CN115418626A

CN115418626A - Film coating equipment

Info

Publication number: CN115418626A
Application number: CN202211009911.1A
Authority: CN
Inventors: 严大; 左敏
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2022-08-22
Filing date: 2022-08-22
Publication date: 2022-12-02
Anticipated expiration: 2042-08-22
Also published as: CN115418626B

Abstract

The application relates to the technical field of mechanical equipment and provides coating equipment. The coating equipment comprises a sealing door, a mounting plate, a spraying plate and an adjusting piece. The mounting plate is slidably disposed on the closure door. The spray plate is arranged on the mounting plate. An adjustment member is provided on the closure door and/or the mounting plate for adjusting the position of the mounting plate relative to the closure door. This application can adjust the shower plate position relative to the closing door.

Description

Film coating equipment

Technical Field

The application relates to the technical field of mechanical equipment, in particular to coating equipment.

Background

In the current Atomic Layer Deposition (ALD) coating equipment, a spray plate is fixedly arranged on a closed door, and the position between the spray plate and the closed door cannot be adjusted.

Disclosure of Invention

In view of this, the present application provides a coating apparatus capable of adjusting a position of a shower plate relative to a closed door.

In order to solve the technical problem, the application adopts a technical scheme that: the coating equipment comprises a sealing door, a mounting plate, a spray plate and an adjusting piece. The mounting plate is slidably disposed on the closure door. The spray plate is arranged on the mounting plate. An adjustment member is provided on the closure door and/or the mounting plate for adjusting the position of the mounting plate relative to the closure door.

In some embodiments of the present application, the adjusting member includes a first slider and a first screw. The first slider can drive the mounting plate to move so as to adjust the mounting plate relative to the closing door. The first sliding block is arranged on the closed door and is in threaded connection with the first screw rod. The first slider moves along the first threaded bar in a direction parallel to the closing door. Wherein, the mounting panel is installed on first slider.

In some embodiments of the present application, the adjusting member includes a second slider and a second screw. The second screw rod is arranged on the first sliding block. The second sliding block is in threaded connection with a second screw rod, and the second sliding block moves along the second screw rod in the direction parallel to the closed door. Wherein, the mounting panel is installed on the second slider. The first screw and the second screw are crossed.

In some embodiments of the present application, the plating device includes a retaining member. The locking piece is arranged on the sealing door and used for locking the mounting plate and the sealing door.

In some embodiments of the present application, a coating apparatus includes an outer housing and an inner housing. One end of the outer shell and one end of the inner shell are provided with openings. The inner shell is arranged inside the outer shell, and the opening of the inner shell and the opening of the outer shell are positioned on the same side. The inner shell is provided with a gas flow passage. The gas inlet of the gas flow passage is positioned on the side wall of the inner shell, and the gas outlet of the gas flow passage is positioned on the opening end face of the inner shell. After the locking piece locks the mounting plate and the sealing door, when the sealing door closes the opening of the outer shell, the spraying plate closes the opening of the inner shell, and the air inlet of the spraying plate is communicated with the air outlet of the air flow channel.

In some embodiments of the present application, the coating apparatus includes a support. The supporting piece is arranged on the outer shell and used for supporting the inner shell.

In some embodiments of the present application, the number of the supporting members is four, and the supporting members are distributed around the inner shell.

In some embodiments of the present application, the supports are each adjustable in length such that the position of the inner housing within the outer housing is adjustable.

In some embodiments of the present application, the coating apparatus includes a first conduit. The first pipeline is used for inputting gas. The gas outlet of the first pipeline is communicated with the gas inlet of the gas flow passage of the inner shell.

In some embodiments of the present application, a coating apparatus includes a carrier. The carrier is located in the inner shell and used for bearing products. The product is vertically placed on the carrier. The product is parallel to the flow direction of the gas output from the shower plate.

In some embodiments of the present application, the coating apparatus includes a valve. The valve is arranged on the first pipeline and used for controlling the first pipeline to open and close.

