CN115332139A - Position calibration method for positioning tool and manipulator - Google Patents

Position calibration method for positioning tool and manipulator Download PDF

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Publication number
CN115332139A
CN115332139A CN202211054907.7A CN202211054907A CN115332139A CN 115332139 A CN115332139 A CN 115332139A CN 202211054907 A CN202211054907 A CN 202211054907A CN 115332139 A CN115332139 A CN 115332139A
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CN
China
Prior art keywords
positioning
base
manipulator
clamping
piece
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Application number
CN202211054907.7A
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Chinese (zh)
Inventor
郝云鹏
唐鹏
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
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Priority to CN202211054907.7A priority Critical patent/CN115332139A/en
Publication of CN115332139A publication Critical patent/CN115332139A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The application discloses a positioning tool and a position calibration method of a manipulator, wherein the positioning tool comprises a base, a clamping assembly and a positioning assembly; the base is detachably arranged on the positioning position of the bearing surface of the bearing disc in the semiconductor process equipment; the clamping assembly comprises a supporting piece and a clamping piece, the supporting piece is arranged on the base in a sliding mode, the clamping piece is arranged on one side, away from the base, of the supporting piece, a positioning portion is arranged on the supporting piece and used for being matched with the corresponding position of the manipulator to position the manipulator, and the clamping piece and the supporting piece are used for clamping and fixing the manipulator; the positioning assembly is arranged on the support piece, the base is provided with a limiting portion, and the positioning assembly is matched with the limiting portion and used for fixing the support piece at the calibration position of the base. Above-mentioned location frock can solve and has the precision relatively poor to the mode that carries out the position to the manipulator at present, and produces serious harmful effects's problem easily to the cleanliness factor of wafer.

Description

Position calibration method for positioning tool and manipulator
Technical Field
The application relates to the technical field of semiconductor manufacturing, in particular to a position calibration method for a positioning tool and a manipulator.
Background
The epitaxial process is an important process in semiconductor manufacturing, the epitaxial process is usually performed in epitaxial equipment, and the yield of the epitaxial process is critically influenced by particle pollution, so that the requirements of various links in the epitaxial process on cleanliness are relatively high.
In the epitaxial process, a robot is generally used to transfer the wafer in the epitaxial equipment, take out the wafer stored in the wafer box, purge and correct the wafer, and transfer the wafer into the vacuum chamber to perform the conversion between the atmosphere and the vacuum environment. At present, the position of a manipulator is usually adjusted by using a steel ruler, and the manipulator is manually controlled to generate corresponding displacement in a three-dimensional space, so that the purpose of deviation correction is realized. The accuracy of this kind of mode of rectifying is relatively poor, and steel chi and user's hand contact manipulator easily and cause the manipulator contaminated to produce serious adverse effect to the cleanliness factor of wafer.
Disclosure of Invention
The application discloses a positioning tool and a position calibration method of a manipulator, and aims to solve the problems that the precision is poor in the existing position correction mode of the manipulator, and serious adverse effects are easily caused to the cleanliness of a wafer.
In order to solve the above problems, the following technical solutions are adopted in the present application:
in a first aspect, the application discloses a positioning tool for calibrating the position of a manipulator in semiconductor process equipment, wherein the positioning tool comprises a base, a clamping assembly and a positioning assembly;
the base is detachably arranged at the positioning position of the bearing surface of the bearing disc in the semiconductor process equipment;
the clamping assembly comprises a supporting piece and a clamping piece, the supporting piece is arranged on the base in a sliding mode, the clamping piece is arranged on one side, away from the base, of the supporting piece, a positioning portion is arranged on the supporting piece and used for being matched with the corresponding position of the manipulator to position the manipulator, and the clamping piece and the supporting piece are used for clamping and fixing the manipulator;
the positioning assembly is arranged on the support piece, the base is provided with a limiting portion, and the positioning assembly is matched with the limiting portion and used for fixing the support piece to the calibration position of the base.
In a second aspect, the application discloses a position calibration method for a manipulator, which is applied to the positioning tool, and the position calibration method includes:
arranging a base of the positioning tool on a positioning position of a bearing surface of a bearing disc in the semiconductor process equipment;
positioning a manipulator at a position corresponding to the positioning part, and clamping and fixing the manipulator between the supporting part and the clamping part;
the supporting piece is controlled to drive the manipulator to slide relative to the base until the positioning assembly is matched with the limiting part;
and acquiring and recording relative position information between the manipulator and the bearing disc.
The technical scheme who this application adopted can reach following beneficial effect:
the embodiment of the application discloses a positioning tool for carrying out position calibration on a manipulator in semiconductor process equipment. In the positioning tool, the base can be detachably arranged at the positioning position of the bearing surface of the bearing plate in the semiconductor process equipment, so that the positioning tool and the bearing plate serving as the position reference of the manipulator form a relatively fixed relation, and a position reference is provided for the subsequent position calibration of the manipulator. And the clamping assembly in the positioning tool can clamp and fix the manipulator through the supporting piece and the clamping piece, and in the process of clamping and fixing the manipulator, the manipulator is positioned through the positioning part of the clamping assembly, so that the relative position between the manipulator and the clamping assembly is unique before the manipulator is subjected to position calibration at each time, and the manipulator is further ensured to have higher position calibration precision. Simultaneously, support piece among the centre gripping subassembly slides and sets up on the base to in-process to relative position between adjusting manipulator and the base, can utilize the centre gripping subassembly as medium drive manipulator relative base and move in the horizontal direction, and look for the alignment position, at this in-process, because the manipulator can not contact with other live bodies or objects, thereby the manipulator can not appear in the contaminated condition of position alignment process, guarantee that the manipulator has higher cleanliness factor, and then guarantee that follow-up need be higher with the yields of the wafer of manipulator contact. Correspondingly, in the process that the manipulator moves along the horizontal direction relative to the base, if the supporting piece (or the manipulator) is located at the calibration position of the base, the positioning component on the supporting piece can be matched with the limiting part on the base, so that the supporting piece is fixed at the calibration position of the base, the position calibration work of the manipulator is completed, and the position information parameters of the manipulator at the moment can be recorded, so that the position information parameters of the relative bearing disc can be obtained when the manipulator is in the calibration state, and reference is provided for the subsequent processing technology.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
fig. 1 is an exploded schematic view of a positioning tool disclosed in an embodiment of the present application;
FIG. 2 is a schematic structural diagram of a base and an upper cover in the positioning tool disclosed in the embodiment of the present application;
fig. 3 is a schematic structural view of a base in another direction in the positioning tool disclosed in the embodiment of the present application;
FIG. 4 isbase:Sub>A schematic cross-sectional view of the structure shown in FIG. 2 in the direction A-A;
FIG. 5 is a schematic cross-sectional view of the structure shown in FIG. 3 in the direction B-B;
FIG. 6 is a schematic cross-sectional view of the structure shown in FIG. 2 in the direction C-C;
fig. 7 is a schematic view of a part of a structure including a clamping assembly and the like in the positioning tool disclosed in the embodiment of the present application;
FIG. 8 is a schematic view of the structure shown in FIG. 7 in another orientation;
FIG. 9 isbase:Sub>A schematic cross-sectional view of the structure shown in FIG. 8 in the direction A-A;
FIG. 10 is an assembly view of a positioning tool disclosed in an embodiment of the present application;
fig. 11 is a schematic diagram illustrating a self-positioning process of a positioning tool disclosed in an embodiment of the present application;
fig. 12 is a schematic flow chart illustrating a positioning tool for positioning a robot according to an embodiment of the disclosure;
FIG. 13 is a schematic view of a reference device configured to cooperate with a positioning tool disclosed in the claimed embodiments;
fig. 14 is a flowchart illustrating a method for calibrating a position of a robot according to an embodiment of the present disclosure.
