CN115247683A - Air spring vibration isolator and precise vibration isolation platform applying same - Google Patents
Air spring vibration isolator and precise vibration isolation platform applying same Download PDFInfo
- Publication number
- CN115247683A CN115247683A CN202111199978.1A CN202111199978A CN115247683A CN 115247683 A CN115247683 A CN 115247683A CN 202111199978 A CN202111199978 A CN 202111199978A CN 115247683 A CN115247683 A CN 115247683A
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- mechanical valve
- cylinder body
- cylinder cover
- air spring
- air
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/3207—Constructional features
- F16F9/3235—Constructional features of cylinders
- F16F9/3242—Constructional features of cylinders of cylinder ends, e.g. caps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/32—Details
- F16F9/34—Special valve constructions; Shape or construction of throttling passages
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Fluid-Damping Devices (AREA)
Abstract
The invention discloses an air spring vibration isolator which comprises a cylinder body, a cylinder cover and a mechanical valve component fixedly arranged on the side part of the cylinder cover, wherein the cylinder body is divided into an upper cavity chamber and a lower cavity chamber, a diaphragm covers an opening of the cylinder body to seal the upper cavity chamber to form a load cavity, the lower cavity chamber forms a damping cavity, the damping cavity is provided with an air inlet and an air outlet, the load cavity is provided with a pressure relief opening which is communicated with the air outlet through the mechanical valve component, and an external air pump inflates air into the cylinder body and enables the diaphragm to expand and support at the bottom of the cylinder cover; the load can move up and down relative to the cylinder body when being supported above the cylinder cover; a push rod is arranged on the side part of the cylinder body, and the mechanical valve component moves downwards along with the cylinder cover to touch the top end of the push rod, so that the mechanical valve component is opened and communicated; the air spring vibration isolators are uniformly distributed and supported below the workpiece platform, each air spring vibration isolator can be independently controlled in motion, and the position detection and load feedback of a cylinder cover are realized through the change of the stroke of the mechanical valve component to change the air pressure in a damping cavity of the corresponding vibration isolator.
Description
Technical Field
The invention relates to the field of precise vibration isolation, in particular to a precise vibration isolation platform and an air spring vibration isolator.
Background
The air spring is widely applied to automobiles and railway vehicles, and simultaneously, the air spring is used as a vibration isolation unit on a measuring machine, a press machine, a conveyor, an air hammer, textile machinery, grinding machinery, precise electronic equipment and the like to realize the functions of vibration isolation and noise reduction. At present, the most mainstream is the free membrane type air spring, the membrane type air spring controls the change rate of the effective area by changing the shape of a load plate connected to a membrane, the elastic characteristic curve is ideal, and the lower natural frequency can be obtained.
A series of high-precision technical equipment such as ultra-precision machining, detection, IC manufacturing and optical engineering is very sensitive to external vibration, and the corresponding vibration isolator is required to have wide vibration isolation frequency band, high vibration isolation efficiency, high sensitivity, high precision and low natural frequency. Although the conventional vibration isolator adopts a free-film air spring, the vibration isolator is excellent in vibration isolation efficiency, sensitivity, precision and the like, so that the vibration isolator is not exquisite in the field of precision vibration isolation.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides an air spring vibration isolator and a precise vibration isolation platform using the same.
The technical scheme adopted by the invention for solving the technical problem is as follows:
an air spring vibration isolator comprises a cylinder body, a cylinder cover and a mechanical valve assembly, wherein the cylinder cover is covered and sealed above an opening of the cylinder body, the mechanical valve assembly is fixedly arranged on the side portion of the cylinder cover, a partition plate is transversely arranged in an inner cavity of the cylinder body and divides the inner cavity of the cylinder body into an upper cavity and a lower cavity, a diaphragm covers the opening of the cylinder body and is fixedly pressed through a support ring to seal the upper cavity, the upper cavity forms a load cavity, the lower cavity forms a damping cavity, the damping cavity is provided with an air inlet communicated with an external air pump and an air outlet communicated with the mechanical valve assembly, the load cavity is provided with a pressure relief opening communicated with the air outlet through the mechanical valve assembly, and the external air pump inflates the damping cavity and the load cavity and enables the diaphragm to expand and support at the bottom of the cylinder cover; a load extrusion load cavity is arranged above the cylinder cover so that the cylinder cover can move up and down relative to the cylinder body; the bottom of the mechanical valve component is provided with a trigger key, the side part of the cylinder body is provided with a push rod which is positioned below the mechanical valve component, and the mechanical valve component moves down along with the cylinder cover and makes the trigger key touch the top end of the push rod, so that the internal air channel of the mechanical valve component is opened and communicated.
The damping cavity is further provided with an exhaust hole, the side portion of the cylinder body is further provided with a safety valve inserted in the exhaust hole, the side portion of the lever cover is provided with a bolt located above the safety valve, and a hanging chain is arranged between the bolt and a pull ring switch of the safety valve.
