CN115394907A - Pyroelectric detector based on have middle heat insulation layer and overlap compensation structure - Google Patents
Pyroelectric detector based on have middle heat insulation layer and overlap compensation structure Download PDFInfo
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- CN115394907A CN115394907A CN202211129188.0A CN202211129188A CN115394907A CN 115394907 A CN115394907 A CN 115394907A CN 202211129188 A CN202211129188 A CN 202211129188A CN 115394907 A CN115394907 A CN 115394907A
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
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- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
Abstract
The invention discloses a pyroelectric detector based on an overlapped compensation structure with an intermediate heat insulation layer, which comprises a packaging base, a reading circuit, a pyroelectric sensitive element and a packaging cap which are sequentially arranged from bottom to top, wherein the pyroelectric sensitive element is embedded on the upper surface of the reading circuit and is electrically connected with the reading circuit, the pyroelectric sensitive element consists of a detection element, an intermediate heat insulation layer and a compensation element, and the detection element, the intermediate heat insulation layer and the compensation element are overlapped and distributed from top to bottom to form a sandwich structure; the optical signal only acts on the surface of the detection element in the pyroelectric sensitive element through the packaging cap, the pyroelectric sensitive element generates a pyroelectric signal, and the amplification and the output of the signal are realized through the reading circuit and the packaging base. The pyroelectric detector based on the overlapping compensation structure with the intermediate heat insulating layer can effectively inhibit the offset effect of the compensation element on useful pyroelectric signals, so that the sensitivity of the device is improved.
Description
Technical Field
The invention relates to the technical field of electronic materials and components, in particular to a pyroelectric detector based on an overlapped compensation structure with an intermediate heat insulation layer.
Background
The pyroelectric detector has wide application in daily life, scientific research and military, such as human motion detection, flame detection, gas detection, terahertz detection, pulse laser detection and the like, and has the characteristics of no need of refrigeration, low preparation cost, high response speed, wide response spectral range, response to radiation of dynamic change only and the like. The core structure of the pyroelectric detection technology mainly comprises a pyroelectric material, a heat insulation structure, a compensation structure, an absorption layer and a reading circuit, and the properties of the pyroelectric material, the heat insulation structure, the compensation structure, the absorption layer and the reading circuit determine the performance and the application field of matched instruments and equipment.
Noise is one of the main factors that limit the performance of detectors, and for pyroelectric detectors, the influence of environmental noise is not negligible. The pyroelectric detector can detect infrared radiation radiated by an object with the temperature greater than absolute zero, so that the response of the pyroelectric detector can be caused by the change of the environmental temperature; in addition, the pyroelectric material belongs to the category of piezoelectric materials, so that the mechanical vibration in the environment can also cause the pyroelectric detector to generate a microphone effect. Therefore, the device response caused by the environmental temperature change or the mechanical vibration in the environment belongs to the environmental noise, and researchers have proposed a compensation structure in order to suppress the influence of the environmental noise on the device performance. The compensation structure comprises two sensitive elements with the same characteristics (preparation process, materials and structural parameters), namely a detection element and a compensation element, which are connected in series or in parallel in an opposite way, and the change of the environmental temperature and the mechanical vibration in the environment can simultaneously act on the detection element and the compensation element. Because the characteristics of the detecting element and the compensating element are the same and the space interval is small, the quantity of pyroelectric charges and piezoelectric charges generated by the detecting element and the compensating element caused by environmental noise can be considered to be the same; because the two sensitive elements are reversely connected, the charges caused by the environmental noise can be completely counteracted theoretically, and therefore the purpose of inhibiting the influence of the environmental noise on the performance of the device is achieved.
