CN115371022A - Design of extended annular infrared halogen heating lamp assembly - Google Patents
Design of extended annular infrared halogen heating lamp assembly Download PDFInfo
- Publication number
- CN115371022A CN115371022A CN202210554629.5A CN202210554629A CN115371022A CN 115371022 A CN115371022 A CN 115371022A CN 202210554629 A CN202210554629 A CN 202210554629A CN 115371022 A CN115371022 A CN 115371022A
- Authority
- CN
- China
- Prior art keywords
- ring
- heating lamp
- annular
- lamp
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 251
- 229910052736 halogen Inorganic materials 0.000 title claims abstract description 56
- 150000002367 halogens Chemical class 0.000 title claims abstract description 56
- 238000013461 design Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 14
- 238000009434 installation Methods 0.000 claims abstract description 11
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V19/00—Fastening of light sources or lamp holders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/08—Devices for easy attachment to any desired place, e.g. clip, clamp, magnet
- F21V21/088—Clips; Clamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2105/00—Planar light sources
- F21Y2105/10—Planar light sources comprising a two-dimensional array of point-like light-generating elements
- F21Y2105/14—Planar light sources comprising a two-dimensional array of point-like light-generating elements characterised by the overall shape of the two-dimensional array
- F21Y2105/18—Planar light sources comprising a two-dimensional array of point-like light-generating elements characterised by the overall shape of the two-dimensional array annular; polygonal other than square or rectangular, e.g. for spotlights or for generating an axially symmetrical light beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
The invention discloses a design of an epitaxial annular infrared halogen heating lamp assembly, and the installation method comprises the following steps: acquiring the total number of rings of the annular heating lamps; acquiring the corresponding radius size and the number of the arc-shaped halogen heating lamps of each annular heating lamp; and fixing the installed annular heating lamp on the reflecting plate. According to the installation method, after the size of the annular heating lamps and the number of the arc-shaped halogen heating lamps are determined, the lamp chucks and the lamp chuck installation plates can be assembled and fixed, so that the operation steps of workers are greatly simplified, and the overall working efficiency of the workers is improved.
Description
Technical Field
The invention belongs to the technical field of wafer heating devices of semiconductor epitaxial equipment, and particularly relates to a design of an epitaxial annular infrared halogen heating lamp assembly.
Background
With the continuous development of semiconductor technology, some semiconductor devices applied to heating are also continuously developed. The heater used in the semiconductor process is of various types, such as heating rod heating, ceramic heating, heating wire heating, infrared heating, and the like. The infrared heating has the advantages of extremely high conversion efficiency and non-contact heating in the heating field, so that the infrared heating is widely applied to the heating link of wafer process production.
In the field of semiconductor epitaxy, existing infrared heating forms are mainly bulb-type heating and straight tube-type heating. Aiming at the two types of heating lamps, the advantages and the disadvantages of the heating lamps in installation respectively exist, wherein the installation advantage of bulb heating is the most flexible, but the quantity of the heating lamps is large, and the problems of large workload of installation and disassembly, complex work and the like exist; the straight tube type heating lamp has the advantages of small workload and easy installation, but has obvious defects, such as incapability of better adapting to a wafer heating scene, and the problem of increased energy waste probability and the like.
Therefore, how to provide a method for installing a heating lamp assembly, which can not only adapt to the wafer heating space and better balance the thermal field, but also can be combined and assembled flexibly as required, and can fully utilize energy to improve the energy conversion efficiency, is a problem to be solved at present.
Disclosure of Invention
It is an object of the present invention to provide a design for an epitaxial ring-shaped infrared halogen heating lamp assembly that solves the problems set forth in the background above.
In order to achieve the purpose, the invention provides the following technical scheme: a design of an epitaxial annular infrared halogen heating lamp assembly, the installation method comprising:
acquiring the total number of rings of the annular heating lamps;
acquiring the corresponding radius size and the number of the arc-shaped halogen heating lamps of each annular heating lamp;
and fixing the installed annular heating lamp on the reflecting plate.