Description of reference numerals:
100-base, 110-first movable groove, 111-first groove body, 112-second groove body, 113-transition groove body, 120-pin hole, 130-first positioning piece, 140-crown block positioning base line, 150-guide gap,
200-upper cover, 210-second movable groove,
310-support body, 320-clamping piece, 330-profiling part,
410-a slide block, 420-a connecting shaft,
510-positioning pin, 520-elastic piece, 530-limiting piece, 540-connecting piece, 550-limiting boss,
910-carrying tray, 911-second positioning piece and 920-mechanical arm.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be described in detail and completely with reference to the following specific embodiments of the present application and the accompanying drawings. It should be apparent that the described embodiments are only some of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Technical solutions disclosed in the embodiments of the present application are described in detail below with reference to the accompanying drawings.
The embodiment of the application discloses a positioning tool which can be applied to a manipulator position calibration link in the semiconductor manufacturing process. Specifically, in the processes such as the epitaxial process,
wafers before the process are stored in a wafer box and are hoisted to wafer loading Equipment of an EFEM (electronic Front-End Module), a manipulator in the EFEM takes the wafers in the atmospheric environment out of the wafer box, and the wafers are conveyed to a wafer pre-pumping cavity for conversion between the atmospheric environment and the vacuum environment after being purged and corrected, so that the next process is continued, and in the process, the manipulator is required to be ensured to have a precise wafer taking and placing position.
As described above, the positioning tool disclosed in the embodiment of the present application is an apparatus for calibrating a position of a manipulator in semiconductor processing equipment, and the positioning tool can provide a calibration effect for the position of the manipulator relative to a carrier plate by being mounted on the carrier plate in the semiconductor processing equipment. For this reason, need make location frock and bear the dish and form the location relation, specifically, can make location frock whole support on the loading face that bears the dish to make the two form the location relation in vertical direction, so that the location frock can be positioned on the location position of the loading face that bears the dish. More specifically, at least three second positioning members 911 may be disposed on the carrying surface, and each second positioning member 911 is used to cooperate with the first positioning member 130 on the positioning tool, so that the positioning tool and the carrying surface form a positioning relationship in the horizontal direction, and thus the positioning tool and the carrying tray can be ensured to form a relatively fixed state, and on this basis, the positioning tool can be used to provide a position calibration function for the manipulator.
As shown in fig. 1 to 12, a positioning tool disclosed in an embodiment of the present application includes a base 100, a clamping assembly, and a positioning assembly.
The base 100 can be detachably disposed on a positioning position of a carrying surface of the carrying tray 910 in the semiconductor processing equipment, so as to provide a positioning reference for the whole positioning tool through the base 100. Alternatively, the base 100 can be secured to the carrier plate 910 using a plurality of fasteners or a plurality of removable fasteners such as bolts. In addition, a transverse line groove is carved on the upper surface of the base 100, which is a crown block positioning baseline 140 and can be used as a transverse positioning reference for hoisting a crown block.
In another embodiment of the present application, as shown in fig. 1 to 6, the base 100 is provided with at least three first positioning members 130, the first positioning members 130 may be a structure forming a positioning relationship between the base 100 and the carrying tray 910, as shown in fig. 13, the carrying tray 910 is provided with a second positioning member 911, the first positioning members 130 and the second positioning member 911 are provided in plural, and the plural first positioning members 130 and the plural second positioning members 911 are inserted and matched one-to-one, so that the base 100 and the carrying tray 910 can form a relatively fixed relationship in a horizontal direction.
Specifically, one of the first positioning members 130 and the second positioning members 911 may be a column structure, and the other one may be a hole structure, so that the plurality of first positioning members 130 and the plurality of second positioning members 911 are inserted and matched in a one-to-one correspondence manner, and a positioning effect can be provided for the base 100 and the carrier plate 910 in a horizontal direction. The thickness direction of the base 100 may be the vertical direction, and the horizontal direction is a direction perpendicular to the thickness direction of the base 100.
Optionally, the number of the first positioning members 130 is at least three, and the first positioning members 130 are arranged around the vertical direction, and when the number of the first positioning members 130 and the second positioning members 911 is more, the stability of the relatively fixed relationship between the base 100 and the carrying tray 910 in the horizontal direction can be further improved. Further, under the condition that the second positioning member 911 is a cylindrical structure, the first positioning member 130 may be a long strip-shaped groove-shaped structure, and the extending direction of the first positioning member 130 may be correspondingly determined according to the number of the first positioning members 130, so that the plurality of first positioning members 130 may be adapted to the second positioning members 911 with different size distributions, thereby improving the application range of the positioning tool. For example, when the number of the first positioning members 130 is three, the connecting lines between the three second positioning members 911 may form an equilateral triangle, and in this case, the extending direction of the first positioning member 130 may be the direction of the connecting line between the corresponding second positioning member 911 and the center of the triangle.
In addition, under the condition that first setting element 130 is the slot-like structure, can make first setting element 130 include trapezoidal guide way and sharp constant head tank, and make the great notch of trapezoidal guide way mesoscale be located the lower surface of base 100 to utilize trapezoidal guide way to provide the guide effect for second setting element 911, reduce the cooperation degree of difficulty between first setting element 130 and the second setting element 911.
The centre gripping subassembly is for the part of centre gripping manipulator 920 in the location frock, and the centre gripping subassembly includes support piece and clamping piece 320, and support piece slides and sets up on base 100 to under the effect of centre gripping subassembly, make the staff can directly utilize the centre gripping subassembly to change the relative position between manipulator 920 and the base 100, prevent that the staff is direct to contact with manipulator 920, and then prevent that manipulator 920 from being contaminated by the staff. Optionally, the upper surface of the base 100 is planar, which allows the support to slide on the upper surface of the base 100, thereby changing the relative position between the clamping assembly and the base 100. To improve the stability of the positional relationship of the clamping assembly and the base 100 in the vertical direction, the support and the base 100 may be brought into a magnetically attractive mating relationship to vertically position the clamping assembly and the base 100 relative to each other.
The clamping member 320 is disposed on a side of the supporting member away from the base 100, and the supporting member and the clamping member 320 are adjustably connected in a thickness direction of the base 100, so that the supporting member and the clamping member can clamp the fixing manipulator 920. Specifically, both the supporting member and the clamping member 320 may be plate-shaped structural members, and a spring and other devices may be disposed between the supporting member and the clamping member 320, so that the distance between the supporting member and the clamping member 320 may be increased by extending the spring, the manipulator 920 may extend into a space between the supporting member and the clamping member, and then, under the elastic action of the spring itself, the manipulator 920 may be clamped and fixed between the clamping member and the supporting member.