At present, all commercial pyroelectric detectors with compensation structures adopt parallel compensation structures, as shown in fig. 1 (a), the parallel compensation structures arrange the detection elements and the compensation elements on the same plane, and the structures have the advantages of simple preparation process and convenient assembly. However, since the detecting element and the compensating element are disposed on the same plane, they both can be acted by the useful incident light, and the angles of the incident light acting on the detecting element or the compensating element may be different. However, because the two sensitive elements are connected in opposite directions, a large number of useful pyroelectric signals can be counteracted (counteraction), and only the pyroelectric signals caused by the action angle difference of incident light can be output, so that the output signal intensity of the device is greatly limited, and finally the sensitivity of the device is greatly reduced. In order to solve this problem, a light shielding plate or a package can be used to shield the compensation element, so that the compensation element is not directly acted by the incident light, but the scattered light of the incident light inside the package can still act on the compensation element. The low-speed response pyroelectric detector generally has larger sensitivity, and the loss of the sensitivity has little influence on the low-speed response pyroelectric detector. However, the high-speed response pyroelectric detector usually sacrifices the improvement of the sensitivity of the device in exchange for the response speed, so that the sensitivity of the high-speed response pyroelectric detector is very small. Therefore, the design of the high-speed response pyroelectric detector needs to fully consider the problem of sensitivity improvement. In addition, in the parallel compensation structure, because the detecting element and the compensating element are arranged on the same plane, the actual area of the sensitive element is twice of the effective area, the filling factor of the sensitive element is small, and the miniaturization and the high integration of the device are not facilitated.
Disclosure of Invention
The purpose of the invention is as follows: in view of the above problems, an object of the present invention is to provide a pyroelectric detector based on an overlapped compensation structure with an intermediate thermal insulation layer, in which the detection element and the compensation element are disposed on different planes and overlapped with each other in space, so that neither incident radiation nor scattered radiation thereof can act on the compensation element, thereby effectively weakening the counteracting effect of the compensation element on useful pyroelectric signals, and improving the sensitivity and the signal-to-noise ratio of the pyroelectric detector.
The technical scheme is as follows: the invention relates to a pyroelectric detector based on an overlapped compensation structure with a middle heat insulation layer, which comprises a packaging base, a reading circuit, a pyroelectric sensitive element and a packaging cap, wherein the packaging base, the reading circuit, the pyroelectric sensitive element and the packaging cap are sequentially arranged from bottom to top; the optical signal penetrates through the packaging cap to act on the surface of the pyroelectric sensitive element, the pyroelectric sensitive element generates a pyroelectric signal, and the amplification and the output of the signal are realized through the reading circuit and the packaging base.
Furthermore, the middle heat insulation layer is provided with a conductive channel penetrating through the upper surface and the lower surface of the middle heat insulation layer, and the detecting element and the compensating element are electrically connected in a reverse direction through the conductive channel.
Furthermore, the detecting element comprises an upper electrode, a sensitive material and a lower electrode, the upper electrode is arranged on the upper surface of the detecting element, the lower electrode is arranged on the lower surface of the detecting element, the sensitive material is arranged between the upper electrode and the lower electrode, and the upper electrode, the sensitive material and the lower electrode form a sandwich structure.
Furthermore, the main body of the readout circuit is a PCB board, a conductive trace is arranged on the PCB board, and the readout circuit is electrically connected with the detection element and the compensation element through the conductive trace.
Furthermore, the PCB is also provided with a heat insulation structure, an amplifier and a conductive via hole, wherein the amplifier is respectively connected with the detection element, the compensation element and the conductive via hole through conductive wires.
Further, cylindrical pins are arranged on the package base, and the pins penetrate through the package base body to be matched with the conductive through holes.
Furthermore, an optical filter is embedded in the packaging cap.
Further, the preparation material of the intermediate heat insulating layer comprises porous silicon, polyimide, ceramic with a hollow-out middle part, a semiconductor or a plastic material.
Furthermore, the structure and the material of the detecting element and the compensating element are the same, and both the detecting element and the compensating element are made of pyroelectric materials, including ceramic materials such as lead zirconate titanate, lithium tantalate, lithium niobate and the like, single crystal materials or composite materials.
Has the advantages that: compared with the prior art, the invention has the remarkable advantages that:
1. the structure with the heat insulation layer overlapping compensation structure is different from the traditional parallel compensation structure, the detecting element and the compensation element are positioned on different planes and are overlapped with each other in space, and useful incident radiation or scattered radiation thereof cannot act on the compensation element, so that the structure can effectively weaken the counteracting effect of the compensation element on useful pyroelectric signals;
2. in order to avoid the heat generated by the detecting element under the action of incident light from being conducted to the compensating element to cause thermal crosstalk, and the compensating element can counteract partial useful pyroelectric signals, an intermediate heat insulating layer is arranged between the detecting element and the compensating element to limit the thermal crosstalk between the detecting element and the compensating element;
3. the middle heat insulation layer has small heat conductivity, and can effectively inhibit thermal crosstalk between the detection element and the compensation element, thereby further limiting the offset effect of the compensation element on useful pyroelectric signals and finally improving the sensitivity and the signal-to-noise ratio of the device;
4. the detection element, the middle heat insulation layer and the compensation element are mutually overlapped, so that the actual area of the sensitive element is the same as the effective area, and compared with the traditional parallel compensation structure, the area of the sensitive element is greatly reduced, thereby being beneficial to the miniaturization of a device.
