CN106441592A - Pyroelectric sensor with zero point temperature compensating - Google Patents
Pyroelectric sensor with zero point temperature compensating Download PDFInfo
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- CN106441592A CN106441592A CN201610845929.3A CN201610845929A CN106441592A CN 106441592 A CN106441592 A CN 106441592A CN 201610845929 A CN201610845929 A CN 201610845929A CN 106441592 A CN106441592 A CN 106441592A
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- 238000001514 detection method Methods 0.000 claims abstract description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 230000005616 pyroelectricity Effects 0.000 claims description 79
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 230000004907 flux Effects 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 238000002835 absorbance Methods 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 3
- 230000010354 integration Effects 0.000 claims description 2
- 238000004806 packaging method and process Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- 230000009102 absorption Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000411 inducer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0205—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/068—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling parameters other than temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
A pyroelectric sensor with zero point temperature compensating relates to a pyroelectric sensor. The pyroelectric sensor with zero point temperature compensating comprises a pedestal, a seal cap, pins, an optical filter, a first pyroelectric detection element and a preamplifier. The optical filter is arranged at an opening of the seal cap. The preamplifier is arranged on the pedestal. The first pyroelectric detection element is electrically connected with the preamplifier and is arranged above the preamplifier. The seal cap is on the outer periphery of the first pyroelectric detection element. The pins under the pedestal lead an electric signal out. The pyroelectric sensor also comprises a second pyroelectric detection element used for temperature compensating. The second pyroelectric detection element is opposite to the first pyroelectric detection element in terms of polarity and is identical to the first pyroelectric detection element in terms of features. The second pyroelectric detection element is electrically connected with the first pyroelectric detection element. The pyroelectric sensor can minimize temperature influences, and enables the measurement result of the pyroelectric sensor to be more precise.
Description
Technical field
The present invention relates to a kind of pyroelectric sensor, more particularly to a kind of pyroelectricity sensing with zero temperature compensation
Device.
Background technology
Passive sensor is a kind of Integrated design of microelectronics and solid electronic field, is widely used in fire-fighting, chemical industry
The field such as the detection of gas intelligent quantization display gas parameter, infrared detection warning, infrared remote control, spectrum analyses.Environment temperature
The change of degree can affect the characteristic of pyroelectric sensor intraware, so that the signal of sensor and noise is shifted, particularly
Thermograde can make the output signal of sensor produce fluctuation, increases the unstability of output.The responsiveness of pyroelectric sensor,
Bias voltage and noise all raise with temperature and increase, wherein, responsiveness and temperature line relationship, and bias voltage is got in temperature
Increase faster when high, noise then increases more obvious when gate resistor resistance is bigger.Thermograde can make pyroelectric sensor produce
One great low frequency signal, or even the working range beyond preamplifier, cause to preamplifier to damage, this impact
Degree relevant with the time constant of pyroelectric sensor, time constant is bigger, and sensor for temperature gradient is more sensitive.Gate resistor
The less sensor stability of resistance is higher.But, the square root of gate resistor resistance and noise are inversely proportional to, when the resistance of gate resistor
During reduction, the noise of sensor can increase simultaneously.For example, when we make the stability of sensor by the resistance reducing gate resistor
When bringing up to original 9 times, the detectivity of sensor also can be down to original 1/3rd.
Improve sensor construction, time constant can be reduced, reduce the impact of thermograde, but cannot be by thermograde
Impact is reduced to ideal situation.Be badly in need of a kind of being capable of temperature-compensating and do not affect the pyroelectric sensor of other performance parameters.
Content of the invention
The first object of the present invention is to overcome the deficiency of prior art, provides a kind of heat with zero temperature compensation to release
Electric transducer, temperature impact can be reduced to minimum by described pyroelectric sensor, make the measurement result of pyroelectric sensor more
For accurate.
The second object of the present invention is to provide at a kind of pyroelectric sensor signal conversion with zero temperature compensation
Reason method.
The technical solution adopted for the present invention to solve the technical problems is:The described pyroelectricity with zero temperature compensation passes
Sensor includes pedestal, sealing cap, pin, optical filter, the first pyroelectricity detection unit and preamplifier, and described optical filter is located at sealing cap
Opening at, described preamplifier on pedestal, first pyroelectricity detect unit electrically connects and located at front with preamplifier
Put above amplifier, described sealing cap covers on the first pyroelectricity and detects unit's periphery, and below pedestal, the signal of telecommunication is drawn by pin, also includes
The second pyroelectricity for temperature-compensating detects unit, and described second pyroelectricity detects unit and detects first opposite polarity with the first pyroelectricity
And characteristic is consistent, described second pyroelectricity detects unit and detects first electrical connection with the first pyroelectricity.
