CN115212936A - Ultrasonic-excited micro-robot with adjustable motion direction and in-situ preparation chip thereof - Google Patents
Ultrasonic-excited micro-robot with adjustable motion direction and in-situ preparation chip thereof Download PDFInfo
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- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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Abstract
A micro-robot with adjustable motion direction of ultrasonic excitation and an in-situ preparation chip thereof belong to the field of micro-nano driving. The ultrasonic-excited micro-robot with the adjustable motion direction comprises a micro-robot main body, a flexible sharp tail I, a flexible sharp tail II and a head capturing port. The main body of the micro-robot adopts an elliptical outline streamline design, and one end of the main body of the micro-robot is connected with two flexible sharp tails with a certain included angle (beta), namely a flexible sharp tail I and a flexible sharp tail II; the other end of the micro-robot main body is provided with a head capturing port. The micro-robot and the chip prepared in situ have good biocompatibility, can be widely applied to the fields of biomedicine, chemical analysis and the like, and meet the application requirements of targeted drug delivery, in-situ manufacturing of micro-devices, storage and the like.
Description
Technical Field
The invention belongs to the field of micro-nano driving, and relates to driving and motion control of a micro-nano robot in microfluid and a preparation method thereof.
Background
In recent years, research on micro-nano robot systems has received much attention. The driving modes of the micro-nano robot comprise chemical reaction driving, magnetic field driving, optical driving, ultrasonic driving and the like. Chemical reaction driven micro-nano robot propulsion mostly depends on toxic fuels (such as H) 2 O 2 ) Or decomposition of the propellant with limited drive life. The magnetic field driven micro-nano robot generally needs to add magnetic components such as Fe or Ni, the magnetic field provides propelling force and guiding for the micro-nano robot, but generally the rotating magnetic field drive is complex in work, and drive equipment is large. Most of the optically-driven micro-nano robots achieve autonomous propulsion under Ultraviolet (UV) light or Near Infrared (NIR) light, but the UV light is harmful to human bodies, the high-intensity near infrared light can greatly change local temperature, and cell damage can be caused by heat radiation. The ultrasonic wave has tissue penetration capacity, high adjustability and biocompatibility in a MHz range, and in recent years, the ultrasonic-driven micro-nano robot shows a huge development prospect in the aspect of biomedical application.
At present, an ultrasonic-driven micro-nano robot mainly generates a propelling force by exciting gas-liquid interface vibration of micro bubbles captured by a self structure. In 2015, pennsylvania state university proposed an ultrasonically driven microrobot consisting of a rectangular polymer body with one or more conical grooves. When the microrobot is immersed in the liquid, the air bubbles can be trapped in the tapered recesses, and the position of the air bubbles determines whether the microrobot achieves linear or rotational motion. In 2016, university of pittsburgh proposed an ultrasonically driven cylindrical bubble micro-robot. The characteristic that the bubbles matched with the resonance frequency can generate strong oscillation and generate larger propelling force is utilized, a plurality of bubble capturing microtubes with different lengths are arranged and manufactured on a single micro-robot, and the two-dimensional motion is realized by controlling the excitation frequency of a sound field. 2019, state university of pennsylvania proposed an ultrasonic-driven half-capsule-shaped micro-robot which is manufactured by adopting a three-dimensional direct lithography and metal deposition combined technology and can control the movement direction of the micro-robot in a three-dimensional space through an external magnetic field.
The ultrasonic-driven micro-nano robot is propelled by ultrasonically exciting micro-bubbles, and has the advantages of large driving force, convenience in operation, good biocompatibility and the like, but the micro-bubbles in the ultrasonic-driven micro-nano robot cannot keep the size unchanged for a long time in a liquid environment, and cannot stably move for a long time in the liquid environment; in addition, the micro-nano robot driven only by ultrasound has poor adjustability of the motion direction, mostly can only realize linear or rotary motion, and can only realize the control of the motion direction by combining other energy fields.
Disclosure of Invention
Aiming at the defects of poor adjustability of the motion direction, weak conveying capacity, missing detection function, easy loss of in-situ manufacturing and the like of the existing ultrasound-driven micro-nano robot, the invention provides an ultrasound-excited micro robot with adjustable motion direction and simultaneously provides an in-situ preparation chip of the micro robot.
