CN205929438U - Controllable supersound droplet of spray angle sprays vibration material disk device - Google Patents

Abstract

The utility model relates to a controllable supersound droplet of spray angle sprays vibration material disk device belongs to the vibration material disk field. The pedestal mounting sprays the pond and installs on the base in below, sprays and installs focused ultrasound transducer in the pond, and the base plate is fixed and is sprayed the pond top holding piece platform below and be located, holds the piece platform to install on Z is to the workstation, and Z installs on the base to the workstation, sprays the pond and communicates each other with the liquid storage tank, and high -accuracy syringe pump is continuous with the pay -off head, the focus supersound makes liquid overcome surface tension and sprays the droplet from the liquid level, and 4 focus ultrasound transducers's through computer control focused ultrasound transducer power is mutually supported and then is changed liquid drop outgoing angle, sprays to the different positions of base plate, the printing of the different position points of base plate is accomplished to the different outgoing angle of Z axle motion platform cooperation. The utility model provides high printing precision, the printing shower nozzle need not used to performances such as the physics of the part of guaranteeing to take shape, chemistry, the pollution of having avoided the fluent material with wash the difficulty.

Description

The controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle

Technical field

This utility model belongs to material increasing field, is related to a kind of increasing material manufacturing device, particularly to a kind of spray angle Controlled ultrasonic droplet ejection increasing material manufacturing device.

Background technology

At present, various increasing material manufacturing Apparatus and method fors continue to bring out, for the increases material manufacturing technology of fluent material Photocuring increases material manufacturing technology, digital optical processing increases material manufacturing technology (DLP), droplet ejection is had to increase material technology, photocuring increases material Manufacturing technology and digital optical processing increases material manufacturing technology (DLP) are only used for liquid photosensitive resin material increasing material manufacturing, apply material Material is limited, and droplet ejection increases material manufacturing technology can be sprayed multiple material drop and be carried out increasing material manufacturing, before having wide application Scape.

The principle of typical droplet ejection increases material manufacturing technology has pneumatic type, mechanical type, thermal bubble type, piezoelectric type etc. at present：

1) increasing material manufacturing of pneumatic type droplet ejection passes through to control compressed gas to equipped with the expects pipe of fluent material or needle tubing Metered injection is realized in pressure effect.It is applied to extensive fluent material, the size of injection drop depends on the effect of compressed gas Pressure size and time length.But gas volume increases pressure reduction, the hysteresis quality of gas and compressibility meeting in course of injection Lead to fluent material in the injection delay of nozzle, response speed is slack-off, and concordance also changes.

2) increasing material manufacturing of mechanical type droplet ejection pass through mechanical movement (piston movement, screw rod rotation etc.) by fluent material from Shower nozzle is extruded and is sprayed to substrate, and liquid-drop diameter and speed are affected it is adaptable to high viscous by nozzle diameter and mechanical movement The injection of degree liquid, but have moving component due in cavity, there is mechanical wear and impact, fluent material property is it may happen that become Change.

3) increasing material manufacturing of hot bubble type droplet ejection produces bubble by local heating, and drop is sprayed by pressure in bubbles effect Reach substrate and realize increasing material manufacturing process, the method is limited larger, blasting materials easy generation physics in heating process by material Or the change of chemical property, impact accuracy of spray and drip molding quality.

4) piezoelectric microsphere injection increasing material manufacturing makes piezoelectric ceramics produce displacement or mechanical vibration by potential pulse, leads to Expects pipe or needle tubing internal pressure change, and the pressure of generation makes fluent material overcome surface tension and be sprayed by nozzle, arrives Reach substrate and realize increasing material manufacturing, but liquid-drop diameter is limited immutable by shower nozzle and shower nozzle easily occurs blocking not easy cleaning, safeguards Relatively costly.

At present, there is injection liquid-drop diameter and be subject to shower nozzle to be limited the easily blocking of immutable, shower nozzle clearly in droplet ejection increasing material manufacturing Wash that inconvenience, droplet jet direction be immutable, drip molding rocks, cannot use extensive fluent material during increasing material manufacturing Shortcoming；Focus on ultrasonic to have an energy little, the features such as contactless, carry out increasing material manufacturing, energy using focusing on ultrasonic droplet ejection technology Enough realize pollution-free, contactless droplet ejection increasing material manufacturing in high precision, injection direction and the angled microdroplet pole of liquid level Rocking of liquid surface and drip molding is decreased on big degree, improves printing precision and forming quality.

