CN115304273A - Ultraviolet-transmitting visible light-absorbing glass and ultraviolet-transmitting visible light-absorbing filter - Google Patents

Ultraviolet-transmitting visible light-absorbing glass and ultraviolet-transmitting visible light-absorbing filter Download PDF

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CN115304273A
CN115304273A CN202210864516.5A CN202210864516A CN115304273A CN 115304273 A CN115304273 A CN 115304273A CN 202210864516 A CN202210864516 A CN 202210864516A CN 115304273 A CN115304273 A CN 115304273A
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ultraviolet
light
visible light
transmitting visible
irradiation
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川崎真
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Hoya Corp
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    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/097Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
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    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C03C3/093Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00Compositions for glass with special properties
    • C03C4/0085Compositions for glass with special properties for UV-transmitting glass
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    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C4/00Compositions for glass with special properties
    • C03C4/08Compositions for glass with special properties for glass selectively absorbing radiation of specified wave lengths
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/208Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
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    • G02B5/22Absorbing filters
    • G02B5/226Glass filters

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Abstract

The invention provides an ultraviolet-transmitting visible light-absorbing glass which reduces environmental load, selectively improves the transmittance of light irradiated in the wavelength range of 350 to 370nm, and suppresses deterioration caused by overexposure. The ultraviolet-transmitting visible light-absorbing glass is characterized by comprising, substantially not Pb, as, cd and Cr, but 0.1 to 2 mass% of CoO, 1 to 5 mass% of NiO, and TiO 2 0 to 1 mass% of Nb 2 O 5 0.1 to 10 mass% of the TiO compound 2 And Nb 2 O 5 The total content is 0.1 to 10% by mass.

Description

Ultraviolet-transmitting visible light-absorbing glass and ultraviolet-transmitting visible light-absorbing filter
The application is a divisional application taking an application with the application number of 201660683.7 and the application date of 2016, 9 and 28 as a parent application.
Technical Field
The present invention relates to an ultraviolet-transmitting visible light absorbing glass and an ultraviolet-transmitting visible light absorbing filter.
Background
Currently, in an ultraviolet irradiation device such as a light source for an ultraviolet curable resin, an ultraviolet transmitting visible light absorbing filter that selectively transmits ultraviolet rays while absorbing visible light is used, and as black glass constituting such a filter, for example, silicate glass described in patent document 1 (japanese patent application laid-open No. 4-32019) is proposed.
Patent document 1: japanese examined patent publication (Kokoku) No. 4-32019
Disclosure of Invention
However, in contrast to the black glass described in patent document 1 containing PbO or As2O3 for improving ultraviolet transmittance or adjusting transmittance, in recent years, a glass containing no elements such As Cd and Cr in addition to Pb and As has been demanded for reducing environmental load.
On the other hand, in order to save energy and increase the efficiency of work, ultraviolet-transmitting visible light absorbing glasses used for the above filters are required to have excellent visible light absorption and ultraviolet transmittance even if the above elements are not included.
Further, if the optical glass is irradiated with light having a large irradiance at a high luminance, a coloring phenomenon called overexposure (coloration) occurs, and the transmittance of the glass is liable to decrease, and the overexposure is liable to occur particularly when the optical glass is irradiated with irradiation light including light in the ultraviolet range.
Under such circumstances, an object of the present invention is to provide a novel ultraviolet-transmitting visible light-absorbing glass which selectively improves the transmittance of irradiation light in the wavelength range of 350 to 370nm while reducing the environmental load, and which suppresses deterioration due to overexposure, and an ultraviolet-transmitting visible light-absorbing filter composed of the glass.
As a result of earnest studies to achieve the above object, the present inventors have found that the alloy contains, in addition to Pb, as, cd and Cr substantially not containing them, coO 0.1 to 2 mass%, niO1 to 5 mass%, and TiO 2 0 to 1 mass% of Nb 2 O 5 0.1 to 10 mass% of the TiO compound 2 And Nb 2 O 5 The above-mentioned technical problems can be solved by an ultraviolet-transmitting visible light-absorbing glass containing 0.1 to 10 mass% of total ultraviolet rays, and the present invention has been completed based on this finding.