In order to achieve the purpose, the ultrasonic excitation micro-robot with adjustable motion direction adopts the following technical scheme:
the ultrasonic-excited micro-robot with the adjustable motion direction comprises a micro-robot main body, a flexible sharp tail I, a flexible sharp tail II and a head capturing port.
The main body of the micro-robot adopts an elliptical outline streamline design, and one end of the main body of the micro-robot is connected with two flexible sharp tails with a certain included angle (beta), namely a flexible sharp tail I and a flexible sharp tail II; the other end of the micro-robot main body is provided with a head capturing port.
The major axis of the ellipse of the micro-robot main body is 70-90 μm, and the minor axis is 35-45 μm;
the connection point of the flexible sharp tail I of the micro-robot and the main body of the micro-robot is an elliptic top point and a central point on a short shaft;
the connecting point of the flexible sharp tail part II of the micro-robot and the main body of the micro-robot is the lower vertex and the central point of the elliptical short shaft;
the length of the flexible sharp tail part I is 150-250 micrometers, the length of the flexible sharp tail part II is 250-400 micrometers, and the ratio of the length of the flexible sharp tail part I to the thickness of the micro-robot is 7:1;
the length difference between the flexible sharp tail I and the flexible sharp tail II is 100 mu m;
the included angles (alpha) between the flexible sharp tail I and the flexible sharp tail II and the horizontal line of the top points of the short shafts (upper and lower) of the main body of the micro robot are respectively 0-4 degrees;
the included angle (beta) between the flexible sharp tail part I and the flexible sharp tail part II is processed to form a fillet, and the radius of the fillet is 3-5 mu m;
the head capturing port of the micro-robot is a trapezoid body (sharp edge round corner processing, the radius of a round corner is 2 mu m), the width of an opening (upper bottom) is 30-60 mu m, and the size of the trapezoid body is in proportion to the width of the upper bottom: width of lower bottom: height =5:2:4, the length of the trapezoid body is the same as the thickness of the microcomputer.
The working principle of the micro-robot is as follows: based on the nonlinear acoustic principle of microscale, the flexible sharp tail oscillates under the ultrasonic excitation and generates a pair of vortexes rotating in opposite directions around the tip, and the local motion of the fluid around the flexible sharp tail reacts on the micro-robot to generate a propelling force in the opposite direction of the fluid, so that the micro-robot is driven to move.
The use method of the micro-robot comprises the following steps: the micro-robot is placed in water, and an ultrasonic sound source is adopted to excite the micro-robot in the water. The flexible sharp tail has a large oscillation at the resonant frequency, which in turn converts the tail oscillation into propulsive force. The oscillation of one flexible sharp tail can be selectively caused to be dominant to drive or the two flexible sharp tails can be driven in an equilibrium manner by changing the ultrasonic excitation frequency. When one flexible sharp tail part is mainly driven by oscillation, the micro-robot can realize steering motion; when the two flexible sharp tails are driven in a balanced manner, the micro-robot can realize linear motion. In addition, the excitation frequency can be adjusted in the motion process to enable the two flexible sharp tails to alternately take the leading drive, and different motion tracks can be further realized by adjusting the leading drive time of the two flexible sharp tails.
The head capturing port of the micro robot completes the capturing and conveying of the target object under the real-time adjustable motion.
Adding a functional material into a precursor solution manufactured by the micro-robot: fluorescein (metacryloxythyl thiocarbamoyl rhodomine B). By utilizing the characteristics of the fluorescein, the calibration detection of the environmental temperature change can be realized.
The preparation method of the micro-robot comprises the following steps: and (3) curing the precursor solution manufactured by the micro robot by UV illumination by adopting a photoetching technology to realize in-situ preparation.
The technical scheme adopted by the in-situ preparation chip of the ultrasonic-excited micro-robot with the adjustable motion direction is as follows:
the in-situ preparation chip of the micro robot comprises a PDMS chip, a PDMS film and a glass substrate; the PDMS chip is provided with a liquid inlet, a liquid outlet, a grid wall, a grid and a main runner.
The PDMS film is positioned on the glass substrate, and the PDMS chip is positioned on the PDMS film;
the diameters of the liquid inlet and the liquid outlet are the same, are 300-500 mu m, and penetrate through the PDMS chip;
the width of the main runner is 1000 μm 1200 μm, the length is 12000 μm 20000 μm, one end of the main runner is communicated with the liquid inlet, and the other end is communicated with the liquid outlet;
the depths of the main runner and the grids are the same and are 20 mu m and 50 mu m;
the height of the grid wall is the same as the depth of the grid, and two adjacent grid walls form a grid;
the length of the grid wall and the grid is 800-1000 μm, the width of the grid wall is 100-120 μm, and the width of the grid is 30-80 μm; the distance between the grid wall and the center of the grid and the liquid inlet (liquid outlet) is 2000 mu m.
