CN115418626B

CN115418626B - Coating equipment

Info

Publication number: CN115418626B
Application number: CN202211009911.1A
Authority: CN
Inventors: 严大; 左敏
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2022-08-22
Filing date: 2022-08-22
Publication date: 2024-04-05
Anticipated expiration: 2042-08-22
Also published as: CN115418626A

Abstract

The application relates to the technical field of mechanical equipment and provides coating equipment. The coating equipment comprises a sealing door, a mounting plate, a spraying plate and an adjusting piece. The mounting plate is arranged on the sealing door in a sliding manner. The spray plate is arranged on the mounting plate. The adjusting piece is arranged on the closing door and/or the mounting plate and is used for adjusting the position of the mounting plate relative to the closing door. The position of the shower plate relative to the closure door can be adjusted.

Description

Coating equipment

Technical Field

The application relates to the technical field of mechanical equipment, in particular to coating equipment.

Background

In the current atomic layer deposition (Atomic layer deposition, ALD) film plating equipment, a spray plate is fixedly arranged on a closed door, and the position between the spray plate and the closed door cannot be adjusted.

Disclosure of Invention

In view of this, the technical problem that this application mainly solves is to provide a coating equipment, can adjust the position of spray plate relative to the closed door.

In order to solve the technical problems, one technical scheme adopted by the application is as follows: a coating device is provided, which comprises a sealing door, a mounting plate, a spraying plate and an adjusting piece. The mounting plate is arranged on the sealing door in a sliding manner. The spray plate is arranged on the mounting plate. The adjusting piece is arranged on the closing door and/or the mounting plate and is used for adjusting the position of the mounting plate relative to the closing door.

In some embodiments of the present application, the adjusting member includes a first slider, a first screw. The first sliding block can drive the mounting plate to move so as to adjust the mounting plate relative to the sealing door. The first sliding block is arranged on the closed door and is in threaded connection with the first screw rod. The first slider moves along the first screw in a direction parallel to the closing door. Wherein, the mounting panel is installed on first slider.

In some embodiments of the present application, the adjusting member includes a second slider, a second screw. The second screw rod is arranged on the first sliding block. The second slider is in threaded connection with the second screw rod, and the second slider moves along the second screw rod in a direction parallel to the closing door. Wherein, the mounting panel is installed on the second slider. The first screw and the second screw intersect.

In some embodiments of the present application, the plating apparatus includes a locking member. The locking piece is arranged on the closed door and used for locking the mounting plate and the closed door.

In some embodiments of the present application, a plating apparatus includes an outer housing, an inner housing. One ends of the outer shell and the inner shell are provided with openings. The inner shell is arranged in the outer shell, and the opening of the inner shell and the opening of the outer shell are positioned on the same side. The inner shell is internally provided with a gas flow passage. The air inlet of the air flow passage is positioned on the side wall of the inner shell, and the air outlet of the air flow passage is positioned on the opening end face of the inner shell. After the locking piece locks the mounting plate and the sealing door, when the sealing door closes the opening of the outer shell, the spraying plate closes the opening of the inner shell, and the air inlet of the spraying plate is communicated with the air outlet of the air flow channel.

In some embodiments of the present application, the plating apparatus includes a support. The support piece is arranged on the outer shell and used for supporting the inner shell.

In some embodiments of the present application, the number of the supporting members is four, and the supporting members are distributed around the inner housing.

In some embodiments of the present application, the support members are each adjustable in length such that the position of the inner housing within the outer housing is adjustable.

In some embodiments of the present application, the plating apparatus includes a first conduit. The first pipeline is used for inputting gas. The air outlet of the first pipeline is communicated with the air inlet of the air flow passage of the inner shell.

In some embodiments of the present application, the plating apparatus includes a carrier. The carrier is located in the inner shell and used for carrying the product. The product is placed vertically on the carrier. The product is parallel to the flow direction of the gas output from the shower plate.

In some embodiments of the present application, the coating apparatus includes a valve. The valve is arranged on the first pipeline and used for controlling the opening and closing of the first pipeline.