Namely, the present invention provides:
(1) An ultraviolet-transmitting visible light-absorbing glass which substantially does not contain Pb, as, cd and Cr but contains 0.1 to 2 mass% of CoO, 1 to 5 mass% of NiO and TiO 2 0 to 1 mass% of Nb 2 O 5 0.1 to 10 mass% of the TiO compound 2 And Nb 2 O 5 The total content of the components is 0.1 to 10% by mass,
(2) The ultraviolet-transmitting visible light-absorbing glass according to the above (1), which is formed on the TiO side 2 And Nb 2 O 5 In a total content ratio of TiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) is 0 to 0.5,
(3) The ultraviolet-transmitting visible light-absorbing glass according to the above (1) or (2), further comprising:
Figure BDA0003756613950000021
(4) The ultraviolet-transmitting visible light-absorbing glass according to any one of (1) to (3) above, which is in a plate shape having a thickness of 3mm and has a maximum radiation intensity at a wavelength of 365nm of 500mW cm -2 Irradiating irradiation light containing ultraviolet light and visible lightThe maximum value of the light transmittance in the wavelength range of 350 to 370nm at the start time of the irradiation with the irradiation light is 75% or more,
(5) The ultraviolet-transmitting visible light-absorbing glass according to item (4) above, which is in the form of a sheet having a thickness of 3mm and has a radiation intensity of 500mW/cm from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When the irradiation light including ultraviolet light and visible light is irradiated with the radiation intensity of (2), the light transmittance in the wavelength range of 200 to 290nm and the light transmittance in the wavelength range of 410 to 690nm at the start of irradiation with the irradiation light are both 1% or less,
(6) The ultraviolet-transmitting visible light-absorbing glass according to any one of (1) to (5) above, which is in the form of a sheet having a thickness of 3mm and has a maximum radiation intensity at a wavelength of 365nm of 500mW/cm -2 When irradiation light including ultraviolet light and visible light is irradiated for 100 hours, the maintenance ratio represented by the following formula (I) is 90% or more, (B/A). Times.100 (I)
Wherein A is a maximum value (%) of light transmittance in a wavelength range of 350 to 370nm at the start time of irradiation of the irradiation light, B is a maximum value (%) of light transmittance in a wavelength range of 350 to 370nm at the time of 100 hours from the start time of irradiation of the irradiation light,
(7) An ultraviolet-transmitting visible light absorbing filter comprising the ultraviolet-transmitting visible light absorbing glass according to any one of (1) to (6) above.
The invention has the following effects:
according to the present invention, it is possible to provide an ultraviolet-transmitting visible light absorbing glass which reduces environmental load, selectively improves the transmittance of irradiation light in the wavelength range of 350 to 370nm, and suppresses deterioration due to overexposure, and an ultraviolet-transmitting visible light absorbing filter composed of the glass.
Drawings
Fig. 1 is a graph showing a transmission spectrum of an ultraviolet-transmitting visible light-absorbing glass obtained in example 1 of the present application.
Fig. 2 is a graph showing a transmission spectrum of ultraviolet-transmitting visible light-absorbing glass obtained in example 2 of the present application.
Fig. 3 is a graph showing a transmission spectrum of an ultraviolet-transmitting visible light-absorbing glass obtained in example 5 of the present application.
Fig. 4 is a graph showing the transmission spectrum of the ultraviolet-transmitting visible light-absorbing glass obtained in comparative example 1 of the present application.
Fig. 5 is a graph showing the transmission spectrum of the ultraviolet-transmitting visible light-absorbing glass obtained in comparative example 2 of the present application.
Detailed Description
First, the ultraviolet-transmitting visible light-absorbing glass according to the present invention will be described.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention is characterized by containing, substantially not Pb, as, cd and Cr, but 0.1 to 2 mass% of CoO, 1 to 5 mass% of NiO, and TiO 2 0 to 1 mass% of Nb 2 O 5 0.1 to 10 mass%, and the TiO 2 And Nb 2 O 5 The total content is 0.1 to 10% by mass.
In the present document, the ultraviolet-transmitting visible light-absorbing glass means a glass which selectively transmits ultraviolet light in a wavelength range of 350 to 370nm and selectively absorbs visible light in a wavelength range of 410 to 690nm when irradiated with irradiation light including ultraviolet light and visible light.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention contains 0.1 to 2 mass% of CoO, and more preferably contains 0.1 to 1 mass% of CoO.
CoO is a component that absorbs visible light by transmitting ultraviolet rays, which is an essential component of the ultraviolet-transmitting visible light absorbing glass according to the present invention.