The beneficial effect of this application is: the coating equipment comprises a sealing door, a mounting plate, a spraying plate and an adjusting piece. The mounting plate is slidably disposed on the closure door. The spray plate is arranged on the mounting plate. An adjustment member is disposed on the closure door and/or the mounting plate for adjusting the position of the mounting plate relative to the closure door. This application is adjusted the position of mounting panel for the closed door through the regulating part for the relative position of shower plate closed door is adjustable.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts. Wherein:

FIG. 1 shows a sealing door and a shower plate according to an embodiment of the present invention;

FIG. 2 is a front view of one embodiment of the coating apparatus of the present application (with the closing door omitted);

fig. 3 is a right side view of fig. 1.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of and not restrictive on the broad application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Please refer to fig. 1 to 3. Fig. 1 is a closing door 40 and a shower plate 50 of an embodiment of the plating apparatus of the present application, fig. 2 is a front view (the closing door 40 is omitted) of the embodiment of the plating apparatus of the present application, and fig. 3 is a right side view of fig. 1.

In some embodiments, the coating apparatus includes a closure door 40, a mounting plate 11, a shower plate 50, and an adjustment member (described later). The mounting plate 11 is slidably disposed on the closure door 40. The shower plate 50 is provided on the mounting plate 11. Adjustment members are provided on the closure door 40 and/or the mounting plate 11 for adjusting the position of the mounting plate 11 relative to the closure door 40. In some embodiments, the mounting plate 11 is slidably disposed on the closure door 40 by way of a wire-rail fit. The shower plate 50 is disposed on the mounting plate 11 such that the shower plate 50 is slidable relative to the closure door 40.

In some embodiments, the adjustment member is disposed on the closure door 40. The adjustment adjusts the position of the mounting plate 11 relative to the closure door 40, and thus the position of the shower plate 50 on the mounting plate 11 and the closure door 40.

In some embodiments, an adjustment member is provided on the mounting plate 11 for adjusting the position of the mounting plate 11 relative to the closure door 40. Illustratively, the adjustment member is a motor that precisely adjusts the position of the mounting plate 11 relative to the closure door 40.

In some embodiments, the adjusting member includes a first slider 31 and a first screw 32. The first slider 31 is able to move the mounting plate 11 to adjust the position of the mounting plate 11 relative to the closing door 40. The first slider 31 is disposed on the closing door 40 and is screwed with the first screw 32. The first slider 31 moves along the first screw 32 in a direction parallel to the closing door 40. Wherein the mounting plate 11 is mounted on the first slider 31. In some embodiments, the first slider 31 can be moved along the first screw 32 by rotating the first screw 32. When the first screw 32 is horizontally disposed, the first slider 31 is horizontally moved. The mounting plate 11 on the first slide block 31 is driven by the first slide block 31 to move horizontally, so that the position of the shower plate 50 in the horizontal direction is adjustable. When the first screw 32 is vertically placed, the first slider 31 is vertically moved. The mounting plate 11 on the first sliding block 31 is driven by the first sliding block 31 to move vertically, so that the position of the shower plate 50 in the vertical direction is adjustable.

In some embodiments, the adjusting member includes a second slider 33 and a second screw 34. The second screw 34 is disposed on the first slider 31. The second slider 33 is screwed to the second threaded bar 34, the second slider 33 moving along the second threaded bar 34 in a direction parallel to the closing door 40. Wherein the mounting plate 11 is mounted on the second slider 33. The first screw 32 and the second screw 34 are crossed. Specifically, the first screw 32 and the second screw 34 are crossed so that the mounting plate 11 on the second slider 33 can move in two different directions.

In some embodiments, the second slider 33 can be moved along the second screw 34 by rotating the second screw 34. When the first screw 32 and the second screw 34 are both horizontally disposed, the second slider 33 can move a greater distance in the horizontal direction. As shown in fig. 1, in some embodiments, the first screw 32 is positioned vertically and the second screw 34 is positioned horizontally. The first and

second screws

32 and 34 may be simultaneously rotated so that the mounting plate 11 is rapidly moved to a predetermined position.

In some embodiments, the plating apparatus includes a retaining member 35. The locking member 35 is disposed on the sealing door 40 for locking the mounting plate 11 and the sealing door 40.

In some embodiments, the retaining member 35 may fix the relative position of the mounting plate 11 to the closing door 40 after the mounting plate 11 is moved to a predetermined position by the adjusting member, and the position of the mounting plate 11 may be shifted during the machining process. In some embodiments, the locking member 35 is a bolt and the closure door 40 has corresponding threads for locking the mounting plate 11 to the closure door 40.