And, be equipped with location portion on the support piece, location portion is used for and manipulator 920's the position cooperation that corresponds to fix a position manipulator 920, thereby guarantee at every turn utilize the location frock to carry out the position calibration to manipulator 920 before, the relative position between the centre gripping subassembly of manipulator 920 and location frock is all unique, with the calibration accuracy of guaranteeing the location frock. Optionally, the positioning portion is a positioning mark, so as to provide a calibration function for the relative position relationship between the robot 920 and the support by describing the positioning mark on the surface of the support, and ensure that the relative position between the clamping assembly and the base 100 is in the aligned state, and the relative position between the robot 920 and the base 100 is also in the aligned state.
In order to form a positioning relationship between the clamping assembly and the base 100 in the thickness direction of the base 100, the positioning assembly is disposed on the supporting member, and the positioning assembly is disposed on the base 100, so that the positioning assembly is engaged with the limiting portion to fix the supporting member at the calibration position of the base 100. That is, based on the relative position relationship between the robot 920 and the susceptor 100 in the aligned state, a position-limiting portion is formed on the susceptor 100 in advance, and the positioning assembly is disposed at the corresponding position of the support, so as to confirm that the robot 920 and the susceptor 100 are in the aligned state when the positioning assembly and the position-limiting portion are in the fitted relationship.
Specifically, the limiting portion may be a limiting groove, and the positioning assembly may include a positioning block, and the positioning block and the limiting groove may be configured and numbered to enable the support and the base 100 to form a relatively fixed relationship in both a horizontal direction and a direction around a vertical direction when the positioning block and the limiting groove are engaged with each other. For example, the locating piece and the limiting groove are both non-circular structural members, the number of the locating piece and the limiting groove is one, the limiting groove is concavely arranged on the upper surface of the base 100, the locating piece is convexly arranged on the lower surface of the clamping piece, and in the process that the clamping piece slides relative to the base 100, when the locating piece corresponds to the limiting groove, the locating piece can slide into the limiting groove, so that the clamping piece and the base 100 are mutually limited in the horizontal direction and the direction around the vertical direction. Or, the number of the positioning blocks and the number of the limiting grooves are plural, in this case, the plurality of positioning blocks correspond to the plurality of limiting grooves one to one, and even if the positioning blocks and the corresponding limiting grooves are circular structural members, the clamping member and the base 100 can be limited in the horizontal direction and the direction around the vertical direction by fitting the plurality of positioning blocks into the plurality of limiting grooves one to one. Of course, the structural forms of the positioning component and the limiting part may be other, and the text is not listed here.
In addition, under the condition that the clamping piece and the base 100 are mutually positioned by adopting the technical scheme, after the position calibration work of the manipulator 920 is completed once, in order to ensure that the positioning tool has the capability of calibrating the position of the manipulator 920 for the next time, the clamping piece and the base 100 need to be restored to the state with relative sliding capability in the horizontal direction, and on the basis, the clamping piece can be restored to the state with relative sliding with the base 100 by applying the drawing force to the clamping piece and enabling the positioning block to be separated from the limiting groove, so that the preparation for providing the calibration work for the next time is prepared.
The embodiment of the application discloses a positioning tool for carrying out position calibration on a manipulator 920 in semiconductor process equipment. In the positioning tool, the base 100 can be detachably disposed at a positioning position of a carrying surface of the carrying tray 910 in the semiconductor processing equipment, so that the positioning tool and the carrying tray 910 serving as a position reference of the robot 920 form a relatively fixed relationship, and a position reference is provided for subsequent position calibration of the robot 920. And, the centre gripping subassembly in the location frock can press from both sides tight fixed manipulator 920 through its support piece and clamping piece 320, and at the in-process of the fixed manipulator 920 of centre gripping, fixes a position manipulator 920 through the location portion of centre gripping subassembly, before guaranteeing to carry out the position calibration to manipulator 920 at every turn, the relative position between manipulator 920 and the centre gripping subassembly is all unique, and then guarantees that manipulator 920 has higher position calibration precision. Meanwhile, the supporting piece in the clamping assembly is arranged on the base 100 in a sliding mode, in the process of adjusting the relative position between the manipulator 920 and the base 100, the clamping assembly can be used as a medium to drive the manipulator 920 to move in the horizontal direction relative to the base 100, the calibration position is found, in the process, the manipulator 920 cannot be in contact with other living bodies or objects, the situation that the manipulator 920 is polluted in the position calibration process cannot occur, the manipulator 920 is guaranteed to have high cleanliness, and the follow-up high yield of wafers needing to be in contact with the manipulator 920 is guaranteed. Correspondingly, in the process that the manipulator 920 moves in the horizontal direction relative to the base 100, if the support member (or the manipulator 920) is located at the calibration position of the base 100, the positioning component on the support member can be matched with the limiting part on the base 100, so that the support member is fixed at the calibration position of the base 100, the position calibration work of the manipulator 920 is completed, and the position information parameter of the manipulator 920 at this time can be recorded, that is, the position information parameter relative to the bearing disc 910 when the manipulator 920 is in the calibration state can be obtained, so as to provide reference for the subsequent processing process.
In order to reduce the difficulty of the position calibration between the base 100 and the support, the relative sliding range between the support and the base 100 may be limited, so as to increase the probability of the alignment between the calibration positions of the support and the base, and reduce the difficulty of the position calibration of the robot 920.
Specifically, a first movable groove 110 may be provided in the base 100, and the first movable groove 110 is a structure of the base 100 for slidably fitting with a support member, so that the support member can slide in the first movable groove 110 in a horizontal direction to adjust a relative position between the robot and the base 100. The specific shape and size of the first movable groove 110 may be correspondingly determined according to the shape and size of the support member (the portion in the first movable groove 110), and the support member is ensured to be movable in the horizontal direction in the first movable groove 110, and the specific shape and size of each of the two are not limited.
As described above, the position-limiting portion may be a position-limiting groove, and more specifically, the position-limiting portion is the pin hole 120, and the pin hole 120 is disposed on the base 100. And, the pin hole 120 is disposed in the first movable groove 110 to ensure that the positioning component disposed on the support can be engaged with the pin hole 120. Specifically, the pin hole 120 is extended toward the lower surface of the base 100, that is, the pin hole 120 is recessed with respect to the first movable groove 110, so that the pin hole 120 can provide a positioning function in a horizontal direction for the positioning assembly when the positioning assembly is inserted into the pin hole 120. The pin holes 120 may be blind holes or through holes, and the depth of the pin holes 120 may be determined according to actual conditions, optionally, the depth of the pin holes 120 is greater than the size of the portion of the positioning assembly located outside the support member in the vertical direction, so that the insertion fit relationship between the positioning assembly and the pin holes 120 may be more stable, and the reliability of the positioning relationship between the base 100 and the support member is improved.
