CN115394621A - Method and system for generating surge self-focusing electron beam based on vortex circle Airy - Google Patents
Method and system for generating surge self-focusing electron beam based on vortex circle Airy Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
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Abstract
The invention discloses a method and a system for generating a surge self-focusing electron beam based on vortex circular Airy, wherein an electron gun emits an electron beam; the electron beam transmits a nano holographic diffraction pattern, and the pattern of the nano holographic diffraction pattern is subjected to cubic phase modulation through calculation, so that the transmitted electron beam is modulated into a round Airy electron beam; the circular Airy electron beam passes through a Y-shaped diffraction hologram to generate vortex at the central axis of the circular Airy electron beam to obtain a circular Airy electron beam with central vortex, namely a vortex circular Airy electron beam; focusing the eddy circle Airy electron beam through a magnetic lens, forming an eddy circle Airy wave packet on a focal plane, and recording the propagation of the eddy circle Airy electron beam by the focal plane; the cross section of the swirling circular airy beam was observed by a transmission electron microscope. The invention can well control the initial field of the round Airy electron beam, and is convenient for regulating and controlling parameters; the generated electron beam has a stronger focusing power than other electron beams and is provided with orbital angular momentum.
Description
Technical Field
The invention relates to the technical field of electron beam surge self-focusing, in particular to a surge self-focusing electron beam generation method and system based on vortex circle Airy.
Background
The effect of the sharp self-focusing first appears in the optical field, describing a beam that is emitted from a laser and then specially modulated so that it can be automatically focused without passing through a lens. Since Berry and Balazs theoretically proposed the airy wave packet for the first time in 1979, the airy beam has attracted a great deal of attention due to its unique properties. In 2010 Nikolaos and Demetrios discovered a novel beam containing the Airy function in the initial planar expression: round Airy beam. This type of beam exhibits a sharp self-focusing characteristic by shifting the lateral self-acceleration characteristic of the airy beam to the radial direction. Based on the same principle, by utilizing the technology of electron beam nano holographic diffraction patterns, vortex circular Airy electron beams can be generated. According to the numerical simulation result, the electron beam also shows the characteristic of sharp self-focusing in the propagation process. The circular airy can carry orbital angular momentum by loading vortices with centers overlapping the spot center.
The vortex circular Airy electron beam not only can carry orbital angular momentum, but also has the characteristic of sharp self-focusing, so that the energy density of the vortex circular Airy electron beam on a focusing plane is sharply increased, and the size of a light spot is sharply reduced. The resolution of the electron microscope can be improved by smaller light spots. It carries orbital angular momentum and is potentially useful in magnetic chiral dichroism spectroscopy (EMCD).
Disclosure of Invention
In view of the above, the invention provides a method and a system for generating a surge self-focusing electron beam based on vortex circular airy, which can well control the initial field of the circular airy electron beam and facilitate the regulation and control of parameters; the generated electron beam has a stronger focusing power than other electron beams and has an orbital angular momentum.
The invention solves the problems through the following technical means:
in one aspect, the invention provides a method for generating a surge self-focusing electron beam based on vortex circle Airy, which comprises the following steps:
the electron gun emits an electron beam;
the electron beam transmits a nano holographic diffraction pattern, and the pattern of the nano holographic diffraction pattern is subjected to cubic phase modulation through calculation, so that the transmitted electron beam is modulated into a round Airy electron beam;
the circular Airy electron beam generates vortex at the central axis of the circular Airy electron beam through a forked diffraction hologram to obtain the circular Airy electron beam with central vortex, namely the vortex circular Airy electron beam;
focusing the eddy circle Airy electron beam through a magnetic lens, forming an eddy circle Airy wave packet on a focal plane, and recording the propagation of the eddy circle Airy electron beam by the focal plane;
the cross section of the swirling circular airy beam was observed by a transmission electron microscope.
Preferably, the pattern of the nano holographic diffraction pattern is manufactured by performing circular airy modulation calculation on the electron beam after calculation.
Preferably, the fork-shaped diffraction hologram is manufactured as a grating, i.e., a holographic grating, by using a holographic reconstruction technique, by using a reference beam and a target beam to interfere to form interference fringes and then by interchanging light and shade of the interference fringes, so as to increase a vortex in the center of the electron beam in the circle of airy rays.
Preferably, the resolution of the transmission electron microscope is in the order of micrometers, and the fineness of the diffraction pattern and the interface of the vortex circular airy beam propagation can be observed.
Preferably, the initial field distribution of the circular Airy electron beam is
，
Wherein
For field strength, r is the radius, exp is the natural constant e,
as a function of the number of airy rays,
is the radius of the main ring and is,
in order to be the width of the electron beam,
is the attenuation factor.
