CN115178885A - Femtosecond laser machining error control method for complicated curved surface shape engraving - Google Patents
Femtosecond laser machining error control method for complicated curved surface shape engraving Download PDFInfo
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- 238000003754 machining Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000012545 processing Methods 0.000 claims abstract description 59
- 230000008569 process Effects 0.000 claims abstract description 11
- 238000003384 imaging method Methods 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000005070 sampling Methods 0.000 claims description 20
- 238000013519 translation Methods 0.000 claims description 20
- 239000004579 marble Substances 0.000 claims description 18
- 238000002679 ablation Methods 0.000 claims description 15
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 10
- 238000005457 optimization Methods 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 5
- 230000002068 genetic effect Effects 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 8
- 101150030337 CCD7 gene Proteins 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to a femtosecond laser machining error control method for engraving a complex curved surface shape, belonging to the technical field of ultrafast laser machining. The invention can control the processing error of a five-axis laser processing system, reduce the processing error of hundred micrometers to ten micrometers, and greatly improve the processing precision of the complex curved surface engraving process. The processing error control method of the femtosecond laser curved surface complex shape engraving system disclosed by the invention is not only limited to spherical surface complex shape engraving processing, but also applicable to various complex curved surface shape engraving processing, and has wide applicability.
Description
Technical Field
The invention belongs to the technical field of ultrafast laser processing, and relates to a processing error control method for femtosecond laser complicated curved surface shape engraving.
Background
When a three-axis laser processing system is used for processing a complex curved surface shape, because the workpiece can not rotate, the laser can not be ensured to be always vertical to the processing surface of the laser in the processing process, and the consistency of the processing depth is difficult to ensure when high-precision processing is carried out. The space scale of the laser focus is in the micron order, and is extremely small compared with the size of a workpiece, when a five-axis laser processing system processes complex curved surface shapes, due to clamping errors, hundred-micron order errors between the workpiece and a digital model and the like, hundred-micron order processing errors can occur between the laser focus and a processed plane or curved surface, the processing precision can be poor, and the high-precision processing of the complex curved surface shapes is not facilitated.
Therefore, a method for controlling a machining error of a femtosecond laser complex curved surface shape engraving is needed to control a machining error of a five-axis laser machining system so as to improve the machining precision of a complex curved surface engraving process.
Disclosure of Invention
The invention aims to solve the problem of processing errors of hundreds of microns in the process of processing by a five-axis laser processing system in the prior art, and provides a femtosecond laser machining error control method for engraving a complex curved surface shape.
The purpose of the invention is realized by the following technical scheme.
A femtosecond laser complex curved surface shape engraving machining error control method comprises the following steps:
acquiring a current initial processing focus track G code, a space XYZ coordinate of a laser focus in a machine tool coordinate system and a posture BC coordinate of a workpiece in the machine tool coordinate system;
secondly, operating a certain fixed code line numerical value according to the current initial processing focus track G code, moving the workpiece to another position at the moment, taking the position as a sampling position, and obtaining an upper limit value and a lower limit value of a Z-axis coordinate corresponding to the sampling position by taking a laser pulse ablation phenomenon with a fixed pulse number as a judgment basis at the sampling position;
the setting criterion of the certain fixed code line value is as follows: the corresponding positions on the surface of the workpiece before and after running the code are not more than 200 microns away in the xyz Cartesian coordinate system.
Step three, repeating the step two, calculating the Z-axis coordinate average value at each sampling position according to the Z-axis coordinate upper limit value and the Z-axis coordinate lower limit value obtained at each sampling position, and using the Z-axis coordinate average value as the Z-coordinate compensation quantity of the focal track G code at each sampling position;
step four, obtaining Z-axis compensation quantity corresponding to codes between adjacent sampling positions according to a linear or nonlinear transition mode;
and fifthly, giving the Z-axis compensation quantity corresponding to each row of codes to each row of focus track G codes, and generating the processing focus track G codes after processing error control.
And step six, performing trial operation on the obtained processing focus track G code, judging the optimization condition of the processing error by taking the laser pulse ablation phenomenon with fixed pulse number as a judgment basis, and repeating the process if the processing error is still in the order of hundreds of microns until the processing error meets the processing requirement.
Further, the nonlinear method includes a genetic algorithm.
And step seven, generating a machining code after machining error optimization.
The device for realizing the method comprises the following steps: the device comprises a femtosecond laser system, a coaxial imaging system, a displacement system and a control system.
