CN218788366U

CN218788366U - Part clamp

Info

Publication number: CN218788366U
Application number: CN202223290872.5U
Authority: CN
Inventors: 姚力军; 潘杰; 王学泽; 鲍伟江; 周旭忠
Original assignee: Shanghai Ruisheng Semiconductor Technology Co ltd
Current assignee: Shanghai Ruisheng Semiconductor Technology Co ltd
Priority date: 2022-12-08
Filing date: 2022-12-08
Publication date: 2023-04-04
Anticipated expiration: 2032-12-08

Abstract

The utility model belongs to the technical field of semiconductor parts machining, a part anchor clamps is disclosed for centre gripping semiconductor part, part anchor clamps include anchor clamps base and fixed subassembly. The upper surface of the clamp base is provided with a part groove, and the shape of the part groove is matched with that of the semiconductor part; the fixing component is arranged on the clamp base and used for enabling the semiconductor part to be abutted to the inner wall of the part groove far away from one side of the fixing component, and at least two groups of fixing components are arranged. The utility model provides a part anchor clamps can realize locating and stabilizing the centre gripping to rectangular form semiconductor part, has reached the simplified operation flow, has promoted work efficiency, has prevented to wait to process semiconductor part and has received beneficial effect such as damage.

Description

Part clamp

Technical Field

The utility model relates to a semiconductor parts machining technical field especially relates to a part fixture.

Background

Semiconductor components are widely used in many fields such as electronics, communications, and energy. The semiconductor etching technology is a technology for selectively etching or stripping a film on the surface of a semiconductor substrate or a surface thereof according to a mask pattern or design requirements.

In the process of etching and processing the semiconductor part, a clamp is needed to fix the part to be processed. Because some semiconductor parts are arc thin slice structures, the traditional clamp has poor clamping effect, the clamping operation is complex, the error is large after clamping, and the machining precision requirement cannot be met.

Therefore, a part holder is needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a part anchor clamps for solve traditional anchor clamps and treat processing part scheduling problem to rectangular thin slice part centre gripping effect poor, centre gripping operation complicacy and fragile.

To achieve the purpose, the utility model adopts the following technical proposal:

a component holder for holding an elongated semiconductor component, comprising:

the fixture comprises a fixture base, wherein a part groove is formed in the upper surface of the fixture base, and the shape of the part groove is matched with that of the semiconductor part;

the fixture comprises a fixture base, wherein the fixture base is provided with at least two groups of part grooves, the part grooves are formed in the fixture base, the fixture base is provided with at least two groups of part grooves, and the fixture base is provided with at least two groups of part grooves at intervals in the extending direction.

As an alternative to the part holder, the fixing assembly includes a contact member slidably mounted to the holder base in a direction away from or toward the part slot, the contact member being configured to abut against the semiconductor part.

As an optional technical scheme of the part clamp, the fixing assembly further comprises an adjusting block, an adjusting screw and an elastic piece, the adjusting block is arranged on one side, away from the part groove, of the contact piece, a first inclined surface is arranged on one side, close to the contact piece, of the adjusting block, a second inclined surface is arranged on one side, close to the adjusting block, of the contact piece, a through hole which is communicated up and down is formed in the adjusting block, and a screw rod of the adjusting screw penetrates through the through hole and is in threaded connection with the clamp base;

when the screw head of the adjusting screw pushes the adjusting block along the direction towards the clamp base, the first inclined surface pushes the second inclined surface so that the contact element slides along the direction towards the part groove;

the elastic member is connected to the contact member and applies a force to the contact member in a direction away from the part groove.

As an optional technical scheme of the part clamp, a fixing groove is formed in a clamp base, the fixing assembly is installed in the fixing groove, and the fixing groove is communicated with the part groove.

As an alternative solution to the part holder, the extension direction of the fixing groove is perpendicular to the part groove.

As an optional technical scheme of the part clamp, a buffer structure is arranged at one end, close to the part groove, of the fixing assembly.

As an optional technical scheme of the part clamp, the part groove is arc-shaped.

As an optional technical scheme of the part clamp, at least two part grooves are arranged on the clamp base, and all the part grooves are arranged at intervals.

The part fixture comprises at least one part fixing group, the part fixing group comprises two part grooves which are arranged oppositely and at intervals and a fixing component arranged between the two part grooves, and two ends of the fixing component are respectively abutted to the semiconductor parts in the two adjacent part grooves.

As an optional technical scheme of the part clamp, a taking and placing groove is further formed in the clamp base and communicated with the part groove.

