CN115371022B - Design of epitaxial annular infrared halogen heating lamp assembly - Google Patents
Design of epitaxial annular infrared halogen heating lamp assembly Download PDFInfo
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- CN115371022B CN115371022B CN202210554629.5A CN202210554629A CN115371022B CN 115371022 B CN115371022 B CN 115371022B CN 202210554629 A CN202210554629 A CN 202210554629A CN 115371022 B CN115371022 B CN 115371022B
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 255
- 229910052736 halogen Inorganic materials 0.000 title claims abstract description 54
- 150000002367 halogens Chemical class 0.000 title claims abstract description 54
- 238000013461 design Methods 0.000 title claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000009434 installation Methods 0.000 claims description 6
- 238000004364 calculation method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V19/00—Fastening of light sources or lamp holders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/08—Devices for easy attachment to any desired place, e.g. clip, clamp, magnet
- F21V21/088—Clips; Clamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2105/00—Planar light sources
- F21Y2105/10—Planar light sources comprising a two-dimensional array of point-like light-generating elements
- F21Y2105/14—Planar light sources comprising a two-dimensional array of point-like light-generating elements characterised by the overall shape of the two-dimensional array
- F21Y2105/18—Planar light sources comprising a two-dimensional array of point-like light-generating elements characterised by the overall shape of the two-dimensional array annular; polygonal other than square or rectangular, e.g. for spotlights or for generating an axially symmetrical light beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
The invention discloses a design of an epitaxial annular infrared halogen heating lamp assembly, which comprises the following steps: acquiring the total number of rings of the annular heating lamps; acquiring the corresponding radius size of each annular heating lamp and the number of circular arc halogen heating lamps; and fixing the installed annular heating lamp on the reflecting plate. According to the mounting method, after the size of the annular heating lamps and the number of the circular arc halogen heating lamps are determined, the annular heating lamps can be assembled and fixed through the lamp clamp and the lamp clamp mounting plate, so that the operation steps of workers are greatly simplified, and the overall working efficiency of the workers is improved.
Description
Technical Field
The invention belongs to the technical field of wafer heating devices of semiconductor epitaxial equipment, and particularly relates to a design of an epitaxial annular infrared halogen heating lamp assembly.
Background
With the continued development of semiconductor technology, some applications to heated semiconductor devices have also been developed. The heater used in the semiconductor process is of various types, such as heating rod heating, ceramic heating, heating wire heating, infrared heating, etc. The infrared heating has the advantages of extremely high conversion efficiency and non-contact heating in the heating field, so that the infrared heating is widely applied to the links of wafer process production heating.
In the field of semiconductor epitaxy, existing infrared heating forms are mainly bulb-type heating and straight tube heating. Aiming at the two types of heating lamps, the two types of heating lamps have advantages and disadvantages in installation, wherein the bulb heating has the most flexible installation advantages, but the number of the heating lamps is large, and the problems of large installation and disassembly workload, complex work and the like exist; the straight tube type heating lamp has the advantages of small workload and easy installation, but has obvious disadvantages, such as being incapable of better adapting to a wafer heating scene, having the problems of increased energy waste probability and the like.
Therefore, how to provide a mounting method of a heating lamp assembly, which not only can adapt to a wafer heating space and better balance a thermal field, but also can be combined and assembled flexibly according to needs, and can fully utilize energy sources to improve energy conversion efficiency, is a problem to be solved currently.
Disclosure of Invention
The present invention is directed to a design of an epitaxial annular infrared halogen heating lamp assembly to solve the above-mentioned problems of the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: a design of an epitaxial annular infrared halogen heating lamp assembly, the mounting method comprising:
acquiring the total number of rings of the annular heating lamps;
acquiring the corresponding radius size of each annular heating lamp and the number of circular arc halogen heating lamps;
and fixing the installed annular heating lamp on the reflecting plate.
