CN115287628A - Semiconductor diffusion furnace heat-preserving container and clamping device thereof - Google Patents
Semiconductor diffusion furnace heat-preserving container and clamping device thereof Download PDFInfo
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- CN115287628A CN115287628A CN202210870217.2A CN202210870217A CN115287628A CN 115287628 A CN115287628 A CN 115287628A CN 202210870217 A CN202210870217 A CN 202210870217A CN 115287628 A CN115287628 A CN 115287628A
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 36
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 238000004321 preservation Methods 0.000 claims abstract description 54
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000009826 distribution Methods 0.000 claims abstract description 3
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 6
- 238000009434 installation Methods 0.000 description 15
- 238000009413 insulation Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a semiconductor diffusion furnace heat-preserving container and press from both sides and get device thereof, it includes a plurality of heat preservation fins of making by quartz glass, and is a plurality of heat preservation fins are all coaxial and follow heat preservation fin axial evenly spaced distribution is a plurality of heat preservation fins pass through the connecting piece and connect, a plurality of locating holes that run through heat preservation fins are seted up to one side of heat preservation fins, and are a plurality of the locating hole is followed heat preservation fin circumference evenly distributed. This application can reduce the used material of manufacturing the heat-preserving container, has the effect that reduces the cost of manufacturing the heat-preserving container.
Description
Technical Field
The application relates to the field of semiconductor chip processing, in particular to a heat-preserving barrel of a semiconductor diffusion furnace and a clamping device of the heat-preserving barrel.
Background
Semiconductor chips are indispensable for electronic products such as mobile phones and computers, and silicon is generally used as a raw material for semiconductor chips. In the production process of semiconductor chips, raw material silicon wafers are required to be put into a diffusion furnace for vapor deposition treatment.
In the correlation technique, the generally vertical setting of diffusion furnace, the feed inlet has been seted up to the bottom of diffusion furnace, and the below of diffusion furnace is provided with the horizontally workstation, and the workstation liftable, has placed the heat-preserving container on the workstation, and the heat-preserving container is located the diffusion furnace under, has placed the support on the heat-preserving container, and the silicon chip is placed on the support. Before the work, earlier with the descending of workstation, then place the support on the heat-preserving container, then place the silicon chip on the support, then upwards rise the workstation for the workstation supports the bottom of tight diffusion furnace, makes heat-preserving container, support and silicon chip enter into the diffusion furnace through the feed inlet simultaneously. Vapor deposition needs to be carried out in a high-temperature closed environment, and after the workbench is tightly abutted against the diffusion furnace, the heat-preserving barrel is just positioned at the feed inlet of the diffusion furnace, so that the heat-preserving and heat-insulating effect can be achieved on the diffusion furnace.
However, the thermal insulation barrel is usually made of solid transparent quartz glass as a raw material, and is cylindrical in shape, so that more materials are consumed, and the cost is higher.
Disclosure of Invention
In order to save the materials used for manufacturing the heat-preserving barrel and further save the cost, the application provides the heat-preserving barrel of the semiconductor diffusion furnace and a clamping device thereof.
The application provides a semiconductor diffusion furnace heat-preserving container adopts following technical scheme:
the heat-insulating barrel of the semiconductor diffusion furnace comprises a plurality of heat-insulating fins made of quartz glass, wherein the heat-insulating fins are coaxial and are distributed along the axial direction of the heat-insulating fins at even intervals, the heat-insulating fins are connected through connecting pieces, a plurality of positioning holes penetrating through the heat-insulating fins are formed in one sides of the heat-insulating fins, and the positioning holes are distributed along the circumferential direction of the heat-insulating fins evenly.
Through adopting above-mentioned technical scheme, compare in pure solid heat-preserving container, the heat-preserving container that a plurality of interval distribution's heat preservation fin was made can effective save material to the cost of manufacture has been reduced. The diffusion furnace is usually heated in an infrared heating mode, after infrared rays pass through one heat preservation fin, one part of the infrared rays is reflected back to the diffusion furnace, the other part of the infrared rays passes through the heat preservation fin and irradiates on the next heat preservation fin, the infrared rays can repeat the process, and most of the infrared rays can be reflected back to the diffusion furnace by the heat preservation fins, so that the heat preservation barrel can save materials and still has a good heat preservation and insulation effect.
Optionally, the connecting piece includes multiunit connecting post group, and every group the connecting post group sets up respectively between two adjacent heat preservation fins, every group the connecting post group includes a plurality of spliced poles, and is a plurality of the spliced pole is followed heat preservation fin circumference evenly distributed, the both ends of spliced pole weld with two adjacent heat preservation fins respectively.