The lower part of the safety valve is inserted on the exhaust hole through a vertical elbow, so that the safety valve is vertically arranged.
The mechanical valve component is a two-position three-way mechanical valve and comprises vent holes I and II which are respectively communicated with the air outlet and the pressure relief port and a vent hole III which is communicated with the atmosphere.
And a silencer is arranged on the vent III.
The mechanical valve assembly is fixedly arranged on the side part of the cylinder cover through an L-shaped mounting plate, the transverse part of the L-shaped mounting plate is mounted and connected to the top of the cylinder cover, and the mechanical valve assembly is arranged on the vertical part of the L-shaped mounting plate; the lateral part of the cylinder body horizontally extends to form a platform, and the ejector rod is vertically arranged on the platform through a screw.
The diaphragm is basin-shaped; the diaphragm comprises a middle thin rubber layer and nylon cloth layers covering two sides of the thin rubber layer.
The side wall of the inner cavity of the cylinder body is annularly provided with steps, the partition plate is fixed on the steps, and a sealing layer is clamped between the partition plate and the steps.
And a carrier connecting block is arranged at the top of the cylinder cover.
The precise vibration isolation platform comprises a workpiece platform, wherein the air spring vibration isolators are supported below the workpiece platform and are uniformly arranged.
The beneficial effects of the invention are: the air spring vibration isolator is abutted to the lower part of a load through a cylinder cover serving as a supporting platform to rigidly support the load, a diaphragm of a load cavity is expanded and supported to the lower part of the cylinder cover, a damping cavity and the load cavity are separated and independent and are connected through a mechanical valve assembly, the mechanical valve assembly moves up and down along with the cylinder cover and is in contact with an ejector rod positioned at the side part of the lower cylinder body, when the load is loaded on the cylinder cover, the cylinder cover is pressed down by weight and extrudes the load cavity, and the mechanical valve assembly moves down along with the weight and is triggered by the ejector rod to be opened to enable the load cavity to be communicated with the damping cavity; the air spring vibration isolators are uniformly supported below the precise vibration isolation platform, each air spring vibration isolator can be controlled in an independent motion mode, position detection and load feedback of a cylinder cover are achieved through changes of strokes of the mechanical valve components, air pressure in a damping cavity of the corresponding vibration isolator is changed, air pressure changes of the damping cavity directly affect load capacity of the load cavity and volume of the load cavity, and therefore the whole vibration isolation platform can quickly return to a balance point.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a precision vibration isolation platform;
FIG. 2 is a schematic structural view of an air spring vibration isolator;
FIG. 3 is a schematic disassembled view of the air spring vibration isolator;
FIG. 4 is a cross-sectional view of an air spring vibration isolator;
FIG. 5 is a schematic view of the diaphragm of FIG. 4 after expansion;
fig. 6 is a schematic diagram of a cylinder head tilt open relief valve.
Detailed Description
Referring to fig. 1 to 4, the precise vibration isolation platform comprises a workpiece platform, wherein a plurality of air spring vibration isolators are uniformly distributed and supported below the workpiece platform, and the arrangement of the air spring vibration isolators can adjust the design scheme according to actual conditions, so that the manufacturing cost is reduced and the appearance design is optimized. The number of the air spring vibration isolators is four, and the four air spring vibration isolators are respectively arranged at four corners of the workpiece platform.
The air spring vibration isolator comprises a cylinder body 1, the mass changes of a load cavity and a damping cavity are researched according to a first theorem of thermodynamics, the complex stiffness of the double-cavity air spring is calculated, the natural frequency is further obtained, the shape distribution and the wall thickness of the cylinder body 1 are designed, a cylinder cover 2 covers and seals an opening of the cylinder body 1, a mechanical valve assembly 6 is fixedly arranged on the side portion of the cylinder cover 2, a partition plate 3 is transversely arranged in an inner cavity of the cylinder body 1 and divides the inner cavity of the cylinder body into an upper cavity and a lower cavity, a diaphragm 4 covers the opening of the cylinder body 1 and tightly presses and fixes the upper cavity through a support ring 5, and in the embodiment, the support ring 5 is fastened on the opening of the cylinder body 1 through a cross-connection screw and tightly clamps the edge of the diaphragm 4.
The upper chamber forms a load chamber 11, the lower chamber forms a damping chamber 12, the damping chamber 12 is provided with an air inlet 13 communicated with an external air pump and an air outlet 14 communicated with the mechanical valve assembly 6, the load chamber 11 is provided with a pressure relief port 15 communicated with the air outlet 14 through the mechanical valve assembly 6, and the external air pump inflates the damping chamber 12 and the load chamber 11 and enables the diaphragm 4 to be supported at the bottom of the cylinder cover 2 in an expanding mode.
