CN115267466A - A test system for studying the characteristics of gallium nitride power devices under dynamic conditions - Google Patents

A test system for studying the characteristics of gallium nitride power devices under dynamic conditions Download PDF

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CN115267466A
CN115267466A CN202210510723.0A CN202210510723A CN115267466A CN 115267466 A CN115267466 A CN 115267466A CN 202210510723 A CN202210510723 A CN 202210510723A CN 115267466 A CN115267466 A CN 115267466A
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李园
马晓华
陆小力
何云龙
郝跃
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Xidian University
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    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
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Abstract

本发明涉及一种氮化镓功率器件动态工况下特性研究的测试系统,该测试系统基于全面的氮化镓功率器件动态电阻研究环境模型,包含温度、DC‑link电压、电流、频率、开关模式和脉冲模式等,考察研究氮化镓功率器件的开关特性和动态电阻特性,其中,温控加热单元可实现对被测氮化镓功率器件在不同温度场景下的考察;可调的DC‑link电压可实现环境模型中不同的DC‑link电压;负载单元可使被测氮化镓功率器件工作在不同的电流模式、开关模式、脉冲模式下;可调的PWM信号为上、下开关管提供不同频率的开关指令。该测试系统包含全面的氮化镓功率器件动态电阻研究环境模型中的变量,可实现在不同工况因素组合下,测量研究氮化镓功率器件动态工况特性的目的。

Figure 202210510723

The invention relates to a test system for characteristic research of gallium nitride power devices under dynamic working conditions. The test system is based on a comprehensive research environment model of dynamic resistance of gallium nitride power devices, including temperature, DC-link voltage, current, frequency, switching mode and pulse mode, etc., to investigate and study the switching characteristics and dynamic resistance characteristics of GaN power devices. Among them, the temperature-controlled heating unit can realize the investigation of the tested GaN power devices under different temperature scenarios; the adjustable DC‑ The link voltage can realize different DC-link voltages in the environment model; the load unit can make the tested GaN power device work in different current modes, switching modes, and pulse modes; the adjustable PWM signal is the upper and lower switching transistors Provides switching commands at different frequencies. The test system includes variables in a comprehensive GaN power device dynamic resistance research environment model, which can achieve the purpose of measuring and studying the dynamic working condition characteristics of GaN power devices under different combinations of operating conditions.

Figure 202210510723

Description

一种氮化镓功率器件动态工况下特性研究的测试系统A test system for researching the characteristics of GaN power devices under dynamic conditions

技术领域technical field

本发明属于氮化镓功率器件动态工况特性测试技术领域,具体涉及一种氮化镓功率器件动态工况下特性研究的测试系统。The invention belongs to the technical field of testing characteristics of gallium nitride power devices under dynamic working conditions, and in particular relates to a testing system for researching characteristics of gallium nitride power devices under dynamic working conditions.

背景技术Background technique

氮化镓功率器件以其低导通电阻、低寄生电容和零反向恢复电荷,成为下一代高频、高效率和高功率密度转换器的最佳候选器件之一。氮化镓功率器件在材料生长,器件结构和工艺制造流程等方面与传统硅功率器件存在较大差距,伴随氮化镓功率器件的更快开关速度、更大功率和更高频率的全新应用场景,使得该类器件在实际动态工况下,表现出不同于硅功率器件全新的动态工况特性。尽管氮化镓功率器件的发展近些年取得了一些进展,但氮化镓功率器件广泛应用需要解决的一个至关重要的问题是其在应用中的电流崩塌效应引起的动态电阻(Rds,on)退化问题,该问题不仅会造成电源系统额外的能量损失,更会对器件乃至电源系统可靠性带来严重隐患。基于传统硅功率器件双脉冲测试研究方法已不能满足氮化镓功率器件动态工况下诸如动态电阻等关键特性参数的测量研究,氮化镓功率器件全新的动态特性测试技术及其相应的表征方法已成为推动氮化镓功率器件优化设计迭代和基于氮化镓功率器件的新一代能源系统快速发展的重要力量。GaN power devices, with their low on-resistance, low parasitic capacitance and zero reverse recovery charge, have become one of the best candidates for next-generation high-frequency, high-efficiency, and high-power-density converters. There is a big gap between GaN power devices and traditional silicon power devices in terms of material growth, device structure and process manufacturing process. With the new application scenarios of faster switching speed, higher power and higher frequency of GaN power devices , so that this type of device exhibits brand-new dynamic operating characteristics different from silicon power devices under actual dynamic operating conditions. Although the development of GaN power devices has made some progress in recent years, a crucial problem that needs to be solved for the wide application of GaN power devices is the dynamic resistance (Rds,on ) degradation problem, which will not only cause additional energy loss of the power system, but also bring serious hidden dangers to the reliability of devices and even the power system. Based on the traditional silicon power device double-pulse test research method can no longer meet the measurement and research of key characteristic parameters such as dynamic resistance under the dynamic working conditions of GaN power devices, the new dynamic characteristic test technology and corresponding characterization methods of GaN power devices It has become an important force to promote the optimization design iteration of GaN power devices and the rapid development of a new generation of energy systems based on GaN power devices.

目前,氮化镓功率器件手册中只报告了器件的静态电阻(Ron)情况,该静态电阻在直流条件、相对较低的源漏电压Vds下测量获得,而实际氮化镓功率器件的动态电阻特性是一个受所处电源工况中温度、DC-link电压、电流、频率、开关模式和脉冲模式等综合环境因素影响决定的变量,对氮化镓功率器件产品动态特性改进和基于氮化镓功率器件的电源设计更具有实际参考意义的动态电阻特性则未在器件手册中报告,有关氮化镓功率器件在实际工况下(包含温度、DC-link电压、电流、频率、开关模式和脉冲模式等)的动态电阻变化对应的实际导通损耗并没有得到很好的描述。At present, only the static resistance (Ron) of the device is reported in the GaN power device handbook, which is measured under DC conditions and a relatively low source-drain voltage Vds, while the dynamic resistance of the actual GaN power device The characteristic is a variable determined by comprehensive environmental factors such as temperature, DC-link voltage, current, frequency, switching mode and pulse mode in the power supply condition. The improvement of the dynamic characteristics of GaN power device products and based on GaN The dynamic resistance characteristics of the power supply design of the power device are more practical and meaningful, but are not reported in the device manual. The actual working conditions (including temperature, DC-link voltage, current, frequency, switching mode and pulse The actual conduction loss corresponding to the dynamic resistance change of mode, etc.) is not well described.