Further, obtaining a total number of rings of the ring-shaped heating lamps comprises:
determining the radius size of the first annular heating lamp, specifically:
wherein: c 1 Is the circumference of the first ring-shaped heating lamp, 2N 1 The number of the arc-shaped halogen heating lamps corresponding to the first ring-shaped heating lamp, R 1 Is the radial dimension of the first annular heating lamp, /) 1 For a predetermined interval arc length in the first ring-shaped heating lamp；
Acquiring the total number of the annular heating lamps according to the radius size of the first annular heating lamp, specifically:
Wherein: r is d The radius dimension of the ring-shaped heating lamp of the d-th ring, R the radius dimension of the processed workpiece, M the total number of the rings of the ring-shaped heating lamp, and d the serial number of the current number of the rings.
Further, the corresponding radius size of each annular heating lamp is obtained, specifically:
wherein: r is d Is the radial dimension, R, of the d-th ring annular heating lamp d+1 Is the radial dimension, R, of the (d + 1) th ring heating lamp d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring, d is the serial number of the current ring number, R is the radius size of the processed workpiece, and M is the total ring number of the ring-shaped heating lamp.
Further, obtaining the number of circular arc halogen heating lamps corresponding to each of the ring-shaped heating lamps comprises:
comparing the corresponding radius sizes of two adjacent annular heating lamps, and determining the final radius size corresponding to each annular heating lamp according to the comparison result;
determining the number of the arc-shaped halogen heating lamps corresponding to each annular heating lamp according to the final radius size corresponding to each annular heating lamp, specifically:
Wherein: r d Is the radial dimension of the d-th ring-shaped heating lamp, l d Is a d-th ringPreset interval arc length, 2N, in annular heating lamps d The number of the arc-shaped halogen heating lamps corresponding to the ring-shaped heating lamp of the ith ring is shown, and d is the serial number of the current ring number.
Further, determining a final radius dimension for each of the annular heating lamps comprises:
determining whether the radial sizes corresponding to two adjacent annular heating lamps meet the following relational expression, if so, executing the next step, and if not, determining that the radial size corresponding to the annular heating lamps is the final radial size corresponding to the annular heating lamps, wherein the relational expression is as follows:
wherein: r d Is the radial dimension, R, of the d-th ring annular heating lamp d-1 The radius size of the (d-1) th ring-shaped heating lamp is shown, and d is the serial number of the current ring number;
according to the radius size corresponding to the annular heating lamp of the largest ring, the final radius size corresponding to the current annular heating lamp is determined, and the method specifically comprises the following steps:
wherein: r d Is the radial dimension, R, of the d-th ring annular heating lamp M Is the radius size of the Mth ring heating lamp, M is the total ring number of the ring heating lamps, R d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring is shown, and d is the serial number of the current ring number.
Further, fixing the installed ring-shaped heating lamps on the reflection plate includes:
connecting two adjacent circular arc halogen heating lamps through lamp chucks according to the number of the circular arc halogen heating lamps corresponding to each annular heating lamp;
and according to the assembled annular heating lamps, fixing each annular heating lamp on the reflecting plate through the lamp chuck mounting plate according to the final radius size corresponding to each annular heating lamp.
The invention has the technical effects and advantages that:
(1) According to the design, after the size of the annular heating lamps and the number of the arc-shaped halogen heating lamps are determined, the annular heating lamps and the arc-shaped halogen heating lamps can be assembled and fixed through the lamp chucks and the lamp chuck mounting plates, so that the operation steps of workers are greatly simplified, and the overall working efficiency of the workers is improved;
(2) The total number and the size of the annular heating lamps depend on the size of the machined workpiece, namely the number of the annular heating lamps can be adjusted according to actual requirements, so that the flexibility of integral installation and combination is improved.
Drawings
FIG. 1 is a schematic flow chart of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, and is not intended to limit the present invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Example 1
Referring to fig. 1, the present embodiment provides a design for an epitaxial annular infrared halogen heating lamp assembly, which is primarily intended to enable a more rapid assembly of a novel annular halogen heating assembly. The heating mode of the annular halogen heating component is different from that of the traditional point light source heating, and the annular halogen heating component is assembled by a plurality of arc-shaped halogen heating lamps, so that a processed wafer can be stably and comprehensively heated in the semiconductor wafer processing process.
