CN115268236A - Optical scanning type laser interference direct writing equipment and direct writing method - Google Patents
Optical scanning type laser interference direct writing equipment and direct writing method Download PDFInfo
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- CN115268236A CN115268236A CN202211035218.1A CN202211035218A CN115268236A CN 115268236 A CN115268236 A CN 115268236A CN 202211035218 A CN202211035218 A CN 202211035218A CN 115268236 A CN115268236 A CN 115268236A
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- direct writing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
Abstract
The invention discloses optical scanning type laser interference direct writing equipment and a direct writing method. The optical scanning head is used for providing a scanning light beam capable of moving in a certain plane range; the optical path system at least comprises a light splitting device and an imaging component which are sequentially arranged along the optical path direction of the scanning beam, the light splitting device is used for diffracting and splitting the scanning beam to form at least two coherent laser beams, and the imaging component is used for refocusing the laser beams and forming interference fringes so as to perform laser interference direct writing on an exposure object; the stage is controllable to remain in, and to be movable within, the image plane of the imaging assembly at all times. The optical scanning type laser interference direct writing equipment provided by the invention utilizes the characteristics of high scanning speed and high control precision of the optical scanning head, and combines the light splitting device, so that the direct writing time of the dot matrix interference pattern can be greatly shortened.
Description
Technical Field
The invention relates to the technical field of laser interference direct writing, in particular to optical scanning type laser interference direct writing equipment and a direct writing method.
Background
In the printing field, compared with the traditional printing technologies such as relief printing, ink-jet printing and the like, green printing (non-ink printing) has the advantages of no pollution, no noise and the like, and is beneficial to the sustainable development of the printing industry. The mainstream technical process of the ink-free printing comprises the steps of converting a target pattern into a dot matrix grating hologram, manufacturing the dot matrix grating hologram into a metal template, and copying a dot matrix pattern onto the surface of a film material by using a metal plate stamping process by using a stamping technology.
How to obtain the dot matrix grating hologram template is a technical difficulty of the process. Laser interference direct writing equipment is a key equipment for generating dot matrix grating patterns. The basic principle is that two beams of coherent laser with a certain included angle are converged at the same point by an optical lens to form a focusing light spot with an interference grating pattern, the angle and the light spot moving position of the interference grating are controlled by a computer, a grating dot matrix pattern is formed on the surface of a photoresist sample by scanning, and a metal template is formed by developing, silver spraying, electroforming and other processes.
Laser interference direct writing devices can be roughly classified into the following two types according to the different dot matrix forming modes: one is that the light spot is fixed and the photoresist substrate is moved by a high-precision two-dimensional displacement platform to scan the dot matrix. The method has the advantages of simple optical path and good equipment stability; but has the disadvantage of slow speed and the write-through time for high precision large area dot patterns can be measured in days. The other type is that a plurality of grating lattices can be obtained by one-time exposure by using a DLP (digital light processing) and other planar spatial light modulators, and then patterns are spliced by using a high-precision displacement platform. The method has the characteristics that the speed is higher than that of the first method, but the optical path is complex and has poor stability; in particular, the laser light source needs to be expanded in a large diameter, and other problems influencing the grating quality are easily introduced.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art that is already known to a person skilled in the art.
Disclosure of Invention
The invention aims to provide optical scanning type laser interference direct writing equipment and a direct writing method, which utilize the characteristics of high scanning speed and high control precision of an optical scanning head and combine with a light splitting device to greatly shorten the direct writing time of a dot matrix interference pattern.
To achieve the above object, an embodiment of the present invention provides an optical scanning type laser interference direct writing apparatus including an optical scanning head, an optical path system, and a stage. The optical scanning head is used for providing a scanning light beam capable of moving in a certain plane range; the optical path system at least comprises a light splitting device and an imaging component which are sequentially arranged along the optical path direction of the scanning light beam, the light splitting device is used for diffracting and splitting the scanning light beam to form at least two coherent laser light beams, and the imaging component is used for refocusing the laser light beams and forming interference fringes so as to perform laser interference direct writing on an exposure object; the stage is controllable to remain in the image plane of the imaging assembly at all times and to be movable within the image plane.