目前,国内外有关氮化镓功率器件不同工况下动态电阻的测量方法大致分为两类:第一类是基于Agilent B1505A等功率元件分析仪的on-wafer级的单脉冲测试或者双脉冲测试。由于该类测量仪器的限制,此类方法通常无法同时在大电流和大电压的类实际电源工况下评估氮化镓功率器件的动态电阻特性。第二类是在常温下,利用电路级的双脉冲测试方法,研究氮化镓功率器件不同温度下的动态电阻特性,并以此为依据估算对应功率、频率电源系统中由该动态电阻变化引起的电源系统损耗在总损耗中的占比。At present, the measurement methods of dynamic resistance of GaN power devices under different working conditions at home and abroad are roughly divided into two categories: the first category is based on Agilent B1505A and other power component analyzers such as on-wafer single-pulse test or double-pulse test . Due to the limitation of this type of measuring instrument, such methods are usually unable to evaluate the dynamic resistance characteristics of GaN power devices under the real power supply conditions of high current and high voltage at the same time. The second category is to use the circuit-level double-pulse test method at room temperature to study the dynamic resistance characteristics of GaN power devices at different temperatures, and use this as a basis to estimate the corresponding power and frequency caused by the dynamic resistance change in the power system. The proportion of the power system loss in the total loss.

然而,研究证实氮化镓功率器件动态电阻特性受实际电源工况中温度、DC-link电压、电流、频率、开关模式和脉冲模式等综合环境因素的影响,传统的基于Agilent B1505A等功率元件分析仪的on-wafer级的单一电压或电流应力的单脉冲测试或双脉冲测试方法,以及电路级的双脉冲测试方法,均不足以评估氮化镓功率器件动态电阻的在实际电源工况(包含温度、DC-link电压、电流、频率、开关模式和脉冲模式等)应用中的变化情况。However, studies have confirmed that the dynamic resistance characteristics of GaN power devices are affected by comprehensive environmental factors such as temperature, DC-link voltage, current, frequency, switching mode, and pulse mode in actual power supply conditions. The traditional analysis of power components based on Agilent B1505A The single-pulse test or double-pulse test method of single voltage or current stress at the on-wafer level of the instrument, and the double-pulse test method at the circuit level are not enough to evaluate the dynamic resistance of GaN power devices under actual power conditions (including temperature, DC-link voltage, current, frequency, switching mode and pulse mode, etc.) in the application.

发明内容Contents of the invention

为了解决现有技术中存在的上述问题,本发明提供了一种氮化镓功率器件动态工况下特性研究的测试系统。本发明要解决的技术问题通过以下技术方案实现:In order to solve the above-mentioned problems in the prior art, the present invention provides a test system for researching the characteristics of GaN power devices under dynamic working conditions. The technical problem to be solved in the present invention is realized through the following technical solutions:

本发明提供了一种氮化镓功率器件动态工况下特性研究的测试系统,包括:性能评估子板和性能评估母板,其中,The present invention provides a test system for researching characteristics of gallium nitride power devices under dynamic working conditions, including: a performance evaluation sub-board and a performance evaluation motherboard, wherein,

所述性能评估母板包括若干接入端口,用于接收输入的PWM信号、DC-link电压和驱动电压,其中,所述PWM信号和所述DC-link电压均可调节;所述性能评估子板与所述性能评估母板插接,以获取所述PWM信号、所述DC-link电压和所述驱动电压;The performance evaluation motherboard includes several access ports for receiving input PWM signals, DC-link voltages and driving voltages, wherein both the PWM signals and the DC-link voltage can be adjusted; the performance evaluation sub-board The board is plugged into the performance evaluation motherboard to obtain the PWM signal, the DC-link voltage and the driving voltage;

所述性能评估子板上设置有测试电路模块,所述测试电路模块包括上开关管驱动单元、上开关管、下开关管驱动单元、下开关管、温控加热单元、负载单元和若干测量端口,其中,The performance evaluation sub-board is provided with a test circuit module, and the test circuit module includes an upper switch tube drive unit, an upper switch tube, a lower switch tube drive unit, a lower switch tube, a temperature control heating unit, a load unit, and several measurement ports ,in,

所述下开关管为被测氮化镓功率器件;所述上开关管和所述下开关管连接组成一个半桥电路;所述DC-link电压提供半桥电路所需的工作电压;The lower switching tube is a GaN power device to be tested; the upper switching tube and the lower switching tube are connected to form a half-bridge circuit; the DC-link voltage provides the working voltage required by the half-bridge circuit;

所述上开关管驱动单元和所述上开关管连接,所述上开关管驱动单元根据所述PWM信号控制所述上开关管的开启和关断;所述下开关管驱动单元和所述下开关管连接,所述下开关管驱动单元根据所述PWM信号控制所述下开关管的开启和关断;The upper switching tube driving unit is connected to the upper switching tube, and the upper switching tube driving unit controls the opening and closing of the upper switching tube according to the PWM signal; the lower switching tube driving unit is connected to the lower switching tube The switching tube is connected, and the lower switching tube drive unit controls the opening and closing of the lower switching tube according to the PWM signal;

所述负载单元与所述上开关管连接;所述温控加热单元贴附在所述下开关管上;The load unit is connected to the upper switch tube; the temperature-controlled heating unit is attached to the lower switch tube;

通过调节所述温控加热单元、所述负载单元、所述PWM信号和所述DC-link电压获取不同的测试条件组合,利用若干所述测量端口实现对所述被测氮化镓功率器件在不同测试条件组合下的电特性参数测量。By adjusting the temperature-controlled heating unit, the load unit, the PWM signal and the DC-link voltage to obtain different combinations of test conditions, using several of the measurement ports to realize the measurement of the GaN power device under test Measurement of electrical characteristic parameters under different test condition combinations.

在本发明的一个实施例中,所述上开关管驱动单元包括连接的上开关管驱动单元的电源DC/DC电路和上开关管驱动电路,其中,In one embodiment of the present invention, the upper switch transistor drive unit includes a connected power supply DC/DC circuit of the upper switch transistor drive unit and an upper switch transistor drive circuit, wherein,

所述上开关管驱动单元的电源DC/DC电路提供所述上开关管驱动电路的工作电压;The power supply DC/DC circuit of the upper switch tube drive unit provides the working voltage of the upper switch tube drive circuit;

所述上开关管驱动电路与所述上开关管连接,所述上开关管驱动电路根据上开关管PWM信号控制所述上开关管的开启和关断。The upper switch tube driving circuit is connected to the upper switch tube, and the upper switch tube drive circuit controls the upper switch tube to be turned on and off according to the PWM signal of the upper switch tube.

在本发明的一个实施例中,所述下开关管驱动单元包括连接的下开关管驱动单元的电源DC/DC电路和下开关管驱动电路,其中,In one embodiment of the present invention, the lower switching tube driving unit includes a connected power supply DC/DC circuit of the lower switching tube driving unit and a lower switching tube driving circuit, wherein,

所述下开关管驱动单元的电源DC/DC电路提供所述下开关管驱动电路的工作电压;The power supply DC/DC circuit of the lower switching tube driving unit provides the working voltage of the lower switching tube driving circuit;

所述下开关管驱动电路与所述下开关管连接,所述下开关管驱动电路根据下开关管PWM信号控制所述下开关管的开启和关断。The lower switching tube driving circuit is connected to the lower switching tube, and the lower switching tube driving circuit controls the opening and closing of the lower switching tube according to the PWM signal of the lower switching tube.