The design of the epitaxial annular infrared halogen heating lamp assembly specifically comprises the following steps:
step S1: the total number of rings of the ring-shaped heating lamps is obtained. It should be noted that the annular halogen heating element is formed by assembling a plurality of annular heating lamps with different sizes, and then combining the lamps together, so that the total number of the rings of the annular heating element needs to be determined, and the size of each ring can be further determined. The specific process is as follows:
step S1.1: and determining the corresponding radius size of the first annular heating lamps according to the total number of the circular arc halogen heating lamps in the first annular heating lamps. In this embodiment, since the annular heating lamp is composed of the arc-shaped halogen heating lamps, and the arc-shaped halogen heating lamps are of an arc-shaped structure as the name implies, no matter how large or small the arc is in the arc-shaped halogen heating lamps, the annular heating lamp needs to have at least two arc-shaped halogen heating lamps to be combined into a complete annular heating lamp during the assembling process of the annular heating lamp. Therefore, in this embodiment, two circular arc halogen heating lamps are arranged in the first annular heating lamp, so that the radius size corresponding to the first annular heating lamp can be obtained through the following calculation formula, and the calculation formula is specifically as follows:
wherein: c 1 Is the circumference of the first ring annular heating lamp, 2N 1 The number of the arc-shaped halogen heating lamps corresponding to the first ring-shaped heating lamp, R 1 Is the radial dimension of the first annular ring heating lamp, l 1 The preset spacing arc length in the first ring-shaped heating lamp.
In this embodiment, the predetermined interval arc length l in the first ring-shaped heating lamp 1 The numerical value of (a) is not fixed, and it may be specifically changed according to the actual operation needs of the operator.
Step S1.2: since the annular halogen heating element mentioned in the installation method proposed in this embodiment is used for heating the workpiece to be processed, it should be noted that the size of the workpiece to be processed is not fixed, so that the total number of rings of the annular heating lamps is determined not only based on the radius R of the first ring annular heating lamp obtained in step S1.1 1 And calculating the total number of the rings of the annular heating lamp according to the radius R of the machined workpiece, wherein the total number is as follows:
Wherein: r d The radius dimension of the ring-shaped heating lamp of the d-th ring, R the radius dimension of the processed workpiece, M the total number of rings of the ring-shaped heating lamp, and d the serial number of the current number of rings.
Step S2: and acquiring the corresponding radius size of each annular heating lamp and the number of the arc-shaped halogen heating lamps contained by the annular heating lamp through the total number M of the annular heating lamps and the radius size R of the machined workpiece.
In this embodiment, the total number M of the ring-shaped heating lamps and the radius dimension R of the workpiece to be processed are used to calculate and obtain the radius dimension corresponding to each ring-shaped heating lamp by using a related calculation formula, which is as follows:
wherein: r d Is the radial dimension, R, of the d-th ring annular heating lamp d+1 Is the radial dimension, R, of the (d + 1) th ring heating lamp d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring, d is the serial number of the current ring number, R is the radius size of the processed workpiece, and M is the total ring number of the ring-shaped heating lamp.
In this embodiment, the number of arc-shaped halogen heating lamps corresponding to each ring-shaped heating lamp is obtained according to the obtained radius size corresponding to each ring-shaped heating lamp, which is specifically as follows:
step S2.1: and calculating the corresponding radius size of each ring-shaped heating lamp according to the calculation formula of the radius size. It is to be noted that when comparing the radius sizes corresponding to two ring-shaped heating lamps adjacent to each other, i.e., the radius size R of the d-1 th ring-shaped heating lamp d-1 And the radial dimension R of the d-ring annular heating lamp d Comparing the radius dimension R of the d-th ring-shaped heating lamp d And the radial dimension R of the (d + 1) th ring heating lamp d+1 When the two are approximately equal in radius size, the heating effect will be affected during the heating process of the workpiece. Therefore, when the corresponding radial sizes of two adjacent annular heating lamps satisfy the following relation, the radial size of the current annular heating lamp is further calculated, and a new radial size is obtained, where the relation is as follows:
wherein: r d Is the radial dimension, R, of the d-th ring annular heating lamp d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring is shown, and d is the serial number of the current ring number.