Still further, obtaining a total number of loops of the annular heating lamps includes:
the radius size of the first annular heating lamp is determined, specifically:
wherein: c (C) 1 For the circumference of the first annular heating lamp, 2N 1 The number of the circular arc halogen heating lamps corresponding to the first annular heating lamps is R 1 For the radial dimension of the first annular heating lamp, l 1 A preset interval arc length in the first annular heating lamp;
according to the radius size of the first annular heating lamp, the total number of the annular heating lamps is obtained, and the method specifically comprises the following steps:
m is an integer
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring is R, M is the radial dimension of the processed workpiece, the total number of the annular heating lamps is M, and d is the current number of the annular heating lamps.
Further, the radius size corresponding to each annular heating lamp is obtained, specifically:
wherein: r is R d Radius of the d-th annular heating lamp, R d+1 Radius of the (d+1) th ring heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d is the current number of rings, R is the radial dimension of the workpiece to be processed, and M is the total number of rings of the annular heating lamp.
Further, obtaining the number of circular arc halogen heating lamps corresponding to each annular heating lamp includes:
comparing the radius sizes corresponding to the two adjacent annular heating lamps, and determining the final radius size corresponding to each annular heating lamp according to the comparison result;
according to the final radius size corresponding to each annular heating lamp, determining the number of circular arc halogen heating lamps corresponding to each annular heating lamp, wherein the number is specifically as follows:
N d taking the minimum integer value
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring, l d For a preset interval arc length of 2N in the d-th annular heating lamp d The number of the circular arc halogen heating lamps corresponding to the d-th annular heating lamp is d, and d is the current number of the rings.
Still further, determining a corresponding final radius of each of the annular heating lamps includes:
determining whether the radial dimensions corresponding to the two adjacent annular heating lamps meet the following relation, if yes, executing the next step, and if not, obtaining the radial dimension corresponding to the annular heating lamps as the final radial dimension corresponding to the annular heating lamps, wherein the relation is as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings;
according to the radius size corresponding to the annular heating lamp of the maximum ring, determining the final radius size corresponding to the current annular heating lamp, wherein the final radius size is specifically as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R M The radial dimension of the M-th annular heating lamp is M, the total number of the annular heating lamps is R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings.
Further, the method for fixing the mounted ring-shaped heating lamp to the reflecting plate includes:
according to the number of the circular arc-shaped halogen heating lamps corresponding to each annular heating lamp, connecting two adjacent circular arc-shaped halogen heating lamps through a lamp chuck;
and according to the assembled annular heating lamps and the final radius corresponding to each annular heating lamp, fixing each annular heating lamp on the reflecting plate through the lamp clamp mounting plate.
The invention has the technical effects and advantages that:
(1) After the size of the annular heating lamps and the number of the circular arc halogen heating lamps are determined, the annular heating lamps can be assembled and fixed through the lamp clamp and the lamp clamp mounting plate, so that the operation steps of workers are greatly simplified, and the overall working efficiency of the workers is improved;
(2) The total number and the size of the annular heating lamps depend on the size of the machined workpiece, and the number of the annular heating lamps can be adjusted according to actual requirements, so that the flexibility of integral installation and combination is improved.
Drawings
FIG. 1 is a schematic flow chart of the present invention.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings. The description of these embodiments is provided to assist understanding of the present invention, but is not intended to limit the present invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
Example 1
Referring to fig. 1, the present embodiment provides a design of an epitaxial annular infrared halogen heating lamp assembly, which is mainly used for enabling a novel annular halogen heating assembly to be assembled more quickly. The annular halogen heating component is different from the traditional point light source in heating mode, is assembled by a plurality of circular arc halogen heating lamps, and can stably and comprehensively heat a processed wafer in the process of processing the semiconductor wafer.