In some embodiments, the coating apparatus includes an outer housing 10 and an inner housing 20. The outer case 10 and the inner case 20 have an opening at one end. The inner housing 20 is disposed inside the outer housing 10, and the opening of the inner housing 20 and the opening of the outer housing 10 are located on the same side. The inner housing 20 has a gas flow passage 21 therein. The gas inlet of the gas flow passage 21 is located on the side wall of the inner housing 20, and the gas outlet of the gas flow passage 21 is located on the open end face of the inner housing 20. After the locking member 35 locks the mounting plate 11 and the sealing door 40, when the sealing door 40 closes the opening of the outer housing 10, the spraying plate 50 closes the opening of the inner housing 20 and the air inlet of the spraying plate 50 is communicated with the air outlet of the air channel 21.

In some embodiments, the outer housing 10 is horizontally disposed with the inner housing 20. One end of the outer case 10 and the inner case 20 has an opening and the other end is closed. The inner housing 20 is disposed inside the outer housing 10, and the opening of the inner housing 20 and the opening of the outer housing 10 are located on the same side. In some embodiments, the inner shell 20 and the outer shell 10 are both cylindrical. The shape and size of the inner housing 20 and the outer housing 10 may be set according to actual circumstances.

In some embodiments, when the closing door 40 is opened, the inner housing 20 and the outer housing 10 are in communication with the outside, and a user can repair devices inside the inner housing 20 and the outer housing 10 or place a product inside the inner housing 20 or the outer housing 10 through the openings of the outer housing 10 and the inner housing 20. When the closing door 40 is closed, the outer case 10 is simultaneously sealed from the outside with the inner case 20. The structure and shape of the shower plate 50 may be set according to actual circumstances. In this embodiment, the shower plate 50 has the same size and shape as the open end surface of the inner housing 20.

In some embodiments, the inlet of the shower plate 50 is the same size as the outlet of the gas flow channel 21. When the closing door 40 is closed, the gas inlet of the shower plate 50 may not be in contact with the gas outlet of the gas flow channel 21, or only partially in contact with the gas outlet of the gas flow channel 21, which may affect the gas transmission efficiency. The position of the shower plate 50 relative to the open end face of the inner housing 20 can be adjusted by the adjusting member, so that the gas inlet of the shower plate 50 is precisely butted with the gas outlet of the gas channel 21.

In some embodiments, different shower plates 50 may be used for different products, with different shower plates 50 having different inlet openings positioned. The position of the spray plate 50 is adjusted by the adjusting member, and the relative position of the mounting plate 11 with respect to the closing door 40 is fixed by the locking member 35, so that the relative position of the spray plate 50 with respect to the opening of the inner housing 20 is fixed, and the air inlet of the spray plate 50 can be stably communicated with the air outlet of the open end face of the inner housing 20.

As shown in fig. 3, in some embodiments, the coating apparatus includes a support 80. The support 80 is provided on the outer case 10 for supporting the inner case 20. Illustratively, the number of the supports 80 may be plural so that the inner case 20 is stably fixed within the outer case 10.

In some embodiments, the number of the supporting members 80 is four, and the supporting members are distributed around the inner housing 20. Illustratively, the inner housing 20 and the outer housing 10 are both cylindrical, and the inner housing 20 is coaxial with the outer housing 10. The inner case 20 is fixed by the support members 80 at the upper, lower, and both sides of the inner case 20. In some embodiments, a heating element is provided in the gap between the inner housing 20 and the outer housing 10 to raise the temperature within the inner housing 20 to process the product. Therefore, the support 80 is made of a high temperature resistant material, and can provide stable support to the inner case 20.

In some embodiments, the supports 80 are each adjustable in length such that the position of the inner housing 20 within the outer housing 10 is adjustable. The length of the support member 80 is adjustable so that the air outlet on the open end surface of the inner housing 20 can be more easily abutted against the air inlet of the shower plate 50. By adjusting the length of the support 80 around the inner housing 20, the inner housing 20 can be moved in both horizontal and vertical directions with respect to the shower plate 50. And when it is required to take the inner case 20 out of the outer case 10, it is only necessary to separate the supporter 80 from the inner case 20.