It should be noted that, when the radial sizes corresponding to two adjacent annular heating lamps do not satisfy the above relationship, it indicates that the two annular heating lamps are not approximately equal, and the radial size corresponding to the annular heating lamp is the final radial size corresponding to the annular heating lamp.
Step S2.2: from step S1.2, the total number of the ring-shaped heating lamps in the present embodiment is M, so in the present embodiment, the ring-shaped heating lamp of the largest ring should be the ring-shaped heating lamp of the mth ring, i.e. the corresponding radius dimension of the ring-shaped heating lamp of the largest ring is R M 。
Therefore, in the process of obtaining the final radius dimension corresponding to the ring-shaped heating lamp, the radius dimension of the ring-shaped heating lamp according to the maximum ring is R M The final radius size corresponding to the current annular heating lamp can be calculated and obtained, specifically:
wherein: r d Is the radial dimension, R, of the d-th ring-shaped heating lamp M Is the radius size of the Mth ring-shaped heating lamp, M is the total ring number of the ring-shaped heating lamps, R d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring is shown, and d is the serial number of the current ring number.
Step S2.3: after the final radius size corresponding to each annular heating lamp obtained in step S2.1 and step S2.2 is obtained, the final radius size corresponding to each annular heating lamp is substituted into the following formula, so as to determine the number of the arc-shaped halogen heating lamps corresponding to each annular heating lamp, where the calculation formula is specifically:
Wherein: r d Is the radial dimension of the d-th ring annular heating lamp, l d Is a preset interval arc length of 2N in the d-th ring-shaped heating lamp d The number of the arc-shaped halogen heating lamps corresponding to the d-th ring-shaped heating lamp is shown, and d is the serial number of the current ring number.
It should be noted that, in this embodiment, the number of the arc-shaped halogen heating lamps corresponding to the d-th ring-shaped heating lamp is 2N d And taking the minimum value, thereby reducing the loss of capital cost as much as possible on the basis of meeting the corresponding conditions.
And step S3: according to the obtained radius size corresponding to each annular heating lamp and the number of the arc halogen heating lamps contained in the radius size, the installed annular heating lamps are fixed on the reflecting plate, and the specific steps are as follows:
step S3.1: according to the radius size R of the d-ring annular heating lamp d Preset interval arc length l in the d-th ring-shaped heating lamp d The number of the arc-shaped halogen heating lamps corresponding to the d-th ring-shaped heating lamp is 2N d Determining the arc length of the interval between two arc-shaped halogen heating lamps adjacent to each other to be l d /2N d 。
Then 2N is added d Arc-shaped halogen heating lamps are arranged according to the interval arc length l d /2N d The two circular arc halogen heating lamps are connected by the lamp clamping head, namely, the end parts of the two circular arc halogen heating lamps which are adjacent to each other are fixed together by the lamp clamping head, so that each annular heating lamp can be assembled.
Step S3.2: and (4) sequencing and placing according to the radius size of each assembled annular heating lamp in the step (S3.1), then enabling the lamp chuck components to penetrate through the reflecting plate, fixedly installing the lamp chuck installing plates on the back of the reflecting plate, fixedly connecting the lamp chuck components with the lamp chuck installing plates through bolts, and further fixing each annular heating lamp on the reflecting plate.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (6)
1. A design for an epitaxial annular infrared halogen heating lamp assembly, said method of installation comprising:
acquiring the total number of the annular heating lamps;
acquiring the corresponding radius size and the number of the arc-shaped halogen heating lamps of each annular heating lamp;
and fixing the installed annular heating lamp on the reflecting plate.