The in-situ preparation chip is manufactured by adopting micro-processing technologies such as photoetching, pouring, bonding and the like.
The PDMS film has the function of forming an unpolymerized oxygen inhibition layer near the PDMS film when the micro-robot is manufactured by utilizing the oxygen permeability of PDMS, so that the micro-robot can freely move under the ultrasonic excitation.
The effect of bars wall, grid is for avoiding micro-robot to make when accomplishing the back washing along with the flush fluid outflow sprue.
Compared with the prior art, the invention has the following beneficial effects:
(1) The motion direction of the micro-robot can be adjusted in real time, and the real-time adjustment of the motion direction can be realized by adjusting the ultrasonic frequency to selectively excite the oscillation of the flexible sharp tail;
(2) The micro-robot has good conveying capacity, and can capture and target-convey particles in some microfluids by combining with a real-time adjustable movement direction;
(3) The micro-robot has a certain micro-fluid environment detection function, and can realize calibration detection on environmental temperature change by adding fluorescein into a precursor solution manufactured by the micro-robot;
(4) The in-situ preparation chip of the micro-robot is arranged in the micro-robot, has a certain in-situ preparation micro-robot storage function, can realize in-situ storage of the micro-robot with various sizes by changing the width of the grid, and avoids loss in the washing process;
(5) The micro-robot and the chip prepared in situ have good biocompatibility, can be widely applied to the fields of biomedicine, chemical analysis and the like, and meet the application requirements of targeted drug delivery, in-situ manufacturing of micro-device storage and the like.
Drawings
FIG. 1: the structure of the micro robot is shown schematically;
FIG. 2: the invention discloses a streamline structure design drawing of a micro-robot;
FIG. 3: the invention is a schematic diagram of the preparation process of the microrobot;
FIG. 4 is a schematic view of: the invention is a schematic diagram of the motion mode of the micro robot;
FIG. 5: the invention prepares the appearance view of the chip in situ;
FIG. 6: preparing a first chip sectional view (the section is a horizontal plane passing through a main runner of a PDMS chip) in situ;
FIG. 7: the invention prepares the chip cross section two (the cross section is the vertical plane of the axes of the liquid inlet and the liquid outlet) in situ;
FIG. 8: the invention prepares the chip preparation process diagram one in situ;
FIG. 9: the invention prepares the chip preparation process diagram II in situ;
FIG. 10: the invention prepares the chip preparation process diagram III in situ;
FIG. 11: the invention prepares the chip preparation process diagram in situ four;
FIG. 12: the invention prepares the chip preparation process flow diagram five in situ;
FIG. 13: the invention prepares the chip preparation process diagram six in situ;
FIG. 14: the invention prepares the chip preparation process flow diagram seven in situ;
in the figure: 1. the micro-robot comprises a head capturing port, 2 a micro-robot main body, 3 a flexible sharp tail I, 4 a flexible sharp tail II, 5 a horizontal line included angle alpha between the flexible sharp tail I and a vertex on a short shaft of the micro-robot main body, 6 an included angle beta between the flexible sharp tail I and the flexible sharp tail II, 7 a linear motion mode, 8 a right-turning motion mode, 9 a left-turning motion mode, 10.PDMS chips, 11.PDMS films, 12 glass substrates I, 13, a liquid inlet, 14 a liquid outlet, 15 grid walls, 16 grids, 17 an oxygen inhibition layer, 18 a main runner, 19 glass substrates II, 20.SU 8 negative glue, 21 a mask, 22.SU 8 glue male molds, 23 rectangular groove molds and 24.PDMS mixtures.
Detailed Description
For the understanding of those skilled in the art, the present invention will be further described with reference to the accompanying drawings, and the embodiments are provided only for explaining the present invention and not for limiting the scope of the present invention.