Through adopting above-mentioned technical scheme, utilize the connecting column group with two heat preservation fin welding together to fix polylith heat preservation fin together, simple structure, the operation is convenient.
Optionally, a plurality of fixing holes are formed in one side, facing each other, of each two adjacent heat preservation fins, the fixing holes correspond to the connecting columns one to one, and two ends of each connecting column are inserted into the fixing holes of the two adjacent heat preservation fins respectively.
By adopting the technical scheme, the welding area between the connecting column and the heat-insulating fins is increased, so that the connection stability between the connecting column and the heat-insulating fins is improved, and the structure is reasonable.
The second purpose of this application is to provide a press from both sides and gets device, be in including workstation and setting fixture and actuating mechanism on the workstation, fixture includes first clamping piece and second clamping piece, first clamping piece with form between the second clamping piece and be used for the centre gripping the first centre gripping mouth of spliced pole, first clamping piece with the second clamping piece is all along being close to or keeping away from the spliced pole direction is slided and is set up on the workstation, be provided with on the workstation and drive first clamping piece and second clamping piece along being close to or keeping away from the glide machanism that the spliced pole direction was slided, actuating mechanism is used for the drive first clamping piece with the second clamping piece is close to each other or keeps away from.
Through adopting above-mentioned technical scheme, to the semiconductor chip of difference, need change the heat-preserving container of different grade type usually, during the change, will take out the heat-preserving container from the diffusion furnace below, but the temperature of heat-preserving container this moment is higher, takes out comparatively difficultly.
Utilize actuating mechanism earlier in this application to let first clamping piece and second clamping piece separate each other, then utilize glide machanism to drive first clamping piece and second clamping piece to removing near the spliced pole direction, when treating the spliced pole and being located between first clamping piece and the second clamping piece, utilize actuating mechanism to drive first clamping piece and second clamping piece and be close to each other, make first clamping piece and second clamping piece support tight spliced pole, thereby make the spliced pole be located first centre gripping mouth, then utilize glide machanism to drive first clamping piece and second clamping piece to keeping away from the spliced pole direction and remove, because the spliced pole is pressed from both sides tightly this moment, so take out the heat-preserving container when first clamping piece and second clamping piece remove, the effectual degree of difficulty of taking out the heat-preserving container that has reduced.
Optionally, first clamping piece is in a back of the body one side of second clamping piece is provided with first pole, the second clamping piece is in a back of the body one side of first clamping piece is provided with the second pole, first pole orientation one side of second pole is provided with the third clamping piece, the second pole orientation one side of first pole is provided with the fourth clamping piece, the third clamping piece with form between the fourth clamping piece and be used for the centre gripping the second centre gripping mouth of spliced pole, work as when the centre gripping has the spliced pole in the first centre gripping mouth, also the centre gripping has the spliced pole in the second centre gripping mouth, actuating mechanism is used for driving first pole with the second pole is close to each other or keeps away from, glide machanism is used for driving first pole with the second pole is along being close to or keeping away from spliced pole direction synchronous slip.
By adopting the technical scheme, when the first clamping piece and the second clamping piece clamp one connecting column, the third clamping piece and the fourth clamping piece also clamp one connecting column, and when two connecting columns are clamped, the heat-insulating barrel can be limited in the moving process of the heat-insulating barrel; when only one connecting column is clamped, the heat-insulating barrel can rotate around the clamped connecting column when moving, but when two connecting columns are clamped simultaneously, the situation can be avoided. Utilize actuating mechanism to drive first pole and second pole and be close to each other and keep away from to drive first clamping piece and second clamping piece and be close to each other or keep away from, and drive third clamping piece and fourth clamping piece simultaneously and be close to each other or keep away from, utilize glide machanism to drive first pole and second pole and slide in step, thereby drive first clamping piece, second clamping piece, third clamping piece and fourth clamping piece synchronous motion, rational in infrastructure.
Optionally, actuating mechanism includes driving motor, gear, first rack and second rack, the upper surface of workstation slides and is provided with the installation piece, the cavity has been seted up in the installation piece, the gear level rotates the setting and is in on the installation piece just the gear is located in the cavity, the one end of first rack with first pole fixed connection, first rack passes the installation piece and with the installation piece slides and is connected, first rack with gear engagement, the second rack is kept away from the one end of first pole with second pole fixed connection, the second rack passes the installation piece and with the installation piece slides and connects, the second rack with gear engagement, the gear is located first rack with between the second rack, driving motor sets up on the installation piece and be used for driving gear rotation, glide machanism is used for driving the installation piece is along being close to or keeping away from the spliced pole direction removes.