2. The design of an epitaxial annular infrared halogen heating lamp assembly of claim 1, wherein taking the total number of rings of annular heating lamps comprises:
determining the radius size of the first annular heating lamp, specifically:
wherein: c 1 Is the circumference of the first ring annular heating lamp, 2N 1 The number of the arc-shaped halogen heating lamps corresponding to the first ring-shaped heating lamp, R 1 Is the radial dimension of the first annular heating lamp, /) 1 The preset interval arc length in the first annular heating lamp;
acquiring the total number of the annular heating lamps according to the radius size of the first annular heating lamp, specifically:
Wherein: r is d The radius dimension of the ring-shaped heating lamp of the d-th ring, R the radius dimension of the processed workpiece, M the total number of the rings of the ring-shaped heating lamp, and d the serial number of the current number of the rings.
3. Design of an epitaxial annular infrared halogen heating lamp assembly, according to claim 1 or 2, characterized in that the corresponding radial dimensions of each annular heating lamp are taken, in particular:
wherein: r d Is the radial dimension, R, of the d-th ring annular heating lamp d+1 Is the radial dimension, R, of the d +1 th ring-shaped heating lamp d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring, d is the serial number of the current ring number, R is the radius size of the processed workpiece, and M is the total ring number of the ring-shaped heating lamp.
4. The design of an epitaxial annular infrared halogen heating lamp assembly of claim 3, wherein taking the number of arc halogen heating lamps corresponding to each of the annular heating lamps comprises:
comparing the corresponding radius sizes of two adjacent annular heating lamps, and determining the final radius size corresponding to each annular heating lamp according to the comparison result;
determining the number of the arc-shaped halogen heating lamps corresponding to each annular heating lamp according to the final radius size corresponding to each annular heating lamp, specifically:
Wherein: r d Is the radial dimension of the d-th ring annular heating lamp, l d Is a preset interval arc length of 2N in the d-th ring-shaped heating lamp d The number of the arc-shaped halogen heating lamps corresponding to the ring-shaped heating lamp of the ith ring is shown, and d is the serial number of the current ring number.
5. The design of an epitaxial annular infrared halogen heating lamp assembly of claim 4, wherein determining the final radial dimension for each of the annular heating lamps comprises:
determining whether the radial sizes corresponding to two adjacent annular heating lamps meet the following relational expression, if so, executing the next step, and if not, determining that the radial size corresponding to the annular heating lamps is the final radial size corresponding to the annular heating lamps, wherein the relational expression is as follows:
wherein: r is d Is the radial dimension, R, of the d-th ring-shaped heating lamp d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring is shown, and d is the serial number of the current ring number;
according to the radius size corresponding to the annular heating lamp of the largest ring, the final radius size corresponding to the current annular heating lamp is determined, and the method specifically comprises the following steps:
wherein: r is d Is the radial dimension, R, of the d-th ring annular heating lamp M Is the radius size of the Mth ring heating lamp, M is the total ring number of the ring heating lamps, R d-1 The radius size of the ring-shaped heating lamp of the (d-1) th ring is shown, and d is the serial number of the current ring number.
