CN115121938A - Laser head monitoring module, multiband laser light path system and laser processing equipment - Google Patents
Laser head monitoring module, multiband laser light path system and laser processing equipment Download PDFInfo
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- CN115121938A CN115121938A CN202210959449.5A CN202210959449A CN115121938A CN 115121938 A CN115121938 A CN 115121938A CN 202210959449 A CN202210959449 A CN 202210959449A CN 115121938 A CN115121938 A CN 115121938A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
Abstract
The application relates to a laser head monitoring module, which relates to the field of laser processing, and comprises a laser light path beam splitter, a polaroid and a molten pool imaging module; the laser light path splitting piece is arranged on a laser light path of the laser head so as to obtain coaxial radiation light formed by laser processing of a molten pool, and the polaroid and the molten pool imaging module are sequentially arranged on the light path of the coaxial radiation light. The utility model provides a multiband laser light path system, including laser beam machining head module and the laser beam machining head monitoring module of this application, laser beam machining head module includes laser output focus module, the laser module and at least one beam combining lens of two at least different wave bands, and the laser beam that the laser module sent can make up each other under beam combining lens effect, forms compound laser beam, and laser output focus module sets up compound laser beam's light path has machining efficiency height, and molten bath monitoring accuracy is high advantage. The application also relates to a laser processing device.
Description
Technical Field
The application relates to the field of laser processing, in particular to a laser head monitoring module, and further relates to a multiband laser path system and laser processing equipment.
Background
The laser processing is a non-contact processing mode, which is a processing mode that according to the characteristics of a material to be processed, laser is irradiated on the material to be processed to form a laser spot with high power density, and the material to be processed is subjected to processing operations such as cutting, surface treatment, welding, marking, punching and the like. The laser processing has the advantages of no need of tools, high processing speed, small surface deformation, various types of processable materials and the like, and is widely applied to the field of material processing.
In the laser processing process, a material to be processed is generally melted under the action of a laser spot to form a molten pool, and the molten pool is operated to form processing such as cutting, welding, surface treatment and the like on the material. In order to control the processing parameters of laser processing, it is generally necessary to monitor the shape, temperature, etc. of the molten pool on-line. The on-line monitoring mode of the molten pool mainly comprises two modes of paraxial monitoring and coaxial monitoring, wherein the paraxial monitoring refers to monitoring the molten pool beside a processing laser light path, and because a certain included angle exists between the monitoring light path and the laser light path, the imaging of the molten pool has parallax error, and the temperature monitoring precision is poor; the coaxial monitoring means that a light splitting structure is arranged in a laser light path, and monitoring information is separated from the laser light path to monitor a molten pool, so that imaging parallax error of molten pool monitoring can be eliminated, and the temperature monitoring precision can be improved. On the occasion with higher monitoring requirement, a coaxial monitoring mode is mostly adopted.
The existing coaxial monitoring module for laser processing is mostly provided with a light splitting piece in a laser light path, infrared light and visible light generated by a molten pool are extracted from the laser light path for monitoring, the light splitting piece is usually arranged at a certain angle with the laser light path, the light is reflected for multiple times between two surfaces of the light splitting piece, the light after position deviation is generated through reflection is emitted from the light splitting piece, interference light shadow is formed during imaging, the commonly known as ghost shadow is generated, and the monitoring precision is influenced. When multi-channel monitoring of a molten pool is carried out, a spectroscope is additionally arranged in a monitoring light path for light splitting, the light splitting times are increased, the intensity of detection light after light splitting is reduced, the detection sensitivity is reduced, and interference light in the detection light path is increased. And the use of multiband laser further increases the difficulty of suppressing interference light through coating.
Disclosure of Invention
In order to solve the problem that the monitoring precision of a molten pool is lower in the laser processing process, the application provides a laser head monitoring module, a multiband laser light path system and laser processing equipment.