The design of the epitaxial annular infrared halogen heating lamp component specifically comprises the following steps:
step S1: the total number of loops of the loop heating lamps is obtained. It is noted that the annular halogen heating assembly is a heating assembly formed by assembling a plurality of annular heating lamps with different sizes together, so that the total number of the overall annular heating assembly is determined first, and the size of each annular can be further determined. The specific process is as follows:
step S1.1: and determining the radius size corresponding to the first annular heating lamp according to the total number of the circular arc halogen heating lamps in the first annular heating lamp. In this embodiment, since the ring-shaped heating lamp is composed of circular arc-shaped halogen heating lamps, and the circular arc-shaped halogen heating lamps are of a circular arc-shaped structure, no matter how large the circular arc is in the circular arc-shaped halogen heating lamps during the assembly process, at least two circular arc-shaped halogen heating lamps are needed to be combined into a complete ring-shaped heating lamp. Therefore, in this embodiment, two circular arc halogen heating lamps are provided in the first annular heating lamp, so that the radius size corresponding to the first annular heating lamp can be obtained by the following calculation formula, where the calculation formula specifically includes:
wherein: c (C) 1 For the circumference of the first annular heating lamp, 2N 1 The number of the circular arc halogen heating lamps corresponding to the first annular heating lamps is R 1 For the radial dimension of the first annular heating lamp, l 1 For a preset arc length of the first ring heater.
In this embodiment, the preset interval arc length l in the first annular heating lamp 1 The value of (2) is not fixed, and can be according to the actual operation of an operatorSpecific changes are required.
Step S1.2: since the annular halogen heating assembly mentioned in the mounting method according to the present embodiment is used for heating the workpiece, it is noted that the size of the workpiece is not fixed, and thus the total number of rings of the annular heating lamps is determined not only according to the radius R of the first annular heating lamp obtained in step S1.1 1 The total number of rings of the annular heating lamp is calculated and acquired according to the radius dimension R of the machined workpiece, and the method specifically comprises the following steps:
m is an integer
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring is R, M is the radial dimension of the processed workpiece, the total number of the annular heating lamps is M, and d is the current number of the annular heating lamps.
Step S2: and obtaining the corresponding radius size of each annular heating lamp and the number of the circular arc halogen heating lamps contained in the corresponding radius size through the total number M of the annular heating lamps and the radius size R of the processed workpiece.
In this embodiment, the radius size corresponding to each ring of the ring-shaped heating lamps is calculated and obtained by applying a related calculation formula through the total number of rings M of the ring-shaped heating lamps and the radius size R of the machined workpiece, and the calculation formula is as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R d+1 Radius of the (d+1) th ring heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d is the current number of rings, R is the radial dimension of the workpiece to be processed, and M is the total number of rings of the annular heating lamp.
In this embodiment, according to the obtained radius size corresponding to each ring of the ring-shaped heating lamps, the number of circular arc-shaped halogen heating lamps corresponding to each ring of the ring-shaped heating lamps is obtained, which is specifically as follows:
step S2.1: and calculating the corresponding radius size of each ring of annular heating lamps according to the calculation formula of the radius size. It is noted that when comparing the corresponding radial dimensions of two annular heating lamps adjacent to each other, the radial dimension R of the (d-1) th annular heating lamp is d-1 Radius dimension R of the annular heating lamp with the d-th ring d Comparing, or comparing the radial dimension R of the d-th ring type annular heating lamp d Radius dimension R of the (d+1) th ring-shaped heating lamp d+1 By comparison, when the radius dimensions of the two are approximately equal, the heating effect is affected during the heating treatment of the workpiece to be processed. Therefore, when the radius sizes corresponding to the two adjacent annular heating lamps satisfy the following relation, the radius size of the current annular heating lamp is further calculated to obtain a new radius size, wherein the relation is as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings.
It should be noted that, when the radial dimensions corresponding to two adjacent annular heating lamps do not satisfy the above relation, it indicates that the two annular heating lamps are not approximately equal, and the radial dimension corresponding to the annular heating lamps is the final radial dimension corresponding to the annular heating lamps.
Step S2.2: as can be seen from step S1.2, the total number of rings of the ring-shaped heating lamps in the present embodiment is M, so in the present embodiment, the ring-shaped heating lamp of the maximum ring should be the ring-shaped heating lamp of the mth ring, i.e. the radius corresponding to the ring-shaped heating lamp of the maximum ring is R M 。
Therefore, in the process of obtaining the final radius corresponding to the annular heating lamp, the radius of the annular heating lamp according to the maximum ring is R M The final radius ruler corresponding to the current annular heating lamp can be calculated and obtainedThe dimensions are as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R M The radial dimension of the M-th annular heating lamp is M, the total number of the annular heating lamps is R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings.