在本发明的一个实施例中,所述温控加热单元的温控电压为所述驱动电压,所述温控加热单元为加热电阻,通过调节所述加热电阻的阻值大小,提供不同温度的测试条件。In one embodiment of the present invention, the temperature control voltage of the temperature control heating unit is the driving voltage, and the temperature control heating unit is a heating resistor. By adjusting the resistance value of the heating resistor, different temperatures are provided. Test Conditions.

在本发明的一个实施例中,所述负载单元包括第一负载子单元和第二负载子单元,其中,In one embodiment of the present invention, the load unit includes a first load subunit and a second load subunit, wherein,

所述第一负载子单元包括第一电感,所述第一电感连接在所述上开关管的源极和漏极之间;The first load subunit includes a first inductor connected between the source and the drain of the upper switching transistor;

所述第二负载子单元包括第二电感、第一电容、第一电阻,其中,所述第二电感的第一端连接所述上开关管的源极,所述第一电容和所述第一电阻串连在所述第二电感的第二端与所述上开关管的漏极之间;The second load subunit includes a second inductor, a first capacitor, and a first resistor, wherein the first end of the second inductor is connected to the source of the upper switching transistor, and the first capacitor and the first capacitor A resistor is connected in series between the second end of the second inductor and the drain of the upper switch;

当所述第一负载子单元与所述上开关管连接,通过调节所述第一电感的负载,提供双脉冲模式下不同负载电流的测试条件;When the first load subunit is connected to the upper switch tube, by adjusting the load of the first inductor, test conditions for different load currents in double pulse mode are provided;

当所述第二负载子单元与所述上开关管连接,通过调节所述第二电感和所述第一电阻的负载,提供连续冲模式下不同开关模式、不同负载电流模式的测试条件。When the second load subunit is connected to the upper switching tube, by adjusting the load of the second inductor and the first resistor, test conditions of different switching modes and different load current modes in the continuous charging mode are provided.

在本发明的一个实施例中,所述测试电路模块还包括第二电容和电压钳位电路,其中,所述第二电容跨接在所述上开关管和所述下开关管之间,所述电压钳位电路连接在所述下开关管的漏极和源极之间。In an embodiment of the present invention, the test circuit module further includes a second capacitor and a voltage clamping circuit, wherein the second capacitor is connected between the upper switch tube and the lower switch tube, so The voltage clamping circuit is connected between the drain and the source of the lower switching tube.

在本发明的一个实施例中,所述测试系统还包括辅助低压电源,所述辅助低压电源与所述性能评估母板的相应的接入端口连接,所述辅助低压电源用于提供所述驱动电压。In one embodiment of the present invention, the test system further includes an auxiliary low-voltage power supply connected to the corresponding access port of the performance evaluation motherboard, and the auxiliary low-voltage power supply is used to provide the drive Voltage.

在本发明的一个实施例中,所述测试系统还包括可调高压直流电压源,所述可调高压直流电压源与所述性能评估母板的相应的接入端口连接,所述可调高压直流电压源用于提供可调的所述DC-link电压。In one embodiment of the present invention, the test system further includes an adjustable high-voltage direct-current voltage source, the adjustable high-voltage direct-current voltage source is connected to the corresponding access port of the performance evaluation motherboard, and the adjustable high-voltage The DC voltage source is used to provide the adjustable DC-link voltage.

在本发明的一个实施例中,所述测试系统还包括数字信号处理控制板,所述数字信号处理控制板与所述性能评估母板的相应的接入端口连接,所述数字信号处理控制板用于提供可调的所述上开关管PWM信号和所述下开关管PWM信号。In one embodiment of the present invention, the test system further includes a digital signal processing control board, the digital signal processing control board is connected to the corresponding access port of the performance evaluation motherboard, and the digital signal processing control board It is used to provide the adjustable PWM signal of the upper switching tube and the PWM signal of the lower switching tube.

与现有技术相比,本发明的有益效果在于:Compared with prior art, the beneficial effect of the present invention is:

1.本发明的氮化镓功率器件动态工况下特性研究的测试系统,基于全面的氮化镓功率器件动态电阻研究环境模型,其中,温控加热单元可实现对被测氮化镓功率器件在不同温度场景下的考察;可调的DC-link电压可实现环境模型中不同的DC-link电压;负载单元可使被测氮化镓功率器件工作在不同的电流、开关模式、脉冲模式下;可调的PWM信号提供不同频率的开关管的开关指令;该测试系统包含全面的氮化镓功率器件动态电阻研究环境模型变量,可在不同工况因素组合下,测量研究氮化镓功率器件动态工况下特性的目的。1. The test system for researching the characteristics of GaN power devices under dynamic working conditions of the present invention is based on a comprehensive environmental model for the research of dynamic resistance of GaN power devices, wherein the temperature-controlled heating unit can realize the measurement of the measured GaN power devices. Investigation under different temperature scenarios; the adjustable DC-link voltage can realize different DC-link voltages in the environmental model; the load unit can make the GaN power device under test work in different currents, switching modes, and pulse modes ;The adjustable PWM signal provides switching commands for switching tubes with different frequencies; the test system includes a comprehensive environment model variable for the research of dynamic resistance of GaN power devices, which can be used to measure and study GaN power devices under different combinations of working conditions Purpose of characteristics under dynamic conditions.

2.本发明的氮化镓功率器件动态工况下特性研究的测试系统,可以为基于氮化镓功率器件的实际电源应用中的实际器件损耗计算提供重要参考。各环境影响因素灵活可调,可根据不同的研究测试目的,分别设计相应的环境因素组合,实现对被测氮化镓功率器件在不同动态工况下开关特性和动态电阻特性的有针对性的研究。2. The test system for researching the characteristics of GaN power devices under dynamic working conditions of the present invention can provide an important reference for the calculation of actual device loss in actual power supply applications based on GaN power devices. Various environmental factors are flexible and adjustable, and the corresponding environmental factor combinations can be designed according to different research and test purposes, so as to realize the targeted measurement of the switching characteristics and dynamic resistance characteristics of the GaN power device under different dynamic conditions. Research.

3.本发明的氮化镓功率器件动态工况下特性研究的测试系统,可灵活拓展到氮化镓功率器件电特性之外的热电综合特性研究领域。本发明的测试系统中的DSP控制板可受其他测试系统的逻辑门电平信号(Transistor-Transistor Logic,TTL)触发,同步不同测试系统的测试触发信号,以拓展在动态工况下,同步研究氮化镓功率器件热电特性的应用。3. The test system of the present invention for researching the characteristics of GaN power devices under dynamic working conditions can be flexibly expanded to the research field of thermoelectric comprehensive characteristics other than the electrical characteristics of GaN power devices. The DSP control board in the test system of the present invention can be triggered by the logic gate level signal (Transistor-Transistor Logic, TTL) of other test systems, and the test trigger signals of different test systems are synchronized, so as to expand the synchronous research under dynamic working conditions Applications of thermoelectric properties of gallium nitride power devices.