Through adopting above-mentioned technical scheme, driving motor drives the gear rotation, and the gear rotation drives first rack and second rack and is close to or keeps away from each other to drive first pole and second pole and be close to or keep away from each other, simple structure, the operation is convenient. Utilize glide machanism to drive the installation piece and remove along being close to or keeping away from the spliced pole direction, the installation piece removes and drives first rack and second rack and move along being close to or keeping away from spliced pole direction synchronous motion, and first rack and second rack move first pole and second pole along being close to or keeping away from spliced pole direction synchronous motion, rational in infrastructure.
Optionally, the first rod is far away from the one end of first clamping piece is seted up and is followed first pole length direction's first groove, it is provided with the third pole to slide in the first groove, be provided with on the first pole and be used for fixing the first locating piece of third pole, the third clamping piece sets up on the third pole, the second pole is far away from the one end of second clamping piece is seted up and is followed second pole length direction's second groove, it is provided with the fourth pole to slide in the second groove, be provided with on the second pole and be used for fixing the second locating piece of fourth pole, the fourth clamping piece sets up on the fourth pole.
Through adopting above-mentioned technical scheme, utilize first setting element to adjust the length that the third pole inserted in the first groove, thereby adjust the distance between first clamping piece and the third clamping piece, utilize the second setting element to adjust the length that the fourth pole inserted in the second groove, thereby adjust the distance of second clamping piece and fourth clamping piece, and then make the distance between first centre gripping mouth and the second centre gripping mouth adjustable, to the heat-preserving container of different models, its diameter may be different, the adjustable application range who gets the device that has enlarged this clamp of distance of first centre gripping mouth and second centre gripping mouth, and is rational in infrastructure.
Optionally, a first positioning groove is formed in the side wall of the third rod along the length direction of the third rod, the cross section of the first positioning groove is inverted trapezoid, the first positioning piece includes a first positioning bolt, the first positioning bolt is in threaded connection with the first rod, and the rod portion of the first positioning bolt extends into the first positioning groove and abuts against the side wall of the first positioning groove.
By adopting the technical scheme, the first positioning bolt is rotated to enable the first positioning bolt to tightly abut against the side wall of the first positioning groove, so that the third rod is fixed, the structure is simple, and the operation is convenient; and when being fixed with the third pole, can fix a position the third pole along circumference to fix a position rational in infrastructure, third clamping piece along third pole circumference.
Optionally, the first clamping piece and the second clamping piece are both semicircular, and when the first clamping piece and the second clamping piece are both tightly abutted to the connecting column, the cross section of the first clamping opening is circular.
Through adopting above-mentioned technical scheme, first clamping piece and second clamping piece can be pieced together into a complete ring for the spliced pole is in between first clamping piece and the second clamping piece completely, thereby has reduced the spliced pole and has disengaged the possibility from first centre gripping mouth.
Optionally, the mutually facing sides of the first clamping piece and the second clamping piece are provided with buffer washers.
Through adopting above-mentioned technical scheme, reduced the spliced pole by the possibility of damage, rational in infrastructure.
In summary, the present application includes at least one of the following beneficial technical effects:
1. compared with a pure solid heat-insulating barrel, the heat-insulating barrel made of the heat-insulating fins distributed at intervals can effectively save materials, so that the manufacturing cost is reduced. The diffusion furnace is usually heated in an infrared heating mode, after infrared rays pass through one heat preservation fin, one part of the infrared rays are reflected back to the diffusion furnace, the other part of the infrared rays pass through the heat preservation fin and irradiate on the next heat preservation fin, the infrared rays can repeat the process, and most of the infrared rays can be reflected back to the diffusion furnace by the plurality of heat preservation fins, so that the heat preservation barrel can save materials and still has a good heat preservation and insulation effect;
2. in the application, the driving mechanism is used for separating the first clamping piece and the second clamping piece from each other, then the sliding mechanism is used for driving the first clamping piece and the second clamping piece to move towards the direction close to the connecting column, when the connecting column is located between the first clamping piece and the second clamping piece, the driving mechanism is used for driving the first clamping piece and the second clamping piece to approach each other, so that the first clamping piece and the second clamping piece are tightly abutted against the connecting column, the connecting column is located in the first clamping opening, then the sliding mechanism is used for driving the first clamping piece and the second clamping piece to move towards the direction away from the connecting column, and the connecting column is tightly clamped at the moment, so that the heat-insulating barrel is taken out while the first clamping piece and the second clamping piece move, and the difficulty in taking out the heat-insulating barrel is effectively reduced;
3. when the first clamping piece and the second clamping piece clamp one connecting column, the third clamping piece and the fourth clamping piece also clamp one connecting column, and when two connecting columns are clamped, a limiting effect can be achieved on the heat-insulating barrel in the moving process of the heat-insulating barrel; when only one connecting column is clamped, the heat-insulating barrel can rotate around the clamped connecting column when moving, but when two connecting columns are clamped simultaneously, the situation can be avoided.