Further, the described pyroelectric sensor with zero temperature compensation also includes infrared shading element, described red
Outer shading element masking the second pyroelectricity detects unit.
Further, the second pyroelectricity of the described pyroelectric sensor with zero temperature compensation detects unit and the first heat
Release electrical resistivity survey and survey unit's parallel connection.
Further, the second pyroelectricity of the described pyroelectric sensor with zero temperature compensation detects unit and the first heat
Release electrical resistivity survey and survey unit's series connection.
Further, the pre-amplification circuit device of the described pyroelectric sensor with zero temperature compensation and the first heat are released
Electrical resistivity survey surveys unit, the second pyroelectricity detects first integration packaging.
Further, the preamplifier of the described pyroelectric sensor with zero temperature compensation includes field effect transistor,
The source resistance of described field effect transistor is less than or equal to 100K Ω.
The present invention also provides a kind of pyroelectric sensor signal conversion processes method with zero temperature compensation, using upper
State the pyroelectric sensor with zero temperature compensation, at least comprise the following steps:
1) radiant flux is chopped radiation light optical filter arrival the first pyroelectricity detection for τ through absorbance of ΔΦ
Unit, radiant flux τ ΔΦ detects after first Surface absorption through the first pyroelectricity, produces change in temperature Δ T;
2) the first pyroelectricity detects unit and change in temperature Δ T is converted into charge density changes delta Q;
3) charge density changes delta Q that the surface electrode of the first pyroelectricity detection unit produces is processed by preamplifier,
Be converted to voltage signal output Δ u.
Compared with prior art, the invention has the beneficial effects as follows:
Temperature impact can be reduced to minimum, make heat by the pyroelectric sensor with zero temperature compensation of the present invention
The measurement result releasing electric transducer is more accurate.
Brief description
Fig. 1 is the pyroelectric sensor structure sectional view of the embodiment of the present invention 1;
Fig. 2 is the pyroelectric sensor circuit diagram of the embodiment of the present invention 1;
Fig. 3 is the pyroelectric sensor circuit diagram of the embodiment of the present invention 2;
Fig. 4 is affected to compare by thermograde with traditional non-temperature compensation sensor for temperature compensation sensor of the present invention;
Fig. 5 is compared to transient temperature respond with traditional non-temperature compensation sensor for temperature compensation sensor of the present invention.
Specific embodiment
Following examples will combine accompanying drawing and the present invention will be described in further detail.
Embodiment 1
With reference to Fig. 1, the pyroelectric sensor 100 of the present embodiment include pedestal 10, sealing cap 30, pin 20, optical filter 40, the
One pyroelectricity detects unit 60 and preamplifier 50, described optical filter 40 301 at the opening of sealing cap 30, described preposition amplification
On pedestal 10, the first pyroelectricity is detected unit 60 and is electrically connected and on preamplifier 50 with preamplifier 50 device 50
Side, described sealing cap 30 covers on the first pyroelectricity and detects unit 60 periphery, and the signal of telecommunication is drawn by pedestal 10 lower section pin 20, also includes using
The second pyroelectricity in temperature-compensating detects unit 60 ', and described second pyroelectricity detects unit 60 ' and the first pyroelectricity detects first 60 poles
Property contrary and characteristic consistent, described second pyroelectricity detects unit 60 ' and detects first 60 with the first pyroelectricity and electrically connects.
Described first pyroelectricity detects unit 60, preamplifier 50 and the second pyroelectricity and detects first 60 ' Vacuum Package in gold
Belong in the sealing cap 30 of tubing matter.Described optical filter 40 is bandpass filter, and it is encapsulated in the top of sealing cap 30, makes specific wavelength
Infra-red radiation is optionally through arrival first pyroelectricity detects unit 60, and the infra-red radiation outside its cutoff range then can not lead to
Cross.First pyroelectricity detects the core parts that unit 60 is pyroelectric sensor, and it is to plate metal on the two sides of pyroelectric crystal
After electrode, power up polarization and make, be equivalent to one with pyroelectric crystal for dielectric plate condenser.When the first pyroelectricity is visited
When surveying the Infrared irradiation that unit 60 is subject to non-constant intensity, the temperature change of generation leads to the charge density of its surface electrode to occur
Change, thus producing pyroelectricity electric current.Preamplifier 50 is made up of the field effect transistor source follower of a high internal resistance, passes through
Impedance converts, and the first pyroelectricity is detected first 60 faint current signals and is converted to useful voltage signal output.
