CN220241238U

CN220241238U - Rotatable fixture structure

Info

Publication number: CN220241238U
Application number: CN202321740908.7U
Authority: CN
Inventors: 戴灵恩; 姚峥华; 彭志豪; 周申
Original assignee: Jiangsu Jingte Crystal Technology Co ltd
Current assignee: Jiangsu Jingte Crystal Technology Co ltd
Priority date: 2023-07-05
Filing date: 2023-07-05
Publication date: 2023-12-26
Anticipated expiration: 2033-07-05

Abstract

The utility model belongs to the technical field of wafer processing, and particularly relates to a rotatable clamp structure which comprises a circular plate, wherein a rotating hole is formed in the circular plate, a rotating shaft is rotatably arranged in the rotating hole, a workbench is fixedly arranged at the top end of the rotating shaft, a support is fixedly arranged at the bottom of the circular plate, a groove is formed in the top of the support, a screw barrel is rotatably arranged in the groove, and a screw is connected with the screw barrel in a threaded manner. The utility model has reasonable structural design, and can prevent the wafer from sliding, tilting or deforming in the processing process by clamping the wafer on the top of the workbench, so that the accuracy of the wafer in the processing process can be improved, the wafer can be uniformly stressed in the processing process by rotating the workbench, the stress concentration in the local processing process is avoided, the processing quality is improved, the wafer can be processed at different angles, the processing requirements of multiple angles are realized, and the processing flexibility and diversity are improved.

Description

Rotatable fixture structure

Technical Field

The utility model relates to the technical field of wafer processing, in particular to a rotatable clamp structure.

Background

Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon. The silicon ingot is ground, polished, and sliced to form a silicon wafer, i.e., a wafer. Domestic wafer lines are mainly 8 inches and 12 inches.

In the prior art, the workbench is fixed during wafer processing, so that the stress of the wafer is not uniform enough in the processing process, and local stress concentration easily occurs in the processing process, so that the processing quality is reduced, the wafer cannot be processed at different angles, multi-angle processing cannot be realized, the processing flexibility and diversity are reduced, and therefore, a rotatable clamp structure is provided to solve the problem.

Disclosure of Invention

The present utility model is directed to a rotatable clamp structure for solving the above-mentioned problems.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

a rotatable clamp structure comprising:

the rotary plate is provided with a rotary hole, a rotary shaft is rotatably arranged in the rotary hole, a workbench is fixedly arranged at the top end of the rotary shaft, a support is fixedly arranged at the bottom of the rotary plate, a groove is arranged at the top of the support, a screw barrel is rotatably arranged in the groove, a screw rod is connected with the screw barrel in an internal thread manner, the bottom end of the screw rod penetrates through the support, a fixing plate is fixedly arranged at the bottom of the screw rod, and a clamping plate is rotatably arranged at the bottom of the fixing plate.

Preferably, the fixed plate right side fixed mounting has first gag lever post, set up first spacing groove on the support right side inner wall, first gag lever post sliding connection is in first spacing groove.

Preferably, a first driving motor is fixedly installed on the inner wall of the top of the support, the top end of an output shaft of the first driving motor penetrates through the support and is fixedly provided with a driving gear, a driven gear is fixedly sleeved on the outer side of the screw cylinder, and the driving gear is meshed with the driven gear.

Preferably, six second limiting rods are fixedly arranged at the bottom of the workbench, second limiting grooves are formed in the top of the circular plate, and the second limiting rods are slidably connected in the second limiting grooves.

Preferably, the mounting plate is fixedly mounted at the bottom of the circular plate, the second driving motor is fixedly mounted at the front side of the mounting plate, the worm is fixedly mounted at the outer side of the output shaft of the second driving motor, the worm wheel is fixedly sleeved at the outer side of the rotating shaft, and the worm is meshed with the worm wheel.

Preferably, four supporting legs are fixedly arranged at the bottom of the circular plate, and the supporting legs are symmetrically arranged.

