CN115247683A - Air spring vibration isolator and precise vibration isolation platform applying same - Google Patents

Abstract

The invention discloses an air spring vibration isolator, comprising a cylinder body, a cylinder cover and a mechanical valve assembly fixed on the side of the cylinder cover. The cylinder body is divided into upper and lower chambers, and the opening of the cylinder body is covered with The diaphragm seals the upper chamber to form a load chamber, the lower chamber forms a damping chamber, the damping chamber is provided with an air inlet and an air outlet, and the load chamber is provided with a pressure relief port which is connected to the air outlet through the mechanical valve assembly, and the external air pump inflates the cylinder and makes it The diaphragm is expanded and supported at the bottom of the cylinder head; the load on the top of the cylinder head can be displaced up and down relative to the cylinder body; the side of the cylinder body is provided with a push rod, and the mechanical valve assembly moves down with the cylinder head and touches the top of the push rod, so that the mechanical valve assembly opens and communicates ; Also disclosed is a precision vibration isolation platform, a plurality of the above-mentioned air spring vibration isolators are supported under the workpiece platform and evenly arranged, and each air spring vibration isolator can be independently controlled by motion, and is determined by the change of the stroke of the mechanical valve assembly. The position detection and load feedback of the cylinder head are realized to change the air pressure in the damping chamber of the corresponding vibration isolator.

Description

An air spring vibration isolator and its precision vibration isolation platform

technical field

The invention relates to the field of precision vibration isolation, in particular to a precision vibration isolation platform and an air spring vibration isolator.

Background technique

Air springs have been widely used in automobiles and railway vehicles. At the same time, they are used as vibration isolation units in measuring machines, presses, conveyors, air hammers, textile machinery, grinding machinery, and precision electronic equipment to achieve vibration isolation and noise reduction. At present, the most mainstream is the free membrane air spring. The membrane air spring controls the effective area change rate by changing the shape of the load plate connected to the membrane. Its elastic characteristic curve is ideal, and a lower natural frequency can be obtained.

A series of high-precision technical equipment such as ultra-precision machining, testing, IC manufacturing, and optical engineering are very sensitive to external vibrations, requiring corresponding vibration isolation frequency bandwidth, high vibration isolation efficiency, high sensitivity, and high precision. low frequency. At present, the vibration isolator uses a free-film air spring. Although it is also excellent, it is not too exquisite in the field of precision vibration isolation due to vibration isolation efficiency, sensitivity, precision and other reasons.

SUMMARY OF THE INVENTION

In order to overcome the deficiencies of the prior art, the present invention provides an air spring vibration isolator and a precision vibration isolation platform using the same.

The technical scheme adopted by the present invention to solve its technical problems is:

An air spring vibration isolator comprises a cylinder body, a cylinder cover closed and closed above the opening of the cylinder body, and a mechanical valve assembly fixedly mounted on the side of the cylinder head, wherein the inner cavity of the cylinder body is transversely provided with a partition plate, The inner cavity of the cylinder is divided into upper and lower chambers, the opening of the cylinder is covered with a diaphragm, and the upper chamber is closed by pressing and fixing the support ring, the upper chamber constitutes a load chamber, and the lower chamber constitutes a damping chamber, so The damping chamber is provided with an air inlet that communicates with an external air pump and an air outlet that communicates with a mechanical valve assembly, and a load chamber is provided with a pressure relief port that communicates with the air outlet through the mechanical valve assembly, and the external air pump sends to the damping chamber and the load chamber Inflate and support the diaphragm at the bottom of the cylinder head; a load is placed above the cylinder head to squeeze the load cavity so that the cylinder head can move up and down relative to the cylinder body; the bottom of the mechanical valve assembly is provided with a trigger key, and the cylinder body side is provided with a trigger key. The upper part is provided with a ejector rod under the mechanical valve assembly, the mechanical valve assembly moves down with the cylinder head and makes the trigger key touch the top of the ejector rod, so that the internal air circuit of the mechanical valve assembly is opened and communicated.

The damping chamber is also provided with an exhaust hole, the side of the cylinder body is also provided with a safety valve inserted on the exhaust hole, the side of the lever cover is provided with a bolt above the safety valve, and the bolt is connected to the safety valve. There is a hanging chain between the pull-ring switches.