上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,而可依照说明书的内容予以实施,并且为了让本发明的上述和其他目的、特征和优点能够更明显易懂,以下特举较佳实施例,并配合附图,详细说明如下。The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are specifically cited below, and are described in detail as follows in conjunction with the accompanying drawings.

附图说明Description of drawings

图1是本发明实施例提供的一种全面的氮化镓功率器件动态电阻研究环境模型示意图;FIG. 1 is a schematic diagram of a comprehensive research environment model for dynamic resistance of GaN power devices provided by an embodiment of the present invention;

图2是本发明实施例提供的一种氮化镓功率器件动态工况下特性研究的测试系统的结构示意图;Fig. 2 is a schematic structural diagram of a test system for researching characteristics of a gallium nitride power device under dynamic working conditions provided by an embodiment of the present invention;

图3是本发明实施例提供的一种性能评估母板的结构示意图;Fig. 3 is a schematic structural diagram of a performance evaluation motherboard provided by an embodiment of the present invention;

图4是本发明实施例提供的一种性能评估子板的结构示意图;Fig. 4 is a schematic structural diagram of a performance evaluation sub-board provided by an embodiment of the present invention;

图5是本发明实施例提供的一种双脉冲和连续脉冲模式的电路连接示意图;Fig. 5 is a schematic circuit connection diagram of a double pulse and continuous pulse mode provided by an embodiment of the present invention;

图6是本发明实施例提供的一种氮化镓功率器件动态工况下特性研究的测试系统的测试示意图。FIG. 6 is a test schematic diagram of a test system for researching characteristics of a GaN power device under dynamic working conditions provided by an embodiment of the present invention.

具体实施方式Detailed ways

为了进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及具体实施方式,对依据本发明提出的一种氮化镓功率器件动态工况下特性研究的测试系统进行详细说明。In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the test system for the research on the characteristics of a gallium nitride power device under dynamic working conditions according to the present invention is carried out in conjunction with the accompanying drawings and specific implementation methods. Detailed description.

有关本发明的前述及其他技术内容、特点及功效,在以下配合附图的具体实施方式详细说明中即可清楚地呈现。通过具体实施方式的说明,可对本发明为达成预定目的所采取的技术手段及功效进行更加深入且具体地了解,然而所附附图仅是提供参考与说明之用,并非用来对本发明的技术方案加以限制。The aforementioned and other technical contents, features and effects of the present invention can be clearly presented in the following detailed description of specific implementations with accompanying drawings. Through the description of specific embodiments, the technical means and effects of the present invention to achieve the intended purpose can be understood more deeply and specifically, but the accompanying drawings are only for reference and description, and are not used to explain the technical aspects of the present invention. program is limited.

实施例一Embodiment one

本实施例提供了一种氮化镓功率器件动态工况下特性研究的测试系统,实际氮化镓功率器件的动态电阻特性是一个受所处电源工况中温度、DC-link电压、电流、频率、开关模式和脉冲模式等综合环境因素影响决定的变量,本实施例的测试系统是基于全面的氮化镓功率器件动态电阻研究环境模型,如图1所示的全面的氮化镓功率器件动态电阻研究环境模型示意图,环境模型包括温度、DC-link电压、电流、频率、开关模式和脉冲模式等。This embodiment provides a test system for researching the characteristics of GaN power devices under dynamic working conditions. The actual dynamic resistance characteristics of GaN power devices are affected by the temperature, DC-link voltage, current, Variables determined by comprehensive environmental factors such as frequency, switching mode, and pulse mode, the test system of this embodiment is based on a comprehensive environmental model of GaN power device dynamic resistance research, as shown in Figure 1. The comprehensive GaN power device Schematic diagram of the environmental model for dynamic resistance research. The environmental model includes temperature, DC-link voltage, current, frequency, switching mode and pulse mode, etc.

请结合参见图2-图4,图2是本发明实施例提供的一种氮化镓功率器件动态工况下特性研究的测试系统的结构示意图;图3是本发明实施例提供的一种性能评估母板的结构示意图;图4是本发明实施例提供的一种性能评估子板的结构示意图。如图所示,本实施例的氮化镓功率器件动态工况下特性研究的测试系统,包括性能评估子板100和性能评估母板200,其中,性能评估母板200包括若干接入端口(图中未示出),用于接收输入的PWM信号、DC-link电压和驱动电压,其中,PWM信号和DC-link电压均可调节。性能评估子板100与性能评估母板200插接,以获取PWM信号、DC-link电压和驱动电压。Please refer to Fig. 2-Fig. 4 in combination. Fig. 2 is a schematic structural diagram of a test system for researching the characteristics of a gallium nitride power device under dynamic working conditions provided by an embodiment of the present invention; Fig. 3 is a performance provided by an embodiment of the present invention Schematic diagram of the evaluation motherboard; FIG. 4 is a schematic diagram of the structure of a performance evaluation sub-board provided by an embodiment of the present invention. As shown in the figure, the test system for researching the characteristics of GaN power devices under dynamic working conditions in this embodiment includes a performance evaluation daughter board 100 and a performance evaluation motherboard 200, wherein the performance evaluation motherboard 200 includes several access ports ( not shown in the figure), is used to receive the input PWM signal, DC-link voltage and driving voltage, wherein both the PWM signal and the DC-link voltage can be adjusted. The performance evaluation sub-board 100 is plugged with the performance evaluation motherboard 200 to obtain PWM signal, DC-link voltage and driving voltage.

进一步地,性能评估子板100上设置有测试电路模块,测试电路模块包括上开关管驱动单元310、上开关管320、下开关管驱动单元330、下开关管340、温控加热单元350、负载单元360和若干测量端口(图中未示出)。Further, the performance evaluation sub-board 100 is provided with a test circuit module, and the test circuit module includes an upper switch tube drive unit 310, an upper switch tube 320, a lower switch tube drive unit 330, a lower switch tube 340, a temperature control heating unit 350, a load Unit 360 and several measurement ports (not shown in the figure).

其中,下开关管340为被测氮化镓功率器件;上开关管320和下开关管340连接组成一个半桥电路;DC-link电压提供半桥电路所需的工作电压。Wherein, the lower switching tube 340 is a GaN power device under test; the upper switching tube 320 and the lower switching tube 340 are connected to form a half-bridge circuit; the DC-link voltage provides the working voltage required by the half-bridge circuit.

需要说明的是,本实施例的测试电路模块的基本电路是由上开关管320、下开关管340和负载单元360组成的半桥电路。如果将上开关管320换成二极管,该系统也可用于上开关管320的动态工况特性研究,上开关管320的导通电流可采用基于铁氧体磁芯电流传感器和电流探头进行测量。It should be noted that the basic circuit of the test circuit module in this embodiment is a half-bridge circuit composed of the upper switching transistor 320 , the lower switching transistor 340 and the load unit 360 . If the upper switching tube 320 is replaced with a diode, the system can also be used for research on the dynamic working condition characteristics of the upper switching tube 320, and the conduction current of the upper switching tube 320 can be measured with a current sensor based on a ferrite core and a current probe.