According to the rotatable clamp structure, the wafer is placed at the top of the workbench, and then the first driving motor is started, the output shaft of the first driving motor rotates to drive the driving gear to be meshed with the driven gear, so that the screw barrel can be driven to rotate, the screw rod and the fixing plate can be driven to move downwards under the limit of the first limiting rod, the clamping plate moves downwards along with the screw rod, the wafer is clamped at the top of the workbench, the wafer is prevented from sliding, tilting or deforming in the processing process, and the accuracy of the wafer in processing can be improved;

according to the rotatable clamp structure, the worm is driven to be meshed with the worm wheel through rotation of the output shaft of the second driving motor, so that the rotating shaft can be driven to rotate, the workbench can be driven to rotate, the wafer and the clamping plate rotate along with the rotation of the workbench, the wafer can be uniformly stressed in the processing process, stress concentration in the local processing process is avoided, the processing quality is improved, the wafer can be processed at different angles, the processing requirements of multiple angles are met, and the processing flexibility and the processing diversity are improved;

the utility model has reasonable structural design, and can prevent the wafer from sliding, tilting or deforming in the processing process by clamping the wafer on the top of the workbench, so that the accuracy of the wafer in the processing process can be improved, the wafer can be uniformly stressed in the processing process by rotating the workbench, the stress concentration in the local processing process is avoided, the processing quality is improved, the wafer can be processed at different angles, the processing requirements of multiple angles are realized, and the processing flexibility and diversity are improved.

Drawings

FIG. 1 is a schematic perspective view of a rotatable clamp structure according to the present utility model;

FIG. 2 is a schematic perspective view of a portion of a rotatable clamp structure according to the present utility model;

fig. 3 is a schematic perspective view of a rotating shaft, a workbench, a second limiting rod, a second driving motor, a worm wheel and a mounting plate of a rotatable fixture structure according to the present utility model.

In the figure: 1. a circular plate; 2. a rotating shaft; 3. a work table; 4. a bracket; 5. a screw cylinder; 6. a screw; 7. a fixing plate; 8. a clamping plate; 9. a first stop lever; 10. a first limit groove; 11. a first driving motor; 12. a drive gear; 13. a driven gear; 14. a second limit rod; 15. the second limit groove; 16. a second driving motor; 17. a worm; 18. a worm wheel; 19. support legs; 20. and (3) mounting a plate.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

Referring to fig. 1-3, a rotatable clamp structure, comprising:

the circular plate 1 is provided with a rotating hole, a rotating shaft 2 is rotatably arranged on the circular plate 1, a workbench 3 is fixedly arranged at the top end of the rotating shaft 2, a support 4 is fixedly arranged at the bottom of the circular plate 1, a groove is formed in the top of the support 4, a screw cylinder 5 is rotatably arranged in the groove, a screw rod 6 is connected with the screw rod 5 in an internal thread manner, the bottom end of the screw rod 6 penetrates through the support 4 and is fixedly provided with a fixing plate 7, a clamping plate 8 is rotatably arranged at the bottom of the fixing plate 7, the workbench 3 can be supported through the rotating shaft 2, and the support 4 can support the screw cylinder 5.

In the utility model, the right side of the fixed plate 7 is fixedly provided with the first limiting rod 9, the inner wall of the right side of the bracket 4 is provided with the first limiting groove 10, the first limiting rod 9 is connected in the first limiting groove 10 in a sliding way, and the fixed plate 7 can be limited through the first limiting rod 9.

In the utility model, a first driving motor 11 is fixedly arranged on the inner wall of the top of a bracket 4, the top end of an output shaft of the first driving motor 11 penetrates through the bracket 4 and is fixedly provided with a driving gear 12, a driven gear 13 is fixedly sleeved on the outer side of a screw cylinder 5, the driving gear 12 is meshed with the driven gear 13, and the driving gear 12 is driven to be meshed with the driven gear 13 through the rotation of the output shaft of the first driving motor 11, so that the screw cylinder 5 can be driven to rotate.

According to the utility model, six second limiting rods 14 are fixedly arranged at the bottom of the workbench 3, the second limiting grooves 15 are formed in the top of the circular plate 1, the second limiting rods 14 are slidably connected in the second limiting grooves 15, and the workbench 3 can be limited by arranging the second limiting rods 14, so that the workbench 3 is prevented from shifting in the rotating process.