The application provides a laser head monitoring module adopts following technical scheme:
a laser head monitoring module comprises a laser light path beam splitter, a polaroid and a molten pool imaging module; laser light path beam-splitting piece sets up on the laser light path of laser head to can acquire the coaxial radiation light that laser beam machining molten bath formed, the polaroid with molten bath imaging module sets gradually the light path of coaxial radiation light.
By adopting the technical scheme, the polaroid arranged on the coaxial radiation light path can remove the light shadow generated by multiple reflections of the coaxial radiation light in the laser light path light splitting piece, so that the interference light shadow generated by the laser light path light splitting piece is reduced, the ghost generated when a molten pool is imaged is inhibited, and the monitoring precision of the molten pool is improved.
In a specific embodiment, the laser head monitoring module of the present application further comprises a first light splitting structure and a spectrum detection module; the first light splitting structure is arranged between the laser light path light splitting piece and the polaroid so as to split the coaxial radiation light to form a first split beam and a second split beam which are separated from each other, and the spectrum detection module is arranged on a light path of the second split beam.
By adopting the technical scheme, a part of radiation light can be extracted from the coaxial radiation light by utilizing the first light splitting structure arranged between the laser light path light splitting piece and the polaroid for spectrum detection, and the monitoring of a plurality of projects of the molten pool is realized by extracting the coaxial radiation light in the laser light path for one time. The other part of the coaxial radiation light is filtered by the polaroid to perform molten pool imaging, so that the influence of interference light shadow generated by the first light splitting structure on the molten pool imaging precision can be prevented.
In a specific possible embodiment, the laser head monitoring module of the present application further includes a second light splitting structure and a temperature detection module; the second light splitting structure is arranged between the first light splitting structure and the spectrum detection module to split the second split beam to form a third split beam and a fourth split beam which are separated from each other, the temperature detection module is arranged on a light path of the third split beam, and the spectrum detection module is arranged on a light path of the fourth split beam.
By adopting the technical scheme, the second light beam is split by the second light splitting structure, the item detected by one-time coaxial radiation light extraction in the laser light path is further improved, and the coaxial online multi-path monitoring function of the laser head is realized while the influence on the laser light path is reduced.
In a specific embodiment, the second light splitting structure is a reflective short pass filter.
By adopting the technical scheme, the reflection-type short-pass filter is used as the light splitting structure, and the second light beam can be split according to the wavelength of the radiated light, so that the near-infrared part of the second light beam forms a third light split beam for detecting the temperature of the molten pool; the visible light part forms a fourth split beam for detecting spectral information, so that the detection pertinence is improved, and the monitoring effects of temperature detection and spectral detection are guaranteed.
In a specific possible embodiment, the temperature detection module includes a thermometric coupling mirror and a pyrometer.
By adopting the technical scheme, the temperature measurement coupling mirror can couple the third split beam to the detection head part of the pyrometer more, so that the sensitivity of temperature detection is improved. The pyrometer can be better adapted to the temperature range of a laser processing molten pool, the detection precision of non-contact detection of the temperature of the molten pool is improved, and the influence of the detection process on a laser light path is reduced.
In a specific embodiment, the first light splitting structure is a ring reflector, a part of the coaxial radiation light passes through a central hole of the ring reflector to form the first split light beam, and another part of the coaxial radiation light is reflected by the ring reflector to form the second split light beam; and a conical lens pair is arranged on the light path of the second split beam and adjacent to the annular reflecting mirror.
By adopting the technical scheme, the coaxial radiation light is split by utilizing the annular reflector, so that interference light shadow formed by refraction of the light in the light splitting piece is avoided, and the influence of the light splitting structure on the first light splitting beam is reduced. Through the size of control annular reflecting mirror centre bore, can also control the proportion that gets into the luminous flux of first beam and second beam, guarantee that each monitoring module homoenergetic in the multichannel monitoring can obtain better detection effect. The conical lens is used for shaping the annular light beam formed by reflection of the annular reflector, so that a hollow-free Bessel light beam is formed, and the detection effect of detection modules such as a spectrum detection module is ensured.