In one or more embodiments of the present invention, the optical scanning head includes a light source configured to provide a controllable pulsed laser, and an optical scanning device configured to shift the pulsed laser within a certain planar range to form a scanning beam movable within the certain planar range.
In one or more embodiments of the invention, the light source comprises a laser.
In one or more embodiments of the present invention, the optical scanning device includes a MEMS micro-mirror or galvanometer.
In one or more embodiments of the present invention, the optical path system further includes a focusing device disposed on the optical path of the scanning beam and upstream of the beam splitting device, the focusing device being configured to form the scanning beam into a light spot moving linearly at a constant velocity.
In one or more embodiments of the invention, the focusing device includes an F θ mirror.
In one or more embodiments of the present invention, the optical scanning laser interference direct writing apparatus further comprises a controller at least for controlling the optical scanning head to emit the scanning beam, controlling the imaging assembly to focus, and controlling the stage to move.
In one or more embodiments of the present invention, the optical scanning laser interference direct writing apparatus further includes a rotary displacement table, the light splitting device is disposed on the rotary displacement table, and the rotary displacement table is connected to the controller and can be controlled to adjust the rotation angle and the rotation time of the rotary displacement table, so as to control different directions of the light splitting device to form interference fringes in different directions.
In one or more embodiments of the invention, the light splitting device includes a phase grating.
In one or more embodiments of the invention, the imaging assembly includes a 4f imaging system composed of a first lens and a second lens, and the beam splitting device is located on an object plane of the 4f imaging system.
In one or more embodiments of the present invention, the optical scanning laser interference direct writing apparatus further includes a light shielding device disposed at a center of a surface of the first lens or a back focal plane of the first lens, and the light shielding device does not completely cover the surface of the first lens or the back focal plane of the first lens.
The invention also provides an optical scanning type laser interference direct writing method, which adopts the optical scanning type laser interference direct writing device and comprises the following steps: the optical scanning head generates a scanning light beam capable of forming a target pattern and enables the scanning light beam to enter the optical path system; a light splitting device in the optical path system rotates to perform laser interference direct writing on the target pattern, wherein different rotating angles of the light splitting device correspond to different colors of the target pattern; the stage moves to perform the stitching of the patterns to form laser interference direct writing of the complete target pattern.
In one or more embodiments of the present invention, the optical scanning head generates a scanning beam that forms the target pattern, including: generating a plurality of dot matrix position files containing pixel point positions by an algorithm program of a target pattern, and storing the dot matrix position files in a controller, wherein each dot matrix position file comprises a binary signal file; acquiring a driving feedback signal of a light scanning device in an optical scanning head, and performing AND operation on the driving feedback signal and a binary signal phase of the dot matrix position file to generate a modulation signal of a light source; and controlling a light source in the optical scanning head to emit laser pulses according to the modulation signal so as to form a scanning light beam.
In one or more embodiments of the present invention, the generating a plurality of dot matrix position files containing pixel point positions from a target pattern by an algorithm program includes: performing image segmentation on the target pattern to form a plurality of sub-target patterns; carrying out image color separation on each sub-target pattern to form a plurality of single-color sub-patterns; and generating a plurality of dot matrix position files by the plurality of monochromatic sub-patterns through an algorithm program, wherein each monochromatic sub-pattern corresponds to one dot matrix position file, and each dot matrix position file is a binary signal file containing one or more pixel point positions.
Compared with the prior art, the optical scanning type laser interference direct writing equipment has the advantages that the scanning speed of the optical scanning head is several orders of magnitude faster than that of the scheme in the prior art that the photoresist substrate is moved by the high-precision two-dimensional displacement platform to scan the dot matrix, and the direct writing time of the latter is measured by days; the characteristics of high scanning speed and high control precision of the optical scanning head are utilized, and the direct writing time of the lattice interference pattern can be greatly shortened by combining the light splitting device.