Increase zero temperature compensation element to improve the temperature that inducer is released in heat transfer inside the first pyroelectric sensor 60
Stability.Two consistent pyroelectricities of opposite polarity, characteristic are detected unit 60,60 ' be connected in parallel, the wherein first pyroelectricity is visited
Survey unit 60 as operation element, the second pyroelectricity detects unit 60 ' as temperature compensating element, can effective compensation temperature to first
Pyroelectricity detects the impact of unit 60.Preferably, the second pyroelectricity detection unit 60 ' is blocked element 70 and covers, and is therefore not responding to red
Outer light, is intended only as an effective capacitance job, when sensor sealing cap 30 temperature changes, the first pyroelectric sensor 60
Detect first 60 ' consequent interference signals with the second pyroelectricity can cancel out each other, the temperature therefore, it is possible to improve sensor is steady
Qualitative.Certain second pyroelectricity is detected unit 60 ' and for example can also be visited in the second pyroelectricity by the way of other masking infrared lights
The outer surface setting surveying unit 60 ' stops the coating of infrared light.
Referring to Fig. 2, the first pyroelectricity detects unit 60 and the first pyroelectricity and detects first 60 ' and in parallel is followed by preamplifier 60
Field effect transistor T1 grid, described first pyroelectricity detects opposite polarity and the spy that unit 60 and the second pyroelectricity detect first 60 '
Property is consistent.The grid of field effect transistor T1 connects gate resistor R1, and the source electrode of field effect transistor T1 is connected to source resistance RS, voltage gain AV
With the mutual conductance g in operating point for the field effect transistorfsWith source resistance RSRelevant, it is calculated as follows:
From formula (1), increase source resistance RS, or reduce the voltage that drain current can improve preamplifier 50
Gain AV.But increase source resistance RSWhile, output resistance can become big, thus leading to drain voltage to raise, works as source resistance
RSWhen reaching 100Kohm, drain voltage can be increased to 15V, therefore source resistance RSShould not be excessive, it is usually no more than 100Kohm.
Increase voltage gain AVTemperature can be reduced to mutual conductance gfsImpact, improve gain temperature stability.
The signal conversion of pyroelectric sensor 100 can be summarized as three phases:
Phase conversion heat:Radiant flux is that the chopped radiation light of ΔΦ reaches the through the infrared fileter for τ for the absorbance
One pyroelectricity detects unit 60, and radiant flux τ ΔΦ is detected after first 60 Surface absorptions by the first pyroelectricity, produces change in temperature Δ T;
The thermo-electric conversion stage:In the presence of τ ΔΦ, the surface electrode that the first pyroelectricity detects unit 60 produces charge density
Changes delta Q;
The electric conversion stage:Δ Q is converted to voltage signal Δ u output by preamplifier 50;
Conversion temperature difference T that phase conversion heat produces is bigger, and the responsiveness of sensor and signal to noise ratio are higher.
Referring to Fig. 4, temperature compensating type and non-temperature compensating type pyroelectric sensor biased electrical in the presence of thermograde
The change of pressure is different, and described temperature compensating type pyroelectric sensor includes the first pyroelectricity and detects unit 60 and connected in parallel being used for
Second pyroelectricity of temperature-compensating detects unit 60 ', and described non-temperature compensating type pyroelectric sensor is not included for temperature-compensating
Second pyroelectricity detect unit 60 '.In figure case temperature is the temperature of sealing cap 30, it can be seen that increased second
Pyroelectricity detects unit 60 ' hardly to be affected by thermograde as the bias voltage of sensor after compensating element, 100.
Referring to Fig. 5, under conditions of temperature transient, the step of temperature compensating type and non-temperature compensating type pyroelectric sensor is rung
Answer curve different, the first pyroelectricity that described temperature compensating type pyroelectric sensor includes detects unit 60 and connected in parallel being used for
Second pyroelectricity of temperature-compensating detects unit 60 ', and described non-temperature compensating type pyroelectric sensor is not included for temperature-compensating
Second pyroelectricity detect unit 60 '.It can be seen that when ambient temperature is when rising rapidly to 40 DEG C for 25 DEG C, non-temperature
The bias transition of offset-type pyroelectric sensor is very big, and by comparison, the step of temperature compensating type pyroelectric sensor 100 is rung
Answer very little, recovery time also much shorter.It should be noted that due to due to mismachining tolerance, the step response of sensor may
For being just likely to be negative.
To sum up, the temperature compensating type pyroelectric sensor of the embodiment of the present invention 1 not temperature influence substantially, in temperature transient
Under conditions of also can recover than faster, the second pyroelectricity detects unit and 60 ' can the first pyroelectricity be detected effective compensation temperature
The impact that unit 60 causes, thus ensure to gather the accuracy of signal.