As described above, the support is configured to be slidably engaged with the base 100, and is further configured to clamp and fix the robot with the clamping member 320, and for this purpose, the support includes a plurality of portions, and functions of the plurality of portions are different. Specifically, the supporter may include a support body 310, a slider 410, and a coupling shaft 420, wherein the slider 410 is fixedly coupled with the support body 310 by the coupling shaft 420. Specifically, the support body 310, the sliding block 410 and the connecting shaft 420 may be made of hard materials such as metal, and any adjacent two of the sliding block 410, the connecting shaft 420 and the support body 310 may be formed in an integral molding manner, or may be fixedly connected by welding or the like; of course, the adjacent two can also form a detachable fixed connection relationship through a threaded connection piece and the like.
As described above, a portion of the supporting member may extend into the first movable groove 110 to enable the supporting member and the base 100 to form a sliding fit relationship in the horizontal direction, and specifically, the sliding block 410 may be slidably disposed on the base 100, and the sliding block 410 is located in the first movable groove 110 of the base 100 to enable the supporting member and the base 100 to slide relatively in the horizontal direction. Meanwhile, the positioning component may be disposed on the sliding block 410, and optionally, the positioning component may be formed on a side of the sliding block 410 away from the connecting shaft 420 by a fixed connection manner such as integral forming, so as to be matched with the pin hole 120 formed on the bottom surface of the first movable groove 110. Of course, the positioning assembly may have other structures and may be connected to the slider 410 in other assembling manners, which will not be described in detail herein in view of brevity.
In the above embodiments, the supporting member may be slidably disposed on the upper surface of the base 100, or the supporting member may also be slidably disposed in the first movable slot 110 of the base 100 through the sliding block 410 thereof, in such technical solutions, a certain downward force may be applied to the supporting member, or the supporting member and the base 100 are magnetically attracted to cooperate, so as to form a stable relative fixed relationship between the supporting member and the base 100 in the vertical direction, thereby ensuring that the robot 920 and the base 100 form an accurate positional relationship in the vertical direction.
In another embodiment of the present application, the positioning tool further includes an upper cover 200, the upper cover 200 is fixed and covers the upper side of the base 100, the upper cover 200 is provided with a second movable groove 210, and the connecting shaft 420 is movably disposed in the second movable groove 210 in a direction perpendicular to the thickness direction of the base 100, that is, the connecting shaft 420 can move in the second movable groove 210 in the horizontal direction, for this reason, the connecting shaft 420 can be used to drive the sliding block 410 to move in the horizontal direction relative to the base 100 in a manner of driving the supporting body 310, and the arrangement of the second movable groove 210 does not hinder the moving process of the sliding block 410 in the first movable groove 110. Specifically, after the slider 410 is mounted in the first movable groove 110, the upper cover 200 may be fixedly mounted above the base 100 using a screw connection or the like; of course, when the base 100 and the cover 200 are both made of metal or other materials, the cover 200 and the base 100 can be securely fixed by welding.
In addition, by setting the thickness of the slider 410 (i.e., the size of the slider 410 in the vertical direction), the slider 410 can be restricted in the thickness direction of the base 100 (i.e., in the vertical direction) and between the upper cover 200 and the base 100 after the upper cover 200 and the base 100 are in a relatively fixed relationship in the vertical direction. More specifically, the thickness of the slider 410 may be made equal to the thickness of the first movable groove 110, and the slider 410 may be moved in the horizontal direction in the first movable groove 110. Under the condition of adopting above-mentioned technical scheme, in slider 410 was installed to first activity groove 110, and after upper cover 200 lid was established and is fixed in base 100, can guarantee 410 and can't be relative base 100 activity in vertical direction to can reduce the work degree of difficulty of the position of location frock calibration manipulator 920, promote the convenience of location frock.
In addition, under the condition of adopting the technical scheme, the bottom of the sliding block 410 can be provided with a containing hole, and the positioning component is movably arranged in the containing hole; and, by making the size of the positioning component in the thickness direction larger than the size of the pin hole 120, when the slider 410 drives the positioning component to move to the position of the pin hole 120 in the base 100, a part of the positioning component can slide out of the accommodating hole under the action of its own gravity and be embedded into the pin hole 120, so as to provide a position anchoring effect for the slider 410, and thus the support and the base 100 are in a relatively fixed relationship in the horizontal direction and the direction around the vertical direction.
Further, the positioning assembly includes a positioning pin 510 and an elastic member 520, the elastic member 520 is connected to the positioning pin 510, such that the positioning pin 510 can be movably connected to the slider 410 through the elastic member 520, and the elastic member 520 is configured to drive a portion of the positioning pin 510 to protrude out of the receiving hole and into the pin hole 120, so as to fix the support body at the alignment position of the base 100.
Specifically, the shape and size of the receiving hole may be determined according to the shape and size of the positioning pin 510, ensuring that the positioning pin 510 can be received within the receiving hole. The elastic member 520 may be disposed between the positioning pin 510 and the slider 410, and opposite ends of the elastic member 520 are respectively connected to the bottom of the receiving holes of the positioning pin 510 and the slider 410, and in a case where the positioning pin 510 does not protrude out of the receiving hole, the elastic member 520 is in a compressed state, so that when the positioning pin 510 is only acted by the elastic member 520, it is ensured that a part of the positioning pin 510 can protrude out of the receiving hole, and in a case where the positioning pin 510 corresponds to the position of the pin hole 120, a part of the positioning pin 510 is driven to protrude into the pin hole 120, thereby achieving the purpose of fixing the supporter and the base 100 in the horizontal direction and in the direction around the vertical direction. Of course, the elastic element 520 may be disposed at other positions, and the state of the elastic element 520 is changed accordingly, which is not described herein for brevity.
In addition, in order to ensure that the positioning pin 510 and the pin hole 120 in the insertion fit enable the base 100 and the support member to form a limit fit relationship in the horizontal direction, the positioning pin 510 and the pin hole 120 need to have the same size, and the positioning pin 510 is ensured not to swing in the horizontal direction in the pin hole 120. Meanwhile, in order to ensure that the positioning pins 510 and the pin holes 120 in the insertion fit enable the base 100 and the support member to form a limit fit relation in a direction around the vertical direction, the number of the positioning pins 510 and the number of the pin holes 120 may be multiple and may correspond to one another. In another embodiment of the present application, the positioning pins 510 and the pin holes 120 are in a non-circular configuration when viewed from a plane perpendicular to the thickness direction of the base 100 (i.e., a horizontal plane), so that the positioning pins 510 inserted into the pin holes 120 can provide a horizontal and a vertical direction limit for the base 100 and the clamping assembly.
In addition, the pin hole 120 may be a through hole, and a pushing force is applied through the lower surface of the base 100, so that the positioning pin 510 can overcome the elastic force of the elastic member 520 and retract into the receiving hole of the slider 410, thereby removing the restriction on the sliding of the slider 410 relative to the base 100. Of course, the pin hole 120 may also be a blind hole, in which case, the positioning pin 510 may be formed by a magnetic material, and the positioning pin 510 may overcome the elastic force of the elastic member 520 by using the magnetic repulsive force; alternatively, the receiving hole may be a through hole, and a pulling force is applied to the positioning pin 510 from an end of the receiving hole away from the base 100, so that the positioning pin 510 overcomes the elastic force of the elastic member 520 and retracts into the receiving hole.