6. The design of an epitaxial annular infrared halogen heating lamp assembly of claim 5, wherein securing the installed annular heating lamp to a reflector plate comprises:
connecting two adjacent circular arc halogen heating lamps by a lamp chuck according to the number of the circular arc halogen heating lamps corresponding to each annular heating lamp;
and according to the assembled annular heating lamps, fixing each annular heating lamp on the reflecting plate through the lamp chuck mounting plate according to the final radius size corresponding to each annular heating lamp.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210554629.5A CN115371022B (en) | 2022-05-19 | 2022-05-19 | Design of epitaxial annular infrared halogen heating lamp assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210554629.5A CN115371022B (en) | 2022-05-19 | 2022-05-19 | Design of epitaxial annular infrared halogen heating lamp assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115371022A true CN115371022A (en) | 2022-11-22 |
| CN115371022B CN115371022B (en) | 2023-11-24 |
Family
ID=84061509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210554629.5A Active CN115371022B (en) | 2022-05-19 | 2022-05-19 | Design of epitaxial annular infrared halogen heating lamp assembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115371022B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB394791A (en) * | 1932-04-29 | 1933-07-06 | Stanley Edward Talbot | Improvements relating to anti-dazzle fittings for headlamps |
| JP2003059853A (en) * | 2001-08-08 | 2003-02-28 | Tokyo Electron Ltd | Lamp heater and heat treatment apparatus |
| US20150001202A1 (en) * | 2013-07-01 | 2015-01-01 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
| CN104865260A (en) * | 2015-05-23 | 2015-08-26 | 深圳德夏生物医学工程有限公司 | Annular multi-channel biochemical and specific protein analyzer provided with arc light bars and silicon photocells |
| CN111336438A (en) * | 2020-04-26 | 2020-06-26 | 众普森科技（株洲）有限公司 | Lamp fitting |
| CN111477565A (en) * | 2020-03-26 | 2020-07-31 | 北京北方华创微电子装备有限公司 | Epitaxial equipment |
-
2022
- 2022-05-19 CN CN202210554629.5A patent/CN115371022B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB394791A (en) * | 1932-04-29 | 1933-07-06 | Stanley Edward Talbot | Improvements relating to anti-dazzle fittings for headlamps |
| JP2003059853A (en) * | 2001-08-08 | 2003-02-28 | Tokyo Electron Ltd | Lamp heater and heat treatment apparatus |
| US20150001202A1 (en) * | 2013-07-01 | 2015-01-01 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
| CN104865260A (en) * | 2015-05-23 | 2015-08-26 | 深圳德夏生物医学工程有限公司 | Annular multi-channel biochemical and specific protein analyzer provided with arc light bars and silicon photocells |
| CN111477565A (en) * | 2020-03-26 | 2020-07-31 | 北京北方华创微电子装备有限公司 | Epitaxial equipment |
| CN111336438A (en) * | 2020-04-26 | 2020-06-26 | 众普森科技（株洲）有限公司 | Lamp fitting |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115371022B (en) | 2023-11-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8899402B2 (en) | Positioning jig and method of adjusting position | |
| CN115371022A (en) | Design of extended annular infrared halogen heating lamp assembly | |
| US9752708B2 (en) | Method for manufacturing an exhaust system and exhaust system | |
| CN110450065A (en) | The simple tooling fixture and its method for tooling of cylinder section part | |
| CN205842359U (en) | There is the LED device of radiator | |
| CN218932232U (en) | Rigid frame fixing device | |
| CN205118682U (en) | High -efficient heat dissipation LED electricity -saving lamp | |
| CN115379600A (en) | Epitaxial annular infrared halogen heating assembly and steady-state temperature field acquisition method | |
| CN212565664U (en) | Multi-light-source conversion device in additive manufacturing equipment | |
| CN210569266U (en) | Gas wall-mounted furnace and combustion chamber device | |
| JP2009168405A (en) | Manufacturing method of steam generator and heat transfer tube inserting tool | |
| CN211758551U (en) | High-precision chuck | |
| CN115379601A (en) | Arc-shaped halogen heating lamp | |
| CN207470275U (en) | Exhaust manifold | |
| CN210180235U (en) | Step diffusion heat exchange equipment | |
| CN205741121U (en) | Hearth of vertical tank type vacuum tempering furnace | |
| CN215103485U (en) | Cooling device for vacuum coating machine | |
| CN219379267U (en) | Whole tube brazing clamp for ceramic discharge tube | |
| CN219297601U (en) | Heat treatment bulging tool | |
| CN112033000A (en) | Hot air gun hot air guiding device and multi-pin chip dismounting hot air gun | |
| CN106090718A (en) | There is the LED device of radiator | |
| CN110640505A (en) | Clamp for turning four-crank shaft connecting rod neck | |
| CN216620008U (en) | Circulating air radiator | |
| CN217210424U (en) | Spraying device of direct air cooling system | |
| CN212645120U (en) | Drying device for bare copper flat wire |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |