CN106525253A - Pyroelectric sensor and signal conversion method - Google Patents
Pyroelectric sensor and signal conversion method Download PDFInfo
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- CN106525253A CN106525253A CN201611250889.4A CN201611250889A CN106525253A CN 106525253 A CN106525253 A CN 106525253A CN 201611250889 A CN201611250889 A CN 201611250889A CN 106525253 A CN106525253 A CN 106525253A
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 172
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- 238000007789 sealing Methods 0.000 claims abstract description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 22
- 230000005616 pyroelectricity Effects 0.000 claims description 197
- 230000008859 change Effects 0.000 claims description 30
- 230000005855 radiation Effects 0.000 claims description 18
- 230000004308 accommodation Effects 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
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Abstract
The invention provides a pyroelectric sensor and a signal conversion method and relates to the sensor field. The sensor comprises a pin, a sealing cap, a pedestal, an optical filter, a first pyroelectric detection component, a second pyroelectric detection component, an infrared shading component and a preamplifier. A top of the sealing cap is provided with an opening. The optical filter is arranged at the opening. The sealing cap and the pedestal are connected so as to form an accommodating space. The first pyroelectric detection component, the second pyroelectric detection component and the preamplifier are located in the accommodating space. The pin is located below the pedestal and is electrically connected to the preamplifier. Polarities of the first pyroelectric detection component and the second pyroelectric detection component are opposite and characteristics are consistent. The first pyroelectric detection component is electrically connected to the second pyroelectric detection component and the preamplifier. The infrared shading component covers the second pyroelectric detection component. By using the pyroelectric sensor and the signal conversion method, a temperature influence can be reduced to be minimum so that a measurement result of the pyroelectric sensor is accurate.
Description
Technical field
The present invention relates to sensor field, in particular to a kind of pyroelectric sensor and signal conversion method.
Background technology
Passive sensor is a kind of Integrated design of microelectronics and solid electronic field, is widely used in fire-fighting, chemical industry
The field such as the detection of gas intelligent quantization display gas parameter, infrared detection warning, infrared remote control, spectrum analysis.Environment temperature
The change of degree can affect the characteristic of pyroelectric sensor intraware, make the signal and noise of sensor shift, particularly
Thermograde can make the output signal of sensor produce fluctuation, increase the unstability of output.The responsiveness of pyroelectric sensor,
Bias voltage and noise are all raised with temperature and are increased, wherein, responsiveness and temperature line relationship, bias voltage are got in temperature
Increase faster when high, noise then increases more obvious when gate resistor resistance is bigger.Thermograde produces can pyroelectric sensor
One great low frequency signal, or even beyond the working range of preamplifier, preamplifier is caused to damage, this impact
Degree it is relevant with the time constant of pyroelectric sensor, time constant is bigger, and sensor for temperature gradient is more sensitive.Gate resistor
The less sensor stability of resistance is higher.But, square root and the noise of gate resistor resistance are inversely proportional to, when the resistance of gate resistor
During reduction, the noise of sensor can increase simultaneously.For example, when we make the stability of sensor by the resistance for reducing gate resistor
When bringing up to original 9 times, the detectivity of sensor can also be down to original 1/3rd.
Improve sensor construction, time constant can be reduced, reduce the impact of thermograde, but cannot be by thermograde
Impact is reduced to ideal situation.It is badly in need of a kind of temperature-compensating and can not affecting the pyroelectric sensor of other performance parameters.
The content of the invention
It is an object of the invention to provide a kind of pyroelectric sensor and signal conversion method, which being capable of temperature impact reduction
To minimum, make the measurement result of pyroelectric sensor more accurate.