When the content of CoO is less than 0.1 mass%, it is difficult to sufficiently exhibit the above effects, and if the content of CoO exceeds 2 mass%, the light transmittance in the ultraviolet range is liable to decrease.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention contains 1 to 5 mass%, and more preferably 1 to 3 mass% of NiO.
NiO is an essential component of the ultraviolet-transmitting visible light absorbing glass according to the present invention, and is a component that transmits ultraviolet light and absorbs visible light.
When the content of NiO is less than 1 mass%, it is difficult to sufficiently exhibit the above effects, and when the content of NiO exceeds 5 mass%, the light transmittance in the ultraviolet range tends to decrease.
The total content ratio of CoO and NiO is preferably 1.1 to 7% by mass, and the total content ratio of CoO and NiO is more preferably 1.1 to 4% by mass.
The ultraviolet-transmitting visible light absorbing glass according to the present invention contains both CoO and NiO, and thereby can transmit ultraviolet rays and effectively absorb light in the entire visible light range of wavelengths 410nm to 690 nm.
If the total content of CoO and NiO is less than 1.1 mass%, it is difficult to sufficiently absorb visible light, and if the total content of CoO and NiO exceeds 7 mass%, the light transmittance in the ultraviolet range tends to decrease.
The ultraviolet-transmitting visible light-absorbing glass of the present invention contains 0 to 1 mass% of TiO 2 More preferably 0 to 0.5 mass% of TiO 2
TiO 2 Is an optional component of the ultraviolet-transmitting visible light-absorbing glass according to the present invention, and can be mixed with Nb described later 2 O 5 And interact with each other to exhibit a desired ultraviolet ray transmission effect and an effect of suppressing deterioration due to overexposure.
However, if TiO 2 Since the transmittance in the ultraviolet range is likely to decrease as the content ratio of (b) increases, the content ratio is limited to 1 mass% or less.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention contains 0.1 to 10 mass% of Nb 2 O 5 Preferably, 0.1 to 5 mass% of Nb is contained 2 O 5 More preferably 0.5 to 5 mass% of Nb 2 O 5
Nb in the ultraviolet-transmitting visible light-absorbing glass of the present invention 2 O 5 Is an essential component, and according to the study of the present inventors, it was found that the alloy substantially does not contain Pb, as, cd and Cr, but contains predetermined amounts of CoO, niO and TiO 2 By containing a predetermined amount of Nb 2 O 5 So that appropriate light absorption can be performed in the visible light range and high transmittance is exerted in the ultraviolet range, and deterioration due to overexposure can be further suppressed, until the present invention has been completed.
In the ultraviolet-transmitting visible light-absorbing glass according to the present invention, nb is added 2 O 5 If the content of (2) is less than 0.1% by mass, deterioration due to overexposure is liable to occur, and if Nb is used 2 O 5 When the content ratio of (b) exceeds 10 mass%, the light transmittance in the ultraviolet range is liable to decrease.
TiO in the ultraviolet-transmitting visible light-absorbing glass of the present invention 2 And Nb 2 O 5 The total content ratio of (TiO) 2 +Nb 2 O 5 ) 0.1 to 10 mass% and TiO 2 And Nb 2 O 5 The total content ratio of (TiO) 2 +Nb 2 O 5 ) More preferably 0.1 to 5 mass%.
In the ultraviolet-transmitting visible light-absorbing glass according to the present invention, tiO is used 2 And Nb 2 O 5 The total content ratio of (TiO) 2 +Nb 2 O 5 ) When the content is less than 0.1% by mass, deterioration due to overexposure is likely to occur, and when the content exceeds 10% by mass, the transmittance in the ultraviolet range is likely to decrease.
In the ultraviolet-transmitting visible light-absorbing glass according to the present invention, the glass is preferably made of TiO 2 And Nb 2 O 5 In a total content ratio of TiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) is preferably 0 to 0.5.
In the ultraviolet-transmitting visible-light-absorbing optical glass according to the present invention, the optical glass is transparent to TiO 2 And Nb 2 O 5 Total content (mass%) of (2), tiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) exceeds 0.5, the transmittance in the ultraviolet range is liable to decrease.
The ultraviolet-transmitting visible-light-absorbing optical glass according to the present invention contains substantially no Pb, as, cd, and Cr.
In the present specification, the substantial exclusion means that compounds of Pb, as, cd, or Cr are not used As raw materials, but does not exclude the case where the compounds are not intentionally mixed As impurities.