As a matter of preference, it is preferred that,
the value is 0.1.
Preferably, the initial field distribution of the vortex circular Airy electron beams has more vortex phases than the vortex circular Airy electron beams, and the initial field distribution is
；
Wherein
Is the field strength in a polar coordinate system,
in order to provide a swirl term,
is the azimuth angle in the cylindrical coordinate system.
In another aspect, the present invention provides a system for generating a sharp self-focusing electron beam based on a vortex circle airy, comprising:
an electron gun for emitting an electron beam;
the nano holographic diffraction pattern is used for transmitting the electron beam, and cubic phase modulation is carried out on the pattern of the nano holographic diffraction pattern through calculation, so that the transmitted electron beam is modulated into a round Airy electron beam;
the Y-shaped diffraction hologram is used for enabling the passing round Airy electron beams to generate vortex at the central axis of the round Airy electron beams to obtain the round Airy electron beams with the central vortex, namely the vortex round Airy electron beams;
a magnetic lens for focusing the passing eddy circular airy beam, the eddy circular airy wave packet being formed on a focal plane and the focal plane starting to record propagation of the eddy circular airy beam;
and a transmission electron microscope for observing the cross section of the vortex circular Airy electron beam.
Preferably, the initial field distribution of the circular Airy electron beams is
，
Wherein
For field strength, r is the radius, exp is the natural constant e,
as a function of the number of airy rays,
is the radius of the main ring, and the radius of the main ring,
in order to be the width of the electron beam,
is the attenuation factor.
Preferably, the initial field distribution of the vortex circular Airy electron beams has more vortex phases than the vortex circular Airy electron beams, and the initial field distribution is
；
Wherein
Is the field strength in a polar coordinate system,
in order to be a vortex term, the vortex term,
is the azimuth angle in the cylindrical coordinate system.
Compared with the prior art, the invention has the beneficial effects that at least:
the electron beam generated by the invention has stronger focusing capability compared with other electron beams and has orbital angular momentum. The invention not only provides a new generation scheme, but also can regulate and control the intensity distribution and the phase of the common electron beam emitted from the electron gun, has the advantages of low manufacturing cost, simple system, convenient operation, wide application and the like, can effectively save the cost and improve the efficiency.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a flow chart of a method for generating a sharp self-focusing electron beam based on a vortex circle Airy according to the present invention;
FIG. 2 is a fork diffraction hologram producing vortices with a number of vortices of 1 and 3, respectively;
FIG. 3 shows the initial field of the electron beam in a vortex circle Airy, three initial fields with 0,1,2 vortices;
fig. 4 is a schematic view of a propagation slice with a vortex number of 1 (n = 1) of the electron beam in a vortex circle airy;
fig. 5 is a graph of the propagation of a simulated vortex circular airy beam with a vortex number of 1 (n = 1) at z =0, z =200 and z = 400.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. It should be noted that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work based on the embodiments of the present invention belong to the protection scope of the present invention.
Example 1
As shown in fig. 1, the present invention provides a method for generating a sharp self-focusing electron beam based on a vortex circle airy, comprising the following steps:
s1, emitting an electron beam by an electron gun.
S2, the electron beam transmits a nano holographic diffraction pattern, cubic phase modulation is carried out on the pattern of the nano holographic diffraction pattern through calculation, the transmitted electron beam is modulated into a round Airy electron beam, and the round Airy electron beam is obtained at the moment, and the initial field distribution of the round Airy electron beam is
；
Wherein
For field strength, r is the radius, exp is the natural constant e,
as a function of the number of airy rays,
is the radius of the main ring and is,
in order to be the width of the electron beam,
the attenuation factor (defined as 0.1).
S3, generating vortexes at the central axis of the round Airy electron beams through the round Airy electron beams by a fork-shaped diffraction hologram (shown in figure 2), and obtaining the round Airy electron beams with the central vortexes, namely vortex round Airy electron beams; compared with the circular Airy electron beam, the initial field distribution has more vortex phases
；
Wherein
Is the field strength in a polar coordinate system,
in order to be a vortex term, the vortex term,
is the azimuth angle in the cylindrical coordinate system.
Fig. 3 shows the initial field of the vortex circular airy beam, and different nano holographic diffraction patterns can be obtained by adjusting parameters, so that different vortex circular airy beams can be obtained. Three initial fields with a swirl number of 0,1,2 are shown in figure 3.
And S4, focusing the vortex circular Airy electron beams through the magnetic lens, forming vortex circular Airy wave packets on a focal plane, and recording the propagation of the vortex circular Airy electron beams by the focal plane.