The beneficial effects of this application are: the coating equipment comprises a sealing door, a mounting plate, a spraying plate and an adjusting piece. The mounting plate is arranged on the sealing door in a sliding manner. The spray plate is arranged on the mounting plate. The adjusting piece is arranged on the closing door and/or the mounting plate and is used for adjusting the position of the mounting plate relative to the closing door. The position of mounting panel for closing the door is adjusted through the regulating part to this application for the relative position of spray board closing the door is adjustable.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:

FIG. 1 is a close door and shower plate of one embodiment of the coating apparatus of the present application;

FIG. 2 is a front view of an embodiment of the coating apparatus of the present application (with the closure door omitted);

fig. 3 is a right side view of fig. 1.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. It is to be understood that the specific embodiments described herein are for purposes of illustration only and are not limiting. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present application are shown in the drawings. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

Please refer to fig. 1 to 3. Fig. 1 is a front view of an embodiment of the coating apparatus of the present application (the closing door 40 is omitted) showing the closing door 40 and the shower plate 50, fig. 2 is a right side view of fig. 1 showing an embodiment of the coating apparatus of the present application.

In some embodiments, the coating apparatus includes a closing door 40, a mounting plate 11, a shower plate 50, and an adjustment member (described below). The mounting plate 11 is slidably disposed on the closure door 40. The shower plate 50 is provided on the mounting plate 11. An adjustment member is provided on the closure door 40 and/or the mounting plate 11 for adjusting the position of the mounting plate 11 relative to the closure door 40. In some embodiments, the mounting plate 11 is slidably disposed on the closure door 40 by way of a rail-to-rail fit. The shower plate 50 is provided on the mounting plate 11 such that the shower plate 50 can slide with respect to the closure door 40.

In some embodiments, the adjustment member is provided on the closure door 40. The adjusting member adjusts the position of the mounting plate 11 relative to the closure door 40 and thereby adjusts the positions of the shower plate 50 and the closure door 40 on the mounting plate 11.

In some embodiments, an adjustment member is provided on the mounting plate 11 for adjusting the position of the mounting plate 11 relative to the closure door 40. Illustratively, the adjustment member is a motor that can precisely adjust the position of the mounting plate 11 relative to the closure door 40.

In some embodiments, the adjustment member comprises a first slider 31, a first screw 32. The first slider 31 can drive the mounting plate 11 to move to adjust the position of the mounting plate 11 relative to the closing door 40. The first slider 31 is disposed on the closing door 40 and is screwed with the first screw 32. The first slider 31 moves along the first screw 32 in a direction parallel to the closing door 40. Wherein the mounting plate 11 is mounted on the first slider 31. In some embodiments, the first slider 31 may be moved along the first screw 32 by rotating the first screw 32. When the first screw 32 is placed horizontally, the first slider 31 moves horizontally. The mounting plate 11 on the first slider 31 is driven by the first slider 31 to move horizontally, so that the position of the spraying plate 50 in the horizontal direction can be adjusted. When the first screw 32 is vertically placed, the first slider 31 is vertically moved. The mounting plate 11 on the first slider 31 is driven by the first slider 31 to move vertically, so that the position of the spraying plate 50 in the vertical direction can be adjusted.

In some embodiments, the adjustment member includes a second slider 33, a second screw 34. The second screw 34 is provided on the first slider 31. The second slider 33 is screw-coupled with the second screw 34, and the second slider 33 moves along the second screw 34 in a direction parallel to the closing door 40. Wherein the mounting plate 11 is mounted on the second slider 33. The first screw 32 and the second screw 34 intersect. Specifically, the first screw 32 and the second screw 34 intersect such that the mounting plate 11 on the second slider 33 can move in two different directions.

In some embodiments, the second slider 33 may be moved along the second screw 34 by rotating the second screw 34. When both the first screw 32 and the second screw 34 are horizontally placed, the second slider 33 can be moved a further distance in the horizontal direction. In some embodiments, as shown in fig. 1, the first screw 32 is positioned vertically and the second screw 34 is positioned horizontally. The first screw 32 and the second screw 34 may be simultaneously rotated so that the mounting plate 11 is rapidly moved to a predetermined position.

In some embodiments, the plating apparatus includes a lock 35. The locking member 35 is disposed on the closing door 40 for locking the mounting plate 11 and the closing door 40.

In some embodiments, the locking member 35 may fix the relative position of the mounting plate 11 and the closure door 40 after the mounting plate 11 is moved to a predetermined position by the adjusting member, and the position of the mounting plate 11 may be shifted during the processing. In some embodiments, the locking member 35 is a bolt with corresponding threads on the closure door 40 by which the mounting plate 11 is locked to the closure door 40.