According to the optical scanning type laser interference direct writing equipment, one beam of light emitted by the optical scanning head only corresponds to one point, laser beam expansion is not needed, only the laser is led out from the light source to the optical scanning device, and the optical system is simpler and more stable.
Drawings
FIG. 1 is a schematic structural diagram of an optical scanning laser interference direct writing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical scanning device in an optical scanning laser interference direct writing apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view of a scanning pattern of an optical scanning device in an optical scanning laser interference direct writing apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a beam splitter in an optical scanning laser interference direct writing apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic view of an imaging assembly in an optical scanning laser interference direct writing apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic view of a light-blocking area of a light-blocking device in an imaging assembly according to an embodiment of the invention;
fig. 7-9 are schematic flow charts of the optical scanning laser interference direct writing method according to an embodiment of the present invention.
Detailed Description
The following detailed description of the present invention is provided in conjunction with the accompanying drawings, but it should be understood that the scope of the present invention is not limited to the specific embodiments.
Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations such as "comprises" or "comprising", etc., will be understood to imply the inclusion of a stated element or component but not the exclusion of any other element or component.
As background art, the current laser interference direct writing equipment has the disadvantages of slow direct writing speed and long pattern lithography period. Aiming at the technical problems, the invention provides optical scanning type laser interference direct writing equipment and a direct writing method.
The optical scanning type laser interference direct writing equipment comprises an optical scanning head, an optical path system and an object stage, wherein the optical scanning head is used for providing a scanning beam capable of moving in a certain plane range; the optical path system at least comprises a light splitting device and an imaging component which are sequentially arranged along the optical path direction of the scanning light beam, wherein the light splitting device is used for diffracting and splitting the scanning light beam to form at least two coherent laser light beams, and the imaging component is used for refocusing the laser light beams and forming interference fringes so as to perform laser interference direct writing on an exposure object; the stage is controllable to remain in, and to be movable within, the image plane of the imaging assembly at all times. The optical scanning head comprises a light source and an optical scanning device, wherein the light source is used for providing controllable pulse laser, and the optical scanning device is used for enabling the pulse laser to deviate in a certain plane range so as to form a scanning light beam capable of moving in the certain plane range.
In the optical scanning type laser interference direct writing equipment, the scanning speed of the optical scanning head is several orders of magnitude faster than that of the scheme of scanning the dot matrix by moving the photoresist substrate through the high-precision two-dimensional displacement platform in the prior art. The optical scanning type laser interference direct writing equipment can scan multi-frame patterns every second, the direct writing time is greatly reduced, laser beam expansion is not needed, only laser is led out from a light source to an optical scanning device, and an optical system is simpler and more stable.
The following describes an embodiment of the optical scanning laser interference direct writing apparatus according to the present invention in detail with reference to an embodiment and the accompanying drawings.
As shown in fig. 1, an embodiment of the present invention provides an optical scanning laser interference direct writing apparatus, which includes a laser 10, an optical scanning device 20, a focusing device 30, a beam splitting device 40, an imaging assembly 50, a stage 60, and a controller 70. The optical scanning device 20, the focusing device 30, the beam splitting device 40, the imaging assembly 50, and the stage 60 are sequentially disposed on a laser beam path emitted from the laser 10. The stage 60 is located on the image plane of the imaging assembly 50 and can move in the image plane under the control of the controller 70 to move and splice the large-size lattice grating hologram after completing the direct writing of the current frame. The controller 70 is connected to the above-mentioned devices and components for controlling the combined operation thereof.
In the present embodiment, the optical scanning device 20 is a MEMS micro-mirror. The laser 10 may be modulated to output controllable laser pulses. The principle of the MEMS micro-mirror is shown in fig. 2, wherein the micro-mirror is a mirror that can rotate around α β two axes and can vibrate two-dimensionally at a specific frequency driven by a driving signal. The laser 10 directs the beam to the MEMS micro-mirror surface for reflection, thereby forming a range of scanning beams, as shown in fig. 3. In other embodiments, the optical scanning device 20 may be a normal galvanometer system, but this may result in a larger volume of the optical scanning head.