Drawings
Fig. 1 is a schematic perspective view of a heat-insulating barrel of a semiconductor diffusion furnace in embodiment 1 of the present application.
Fig. 2 is a sectional view of an insulating fin in example 1 of the present application.
Fig. 3 is a schematic perspective view of the heat-insulating fin in embodiment 1 of the present application.
Fig. 4 is a schematic perspective view of a gripping device in embodiment 2 of the present application.
Fig. 5 is a schematic view showing a connection relationship between the second hydraulic cylinder, the mounting block, the driving mechanism, and the gripping mechanism in embodiment 2 of the present application.
Fig. 6 is a schematic perspective view of a drive mechanism in embodiment 2 of the present application.
Fig. 7 is a sectional view of the first rod, the third rod, and the first positioning bolt in embodiment 2 of the present application.
Fig. 8 is a sectional view of the second rod, the fourth rod, and the second positioning bolt in embodiment 2 of the present application.
Fig. 9 is a schematic view showing a connection relationship between the second hydraulic cylinder, the mounting block, the driving mechanism, the gripping mechanism, and the connecting column in embodiment 2 of the present application.
Description of reference numerals: 1. heat preservation fins; 11. air bubbles; 12. positioning holes; 13. a fixing hole; 14. connecting columns; 2. a work table; 21. a first hydraulic cylinder; 22. mounting blocks; 23. a second hydraulic cylinder; 3. a clamping mechanism; 31. a first clip piece; 32. a second clip; 33. a cushion pad; 4. a drive mechanism; 41. a drive motor; 42. a gear; 43. a first rack; 44. a second rack; 51. a first connecting rod; 52. a first mounting bar; 53. a first fixing lever; 54. a first lever; 541. a first groove; 55. a first positioning rod; 56. a third lever; 561. a first positioning groove; 57. a third positioning rod; 58. a first positioning bolt; 61. a second connecting rod; 62. a second mounting bar; 63. a second fixing bar; 64. a second lever; 641. a second groove; 65. a second positioning rod; 66. a fourth bar; 661. a second positioning groove; 67. a fourth positioning rod; 68. a second positioning bolt; 71. a third clip; 72. a fourth clip piece; 73. a first clamping opening; 74. a second clamping opening.
Detailed Description
The present application is described in further detail below with reference to figures 1-9.
The embodiment 1 of the application discloses a heat-preserving barrel of a semiconductor diffusion furnace. Referring to fig. 1, the heat preservation barrel of the semiconductor diffusion furnace comprises six heat preservation fins 1 made of quartz glass, the six heat preservation fins 1 are coaxial and are uniformly distributed at intervals along the axial direction of the heat preservation fins 1, and the six heat preservation fins 1 are connected through connecting pieces.
Referring to fig. 2, each heat-insulating fin 1 comprises three quartz glass sheets, the three quartz glass sheets are coaxial and fixed together by welding, and a plurality of bubbles 11 are arranged in the middle quartz glass.
Referring to fig. 1 and 3, one side of the heat-insulating fin 1 is provided with four positioning holes 12 penetrating through the heat-insulating fin 1, and the four positioning holes 12 are uniformly distributed along the circumferential direction of the heat-insulating fin 1. Four fixing holes 13 have all been seted up to two adjacent heat preservation fins 1 one side that faces each other, and four fixing holes 13 are along 1 circumference evenly distributed of heat preservation fin, and fixing hole 13 and locating hole 12 interval set up in turn.