What embodiments of the invention were realized in：
In a first aspect, embodiments providing a kind of pyroelectric sensor, which includes pin, sealing cap, pedestal, optical filtering
Piece, the first pyroelectricity detection unit, the second pyroelectricity detect first, infrared shading piece and preamplifier, set at the top of the sealing cap
Opening is equipped with, the optical filter is arranged at the opening, and the sealing cap is connected to form accommodation space with the pedestal, described
The detection of one pyroelectricity is first, the second pyroelectricity detection is first and the preamplifier is located in the accommodation space, described
Pin is located at below the pedestal, is electrically connected with the preamplifier, and the first pyroelectricity detection is first hot with described second
Release that electrical resistivity survey surveys first opposite polarity and characteristic is consistent, the first pyroelectricity detection unit respectively with second pyroelectricity detection unit and
The preamplifier electrical connection, the infrared shading piece cover the second pyroelectricity detection unit.
In preferred embodiments of the present invention, above-mentioned preamplifier is arranged on the pedestal, first pyroelectricity
Detection is first to be arranged on the preamplifier with second pyroelectricity detection unit.
In preferred embodiments of the present invention, above-mentioned accommodation space is vacuum state or is filled by nitrogen.
In preferred embodiments of the present invention, above-mentioned first pyroelectricity detection is first with second pyroelectricity detection unit simultaneously
Connection.
In preferred embodiments of the present invention, above-mentioned first pyroelectricity detection is first to be gone here and there with second pyroelectricity detection unit
Connection.
In preferred embodiments of the present invention, the detection of above-mentioned first pyroelectricity is first, the second pyroelectricity detection unit and
The preamplifier integration packaging.
In preferred embodiments of the present invention, FET source follower of the above-mentioned preamplifier by a high internal resistance
Constitute, the source resistance of the FET is less than or equal to 100K Ω.
In preferred embodiments of the present invention, above-mentioned sealing cap is made up of metal material.
In preferred embodiments of the present invention, above-mentioned optical filter is bandpass filter.
Second method, the embodiment of the present invention additionally provide a kind of pyroelectric sensor signal conversion method, are applied to heat and release
Electric transducer, the pyroelectric sensor include that optical filter, the first pyroelectricity detection unit, the detection of the second pyroelectricity are first and preposition
Amplifier, first pyroelectricity detection is first to detect first opposite polarity with second pyroelectricity and characteristic is consistent, and described first
Pyroelectricity detection unit detects first and described preamplifier with second pyroelectricity respectively and electrically connects, and the infrared shading piece covers
The second pyroelectricity detection unit is covered, methods described includes：Chopped radiation light of the filter transmission radiation flux for ΔΦ
Reach the first pyroelectricity detection unit；The pyroelectric sensor temperature change, first pyroelectricity detection it is first with it is described
The interference signal that second pyroelectricity detection unit produces is cancelled out each other；The first pyroelectricity detection unit absorbs radiation flux ΔΦ,
Produce change in temperature Δ T；Change in temperature Δ T is converted into charge density changes delta Q by the first pyroelectricity detection unit, transmits institute
State charge density and change to the preamplifier；The preamplifier receives charge density changes delta Q, by the electricity
Lotus variable density Δ Q is converted to voltage signal output Δ u.
The pyroelectric sensor that the present invention is provided include pin, sealing cap, pedestal, optical filter, the first pyroelectricity detection unit, the
Two pyroelectricities detect first, infrared shading piece and preamplifier.The first pyroelectricity detection unit is visited with the second pyroelectricity respectively
Unit and preamplifier electrical connection are surveyed, and infrared shading piece covers the second pyroelectricity detection unit, due to the second pyroelectricity detection unit
Covered by infrared shading piece, the second pyroelectricity detection unit is not responding to infrared light, is only used as an effective capacitance job, and second is hot
Releasing electrical resistivity survey survey unit and temperature-compensating being provided for the first pyroelectricity detection unit, the impact of temperature is reduced to into minimum, pyroelectricity is made
The measurement result of sensor is more accurate.
Other features and advantages of the present invention will be illustrated in subsequent specification, also, are partly become from specification
It is clear that or being understood by implementing the embodiment of the present invention.The purpose of the present invention and other advantages can be by being write
In specification, claims and accompanying drawing, specifically noted structure is realizing and obtain.