As described above, the positioning tool includes the positioning assembly, and optionally, the positioning pin 510 and the elastic member 520 in the positioning tool may be disposed outside the connecting shaft 420, and a structure such as a guide member may be disposed on the elastic member 520, so as to improve the motion stability of the elastic member 520 and the positioning pin 510. In another embodiment of the present application, as shown in fig. 9, the connection shaft 420 is provided with an inner cavity, that is, the connection shaft 420 is a hollow structural member, and the inner cavity has an opening located at one end of the connection shaft 420 away from the slider 410, that is, the inner cavity may communicate with one end of the connection shaft 420 away from the slider 410 through the opening, so that other devices may be installed into the inner cavity of the connection shaft 420 through the opening of the connection shaft 420. Meanwhile, the accommodating hole penetrates through the slider 410 in the thickness direction of the base 100 and communicates with the inner cavity, so that the elastic member 520 can be accommodated in the inner cavity, and the elastic member 520 can drive the positioning pin 510 to move relative to the slider 410. In this case, the connection shaft 420 may provide a guiding and limiting function for the elastic member 520, so that the motion stability of the elastic member 520 is relatively higher.
In order to further improve the fitting stability between the elastic member 520 and the positioning pin 510, optionally, a limiting boss 550 is provided in the middle of the positioning pin 510, specifically, the positioning pin 510 and the limiting boss 550 may be formed in an integrated manner, and the limiting boss 550 is disposed to protrude relative to the outer peripheral surface of the positioning pin 510, or in a horizontal direction, the size of the limiting boss 550 is larger than that of the positioning pin 510. Based on this, in the process of assembling the positioning pin 510 and the elastic member 520, the elastic member 520 can be sleeved on the positioning pin 510, so that the positioning pin 510 is used for providing guiding and limiting effects for the elastic member 520, the telescopic stability of the elastic member 520 is improved, and the matching reliability between the positioning pin 510 and the elastic member 520 can be improved. Accordingly, one end of the elastic member 520 is connected to the limit boss 550, so that the elastic member 520 can provide an elastic function for the positioning pin 510 to drive a portion of the positioning pin 510 to protrude out of the through hole of the slider 410.
And, under the condition that the periphery at locating pin 510 is equipped with spacing boss 550, can also make the one end terminal surface of spacing boss 550 can be spacing in slider 410 towards a side surface that supports body 310, promptly, under the effect of spacing boss 550, can set up certain restriction effect to the relative sliding relation between locating pin 510 and the slider 410, prevent that locating pin 510 from removing to the one side that slider 410 deviates from support piece completely. More specifically, the size of the restriction boss 550 in the horizontal direction may be made larger than the size of the receiving hole in the horizontal direction, and in the case where both the restriction boss 550 and the receiving hole have a circular structure, the diameter of the restriction boss 550 may be made larger than the diameter of the receiving hole. Of course, in the process of determining the position of the limit boss 550, it is required to ensure that a part of the positioning pin 510 can penetrate out of the accommodating hole of the slider 410 in the case where the limit boss 550 and the slider 410 are limited to each other.
In the above technical solution, the supporting body 310 and the connecting shaft 420 may be formed in an integrated manner, for this reason, an opening at one end of the connecting shaft 420 facing away from the slider 410 is in an open state, and then after the elastic element 520 and the positioning pin 510 are installed in the inner cavity and the receiving hole through the opening, the supporting body 310 cannot provide a limiting effect for the elastic element 520 at one end of the inner cavity where the opening is located. Based on this, the opposite ends of the elastic member 520 may be fixedly connected between the positioning pin 510 and the slider 410 by bonding, and the elastic member 520 may be in a stretched state under the condition that the positioning pin 510 does not extend out of the receiving hole of the slider 410, so that when the positioning pin 510 is not acted by other force (i.e., when the positioning pin 510 is aligned with the pin hole 120), a portion of the positioning pin 510 may extend out of the receiving hole of the slider 410 and extend into the pin hole 120 of the base 100 under the action of the elastic member 520.
Or, the support body 310 and the connection shaft 420 may be formed separately, and after the elastic member 520 is installed in the inner cavity and the accommodation hole through the opening of the inner cavity, the support body 310 and the connection shaft 420 may form a fixed connection relationship in a detachable or non-detachable manner, so that one end of the elastic member 520 may abut against the support body 310, and the other end of the elastic member 520 may abut against the positioning pin 510, and the elastic member 520 may provide an elastic driving force for the positioning pin 510.
Optionally, a relief hole may be disposed on the support body 310 at a position corresponding to the inner cavity of the connection shaft 420, so that the inner cavity of the connection shaft 420 can communicate with a side of the support body 310 away from the slider 410 through the relief hole, that is, the inner cavity of the connection shaft 420 still has an opening communicating with the side of the support body 310, which may prevent the connection process between the support body 310 and the connection shaft 420 from interfering with the installation process of the positioning pin 510 and the elastic member 520. In the above technical solution, the support body 310, the connecting shaft 420 and the slider 410 may be integrally formed in a split mold casting manner, so as to improve the reliability of the fixing relationship among the three.
In the above technical solution, the positioning pin 510 and the elastic member 520 may be installed in the inner cavity of the connecting shaft 420 through the avoiding hole, and two opposite ends of the elastic member 520 are respectively connected between the slider 410 and the positioning pin 510; meanwhile, in the case where the positioning pin 510 does not protrude out of the receiving hole of the slider 410, the elastic member 520 is placed in a stretched state. Moreover, in the above technical solution, when the positioning pin 510 and the pin hole 120 of the base 100 need to be separated, the positioning pin 510 can be pulled through the avoiding hole, so that the positioning pin 510 is separated from the pin hole 120 by overcoming the elastic acting force, thereby achieving the purpose of separating the positioning pin 510 from the base 100.
Based on the above embodiment, further, the positioning assembly may further include a limiting member 530, the limiting member 530 is fixed and covers the avoiding hole, that is, the opening of the connecting shaft 420, so that the limiting member 530 is utilized to provide a blocking effect for the positioning pin 510 and the elastic member 520 accommodated in the inner cavity of the connecting shaft 420, and the installation stability of the positioning pin 510 and the elastic member 520 in the connecting shaft 420 is improved. Specifically, the limiting member 530 may be a plate-shaped structural member, and may be formed by a hard material such as metal, and the limiting member 530 may be fixed on the supporting body 310 in a non-detachable manner such as welding; alternatively, as shown in fig. 9, the position-limiting member 530 may be detachably and fixedly connected to the supporting body 310 by a connecting member 540 such as a screw, and the opening of the connecting shaft 420 (i.e., the avoiding hole of the supporting body 310) is blocked, which facilitates the maintenance and repair work of the positioning pin 510 and the elastic member 520.
Meanwhile, under the condition of adopting the above technical scheme, the elastic member 520 can be abutted between the limiting member 530 and the positioning pin 510, that is, one end of the elastic member 520 is abutted to the limiting member 530, and the other end of the elastic member 520 is abutted to the positioning pin 510, so that the installation difficulty of the elastic member 520 can be reduced by the abutted installation mode, and the stability and reliability of the abutted matching mode are relatively high. Accordingly, after the positioning pin 510 and the elastic member 520 are both installed in the inner cavity of the connecting shaft 420, the limiting member 530 is fixedly connected to the support body 310, so that the elastic member 520 is limited between the positioning pin 510 and the limiting member 530. Moreover, in the technical solution disclosed in this embodiment, when the positioning pin 510 does not extend out of the receiving hole of the slider 410, the elastic member 520 is in a compressed state, so that the elastic member 520 can drive a part of the positioning pin 510 to extend out of the receiving hole and into the pin hole 120 without applying other acting force to the positioning pin 510.