Content of the invention

This utility model provides a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle, most of micro- to solve Drip that present in injection increasing material manufacturing process precision is low, nozzle high cost, the problems such as easily block and clear up inconvenience.

This utility model adopts the technical scheme that：Including base, Z-direction workbench, high-accuracy syringe pump, focus on ultrasonic changing Energy device, substrate, wafer-supporting platform, liquid container, feed point, described floor installation is arranged in bottom, the injection pond of liquid container On base, injection is provided with focused transducer in pond, and substrate is fixed on below wafer-supporting platform and is located above injection pond, holds piece Platform is arranged on Z-direction workbench, and Z-direction workbench is arranged on base, and the liquid storage tank of injection pond and liquid container is interconnected, high Precise injection pump is connected with feed point；

Described focused transducer, comprises 4 identical focusing ultrasonic vibrators, and is 90 ° of sector structures, And constitute complete circle by with absorbing material, and have common focus, and divided by absorbing material between 4 focusing ultrasonic vibrators Separate, autonomous working does not interfere with each other, absorbing material and focusing ultrasonic vibrator are arranged in high impedance layer, and fin is arranged on high resistant It is connected below anti-layer and with water cooling tube, sealing ring is located above fin, and shell is located above sealing ring；

Described focusing ultrasonic vibrator includes：PZT piezoelectric ceramics, upper nickel electricity level, lower nickel electrode, Parylene coating, sky Compression ring；PZT piezoelectric ceramics upper surface is all coated with nickel electrode, lower surface is coated with lower nickel electrode, and Parylene coating is located at upper Above nickel electrode, and between Parylene coating and upper nickel electrode, there is air ring；

Described air ring structure is：Parylene coating constitutes Fresnel lens with air ring, meets following relationship Formula：

Wherein：K-th air ring external diameter beK-th air ring internal diameter beL is to focus on ultrasonic vibrator focal length, that is, gather To the distance of liquid level, λ is ultrasonic wavelength in fluent material to burnt ultrasonic vibrator, k=1,2,3,4 ....

The structure of described liquid container is：Injection at the bottom of pond portion and injection at the bottom of pond portion adopt the pipeline of a diameter of 400um to connect Connect, and meet law of connected vessels.

This utility model aims to overcome that the shortcoming of current droplet ejection increasing material manufacturing, by using the ultrasonic microdroplet of focusing It is low that ejector principle which solves precision present in most of droplet ejection increasing material manufacturing processes, nozzle high cost, easily stifled The problems such as plug and cleaning inconvenience, also keep higher printing effect simultaneously；Focusing involved by this utility model device simultaneously surpasses Sonic transducer is capable of the impact point that microdroplet directional inclination sprays to substrate, by reducing the mobile minimizing drip molding of substrate Rock, precisely shape and stable formation beneficial to required drip molding.

The utility model has the advantages that structure is novel, using focusing on ultrasonic droplet ejection technology, using focusing ultrasonic vibrator Focal point ultrasonic pressure, as droplet jet driving force, solves shower nozzle pollution and difficult cleaning of problem it is achieved that noncontact The ultrasonic injection increasing material manufacturing of formula no shower nozzle；Supersonic frequency can be selected according to manufacture accuracy of spray and jet velocity, takes into account height Efficiency and two aspects of high accuracy；Can be used for biological tissue's increasing material manufacturing and enable being precisely controlled of individual cells；Focus on super Four focusing ultrasonic vibrator co-ordinations of sonic transducer, realize the inclination injection in droplet jet direction and liquid level adjustable angle.

This utility model can achieve the controllable ultrasonic droplet ejection increasing material manufacturing of spray angle, and achievable metal glass coagulates Electrocondution slurry, low temperature liquid metal and the fluids with certain viscosity such as glue, cell suspending liquid, industrial slurry, conductive silver paste The increasing material manufacturing of material, provides increasing material manufacturing method for multiple material.

Brief description

Fig. 1 is overall structure diagram of the present utility model；

Fig. 2 is the sectional view of this utility model liquid container；

Fig. 3 is the external structure schematic diagram of this utility model focused transducer；

Fig. 4 is the explosive view of this utility model focused transducer；

Fig. 5 is that this utility model focuses on ultrasonic vibrator structural representation；

Fig. 6 is this utility model focused transducer top half sectional view；

Fig. 7 is the sectional view of this utility model focused transducer；

Fig. 8 (a) is focus stress diagram of the present utility model；

Fig. 8 (b) is the projection in three directions for this utility model F power.