The utility model has the advantages that:

the part clamp provided by the utility model is used for solving the positioning problem of parts by arranging the part groove on the clamp base, and an operator only needs to put the parts to be processed into the part groove, thereby simplifying the clamping process and improving the operation efficiency; the fixture base is further provided with the fixing assembly for abutting the semiconductor part to the inner wall of the part groove on the side far away from the fixing assembly, so that the semiconductor part to be processed is fixed in the part groove, the surface of the part does not need to be clamped, and the part is prevented from being damaged; through setting up at least two sets of fixed subassemblies, guaranteed that the semiconductor part atress is even in clamping process, prevent to take place the displacement and then influence the machining precision because of the course of working. Namely, the utility model provides a part anchor clamps can realize the location and the stable centre gripping to rectangular form semiconductor part, has reached the simplified operation flow, has promoted work efficiency, has prevented to wait to process semiconductor part and has received beneficial effect such as damage.

Drawings

Fig. 1 is a schematic structural view of the part holder of the present invention.

In the figure:

1. a clamp base; 11. a part slot; 12. a fixing groove; 13. a taking and placing groove; 2. a fixing assembly; 21. a contact member; 22. an adjusting block; 23. and adjusting screws.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", and the like are used based on the orientations and positional relationships shown in the drawings, and are only for convenience of description and simplification of operation, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.

In order to solve the problems that the traditional clamp has poor clamping effect on the special-shaped semiconductor part, is complex in clamping operation, has large error after clamping and cannot meet the machining precision requirement, the embodiment provides the part clamp.

As shown in fig. 1, in this embodiment, the part fixture is used for clamping a long-strip-shaped semiconductor part, the part fixture includes a fixture base 1 and a fixing assembly 2, a part groove 11 is formed in an upper surface of the fixture base 1, and a shape of the part groove 11 is adapted to a shape of the semiconductor part; the fixed component 2 is installed on the clamp base 1 and is provided with at least two sets of along the extending direction interval of the part groove 11, the fixed component 2 is used for keeping away from the inner wall of one side of the fixed component 2 to the part groove 11 by butting the semiconductor part, and the fixed component 2 is provided with at least two sets of.

Through set up part groove 11 on anchor clamps base 1, arrange the semiconductor part of treating processing in it, played the effect of location part, simplified operation process to the shape of part groove 11 is with the semiconductor part adaptation of treating processing, and anchor clamps producer can be directed against the semiconductor part design part groove 11's of treating processing structure, with the semiconductor part of different shapes of adaptation. The fixture base 1 is also provided with the fixing component 2, the semiconductor part is abutted to the inner wall of the part groove 11 on the side far away from the fixing component 2, the semiconductor part is fixed in the part groove 11 under the condition of not influencing processing, the operation is simple, adjustment and correction are not needed, the clamping precision can be controlled by abutting the semiconductor part with the part groove 11, the clamping equipment is not in direct contact with the surface to be processed, the processing process is prevented from being interfered, and the semiconductor part is prevented from being damaged; the arrangement of at least two groups of fixing assemblies 2 can enable the semiconductor parts to be stressed uniformly, displacement can not occur in the clamping process, and the influence on the processing precision is avoided.

In this embodiment, the fixing members 2 are provided with three groups, which are uniformly distributed on one side of the part groove 11, wherein two groups of fixing members 2 are respectively disposed at two ends of the part groove 11, and the other group of fixing members 2 is disposed in the middle of the part groove 11. In other embodiments, the number of sets of the fixing members 3 may be adaptively arranged according to the length of the semiconductor part.

The fixture base 1 is further provided with a fixing groove 12, the fixing assembly 2 is installed in the fixing groove 12, and the fixing groove 12 is communicated with the part groove 11. With this arrangement, it is possible to enable the fixing assembly 2 to abut the semiconductor component to the component groove 11 inner wall when the semiconductor component to be processed is completely recessed into the component groove 11. Furthermore, the extending direction of the fixing groove 12 is perpendicular to the component groove 11, so that the fixing component 2 can be vertically abutted against the semiconductor component, the situations of sliding deviation and the like are avoided, the fixing position of the semiconductor component is ensured, and the requirement of processing precision is met.

Preferably, the end of the fixing component 2 close to the component groove 11 is provided with a buffer structure, and the possibility of damage to the surface of the semiconductor component due to the abutting of the fixing component 2 is avoided due to the arrangement of the buffer structure. In this embodiment, buffer structure accessible screw or bonding etc. can dismantle the connected mode and can dismantle with other parts of fixed subassembly 2 and be connected, and the user can select to install suitable buffer structure according to the appearance of the semiconductor part of part anchor clamps centre gripping to play better centre gripping effect.