In some embodiments, the coating apparatus includes an outer housing 10, an inner housing 20. The outer case 10 and the inner case 20 have an opening at one end. The inner case 20 is disposed inside the outer case 10, and the opening of the inner case 20 is located on the same side as the opening of the outer case 10. The inner housing 20 has a gas flow passage 21 therein. The gas inlet of the gas flow passage 21 is located at the side wall of the inner housing 20, and the gas outlet of the gas flow passage 21 is located at the opening end face of the inner housing 20. After the locking member 35 locks the mounting plate 11 and the closing door 40, when the closing door 40 closes the opening of the outer casing 10, the spraying plate 50 closes the opening of the inner casing 20, and the air inlet of the spraying plate 50 is communicated with the air outlet of the air flow channel 21.

In some embodiments, the outer housing 10 is placed horizontally with the inner housing 20. The outer case 10 and the inner case 20 have an opening at one end and are closed at the other end. The inner case 20 is disposed inside the outer case 10, and the opening of the inner case 20 is located on the same side as the opening of the outer case 10. In some embodiments, both the inner housing 20 and the outer housing 10 are cylindrical. The shape and size of the inner case 20 and the outer case 10 may be set according to actual conditions.

In some embodiments, when the closure door 40 is opened, the inner housing 20 communicates with the outer housing 10, and a user may repair the devices inside the inner housing 20 and the outer housing 10 or place a product inside the inner housing 20 or the outer housing 10 through the openings of the outer housing 10 and the inner housing 20. When the closing door 40 is closed, the outer case 10 is isolated from the outside at the same time as the inner case 20. The structure and shape of the shower plate 50 may be set according to actual conditions. In this embodiment, the shower plate 50 has the same size and shape as the open end face of the inner housing 20.

In some embodiments, the gas inlet of the shower plate 50 is the same size as the gas outlet of the gas flow channel 21. When the closing door 40 is closed, the gas inlet of the shower plate 50 may not be in butt joint with the gas outlet of the gas flow path 21, or only partially in butt joint with the gas outlet of the gas flow path 21, affecting the gas transfer efficiency. At this time, the position of the spray plate 50 relative to the opening end face of the inner housing 20 can be adjusted by the adjusting member, so that the air inlet of the spray plate 50 is accurately abutted with the air outlet of the air flow channel 21.

In some embodiments, processing different products requires the use of different shower plates 50, with different shower plate 50 having different air inlet locations. The position of the spray plate 50 is adjusted by the adjusting member, and the relative position of the mounting plate 11 relative to the closing door 40 is fixed by the locking member 35, so that the relative position of the spray plate 50 relative to the opening of the inner housing 20 is fixed, and the air inlet of the spray plate 50 can be stably communicated with the air outlet of the opening end face of the inner housing 20.

As shown in fig. 3, in some embodiments, the plating apparatus includes a support 80. A support 80 is provided on the outer case 10 for supporting the inner case 20. Illustratively, the number of the supporting pieces 80 may be plural so that the inner case 20 is stably fixed within the outer case 10.

In some embodiments, the number of support members 80 is four and distributed around the inner housing 20. Illustratively, both the inner housing 20 and the outer housing 10 are cylindrical, and the inner housing 20 is coaxial with the outer housing 10. The support 80 fixes the inner housing 20 at the upper and lower sides and both sides of the inner housing 20. In some embodiments, a heating element is provided in the gap between the inner housing 20 and the outer housing 10, so that the temperature in the inner housing 20 is increased to process the product. Accordingly, the support 80 is made of a material resistant to high temperature, and can provide stable support to the inner housing 20.

In some embodiments, the support members 80 are each adjustable in length such that the position of the inner housing 20 within the outer housing 10 is adjustable. In order to enable the air outlet on the open end surface of the inner housing 20 to be more conveniently butted with the air inlet of the shower plate 50, the length of the support 80 can be adjusted. By adjusting the length of the support 80 around the inner housing 20, the inner housing 20 can be moved in both horizontal and vertical directions with respect to the shower plate 50. Meanwhile, when the inner housing 20 needs to be taken out from the outer housing 10, the supporting member 80 is only required to be separated from the inner housing 20.