According to the utility model, the mounting plate 20 is fixedly arranged at the bottom of the circular plate 1, the second driving motor 16 is fixedly arranged at the front side of the mounting plate 20, the worm 17 is fixedly arranged at the outer side of the output shaft of the second driving motor 16, the worm wheel 18 is fixedly sleeved at the outer side of the rotating shaft 2, the worm 17 is meshed with the worm wheel 18, and the worm 17 is driven to be meshed with the worm wheel 18 through the rotation of the output shaft of the second driving motor 16, so that the rotating shaft 2 can be driven to rotate.

In the utility model, four supporting legs 19 are fixedly arranged at the bottom of the circular plate 1, the supporting legs 19 are symmetrically arranged, and the circular plate 1 can be more stable by arranging the supporting legs 19.

In the utility model, when the wafer processing device is used, firstly, a wafer is placed on the top of the workbench 3, then the first driving motor 11 is started, the output shaft of the first driving motor 11 rotates to drive the driving gear 12 to be meshed with the driven gear 13, so that the screw 5 can be driven to rotate, further, the screw 6 and the fixed plate 7 can be driven to move downwards under the limit of the first limiting rod 9, the clamping plate 8 moves downwards along with the screw, the wafer is clamped on the top of the workbench 3, the wafer is prevented from sliding, tilting or deforming in the processing process, the precision of the wafer processing can be improved, after the clamping is finished, the second driving motor 16 is started, the output shaft of the second driving motor 16 rotates to drive the worm 17 to be meshed with the worm gear 18, so that the rotating shaft 2 can be driven to rotate, the workbench 3 can be driven to rotate the wafer and the clamping plate 8 accordingly, so that the wafer is uniformly stressed in the processing process, the stress concentration in the local processing process is avoided, the processing quality is improved, the wafer can be processed at different angles, and the processing requirements of multiple angles are met, and the processing flexibility and the processing diversity are improved.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

The preferred embodiments of the utility model disclosed above are intended only to assist in the explanation of the utility model. The preferred embodiments are not exhaustive or to limit the utility model to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best understand and utilize the utility model. The utility model is limited only by the claims and the full scope and equivalents thereof.

Claims

1. A rotatable clamp structure, comprising:

the rotary table is characterized in that a rotary hole is formed in the circular plate (1), the rotary shaft (2) is rotatably arranged in the rotary hole, the workbench (3) is fixedly arranged at the top end of the rotary shaft (2), the support (4) is fixedly arranged at the bottom of the circular plate (1), the top of the support (4) is provided with a groove, the screw cylinder (5) is rotatably arranged in the groove, the screw cylinder (5) is internally connected with the screw rod (6), the bottom end of the screw rod (6) penetrates through the support (4), the fixing plate (7) is fixedly arranged, and the clamping plate (8) is rotatably arranged at the bottom of the fixing plate (7).

2. The rotatable fixture structure according to claim 1, wherein a first limiting rod (9) is fixedly mounted on the right side of the fixing plate (7), a first limiting groove (10) is formed in the inner wall of the right side of the bracket (4), and the first limiting rod (9) is slidably connected in the first limiting groove (10).

3. The rotatable clamp structure according to claim 1, wherein a first driving motor (11) is fixedly installed on the inner wall of the top of the support (4), the top end of an output shaft of the first driving motor (11) penetrates through the support (4) and is fixedly provided with a driving gear (12), a driven gear (13) is fixedly sleeved on the outer side of the screw cylinder (5), and the driving gear (12) is meshed with the driven gear (13).

4. The rotatable fixture structure according to claim 1, wherein six second limiting rods (14) are fixedly installed at the bottom of the workbench (3), second limiting grooves (15) are formed in the top of the circular plate (1), and the second limiting rods (14) are slidably connected in the second limiting grooves (15).

5. The rotatable clamp structure according to claim 1, wherein a mounting plate (20) is fixedly mounted at the bottom of the circular plate (1), a second driving motor (16) is fixedly mounted at the front side of the mounting plate (20), a worm (17) is fixedly mounted at the outer side of an output shaft of the second driving motor (16), a worm wheel (18) is fixedly sleeved at the outer side of the rotating shaft (2), and the worm (17) is meshed with the worm wheel (18).

6. The rotatable clamp structure according to claim 1, wherein four support legs (19) are fixedly arranged at the bottom of the circular plate (1), and the support legs (19) are symmetrically arranged.