The focusing device 30 may be an F θ mirror in this embodiment, which converts the rotational motion of the MEMS micromirror into a constant velocity linear motion of the spot on the focal plane by using the distortion effect of the lens. When a laser beam is incident on a lens at an angle θ in a normal lens, a spot is formed at a position f · tan θ on a focal plane. The distance x from the optical axis of the spot is almost proportional to theta when theta is smaller, and is not proportional when theta is larger. The f theta lens has an exit angle of tan-1 theta with respect to an incident angle theta by utilizing the distortion effect of the lens, and can maintain a simple proportional relationship between the incident angle and the distance from a spot on a focal plane to an optical axis even if theta is increased. Therefore, the scanning laser beam formed by adding the F theta mirror does not need to be electrically corrected, and a light spot with constant-speed linear motion can be formed on a focal plane.
The light splitting device 40 may be a phase grating in this embodiment, and the phase grating generates diffraction and has a light splitting function, as shown in fig. 4. The diffraction efficiency of each level of light splitting depends on the duty ratio rho/d and the etching depth h, when the duty ratio is 50 percent and the proper etching depth is selected, the influence of 0-level light can be eliminated, the diffraction efficiency of other high-level orders is also very low, the +/-1-level diffraction light is mainly reserved, and the utilization rate of energy is higher compared with other diffraction gratings. The phase grating is mounted on an electric rotary displacement stage, which is connected to the controller 70 and can be controlled to adjust the rotation angle and rotation time of the electric rotary displacement stage, so as to control different directions of the phase grating to form interference fringes in different directions. In other embodiments, the light splitting device 40 may also be other optical devices with light splitting function.
The imaging assembly 50 in this embodiment may be a 4f imaging system composed of a first lens 51 and a second lens 52, as shown in fig. 5. The beam splitting device 40 is placed at the object plane of the 4f imaging system and the coherent laser beam split from the beam splitting device 40 is refocused at the image plane of the 4f imaging system and forms interference fringes. The silicon chip or the metal sheet which is spin-coated with the photoresist is placed on the image plane, after exposure reaches the exposure dose of the photoresist, the interference fringe is photoetched on an exposure object, and the interference fringe is a large image such as a grating fringe. Meanwhile, in order to reduce the influence of the 0-level light on the lithography effect, a light shielding device 53 is further disposed on the upper surface of the first lens 51 for shielding light. The size of the light shielding area of the light shielding device 53 can be calculated as follows: as shown in fig. 6, the light-shielding region should be located within the lens region; the light-shielding area boundary should not exceed the 'positive first-level light boundary of the leftmost light', and not exceed the 'negative first-level light boundary of the rightmost light' (the left side of the figure is negative); and the shading area is larger than the range of main polarized light (light-colored dotted line in the figure) of the scanning light, namely all the main polarized light is shaded without influencing all the positive and negative polarized light. In other embodiments, the level 0 light shutter 53 may also be placed in the focal plane of the 4f imaging system, such as at the center of the focal plane in FIG. 5. Since the focal plane of the 4f imaging system, i.e. the back focal plane of the first lens 51, and the object plane are fourier transformed, and the center is the low-frequency light component, i.e. the 0-level light, the required shielding area is smaller than that in the present embodiment.
The imaging assembly 50 further includes a beam splitter prism 54 and a CCD camera 55, the beam splitter prism 54 leading out the image of the scanning spot to the CCD camera 55 for focus detection, as shown in fig. 1.
The stage 60 is a high-precision displacement stage in the present embodiment.
The controller 70 is connected to the laser 10, the optical scanning device 20, the focusing device 30, the spectroscopic device 40, the imaging assembly 50, and the stage 60. The controller 70 includes an upper computer and a lower computer.