The ultraviolet-transmitting visible light-absorbing optical glass according to the present invention preferably contains 50 to 70 mass% of SiO 2
SiO 2 Is an oxide forming a network of glass, and is an important component for exhibiting thermal stability and chemical durability.
In SiO 2 When the content of (b) is less than 50% by mass, it is difficult to exhibit desired thermal stability and chemical durability, and when it exceeds 70% by mass, it is difficult to melt and moldability is liable to decrease.
The ultraviolet-transmitting visible light-absorbing optical glass of the present invention preferably contains 0 to 5% by mass of B 2 O 3
B 2 O 3 Also, the oxide formed by crosslinking of the glass is an effective component for improving the meltability and thermal stability of the glass, but if the content exceeds 5 mass%, the chemical durability is liable to be lowered.
The ultraviolet-transmitting visible light-absorbing optical glass of the present invention preferably contains 0 to 5 mass% of Al 2 O 3
Al 2 O 3 The crosslinking oxide of the glass is also an effective component for suppressing phase separation or devitrification of the glass, but if the content ratio thereof exceeds 5 mass%, the viscosity of the glass increases and melting and molding are difficult.
SiO in the ultraviolet-transmitting visible light-absorbing optical glass of the present invention 2 、B 2 O 3 And Al 2 O 3 The total content ratio of (3) (SiO) 2 +B 2 O 3 +Al 2 O 3 ) Preferably 50 to 70 substancesAnd (4) percent of the total amount.
By making SiO 2 、B 2 O 3 And Al 2 O 3 The total content ratio of (b) is within the above range, so that thermal stability and chemical durability are easily exhibited.
The ultraviolet-transmitting visible light-absorbing optical glass according to the present invention preferably contains 5 to 20 mass% of Na 2 O, more preferably 5 to 15 mass% of Na 2 O。
Na 2 O is a component that lowers the melting temperature of the glass to improve the meltability, but when the content is less than 5 mass%, the viscosity of the glass increases to make melting difficult, and when the content exceeds 20 mass%, the chemical durability tends to decrease.
The ultraviolet-transmitting visible-light-absorbing optical glass of the present invention is obtained by adding Na 2 Replacement of a part of O with K 2 In the case of O, K is preferable because the following effects can be obtained 2 And (O). That is, the viscosity at the time of melting glass is increased to suppress erosion of the melting tank (refractory or the like), thereby suppressing the mixing of impurities from the material (refractory or the like) of the melting tank into the molten glass, and as a result, the light transmittance of the irradiation light in the wavelength range of 350 to 370nm can be prevented from being lowered. Further, there are an effect of increasing the softening point of the glass to improve the heat resistance of the glass, an effect of improving the chemical durability of the glass, and the like. However, if K 2 When the amount of substitution of O is too large, the viscosity of the molten glass becomes too high, and melting becomes difficult, and the devitrification resistance deteriorates, and the like, so that the amount of substitution must be within a certain range.
As described above, the ultraviolet-transmitting visible light-absorbing optical glass of the present invention, na 2 O and K 2 Total content ratio of O (Na) 2 O+K 2 O) is 5 to 20 mass%, preferably, wherein K 2 O is contained in an amount of 0 to 10 mass%, more preferably K 2 O is contained in an amount of 2 to 8 mass%.
The ultraviolet-transmitting visible light-absorbing optical glass according to the present invention preferably contains 0 to 15 mass% of CaO.
CaO is a component for stabilizing glass, and is effective for improving chemical durability, melt moldability, and devitrification resistance of glass.
If the content of CaO exceeds 15 mass%, it is difficult to obtain sufficient resistance to devitrification.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention preferably contains 0 to 5 mass% of ZnO.
ZnO is also a component for stabilizing glass, and is a component effective for improving the chemical durability of glass.
If the content of ZnO exceeds 5% by mass, the devitrification resistance is liable to decrease.
The ultraviolet-transmitting visible light-absorbing optical glass according to the present invention preferably contains 0 to 15 mass% of BaO.
BaO is also a component for stabilizing the glass, and is a component effective for improving the chemical durability of the glass.
If the content of BaO exceeds 15 mass%, it is difficult to obtain sufficient resistance to devitrification.
In the ultraviolet-transmitting visible light-absorbing glass according to the present invention, the total content ratio of CaO, znO, and BaO (CaO + ZnO + BaO) is preferably 0 to 30% by mass, and the total content ratio of CaO, znO, and BaO (CaO + ZnO + BaO) is more preferably 5 to 20% by mass.