The ultrasonic-excited micro-robot with adjustable motion direction is manufactured by adopting UV photoetching technology, and the attached figure 3 is a specific process flow:
the method comprises the following steps: preparing a precursor solution:
(1) The precursor solution for manufacturing the micro-robot comprises the following components in percentage by weight: 40% (V/V) polyethylene glycol diacrylate (PEGDA 700), 30% (V/V) polyethylene glycol diacrylate (PEGDA 200), 15% (V/V) photoinitiator (2-hydroxy-2-methyl-1-phenyl-1-propanone), 12% (V/V) TE buffer (100 TE), 3% (V/V) fluorescein (metacryloxythyl thiocarbamoyl rhodamine B);
(2) The preparation process of the precursor solution for manufacturing the micro-robot comprises the following steps:
(a) Sequentially measuring the solution into a beaker by using a micro-injector according to the proportion;
(b) Fully mixing for 3-5min by using a magnetic stirrer;
(c) Standing in a vacuum box for 30-60min to obtain a precursor solution manufactured by the micro-robot;
step two: injecting a precursor solution:
(1) Taking out the precursor solution for manufacturing the micro-robot from the beaker through an injector for temporary storage;
(2) Injecting the raw materials into a main flow channel 18 of the in-situ preparation chip at a constant speed through an injection pump, and filling the main flow channel 18;
step three: photoetching in-situ manufacturing:
(1) The glass surface of a glass substrate I12 for preparing the chip in situ is attached to a mask of a micro-robot, and a main runner 18 and a design pattern are aligned;
(2) Placing the in-situ preparation chip and the mask pattern area of the micro-robot under the objective lens of the fluorescence microscope;
(3) The UV light is focused by a 10-time objective lens, and the pattern of the mask plate is transferred into a main runner 18 of an in-situ prepared chip;
(4) The exposure time is 70s, and the solution in the exposure area of the precursor solution is crosslinked and solidified to form a micro-robot;
step four: washing with absolute ethyl alcohol:
(1) Washing the in-situ preparation chip main flow channel 18 by using an absolute ethanol solution containing 0.05% (V/V) tween 20 through an injection pump until the unpolymerized precursor solution is completely removed;
(2) And (4) flushing the in-situ preparation chip main runner 18 again by using deionized water through an injection pump to obtain the monodisperse micro-robot.
In the attached figure 4, several motion modes of the ultrasonic-excited micro-robot with the adjustable motion direction comprise a linear motion mode 7 (the flexible sharp tail I and the flexible sharp tail II are driven in an equilibrium manner), a right-turn motion mode 8 (the flexible sharp tail II is driven in a leading manner), a left-turn motion mode 9 (the flexible sharp tail I is driven in a leading manner) or a motion mode (the ultrasonic excitation frequency is changed) obtained by superposing the motions.
The PDMS chip 10 of the in-situ chip is manufactured by adopting SU 8 type negative photoresist to manufacture a male mold and Polydimethylsiloxane (Polydimethylsiloxane) injection molding process, and the specific process flow is as follows:
(1) FIG. 8 shows that the glass substrate II 19 is a glass slide, washed with deionized water and baked for 30min on a glue baking table at a temperature of 110 ℃;
(2) FIG. 9 is a drawing, in which a layer of SU 8 negative glue 20 is spin-coated on a glass substrate II 19, and the thickness of the glue layer is 20 μm-50 μm;
(3) Pre-baking: firstly baking for 30min on a constant-temperature glue drying table at 65 ℃, then baking for 60min on a constant-temperature glue drying table at 95 ℃, and naturally cooling to room temperature to obtain cured SU-8 negative glue 20;
(4) FIG. 10, a mask 21 is placed on the upper surface of the cured SU 8 negative photoresist 20 and pressed tightly, and exposed by an exposure machine with UV light intensity of 5mW/cm 2 Exposure time 2min30s;
(5) Figure 11, post-baking: firstly baking for 15min on a constant-temperature glue drying table at 65 ℃, then baking for 40min on a constant-temperature glue drying table at 95 ℃, then naturally cooling to room temperature, and finally, after ultrasonic development and deionized water cleaning, leaving a raised SU 8 glue male die 22 structure on a glass substrate II 19, namely a master plate;
(6) Fully mixing Polydimethylsiloxane (Polydimethylsiloxane) and a curing agent (Dow Corning SYLRARD 184) according to a mass ratio of 10 to 1, and vacuumizing for 30min by using a vacuum box to obtain a PDMS mixture 24;
(7) FIG. 12, the master plate is placed in a rectangular groove mold 23 with the same size as the glass substrate II 19, a PDMS mixture 24 is poured, and the mixture is baked for 30min at a constant temperature of 90 ℃ until the mixture is completely cured;
(8) Referring to FIG. 13, the solidified PDMS mixture 24 is peeled off from the glass substrate II 19, and holes are punched at the inlet 13 and the outlet 14 by using a biopsy punch, so as to obtain the PDMS chip 10.