In this embodiment, on the upper computer, the pattern to be recorded is generated into a series of binary signal files containing pixel point positions by an algorithm program, and each color of the pattern corresponds to one file and is stored into the lower computer FPGA. The MEMS micro-mirror driving board drives the micro-mirror to vibrate in a resonant mode, when the MEMS micro-mirror rotates by a minimum angle, namely a light spot moves by a pixel position, a pulse signal is fed back by the driving board, a frame synchronization signal is sent out when a frame is completed, and the synchronization signal of the driving board is led into a lower computer FPGA. In the lower computer FPGA, the binary signal of the dot matrix raster pattern and the micromirror synchronous signal are subjected to phase-inversion, namely, a modulation signal of the laser is generated (namely, laser pulse is emitted when the pixel position corresponding to the pattern is scanned). The laser 10 is controlled by the lower computer FPGA to emit laser pulses, which then enter the subsequent optical system. Meanwhile, the upper computer controls the rotation angle of the electric rotary displacement table, different grating angles correspond to different colors at the same observation angle, and the electric rotary displacement table is uniformly rotated by a certain angle when different color layers are photoetched (for example, when 16 colors are displayed, 180 degrees/16 degrees of rotation are completed for each color, which means 11.25 degrees). And finally, after the direct writing work of the current area is finished, the upper computer controls the high-precision displacement table to move the spliced pattern so as to manufacture the large-size dot matrix grating hologram.
As shown in fig. 7, the present invention further provides an optical scanning laser interference direct writing method, which adopts the optical scanning laser interference direct writing apparatus, including: the optical scanning head generates a scanning beam capable of forming a target pattern and makes the scanning beam enter an optical path system s1; rotating a light splitting device in the optical path system to perform laser interference direct writing s2 of a target pattern, wherein different rotation angles of the light splitting device correspond to different colors of the target pattern, the light splitting device rotates until the light splitting device rotates to an angle and waits for the end of the layer of color pattern photoetching to rotate, then photoetching of the next layer of color is performed, and a trigger signal for starting rotation is the frame synchronization signal; stage movement performs pattern stitching to form laser interference direct writing s3 of the complete target pattern.
As shown in fig. 8, in step s1, the generating of the scanning beam by the optical scanning head to form the target pattern specifically includes: generating a plurality of dot matrix position files containing pixel point positions by an algorithm program of a target pattern, and storing the dot matrix position files in a controller s11, wherein each dot matrix position file comprises a binary signal file; acquiring a driving feedback signal of a light scanning device in an optical scanning head, and performing AND operation on the driving feedback signal and a binary signal phase of a dot matrix position file to generate a modulation signal s12 of a light source; the light source in the optical scanning head is controlled to emit laser pulses according to the modulation signal to form a scanning beam s13.
As shown in fig. 9, in step s11, generating a plurality of dot matrix position files containing pixel point positions from the target pattern by the algorithm program specifically includes: image-dividing the target pattern to form a plurality of sub-target patterns s111; subjecting each sub-target pattern to image color separation to form a plurality of single-color sub-patterns s112; and generating a plurality of dot matrix position files s113 by the algorithm program for the plurality of single-color sub-patterns, wherein each single-color sub-pattern corresponds to one dot matrix position file, and each dot matrix position file is a binary signal file containing one or more pixel point positions.
Compared with the prior art, the optical scanning type laser interference direct writing equipment has the advantages that the scanning speed of the optical scanning head is several orders of magnitude faster than that of the scheme in the prior art that the photoresist substrate is moved by the high-precision two-dimensional displacement platform to scan the dot matrix, and the direct writing time of the photoresist substrate is measured by days; the characteristics of high scanning speed and high control precision of the optical scanning head are utilized, and the direct writing time of the lattice interference pattern can be greatly shortened by combining the light splitting device.
According to the optical scanning type laser interference direct writing equipment, one beam of light emitted by the optical scanning head only corresponds to one point, laser beam expansion is not needed, only the laser is led out from the light source to the optical scanning device, and the optical system is simpler and more stable.
The foregoing descriptions of specific exemplary embodiments of the present invention have been presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain certain principles of the invention and its practical application to enable one skilled in the art to make and use various exemplary embodiments of the invention and various alternatives and modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.