The cylinder cover 2 is used as a supporting platform for bearing a load, and the load cavity 11 is extruded to enable the cylinder cover 2 to move up and down relative to the cylinder body 1; the bottom of the mechanical valve component 6 is provided with a trigger key 61, the side part of the cylinder body 1 is provided with a push rod 7 which is positioned below the mechanical valve component 6, the mechanical valve component 6 moves downwards along with the cylinder cover 2 and the trigger key 61 is made to touch the top end of the push rod 7, so that the internal air passage of the mechanical valve component 6 is opened and communicated, even if the load cavity is communicated with the damping cavity.
According to the air spring vibration isolators below the precise vibration isolation platform, each air spring vibration isolator can be controlled to move independently, position detection and load feedback of the cylinder cover 2 are achieved through change of the stroke of the mechanical valve assembly 6, air pressure in the cavity of the damping cavity 12 of the corresponding vibration isolator is changed, air pressure change of the damping cavity 12 directly influences load capacity of the load cavity 11 and the cavity volume of the load cavity 11, and therefore the whole vibration isolation platform can return to a balance point quickly.
As a preferred embodiment of the invention, the damping cavity 12 is further provided with an exhaust hole 16, the side part of the cylinder body 1 is further provided with a safety valve 8, the lower part of the safety valve 8 is inserted into the exhaust hole 16 through a vertical elbow 82, so that the safety valve 8 is vertically arranged, the side part of the lever cover 2 is provided with a bolt 21 positioned above the safety valve 8, and a suspension chain 9 is arranged between the bolt 21 and a pull ring switch 81 of the safety valve 8. As shown in fig. 6, when the workpiece platform vibrates strongly to cause an excessively large inclination angle, the cylinder head 2 tilts and pulls the pull ring switch 81 through the bolt 21, the safety valve 8 is opened, the damping chamber 12 is unloaded quickly, the pressure in the load chamber 11 is reduced, and the workpiece platform returns to the state before tilting quickly.
Preferably, the mechanical valve assembly 6 is a two-position three-way mechanical valve, and comprises an air passage valve body which is located inside and pushed by the trigger key 61, air vents I and II which are respectively communicated with the air outlet 14 and the pressure relief port 15, and an air vent III which is communicated with the atmosphere, wherein when the vibration isolator does not work yet, the air passage valve body is communicated with the air vent I and the air vent III, when the vibration isolator bears a load, the cylinder cover 2 moves downwards to enable the trigger key 61 to be jacked up by the ejector rod 7, and the air passage valve body moves upwards to switch the air passage to enable the air vent I and the air vent II to be communicated. And a silencer 63 is arranged on the vent III to reduce the air outlet noise of the vent III.
Further, the mechanical valve assembly 6 is fixedly mounted on the side portion of the cylinder head 2 through an L-shaped mounting plate 62, the transverse portion of the L-shaped mounting plate 62 is mounted and connected to the top of the cylinder head 2, and the mechanical valve assembly 6 is mounted on the vertical portion of the L-shaped mounting plate 62; a platform 17 extends horizontally from the side of the cylinder body 1, the mandril 7 is vertically arranged on the platform 17 through screws, and the mechanical valve assembly 6 and the mandril 7 are positioned on the same vertical axis through an L-shaped mounting plate 62 and the platform 17.
Preferably, the diaphragm 4 comprises a middle thin rubber layer and nylon cloth layers covering two sides of the thin rubber layer, wherein the thin rubber layer is made of natural rubber and is very soft, so that the rubber film diaphragm can be rapidly swelled even under the pressure of 0.1Mpa, and a sufficient supporting force is obtained; as shown in fig. 5, the diaphragm 4 has a basin shape having a horizontal plane, and when the diaphragm 4 is inflated by air, the basin shape can raise a sufficient height and be stably supported on the bottom of the cylinder cover 2 by the horizontal plane; the two sides of the thin rubber layer are covered with nylon cloth layers, so that the diaphragm can withstand repeated reciprocating without fatigue under load for millions of times, and the thin rubber layer cannot excessively expand to lose efficacy. Therefore, the quick and sensitive response of the vibration isolator can be guaranteed, and the vibration isolator has good durability.
Preferably, the side wall of the inner cavity of the cylinder body 1 is annularly provided with a step 18, the partition plate 3 is fixedly arranged on the step 18 through a screw, and a sealing layer 9 is clamped between the partition plate and the step 18. The carrier connecting block 10 is installed at the top of the cylinder cover 2, a concave position is formed in the bottom of the workpiece platform corresponding to the carrier connecting block 10, and the carrier connecting block 10 is embedded in the concave position, so that the air spring vibration isolator is installed in a limiting mode relative to the workpiece platform.