In the ultraviolet-transmitting visible light-absorbing glass according to the present invention, the total content ratio of CaO, znO, and BaO is within the above range, whereby the chemical durability and devitrification resistance of the glass can be easily improved.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention preferably contains 0 to 2 mass% of Sb 2 O 3 More preferably 0 to 1 mass% of Sb 2 O 3
Sb 2 O 3 If the content of the component useful as a clarifying agent (defoaming agent) exceeds 2 mass%, the clarifying property is rather liable to decrease.
As the ultraviolet-transmitting visible light-absorbing glass according to the present invention,
substantially not containing Pb, as, cd and Cr, but containing:
Figure BDA0003756613950000061
the TiO is 2 And Nb 2 O 5 0.1 to 10% by mass in total,
relative to the TiO 2 And Nb 2 O 5 In total content of (3), tiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) is preferably 0 to 0.5.
Further, as the ultraviolet-transmitting visible light-absorbing glass according to the present invention,
substantially not containing Pb, as, cd and Cr, but containing:
Figure BDA0003756613950000071
the TiO is 2 And Nb 2 O 5 0.1 to 10% by mass in total, and preferably comprises:
Figure BDA0003756613950000072
further, as the ultraviolet-transmitting visible light-absorbing glass according to the present invention,
substantially not containing Pb, as, cd and Cr, but containing:
Figure BDA0003756613950000073
the TiO is 2 And Nb 2 O 5 0.1 to 10% by mass in total,
and preferably, the first and second liquid crystal display panels are,
relative to the TiO 2 And Nb 2 O 5 In a total content ratio of TiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) is 0 to 0.5 and comprises:
Figure BDA0003756613950000074
Figure BDA0003756613950000081
the base glass component of the ultraviolet-transmitting visible light-absorbing optical glass relating to the present invention is not particularly limited, but is preferably a soda-silica glass or a soda-potassium-barium glass.
The ultraviolet-transmitting visible light-absorbing glass of the present invention is preferably in the form of a plate having a thickness of 3mm, and the ultraviolet-transmitting visible light-absorbing glass is preferably in the form of 500mW/cm from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When irradiation light (irradiation light in a wavelength range of 200nm to 700 nm) including ultraviolet light and visible light is irradiated with the radiation intensity of (2), the maximum value of the light transmittance in the wavelength range of 350 to 370nm at the start time of irradiation of the irradiation light is 75% or more.
On the other hand, the ultraviolet-transmitting visible light-absorbing glass according to the present invention is preferably in a plate shape having a thickness of 3mm and has a thickness of 500mW/cm from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When the irradiation light (irradiation light in a wavelength range of 200nm to 700 nm) including ultraviolet light and visible light is irradiated with the radiation intensity of (2), the light transmittance in the wavelength range of 200 to 290nm at the start time of irradiation of the irradiation light is 1% or less.
The ultraviolet-transmitting visible light-absorbing glass of the present invention is preferably in the form of a plate having a thickness of 3mm and has a radiation intensity of 500mW/cm from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When irradiation light (irradiation light in a wavelength range of 200nm to 700 nm) including ultraviolet light and visible light is irradiated with the radiation intensity of (a), the light transmittance in a wavelength range of 410 to 690nm at the start time of irradiation of the irradiation light is 1% or less, and more preferably 0.1% or less in a wavelength range of 450 to 650 m.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention is obtained by adding CoO, niO and TiO to a glass which does not substantially contain Pb, as, cd and Cr 2 、Nb 2 O 5 By including a predetermined amount of each, high light transmittance can be selectively exhibited in a wavelength range of 350 to 370nm while reducing environmental load.
The ultraviolet-transmitting visible light-absorbing glass of the present invention is preferably in the form of a plate having a thickness of 3mm and a radiant intensity maximum at a wavelength of 365nm of 500mW/cm from a light source -2 When irradiation light including ultraviolet light and visible light is irradiated for 100 hours, the maintenance ratio represented by the following formula (I) is 90% or more:
(B/A)×100(I)
wherein A is a maximum value (%) of light transmittance in a wavelength range of 350 to 370nm at the start of irradiation of the irradiation light, and B is a maximum value (%) of light transmittance in a wavelength range of 350 to 370nm at the elapse of 100 hours from the start of irradiation of the irradiation light.