进一步地,上开关管驱动单元310和上开关管320连接,上开关管驱动单元310根据相应的PWM信号控制上开关管320的开启和关断;下开关管驱动单元330和下开关管340连接,下开关管驱动单元340根据相应的PWM信号控制下开关管340的开启和关断。负载单元360与上开关管320连接;温控加热单元350贴附在下开关管340上。Further, the upper switch tube drive unit 310 is connected with the upper switch tube 320, and the upper switch tube drive unit 310 controls the opening and closing of the upper switch tube 320 according to the corresponding PWM signal; the lower switch tube drive unit 330 is connected with the lower switch tube 340 , the lower switch transistor drive unit 340 controls the turn-on and turn-off of the lower switch transistor 340 according to the corresponding PWM signal. The load unit 360 is connected to the upper switching tube 320 ; the temperature-controlled heating unit 350 is attached to the lower switching tube 340 .

在本实施例中,通过调节温控加热单元350、负载单元360、PWM信号和DC-link电压获取不同的测试条件组合,利用若干测量端口实现对被测氮化镓功率器件在不同测试条件组合下的电特性参数测量。In this embodiment, different combinations of test conditions are obtained by adjusting the temperature-controlled heating unit 350, the load unit 360, the PWM signal and the DC-link voltage, and several measurement ports are used to realize the combination of different test conditions for the GaN power device under test. Under the electrical characteristic parameter measurement.

进一步地,结合本实施例测试系统的具体结构对该测试系统的测试原理进行具体说明。Further, the test principle of the test system will be specifically described in combination with the specific structure of the test system in this embodiment.

如图3所示的性能评估母板的结构示意图,在本实施例中,在性能评估母板200上设置有PWM信号接入端口、DC-link电压接入端口、驱动电压接入端口和子板插接端口。其中,PWM信号接入端口包括两个PWM信号子端口,一个PWM信号子端口为上开关管320提供上开关管PWM信号,另一个PWM信号子端口为下开关管340提供下开关管PWM信号,驱动电压接入端口输入的电压为5V电压,子板插接端口用于将性能评估子板与性能评估母板连接。The structural diagram of the performance evaluation motherboard shown in Figure 3, in this embodiment, a PWM signal access port, a DC-link voltage access port, a drive voltage access port and a sub-board are provided on the performance evaluation motherboard 200 Docking port. Wherein, the PWM signal access port includes two PWM signal sub-ports, one PWM signal sub-port provides the upper switch tube PWM signal for the upper switch tube 320, and the other PWM signal sub-port provides the lower switch tube PWM signal for the lower switch tube 340, The input voltage of the driving voltage access port is 5V, and the daughter board plug port is used to connect the performance evaluation daughter board with the performance evaluation motherboard.

在本实施例中,该测试系统还包括辅助低压电源400、可调高压直流电压源500和数字信号处理控制板600。其中,辅助低压电源400与性能评估母板200的相应的接入端口(驱动电压接入端口)连接,辅助低压电源400用于提供驱动电压,该驱动电压也作为温控加热单元350的温控电压,该驱动电压为5V。In this embodiment, the testing system further includes an auxiliary low voltage power supply 400 , an adjustable high voltage DC voltage source 500 and a digital signal processing control board 600 . Wherein, the auxiliary low-voltage power supply 400 is connected to the corresponding access port (driving voltage access port) of the performance evaluation motherboard 200, and the auxiliary low-voltage power supply 400 is used to provide the driving voltage, which is also used as the temperature control of the temperature-controlled heating unit 350. voltage, the driving voltage is 5V.

可调高压直流电压源500与性能评估母板200的相应的接入端口(DC-link电压接入端口)连接,可调高压直流电压源500用于提供可调的DC-link电压在本实施例中,DC-link电压为上开关管320、下开关管340和负载单元360组成的半桥电路提供不同测试要求的DC-link电压。The adjustable high-voltage DC voltage source 500 is connected to the corresponding access port (DC-link voltage access port) of the performance evaluation motherboard 200, and the adjustable high-voltage DC voltage source 500 is used to provide an adjustable DC-link voltage. In the example, the DC-link voltage provides DC-link voltages with different test requirements for the half-bridge circuit composed of the upper switching tube 320 , the lower switching tube 340 and the load unit 360 .

数字信号处理控制板600与性能评估母板200的相应的接入端口(两个PWM信号子端口)连接,数字信号处理控制板600用于提供可调的上开关管PWM信号和下开关管PWM信号。可选地,数字信号处理控制板600采用型号为TI TMS320F28379D的DSP控制板,以为被测电路提供可编程的PWM信号。The digital signal processing control board 600 is connected with the corresponding access ports (two PWM signal sub-ports) of the performance evaluation motherboard 200, and the digital signal processing control board 600 is used to provide adjustable upper switching tube PWM signal and lower switching tube PWM signal. Signal. Optionally, the digital signal processing control board 600 adopts a DSP control board modeled as TI TMS320F28379D to provide programmable PWM signals for the circuit under test.

进一步地,如图4所示的性能评估子板的结构示意图,在本实施例中,上开关管驱动单元310包括连接的上开关管驱动单元的电源DC/DC电路311和上开关管驱动电路312,其中,上开关管驱动单元的电源DC/DC电路311提供上开关管驱动电路312的工作电压;上开关管驱动电路312与上开关管320连接,上开关管驱动电路312根据上开关管PWM信号控制上开关管320的开启和关断。Further, as shown in FIG. 4 , the structural schematic diagram of the performance evaluation sub-board, in this embodiment, the upper switch tube drive unit 310 includes the connected power supply DC/DC circuit 311 of the upper switch tube drive unit and the upper switch tube drive circuit. 312, wherein, the power supply DC/DC circuit 311 of the upper switching tube drive unit provides the working voltage of the upper switching tube driving circuit 312; the upper switching tube driving circuit 312 is connected with the upper switching tube 320, and the upper switching tube driving circuit 312 The PWM signal controls the turn-on and turn-off of the upper switch 320 .

与上开关管驱动单元310类似地,下开关管驱动单元330包括连接的下开关管驱动单元的电源DC/DC电路331和下开关管驱动电路332,其中,下开关管驱动单元的电源DC/DC电路331提供下开关管驱动电路332的工作电压;下开关管驱动电路332与下开关管340连接,下开关管驱动电路332根据下开关管PWM信号控制下开关管340的开启和关断。Similar to the upper switching tube driving unit 310, the lower switching tube driving unit 330 includes a connected power supply DC/DC circuit 331 and a lower switching tube driving circuit 332 of the lower switching tube driving unit, wherein the power supply DC/DC of the lower switching tube driving unit The DC circuit 331 provides the operating voltage of the lower switch tube drive circuit 332; the lower switch tube drive circuit 332 is connected to the lower switch tube 340, and the lower switch tube drive circuit 332 controls the opening and closing of the lower switch tube 340 according to the lower switch tube PWM signal.