And S5, observing the cross section of the vortex circular Airy electron beam through a transmission electron microscope.
Fig. 4 is a schematic view of a propagation slice with a vortex number of 1 (n = 1) of the electron beam in a vortex circle airy, the darker the color representing the higher the intensity, and it can be seen that the intensity is gradually focused as the z direction increases. The sharp self-focusing feature is shown in fig. 4.
Fig. 5 is a propagation diagram of the simulated vortex circle airy beam vortex number of 1 (n = 1) with z =0, z =200 and z = 400.
The pattern of the nano holographic diffraction pattern is manufactured by performing circular airy modulation calculation on the electron beam after calculation.
The fork-shaped diffraction hologram is a holographic grating which is made by using a holographic reconstruction technology and forming interference fringes by using a reference beam and a target beam through interference and then performing interchange according to the brightness and darkness of the interference fringes, and aims to increase the vortex in the center of an electron beam in a circle Airy.
The resolution of the transmission electron microscope is higher than that of a common optical microscope, the resolution can reach micron level, and the fineness of diffraction patterns and the interface of vortex circular Airy electron beam propagation can be observed.
Example 2
As shown in fig. 1, the present invention provides a surge self-focusing electron beam generation system based on vortex circle airy, comprising an electron gun, a nano holographic diffraction pattern, a fork diffraction hologram, a magnetic lens and a transmission electron microscope;
the electron gun is used for emitting electron beams;
the nano holographic diffraction pattern is used for transmitting electron beams, and cubic phase modulation is carried out on the patterns of the nano holographic diffraction pattern through calculation, so that the transmitted electron beams are modulated into round Airy electron beams;
the Y-shaped diffraction hologram is used for enabling the passing round Airy electron beam to generate vortex at the central axis of the round Airy electron beam to obtain the round Airy electron beam with the central vortex, namely the vortex round Airy electron beam;
the magnetic lens is used for focusing the passing vortex circular Airy electron beams, vortex circular Airy wave packets are formed on a focal plane, and the focal plane starts to record the propagation of the vortex circular Airy electron beams;
the transmission electron microscope is used for observing the cross section of the vortex round Airy electron beam.
Other features in this embodiment are the same as those in embodiment 1, and thus are not described herein again.
The electron beam generated by the invention has stronger focusing capability compared with other electron beams and has orbital angular momentum. The invention not only provides a new generation scheme, but also can regulate and control the intensity distribution and the phase of the common electron beam emitted from the electron gun, has the advantages of low manufacturing cost, simple system, convenient operation, wide application and the like, can effectively save the cost and improve the efficiency.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that various changes and modifications can be made by those skilled in the art without departing from the spirit of the invention, and these changes and modifications are all within the scope of the invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A method for generating a sharp self-focusing electron beam based on vortex circle Airy is characterized by comprising the following steps:
the electron gun emits an electron beam;
the electron beam transmits a nano holographic diffraction pattern, and the pattern of the nano holographic diffraction pattern is subjected to cubic phase modulation through calculation, so that the transmitted electron beam is modulated into a round Airy electron beam;
the circular Airy electron beam passes through a Y-shaped diffraction hologram to generate vortex at the central axis of the circular Airy electron beam to obtain a circular Airy electron beam with central vortex, namely a vortex circular Airy electron beam;
the vortex circular Airy electron beams are focused through the magnetic lens, vortex circular Airy wave packets are formed on a focal plane, and the focal plane starts to record the transmission of the vortex circular Airy electron beams;
the cross section of the swirling circular Airy electron beam was observed by a transmission electron microscope.
2. The method of claim 1, wherein the pattern of the nano holographic diffraction pattern is calculated by performing a circular airy modulation on the electron beam.
3. The method as claimed in claim 1, wherein the fork-shaped diffraction hologram is a holographic grating, which is formed by using a holographic reconstruction technique to form interference fringes by interfering a reference beam and a target beam, and then performing an interchange according to the brightness and darkness of the interference fringes, so as to increase the vortex in the center of the electron beam in the circle.
4. The method of claim 1, wherein the resolution of the transmission electron microscope is in the order of micron, and the fine degree of the diffraction pattern and the interface of the vortex circular Airy beam propagation can be observed.
5. The method of claim 1, wherein the initial field distribution of the circular Airy beam is
，
Wherein
For field strength, r is the radius, exp is the natural constant e,
is a function of the number of Airy's rays,
is the radius of the main ring, and the radius of the main ring,
in order to be the width of the electron beam,
is the attenuation factor.