As described above, the elastic element 520 may abut between the limiting element 530 and the positioning pin 510, and of course, in other embodiments of the present disclosure, the elastic element 520 may abut between the support body 310 and the positioning pin 510. For the end of the elastic member 520 engaged with the positioning pin 510, the elastic member 520 can abut against the end surface of the positioning pin 510 close to the supporting body 310, in this case, the dimension of the positioning pin 510 is larger than the dimension of the elastic member 520 along the direction perpendicular to the thickness direction of the base 100, so as to ensure that the elastic member 520 can abut against the end surface of the positioning pin 510 more stably. In another embodiment of the present application, as described above, the positioning pin 510 may be provided with a limiting boss 550, for this reason, one end of the elastic element 520 departing from the limiting member 530 may abut against one end surface of the limiting boss 550 departing from the base 100, and under the guiding action of the positioning pin 510, the expansion stability of the elastic element 520 may also be improved.
As described above, the clamping member 320 and (the support body 310 of) the support member are adjustably coupled in the thickness direction of the base 100, and both can achieve the purpose of clamping the robot 920 by a spring providing a tightening action. In the case that the positioning assembly includes the stopper 530 fixedly connected to the support body 310, the stopper 530 may be provided with an external thread, and the clamping member 320 may be provided with a threaded hole, so that the clamping member 320 may form an adjustable connection relationship with the support body 310 in a vertical direction through a threaded connection manner. In this case, on one hand, the position limiter 530 may provide a guiding function for the clamping member 320 to ensure that a distance between any position on the clamping member 320 and the support body 310 is substantially equal, and on the other hand, the position limiter 530 may also provide a position variation capability for the clamping member 320, so that the clamping member 320 may provide a reliable clamping function for the manipulator 920 by selecting how many screwing turns, and ensure that the manipulator 920 may be clamped and fixed by the clamping member 320 and the support body 310.
As described above, the offset hole may be used to reposition the positioning pin 510 (even if the positioning pin 510 is out of the pin hole 120 and retracts into the receiving hole of the slider 410), in another embodiment of the present application, optionally, the pin hole 120 is disposed through the base 100 along the thickness direction of the base 100, that is, the pin hole 120 is a through hole, in this case, when it is required to detach the positioning pin 510 from the base 100, a supporting force may be applied to the positioning pin 510 located inside the pin hole 120 through a side of the base 100 away from the clamping assembly, so that the positioning pin 510 overcomes the elastic force of the elastic member 520 and moves in a direction of detaching from the pin hole 120 and retracting into the receiving hole, thereby detaching the positioning pin 510 from the base 100.
In the process of adopting the above technical solution, the separation process between the positioning pin 510 and the base 100 is relatively simple, and the reliability is relatively high; meanwhile, an avoiding structure is not required to be arranged at one end of the connecting shaft 420, which is far away from the sliding block 410, so that the sealing performance of the whole mechanism is relatively higher. In addition, in this embodiment, the sizes of the pin holes 120 and the positioning pins 510 may be limited, so that a part of the positioning pins 510 may be prevented from being able to pass through the pin holes 120 after passing through the through holes, and stability of the positioning relationship between the base 100 and the carrier tray 910 may be prevented.
As described above, the slider 410 and the link shaft 420 may be installed in the first movable groove 110 and the second movable groove 210, respectively, and the slider 410 is moved in the first movable groove 110 and the link shaft 420 is moved in the second movable groove 210 in the horizontal direction. Also, the slider 410 may be previously installed in the first movable groove 110 before the upper cover 200 is fixedly coupled to the base 100.
In another embodiment of the present application, the first movable groove 110 is provided with a first notch communicating with the outside of the base 100, and the first notch is located at a side of the base 100 adjacent to the upper surface of the base 100, so that the slider 410 can be installed into the first movable groove 110 from the first notch during the assembly of the positioning tool.
Accordingly, the second movable groove 210 is provided with a second notch communicating with the outside of the upper cover 200, and the second notch is located at a side surface of the upper cover 200 adjacent to the bottom surface of the upper cover 200, so that the connection shaft 420 can be installed into the second movable groove 210 from the second notch in the process of assembling the positioning tool.
Also, in order to reduce the probability that the slider 410 is disengaged from the first notch and the connection shaft 420 is disengaged from the second notch during the movement of the clamping assembly relative to the base 100, as shown in fig. 1, the size of the first notch is smaller than that of the first movable groove and the size of the second notch is smaller than that of the second movable groove along the horizontal direction perpendicular to the direction in which the first notch is directed to the first movable groove. With this technical solution, while a relatively large relative movement range between the clamping assembly and the base 100 is ensured, the sizes of the first notch and the second notch can be ensured to be relatively small, so as to prevent the slider 410 from sliding out of the first notch and prevent the connecting shaft 420 from sliding out of the second notch as much as possible. It should be noted that the aforementioned horizontal direction perpendicular to the direction in which the first notch points to the first movable slot is a special horizontal direction in the present application, and the horizontal direction is perpendicular to the thickness direction of the base 100, and perpendicular to the direction in which the first notch points to the first movable slot, and correspondingly, perpendicular to the direction in which the second notch points to the second movable slot.
As described above, since the positioning pin 510 is provided with the elastic member 520, and the elastic member 520 is used to drive a portion of the positioning pin 510 to protrude from the receiving hole of the slider 410, for this reason, before the slider 410 is engaged with the base 100, the sliding assembly can extend into the first movable groove 110 by manually driving the positioning pin 510 to retract into the receiving hole of the slider 410, and the slider 410 is limited by the upper cover 200 in the thickness direction of the base 100.
In another embodiment of the present application, in order to reduce the difficulty of the matching between the slider 410 and the base 100, as shown in fig. 4, the first movable groove 110 may include a first groove body 111, a second groove body 112, and a transition groove body 113. The first dimension of the first groove 111 in the thickness direction is greater than the second dimension of the groove in the thickness direction, and the distance between the bottom surface of the upper cover 200 and the groove bottom of the second groove 112 is equal to the dimension of the slider 410 in the thickness direction, so that the slider 410 can be limited between the upper cover 200 and the second groove 112 in the thickness direction.
Meanwhile, along the direction in which the first slot body 111 points to the second slot body 112, the size of the transition slot body 113 in the thickness direction of the base 100 is gradually reduced from the first size to the second size, the transition slot body 113 is connected between the first slot body 111 and the second slot body 112, and the transition slot body 113 is communicated with the first notch of the first movable slot 110 through the first slot body 111.
That is, the sizes of the different positions on the first movable groove 110 in the thickness direction of the base 100 are different, and as the slider 410 moves from the notch of the first movable groove 110 into the first movable groove 110 and goes deeper into the first movable groove, the size of the first movable groove 110 in the thickness direction of the base 100 tends to decrease, and finally decreases to a size capable of limiting the movement of the slider 410 relative to the base 100 in the thickness direction of the base 100 (i.e., a state in which the slider 410 is in limit fit with the second groove body 112 in the thickness direction).