Step S2.3: after obtaining the final radius size corresponding to each annular heating lamp according to the step S2.1 and the step S2.2, substituting the final radius size corresponding to each annular heating lamp into the following formula to determine the number of circular arc halogen heating lamps corresponding to each annular heating lamp, wherein the calculation formula specifically comprises the following steps:
N d taking the minimum integer value
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring, l d For a preset interval arc length of 2N in the d-th annular heating lamp d The number of the circular arc halogen heating lamps corresponding to the d-th annular heating lamp is d, and d is the current number of the rings.
It is noted that the number of circular arc halogen heating lamps corresponding to the d-th ring heating lamp in the present embodiment is 2N d And the minimum value is taken, so that the loss of the capital cost can be reduced as much as possible on the basis of meeting the corresponding conditions.
Step S3: according to the radius size corresponding to each annular heating lamp and the number of the circular arc halogen heating lamps contained in each annular heating lamp obtained in the step S2, the installed annular heating lamps are fixed on the reflecting plate, and the method specifically comprises the following steps:
step S3.1: radial dimension R of annular heating lamp according to the d-th ring d Preset interval arc length l in d-th ring heating lamp d The number of the circular arc halogen heating lamps corresponding to the d-th annular heating lamp is 2N d DeterminingThe interval arc length between two adjacent circular arc halogen heating lamps is l d /2N d 。
Then will be 2N d Arc halogen heating lamps are arranged according to the interval arc length l d /2N d The two circular arc halogen heating lamps are connected by the lamp clamp, namely, the end parts of the two circular arc halogen heating lamps adjacent to each other are fixed together by the lamp clamp parts, so that the assembly of each circular heating lamp can be completed.
Step S3.2: according to each annular heating lamp assembled in the step S3.1, the annular heating lamps are placed in sequence according to the radius of each annular heating lamp, then the lamp holder parts penetrate through the reflecting plate, the lamp holder mounting plate is fixedly mounted on the back of the reflecting plate, the lamp holder parts are fixedly connected with the lamp holder mounting plate through bolts, and each annular heating lamp is further fixed on the reflecting plate.
While embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the invention.
Claims (2)
1. The design method of the epitaxial annular infrared halogen heating lamp assembly comprises an annular heating lamp formed by connecting a plurality of circular arc halogen heating lamps and an annular halogen heating assembly formed by assembling a plurality of annular heating lamps, and is characterized in that the installation method comprises the following steps:
acquiring the total number of rings of the annular heating lamps;
acquiring the corresponding radius size of each annular heating lamp and the number of circular arc halogen heating lamps;
fixing the installed annular heating lamp on the reflecting plate;
obtaining a total number of loops of the annular heating lamp, comprising:
the radius size of the first annular heating lamp is determined, specifically:
wherein: c (C) 1 For the circumference of the first annular heating lamp, 2N 1 The number of the circular arc halogen heating lamps corresponding to the first annular heating lamps is R 1 For the radial dimension of the first annular heating lamp, l 1 A preset interval arc length in the first annular heating lamp;
according to the radius size of the first annular heating lamp, the total number of the annular heating lamps is obtained, and the method specifically comprises the following steps:
m is an integer
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring is R, M is the radial dimension of the processed workpiece, the total number of the annular heating lamps is M, and d is the current number of the rings;
the first annular heating lamp to the d annular heating lamp are arranged outwards from the center of the annular halogen heating assembly;
the radius size corresponding to each annular heating lamp is obtained, and the method specifically comprises the following steps:
wherein: r is R d Radius of the d-th annular heating lamp, R d+1 Radius of the (d+1) th ring heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d is the current number of rings, R is the radial dimension of the workpiece to be processed, and M is the total number of rings of the annular heating lamp;