The in-situ preparation chip is packaged by adopting an oxygen plasma bonding process, and the specific process flow is as follows:
(1) FIG. 14, the glass substrate I12 is a 100 μm glass cover glass, and the PDMS mixture 24 is coated on the glass substrate I12 for 1min at 1000rpm by using a spin coater;
(2) Baking the glass substrate I12 coated with the PDMS mixture 24 for 30min in a constant-temperature glue drying table at 65 ℃ to form a PDMS film 11 adhered to the glass substrate I12, namely a PDMS coating cover glass;
(3) Carrying out oxygen plasma treatment on the bonding surface of the PDMS chip 10 and the surface of the PDMS film 11 of the PDMS coating cover glass;
(4) Mutually attaching the bonding surface of the PDMS chip 10 and the surface of the PDMS film 11 of the PDMS coating cover glass, and pressing until the two surfaces are completely attached;
(5) And (3) placing the bonded PDMS chip 10 and the PDMS coating cover glass on a constant-temperature glue drying table at 65 ℃ for heating and pressurizing for 12h to complete bonding of the PDMS chip 10 and the PDMS coating cover glass, so as to obtain the in-situ preparation chip of the micro-robot.
Compared with the prior art, the invention provides the ultrasonic-excited micro robot with the adjustable motion direction and the in-situ preparation chip thereof. The micro-robot provided by the invention utilizes ultrasonic to excite the flexible sharp tail to oscillate so as to generate the propelling force, wherein the flexible sharp tail has better stability compared with micro-bubbles, and the long-term stable work and the accuracy of the motion process of the micro-robot in a liquid environment can be ensured. The micro-robot has real-time adjustable motion direction and certain conveying capacity and detection capacity. The in-situ preparation chip of the micro-robot is arranged in the micro-robot and has a storage function for the in-situ preparation of the micro-robot. In addition, the micro-robot can design micro-robots with different motion forms (such as a single-tail type straight micro-robot, a symmetrical double-tail type straight micro-robot and the like) by controlling the size and the arrangement of the flexible sharp tail.
Claims (9)
1. An ultrasound-excited micro-robot with adjustable motion direction, which is characterized in that: comprises a micro-robot main body, a flexible sharp tail I, a flexible sharp tail II and a head capturing port;
the micro-robot main body is designed in an oval outline streamline manner, and one end of the micro-robot main body is connected with two flexible sharp tails which form an included angle beta, namely a flexible sharp tail I and a flexible sharp tail II; the other end of the micro robot main body is provided with a head capturing port;
the major axis of the ellipse of the micro-robot main body is 70-90 μm, and the minor axis is 35-45 μm;
the connection point of the flexible sharp tail I of the micro-robot and the main body of the micro-robot is an elliptic top point and a central point on a short shaft;
the connecting point of the flexible sharp tail part II of the micro-robot and the main body of the micro-robot is the lower vertex and the central point of the elliptical short axis.
2. The ultrasonically excited micro-robot with adjustable motion direction of claim 1, wherein:
the length of the flexible sharp tail I is 150-250 micrometers, the length of the flexible sharp tail II is 250-400 micrometers, and the ratio of the length of the flexible sharp tail I to the thickness of the micro-robot is 7:1.
3. the ultrasonically-actuated micro-robot with adjustable direction of motion of claim 1, wherein:
the difference between the lengths of the flexible sharp tail I and the flexible sharp tail II is 100 mu m.
4. The ultrasonically-actuated micro-robot with adjustable direction of motion of claim 1, wherein:
the included angles of the flexible sharp tail I and the flexible sharp tail II with the horizontal line of the short shaft vertex of the micro robot main body are the same and are 0-4 degrees.
5. The ultrasonically-actuated micro-robot with adjustable direction of motion of claim 1, wherein:
and an included angle beta between the flexible sharp tail I and the flexible sharp tail II is processed into a fillet, and the radius of the fillet is 3-5 mu m.
