fixed connection, regulating spindle (12) are fixed and are equipped with regulation seat (14), the lower fixed surface of regulating seat (14) is equipped with anchor clamps subassembly (15).
2. The gallium arsenide seed crystal processing equipment according to claim 1, wherein a U-shaped supporting seat (16) is fixedly arranged on one side of the lower surface of the dust-proof box (1), a flow guide pipeline (17) is fixedly arranged on one side of the lower surface of the dust-proof box (1) far away from the U-shaped supporting seat (16), a through hole (18) communicated with the flow guide pipeline (17) is arranged on one side of the bottom of the inner wall of the dust-proof box (1) far away from the flow guide platform (2), a water storage tank (19) is fixedly arranged on the lower surfaces of the U-shaped supporting seat (16) and the flow guide pipeline (17), a filtering component (20) is inserted into the flow guide pipeline (17), a water outlet pipe (21) is fixedly arranged on one side of the water storage tank (19), a circulating water pump (22) is fixedly arranged on one end of the water outlet pipe (21) far away from the water storage tank, a water spray pipe (23) is fixedly arranged at a water outlet of the circulating water pump (22), and one end, far away from the circulating water pump (22), of the water spray pipe (23) penetrates through the dust-proof box (1) and extends to the inside of the dust-proof box (1) and is fixedly provided with a spray head (24).
3. The gallium arsenide seed crystal processing device according to claim 1, wherein the driving assembly (8) comprises two fixing blocks (803), the fixing blocks (803) are both fixedly connected with the dust-proof box (1), the two fixing blocks (803) are rotatably connected to each other and provided with a threaded lead screw (802), one end of the threaded lead screw (802) penetrates through the fixing blocks (803) and is fixedly provided with a driving motor (801), the driving motor (801) is fixedly connected with the fixing blocks (803), a surface of the threaded lead screw (802) is connected to each other by a thread and provided with a moving block (804), and the moving block (804) is fixedly connected with the moving base (7).
4. The gallium arsenide seed crystal processing equipment according to claim 1, wherein the dustproof box (1) is symmetrically provided with box doors (25) through hinge rotation connection, and the box doors (25) are respectively fixedly provided with an observation cover (26).
CN202021507926.7U 2020-07-27 2020-07-27 Gallium arsenide crystal seed processing equipment Expired - Fee Related CN212705981U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021507926.7U CN212705981U (en) 2020-07-27 2020-07-27 Gallium arsenide crystal seed processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021507926.7U CN212705981U (en) 2020-07-27 2020-07-27 Gallium arsenide crystal seed processing equipment

Publications (1)

Publication Number Publication Date
CN212705981U true CN212705981U (en) 2021-03-16

Family

ID=74909227

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202021507926.7U Expired - Fee Related CN212705981U (en) 2020-07-27 2020-07-27 Gallium arsenide crystal seed processing equipment

Country Status (1)

Country Link
CN (1) CN212705981U (en)

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20210316