Claims (10)
1. An air spring vibration isolator characterized in that: the cylinder cover comprises a cylinder body (1), a cylinder cover (2) and a mechanical valve assembly (6), wherein the cylinder cover (2) is closed above an opening of the cylinder body (1) in a covering mode, the mechanical valve assembly (6) is fixedly mounted on the side portion of the cylinder cover (2), a partition plate (3) is transversely arranged in an inner cavity of the cylinder body (1) to divide the inner cavity of the cylinder body into an upper chamber and a lower chamber, the opening of the cylinder body (1) is covered with a diaphragm (4) and is pressed and fixed through a support ring (5) to seal the upper chamber, the upper chamber forms a load chamber (11), the lower chamber forms a damping chamber (12), the damping chamber (12) is provided with an air inlet (13) communicated with an external air pump and an air outlet (14) communicated with the mechanical valve assembly (6), the load chamber (11) is provided with a pressure relief opening (15) communicated with an air outlet (14) through the mechanical valve assembly (6), and the external air pump inflates air into the damping chamber (12) and enables the diaphragm (4) to be supported at the bottom of the cylinder cover (2) in an expanding mode; a load extrusion load cavity (11) is arranged above the cylinder cover (2) to enable the cylinder cover (2) to move up and down relative to the cylinder body (1); the bottom of the mechanical valve component (6) is provided with a trigger key (61), the side part of the cylinder body (1) is provided with a push rod (7) which is positioned below the mechanical valve component (6), and the mechanical valve component (6) moves down along with the cylinder cover (2) and enables the trigger key (61) to touch the top end of the push rod (7), so that the internal air passage of the mechanical valve component (6) is opened and communicated.
2. The air spring vibration isolator of claim 1 wherein: the damping cavity (12) is further provided with an exhaust hole (16), the side portion of the cylinder body (1) is further provided with a safety valve (8) inserted on the exhaust hole (16), the side portion of the lever cover (2) is provided with a bolt (21) located above the safety valve (8), and a hanging chain is arranged between the bolt (21) and a pull ring switch (81) of the safety valve (8).
3. The air spring vibration isolator of claim 2 wherein: the lower part of the safety valve (8) is inserted in the exhaust hole (16) through a vertical elbow (82), so that the safety valve (8) is vertically arranged.
4. The air spring vibration isolator of claim 1 wherein: the mechanical valve assembly (6) is a two-position three-way mechanical valve and comprises vent holes I and II which are respectively communicated with the air outlet (14) and the pressure relief port (15) and a vent hole III which is communicated with the atmosphere.
5. The air spring vibration isolator of claim 4 wherein: and a silencer (63) is arranged on the vent hole III.
6. The air spring vibration isolator of claim 1 wherein: the mechanical valve assembly (6) is fixedly arranged on the side part of the cylinder cover (2) through an L-shaped mounting plate (62), the transverse part of the L-shaped mounting plate (62) is arranged and connected to the top of the cylinder cover (2), and the mechanical valve assembly (6) is arranged on the vertical part of the L-shaped mounting plate (62); the lateral part of the cylinder body (1) horizontally extends to form a platform (17), and the ejector rod (7) is vertically installed on the platform (17) through a screw.
7. The air spring vibration isolator of claim 1 wherein: the diaphragm (4) is basin-shaped; the diaphragm (4) comprises a middle thin rubber layer and nylon cloth layers covering two surfaces of the thin rubber layer.
8. The air spring vibration isolator of claim 1 wherein: the side wall of the inner cavity of the cylinder body (1) is annularly provided with a step (18), the partition plate (3) is fixed on the step (11) and a sealing layer (9) is clamped between the partition plate and the step (18).
9. The air spring vibration isolator of claim 1 wherein: and a carrier connecting block (10) is installed at the top of the cylinder cover (2).
10. The utility model provides a precision vibration isolation platform, includes the work piece platform, its characterized in that: the air spring isolator of any one of claims 1-9 is supported below the work platform and has a plurality and uniform arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111199978.1A CN115247683A (en) | 2021-10-14 | 2021-10-14 | Air spring vibration isolator and precise vibration isolation platform applying same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111199978.1A CN115247683A (en) | 2021-10-14 | 2021-10-14 | Air spring vibration isolator and precise vibration isolation platform applying same |
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| Publication Number | Publication Date |
|---|---|
| CN115247683A true CN115247683A (en) | 2022-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111199978.1A Pending CN115247683A (en) | 2021-10-14 | 2021-10-14 | Air spring vibration isolator and precise vibration isolation platform applying same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107355504A (en) * | 2016-05-10 | 2017-11-17 | 上海信舒机电设备有限公司 | A kind of novel air vibration isolator |
-
2021
- 2021-10-14 CN CN202111199978.1A patent/CN115247683A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107355504A (en) * | 2016-05-10 | 2017-11-17 | 上海信舒机电设备有限公司 | A kind of novel air vibration isolator |
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