6. The ultrasonically excited micro-robot with adjustable motion direction of claim 1, wherein:
the head capturing port of the micro-robot is a trapezoid body, sharp edges of the trapezoid body are subjected to chamfering treatment, the radius of a fillet is 2 mu m, the width of an opening, namely the upper bottom, is 30-60 mu m, and the size of the trapezoid body is in proportion to the width of the upper bottom: width of lower bottom: height =5:2:4, the length of the trapezoid body is the same as the thickness of the microcomputer.
7. The ultrasonically excited micro-robot with adjustable motion direction of claim 1, wherein:
the micro-robot is based on the micro-scale nonlinear acoustic principle, the flexible sharp tail part oscillates under ultrasonic excitation, a pair of vortexes rotating in opposite directions are generated around the tip part, the local motion of fluid around the flexible sharp tail part reacts on the micro-robot, a propelling force in the opposite direction of the fluid is generated, and then the micro-robot is driven to move.
8. The ultrasonically-actuated micro-robot with adjustable direction of motion of claim 1, wherein:
the use method of the micro-robot comprises the following steps: placing the micro-robot in water, and exciting the micro-robot in the water by adopting an ultrasonic sound source; the flexible sharp tail has larger oscillation under the resonance frequency, so that the tail oscillation is converted into the propelling force; the oscillation of one flexible sharp tail is mainly driven or the two flexible sharp tails are driven in an equilibrium manner by changing the ultrasonic excitation frequency selectivity; when one of the flexible sharp tail parts is mainly driven by oscillation, the micro-robot realizes steering motion; when the two flexible sharp tails are driven in a balanced manner, the micro-robot realizes linear motion; or the excitation frequency is adjusted in the motion process to enable the two flexible sharp tails to alternately take the leading drive, and different motion tracks are realized by adjusting the leading drive time of the two flexible sharp tails;
the head capturing port of the micro robot completes the capturing and conveying of the target object under the real-time adjustable motion.
9. An ultrasonic excitation movement direction adjustable micro-robot in-situ preparation chip is characterized in that:
the in-situ preparation chip comprises a PDMS chip, a PDMS film and a glass substrate; the PDMS chip is provided with a liquid inlet, a liquid outlet, a grid wall, a grid and a main runner;
the PDMS film is positioned on the glass substrate, and the PDMS chip is positioned on the PDMS film;
the diameters of the liquid inlet and the liquid outlet are the same, are 300-500 mu m, and penetrate through the PDMS chip;
the width of the main runner is 1000 mu m and 1200 mu m, the length of the main runner is 12000 mu m and 20000 mu m, one end of the main runner is communicated with the liquid inlet, and the other end of the main runner is communicated with the liquid outlet;
the depths of the main runner and the grids are the same and are 20 mu m and 50 mu m;
the height of the grid walls is the same as the depth of the grids, and two adjacent grid walls form a grid;
the length of the grid wall and the grid is 800-1000 μm, the width of the grid wall is 100-120 μm, and the width of the grid is 30-80 μm; the distance between the grid wall and the grid and the center of the liquid inlet is 2000 mu m.
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|---|---|---|---|---|
| RU2218191C2 (en) * | 2002-04-11 | 2003-12-10 | Научно-исследовательский институт радиоэлектроники и лазерной техники Московского государственного технического университета им. Н.Э.Баумана | Endovasal mini robot |
| JP2005238339A (en) * | 2004-02-24 | 2005-09-08 | Chugoku Electric Power Co Inc:The | Automatic traveling robot using hair-like body as propulsion |
| WO2017105368A1 (en) * | 2015-12-15 | 2017-06-22 | Uvet Huseyin | Micro robot system |
| CN113401863A (en) * | 2021-06-07 | 2021-09-17 | 南方科技大学 | Magnetic micro-nano robot and preparation method and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2218191C2 (en) * | 2002-04-11 | 2003-12-10 | Научно-исследовательский институт радиоэлектроники и лазерной техники Московского государственного технического университета им. Н.Э.Баумана | Endovasal mini robot |
| JP2005238339A (en) * | 2004-02-24 | 2005-09-08 | Chugoku Electric Power Co Inc:The | Automatic traveling robot using hair-like body as propulsion |
| WO2017105368A1 (en) * | 2015-12-15 | 2017-06-22 | Uvet Huseyin | Micro robot system |
| CN113401863A (en) * | 2021-06-07 | 2021-09-17 | 南方科技大学 | Magnetic micro-nano robot and preparation method and application thereof |
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