The lower part of the safety valve is inserted into the exhaust hole through a vertical elbow, so that the safety valve is arranged vertically.

The mechanical valve assembly is a two-position three-way mechanical valve, which includes vent ports I and II respectively communicating with the air outlet and the pressure relief port, and vent port III communicating with the atmosphere.

A muffler is installed on the vent port III.

The mechanical valve assembly is fixedly mounted on the side of the cylinder head through an L-shaped mounting plate, the lateral portion of the L-shaped mounting plate is mounted and connected to the top of the cylinder head, and the mechanical valve assembly is mounted on the vertical portion of the L-shaped mounting plate; the A platform extends horizontally on the side of the cylinder body, and the top rod is vertically mounted on the platform by screws.

The diaphragm is in the shape of a basin; the diaphragm includes a thin rubber layer in the middle and a nylon cloth layer covering both sides of the thin rubber layer.

The side wall of the inner cavity of the cylinder is annularly provided with steps, and the partition plate is fixed on the steps and a sealing layer is sandwiched between the steps.

A carrier connection block is installed on the top of the cylinder head.

A precision vibration isolation platform includes a workpiece platform, and the above-mentioned air spring vibration isolator is supported below the workpiece platform, and the air spring vibration isolator has a plurality of them and is evenly arranged.

The beneficial effects of the present invention are as follows: the air spring vibration isolator of the present invention is abutted under the load through the cylinder head as a support platform, and rigidly supports the load, the diaphragm of the load chamber is expanded and supported under the cylinder head, and the damping chamber and the The load chamber is separated and connected independently by the mechanical valve assembly. The mechanical valve assembly moves up and down with the cylinder head and makes contact with the ejector rod located on the side of the lower cylinder block. Squeeze the load chamber, and the mechanical valve assembly moves downward and is triggered and opened by the ejector rod, so that the load chamber is connected to the damping chamber; the above-mentioned air spring vibration isolators are evenly supported under the precision vibration isolation platform of the present invention, and each air spring is vibration isolation The position detection and load feedback of the cylinder head are realized through the change of the stroke of the mechanical valve assembly to change the air pressure in the damping chamber of the corresponding vibration isolator. The air pressure change of the damping chamber directly affects the load capacity of the load chamber. , the volume of the load cavity, so that the entire vibration isolation platform can quickly return to the equilibrium point.

Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Fig. 1 is the structural schematic diagram of the precision vibration isolation platform;

Fig. 2 is the structural representation of the air spring vibration isolator;

Fig. 3 is the disassembly schematic diagram of the air spring vibration isolator;

4 is a cross-sectional view of an air spring isolator;

Fig. 5 is the schematic diagram after diaphragm expansion in Fig. 4;

FIG. 6 is a schematic view of the cylinder head tilting to open the safety valve.

Detailed ways

Referring to Figures 1 to 4, a precision vibration isolation platform includes a workpiece platform, and a plurality of air spring vibration isolators evenly arranged under the workpiece platform are supported. The arrangement of the air spring vibration isolators can be based on the actual situation. Adjust the design scheme, reduce the production cost, and optimize the appearance design. In this embodiment, there are four air spring vibration isolators, which are respectively arranged at the four corners of the workpiece platform.

The air spring isolator includes a cylinder block 1. According to the first theorem of thermodynamics, the mass change of the load cavity and the damping cavity is studied, the complex stiffness of the double cavity air spring is calculated, and the natural frequency is obtained to design the shape distribution of the cylinder block 1 and The thickness of the wall, the open top of the cylinder block 1 is covered and closed with the cylinder head 2, the side of the cylinder head 2 is fixed with a mechanical valve assembly 6, and the inner cavity of the cylinder block 1 is transversely arranged with a partition 3, which divides the cylinder cavity into In the upper and lower chambers, the opening of the cylinder body 1 is covered with a diaphragm 4 and the upper chamber is closed by pressing and fixing the support ring 5. In this embodiment, the support ring 5 is fastened on the opening of the cylinder body 1 by a threading screw. And clamp the edge of diaphragm 4.

The upper chamber constitutes a load chamber 11, and the lower chamber constitutes a damping chamber 12. The damping chamber 12 is provided with an air inlet 13 that communicates with an external air pump and an air outlet 14 that communicates with the mechanical valve assembly 6. The load chamber 11 is provided with a pressure relief port 15 to pass through. The mechanical valve assembly 6 communicates with the air outlet 14 , and the external air pump inflates the damping chamber 12 and the load chamber 11 to expand the diaphragm 4 to support the bottom of the cylinder head 2 .