Specific embodiment

Including base 1, Z-direction workbench 2, high-accuracy syringe pump 3, focused transducer 4, substrate 5, wafer-supporting platform 6, liquid Container 7, feed point 8, described base 1 is arranged on bottom, and the injection pond 702 of liquid container 7 is arranged on base 1, sprays pond Focused transducer 4 is installed in 702, substrate 5 is fixed on wafer-supporting platform 6 lower section and is located above injection pond 702, wafer-supporting platform 6 It is arranged on Z-direction workbench 2, Z-direction workbench 2 is arranged on base 1, liquid storage tank 701 phase of injection pond 702 and liquid container 7 Intercommunicated, high-accuracy syringe pump 3 is connected with feed point 8；

Described focused transducer 4, comprises 4 identical focusing ultrasonic vibrators 401, and is 90 ° of sectors Structure, and constitute complete justifying and have common focus by with absorbing material 407, and pass through between 4 focusing ultrasonic vibrators 401 Absorbing material 407 separates, and autonomous working does not interfere with each other, and absorbing material 407 and focusing ultrasonic vibrator 401 are arranged on high impedance layer On 405, fin 402 is arranged on high impedance layer 405 lower section and is connected with water cooling tube 403, and sealing ring 406 is located at fin 402 Top, shell 404 is located above sealing ring 406；

Described focusing ultrasonic vibrator 401 includes：PZT piezoelectric ceramics 40101, upper nickel electricity level 40102, lower nickel electrode 40103, Parylene coating 40104, air ring 40105；PZT piezoelectric ceramics 40101 upper surface be all coated with nickel electrode 40102, under Surface is coated with lower nickel electrode 40103, and Parylene coating 40104 is located above upper nickel electrode 40102, and Parylene applies There is air ring 40105 between layer 40104 and upper nickel electrode 40102；

Described air ring 40105 structure is：It is saturating that Parylene coating 40104 and air ring 40105 constitute Fresnel Mirror, meets following relationship：

Wherein：K-th air ring external diameter beK-th air ring internal diameter beL is to focus on ultrasonic vibrator focal length, that is, gather To the distance of liquid level, λ is ultrasonic wavelength in fluent material to burnt ultrasonic vibrator, k=1,2,3,4 ....

The structure of described liquid container 7 is：Injection pond 702 bottom and injection pond 701 bottom adopt a diameter of 400um's Pipeline connects, and meets law of connected vessels；

A kind of controlled ultrasonic droplet ejection increasing material manufacturing method of spray angle, comprises the following steps：

1) set up the threedimensional model of drip molding；

2) according to step 1) in model prepare needed for fluent material；

3) record step 2 using viscometer and densimeter) middle liquid viscosity ν, the fluid density ρ preparing fluent material, root The locus being located according to printing precision, impact point and liquid viscosity ν, fluid density ρ determine that 4 focusing ultrasonic vibrators are respective Operating frequency f, electrical power W₁、W₂、W₃、W₄；

4) produce drive signal and drive four of focused transducer to focus on ultrasonic vibrator co-ordination；

5) 4 focusing ultrasonic pressure at common focus for the ultrasonic vibrator 401 are overlapped mutually, and drive focal point drop edge super Acoustic pressure power resultant direction is at a certain angle：α, beta, gamma projects and reaches point P (x, y, z) on substrate：

Wherein

Z=H；

Wherein, substrate 5 is H away from liquid level, 4 focusing ultrasonic vibrator 401 electrical power W₁、W₂、W₃、W₄Value can basis The above-mentioned relation formula of electrical power and P (x, y, z) takes out one group of W₁、W₂、W₃、W₄Meet above-mentioned relation formula, four part excess sound pressures Power and X-Y plane angle are θ, and angle theta is determined by focusing on ultrasonic vibrator 401 manufacture process, and can test for definite value and record, Jiao Point area is S, focuses on ultrasonic vibrator 401 conversion efficiency and is η₁, the acoustic efficiency of Parylene coating 403 is η₂；

6) it is iteratively repeated step 3) to step 5), construct required drip molding；

Described fluent material, including conductive paste such as metal glass gel, cell suspending liquid, industrial slurry, conductive silver pastes Material, low temperature liquid metal and the fluent material with certain viscosity.