In some embodiments, the coating apparatus includes a first conduit 30. The first line 30 is used for feeding gas. The gas outlet of the first pipe 30 communicates with the gas inlet of the gas flow passage 21 of the inner case 20. In some embodiments, the first pipeline 30 passes through the wall surface of the outer shell 10, enters the gap between the outer shell 10 and the inner shell 20, and communicates the gas outlet of the first pipeline 30 with the gas inlet of the gas flow passage 21 of the inner shell 20. The first pipeline 30 may input one kind of gas or a plurality of kinds of gases. When the closing door 40 is closed, the gas in the first pipe 30 is uniformly introduced into the inner case 20 through the shower holes 51 of the shower plate 50.

In some embodiments, the coating apparatus includes a carrier 60. Carrier 60 is located within inner housing 20 for carrying products. The product is placed vertically on carrier 60. The product is parallel to the flow direction of the gas output from the shower plate 50.

In some embodiments, the product is a substrate. Carrier 60 is disposed radially of inner housing 20. The products are vertically placed on the carriers 60 such that the products are parallel to the axial direction of the inner housing 20. The shower holes 51 output the gas in the axial direction of the inner housing 20 such that the products are parallel to the flow direction of the gas output from the shower holes 51.

In some embodiments, the coating apparatus includes a valve 70. The valve 70 is disposed in the first pipeline 30 for controlling the opening and closing of the first pipeline 30. In some embodiments, the coating apparatus coats the product using Atomic Layer Deposition (ALD) techniques. For example, the valve 70 can also adjust the flow rate of the gas output from the first pipe 30, so as to control the thickness of the film coated on the product or the number of atomic deposition layers.

The above description is only for the purpose of illustrating embodiments of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings of the present application or are directly or indirectly applied to other related technical fields, are also included in the scope of the present application.

Claims

1. A plating apparatus, characterized by comprising:

a closing door;

a mounting plate slidably disposed on the closure door;

the spray plate is arranged on the mounting plate;

an adjustment member disposed on the closure door and/or the mounting plate for adjusting the position of the mounting plate relative to the closure door.

2. The plating apparatus according to claim 1, wherein the adjusting member comprises:

the first sliding block can drive the mounting plate to move so as to adjust the position of the mounting plate relative to the closing door;

the first sliding block is arranged on the closing door and is in threaded connection with the first screw rod, and the first sliding block moves along the first screw rod in a direction parallel to the closing door;

wherein, the mounting panel is installed on the first slider.

3. The plating apparatus according to claim 2, wherein the adjusting member comprises:

a second slider;

the second screw is arranged on the first sliding block, the second sliding block is in threaded connection with the second screw, and the second sliding block moves along the second screw in a direction parallel to the closing door;

the mounting plate is mounted on the second sliding block, and the first screw rod and the second screw rod are crossed.

4. The plating apparatus according to claim 3, comprising:

the retaining member, the retaining member set up in close the door, be used for the lock solid the mounting panel with close the door.

5. The plating apparatus according to claim 4, comprising:

an outer housing having an opening at one end;

the gas flow passage is arranged in the inner shell, a gas inlet of the gas flow passage is positioned on the side wall of the inner shell, and a gas outlet of the gas flow passage is positioned on the opening end surface of the inner shell;

the locking piece locks the mounting plate and behind the sealing door, the sealing door is closed when the opening of the outer shell body, the spray plate is closed the opening of the inner shell body is just the air inlet of the spray plate is communicated with the air outlet of the air flow channel.

6. The plating apparatus according to claim 1, comprising:

the supporting piece is arranged on the outer shell and used for supporting the inner shell.

7. The plating device according to claim 6,

the number of the supporting pieces is four, and the supporting pieces are distributed on the periphery of the inner shell.

8. The plating device according to claim 7,

the supports are each adjustable in length so that the position of the inner housing within the outer housing is adjustable.

9. The plating apparatus according to claim 5, comprising:

the first pipeline is used for inputting gas, and a gas outlet of the first pipeline is communicated with a gas inlet of the gas flow channel of the inner shell.

10. The plating apparatus according to claim 9, comprising:

the carrier is positioned in the inner shell and used for bearing a product;

the product is vertically placed on the carrier, and the product is parallel to the flow direction of the gas output from the shower plate.

11. The plating apparatus according to claim 10, comprising:

and the valve is arranged on the first pipeline and used for controlling the first pipeline to be opened and closed.