The cylinder head 2 is used as a support platform to carry the load, and the load cavity 11 is squeezed to make the cylinder head 2 move up and down relative to the cylinder block 1; Below the mechanical valve assembly 6, the mechanical valve assembly 6 moves down with the cylinder head 2 and makes the trigger key 61 touch the top of the ejector rod 7, so that the internal air path of the mechanical valve assembly 6 is opened and communicated, even if the load chamber is connected to the damping chamber.

The multiple air spring vibration isolators under the precision vibration isolation platform of the present invention, each air spring vibration isolator can be independently motion controlled, and the position detection and load feedback of the cylinder head 2 can be realized through the change of the stroke of the mechanical valve assembly 6, To change the air pressure in the damping cavity 12 of the corresponding vibration isolator, the air pressure change of the damping cavity 12 directly affects the negative load capacity of the load cavity 11 and the cavity volume of the load cavity 11, so that the entire vibration isolation platform can quickly return to the equilibrium point.

As a preferred embodiment of the present invention, the damping chamber 12 is further provided with an exhaust hole 16, the side of the cylinder block 1 is further provided with a safety valve 8, and the lower part of the safety valve 8 is inserted into the exhaust hole 16 through a vertical elbow 82, so that the The safety valve 8 is arranged vertically, a bolt 21 is provided on the side of the lever cover 2 above the safety valve 8 , and a chain 9 is provided between the bolt 21 and the pull-ring switch 81 of the safety valve 8 . As shown in Figure 6, when the workpiece platform vibrates strongly and the inclination angle is too large, the cylinder head 2 is inclined and the pull-ring switch 81 is pulled through the bolt 21, the safety valve 8 is opened, the gas in the damping chamber 12 is quickly unloaded, and the pressure in the load chamber 11 is reduced. The workpiece platform quickly returns to the state before tilting.

Preferably, the mechanical valve assembly 6 is a two-position three-way mechanical valve, including an airway valve body pushed by the trigger key 61 inside, and vent ports I and II communicating with the air outlet 14 and the pressure relief port 15 respectively, and a vent communicating with the atmosphere. Port III, when the vibration isolator has not yet started to work, the airway valve body is connected to the air port I and the air port III. When the vibration isolator is loaded, the cylinder head 2 moves down so that the trigger key 61 is lifted by the ejector rod 7, and the airway The valve body moves up to switch the airway so that the ventilation port I and the ventilation port II are connected. A muffler 63 is installed on the vent III to reduce the exhaust noise of the vent III.

Further, the mechanical valve assembly 6 is fixedly mounted on the side of the cylinder head 2 through the L-shaped mounting plate 62 , the lateral portion of the L-shaped mounting plate 62 is mounted and connected to the top of the cylinder head 2 , and the mechanical valve assembly 6 is mounted on the L-shaped mounting plate 62 . On the vertical part of the cylinder block 1; a platform 17 extends horizontally on the side of the cylinder block 1, and the ejector rod 7 is vertically installed on the platform 17 by screws. on the axis.

Preferably, the diaphragm 4 includes a thin rubber layer in the middle and a nylon cloth layer covering both sides of the thin rubber layer. The thin rubber layer is made of natural rubber, which is very soft and can ensure that the rubber film diaphragm can be fast even under 0.1Mpa pressure. Bulge on the ground to obtain a sufficient support force; as shown in Figure 5, the diaphragm 4 is in the shape of a basin, which has a horizontal plane, when the diaphragm 4 is inflated by gas, it can rise to a sufficient height through the basin shape and stably pass through the horizontal plane. It is supported on the bottom of the cylinder head 2; the thin rubber layer is covered with nylon cloth layers on both sides, which can ensure that the diaphragm can withstand tens of millions of times of back and forth under load without fatigue, and the very thin thin rubber layer will not expand excessively invalid. In this way, it can not only ensure the fast and sensitive response of the vibration isolator, but also have good durability.