Drawings
Fig. 1 is a schematic view of a pyroelectric detector structure, wherein (a) is a traditional pyroelectric detector based on a parallel compensation structure, and (b) is a pyroelectric detector based on an overlapped compensation structure with an intermediate heat insulating layer;
FIG. 2 is an exploded view of the pyroelectric detector of the present invention, wherein 1 is a package cap, 2 is a pyroelectric sensitive element, 3 is a readout circuit, and 4 is a package base;
FIG. 3 is a schematic structural diagram of the package cap, wherein 1-1 is a filter, and 1-2 is a package cap housing;
FIG. 4 is a schematic structural diagram of a pyroelectric sensor, wherein 2-1 is a probe element, 2-2 is an intermediate thermal insulation layer, 2-3 is a compensation element, 2-2-1 is a conductive channel, and 2-2-2 is an intermediate thermal insulation layer main body;
FIG. 5 is a schematic structural diagram of a detecting element, wherein (a) is a top view, (b) is a bottom view, e is an upper electrode, f is a sensitive material, and g is a lower electrode;
FIG. 6 is a schematic structural view of an intermediate insulating layer;
FIG. 7 is a schematic structural diagram of a readout circuit, in which 3-1 is a conductive via, 3-2 is a thermal insulation structure, 3-3 is a conductive trace, 3-4 is an amplifier, and 3-5 is a substrate;
fig. 8 is a schematic structural diagram of a package base, in which 4-1 is a package base body and 4-2 is a pin.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments.
The pyroelectric detector based on the overlapped compensation structure with the intermediate heat-insulating layer comprises a packaging base 4, a reading circuit 3, a pyroelectric sensitive element 2 and a packaging cap 1 which are sequentially arranged from bottom to top, as shown in (b) in fig. 1 and fig. 2, wherein the pyroelectric sensitive element 2 is embedded on the upper surface of the reading circuit 3, the pyroelectric sensitive element 2 is electrically connected with the reading circuit 3, as shown in fig. 4, the pyroelectric sensitive element 2 consists of a detection element 2-1, an intermediate heat-insulating layer 2-2 and a compensation element 2-3, the detection element 2-1, the intermediate heat-insulating layer 2-2 and the compensation element 2-3 are overlapped from top to bottom to form a sandwich structure, the detection element 2-1 and the compensation element 2-3 are located on different planes, and are separated from each other through the intermediate heat-insulating layer 2-2.
As shown in fig. 3, the optical filter 1-1 is embedded on the package cap housing 1-2 to form a package cap 1. In one embodiment, the pass band of the filter is selected to be 8-14 μm, so that the pyroelectric detector operates in the mid-infrared band. Certainly, since the pyroelectric sensitive element 2 has a wide response spectrum range, the appropriate optical filter 1-1 can be selected according to actual requirements.
As shown in fig. 5, the detecting element 2-1 includes an upper electrode e, a sensitive material f and a lower electrode g, the upper electrode e is disposed on the upper surface of the detecting element 2-1, the lower electrode g is disposed on the lower surface of the detecting element 2-1, the sensitive material f is disposed between the upper and lower electrodes, and the upper electrode e, the sensitive material f and the lower electrode g form a sandwich structure. The detecting element 2-1 and the compensating element 2-3 have the same structure and also comprise an upper electrode, a sensitive material and a lower electrode which are arranged in sequence from top to bottom. The structure of the pyroelectric sensitive element 2 is also suitable for a surface electrode type sensitive element and an edge electrode type sensitive element.
The detecting element 2-1 and the compensating element 2-3 are made of the same material and are made of pyroelectric materials, and the adopted pyroelectric materials include but are not limited to lead zirconate titanate, lithium tantalate, lithium niobate and other ceramic materials, single crystal materials or composite materials.