In the present document, both surfaces of the plate-shaped glass used for measuring each of the above light transmittances are optically polished, and each of the above light transmittances indicates a value measured when irradiation light is incident perpendicularly to the surface subjected to the optical polishing.
The ultraviolet-transmitting visible light-absorbing glass according to the present invention is obtained by adding CoO, niO and TiO to a glass which does not substantially contain Pb, as, cd and Cr 2 、Nb 2 O 5 Each of which contains a predetermined amount, thereby reducing environmental load, selectively exhibiting high light transmittance in a wavelength range of 350 to 370nm, and appropriately suppressing deterioration due to overexposure.
The method for producing the ultraviolet-transmitting visible light-absorbing glass according to the present invention is not particularly limited, and any conventionally used method may be suitably employed.
For example, oxides, hydroxides, carbonates, nitrates, chlorides, sulfides, and the like are appropriately used as the glass raw material, and weighed and mixed as a desired component to be a blending raw material. The obtained blended raw material is put into a heat-resistant crucible to be melted, stirred and clarified at a temperature of 1300 to 1400 ℃ to form homogeneous molten glass. Then, the molten glass is poured into a molding frame to form a glass gob, and then the glass gob is moved into a furnace heated to a temperature close to the slow cooling point of the glass and cooled to room temperature, whereby a lump of the target ultraviolet-transmitting visible light-absorbing glass can be obtained.
According to the present invention, it is possible to provide an ultraviolet-transmitting visible light-absorbing glass which reduces environmental load, selectively improves the transmittance of irradiation light in the wavelength range of 350 to 370nm, and suppresses deterioration due to overexposure.
Next, the ultraviolet-transmitting visible light-absorbing filter according to the present invention will be described.
The ultraviolet-transmitting visible light absorbing filter according to the present invention is characterized by being composed of the ultraviolet-transmitting visible light absorbing glass according to the present invention.
The details of the ultraviolet-transmitting visible light-absorbing glass according to the present invention are as described above.
As the ultraviolet-transmitting visible light absorbing filter according to the present invention, plate glass or the like optically polished on both sides can be exemplified.
As the ultraviolet-transmitting visible light absorbing filter according to the present invention, an antireflection film or another optical multilayer film may be applied to the ultraviolet-transmitting surface (for example, both optically polished surfaces) of the filter.
The method for producing the ultraviolet-transmitting visible light-absorbing filter according to the present invention is not particularly limited, and the ultraviolet-transmitting visible light-absorbing glass according to the present invention may be produced by processing the glass by a known processing method.
The ultraviolet-transmitting visible light absorbing filter according to the present invention is made of the ultraviolet-transmitting visible light absorbing glass according to the present invention, and does not contain components such As Pb, as, cd, and Cr, so that the environmental load due to cutting chips, waste water, and the like can be reduced.
The ultraviolet-transmitting visible light-absorbing filter of the present invention can be suitably used as an ultraviolet-transmitting filter incorporated in an ultraviolet irradiation device such as a semiconductor exposure machine or a light source for an ultraviolet-curing resin.
According to the present invention, it is possible to provide an ultraviolet-transmitting visible light absorbing filter which selectively exhibits high light transmittance in a wavelength range of 350 to 370nm while reducing environmental load, and can suppress deterioration due to overexposure.
Example (b):
the present invention will be further described with reference to the following examples and comparative examples, but the present invention is not limited to the following examples.
(examples 1 to 4 and comparative examples 1 to 2)
Cobalt oxide (CoO), nickel hydroxide (Ni (OH) were added in such a manner as to obtain glasses having the compositions described in table 1 and table 2 2 ) Titanium oxide (TiO) 2 ) And niobium oxide (Nb) 2 O 5 ) Separately weighed, and further silica powder (SiO) 2 ) Boric acid (H) 3 BO 3 ) Aluminum hydroxide (Al (OH) 3 ) Sodium carbonate (Na) 2 CO 3 ) Sodium nitrate (NaNO) 3 ) Potassium carbonate (K) 2 CO 3 ) Calcium carbonate (CaCO) 3 ) Zinc oxide (ZnO), barium carbonate (BaCO) 3 ) Antimony oxide (Sb) 2 O 3 ) Cerium oxide (CeO) 2 ) The respective materials were weighed, mixed, and placed in a platinum crucible, heated, melted, stirred at 1300 to 1400 ℃ in the air, homogenized, clarified, and poured into a mold. After the glass is solidified, the glass is further transferred to an electric furnace heated to a temperature close to the slow cooling point of the glass, and slowly cooled to room temperature, thereby obtaining the target glass.
