CN115364732A - Uniform treatment method for micro-nano material suspension - Google Patents
Uniform treatment method for micro-nano material suspension Download PDFInfo
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- CN115364732A CN115364732A CN202210916109.4A CN202210916109A CN115364732A CN 115364732 A CN115364732 A CN 115364732A CN 202210916109 A CN202210916109 A CN 202210916109A CN 115364732 A CN115364732 A CN 115364732A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/80—Mixing by means of high-frequency vibrations above one kHz, e.g. ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F29/00—Mixers with rotating receptacles
- B01F29/10—Mixers with rotating receptacles with receptacles rotated about two different axes, e.g. receptacles having planetary motion
Abstract
The invention relates to a uniform treatment method of a micro-nano material suspension, which is applied to pretreatment in the field of plasma spraying of micro-nano raw materials. The processing method comprises the following steps: (1) And vibrating and loosening the micro-nano suspension material which is deposited for a long time. (2) And (3) carrying out revolution and rotation direction rotation on the micro-nano suspension material at a certain rotating speed and time. (3) And horizontally placing the micro-nano suspension material at 90 degrees and rotating the micro-nano suspension material along the axial direction at a certain rotating speed and time. (4) Use was made within 30 minutes after treatment and the same treatment steps were repeated after 120 minutes of use. The uniform treatment method adopted by the invention can ensure that the raw materials of the suspension are uniformly dispersed for a long time without agglomeration, and the performance of the coating after spraying is stable. The uniform treatment method adopted by the invention is simple and convenient to operate and low in cost consumption.
Description
Technical Field
The invention relates to a uniform treatment method of a micro-nano material suspension, which is a treatment method of a micro-nano suspension material before a plasma spraying process is carried out by using the micro-nano suspension material, and can effectively improve the uniformity of the suspension material and improve the internal structure of a coating.
Background
With the continuous development of semiconductor devices, the corrosion resistance of aluminum parts in etching chambers is required to be higher and higher. At present, many enterprises adopt a mode of spraying yttria on an aluminum substrate to enhance the corrosion resistance and the wear resistance of the aluminum substrate, but most of enterprises use powder raw materials to spray yttria, the particle size of the powder raw materials is large (40-60 um), and the generated coating has large pores. This makes the coating susceptible to the embedding of contaminating impurities inside and to the breakdown of acid-base and plasma etc. from the pores. With the increasingly fine nano-fabrication process of integrated circuits, the requirements on the compactness and cleanliness of the coating layer will be higher and higher. Therefore, the plasma spraying process using the ultrafine powder can meet the requirements of better density, higher corrosion resistance and plasma etching resistance. Ultrafine powders to ensure good process flow often require suspension formulation to disperse uniformly. However, the suspension is affected by solid content, obvious deposition occurs after a period of preparation, the suspension is not uniformly dispersed, the deposition efficiency is inconsistent when the suspension is sprayed on parts, and the coating has an uneven internal structure and is easy to have an agglomeration phenomenon.
Therefore, the patent uses the even processing method of micro-nano material suspension, through shaking, multiple modes such as rotatory, can effectively guarantee the homogeneity of suspension raw and other materials to ensure the meticulous and the homogeneity of spraying coating.
Disclosure of Invention
The purpose of the invention is realized by the following technical scheme:
a method for uniformly treating a micro-nano material suspension comprises the following steps:
vibrating and loosening a long-deposited micro-nano suspension material;
step (2), carrying out revolution and rotation direction rotation on the micro-nano suspension material at a certain rotation speed and time;
step (3) horizontally placing the micro-nano suspension material at 90 degrees and rotating the micro-nano suspension material along the axial direction at a certain rotating speed and time;
the treatment of step (4) was carried out within 20 minutes of use and the same treatment steps were carried out again after 180 minutes of use.
The invention has the beneficial effects that:
1. the uniform treatment method adopted by the invention can ensure that the raw materials of the suspension are uniformly dispersed for a long time without agglomeration, and the coating after spraying has stable performance.
2. The uniform treatment method adopted by the invention is simple and convenient to operate and low in cost consumption.