The system is supported, fixed and connected by a marble base having two planes and a facade on an optical platform. The bottom plane of the marble base is fixedly connected to the upper surface of the optical platform. The z-direction translation table of the displacement system is arranged on the vertical surface of the marble base, and the x-direction translation table, the y-direction translation table, the b-direction rotation table and the c-direction rotation table are arranged on the upper surface of the marble base and are used for driving the laser focus, the clamp and the workpiece to be machined to move spatially; the coaxial imaging system is fixedly connected and arranged on the vertical surface of the marble base, is positioned right above the workpiece to be machined and is used for real-time online monitoring of femtosecond laser machining.
The coaxial imaging system is divided into an illumination unit and an industrial camera imaging unit; the industrial camera imaging unit comprises an optical element base, a spectroscope, a reflecting mirror, a focusing lens, a lens cone and an industrial camera CCD. The lighting unit is used for providing required lighting light for the industrial camera imaging unit. An optical element of an imaging unit of the industrial camera is fixed on an optical element base, and laser is generated from a femtosecond laser system, reflected by a dichroic mirror after passing through a light shutter and an energy attenuation sheet, and focused on the surface of a workpiece to be machined through a plano-convex lens; the illumination light generated by the illumination white light source is firstly reflected by the beam splitter, then passes through the dichroic mirror and the plano-convex lens to be irradiated on the surface of a workpiece to be processed, and the reflected illumination light sequentially passes through the plano-convex lens, the dichroic mirror, the beam splitter and the focusing lens and is finally captured by the CCD of the industrial camera.
Has the advantages that:
1. the processing error control method of the femtosecond laser complex curved surface shape engraving system disclosed by the invention is not only limited to spherical complex shape engraving processing, but also suitable for various complex curved surface shape engraving processing, and has wide applicability.
2. The processing error control method of the femtosecond laser complex curved surface shape engraving system can control the processing error of a five-axis laser processing system, reduce the processing error of hundred micrometers to ten micrometers, and greatly improve the processing precision of the complex curved surface engraving process.
Drawings
The invention is further described below with reference to the following figures and examples:
FIG. 1 is a schematic optical principle diagram of a processing optical path of a femtosecond laser curved surface complex shape engraving system provided by an embodiment of the invention;
fig. 2 is a schematic flow chart of a machining error control method according to an embodiment of the present invention.
The system comprises a femtosecond laser system, a 2-optical shutter, a 3-energy attenuation sheet, a 4-dichroic mirror, a 5-beam splitter, a 6-focusing lens, a 7-industrial camera CCD, an 8-illumination white light source, a 9-plano-convex lens, a 10-workpiece to be machined, an 11-five-axis linkage translation table, a 12-computer and a 13-optical element base.
Fig. 3 is a schematic diagram of a displacement system for implementing the machining error control method according to the embodiment of the present invention.
Wherein 14 is an x-y direction translation table, 15 is a z direction translation table, 16 is a b direction rotary table, 17 is a c direction rotary table, and 18 is a marble base.
Detailed Description
The invention is further described with reference to the following figures and examples.
Example 1
The device for realizing the method comprises the following steps: the device comprises a femtosecond laser system, a coaxial imaging system, a displacement system and a control system.
The system is supported, fixed and connected by a marble base having two flat faces and a facade on an optical platform. The bottom plane of the marble base is fixedly connected to the upper surface of the optical platform. The z-direction translation table of the displacement system is arranged on the vertical surface of the marble base, and the x-direction translation table, the y-direction translation table, the b-direction rotation table and the c-direction rotation table are arranged on the upper surface of the marble base and are used for driving the laser focus, the clamp and the workpiece to be machined to move spatially; the coaxial imaging system is fixedly connected and arranged on the vertical surface of the marble base, is positioned right above the workpiece to be machined and is used for real-time online monitoring of femtosecond laser machining.
The coaxial imaging system is divided into an illumination unit and an industrial camera imaging unit; the industrial camera imaging unit includes an optical element base 13, a beam splitter 5, a focusing lens 6, and an industrial camera CCD7. The lighting unit is used for providing required lighting light for the industrial camera imaging unit. The optical element of the imaging unit of the industrial camera is fixed on an optical element base 13, and the industrial camera CCD7 is used for providing workpiece position information for the motion control unit and observing the whole processing process in real time; the focusing lens 6 is connected with the bottom of the industrial camera CCD7 through threads and used for focusing femtosecond laser.