And, in a case where the elastic member 520 is in a natural state, the elastic member 520 can drive a portion of the positioning pin 510 to protrude from the receiving hole of the slider 410 and be located at a side of the slider 410 facing away from the support body 310. Based on the first movable groove 110 configured as described above, in the embodiment of the present application, the dimension of the portion of the positioning pin 510 that protrudes out of the slider 410 in the thickness direction of the base 100 may be equal to or smaller than the difference between the first dimension and the second dimension. That is, even in the case that the elastic member 520 is in the natural state, the combination structure of the slider 410 and the portion of the positioning pin 510 that extends out of the slider 410 may also extend into the first groove body 111 of the first movable groove 110 through the first notch of the first movable groove 110. And, with the continuous extension of the slider, make the locating pin 510 can cooperate with the transition slot 113, under the effect of the transition slot 113, can drive the locating pin 510 to overcome the elastic force, and retract into the accommodation hole of the slider 410, until the slider 410 moves to the second slot 112, can make the part of the locating pin 510 outside the slider 410 retract completely, and through continuously moving and rotating the slider 410, can make the locating pin 510 extend out of the accommodation hole of the slider 410 under the effect of the elastic member 520 again and extend into the pinhole 120 of the base 100 under the condition that the accommodation hole of the slider 410 and the pinhole 120 of the base 100 correspond to each other, realize in the direction perpendicular to the thickness direction of the base 100, and around the purpose of fixing the sliding assembly and the base 100 in the direction of the thickness direction of the base 100.
In order to further improve the stability of the positioning relationship between the base 100 and the carrier plate 910, the number of the second positioning members 911 may be at least three, and the second positioning members 911 are disposed around the pin holes 120, so that the pin holes 120 are centered with respect to the base 100, and the stability and reliability of the matching relationship between the lifting clamping assembly and the base 100 are relatively higher. In addition, as described above, to ensure that the slider 410 can be brought into a mating relationship with the base 100, the first and second notches each communicate with the outside of the base 100. In this case, since the pin hole 120 is centered on the base 100, and in order to ensure that the first movable groove 110 and the second movable groove 210 can communicate with the outside of the base 100, the sizes of the first movable groove 110 and the second movable groove 210 may be relatively large.
Therefore, in another embodiment of the present application, the base 100 may further include a guide notch 150, the guide notch 150 is disposed to penetrate through the base 100 in the thickness direction, and the guide notch 150 extends from the first notch of the first movable groove 110 to the edge of the base 100, so that the size of the portion of the base 100 where the first movable groove 110 needs to be disposed is reduced by the guide notch 150, and further the size of the first movable groove 110 is relatively small, thereby reducing the difficulty in positioning between the slider 410 and the base 100, reducing the difficulty in processing the first movable groove 110, and reducing the weight of the entire positioning tool.
Specifically, the specific shape and size of the guide notch 150 may be determined according to the overall shape of the base 100, and the shape and size of the guide notch 150 may be determined according to the number and distribution of the first positioning members 130 disposed on the base 100, so as to ensure that the presence of the guide notch 150 does not interfere with the layout of the first positioning members 130.
As described above, the manipulator 920 can be positioned at a predetermined position on the support by providing the positioning mark on the support, so that it is ensured that the position of the manipulator 920 is represented by the clamping assembly with relatively high accuracy. In another embodiment of the present application, the supporting member may include a supporting body 310 and a profiling portion 330, and the profiling portion 330 is fixedly connected with the supporting body 310, and in particular, the profiling portion 330 and the supporting body 310 may be integrally formed to improve the reliability of the connection therebetween.
Meanwhile, the outer edge of the profiling part 330 forms a positioning part to profile-adhere to the inner edge of the robot 920 by the positioning part, so as to limit the robot 920 in a direction perpendicular to the thickness direction of the base 100. Specifically, the profiling portion 330 is provided to protrude toward the side of the support body 310 where the clamping member 320 is located, and the shape of the inner edge of the profiling portion 330 is determined based on the outline shape of the outer edge of the manipulator 920, so that the manipulator 920 can be conformed to the profiling portion 330 while the manipulator 920 is supported on the support body 310, the profiling portion 330 provides the manipulator 920 with a limiting effect in a direction perpendicular to the thickness direction of the base 100, a positioning relationship is formed between the manipulator 920 and the support body 310, and a high-precision corresponding positional relationship can be ensured between the manipulator 920 and the support body 310.
In addition, in order to ensure that the profile 330 protruding from the support body 310 does not interfere with the clamping action of the support body 310 and the clamping member 320 on the robot 920, as shown in fig. 8, at least a portion of the projection of the respective edges of the support body 310 and the clamping member 320 in the thickness direction of the base 100 is located outside the profile 330, so as to ensure that the support body 310 and the clamping member can still provide the clamping action on the robot 920 through the respective portions outside the profile 330.
Based on the positioning tool disclosed by any one of the embodiments, the embodiment of the application further discloses a position calibration method of the manipulator, and the position calibration method can be applied to any one of the positioning tools to calibrate and record the position of the manipulator.
As shown in fig. 14, and in conjunction with fig. 12, the position calibration method includes:
s1, arranging a base of the positioning tool at a positioning position of a bearing surface of a bearing disc in semiconductor process equipment. In particular, the positioning structures respectively arranged on the base and the bearing surface can be utilized to provide positioning function for the base and the bearing surface.
S2, positioning the manipulator at the corresponding position of the positioning part, and clamping and fixing the manipulator between the supporting part and the clamping part. Specifically, the manipulator is controlled to move to the position where the positioning part of the clamping assembly is located, and the position of the manipulator is calibrated by the aid of the positioning part, so that the relative position between the manipulator and the clamping assembly is unique in the process of calibrating the position of the manipulator every time. And then, the clamping piece and the supporting piece which are connected in an adjustable manner in the vertical direction can be utilized to provide clamping and fixing effects for the manipulator, so that the manipulator and the clamping component form a relatively fixed relation, and the manipulator is conveniently driven to move by the clamping component in a follow-up manner.
And S3, controlling the supporting piece to drive the manipulator to slide relative to the base until the positioning assembly is matched with the limiting part. Specifically, the operator or a corresponding driving device can drive the manipulator to move in the horizontal direction relative to the base through the supporting part to find the alignment position on the base, and under the condition that the positioning assembly and the limiting part form a matching relation, the clamping assembly and the base are considered to be in an alignment state, and correspondingly, the manipulator and the base are also in an alignment state at the moment.
And S4, acquiring and recording relative position information between the manipulator and the bearing disc. Specifically, the relative position information between the manipulator and the bearing disc can be acquired and recorded through equipment such as a control device, so that the station information of the manipulator relative to the bearing disc can be saved, and the subsequent use is facilitated.
In the embodiments of the present application, the difference between the embodiments is described in detail, and different optimization features between the embodiments can be combined to form a better embodiment as long as the differences are not contradictory, and further description is omitted here in view of brevity of the text.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art to which the present application pertains. Any modification, equivalent replacement, improvement or the like made within the spirit and principle of the present application shall be included in the scope of the claims of the present application.