Detailed Description
The present invention will be described in further detail with reference to the following examples.
A method for uniformly treating a micro-nano material suspension comprises the following steps:
vibrating and loosening a long-deposited micro-nano suspension material;
step (2) at a certain rotating speed and time, carrying out revolution and rotation direction rotation on the micro-nano suspension material;
step (3) horizontally placing the micro-nano suspension material at 90 degrees and rotating the micro-nano suspension material along the axial direction at a certain rotating speed and time;
the treatment of step (4) was carried out within 20 minutes of use and the same treatment steps were carried out again after 180 minutes of use.
The size of the micro-nano suspension material is between 5nm and 15 mu m.
The micro-nano suspension material is mainly an oxide, including but not limited to yttrium oxide, aluminum oxide and zirconium oxide.
Vibrating and loosening, namely loosening the micro-nano material deposited at the bottom by using a leather hammer continuous knocking mode to enable the micro-nano material to be loosened and leave the bottom of the bottle;
and (2) vibrating and loosening the material in the step (1), wherein an ultrasonic vibration mode is used for loosening the material, the vibration frequency is 40-60KHz, and the vibration power is 5-50W/in2.
And (3) in the steps (2) and (3), the rotating speed is 10-300rpm, and the rotating time is 3-48 hours.
And (3) in the step (2), the raw material container is placed on an outsourcing device to revolve with the diameter of 200-500mm by using the revolving and rotating direction, and meanwhile, the device can realize the rotation of the raw material container.
And (3) horizontally placing the container in the 90-degree direction and axially rotating the container by using a rotating roller, and horizontally placing the container on the rotating roller for rotating.
After the step (4) is rotated, a stirrer is still needed to rotate the micro-nano suspension material in the using process, and if the micro-nano suspension material is not rotated, the steps (1), (2) and (3) are repeated after 20 minutes.
Examples
First, a submicron powder of yttria having an average particle size of 70nm was used to prepare a suspension having a solid content of 20%. Significant deposition occurred 48 hours after the suspension was complete and was not used. And placing the suspension container in an ultrasonic groove for oscillation, wherein the oscillation frequency is 49KHz, the oscillation power is 15W/in2, and the raw materials are not deposited at the bottom after oscillation and are loosened. The suspension container was placed on a special apparatus, and revolution and rotation of 350mm in diameter were carried out simultaneously at 70rpm for 4 hours. After the rotation, the suspension material was placed on a rotating roller and rotated at 60rpm for 3 hours. And pouring the mixture into a powder feeder for spraying 15 minutes after rotation, and continuously repeating the operations 120 minutes after spraying.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. The invention can be used for various parts in the semiconductor industry which need to be provided with the corrosion-resistant functional coating, but is not limited to the field of semiconductors. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A uniform treatment method for micro-nano material suspension is characterized by comprising the following steps:
vibrating and loosening a long-deposited micro-nano suspension material;
step (2) at a certain rotating speed and time, carrying out revolution and rotation direction rotation on the micro-nano suspension material;
step (3) horizontally placing the micro-nano suspension material at 90 degrees and rotating the micro-nano suspension material along the axial direction at a certain rotating speed and time;
the treatment of step (4) was carried out within 20 minutes of use and the same treatment steps were carried out again after 180 minutes of use.
2. The uniform treatment method of the micro-nano material suspension according to claim 1, characterized by comprising the following steps: the size of the micro-nano suspension material is between 5nm and 15 mu m.
The micro-nano suspension material is mainly oxide, including but not limited to yttrium oxide, aluminum oxide, zirconium oxide.
3. The method for uniformly treating the micro-nano material suspension according to claim 1, is characterized in that: and (3) vibrating to loosen the micro-nano material deposited at the bottom in a skin hammer continuous knocking mode, so that the micro-nano material is loosened and separated from the bottom of the bottle.
4. The uniform treatment method of the micro-nano material suspension according to claim 1, characterized by comprising the following steps: and (2) vibrating and loosening the material in the step (1), wherein an ultrasonic vibration mode is used for loosening the material, the vibration frequency is 40-60KHz, and the vibration power is 5-50W/in2.