In this embodiment, the part groove 11 is the arc, because the arc semiconductor part that is held by adding is long and thin form, and the flatness tolerance requirement is higher, and traditional anchor clamps are difficult to realize the centre gripping requirement, can't guarantee the tolerance, and the side easily produces the scar, so with the arc semiconductor part with the adaptation with part groove 11 design. In other embodiments, the component slot 11 may be provided in other shapes, just to match the shape of the semiconductor component to be clamped.

The part groove 11 is also internally provided with a positioning bulge, and the semiconductor part is provided with a positioning hole which is matched with the positioning hole for positioning the clamped semiconductor part.

Furthermore, the fixing assembly 2 comprises a contact 21, the contact 21 can be slidably mounted on the fixture base 1 along a direction away from or close to the component groove 11, the contact 21 is used for abutting against the semiconductor component, and the semiconductor component is abutted against the inner wall of the component groove 11 through the movable contact 21, so that the semiconductor component is fixed in the component groove 11.

Specifically, the fixing assembly 2 further comprises an adjusting block 22, an adjusting screw 23 and an elastic piece, wherein the adjusting block 22 is arranged on one side of the contact piece 21 far away from the part groove 11, a first inclined surface is arranged on one side of the adjusting block 22 close to the contact piece 21, a second inclined surface is arranged on one side of the contact piece 21 close to the adjusting block 22, a through hole which is communicated up and down is arranged in the adjusting block 22, a screw rod of the adjusting screw 23 penetrates through the through hole and is in threaded connection with the clamp base 1, and a screw head of the adjusting screw 23 can push against the adjusting block 22 along the direction towards the clamp base 1, so that the adjusting block 22 actuates the contact piece 21 to slide along the direction towards the part groove 11; the spring exerts a force on the contact piece 21 in a direction away from the component slot 11.

In this embodiment, the first inclined surface is an inclined surface inclined from top to bottom in a direction away from the contact member 21, the second inclined surface is an inclined surface inclined from top to bottom in a direction close to the adjusting block 22, and the elastic member is a spring for pulling the contact member 21.

When a user screws the adjusting screw 23, the adjusting block 22 is driven by the adjusting screw 23 to move downwards, and the contact element 21 moves towards the direction far away from the adjusting block 22 through the matching motion of the two inclined surfaces, so that the semiconductor part is abutted to the inner wall of the part groove 11, and the semiconductor part is in a clamping state. When the user unscrews the adjusting screw 23, the elastic member applies a force to the contact member 21 in a direction away from the component groove 11, so that the contact member 21 is away from the semiconductor component, and the clamping state of the semiconductor component can be released. Through setting up like this, adjusting screw 23 has both played the effect of installing fixed subassembly 2 on with anchor clamps base 1, has also played the position of regulation contact 21, realizes the centre gripping of part anchor clamps to semiconductor part and loosens two kinds of states.

Above-mentioned fixed subassembly 2's structure setting for part anchor clamps easy operation, the user only need will wait to process the part and put into part groove 11, screws adjusting screw 23 and can realize the clamping process, and is lower to user operation level requirement, can realize stable controllable batch production.

Furthermore, at least two component grooves 11 are formed in the fixture base 1, and all the component grooves 11 are arranged at intervals. The more than one part groove 11 is arranged, so that the process of clamping and disassembling parts in the machining process can be reduced, the working efficiency is improved, and the cost is reduced; the part grooves 11 are arranged at intervals, so that the processing flow can be reduced, and the processing efficiency can be improved. Two part slots 11 are provided in this embodiment, and more part slots 11 may be provided in other embodiments.

Preferably, the part fixture comprises at least one part fixing group, the part fixing group comprises two opposite part grooves 11 arranged at intervals and a fixing component 2 arranged between the two part grooves 11, and two ends of the fixing component 2 are respectively abutted to the semiconductor parts in the two adjacent part grooves 11.

That is, the fixing assembly 2 includes two contact elements 21 symmetrically disposed, the two elastic elements are disposed on two sides of the two contact elements 21, and two ends of each elastic element are respectively connected to the two contact elements 21, when a user screws the adjusting screw 23, the adjusting block 22 moves downward, and the second inclined surfaces of the two contact elements 21 are respectively matched with the corresponding first inclined surfaces, so that the two contact elements 21 move toward the two component grooves 11, respectively, so that the semiconductor components in the two component grooves 11 abut against the inner walls of the corresponding component grooves 11. When the user unscrews the adjusting screw 23, the two contact members 21 move close to each other by the elastic force of the elastic member and release the semiconductor part. By means of the arrangement, two semiconductor parts are clamped by one set of fixing assembly 2, so that the operation process is simplified, and the efficiency is further improved.