Wherein, during focused transducer 4 work, focus area is S, the transducing of 4 four parts of focused transducer Efficiency is η₁, electrical power is respectively W₁、W₂、W₃、W₄, the acoustic efficiency of Parylene coating 403 is η₂, substrate 5 is away from liquid level It is highly H, fluent material density is ρ, and ultrasonic spread speed in fluent material is v, 4 focus on ultrasonic vibrator in focal point The acoustic pressure producing is respectively P₁、P₂、P₃、P₄, ultrasonic pressure is respectively F₁、F₂、F₃、F₄, it is θ with X-Y plane angle, put down in X-Y Projection on face is in 45 ° of angles respectively at adjacent X semiaxis, Y semiaxis, (focus area S, conversion efficiency η₁, acoustic efficiency η₂, folder Angle θ is determined by focused transducer manufacture process, and can test for definite value and record, and ultrasonic propagation in fluent material is fast Degree v is that definite value and can testing records after given fluent material), super ultrasonic pressure F₁、F₂、F₃、F₄Make a concerted effort be F, and with joint efforts F with The angle that X-Y plane, Y-axis positive axis, X-axis bear semiaxis is respectively α, β, γ, and above parameter relationship formula derivation is as follows：

Ultrasonic acoustic pressure

Ultrasonic pressure F₁Size：

Ultrasonic pressure F₁Vector representation be:

In the same manner, ultrasonic pressure F₂、F₃、F₄It is respectively：

Make a concerted effort F vector representation be：

F with X-Y plane angle is with joint efforts：

F with Y-axis positive axis angle is with joint efforts：

Making a concerted effort, negative semiaxis angle is F with X-axis:

Due to action time is extremely short and substrate to liquid level apart from very little, then ignore the impact to droplet trajectory for the gravity, droplet jet Position coordinateses P (x, y, z) to substrate：

Z=H.

Claims (5)

1. a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle it is characterised in that：Including base, Z-direction workbench, High-accuracy syringe pump, focused transducer, substrate, wafer-supporting platform, liquid container, feed point, described floor installation in bottom, The injection pond of liquid container is arranged on base, and injection is provided with focused transducer in pond, and substrate is fixed under wafer-supporting platform Just and above injection pond, wafer-supporting platform is arranged on Z-direction workbench, and Z-direction workbench is arranged on base, sprays pond and liquid The liquid storage tank of container is interconnected, and high-accuracy syringe pump is connected with feed point.

2. a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle according to claim 1 it is characterised in that： Described focused transducer, comprises 4 identical focusing ultrasonic vibrators, and is 90 ° of sector structures, and by with suction Wave material constitutes complete circle, and has common focus, and is separated by absorbing material, solely between 4 focusing ultrasonic vibrators Vertical work does not interfere with each other, and absorbing material and focusing ultrasonic vibrator are arranged in high impedance layer, and fin is arranged under high impedance layer It is connected just and with water cooling tube, sealing ring is located above fin, and shell is located above sealing ring.

3. a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle according to claim 2 it is characterised in that： Described focusing ultrasonic vibrator includes：PZT piezoelectric ceramics, upper nickel electricity level, lower nickel electrode, Parylene coating, air ring；PZT Piezoelectric ceramics upper surface is all coated with nickel electrode, lower surface is coated with lower nickel electrode, and Parylene coating is located in upper nickel electrode Side, and between Parylene coating and upper nickel electrode, there is air ring.

4. a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle according to claim 3 it is characterised in that： Described air ring structure is：Parylene coating constitutes Fresnel lens with air ring, meets following relationship：

$\begin{array}{cc}{r}_k^o=\sqrt{k\mathrm{\λ}(k\mathrm{\λ}+2L)}& r_k^i=\sqrt{\frac{2k-1}{2}\mathrm{\λ}(\frac{2k-1}{2}\mathrm{\λ}+2L)}\end{array}$

Wherein：K-th air ring external diameter beK-th air ring internal diameter beL is to focus on ultrasonic vibrator focal length, that is, focus on super To the distance of liquid level, λ is ultrasonic wavelength in fluent material to sound and vibration, k=1,2,3,4 ....

5. a kind of controlled ultrasonic droplet ejection increasing material manufacturing device of spray angle according to claim 1 it is characterised in that： The structure of described liquid container is：Injection at the bottom of pond portion and injection at the bottom of pond portion adopt the pipeline of a diameter of 400um to connect, and meet Law of connected vessels.