6. The method of claim 5, wherein the electron beam generating device is a vortex-based self-focusing electron beam generating device,
the value is 0.1.
7. The method according to claim 5, wherein the vortex circular Airy beam has a vortex phase distribution with respect to the vortex circular Airy beam, and the initial field distribution is as follows
；
Wherein
Is the field strength in a polar coordinate system,
in order to be a vortex term, the vortex term,
is the azimuth angle in the cylindrical coordinate system.
8. A surge self-focusing electron beam generation system based on vortex circle Airy is characterized by comprising:
an electron gun for emitting an electron beam;
the nano holographic diffraction pattern is used for transmitting the electron beam, and the cubic phase modulation is carried out on the pattern of the nano holographic diffraction pattern through calculation, so that the transmitted electron beam is modulated into a round Airy electron beam;
the Y-shaped diffraction hologram is used for enabling the passing round Airy electron beams to generate vortex at the central axis of the round Airy electron beams to obtain the round Airy electron beams with the central vortex, namely the vortex round Airy electron beams;
a magnetic lens for focusing the passing eddy circular airy beam, the eddy circular airy wave packet being formed on a focal plane and the focal plane starting to record propagation of the eddy circular airy beam;
and a transmission electron microscope for observing the cross section of the vortex round Airy electron beam.
9. According to claim 8The system for generating the surge self-focusing electron beam based on the vortex circular Airy is characterized in that the initial field of the electron beam in the circular Airy is distributed as
，
Wherein
For field strength, r is the radius, exp is the natural constant e,
as a function of the number of airy rays,
is the radius of the main ring and is,
in order to be the width of the electron beam,
is the attenuation factor.
10. The system of claim 9, wherein the initial field distribution of the vortex round Airy electron beams has more vortex phases than the round Airy electron beams, and the initial field distribution is
；
Wherein
Is the field strength in a polar coordinate system,
in order to provide a swirl term,
is the azimuth angle in the cylindrical coordinate system.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117270184A (en) * | 2023-11-22 | 2023-12-22 | 国科大杭州高等研究院 | Multimode optical fiber microscopic imaging system and method for breaking through diffraction limit resolution |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104303256A (en) * | 2011-12-20 | 2015-01-21 | 安特卫普大学 | Charged particle vortex wave generation |
| CN110737089A (en) * | 2019-09-09 | 2020-01-31 | 华南师范大学 | method and system for generating chirped Airy vortex electronic plasma wave |
| CN110824716A (en) * | 2019-12-26 | 2020-02-21 | 河南科技大学 | Method for flexibly regulating and controlling self-focusing focal length of self-focusing light beam |
| CN111273451A (en) * | 2020-02-13 | 2020-06-12 | 华南师范大学 | Device and method for moving self-focusing point of circular Airy beam in large range and high precision |
| CN114594539A (en) * | 2022-03-09 | 2022-06-07 | 浙江科技学院 | Elliptical Airy vortex light beam generator based on super surface and light beam generating method thereof |
| CN114815278A (en) * | 2022-03-11 | 2022-07-29 | 浙江农林大学 | Generation and measurement method of first-order Airy derivative light beam with sudden self-focusing effect and carrying vortex |
-
2022
- 2022-10-28 CN CN202211330455.0A patent/CN115394621B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104303256A (en) * | 2011-12-20 | 2015-01-21 | 安特卫普大学 | Charged particle vortex wave generation |
| CN110737089A (en) * | 2019-09-09 | 2020-01-31 | 华南师范大学 | method and system for generating chirped Airy vortex electronic plasma wave |
| CN110824716A (en) * | 2019-12-26 | 2020-02-21 | 河南科技大学 | Method for flexibly regulating and controlling self-focusing focal length of self-focusing light beam |
| CN111273451A (en) * | 2020-02-13 | 2020-06-12 | 华南师范大学 | Device and method for moving self-focusing point of circular Airy beam in large range and high precision |
| CN114594539A (en) * | 2022-03-09 | 2022-06-07 | 浙江科技学院 | Elliptical Airy vortex light beam generator based on super surface and light beam generating method thereof |
| CN114815278A (en) * | 2022-03-11 | 2022-07-29 | 浙江农林大学 | Generation and measurement method of first-order Airy derivative light beam with sudden self-focusing effect and carrying vortex |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117270184A (en) * | 2023-11-22 | 2023-12-22 | 国科大杭州高等研究院 | Multimode optical fiber microscopic imaging system and method for breaking through diffraction limit resolution |
| CN117270184B (en) * | 2023-11-22 | 2024-03-29 | 国科大杭州高等研究院 | Multimode optical fiber microscopic imaging system and method for breaking through diffraction limit resolution |
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