As shown in FIG. 6, the intermediate insulating layer body 2-2-2 is provided with a conductive path 2-2-1 penetrating the upper and lower surfaces thereof, and the probe element 2-1 and the compensation element 2-3 are electrically connected in reverse direction through the conductive path. The conductive channel 2-2-1 may be a conductive via or a side conductive layer, and in this embodiment, a conductive via is used. The preparation material of the intermediate heat insulation layer 2-2 is prepared from a material or a structure with low thermal conductivity, including but not limited to porous silicon, polyimide, hollow-out ceramic, semiconductor or plastic material.
As shown in fig. 7, the main body of the readout circuit 3 is a PCB, a conductive trace 3-3 is disposed on the PCB, the readout circuit 3 is electrically connected to the detecting element 2-1 and the compensating element 2-3 through the conductive trace 3-3, the conductive trace 3-3 is further used for electrically connecting each part in the readout circuit 3, a thermal insulation structure 3-2, an amplifier 3-4 and a conductive via hole 3-1 are further disposed on the substrate 3-5, and the amplifier 3-4 is respectively connected to the detecting element 2-1, the compensating element 2-3 and the conductive via hole 3-1 through the conductive trace 3-3. The detecting element 2-1 and the compensating element 2-3 can be connected with the conductive trace 3-3 using conductive silver paste or a bonding technique. The amplifier 3-4 can be designed according to the modulation frequency of the device responding to the optical signal, and is a high input impedance amplifier when responding to the low-frequency modulation optical signal, and is a low input impedance radio frequency amplifier when responding to the high-frequency modulation optical signal. The heat insulation structure 3-2 is used for reducing the heat conductivity between the pyroelectric sensitive element 2 and the reading circuit 3, and the heat insulation structure is directly processed on a PCB (printed circuit board), so that a hollow structure can be arranged on the PCB, the pyroelectric sensitive element is suspended, a backing hollow structure is formed, and the heat insulation effect is realized. Or the heat insulating structure may be provided in a micro-bridge structure, an umbrella structure, or the like.
In this embodiment, an appropriate readout circuit can be selected according to the modulation frequency of incident light. If the modulation frequency of the incident light is low, a reading circuit can be designed based on a Junction Field Effect Transistor (JFET) or a common operational amplifier; if the modulation frequency of the incident light is higher, a radio frequency amplifying circuit or a coaxial line can be selected as a reading circuit.
As shown in fig. 8, a cylindrical pin 4-2 is disposed on the package base 4, penetrates through the package base body 4-1 and is matched with the conductive via 3-1, and the two are soldered by using metallic tin, so that an electrical connection with good mechanical properties is formed between the sensing circuit 3 and the pin 4-2, thereby providing a path for power supply and pyroelectric signal leading-out of the sensing circuit 3.
In this embodiment, the operation principle of the pyroelectric detector based on the overlapping supplementary structure with the intermediate insulating layer is as follows: the light radiated by the light source passes through the optical filter arranged on the packaging cap and then acts on the surface of the pyroelectric sensitive element. As shown in fig. 1 (a), in the conventional parallel compensation structure, the compensation element and the detection element are in the same plane, and both the detection element and the compensation element of the sensing element can be affected by useful incident light, so that both the detection element and the compensation element can generate useful pyroelectric signals; because the detecting element is reversely connected with the compensating element, a large amount of useful pyroelectric signals are counteracted, and the sensitivity of the device is reduced. However, as shown in fig. 1 (b) and fig. 2, in the present embodiment, the detecting element and the compensating element are overlapped, and the compensating element cannot be affected by the incident light and the scattered light thereof due to the shielding of the detecting element, so that only the detecting element can generate the pyroelectric signal under the action of the incident light. In addition, as the middle heat insulating layer with good heat insulating performance is arranged between the detecting element and the compensating element in the embodiment, the temperature rise of the detecting element under the action of useful incident light is difficult to be conducted to the compensating element, so that the compensating element can hardly generate any pyroelectric signal due to the useful incident light. Therefore, the offset effect of the compensation element on the useful pyroelectric signal can be greatly weakened, and finally, the sensitivity of the device is greatly improved. The detection element and the compensation element can be connected with the conductive wire by using conductive silver paste or a binding technology, and the conductive wire is also connected with the amplifier and the conductive via hole, so that a pyroelectric signal generated by the pyroelectric sensitive element can be input to the amplifier through the conductive wire, the signal is amplified and then transmitted to the conductive via hole through the conductive wire, and then is transmitted to the pin penetrating through the packaging seat body through the conductive via hole, and the output of the signal is realized.