(example 5)
In example 2, in order to obtain glasses having the compositions as shown in table 1 and table 2, targeted glasses were obtained in the same manner as in example 2 except that a viscosity crucible was used instead of the platinum crucible.
Table 1 shows the content ratio of each component constituting each glass, the total content ratio of each component, and the content ratio in terms of mass%, and table 2 shows the content ratio of each component constituting each glass, the total content ratio of each component, and the content ratio in terms of mol%.
The glasses obtained in examples 1 to 5 and comparative examples 1 to 2 were processed into plates with a thickness of 3mm, both surfaces of which were optically polished, and the spectral transmittances at wavelengths of 200 to 700nm were measured using an ultraviolet-visible spectrophotometer ("UV 3600 manufactured by shimadzu corporation").
Then, using an ultraviolet light source ("HOYA CANDEO OPTRONICS Co., ltd." type: UL 750) having a maximum radiation intensity at 365nm, the radiation intensity on the surface to be irradiated was 500mW cm from a direction perpendicular to the surface to be optically polished -2 (using "USHIO corporation" manufactured by the ultraviolet intensity meter UIT-101 and the irradiated surface measurement), including ultraviolet light and visible light irradiation.
The maximum value of the transmittance of the irradiation light in the wavelength range of 350 to 370nm of the plate-like objects obtained from the glasses obtained in examples 1 to 5 was 75% or more before the irradiation of the irradiation light.
In addition, the transmittance of the plate-like objects obtained from the glasses obtained in examples 1 to 5 before the irradiation with the irradiation light in the wavelength range of 200 to 290nm and the transmittance in the wavelength range of 410 to 690nm were 1% or less.
The maximum value of light transmittance in the wavelength range of 350 to 370nm before the irradiation of the irradiation light (Tmax initial) and the maximum value of light transmittance in the wavelength range of 350 to 370nm at the time point when 100 hours have elapsed since the start of the irradiation light (Tmax 100 hr) when the irradiation light was continuously irradiated for 100 hours are shown in tables 1 and 2, respectively.
The maintenance ratios (%) calculated by (Tmax 100hr/Tmax initial) × 100 are shown in tables 1 and 2, respectively.
Fig. 1 shows a transmission spectrum (a) at the start of irradiation and a transmission spectrum (b) after 100 hours from the start of irradiation when the plate-like object obtained from the glass obtained in example 1 was irradiated with the irradiation, and fig. 2 shows a transmission spectrum (a) at the start of irradiation and a transmission spectrum (b) after 100 hours from the start of irradiation when the plate-like object obtained from the glass obtained in example 2 was irradiated with the irradiation.
Fig. 3 shows a transmission spectrum (a) at the start of irradiation and a transmission spectrum (b) after 100 hours from the start of irradiation when the irradiation light was irradiated on the plate-like object obtained from the glass obtained in example 5.
Further, fig. 4 shows a transmission spectrum (a) at the start of irradiation and a transmission spectrum (b) after 100 hours from the start of irradiation when the plate-like object obtained from the glass obtained in the above comparative example 1 was irradiated with the above irradiation, and fig. 5 shows a transmission spectrum (a) at the start of irradiation and a transmission spectrum (b) after 100 hours from the start of irradiation when the plate-like object obtained from the glass obtained in the above comparative example 1 was irradiated with the above irradiation.
As shown in FIGS. 1 to 3, from the transmission spectrum (a) at the start of irradiation with irradiation light and the transmission spectrum (b) after the lapse of 100 hours from the start of irradiation, it was found that a plate-like object having a thickness of 3mm and made of glass obtained in each example was 500mW/cm from a light source having a maximum radiation intensity at a wavelength of 365nm -2 The irradiation light including ultraviolet light and visible light was irradiated for 100 hours, and high transmittance was also shown in the wavelength range of 350 to 370nm before and after the irradiation, and as shown in the following tables 1 and 2, the irradiation light having the maximum irradiation intensity at the wavelength of 365nm was irradiated at 500mW/cm -2 When irradiation light including ultraviolet light and visible light is irradiated for 100 hours, it is known that the maintenance rate of ultraviolet light transmission expressed by the formula (B/a) × 100 (where a is the maximum value (%) of light transmittance in the wavelength range of 350 to 370nm at the start of irradiation of the irradiation light, and B is the maximum value (%) of light transmittance in the wavelength range of 350 to 370nm at the time of 100 hours from the start of irradiation of the irradiation light) is as high as 90% or more.