The displacement system comprises an x-y direction translation table 14, a z direction translation table 15, a b direction rotary table 16 and a c direction rotary table 17; the x-y direction translation stage 14 is fixedly connected with the upper plane of the marble base 18 according to the patent requirements and is used for realizing linear displacement in the xy plane; the z-direction translation stage 15 is fixedly connected with the vertical face of the marble base 18 according to the patent requirements, and is used for realizing longitudinal linear displacement; the b-direction rotary table 16 is fixedly connected with the x-y-direction translation table 14 and is used for realizing the rotation in the b-axis direction; the c-direction rotary table 17 is fixedly connected with the b-direction rotary table 16 and used for realizing the rotation of the c-axis direction.
The control system includes: the device comprises a visual feedback module, a displacement system control module and a light path control module. The visual feedback module is used for displaying the real-time processing condition acquired by the industrial camera CCD; the displacement system control module is used for enabling the five-axis translation table to perform compound motion according to a manual mode, a semi-automatic mode or an automatic mode by using a computer so as to meet the machining requirement; and the optical path control module is used for controlling the opening and closing of the optical shutter by using a computer according to the actual processing condition so as to control the opening and closing condition of the whole optical path.
A method for controlling machining errors of a spiral groove of a dynamic pressure gas bearing of a femtosecond laser complex curved surface shape engraving system comprises the following specific steps:
s101, acquiring a current initial dynamic pressure gas bearing spiral groove machining focus track G code, a space XYZ coordinate of a laser focus in a machine tool coordinate system, and a posture BC coordinate of a workpiece in the machine tool coordinate system.
In a specific application, the key components of the femtosecond laser complex curved surface shape carving system include an XYZBC type five-axis linkage translation stage, a CCD industrial camera, a femtosecond laser and a michelson interferometer, and in this embodiment, the XYZBC type five-axis linkage translation stage is merely taken as an illustrative object, and those skilled in the art should recognize that the present invention can be similarly applied to any other key components.
S102, operating a current initial dynamic pressure gas bearing spiral groove processing focus track G code to a processing starting position (the bottom end of the spiral groove) of the lower end face of the hemisphere, then operating 10 lines of processing codes until a position, which is about 200 micrometers away from the processing starting position, on a Z-axis of a surface to be processed of a workpiece serves as a sampling position, and obtaining an upper limit value and a lower limit value of a Z-axis coordinate corresponding to different positions by taking a near-threshold femtosecond laser pulse ablation phenomenon under a fixed pulse number of 1000 as a judgment basis.
It should be noted that the number of code lines in the above "run 10 lines of machining code" is not fixed, and the value varies slightly depending on the application, and the criterion for setting the number of code lines is based on that the distance between the corresponding positions on the workpiece surface before and after the code is run is not more than 200 micrometers in the xyz cartesian coordinate system. If the distance between the corresponding positions on the surface of the workpiece before and after the operation of the code in the xyz Cartesian coordinate system is too large, the deviation between a focus and a machined surface is too large when the machine tool performs interpolation, and the high precision of micro-nano machining is influenced.
The above "near-threshold femtosecond laser pulse ablation phenomenon under a fixed pulse number of 1000" is further explained here: under the condition of fixed pulse number, when the laser focus is positioned on the surface of the material and the material is ablated, the diameter D of the ablation pit and the laser flux F 0 The relationship is
Wherein, ω is 0 Is the spot size, F th Is the ablation threshold of the material.
The above formula shows that when the focal point is located on the surface of the material, the ablation pit diameter and the laser flux show a one-to-one correspondence relationship, when the laser focal point is located above or below the surface of the material, the laser energy absorbed by the surface of the material is reduced, the ablation pit diameter is reduced, when the laser flux is the ablation threshold of the material or is close to the ablation threshold of the material, the ablation phenomenon disappears due to the detachment of the focal point, and therefore, the near-threshold femtosecond laser pulse ablation phenomenon under the fixed pulse number 1000 can be used as the basis for judging whether the laser focal point is located on the surface of the workpiece.
And S103, repeating the previous step, sampling the Z-axis coordinate once when 10 lines of machining codes are operated, calculating the average value of the Z-axis coordinate at each sampling position according to the upper limit value and the lower limit value of the Z-axis coordinate obtained at each sampling position, and taking the average value as the Z-coordinate compensation quantity of the focus track G code at the sampling position until the upper end of the spiral groove is operated.
And S104, obtaining the Z-axis compensation quantity corresponding to the codes between the adjacent sampling positions according to a linear or nonlinear transition mode.
It should be noted that the nonlinear transition method includes a genetic algorithm.