In conclusion, under the same irradiance, the pyroelectric detector based on the heat-insulating layer overlapping compensation structure provided by the invention can solve the problem of the offset effect of the compensation element in the traditional parallel compensation structure on a useful pyroelectric signal, and the improvement of the sensitivity of the device is realized.
Claims (9)
1. The pyroelectric detector based on the overlapped compensation structure with the intermediate heat insulation layer comprises a packaging base (4), a reading circuit (3), a pyroelectric sensitive element (2) and a packaging cap (1), wherein the packaging base (4), the reading circuit (3), the pyroelectric sensitive element (2) and the packaging cap are sequentially arranged from bottom to top, the pyroelectric sensitive element (2) is embedded on the upper surface of the reading circuit (3), and the pyroelectric sensitive element (2) is electrically connected with the reading circuit (3), and the overlapped pyroelectric detector is characterized in that the pyroelectric sensitive element (2) consists of a detection element (2-1), an intermediate heat insulation layer (2-2) and a compensation element (2-3), and the detection element (2-1), the intermediate heat insulation layer (2-2) and the compensation element (2-3) are distributed in an overlapped mode from top to bottom to form a sandwich structure; the optical signal penetrates through the packaging cap (1) to act on the surface of the pyroelectric sensitive element (2), the pyroelectric sensitive element (2) generates a pyroelectric signal, and the signal amplification and output are realized through the reading circuit (3) and the packaging base (4).
2. The pyroelectric detector as claimed in claim 1, characterized in that the intermediate heat insulating layer (2-2) is provided with conductive channels (2-2-1) extending through the upper and lower surfaces thereof, and the detection element (2-1) and the compensation element (2-3) are electrically connected in opposite directions through the conductive channels (2-2-1).
3. The pyroelectric detector as claimed in claim 1, wherein the detector element (2-1) comprises an upper electrode, a sensitive material and a lower electrode, the upper electrode is disposed on the upper surface of the detector element (2-1), the lower electrode is disposed on the lower surface of the detector element (2-1), the sensitive material is disposed between the upper and lower electrodes, and the upper electrode, the sensitive material and the lower electrode form a sandwich structure.
4. The pyroelectric detector as recited in claim 1, characterized in that the main body of the readout circuit (3) is a PCB board, the PCB board is provided with conductive traces (3-3), and the readout circuit (3) is electrically connected with the detecting elements (2-1) and the compensating elements (2-3) through the conductive traces (3-3).
5. The pyroelectric detector according to claim 4, characterized in that a thermal insulation structure (3-2), an amplifier (3-4) and a conductive via (3-1) are further disposed on the PCB, and the amplifier (3-4) is connected with the detecting element (2-1), the compensating element (2-3) and the conductive via (3-1) through a conductive trace (3-3).
6. The pyroelectric detector as claimed in claim 5, wherein the package base (4) is provided with cylindrical pins (4-2), and the pins (4-2) penetrate through the package base body (4-1) to be matched with the conductive vias (3-1).
7. Pyroelectric detector according to claim 1, characterized in that the encapsulation cap (1) is embedded with a filter (1-1).
8. The pyroelectric detector according to claim 1, characterized in that the intermediate thermal insulation layer (2-2) is made of a material comprising porous silicon, polyimide, hollow-in-the-middle ceramic, semiconductor or plastic material.
9. The pyroelectric detector according to claim 1, characterized in that the detection element (2-1) and the compensation element (2-3) are identical in structure and material and are made of pyroelectric materials, including lead zirconate titanate, lithium tantalate, and ceramic materials, single crystal materials or composite materials of lithium niobate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211129188.0A CN115394907A (en) | 2022-09-16 | 2022-09-16 | Pyroelectric detector based on have middle heat insulation layer and overlap compensation structure |
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| CN202211129188.0A CN115394907A (en) | 2022-09-16 | 2022-09-16 | Pyroelectric detector based on have middle heat insulation layer and overlap compensation structure |
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| CN202211129188.0A Pending CN115394907A (en) | 2022-09-16 | 2022-09-16 | Pyroelectric detector based on have middle heat insulation layer and overlap compensation structure |
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