TABLE 1
Figure BDA0003756613950000121
TABLE 2
Figure BDA0003756613950000131
As is clear from Table 1 and the like, the ultraviolet-transmitting visible light-absorbing glasses obtained in examples 1 to 5 contain predetermined amounts of CoO, niO and TiO, respectively, in such a manner that they do not substantially contain Pb, as, cd and Cr 2 And Nb 2 O 5 Accordingly, the light transmittance of the irradiation light in the wavelength range of 350 to 370nm is selectively improved while reducing the environmental load, and the deterioration due to overexposure can be suppressed, and therefore, the ultraviolet-transmitting visible light absorption filter can be suitably used.
On the other hand, as is clear from tables 1 and 2, the glasses obtained in comparative examples 1 to 2 do not contain Nb 2 O 5 Therefore, the maximum value of the transmittance (Tmax onset) in the wavelength range of 350 to 370nm at the start time of irradiation light is lowered (comparative example 2), or deterioration due to overexposure cannot be suppressed (comparative examples 1, 2).
Industrial applicability
According to the present invention, it is possible to provide an ultraviolet-transmitting visible light absorbing glass which selectively improves the transmittance of irradiation light in the wavelength range of 350 to 370nm and suppresses deterioration due to overexposure while reducing the environmental load, and an ultraviolet-transmitting visible light absorbing filter composed of the glass.

Claims (6)

1. An ultraviolet-transmitting visible light-absorbing glass characterized in that,
substantially not containing Pb, as, cd and Cr, but containing:
0.1 to 2 mass percent of CoO,
NiO 1-5 mass%,
TiO 2 0 to 1 mass percent,
Nb 2 O 5 0.1 to 10 mass percent,
Na 2 O5-6 mass%,
11 to 15 mass percent of BaO,
and reacting said TiO 2 And Nb 2 O 5 The total content is 0.1 to 10 mass%;
in a plate-like state with a thickness of 3mm, 500mW/cm was measured from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When the irradiation light including ultraviolet light and visible light is irradiated with the irradiation light of (1), the maximum value of the transmittance in the wavelength range of 350 to 370nm at the start time of irradiation of the irradiation light is 75% or more.
2. The ultraviolet-transmitting visible light-absorbing glass according to claim 1,
relative to the TiO 2 And Nb 2 O 5 In a total content ratio of TiO 2 Content ratio of (TiO) 2 /(TiO 2 +Nb 2 O 5 ) ) is 0 to 0.5.
3. The ultraviolet-transmitting visible light-absorbing glass according to claim 1, further comprising:
Figure FDA0003756613940000011
4. the ultraviolet-transmitting visible light-absorbing glass according to claim 1,
in a plate-like state with a thickness of 3mm, 500mW/cm was measured from a light source having a maximum radiation intensity at a wavelength of 365nm -2 When the irradiation light including ultraviolet light and visible light is irradiated with the radiation intensity of (1) or less, the transmittance in the wavelength range of 200 to 290nm and the transmittance in the wavelength range of 410 to 690nm at the start time of irradiation of the irradiation light are both 1% or less.
5. The ultraviolet-transmitting visible light-absorbing glass according to claim 1,
in the state of a plate shape with a thickness of 3mm, the radiation maximum at a wavelength of 365nmLight source with intensity of 500mW/cm -2 When irradiation light including ultraviolet light and visible light is irradiated for 100 hours, the maintenance ratio represented by the following formula (I) is 90% or more:
(B/A)×100 (I)
wherein A is a maximum value of light transmittance in a wavelength range of 350 to 370nm at the start time of irradiation of the irradiation light, and B is a maximum value of light transmittance in a wavelength range of 350 to 370nm at the elapse of 100 hours from the start time of irradiation of the irradiation light.
6. An ultraviolet-transmitting visible light-absorbing filter characterized in that,
the ultraviolet-transmitting visible light-absorbing glass according to any one of claims 1 to 5.
CN202210864516.5A 2015-09-30 2016-09-28 Ultraviolet-transmitting visible light-absorbing glass and ultraviolet-transmitting visible light-absorbing filter Pending CN115304273A (en)

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