Preferably, a step 18 is annularly arranged on the side wall of the inner cavity of the cylinder block 1 , the partition plate 3 is fixed on the step 18 by screws, and a sealing layer 9 is sandwiched between the step 18 . A carrier connection block 10 is installed on the top of the cylinder head 2 , and a concave position is provided at the bottom of the workpiece platform corresponding to the carrier connection block 10 .

Claims (10)

1. An air spring vibration isolator, characterized in that it comprises a cylinder block (1), a cylinder head (2) that is closed and closed above the opening of the cylinder block (1), and a cylinder head (2) that is fixedly mounted on the side of the cylinder head (2). The mechanical valve assembly (6), the inner cavity of the cylinder (1) is transversely provided with a partition plate (3), which divides the inner cavity of the cylinder into upper and lower chambers, and the opening of the cylinder (1) is covered There is a diaphragm (4) and the upper chamber is closed by pressing and fixing the support ring (5), the upper chamber constitutes a load chamber (11), and the lower chamber constitutes a damping chamber (12), and the damping chamber (12) is provided with The air inlet (13) communicated with the external air pump and the air outlet (14) communicated with the mechanical valve assembly (6), the load chamber (11) is provided with a pressure relief port (15) and communicated with the air outlet through the mechanical valve assembly (6) (14), the external air pump inflates the damping chamber (12) and the load chamber (11) and makes the diaphragm (4) expand and support the bottom of the cylinder head (2); above the cylinder head (2) The load bearing cavity (11) is squeezed so that the cylinder head (2) can be displaced up and down relative to the cylinder body (1); the bottom of the mechanical valve assembly (6) is provided with a trigger key (61), and the side of the cylinder body (1) is provided with a trigger key (61). There is a mandrel (7) located below the mechanical valve assembly (6), the mechanical valve assembly (6) moves down with the cylinder head (2) and the trigger key (61) touches the top of the mandrel (7), so that the mechanical valve assembly (6) moves down The internal air path of (6) is opened and communicated. 2 . The air spring vibration isolator according to claim 1 , wherein the damping chamber ( 12 ) is further provided with an exhaust hole ( 16 ), and the side portion of the cylinder body ( 1 ) is further provided with a safety valve. 3 . (8) is inserted into the exhaust hole (16), the side of the lever cover (2) is provided with a bolt (21) located above the safety valve (8), and the bolt (21) is connected to the safety valve (8). A hanging chain is arranged between the pull-ring switches (81). 3. The air spring vibration isolator according to claim 2, characterized in that: the lower part of the safety valve (8) is inserted into the exhaust hole (16) through a vertical elbow (82), so that the safety valve (8) Vertical arrangement. 4. The air spring vibration isolator according to claim 1, characterized in that: the mechanical valve assembly (6) is a two-position three-way mechanical valve, which includes the air outlet (14) and the pressure relief port ( 15) vent ports I and II and vent port III that communicates with the atmosphere. 5. The air spring vibration isolator according to claim 4, wherein a muffler (63) is installed on the vent port III. 6 . The air spring vibration isolator according to claim 1 , wherein the mechanical valve assembly ( 6 ) is fixedly mounted on the side of the cylinder head ( 2 ) through an L-shaped mounting plate ( 62 ), and the L-shaped installation is performed. 7 . The transverse part of the plate (62) is installed and connected to the top of the cylinder head (2), and the mechanical valve assembly (6) is installed on the vertical part of the L-shaped installation plate (62); the side part of the cylinder block (1) extends horizontally with A platform (17), the top rod (7) is vertically installed on the platform (17) by screws. 7. The air spring vibration isolator according to claim 1, characterized in that: the diaphragm (4) is in the shape of a basin; the diaphragm (4) comprises a thin rubber layer in the middle and nylon covering both sides of the thin rubber layer cloth layer. 8. The air spring vibration isolator according to claim 1, characterized in that: the inner cavity side wall of the cylinder body (1) is provided with a step (18), and the baffle (3) fixes the step (18). A sealing layer (9) is sandwiched between 11) and the step (18). 9 . The air spring vibration isolator according to claim 1 , wherein a carrier connecting block ( 10 ) is installed on the top of the cylinder head ( 2 ). 10 . 10. A precision vibration isolation platform, comprising a workpiece platform, characterized in that: the air spring vibration isolator according to any one of claims 1 to 9 is supported under the workpiece platform, and the air spring vibration isolator is There are multiple and evenly arranged.

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