Referring to fig. 1 and 3, the connecting piece includes five groups of connecting columns, every group of connecting column group sets up respectively between two adjacent insulation fins 1, the connecting column group includes four spliced poles 14, four spliced poles 14 and four fixed orifices 13 one-to-ones, peg graft respectively in the fixed orifices 13 on two adjacent insulation fins 1 at the both ends of spliced pole 14, spliced pole 14 inserts the part of fixed orifices 13 and passes through welded fastening with insulation fins 1, thereby connect gradually six insulation fins 1.
The implementation principle of the heat-preserving barrel of the semiconductor diffusion furnace in the embodiment 1 of the application is as follows: compared with a pure solid heat-insulating barrel, the heat-insulating barrel made of the heat-insulating fins 1 distributed at intervals can effectively save materials, so that the manufacturing cost is reduced. The diffusion furnace is usually heated in an infrared heating mode, after infrared rays pass through one heat preservation fin 1, one part of the infrared rays is reflected back to the diffusion furnace, the other part of the infrared rays passes through the heat preservation fin 1 and irradiates on the next heat preservation fin 1, the infrared rays can repeat the process, and the plurality of heat preservation fins 1 can reflect most of the infrared rays back to the diffusion furnace, so that the heat preservation barrel can save materials and still has a good heat preservation and insulation effect.
The embodiment 2 of the present application discloses a clamping device, and referring to fig. 4 and 5, the clamping device includes a table 2, and a clamping mechanism 3 and a driving mechanism 4 which are arranged on the table 2.
Referring to fig. 4, two first hydraulic cylinders 21 are fixedly mounted on the ground, piston rods of the first hydraulic cylinders 21 are vertically arranged upwards, the workbench 2 is horizontally welded on the piston rods of the two first hydraulic cylinders 21, and the two first hydraulic cylinders 21 are distributed along the length direction of the workbench 2. The upper surface of workstation 2 slides along 2 length direction of workstation and is provided with installation piece 22, and the cavity has been seted up to installation piece 22 inside. The sliding mechanism is arranged on the workbench 2 and drives the installation block 22 to slide along the length direction of the workbench 2, the sliding mechanism comprises a second hydraulic cylinder 23, the second hydraulic cylinder 23 is horizontally and fixedly arranged on the workbench 2 and located on the upper surface of the workbench 2, a piston rod of the second hydraulic cylinder 23 is arranged along the length direction of the workbench 2, and the piston rod of the second hydraulic cylinder 23 is welded and fixed with the installation block 22.
Referring to fig. 5 and 6, the driving mechanism 4 includes a driving motor 41, a gear 42, a first rack 43 and a second rack 44, the driving motor 41 is fixedly mounted on the mounting block 22, an output shaft of the driving motor 41 vertically extends downward into a cavity of the mounting block 22, the gear 42 is horizontally and rotatably mounted on the mounting block 22 and located in the cavity, and the gear 42 is coaxially and fixedly connected with the output shaft of the driving motor 41. The first rack 43 horizontally passes through the mounting block 22 and is connected with the mounting block 22 in a sliding manner, and the first rack 43 is arranged along the width direction of the workbench 2 and meshed with the gear 42. The second rack 44 horizontally passes through the mounting block 22 and is connected with the mounting block 22 in a sliding manner, and the second rack 44 is arranged along the width direction of the workbench 2 and meshed with the gear 42. The gear 42 is located between the first rack 43 and the second rack 44.
Referring to fig. 5 and 7, a first connecting rod 51 is integrally arranged at one end of the first rack 43, the first connecting rod 51 is arranged along the width direction of the workbench 2, a horizontal first mounting rod 52 is welded at one end of the first connecting rod 51 far away from the first rack 43, the first mounting rod 52 is arranged along the length direction of the workbench 2, a horizontal first fixing rod 53 is welded at one end of the first mounting rod 52 far away from the first connecting rod 51, the first fixing rod 53 is arranged along the width direction of the workbench 2, a first rod 54 is welded at one end of the first fixing rod 53 far away from the first mounting rod 52, and the first rod 54 is arranged along the length direction of the workbench 2. A first positioning rod 55 is welded to a side wall of the first rod 54, and the first positioning rod 55 is disposed along the width direction of the table 2. One end of the first rod 54, which is far away from the first rack 43, is provided with a first groove 541 along the length direction of the first rod 54, a third rod 56 is slidably arranged in the first groove 541, a third positioning rod 57 along the width direction of the workbench 2 is welded on the side wall of the third rod 56, and the third positioning rod 57 is parallel to the first positioning rod 55. A first positioning groove 561 along the length direction of the third rod 56 is formed in the side wall of the third rod 56, the cross section of the first positioning groove 561 is in an inverted trapezoid shape, and the distance between two groove walls of the first positioning groove 561 in the direction away from the bottom of the groove is gradually increased. The first rod 54 is provided with a first positioning member for fixing the third rod 56, the first positioning member includes a first positioning bolt 58, the first positioning bolt 58 is screwed on the first rod 54, and a rod portion of the first positioning bolt 58 extends into the first positioning groove 561 and abuts against a side wall of the first positioning groove 561.