In some embodiments, the plating apparatus includes a first conduit 30. The first conduit 30 is used for the input of gas. The air outlet of the first pipe 30 communicates with the air inlet of the air flow passage 21 of the inner housing 20. In some embodiments, the first pipe 30 passes through the wall surface of the outer case 10, enters into the gap between the outer case 10 and the inner case 20, and communicates the air outlet of the first pipe 30 with the air inlet of the air flow passage 21 of the inner case 20. The first pipe 30 may be supplied with one gas or a plurality of gases. When the closing door 40 is closed, the gas in the first pipe 30 is uniformly introduced into the inner case 20 through the spray holes 51 of the spray plate 50.

In some embodiments, the plating apparatus includes a carrier 60. The carrier 60 is located in the inner housing 20 for carrying the product. The product is placed vertically on a carrier 60. The product is parallel to the flow direction of the gas output from the shower plate 50.

In some embodiments, the product is a substrate. The carrier 60 is disposed along the radial direction of the inner housing 20. The product is vertically placed on the carrier 60 such that the product is parallel to the axial direction of the inner housing 20. The spray holes 51 output gas in the axial direction of the inner housing 20 such that the product is parallel to the flow direction of the gas output from the spray holes 51.

In some embodiments, the plating apparatus includes a valve 70. The valve 70 is disposed in the first pipeline 30 and is used for controlling the opening and closing of the first pipeline 30. In some embodiments, the coating apparatus uses atomic layer deposition (Atomic layer deposition, ALD) techniques to coat the product. Illustratively, the valve 70 may also regulate the amount of flow of gas output from within the first conduit 30 to control the thickness of the film deposited or the number of atomic layers deposited on the product.

The foregoing description is only of embodiments of the present application, and is not intended to limit the scope of the patent application, and all equivalent structures or equivalent processes using the descriptions and the contents of the present application or other related technical fields are included in the scope of the patent application.

Claims

1. A coating apparatus, characterized by comprising:

the inner shell is internally provided with a gas flow passage, a gas inlet of the gas flow passage is positioned on the side wall of the inner shell, and a gas outlet of the gas flow passage is positioned on the opening end face of the inner shell;

closing the door;

the mounting plate is arranged on the sealing door in a sliding manner;

the spray plate is arranged on the mounting plate;

the adjusting piece is arranged on the sealing door and/or the mounting plate and is used for adjusting the position of the mounting plate relative to the sealing door so as to adjust the position of the spraying plate relative to the opening end face of the inner shell, so that the air inlet of the spraying plate is in butt joint with the air outlet of the air flow channel;

the locking piece is arranged on the sealing door and used for locking the mounting plate and the sealing door.

2. The plating apparatus according to claim 1, wherein the regulating member comprises:

the first sliding block can drive the mounting plate to move so as to adjust the position of the mounting plate relative to the closed door;

the first sliding block is arranged on the closed door and is in threaded connection with the first screw rod, and the first sliding block moves along the first screw rod in a direction parallel to the closed door;

wherein the mounting plate is mounted on the first slider.

3. The plating apparatus according to claim 2, wherein said regulating member comprises:

a second slider;

the second screw rod is arranged on the first sliding block, the second sliding block is in threaded connection with the second screw rod, and the second sliding block moves along the second screw rod in a direction parallel to the closed door;

the mounting plate is mounted on the second sliding block, and the first screw rod and the second screw rod are intersected.

4. The plating apparatus according to claim 1, characterized by comprising:

an outer case having an opening at one end thereof; one end of the inner shell is provided with an opening, the inner shell is arranged in the outer shell, and the opening of the inner shell and the opening of the outer shell are positioned on the same side.

5. The plating apparatus according to claim 1, characterized by comprising:

the support piece is arranged on the outer shell and used for supporting the inner shell.

6. The plating apparatus according to claim 5, wherein,

the number of the supporting pieces is four, and the supporting pieces are distributed around the inner shell.

7. The plating apparatus according to claim 6, wherein,

the support members are each adjustable in length such that the position of the inner housing within the outer housing is adjustable.

8. The plating apparatus according to claim 4, comprising:

the first pipeline is used for inputting gas, and the gas outlet of the first pipeline is communicated with the gas inlet of the gas flow channel of the inner shell.

9. The plating apparatus according to claim 8, comprising:

the carrier is positioned in the inner shell and used for carrying products;

the product is vertically placed on the carrier, the product being parallel to the flow direction of the gas output from the shower plate.

10. The plating apparatus according to claim 9, comprising:

and the valve is arranged on the first pipeline and used for controlling the first pipeline to be opened and closed.