And S105, giving the Z-axis compensation amount corresponding to each row of codes to each row of focus track G codes, and generating the machining focus track G codes of the spiral groove of the air-float bearing, wherein the machining error of the air-float bearing after machining error control is within dozens of micrometers.
S106, trial running is conducted on the obtained machining codes, the machining error optimization condition is judged according to the near-threshold laser pulse ablation phenomenon under the fixed pulse number of 1000, and if the machining error is still in the hundred-micron order, the process is repeated until the machining error meets the machining requirement.
And S107, generating a machining code after machining error optimization.
And S108, respectively carrying out error inspection on the groove width consistency and the groove depth consistency of the processed spiral groove by using a scanning electron microscope and a contourgraph. On the premise that an initial processing focus track G code is known, the processing error of a hundred-micron magnitude can be controlled within a range of dozens of microns through a nonlinear transition method, and the engraving processing precision of a curved surface complex shape is effectively guaranteed.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein.
Claims (2)
1. A femtosecond laser complex curved surface shape engraving machining error control method is characterized in that: the method comprises the following steps:
acquiring a current initial processing focus track G code, a space XYZ coordinate of a laser focus in a machine tool coordinate system and a posture BC coordinate of a workpiece in the machine tool coordinate system;
secondly, operating a certain fixed code line numerical value according to the current initial processing focus track G code, moving the workpiece to another position at the moment, taking the position as a sampling position, and obtaining an upper limit value and a lower limit value of a Z-axis coordinate corresponding to the sampling position by taking a laser pulse ablation phenomenon with a fixed pulse number as a judgment basis at the sampling position;
the setting criterion of the certain fixed code line value is as follows: the distance between the corresponding positions on the surface of the workpiece before and after the code is run in an xyz Cartesian coordinate system is not more than 200 microns;
step three, repeating the step two, calculating the Z-axis coordinate average value at each sampling position according to the Z-axis coordinate upper limit value and the Z-axis coordinate lower limit value obtained at each sampling position, and using the Z-axis coordinate average value as the Z-axis coordinate compensation quantity of the focal track G code at each sampling position;
step four, obtaining Z-axis coordinate compensation quantity corresponding to codes between adjacent sampling positions according to a linear or nonlinear transition mode;
step five, endowing Z-axis compensation quantity corresponding to each row of codes to each row of focus track G codes, and generating processing focus track G codes after processing error control;
step six, trial running is carried out on the obtained processing focus track G code, the optimization condition of the processing error is judged by taking the laser pulse ablation phenomenon with fixed pulse number as a judgment basis, and if the processing error is still in the order of hundreds of microns, the process is repeated until the processing error meets the processing requirement;
further, the nonlinear method includes a genetic algorithm;
and step seven, generating a machining code after machining error optimization.
2. An apparatus for implementing the method of claim 1, wherein: the method comprises the following steps: the system comprises a femtosecond laser system, a coaxial imaging system, a displacement system and a control system;
the system is supported, fixed and connected by a marble base which is provided with two planes and a vertical plane and is positioned on an optical platform; the bottom plane of the marble base is fixedly connected to the upper surface of the optical platform; the z-direction translation table of the displacement system is arranged on the vertical surface of the marble base, and the x-direction translation table, the y-direction translation table, the b-direction rotation table and the c-direction rotation table are arranged on the upper surface of the marble base and are used for driving the laser focus, the clamp and the workpiece to be machined to move spatially; the coaxial imaging system is fixedly connected and arranged on the vertical surface of the marble base, is positioned right above the workpiece to be machined and is used for real-time online monitoring of femtosecond laser machining;
the coaxial imaging system is divided into an illumination unit and an industrial camera imaging unit; the industrial camera imaging unit comprises an optical element base, a spectroscope, a reflector, a focusing lens, a lens cone and an industrial camera CCD; the lighting unit is used for providing required lighting light for the industrial camera imaging unit; an optical element of an imaging unit of the industrial camera is fixed on an optical element base, and laser is generated from a femtosecond laser system, reflected by a dichroic mirror after passing through a light shutter and an energy attenuation sheet, and focused on the surface of a workpiece to be machined through a plano-convex lens; the illumination light generated by the illumination white light source is firstly reflected by the beam splitter, then passes through the dichroic mirror and the plano-convex lens to be irradiated on the surface of a workpiece to be processed, and the reflected illumination light sequentially passes through the plano-convex lens, the dichroic mirror, the beam splitter and the focusing lens and is finally captured by the CCD of the industrial camera.
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