Embodiment 2
As shown in figure 3, similar to Example 1, its difference is, described pyroelectricity detects unit 60,60 ' and is cascaded,
Both opposite polarity and characteristic is consistent.Wherein first pyroelectricity detects unit 60 as operation element, and the second pyroelectricity detects unit 60 '
As compensating element, being capable of the impact to the first pyroelectricity detection unit 60 for the effective compensation temperature.Preferably, the second pyroelectricity detects
Unit 60 ' is blocked element 70 and covers, and is therefore not responding to infrared light, is intended only as an effective capacitance job, when sensor 100 envelope
When cap 30 temperature changes, the first pyroelectric sensor 60 and the second pyroelectricity detect first 60 ' consequent interference signals
Can cancel out each other, therefore, it is possible to improve the temperature of sensor.
Above-described embodiment is only used for further illustrating several specific embodiments of the present invention, but the invention is not limited in
Embodiment, any simple modification, equivalent variations and modification that every technical spirit according to the present invention is made to above example,
Each fall within the protection domain of technical solution of the present invention.
Claims (7)
1. a kind of pyroelectric sensor with zero temperature compensation, including pedestal, sealing cap, pin, optical filter, the first pyroelectricity
Detect unit and preamplifier, at the opening of sealing cap, on pedestal, first is hot for described preamplifier for described optical filter
Release electrical resistivity survey survey unit to electrically connect and above preamplifier with preamplifier, described sealing cap covers on the first pyroelectricity and detects unit
Periphery, below pedestal pin by the signal of telecommunication draw it is characterised in that:Also include detecting for the second pyroelectricity of temperature-compensating
Unit, described second pyroelectricity detects unit's opposite polarity first with the first pyroelectricity detection and characteristic is consistent, and described second pyroelectricity is visited
Survey unit and detect first electrical connection with the first pyroelectricity.
2. as claimed in claim 1 a kind of pyroelectric sensor with zero temperature compensation it is characterised in that:Also include infrared
Shading element, described infrared shading element masking the second pyroelectricity detects unit.
3. as claimed in claim 1 a kind of pyroelectric sensor with zero temperature compensation it is characterised in that:Described second heat
Release electrical resistivity survey survey unit in parallel with the first pyroelectricity detection unit.
4. as claimed in claim 2 a kind of pyroelectric sensor with zero temperature compensation it is characterised in that:Described second heat
Release electrical resistivity survey survey unit and detect first series connection with the first pyroelectricity.
5. as claimed in claim 1 a kind of pyroelectric sensor with zero temperature compensation it is characterised in that:Described front storing
Big circuit device and the first pyroelectricity detect unit, the first integration packaging of the second pyroelectricity detection.
6. as claimed in claim 1 a kind of pyroelectric sensor with zero temperature compensation it is characterised in that:Described front storing
Big device includes field effect transistor, and the source resistance of described field effect transistor is less than or equal to 100K Ω.
7. a kind of pyroelectric sensor signal conversion processes method with zero temperature compensation, is characterised by:Using such as right
Require a kind of pyroelectric sensor with zero temperature compensation described in 1, described signal conversion processes method at least includes three
Signal conversion processes step:
1) radiant flux is that the chopped radiation light of ΔΦ reaches the first pyroelectricity through the optical filter for τ for the absorbance and detects unit, spoke
Penetrate flux τ ΔΦ to detect after first Surface absorption through the first pyroelectricity, produce change in temperature Δ T;
2) the first pyroelectricity detects unit by change in temperature Δ T conversion processing is charge density changes delta Q;
3) charge density changes delta Q that the surface electrode of the first pyroelectricity detection unit produces is processed by preamplifier, conversion
Export Δ u for voltage signal.
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CN106525253A (en) * | 2016-12-29 | 2017-03-22 | 重庆奥海辉龙大数据有限公司 | Pyroelectric sensor and signal conversion method |
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JPH08128896A (en) * | 1994-10-30 | 1996-05-21 | Horiba Ltd | Pyroelectric infrared ray detector |
CN102564603A (en) * | 2010-12-07 | 2012-07-11 | 南阳森霸光电有限公司 | Pyroelectric infrared sensor |
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2016
- 2016-09-23 CN CN201610845929.3A patent/CN106441592A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08128896A (en) * | 1994-10-30 | 1996-05-21 | Horiba Ltd | Pyroelectric infrared ray detector |
CN102564603A (en) * | 2010-12-07 | 2012-07-11 | 南阳森霸光电有限公司 | Pyroelectric infrared sensor |
Non-Patent Citations (1)
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CN106525253A (en) * | 2016-12-29 | 2017-03-22 | 重庆奥海辉龙大数据有限公司 | Pyroelectric sensor and signal conversion method |
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