obtaining the number of circular arc halogen heating lamps corresponding to each annular heating lamp, wherein the circular arc halogen heating lamps comprise:
comparing the radius sizes corresponding to the two adjacent annular heating lamps, and determining the final radius size corresponding to each annular heating lamp according to the comparison result;
according to the final radius size corresponding to each annular heating lamp, determining the number of circular arc halogen heating lamps corresponding to each annular heating lamp, wherein the number is specifically as follows:
N d taking the minimum integer value
Wherein: r is R d The radial dimension of the annular heating lamp of the d-th ring, l d For a preset interval arc length of 2N in the d-th annular heating lamp d The number of the circular arc halogen heating lamps corresponding to the d-th annular heating lamp is d, the number of the current ring is the serial number,
R d 、l d is in mm;
determining a final radius size corresponding to each annular heating lamp comprises:
determining whether the radial dimensions corresponding to the two adjacent annular heating lamps meet the following relation, if so, determining the final radial dimension corresponding to the current annular heating lamp according to the radial dimension corresponding to the annular heating lamp of the largest ring, and if not, determining the radial dimension corresponding to the annular heating lamp as the final radial dimension corresponding to the annular heating lamp, wherein the relation is as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings;
according to the radius size corresponding to the annular heating lamp of the maximum ring, determining the final radius size corresponding to the current annular heating lamp, wherein the final radius size is specifically as follows:
wherein: r is R d Radius of the d-th annular heating lamp, R M The radial dimension of the M-th annular heating lamp is M, the total number of the annular heating lamps is R d-1 The radial dimension of the annular heating lamp of the d-1 ring is d, and d is the current number of rings.
2. The method of designing an epitaxial annular infrared halogen lamp assembly of claim 1, wherein securing the installed annular heating lamp to a reflector plate comprises:
according to the number of the circular arc-shaped halogen heating lamps corresponding to each annular heating lamp, connecting two adjacent circular arc-shaped halogen heating lamps through a lamp chuck;
and according to the assembled annular heating lamps and the final radius corresponding to each annular heating lamp, fixing each annular heating lamp on the reflecting plate through the lamp clamp mounting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210554629.5A CN115371022B (en) | 2022-05-19 | 2022-05-19 | Design of epitaxial annular infrared halogen heating lamp assembly |
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| CN202210554629.5A CN115371022B (en) | 2022-05-19 | 2022-05-19 | Design of epitaxial annular infrared halogen heating lamp assembly |
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| CN115371022A CN115371022A (en) | 2022-11-22 |
| CN115371022B true CN115371022B (en) | 2023-11-24 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB394791A (en) * | 1932-04-29 | 1933-07-06 | Stanley Edward Talbot | Improvements relating to anti-dazzle fittings for headlamps |
| JP2003059853A (en) * | 2001-08-08 | 2003-02-28 | Tokyo Electron Ltd | Lamp heater and heat treatment apparatus |
| CN104865260A (en) * | 2015-05-23 | 2015-08-26 | 深圳德夏生物医学工程有限公司 | Annular multi-channel biochemical and specific protein analyzer provided with arc light bars and silicon photocells |
| CN111336438A (en) * | 2020-04-26 | 2020-06-26 | 众普森科技（株洲）有限公司 | Lamp fitting |
| CN111477565A (en) * | 2020-03-26 | 2020-07-31 | 北京北方华创微电子装备有限公司 | Epitaxial equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9748120B2 (en) * | 2013-07-01 | 2017-08-29 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
-
2022
- 2022-05-19 CN CN202210554629.5A patent/CN115371022B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB394791A (en) * | 1932-04-29 | 1933-07-06 | Stanley Edward Talbot | Improvements relating to anti-dazzle fittings for headlamps |
| JP2003059853A (en) * | 2001-08-08 | 2003-02-28 | Tokyo Electron Ltd | Lamp heater and heat treatment apparatus |
| CN104865260A (en) * | 2015-05-23 | 2015-08-26 | 深圳德夏生物医学工程有限公司 | Annular multi-channel biochemical and specific protein analyzer provided with arc light bars and silicon photocells |
| CN111477565A (en) * | 2020-03-26 | 2020-07-31 | 北京北方华创微电子装备有限公司 | Epitaxial equipment |
| CN111336438A (en) * | 2020-04-26 | 2020-06-26 | 众普森科技（株洲）有限公司 | Lamp fitting |
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| CN115371022A (en) | 2022-11-22 |
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