在本实施例中,通过编程得到相应的PWM信号,为上开关管320和下开关管340提供不同频率、双脉冲或连续脉冲的开关指令,实现上开关管320和下开关管340的开启和关断。In this embodiment, the corresponding PWM signal is obtained through programming, and switching instructions of different frequencies, double pulses or continuous pulses are provided for the upper switching tube 320 and the lower switching tube 340, so as to realize the opening and closing of the upper switching tube 320 and the lower switching tube 340. off.

进一步地,温控加热单元350的温控电压为驱动电压,温控加热单元350为加热电阻,通过调节加热电阻的阻值大小,提供不同温度的测试条件。Further, the temperature control voltage of the temperature control heating unit 350 is a driving voltage, and the temperature control heating unit 350 is a heating resistor. By adjusting the resistance value of the heating resistor, different temperature test conditions are provided.

需要说明的是,由于温控加热单元的加热电阻紧贴在被测氮化镓功率器件上,在本实施例中,在性能评估子板的被测氮化镓功率器件垂直方向的位置设置有通孔,便于通过该通孔从性能评估子板的背面考察被测氮化镓功率器件的时时温度。It should be noted that since the heating resistor of the temperature-controlled heating unit is close to the GaN power device under test, in this embodiment, a The through hole is convenient to observe the temperature of the GaN power device under test from the back of the performance evaluation daughter board through the through hole.

进一步地,负载单元360包括第一负载子单元361和第二负载子单元362。如图5所示的双脉冲和连续脉冲模式的电路连接示意图,图5中a图为双脉冲模式的电路连接示意图,b图为连续脉冲模式的电路连接示意图。具体地,第一负载子单元361包括第一电感L1,第一电感L1连接在上开关管320的源极和漏极之间。第二负载子单元362包括第二电感L2、第一电容C1、第一电阻R1,其中,第二电感L2的第一端连接上开关管320的源极,第一电容C1和第一电阻R1串连在第二电感L2的第二端与上开关管320的漏极之间,即就是,第一电容C1的第一端连接上开关管320的漏极,第二端连接第二电感L2的第二端,第一电阻R1与第一电容C1并联。Further, the load unit 360 includes a first load subunit 361 and a second load subunit 362 . The circuit connection schematic diagram of double pulse and continuous pulse mode is shown in Fig. 5, the diagram a in Fig. 5 is the circuit connection schematic diagram of double pulse mode, and the diagram b is the circuit connection schematic diagram of continuous pulse mode. Specifically, the first load sub-unit 361 includes a first inductor L1, and the first inductor L1 is connected between the source and the drain of the upper switching transistor 320 . The second load subunit 362 includes a second inductor L2, a first capacitor C1, and a first resistor R1, wherein the first end of the second inductor L2 is connected to the source of the switching transistor 320, and the first capacitor C1 and the first resistor R1 It is connected in series between the second end of the second inductor L2 and the drain of the upper switching transistor 320, that is, the first end of the first capacitor C1 is connected to the drain of the upper switching transistor 320, and the second end is connected to the second inductor L2. The second terminal of the first resistor R1 is connected in parallel with the first capacitor C1.

在本实施例中,第一电容C1作为去耦电容用来有效缓解电路中不可避免的寄生参数引起的影响测量的震荡。In this embodiment, the first capacitor C1 is used as a decoupling capacitor to effectively alleviate the oscillation that affects the measurement caused by unavoidable parasitic parameters in the circuit.

在本实施例中,当第一负载子单元361与上开关管320连接,通过调节第一电感L1的负载,提供双脉冲模式下不同负载电流的测试条件;当第二负载子单元362与上开关管320连接,通过调节第二电感L2和第一电阻R1的负载,提供连续冲模式下不同开关模式、不同负载电流的测试条件。In this embodiment, when the first load subunit 361 is connected to the upper switch tube 320, by adjusting the load of the first inductor L1, test conditions for different load currents in double pulse mode are provided; when the second load subunit 362 is connected to the upper The switching tube 320 is connected, and by adjusting the load of the second inductor L2 and the first resistor R1, test conditions of different switching modes and different load currents in the continuous charging mode are provided.

进一步地,测试电路模块还包括第二电容C2和电压钳位电路,其中,第二电容C2跨接在上开关管320和下开关管340之间,具体地,第二电容C2跨接在上开关管320的漏极和下开关管340的源极之间。电压钳位电路连接在下开关管340的漏极和源极之间。Further, the test circuit module further includes a second capacitor C2 and a voltage clamping circuit, wherein the second capacitor C2 is connected between the upper switch tube 320 and the lower switch tube 340, specifically, the second capacitor C2 is connected across the upper between the drain of the switching transistor 320 and the source of the lower switching transistor 340 . The voltage clamping circuit is connected between the drain and the source of the lower switching transistor 340 .

在本实施例中,测试电路模块还包括第三电容C3,第三电容C3连接第二电容C2与接地端GND之间,作为电路的去耦电容。In this embodiment, the test circuit module further includes a third capacitor C3, and the third capacitor C3 is connected between the second capacitor C2 and the ground terminal GND as a decoupling capacitor of the circuit.

在本实施例中,性能评估子板100上设置有测量上开关管320的栅源电压和源漏电压的测量端口,测量下开关管340的栅源电压、源漏电压和漏极电流的测量端口,测量下开关管340的导通电压的测量端口,以及设置在下开关管340的源极和信号GND之间的电流传感器,该电流传感器用于测量下开关管340也就是被测氮化镓功率器件的导通态的电流。利用上述测量端口,通过连接相应的电流传感器、电流探头、电压钳位电路(电压钳位电路连接在下开关管340的源极和漏极之间)和电压探头,以测量得到被测氮化镓功率器件动态工况开关特性和导通特性的电流、电压参数。In this embodiment, the performance evaluation sub-board 100 is provided with measurement ports for measuring the gate-source voltage and source-drain voltage of the upper switch tube 320, and for measuring the gate-source voltage, source-drain voltage and drain current of the lower switch tube 340. port, a measurement port for measuring the conduction voltage of the lower switch tube 340, and a current sensor arranged between the source of the lower switch tube 340 and the signal GND, the current sensor is used to measure the lower switch tube 340, that is, the gallium nitride to be tested The on-state current of a power device. Utilize above-mentioned measuring port, by connecting corresponding current sensor, current probe, voltage clamping circuit (the voltage clamping circuit is connected between the source and the drain of lower switching tube 340) and voltage probe, to measure the measured GaN Current and voltage parameters of switching characteristics and conduction characteristics of power devices under dynamic conditions.