Referring to fig. 5 and 8, a second connecting rod 61 is integrally arranged at one end of the second rack 44, which is far away from the first connecting rod 51, the second connecting rod 61 is arranged along the width direction of the workbench 2, a horizontal second mounting rod 62 is welded at one end of the second connecting rod 61, which is far away from the second rack 44, the second mounting rod 62 is arranged along the length direction of the workbench 2, a horizontal second fixing rod 63 is welded at one end of the second mounting rod 62, which is far away from the second connecting rod 61, the second fixing rod 63 is arranged along the width direction of the workbench 2, a second rod 64 is welded at one end of the second fixing rod 63, which is far away from the second mounting rod 62, and the second rod 64 is arranged along the length direction of the workbench 2. A second positioning rod 65 is welded to the second rod 64 along the width direction of the table 2, the first positioning rod 55 and the second positioning rod 65 are positioned between the first rod 54 and the second rod 64, and the first positioning rod 55 and the second positioning rod 65 are coaxial. One end of the second rod 64, which is far away from the second rack 44, is provided with a second groove 641 along the length direction of the second rod 64, a fourth rod 66 is slidably arranged in the second groove 641, a fourth positioning rod 67 is welded on the side wall of the fourth rod 66, the fourth positioning rod 67 is parallel to the second positioning rod 65, the third positioning rod 57 and the fourth positioning rod 67 are located between the third rod 56 and the fourth rod 66, and the third positioning rod 57 and the fourth positioning rod 67 are coaxial. The lateral wall of the fourth rod 66 is provided with a second positioning groove 661 along the length direction of the fourth rod 66, the cross section of the second positioning groove 661 is in an inverted trapezoid shape, and the distance between two groove walls of the second positioning groove 661 gradually increases along the direction away from the bottom of the groove. The second rod 64 is provided with a second positioning member for fixing the fourth rod 66, the second positioning member includes a second positioning bolt 68, the second positioning bolt 68 is in threaded connection with the second rod 64, and a rod portion of the second positioning bolt 68 extends into the second positioning groove 661 and abuts against a side wall of the second positioning groove 661.
Referring to fig. 5 and 9, the clamping mechanism 3 includes a first clamping piece 31 and a second clamping piece 32, the first clamping piece 31 is welded at an end of the first positioning rod 55 away from the first rod 54, the second clamping piece 32 is welded at an end of the second positioning rod 65 away from the second rod 64, and the first clamping piece 31 and the second clamping piece 32 form a first clamping opening 73 for clamping the connecting column 14. A cushion pad 33 is adhesively fixed to each of the facing sides of first clip piece 31 and second clip piece 32. The first clamping piece 31 and the second clamping piece 32 are both semicircular, and when the first clamping piece 31 and the second clamping piece 32 are both tightly connected to the connecting column 14, the cross section of the first clamping opening 73 is a complete circle.
Referring to fig. 5 and 9, a third clamping piece 71 is welded to one end of the third positioning rod 57 away from the third rod 56, a fourth clamping piece 72 is welded to one end of the fourth positioning rod 67 away from the fourth rod 66, and a second clamping opening 74 for clamping the connecting column 14 is formed between the third clamping piece 71 and the fourth clamping piece 72. The third jaw 71 and the fourth jaw 72 are provided with a buffer pad 33 on the sides facing each other. When the third jaw 71 and the fourth jaw 72 are both tightly connected to the connecting column 14, the cross section of the second clamping opening 74 is a complete circle. And when the connection pole 14 is clamped in the first clamping opening 73, the connection pole 14 is also clamped in the second clamping opening 74.
The implementation principle of this application embodiment 2 a press from both sides and get device does: to different semiconductor chips, need change the heat-preserving container of different grade type usually, during the change, will take out the heat-preserving container from diffusion furnace below, but the temperature of heat-preserving container this moment is higher, takes out comparatively difficultly.