Claims (15)

1. A positioning tool is used for carrying out position calibration on a manipulator in semiconductor process equipment and is characterized by comprising a base, a clamping assembly and a positioning assembly;
the base is detachably arranged at the positioning position of the bearing surface of the bearing disc in the semiconductor process equipment;
the clamping assembly comprises a supporting piece and a clamping piece, the supporting piece is arranged on the base in a sliding mode, the clamping piece is arranged on one side, away from the base, of the supporting piece, a positioning portion is arranged on the supporting piece and used for being matched with the corresponding position of the manipulator to position the manipulator, and the clamping piece and the supporting piece are used for clamping and fixing the manipulator;
the positioning assembly is arranged on the support piece, the base is provided with a limiting part, and the positioning assembly is matched with the limiting part and used for fixing the support piece at the calibration position of the base.
2. The positioning tool according to claim 1, wherein the supporting member comprises a supporting body, a sliding block and a connecting shaft, the sliding block is fixedly connected with the supporting body through the connecting shaft, the sliding block is slidably arranged on the base, and the positioning assembly is arranged on the sliding block.
3. The positioning tool according to claim 2, further comprising an upper cover, wherein the upper cover is fixed and covers the base, a second movable groove is formed in the upper cover, the connecting shaft is movably arranged in the second movable groove in a direction perpendicular to the thickness direction of the base, and the sliding block is limited between the upper cover and the base in the thickness direction.
4. The positioning tool according to claim 3, wherein the slide block is provided with a receiving hole, the limiting portion is a pin hole, the positioning assembly comprises a positioning pin and an elastic member, the elastic member is connected with the positioning pin, the positioning pin is movably connected with the slide block through the elastic member, and the elastic member is configured to drive a part of the positioning pin to extend out of the receiving hole and extend into the pin hole so as to fix the support body at the calibration position of the base.
5. The positioning tool according to claim 4, wherein the connecting shaft is provided with an inner cavity, the inner cavity is provided with an opening located at one end, away from the sliding block, of the connecting shaft, the accommodating hole penetrates through the sliding block along the thickness direction and is communicated with the inner cavity, and the elastic piece is accommodated in the inner cavity.
6. The positioning tool according to claim 5, wherein the connecting shaft and the support body are integrally formed, the support body is provided with an avoidance hole, and an inner cavity of the connecting shaft is communicated with one side of the support body, which is away from the sliding block, through the avoidance hole.
7. The positioning tool according to claim 6, wherein the positioning assembly further comprises a limiting member, the limiting member is fixed and covers the avoiding hole, and the elastic member abuts between the limiting member and the positioning pin.
8. The positioning tool according to claim 7, wherein the limiting member is provided with an external thread, the clamping member is provided with a threaded hole, and the clamping member is adjustably connected with the support body in the thickness direction in a threaded connection manner.
9. The positioning tool according to claim 4, wherein a limiting boss is arranged in the middle of the positioning pin, the elastic piece is sleeved on the positioning pin, one end of the elastic piece abuts against the limiting boss, and the end face, away from the elastic piece, of the limiting boss can be limited on one side surface, facing the support body, of the sliding block.
10. The positioning tool according to claim 4, wherein the pin hole penetrates through the base in the thickness direction.
11. The positioning tool according to claim 4, wherein the positioning pin and the pin hole are in non-circular structures, and the positioning pin and the pin hole are in limit fit in the direction perpendicular to the thickness direction and in the direction around the thickness direction.
12. The positioning tool according to claim 4, wherein the base is provided with a first movable groove, the slider is slidably arranged in the first movable groove, the first movable groove is provided with a first notch communicated with the outside of the base, the first notch is positioned on the side face, close to the upper surface of the base, the size of the first notch is smaller than that of the first movable groove along a horizontal direction perpendicular to a direction in which the first notch points to the first movable groove, and the slider can move into the first movable groove through the first notch;
the second activity groove be equipped with the second notch of intercommunication outside the upper cover, just the second notch is located in the upper cover be close to in the side of the bottom surface of upper cover, along the perpendicular to the second notch points to the horizontal direction of the direction in second activity groove, the size of second notch is less than the size in second activity groove, the connecting axle accessible the second notch removes extremely in the second activity groove.
13. The positioning tool according to claim 12, wherein the first movable groove comprises a first groove body, a second groove body and a transition groove body, a first size of the first groove body in the thickness direction is larger than a second size of the second groove body in the thickness direction, and a distance between a bottom surface of the upper cover and a groove bottom of the second groove body is equal to a size of the sliding block in the thickness direction; follow first cell body is directional the direction of second cell body, the transition cell body is in size in the thickness direction certainly first size reduces gradually to the second size, the transition cell body connect in first cell body with between the second cell body, the transition cell body pass through first cell body with the first notch intercommunication of first movable groove.
14. The positioning tool according to claim 1, characterized in that the supporting member comprises a supporting body and a profiling portion which are fixedly connected, the outer edge of the profiling portion forms the positioning portion, the positioning portion is used for being in profiling fit with the inner edge of the manipulator to limit the manipulator in a direction perpendicular to the thickness direction of the base, and at least a part of the projection of the edge of each of the supporting body and the clamping member in the thickness direction is located outside the profiling portion.
15. A position calibration method of a manipulator, applied to the positioning tool according to any one of claims 1 to 14, the position calibration method comprising:
arranging a base of the positioning tool on a positioning position of a bearing surface of a bearing disc in the semiconductor process equipment;
positioning a manipulator at a position corresponding to the positioning part, and clamping and fixing the manipulator between the supporting part and the clamping part;
the supporting piece is controlled to drive the manipulator to slide relative to the base until the positioning assembly is matched with the limiting part;
and acquiring and recording relative position information between the manipulator and the bearing plate.
CN202211054907.7A 2022-08-31 2022-08-31 Position calibration method for positioning tool and manipulator Pending CN115332139A (en)

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Application Number Priority Date Filing Date Title
CN202211054907.7A CN115332139A (en) 2022-08-31 2022-08-31 Position calibration method for positioning tool and manipulator

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Application Number Priority Date Filing Date Title
CN202211054907.7A CN115332139A (en) 2022-08-31 2022-08-31 Position calibration method for positioning tool and manipulator

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CN115332139A true CN115332139A (en) 2022-11-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115985839A (en) * 2023-03-16 2023-04-18 上海果纳半导体技术有限公司 Grabbing mechanism
CN116834046A (en) * 2023-08-30 2023-10-03 上海广川科技有限公司 Self-adjusting positioning pin, end effector and FOUP (FOUP handling robot)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115985839A (en) * 2023-03-16 2023-04-18 上海果纳半导体技术有限公司 Grabbing mechanism
CN115985839B (en) * 2023-03-16 2023-06-20 上海果纳半导体技术有限公司 Grabbing mechanism
CN116834046A (en) * 2023-08-30 2023-10-03 上海广川科技有限公司 Self-adjusting positioning pin, end effector and FOUP (FOUP handling robot)
CN116834046B (en) * 2023-08-30 2024-03-08 上海广川科技有限公司 Self-adjusting positioning pin, end effector and FOUP (FOUP handling robot)

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