请参见图6,图6是本发明实施例提供的一种氮化镓功率器件动态工况下特性研究的测试系统的测试示意图,结合图6对本实施例测试系统的具体测试过程进行说明。Please refer to FIG. 6 . FIG. 6 is a test schematic diagram of a test system for researching characteristics of GaN power devices under dynamic working conditions provided by an embodiment of the present invention. The specific test process of the test system of this embodiment will be described in conjunction with FIG. 6 .

在本实施例的测试系统中,通过调整温控加热单元350的加热电阻的电流大小,可以考察被测氮化镓功率器件在不同温度、动态工况下的特性。通过调整与上开关管320连接的负载子单元,以及相应负载子单元的负载大小,实现被测氮化镓功率器件在不同负载电流、不同脉冲模式和不同开关模式(软开关、硬开关、半软开关)下的特性测量。利用数字信号处理控制板600为性能评估子板100的上开关管320和下开关管340驱动提供可编程的可调脉宽(不同频率)的PWM信号的开关指令,用来考察被测氮化镓功率器件在动态工况、不同频率下的特性。In the test system of this embodiment, by adjusting the current of the heating resistor of the temperature-controlled heating unit 350, the characteristics of the GaN power device under test under different temperatures and dynamic working conditions can be investigated. By adjusting the load subunit connected to the upper switching tube 320, and the load size of the corresponding load subunit, the GaN power device under test can be implemented in different load currents, different pulse modes and different switching modes (soft switching, hard switching, half-switching, etc.) Characteristic measurements under soft switching). Utilize the digital signal processing control board 600 to drive the upper switching tube 320 and the lower switching tube 340 of the performance evaluation sub-board 100 to provide switching instructions for PWM signals with programmable adjustable pulse widths (different frequencies), to investigate the measured nitriding The characteristics of gallium power devices under dynamic conditions and different frequencies.

在本实施例中,可选地,采用电流传感器、电流探头、电压钳位电路、电压探头、示波器1和示波器2分别实现对被测氮化镓功率器件在动态工况下开关特性和动态电阻特性的电流参数、电压参数的时时测量和表征。例如,动态电阻的监测可以通过测量被测氮化镓功率器件导通瞬态的导通电压(Vds,on)和导通电流(Id)以及Tektronix MDO3104示波器时时除法运算获得(Vds,on=Rds,on/Id),其中,电压钳位电路可动态监测被测氮化镓功率器件在不同测试条件下Vds,on的变化,导通电流的测量可用电流探头实现。In this embodiment, optionally, a current sensor, a current probe, a voltage clamping circuit, a voltage probe, an oscilloscope 1 and an oscilloscope 2 are used to respectively realize the switching characteristics and dynamic resistance of the GaN power device under test under dynamic conditions. Continuous measurement and characterization of characteristic current parameters and voltage parameters. For example, the monitoring of dynamic resistance can be obtained by measuring the on-state voltage (V ds,on ) and on-state current (I d ) of the GaN power device under test and the division operation of the Tektronix MDO3104 oscilloscope (V ds ,on ) on =R ds,on /I d ), wherein, the voltage clamping circuit can dynamically monitor the change of V ds,on of the GaN power device under test under different test conditions, and the measurement of the conduction current can be realized by a current probe.

本实施例的氮化镓功率器件动态工况下特性研究的测试系统,基于全面的氮化镓功率器件动态电阻研究环境模型,其中,温控加热单元可实现对被测氮化镓功率器件在不同温度场景下的考察;可调的DC-link电压可实现环境模型中不同的DC-link电压;负载单元可使被测氮化镓功率器件工作在不同的电流、开关模式、脉冲模式下;可调的PWM信号提供不同频率的开关管的开关指令;该测试系统包含全面的氮化镓功率器件动态电阻研究环境模型变量,可在不同工况因素组合下,测量研究氮化镓功率器件动态工况下特性的目的。The test system for researching the characteristics of GaN power devices under dynamic working conditions in this embodiment is based on a comprehensive environmental model for the research of dynamic resistance of GaN power devices. Investigation under different temperature scenarios; the adjustable DC-link voltage can realize different DC-link voltages in the environmental model; the load unit can make the GaN power device under test work in different currents, switching modes, and pulse modes; The adjustable PWM signal provides switching commands for switching tubes with different frequencies; the test system includes comprehensive environmental model variables for the research of dynamic resistance of GaN power devices, and can measure and study the dynamics of GaN power devices under different combinations of working conditions. The purpose of the characteristics under the operating conditions.

需要说明的是,由于目前的氮化镓功率器件由于不同的器件结构、散热、寄生优化等综合设计考量,采用的封装形式不尽相同,因此,可以根据不同封装的氮化镓功率器件,有针对性的设计最小化环路寄生参数的性能评估子板,使得不同封装的被测氮化镓功率器件在高频、连续脉冲下的相关特性均能准确测量和表征,可以实现不同封装的氮化镓功率器件在不同测试条件组合下(包含温度、DC-link电压、电流、频率、开关模式和脉冲模式等)的开关特性和动态电阻特性的同步测量。It should be noted that due to comprehensive design considerations such as different device structures, heat dissipation, and parasitic optimization, the current GaN power devices adopt different packaging forms. Therefore, according to GaN power devices in different packages, there are The targeted design minimizes the performance evaluation sub-board of loop parasitic parameters, so that the relevant characteristics of GaN power devices in different packages can be accurately measured and characterized under high-frequency and continuous pulses, and the nitrogen in different packages can be realized. Synchronous measurement of switching characteristics and dynamic resistance characteristics of GaN power devices under different combinations of test conditions (including temperature, DC-link voltage, current, frequency, switching mode and pulse mode, etc.).

本实施例的氮化镓功率器件动态工况下特性研究的测试系统中的温度、负载、PWM信号、DC-link电压均可独立调节,即针对氮化镓功率器件所处电源工况的各环境影响因素(温度、DC-link电压、电流、频率、开关模式和脉冲模式)灵活可调,可根据不同的研究测试目的,分别设计相应的环境因素组合,实现对被测氮化镓功率器件在不同动态工况下开关特性和动态电阻特性的有针对性的研究。The temperature, load, PWM signal, and DC-link voltage in the test system for the research on the characteristics of GaN power devices under dynamic working conditions in this embodiment can be independently adjusted, that is, for each power supply working condition of GaN power devices. Environmental factors (temperature, DC-link voltage, current, frequency, switching mode and pulse mode) are flexible and adjustable, and the corresponding environmental factor combinations can be designed according to different research and test purposes, so as to realize the measurement of GaN power devices under test. Targeted research on switching characteristics and dynamic resistance characteristics under different dynamic conditions.