When the heat preservation barrel is taken out, the driving motor 41 is started first, the gear 42 is driven to rotate, the gear 42 rotates to drive the first rack 43 and the second rack 44 to move towards the direction away from each other, the first rack 43 and the second rack 44 move to drive the first connecting rod 51 and the second connecting rod 61 to move towards the direction away from each other, the first connecting rod 51 and the second connecting rod 61 move to drive the first mounting rod 52 and the second mounting rod 62 to move towards the direction away from each other, the first mounting rod 52 and the second mounting rod 62 move to drive the first fixing rod 53 and the second fixing rod 63 to move towards the direction away from each other, the first fixing rod 53 and the second fixing rod 63 move to drive the first rod 54 and the second rod 64 to move towards the direction away from each other, the first rod 54 and the second rod 64 move to drive the third positioning rod 55 and the second positioning rod 65 to move towards the direction away from each other, the first positioning rod 55 and the second positioning rod 65 drive the first clamping piece 31 and the second clamping piece 32 to move towards the direction away from each other, the first rod 54 moves to drive the third rod 56 to move synchronously, the second rod 64 and the second positioning rod 65 move towards the third clamping piece 66 and the fourth clamping piece 71 move towards the fourth clamping piece 71 and the fourth clamping piece 31.
Then the piston rod of the second hydraulic cylinder 23 extends to drive the mounting block 22 to move towards the direction close to the heat-insulating barrel, so as to drive the first clamping piece 31, the second clamping piece 32, the third clamping piece 71 and the fourth clamping piece 72 to move towards the direction close to the heat-insulating barrel, when the belt connecting column 14 is located between the first clamping piece 31 and the second clamping piece 32, the driving motor 41 rotates reversely, so that the first clamping piece 31 and the second clamping piece 32 approach each other and abut against the connecting column 14, the third clamping piece 71 and the fourth clamping piece 72 approach each other and abut against the other connecting column 14, so that the connecting column 14 is clamped in both the first clamping opening 73 and the second clamping opening 74, then the piston rod of the second hydraulic cylinder 23 shortens to drive the mounting block 22 to move towards the direction away from the heat-insulating barrel, and because of the two connecting columns 14 are clamped against each other at the moment, the heat-insulating barrel can be taken out in the moving process of the mounting block 22, and the difficulty in taking out of the heat-insulating barrel is effectively reduced.
The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (10)
1. The utility model provides a semiconductor diffusion furnace heat-preserving container which characterized in that: including a plurality of heat preservation fin (1) of making by quartz glass, it is a plurality of heat preservation fin (1) is all coaxial and follows heat preservation fin (1) axial evenly spaced apart distribution is a plurality of heat preservation fin (1) passes through the connecting piece and connects, a plurality of locating hole (12) of running through heat preservation fin (1) are seted up to one side of heat preservation fin (1), and are a plurality of locating hole (12) are followed heat preservation fin (1) circumference evenly distributed.
2. The heat-preserving barrel of the semiconductor diffusion furnace as claimed in claim 1, wherein: the connecting piece includes multiunit connecting post group, and every group the connecting post group sets up respectively adjacent two between heat preservation fin (1), every group the connecting post group includes a plurality of spliced poles (14), and is a plurality of spliced pole (14) are followed heat preservation fin (1) circumference evenly distributed, the both ends of spliced pole (14) are welded with two adjacent heat preservation fins (1) respectively.
3. The heat-preserving barrel of the semiconductor diffusion furnace as claimed in claim 2, wherein: a plurality of fixing holes (13) are formed in one side, facing each other, of each two adjacent heat preservation fins (1), the fixing holes (13) are in one-to-one correspondence with the connecting columns (14), and two ends of each connecting column (14) are inserted into the fixing holes (13) of the two adjacent heat preservation fins (1) respectively.
4. A clamping device is used for clamping the heat-preserving barrel of the semiconductor diffusion furnace in claim 3, and is characterized in that: be in including workstation (2) and setting fixture (3) and actuating mechanism (4) on workstation (2), fixture (3) are including first clamping piece (31) and second clamping piece (32), first clamping piece (31) with form between second clamping piece (32) and be used for the centre gripping first centre gripping mouth (73) of spliced pole (14), first clamping piece (31) with second clamping piece (32) are all along being close to or keeping away from spliced pole (14) direction is slided and is set up on workstation (2), be provided with on workstation (2) and drive first clamping piece (31) and second clamping piece (32) along being close to or keeping away from the glide machanism that spliced pole (14) direction slided, actuating mechanism (4) are used for the drive first clamping piece (31) with second clamping piece (32) are close to each other or keep away from.