Claims (10)
1. An optical scanning laser interference direct writing apparatus, comprising:
an optical scanning head for providing a scanning beam movable within a certain planar range;
the optical path system at least comprises a light splitting device and an imaging component which are sequentially arranged along the optical path direction of the scanning light beam, wherein the light splitting device is used for diffracting and splitting the scanning light beam to form at least two coherent laser light beams, and the imaging component is used for refocusing the laser light beams and forming interference fringes so as to perform laser interference direct writing on an exposure object;
the object stage can be controlled to be always kept on the image plane of the imaging assembly and can move in the image plane.
2. The optical scanning laser interference direct writing apparatus of claim 1, wherein the optical scanning head includes a light source for providing a controllable pulsed laser and an optical scanning device for shifting the pulsed laser within a certain planar range to form a scanning beam movable within a certain planar range.
3. The optical scanning laser interference direct writing apparatus according to claim 1, further comprising a focusing device disposed on the scanning beam optical path and upstream of the beam splitting device, the focusing device configured to form the scanning beam into a spot of constant velocity linear motion.
4. The optical scanning laser interference direct writing apparatus of claim 1, further comprising a controller for controlling at least the optical scanning head to emit the scanning beam, the imaging assembly to focus, and the stage to move.
5. The optical scanning laser interference direct writing apparatus as claimed in claim 4, further comprising a rotary stage, wherein the beam splitting device is disposed on the rotary stage, and the rotary stage is connected to the controller and can be controlled to adjust its rotation angle and rotation time, so as to control different directions of the beam splitting device to form interference fringes in different directions.
6. The optical scanning laser interference direct writing apparatus of claim 1, wherein the imaging assembly includes a 4f imaging system composed of a first lens and a second lens, and the beam splitting device is located on an object plane of the 4f imaging system.
7. The optical scanning laser interference direct writing apparatus according to claim 6, further comprising a light shielding device disposed at a center of a surface of the first lens or a back focal plane of the first lens, and the light shielding device does not completely cover the surface of the first lens or the back focal plane of the first lens.
8. An optical scanning laser interference direct writing method using the optical scanning laser interference direct writing apparatus according to any one of claims 1 to 7, comprising:
the optical scanning head generates a scanning light beam capable of forming a target pattern and enables the scanning light beam to enter the optical path system;
the light splitting device in the optical path system rotates to perform laser interference direct writing on the target pattern, wherein different rotating angles of the light splitting device correspond to different colors of the target pattern;
the stage moves to perform the stitching of the patterns to form the laser interference direct writing of the complete target pattern.
9. The optical scanning laser interference direct writing method of claim 8, wherein the optical scanning head generates a scanning beam that forms the target pattern, comprising:
generating a plurality of dot matrix position files containing pixel point positions by a target pattern through an algorithm program, and storing the dot matrix position files in a controller, wherein each dot matrix position file comprises a binary signal file;
acquiring a driving feedback signal of a light scanning device in an optical scanning head, and performing AND operation on the driving feedback signal and a binary signal phase of the dot matrix position file to generate a modulation signal of a light source;
and controlling a light source in the optical scanning head to emit laser pulses according to the modulation signal so as to form a scanning light beam.
10. The optical scanning laser interference direct writing method as claimed in claim 9, wherein the generating a plurality of dot matrix position files containing pixel point positions by the algorithm program comprises:
performing image segmentation on the target pattern to form a plurality of sub-target patterns;
carrying out image color separation on each sub-target pattern to form a plurality of single-color sub-patterns;
and generating a plurality of dot matrix position files by the plurality of monochromatic sub-patterns through an algorithm program, wherein each monochromatic sub-pattern corresponds to one dot matrix position file, and each dot matrix position file is a binary signal file containing one or more pixel point positions.
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| CN202211035218.1A CN115268236A (en) | 2022-08-26 | 2022-08-26 | Optical scanning type laser interference direct writing equipment and direct writing method |
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| CN202211035218.1A CN115268236A (en) | 2022-08-26 | 2022-08-26 | Optical scanning type laser interference direct writing equipment and direct writing method |
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