值得说明的是,本实施例的氮化镓功率器件动态工况下特性研究的测试系统,可灵活拓展到氮化镓功率器件电特性之外的其他性能研究领域。该测试系统中的DSP控制板可受其他测试系统的逻辑门电平信号(Transistor-Transistor Logic,TTL)触发,同步不同测试系统的测试触发信号,以拓展在动态工况下,同步研究氮化镓功率器件其他特性参数的应用。例如,氮化镓功率器件在动态工况下,其器件内部的电、热特性受器件结构、器件瞬态电特性、器件瞬态温度特性、器件沟道机械应力的耦合影响,该测试系统可通过识别热测试设备的同步TTL信号,以实现氮化镓功率器件在动态工况下,电特性和热特性的同步多维度考察,可为(超)宽禁带半导体功率器件在瞬态工况下的热电耦合机理研究提供更多热电特性细节和事实依据。It is worth noting that the test system for researching the characteristics of GaN power devices under dynamic working conditions in this embodiment can be flexibly expanded to other performance research fields other than the electrical characteristics of GaN power devices. The DSP control board in the test system can be triggered by the logic gate level signal (Transistor-Transistor Logic, TTL) of other test systems, and synchronize the test trigger signals of different test systems to expand the synchronous research on nitriding under dynamic conditions. Applications of other characteristic parameters of gallium power devices. For example, under dynamic working conditions, the electrical and thermal characteristics of GaN power devices are affected by the coupling of device structure, device transient electrical characteristics, device transient temperature characteristics, and device channel mechanical stress. The test system can By identifying the synchronous TTL signal of the thermal test equipment to realize the synchronous multi-dimensional investigation of the electrical and thermal characteristics of GaN power devices under dynamic conditions, it can provide (ultra) wide bandgap semiconductor power devices under transient conditions The thermoelectric coupling mechanism research below provides more details and factual basis of thermoelectric characteristics.

应当说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的物品或者设备中还存在另外的相同要素。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。It should be noted that in this article, relational terms such as first and second etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is a relationship between these entities or operations. There is no such actual relationship or order between them. Furthermore, the terms "comprises", "comprises" or any other variation are intended to cover a non-exclusive inclusion such that an article or device comprising a set of elements includes not only those elements but also other elements not expressly listed. Without further limitations, an element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the article or device comprising said element. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The orientation or positional relationship indicated by "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying References to devices or elements must have a particular orientation, be constructed, and operate in a particular orientation and therefore should not be construed as limiting the invention.

以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明,不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本发明的保护范围。The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be assumed that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deduction or replacement can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims (9)

1. A test system for characteristic research of a gallium nitride power device under dynamic working conditions is characterized by comprising: a performance evaluation daughter board and a performance evaluation mother board, wherein,
the performance evaluation motherboard comprises a plurality of access ports and a plurality of control modules, wherein the access ports are used for receiving input PWM signals, DC-link voltage and driving voltage, and both the PWM signals and the DC-link voltage can be regulated; the performance evaluation daughter board is plugged with the performance evaluation mother board to acquire the PWM signal, the DC-link voltage and the driving voltage;
the performance evaluation daughter board is provided with a test circuit module, the test circuit module comprises an upper switch tube driving unit, an upper switch tube, a lower switch tube driving unit, a lower switch tube, a temperature control heating unit, a load unit and a plurality of measurement ports, wherein,
the lower switching tube is a tested gallium nitride power device; the upper switching tube and the lower switching tube are connected to form a half-bridge circuit; the DC-link voltage provides working voltage required by the half-bridge circuit;
the upper switching tube driving unit is connected with the upper switching tube and controls the upper switching tube to be turned on or turned off according to the PWM signal; the lower switching tube driving unit is connected with the lower switching tube and controls the lower switching tube to be turned on or turned off according to the PWM signal;
the load unit is connected with the upper switch tube; the temperature control heating unit is attached to the lower switch tube;
different test condition combinations are obtained by adjusting the temperature control heating unit, the load unit, the PWM signal and the DC-link voltage, and the electrical characteristic parameter measurement of the tested gallium nitride power device under different test condition combinations is realized by utilizing the plurality of measurement ports.
2. The system for testing the characteristics of the GaN power device under the dynamic working condition according to claim 1, wherein the upper switch tube driving unit comprises a power supply DC/DC circuit and an upper switch tube driving circuit of the upper switch tube driving unit which are connected, wherein,
a power supply DC/DC circuit of the upper switching tube driving unit provides working voltage of the upper switching tube driving circuit;
the upper switch tube driving circuit is connected with the upper switch tube and controls the upper switch tube to be turned on and off according to the PWM signal of the upper switch tube.
3. The system for testing the characteristics of the gallium nitride power device under the dynamic working condition according to claim 2, wherein the lower switch tube driving unit comprises a power supply DC/DC circuit of the lower switch tube driving unit and a lower switch tube driving circuit which are connected, wherein,
a power supply DC/DC circuit of the lower switching tube driving unit provides working voltage of the lower switching tube driving circuit;
the lower switching tube driving circuit is connected with the lower switching tube and controls the lower switching tube to be turned on and off according to a lower switching tube PWM signal.
4. The system for testing the characteristic research of the gallium nitride power device under the dynamic working condition according to claim 1, wherein the temperature control voltage of the temperature control heating unit is the driving voltage, the temperature control heating unit is a heating resistor, and the testing conditions of different temperatures are provided by adjusting the resistance value of the heating resistor.
5. The system for testing the characteristics of the GaN power device under the dynamic condition of claim 1, wherein the load unit comprises a first load subunit and a second load subunit, wherein,
the first load subunit comprises a first inductor, and the first inductor is connected between the source electrode and the drain electrode of the upper switching tube;
the second load subunit comprises a second inductor, a first capacitor and a first resistor, wherein the first end of the second inductor is connected with the source electrode of the upper switching tube, and the first capacitor and the first resistor are connected in series between the second end of the second inductor and the drain electrode of the upper switching tube;
when the first load subunit is connected with the upper switching tube, test conditions of different load currents in a double-pulse mode are provided by adjusting the load of the first inductor;
when the second load subunit is connected with the upper switching tube, test conditions of different switching modes and different load current modes in a continuous flushing mode are provided by adjusting the load of the second inductor and the first resistor.
6. The system for testing the characteristics of the gallium nitride power device under the dynamic working condition according to claim 1, wherein the test circuit module further comprises a second capacitor and a voltage clamp circuit, wherein the second capacitor is connected across the upper switching tube and the lower switching tube, and the voltage clamp circuit is connected between the drain and the source of the lower switching tube.
7. The system for testing the characteristic research of the gallium nitride power device under the dynamic working condition according to claim 1, further comprising an auxiliary low voltage power supply connected to the corresponding access port of the performance evaluation motherboard, wherein the auxiliary low voltage power supply is used for providing the driving voltage.
8. The system of claim 1, further comprising an adjustable high voltage DC voltage source connected to a corresponding access port of the performance evaluation motherboard, the adjustable high voltage DC voltage source configured to provide an adjustable DC-link voltage.
9. The system for testing the characteristics of the gallium nitride power device under dynamic conditions according to claim 3, further comprising a digital signal processing control board connected to the corresponding access ports of the performance evaluation motherboard, the digital signal processing control board being configured to provide the adjustable upper switching tube PWM signal and the adjustable lower switching tube PWM signal.
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