In the present embodiment, a part fixing set is included, and the fixing members 2 in this part fixing set are disposed in the fixing grooves 12 communicating with the part grooves 11 on both sides. In other embodiments, the number of the part fixing groups and the arrangement mode of the part fixing groups on the fixture base 1 can be set according to the processing requirements.

Preferably, the fixture base 1 is further provided with a taking and placing groove 13, the taking and placing groove 13 is communicated with the part groove 11, and because the part groove 11 is similar to the semiconductor part to be processed in size, the setting of the taking and placing groove 13 facilitates a user to place and take out the semiconductor part, so that the efficiency is improved, and the probability of damage to the semiconductor part in the taking and placing process is reduced. In this embodiment, each component slot 11 is provided with two sets of pick-and-place slots 13, and each set of pick-and-place slots 13 is symmetrically disposed on two sides of the component slot 11.

The fixture base 1 is provided with through holes which penetrate through the fixture base from top to bottom, and the through holes are distributed on two sides of the part groove 11 at intervals and used for fixing the part fixture on machining equipment. The fixture base 1 is further provided with a positioning hole, and the positioning hole is matched with a positioning pin on the processing equipment so as to ensure that the mounting direction of the part fixture is correct.

Of course, the access slots 13 may be located in different positions in other embodiments. It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A component holder for holding an elongated semiconductor component, comprising:

the clamp comprises a clamp base (1), wherein a part groove (11) is formed in the upper surface of the clamp base (1), and the shape of the part groove (11) is matched with that of the semiconductor part;

the fixture comprises fixing assemblies (2), wherein the fixing assemblies (2) are installed on the fixture base (1) and are arranged at least two groups at intervals along the extending direction of the part groove (11), and the fixing assemblies (2) are used for being abutted to one side of the semiconductor part, so that the other side of the semiconductor part is abutted to the groove wall, far away from the part groove (11), of one side of the fixing assemblies (2).

2. A part holder according to claim 1, wherein the fixing assembly (2) comprises a contact member (21), the contact member (21) being slidably mounted to the holder base (1) in a direction away from or towards the part slot (11), the contact member (21) being adapted to abut the semiconductor part.

3. The part clamp according to claim 2, wherein the fixing assembly (2) further comprises an adjusting block (22), an adjusting screw (23) and an elastic member, the adjusting block (22) is arranged on one side of the contact member (21) far away from the part groove (11), a first inclined surface is arranged on one side of the adjusting block (22) close to the contact member (21), a second inclined surface is arranged on one side of the contact member (21) close to the adjusting block (22), a through hole which is communicated with the upper portion and the lower portion is arranged in the adjusting block (22), and a screw rod of the adjusting screw (23) penetrates through the through hole and is in threaded connection with the clamp base (1);

when the screw head of the adjusting screw (23) pushes the adjusting block (22) along the direction towards the clamp base (1), the first inclined surface pushes the second inclined surface so that the contact piece (21) slides along the direction towards the part groove (11);

the elastic member is connected to the contact member (21) and applies a force to the contact member (21) in a direction away from the component groove (11).

4. The parts clamp according to claim 1, characterized in that the clamp base (1) is provided with a fixing groove (12), the fixing assembly (2) is installed in the fixing groove (12), and the fixing groove (12) is communicated with the parts groove (11).

5. A parts holder according to claim 4, wherein the direction of extension of the fixation groove (12) is perpendicular to the parts groove (11).

6. The parts clamp according to claim 1, characterized in that the fixing assembly (2) is provided with a buffer structure at an end near the parts channel (11).

7. The parts holder according to claim 1, wherein the parts slot (11) is arcuate.

8. The parts holder according to any of claims 1-7, wherein at least two of the parts slots (11) are provided in the holder base (1), all of the parts slots (11) being spaced apart.

9. The part holder according to claim 8, characterized in that the part holder comprises at least one part fixing set, the part fixing set comprises two opposite and spaced part grooves (11) and the fixing component (2) arranged between the two part grooves (11), and two ends of the fixing component (2) are respectively abutted with the semiconductor parts in the two adjacent part grooves (11).

10. The parts holder according to any of claims 1-7, wherein a pick-and-place slot (13) is further provided on the holder base (1), the pick-and-place slot (13) communicating with the parts slot (11).