5. A grasping apparatus according to claim 4, characterized in that: first clamping piece (31) back to one side of second clamping piece (32) is provided with first pole (54), second clamping piece (32) back to one side of first clamping piece (31) is provided with second pole (64), first pole (54) orientation one side of second pole (64) is provided with third clamping piece (71), second pole (64) orientation one side of first pole (54) is provided with fourth clamping piece (72), third clamping piece (71) with form between fourth clamping piece (72) and be used for the centre gripping second centre gripping mouth (74) of spliced pole (14), work as when the centre gripping has spliced pole (14) in first centre gripping mouth (73), also the centre gripping has spliced pole (14) in second centre gripping mouth (74), actuating mechanism (4) are used for driving first pole (54) and second pole (64) are close to each other or keep away from, glide machanism is used for driving first pole (54) and second pole (64) are along being close to or keeping away from spliced pole (14) synchronous the slip of direction.
6. A gripping apparatus as claimed in claim 5, characterised in that: the driving mechanism (4) comprises a driving motor (41), a gear (42), a first rack (43) and a second rack (44), the upper surface of the workbench (2) is provided with a mounting block (22) in a sliding way, a cavity is arranged in the mounting block (22), the gear (42) is horizontally and rotatably arranged on the mounting block (22) and the gear (42) is positioned in the cavity, one end of the first rack (43) is fixedly connected with the first rod (54), the first rack (43) penetrates through the mounting block (22) and is connected with the mounting block (22) in a sliding way, the first rack (43) is meshed with the gear (42), one end of the second rack (44) far away from the first rod (54) is fixedly connected with the second rod (64), the second rack (44) passes through the mounting block (22) and is connected with the mounting block (22) in a sliding way, the second rack (44) being in mesh with the gear (42), the gear (42) being located between the first rack (43) and the second rack (44), the driving motor (41) is arranged on the mounting block (22) and is used for driving the gear (42) to rotate, the sliding mechanism is used for driving the mounting block (22) to move in the direction close to or far away from the connecting column (14).
7. A gripping apparatus as claimed in claim 6, characterised in that: one end, far away from first clamping piece (31), of first pole (54) is provided with along first pole (54) length direction's first groove (541), it is provided with third pole (56) to slide in first groove (541), be provided with on first pole (54) and be used for fixing first locating piece of third pole (56), third clamping piece (71) set up on third pole (56), the one end that second pole (64) are kept away from second clamping piece (32) is provided with along second pole (64) length direction's second groove (641), it is provided with fourth pole (66) to slide in second groove (641), be provided with on second pole (64) and be used for fixing the second locating piece of fourth pole (66), fourth clamping piece (72) set up on fourth pole (66).
8. A grasping apparatus according to claim 7, characterized in that: the side wall of the third rod (56) is provided with a first positioning groove (561) along the length direction of the third rod (56), the cross section of the first positioning groove (561) is inverted trapezoidal, the first positioning part comprises a first positioning bolt (58), the first positioning bolt (58) is in threaded connection with the first rod (54), and the rod part of the first positioning bolt (58) extends into the first positioning groove (561) and abuts against the side wall of the first positioning groove (561).
9. A gripping apparatus as claimed in claim 4, characterised in that: the first clamping piece (31) and the second clamping piece (32) are both semicircular, and when the first clamping piece (31) and the second clamping piece (32) are both tightly abutted against the connecting column (14), the cross section of the first clamping opening (73) is circular.
10. A gripping apparatus as claimed in claim 9, characterised in that: the mutually facing sides of the first clamping piece (31) and the second clamping piece (32) are provided with buffer gaskets (33).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210870217.2A CN115287628A (en) | 2022-07-23 | 2022-07-23 | Semiconductor diffusion furnace heat-preserving container and clamping device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210870217.2A CN115287628A (en) | 2022-07-23 | 2022-07-23 | Semiconductor diffusion furnace heat-preserving container and clamping device thereof |
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| Publication Number | Publication Date |
|---|---|
| CN115287628A true CN115287628A (en) | 2022-11-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210870217.2A Pending CN115287628A (en) | 2022-07-23 | 2022-07-23 | Semiconductor diffusion furnace heat-preserving container and clamping device thereof |
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| CN (1) | CN115287628A (en) |
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| CN117341330A (en) * | 2023-12-05 | 2024-01-05 | 上海强华实业股份有限公司 | Batch processing method and processing device for sandwich fins of semiconductor diffusion furnace |
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