Description of the drawings
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, below by to be used attached needed for embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, thus be not construed as it is right
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can be with according to this
A little accompanying drawings obtain other related accompanying drawings.By shown in accompanying drawing, the above and other purpose of the present invention, feature and advantage will more
Clearly.In whole accompanying drawings, identical reference indicates identical part.Deliberately do not paint by actual size equal proportion scaling
Accompanying drawing processed, it is preferred that emphasis is illustrate the purport of the present invention.
Fig. 1 shows the generalized section of pyroelectric sensor provided in an embodiment of the present invention；
Fig. 2 shows the circuit diagram of the pyroelectric sensor that first embodiment of the invention is provided；
Fig. 3 shows that pyroelectric sensor provided in an embodiment of the present invention receives thermograde with existing pyroelectric sensor
The comparison diagram of impact；
Fig. 4 shows pyroelectric sensor provided in an embodiment of the present invention with existing pyroelectric sensor to temperature in passing
Response comparison diagram；
Fig. 5 shows the circuit diagram of the pyroelectric sensor that second embodiment of the invention is provided；
The flow chart that Fig. 6 shows the pyroelectric sensor signal conversion method that third embodiment of the invention is provided.
Icon：100- pyroelectric sensors；110- pins；120- sealing caps；130- pedestals；140- optical filters；150- first
Pyroelectricity detection unit；The second pyroelectricities of 160- detection unit；The infrared shading pieces of 170-；180- preamplifiers.
Specific embodiment
To make purpose, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
The a part of embodiment of the present invention, rather than the embodiment of whole.Present invention enforcement generally described and illustrated in accompanying drawing herein
The component of example can be arranged and be designed with a variety of configurations.
Therefore, the detailed description of embodiments of the invention below to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of the present invention selected embodiment.Based on the embodiment in the present invention, this area is common
The every other embodiment obtained under the premise of creative work is not made by technical staff, belongs to the model of present invention protection
Enclose.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then in subsequent accompanying drawing which further need not be defined and is explained.
In describing the invention, it should be noted that term " " center ", " on ", D score, "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outward " be based on orientation shown in the drawings or position relationship, or should
Invention product using when the orientation usually put or position relationship, be for only for ease of the description present invention and simplify description, and not
Be indicate or imply the device or element of indication must have specific orientation, with specific azimuth configuration and operation, therefore not
It is understood that as limitation of the present invention.Additionally, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and can not manage
Solve to indicate or implying relative importance.
Additionally, the term such as term " level ", " vertical ", " pendency " is not offered as requiring part abswolute level or pendency, and
Can be to be slightly tilted.As " level " only refers to for its direction relative " vertical " more level, it is not the expression structure
Must be fully horizontal, and can be to be slightly tilted.
In describing the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " being connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or one
The connection of body ground；Can be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to indirect by intermediary
It is connected, can is the connection of two element internals.For the ordinary skill in the art, can be with concrete condition understanding
State term concrete meaning in the present invention.
First embodiment
Fig. 1 is refer to, the present embodiment provides a kind of pyroelectric sensor 100, and which includes pin 110, sealing cap 120, pedestal
130th, optical filter 140, first 150, the second pyroelectricity detection unit 160, infrared shading piece 170 of the first pyroelectricity detection and front storing
Big device 180.
Wherein, the sealing cap 120 is made up of metal material, and the top of the sealing cap 120 is provided with opening, and the opening can be
Square, can for rectangle, can also be circle, the optical filter 140 is arranged at the opening.In the present embodiment, it is described
Optical filter 140 is bandpass filter, and the effect of the optical filter 140 is to filter off useless infrared ray, allows useful infrared ray to pass through,
In order to avoid causing interference, even if the infra-red radiation of specific wavelength selectively passes through, the first pyroelectricity detection unit 150 is reached, at which
The infra-red radiation of cutoff range can not then pass through, wherein, the optical filter 140 can be that vacuum coating is formed.
In the present embodiment, the sealing cap 120 is connected to form accommodation space with the pedestal 130, wherein, as one kind side
Formula, the accommodation space are vacuum state or are filled by nitrogen.In the present embodiment, the sealing cap 120 can with the pedestal 130
To be integrally formed, prevent air from entering the accommodation space from the junction of the sealing cap 120 and the pedestal 130, so it is broken
The 150, second pyroelectricity detection unit of the bad first pyroelectricity detection unit 160 and preamplifier 180.