5. The method for uniformly treating the micro-nano material suspension according to claim 1, is characterized in that: and (3) in the steps (2) and (3), the rotating speed is 10-300rpm, and the rotating time is 3-48 hours.
6. The method for uniformly treating the micro-nano material suspension according to claim 1, is characterized in that: in the step (2), the revolution and rotation directions are rotated, outsourcing equipment can be used, the raw material container is arranged on the equipment, the revolution is carried out by taking the diameter of 200-500mm as the diameter, and meanwhile, the equipment can realize the rotation of the raw material container.
7. The uniform treatment method of the micro-nano material suspension according to claim 1, characterized by comprising the following steps: and (4) horizontally placing the container in the step (3) for 90 degrees and axially rotating, wherein the step is realized by using a rotating roller, and the container is horizontally placed on the rotating roller for rotating.
8. The method for uniformly treating the micro-nano material suspension according to claim 1, is characterized in that: after the step (4) is rotated, a stirrer is still needed to rotate the micro-nano suspension material in the using process, and if the micro-nano suspension material is not rotated, the steps (1), (2) and (3) are repeated after 20 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210916109.4A CN115364732A (en) | 2022-08-01 | 2022-08-01 | Uniform treatment method for micro-nano material suspension |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210916109.4A CN115364732A (en) | 2022-08-01 | 2022-08-01 | Uniform treatment method for micro-nano material suspension |
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| CN115364732A true CN115364732A (en) | 2022-11-22 |
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| CN202210916109.4A Pending CN115364732A (en) | 2022-08-01 | 2022-08-01 | Uniform treatment method for micro-nano material suspension |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002320835A (en) * | 2001-04-27 | 2002-11-05 | Takeda Chem Ind Ltd | Method for preparing suspension colloid |
| WO2007126048A1 (en) * | 2006-04-28 | 2007-11-08 | Daiichi Sankyo Company, Limited | Process for producing homogeneous and stable suspension and apparatus therefor |
| CN102992816A (en) * | 2012-10-12 | 2013-03-27 | 陕西科技大学 | Method for preparing carbon/carbon composite material SiC-MoSi2-C-AlPO4 composite gradient external coating |
| CN109796007A (en) * | 2019-02-19 | 2019-05-24 | 昆明理工大学 | Micro-nano size biomass fiber and the suspension mixed preparation method of carbon nanotube |
| CN110160854A (en) * | 2019-05-23 | 2019-08-23 | 深圳安赛诊断技术有限公司 | It is a kind of to keep the device of bead suspension uniformity, method and application thereof |
| CN114478035A (en) * | 2022-01-17 | 2022-05-13 | 北京富创精密半导体有限公司 | Method for treating suspension of yttrium oxide and similar oxide ceramic materials |
-
2022
- 2022-08-01 CN CN202210916109.4A patent/CN115364732A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002320835A (en) * | 2001-04-27 | 2002-11-05 | Takeda Chem Ind Ltd | Method for preparing suspension colloid |
| WO2007126048A1 (en) * | 2006-04-28 | 2007-11-08 | Daiichi Sankyo Company, Limited | Process for producing homogeneous and stable suspension and apparatus therefor |
| CN102992816A (en) * | 2012-10-12 | 2013-03-27 | 陕西科技大学 | Method for preparing carbon/carbon composite material SiC-MoSi2-C-AlPO4 composite gradient external coating |
| CN109796007A (en) * | 2019-02-19 | 2019-05-24 | 昆明理工大学 | Micro-nano size biomass fiber and the suspension mixed preparation method of carbon nanotube |
| CN110160854A (en) * | 2019-05-23 | 2019-08-23 | 深圳安赛诊断技术有限公司 | It is a kind of to keep the device of bead suspension uniformity, method and application thereof |
| CN114478035A (en) * | 2022-01-17 | 2022-05-13 | 北京富创精密半导体有限公司 | Method for treating suspension of yttrium oxide and similar oxide ceramic materials |
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