Wherein, first 150, the second pyroelectricity detection unit 160 of the first pyroelectricity detection and the preamplifier 180
In the middle of the accommodation space, as a kind of mode, the preamplifier 180 is arranged on the pedestal 130, and described first is hot
Release electrical resistivity survey survey unit 150 and the second pyroelectricity detection unit 160 is arranged on the preamplifier 180, more conducively described first is hot
Release electrical resistivity survey and survey 150 absorption infrared-ray of unit, react sensitiveer.As a kind of mode, the first pyroelectricity detection unit 150,
Second pyroelectricity detection unit 160 and 180 integration packaging of preamplifier, make the first pyroelectricity detection unit 150, second hot
Release electrical resistivity survey survey unit 160 and preamplifier 180 firmly can be arranged on the pedestal 130.
Wherein, the infrared shading piece 170 covers the second pyroelectricity detection unit 160, and used as a kind of mode, this is infrared
Shading piece 170 can cover infrared light for second pyroelectricity detection unit 160, make the second pyroelectricity detection unit 160 not
Response infrared, in the present embodiment, the second pyroelectricity detection unit 160 can also adopt the side of other masking infrared lights
Formula, for example, the outer surface for detecting unit 160 in second pyroelectricity arranges coating of stop infrared light etc..
Refer to Fig. 2, wherein, first pyroelectricity detection unit 150 respectively with second pyroelectricity detection unit 160 and
Preamplifier 180 is electrically connected, and used as a kind of mode, the first pyroelectricity detection unit 150 is the core of pyroelectric sensor 100
Heart element, it can be that, after the two sides of pyroelectric crystal plates metal electrode, power-up pole is made, equivalent to one with pyroelectricity
Crystal is dielectric capacity plate antenna, when first pyroelectricity detects unit 150 is subject to the Infrared irradiation of non-constant intensity,
The temperature change of generation causes the charge density of its surface electrode to change, so as to produce pyroelectricity electric current.In the present embodiment
In, the second pyroelectricity detection unit 160 is consistent with first 150 characteristic of first pyroelectricity detection, i.e., described second pyroelectricity
Detection unit 160 can be that, after the two sides of pyroelectric crystal plates metal electrode, power-up pole is made, equivalent to one with pyroelectricity
Crystal is dielectric capacity plate antenna.Used as a kind of mode, the first pyroelectricity detection unit 150 is visited with second pyroelectricity
Survey first 160 opposite polarity, i.e., described first pyroelectricity detection unit 150 and second pyroelectricity detect that unit 160 electrically connects when
Wait, both positive and negative polarity is contrary.
In the present embodiment, the first pyroelectricity detection unit 150 is in parallel with second pyroelectricity detection unit 160 even
Connect, wherein, the first pyroelectricity detection unit 150 is used as operation element, i.e., described first pyroelectricity detection unit, 150 reception infrared light
Irradiation, used as temperature compensating element, i.e., the second pyroelectricity detection unit 160 does not ring for second pyroelectricity detection unit 160
Answer infrared light, second pyroelectricity detection unit 160 can effectively impact of the compensation temperature to the first pyroelectricity detection first 150,
In this embodiment, the second pyroelectricity detection unit 160 is intended only as an effective capacitance job.
Wherein, when the temperature of the pyroelectric sensor 100 changes, first pyroelectricity detects unit 150 and institute
Stating the second pyroelectricity detection unit 160 all can be because temperature change produces interference signal, for example, and when environment temperature is raised, this is first hot
The bias voltages that electrical resistivity survey survey unit 150 is released with the second pyroelectricity detection unit 160 can increase with the rising of temperature, can interference signal.
In the present embodiment, the first pyroelectricity detection unit 150 is consistent with first 160 characteristic of second pyroelectricity detection, i.e., by ring
The impact of border temperature change is consistent, due to first pyroelectricity detection unit 150 and second pyroelectricity detection unit 160
Opposite polarity, that is, the interference signal for producing can be cancelled out each other, therefore, it is possible to improve the temperature stabilization of the pyroelectric sensor 100
Property, it is ensured that its measurement structure is more accurate.
In the present embodiment, the preamplifier 180 is made up of the FET source follower of a high internal resistance, is led to
The conversion of impedance is crossed, the first pyroelectricity is detected into first 150 faint current signals and is converted to useful voltage signal output.Its
In, the first pyroelectricity detection unit 150 first with the detection of the second pyroelectricity 160 is in parallel to be followed by the FET of preamplifier 180
The grid of T1, as mode in, it is assumed that the grid connection gate resistor of the FET is R1, the source electrode of FET T1 is connected to
Source resistance RS, voltage gain AVWith FET operating point mutual conductance gfsWith source resistance RSIt is relevant, it is calculated as follows：Wherein, from formula, increase source resistance RS, or reduce drain current can improve described preposition
The voltage gain A of amplifier 180V.But increase source resistance RSWhile, output resistance can become big, so as to cause drain voltage
Raise.As source resistance RSWhen reaching 100K Ω, drain voltage can be increased to 15V, therefore, source resistance RSShould not be excessive, typically
Less than 100K Ω, i.e., the source resistance of described FET is less than or equal to 100K Ω, increases voltage gain AVTemperature can be reduced
Degree is to mutual conductance gfsImpact, improve gain temperature stability.
Wherein, the pin 110 is located at the lower section of the pedestal 130, and prolongs toward the outside of the pyroelectric sensor 100
Stretch, used as a kind of mode, the pin 110 is electrically connected with the preamplifier 180, for electric signal is drawn.
Refer to Fig. 3, Fig. 3 shows the pyroelectric sensor 100 with temperature-compensating that the present embodiment adopts and existing
Pyroelectric sensor in technology acts on the change comparison diagram of below-center offset voltage in thermograde, wherein, the heat in the present embodiment
The first pyroelectricity detection unit 150 and the second pyroelectricity detection unit 160 that electric transducer 100 includes electrically connecting are released, existing heat is released
Electric transducer does not include the second pyroelectricity detection unit 160.Wherein, in figure, case temperature represents the temperature of the sealing cap 120, from figure
In as can be seen that the bias voltage of pyroelectric sensor 100 that the present embodiment is provided hardly is affected by thermograde, can
The impact of temperature is reduced to into minimum, certainty of measurement is improved.
Please according to Fig. 4, Fig. 4 shows the pyroelectric sensor 100 with temperature-compensating and existing that the present embodiment is adopted
The comparison diagram of the step response curve of the pyroelectric sensor in technology, wherein, the pyroelectric sensor 100 in the present embodiment is wrapped
The first pyroelectricity detection unit 150 and the second pyroelectricity detection unit 160 of electrical connection are included, existing pyroelectric sensor does not include the
Two pyroelectricities detection unit 160.Wherein, when environment temperature from rise rapidly to 40 DEG C for 25 DEG C when, existing pyroelectric sensor
Bias transition is very big, and by comparison, the step response very little of the pyroelectric sensor 100 that the present embodiment is adopted is received temperature
The impact of degree is reduced to minimum.
The operation principle of pyroelectric sensor 100 that first embodiment is provided is：The pyroelectric sensor 100 includes pin
110th, sealing cap 120, pedestal 130, optical filter 140, first 150, the second pyroelectricity detection unit 160, infrared screening of the first pyroelectricity detection
Light part 170 and preamplifier 180.First pyroelectricity detection unit 150 respectively with the second pyroelectricity detection unit 160 and preposition
Amplifier 180 is electrically connected, and infrared shading piece 170 covers the second pyroelectricity detection unit 160, due to the second pyroelectricity detection unit
160 are covered by infrared shading piece 170, and the second pyroelectricity detection unit 160 is not responding to infrared light, is only used as an effective capacitance work
Make, the second pyroelectricity detection unit 160 can provide temperature-compensating for the first pyroelectricity detection unit 150, and the impact of temperature is reduced
To minimum, make the measurement result of pyroelectric sensor 100 more accurate.
Second embodiment
Fig. 5 is refer to, the present embodiment provides a kind of pyroelectric sensor 100, its pyroelectricity provided with first embodiment
Sensor 100 is roughly the same, and the difference of the two is, in the embodiment of the present embodiment, the first pyroelectricity detection unit
150 are connected in series with second pyroelectricity detection unit 160.
Wherein, the first pyroelectricity detection unit 150 is used as operation element, i.e., described first pyroelectricity detection unit, 150 reception
The irradiation of infrared light, the second pyroelectricity detection unit 160 is used as temperature compensating element, i.e., described second pyroelectricity detection unit
160 are not responding to infrared light, and the second pyroelectricity detection unit 160 effectively compensation temperature can detect unit 150 to the first pyroelectricity
Impact, in this embodiment, second pyroelectricity detection unit 160 is intended only as an effective capacitance job.
Wherein, when the temperature of the pyroelectric sensor 100 changes, first pyroelectricity detects unit 150 and institute
Stating the second pyroelectricity detection unit 160 all can be because temperature change produces interference signal, for example, and when environment temperature is raised, this is first hot
The bias voltages that electrical resistivity survey survey unit 150 is released with the second pyroelectricity detection unit 160 can increase with the rising of temperature, can interference signal.
In the present embodiment, the first pyroelectricity detection unit 150 is consistent with first 160 characteristic of second pyroelectricity detection, i.e., by ring
The impact of border temperature change is consistent, due to first pyroelectricity detection unit 150 and second pyroelectricity detection unit 160
Opposite polarity, that is, the interference signal for producing can be cancelled out each other, therefore, it is possible to improve the temperature stabilization of the pyroelectric sensor 100
Property, it is ensured that its measurement structure is more accurate.
The operation principle of pyroelectric sensor 100 that second embodiment is provided is：The pyroelectric sensor 100 includes pin
110th, sealing cap 120, pedestal 130, optical filter 140, first 150, the second pyroelectricity detection unit 160, infrared screening of the first pyroelectricity detection
Light part 170 and preamplifier 180.First pyroelectricity detection unit 150 respectively with the second pyroelectricity detection unit 160 and preposition
Amplifier 180 is electrically connected, and infrared shading piece 170 covers the second pyroelectricity detection unit 160, due to the second pyroelectricity detection unit
160 are covered by infrared shading piece 170, and the second pyroelectricity detection unit 160 is not responding to infrared light, is only used as an effective capacitance work
Make, the second pyroelectricity detection unit 160 can provide temperature-compensating for the first pyroelectricity detection unit 150, and the impact of temperature is reduced
To minimum, make the measurement result of pyroelectric sensor 100 more accurate.
3rd embodiment
Fig. 6 is refer to, Fig. 6 shows that the flow process that pyroelectric sensor signal dress provided in an embodiment of the present invention changes method is shown
It is intended to, will be explained in detail for the flow process shown in Fig. 6 below, wherein, the method is applied to pyroelectric sensor 100,
The pyroelectric sensor 100 includes first 150, the second pyroelectricity detection unit 160, infrared screening of optical filter 140, the detection of the first pyroelectricity
Light part 170 and preamplifier 180, the first pyroelectricity detection unit 150 detect first 160 polarity with second pyroelectricity
Contrary and characteristic is consistent, the first pyroelectricity detection unit 150 respectively with second pyroelectricity detection unit 160 and described preposition
Amplifier 180 is electrically connected, and the infrared shading piece 170 covers the second pyroelectricity detection unit 160, and methods described includes：
Step S110：140 transmitted flux of the optical filter reaches first heat for the chopped radiation light of ΔΦ and releases
Electrical resistivity survey surveys unit 150.
In the present embodiment, the optical filter 140 is bandpass filter, and the effect of the optical filter 140 is that elimination is useless
Infrared ray, allows useful infrared ray to pass through, in order to avoid causing interference, even if the infra-red radiation of specific wavelength selectively passes through, arrives
Up to the first pyroelectricity detection unit 150, can not then pass through in the infra-red radiation of its cutoff range, as a kind of mode, the optical filtering
140 transmitted flux of piece reaches the first pyroelectricity detection unit 150 for the chopped radiation light of ΔΦ.
Step S120：100 temperature change of the pyroelectric sensor, first pyroelectricity detection unit 150 and described the
The interference signal that two pyroelectricities detection unit 160 produces is cancelled out each other.
Wherein, pyroelectric sensor 100 is very sensitive to temperature change, when the temperature of pyroelectric sensor 100 changes
When, the first pyroelectricity detection unit 150 is affected identical by environment temperature with the second pyroelectricity detection unit 160, as the first heat is released
Electrical resistivity survey survey unit 150 is consistent with first 160 characteristic of the second pyroelectricity detection, that is, the interference signal for producing is identical, due to the first pyroelectricity
Detection unit 150 and the second pyroelectricity detect first 160 opposite polarity, that is, the interference signal for producing is cancelled out each other.By the impact of temperature
It is reduced to minimum.
Step S130：The first pyroelectricity detection unit 150 absorbs radiation flux ΔΦ, produces change in temperature Δ T.
Used as a kind of mode, as infrared shading piece 170 covers the second pyroelectricity detection unit 160, described second is hot
Release electrical resistivity survey survey unit 160 and be not responding to infrared light, the first pyroelectricity detection unit 150 absorbs radiation flux ΔΦ, and described first is hot
Releasing electrical resistivity survey and surveying the core parts that unit 150 is pyroelectric sensor 100, it can metal electricity be plated on the two sides of pyroelectric crystal
After extremely, power-up pole is made, equivalent to one with pyroelectric crystal as dielectric capacity plate antenna, when first pyroelectricity is detected
When unit 150 is subject to the Infrared irradiation of non-constant intensity, that is, the change in temperature Δ T produced after absorbing radiation flux ΔΦ.
Step S140：Change in temperature Δ T is converted into charge density changes delta Q by the first pyroelectricity detection unit 150, is passed
The defeated charge density changes to the preamplifier 180.
Wherein, the temperature change that the first pyroelectricity detection unit 150 produces causes the charge density of its surface electrode to change
Become, so as to produce pyroelectricity electric current.Will change in temperature Δ T be converted into charge density changes delta Q, then charge density change is passed
It is defeated to the preamplifier 180.
Step S150：The preamplifier 180 receives charge density changes delta Q, and the charge density is changed
Δ Q is converted to voltage signal output Δ u.
In the present embodiment, the preamplifier 180 is made up of the FET source follower of a high internal resistance, is led to
The conversion of impedance is crossed, the first pyroelectricity is detected into first 150 faint current signals and is converted to useful voltage signal output, will
Charge density changes delta Q is converted to voltage signal output Δ u.
Pyroelectric sensor signal conversion method provided in an embodiment of the present invention is logical by 140 transmitted radiation of optical filter first
Chopped radiation light arrival the first pyroelectricity detection unit 150 for ΔΦ is measured, 100 temperature change of pyroelectric sensor is made, this first
The interference signal that pyroelectricity detection unit 150 detects 160 generation of unit with the second pyroelectricity is cancelled out each other, the first pyroelectricity detection unit
150 absorb radiation flux ΔΦ, produce change in temperature Δ T, and then change in temperature Δ T is converted by the first pyroelectricity detection unit 150
For charge density changes delta Q, transmit the charge density and change to the preamplifier 180, last preamplifier 180 connects
Charge density changes delta Q is received, charge density changes delta Q is converted to into voltage signal output Δ u.The impact of temperature is reduced
To minimum, make the measurement result of pyroelectric sensor 100 more accurate.
In sum, the pyroelectric sensor 100 that the present invention is provided includes pin 110, sealing cap 120, pedestal 130, optical filtering
Piece 140, first 150, the second pyroelectricity detection unit 160, infrared shading piece 170 of the first pyroelectricity detection and preamplifier 180.
The first pyroelectricity detection unit 150 is electrically connected with the second pyroelectricity detection unit 160 and preamplifier 180 respectively, and infrared screening
Light part 170 covers the second pyroelectricity detection unit 160, as the second pyroelectricity detection unit 160 is covered by infrared shading piece 170, should
Second pyroelectricity detection unit 160 is not responding to infrared light, is only used as an effective capacitance job, and the second pyroelectricity detects first 160 energy
Enough temperature-compensating is provided for the first pyroelectricity detection unit 150, the impact of temperature is reduced to into minimum, pyroelectric sensor 100 is made
Measurement result it is more accurate.
The preferred embodiments of the present invention are the foregoing is only, the present invention is not limited to, for the skill of this area
For art personnel, the present invention can have various modifications and variations.It is all within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of pyroelectric sensor, it is characterised in that including pin, sealing cap, pedestal, optical filter, the first pyroelectricity detection unit,
Second pyroelectricity detects first, infrared shading piece and preamplifier, and opening is provided with the top of the sealing cap, and the optical filter sets
It is placed at the opening, the sealing cap is connected to form accommodation space with the pedestal, first pyroelectricity detection first, described the
Two pyroelectricities detect first and described preamplifier and are located in the accommodation space, and the pin is located at below the pedestal,
Electrically connect with the preamplifier, the first pyroelectricity detection is first to detect first opposite polarity and spy with second pyroelectricity
Property it is consistent, the first pyroelectricity detection unit detects first and described preamplifier with second pyroelectricity respectively and electrically connects,
The infrared shading piece covers the second pyroelectricity detection unit.
2. pyroelectric sensor according to claim 1, it is characterised in that the preamplifier is arranged at the pedestal
On, the first pyroelectricity detection is first to be arranged on the preamplifier with second pyroelectricity detection unit.
3. pyroelectric sensor according to claim 2, it is characterised in that the accommodation space be vacuum state or by
Nitrogen is filled.
4. pyroelectric sensor according to claim 1, it is characterised in that the first pyroelectricity detection is first with described the
Two pyroelectricities detection unit is in parallel.
5. pyroelectric sensor according to claim 1, it is characterised in that the first pyroelectricity detection is first with described the
The series connection of two pyroelectricities detection unit.
6. pyroelectric sensor according to claim 1, it is characterised in that the first pyroelectricity detection first, described the
Two pyroelectricities detect first and described preamplifier integration packaging.
7. pyroelectric sensor according to claim 1, it is characterised in that the preamplifier is by a high internal resistance
FET source follower is constituted, and the source resistance of the FET is less than or equal to 100K Ω.
8. pyroelectric sensor according to claim 1, it is characterised in that the sealing cap is made up of metal material.
9. pyroelectric sensor according to claim 1, it is characterised in that the optical filter is bandpass filter.
10. a kind of pyroelectric sensor signal conversion method, it is characterised in that be applied to pyroelectric sensor, the pyroelectricity
Sensor includes that optical filter, the first pyroelectricity detection unit, the second pyroelectricity detect first, infrared shading piece and preamplifier,
First pyroelectricity detection is first to detect first opposite polarity with second pyroelectricity and characteristic is consistent, the first pyroelectricity spy
Surveying unit and first and described preamplifier being detected with second pyroelectricity respectively electrically connects, the infrared shading piece covering described the
Two pyroelectricities detection unit, methods described include：
The filter transmission radiation flux reaches the first pyroelectricity detection unit for the chopped radiation light of ΔΦ；
The pyroelectric sensor temperature change, the first pyroelectricity detection is first to detect what unit produced with second pyroelectricity
Interference signal is cancelled out each other；
The first pyroelectricity detection unit absorbs radiation flux ΔΦ, produces change in temperature Δ T；
Change in temperature Δ T is converted into charge density changes delta Q by the first pyroelectricity detection unit, is transmitted the charge density and is become
Change to the preamplifier；
The preamplifier receives charge density changes delta Q, and charge density changes delta Q is converted to voltage signal
Output Δ u.
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