In a specific possible embodiment, the spectrum detection module comprises a spectrometer coupling mirror and a spectrometer.
By adopting the technical scheme, more radiant light can be coupled into the spectrometer by using the spectrometer coupling mirror, so that the detection sensitivity of the spectrometer is improved. The spectrometer can be used for carrying out non-contact detection on the components of the material to be processed, so that the laser processing parameters can be adjusted according to the components of the material to be processed, and the laser processing effect is ensured.
In a specific possible embodiment, the molten pool imaging module comprises an imaging lens and a CMOS camera.
By adopting the technical scheme, the radiation light of the molten pool can be converged by utilizing the imaging lens, and the imaging definition of the CMOS camera is improved.
In a specific implementation scheme, the laser light path splitting sheet is a wedge-shaped splitting sheet, the wedge-shaped splitting sheet includes a radiation light incident surface facing the laser processing molten pool and a radiation light emitting surface facing away from the laser processing molten pool, an incident angle of the coaxial radiation light to the radiation light incident surface is 45 °, and an incident angle of the coaxial radiation light to the radiation light emitting surface after being refracted by the radiation light incident surface is a brewster angle of the wedge-shaped splitting sheet.
By adopting the technical scheme, the wedge-shaped light splitting piece is used for extracting the coaxial radiation light emitted along the laser light path, the angle of the light reflected by the surface of the wedge-shaped light splitting piece can be changed, and the reflected light is prevented from entering the coaxial radiation light. The laser beam parallel to the surface of the material to be processed can be reflected by utilizing the radiation light incidence surface forming an angle of 45 degrees with the coaxial radiation light, so that the reflected laser beam is emitted to the surface of the material to be processed in a direction vertical to the surface of the material to be processed, and the laser processing is carried out. The incident angle of the refracted coaxial radiation light towards the radiation light outgoing surface is the Brewster angle of the wedge-shaped light splitting sheet, at the moment, the light reflected by the radiation light outgoing surface is all linearly polarized light, the formed light interfering with the light shadow is all linearly polarized light, and the light can be filtered by a polarizing film more, so that the imaging precision of the molten pool imaging module is improved.
The multiband laser light path system provided by the application adopts the following technical scheme:
the utility model provides a multiband laser light path system of this application includes laser beam machining head module and the laser beam machining head monitoring module of this application, the laser beam machining head module includes laser output focus module, the laser module and at least one beam combining lens of two at least different wave bands, the laser beam that the laser module sent can combine mutually under the beam combining lens effect, form compound laser beam, laser output focus module sets up the light path of compound laser beam, with can with compound laser beam assembles on treating the processing material, forms the laser facula, laser light path divides the setting to be in beam combining lens is kept away from one side of laser output focus module.
By adopting the technical scheme, at least two laser modules are utilized, laser beams with at least two different wave bands can be emitted, and the laser processing is carried out on the workpiece to be processed made of different materials, so that the reflection of the material to be processed on the laser beams is reduced, and the laser processing efficiency is improved. The laser beams of different wave bands emitted by the at least two laser modules can be converged on the same light path by utilizing the at least one beam combining lens, so that a composite laser beam containing the lasers of at least two different wave bands is formed, and the focusing characteristics and the irradiation positions of the lasers of different wave bands are conveniently controlled. The laser path light splitting sheet arranged on one side of the beam combining lens, which is far away from the laser output focusing module, can extract coaxial radiation light which is emitted by a laser processing molten pool and passes through the laser output focusing module and the beam combining lens from a laser path, reduces the interference of laser of different wave bands on the coaxial radiation light, and improves the online monitoring precision of the laser processing molten pool.
In a specific implementation scheme, the laser processing head module comprises two laser modules and a beam combining mirror, the laser processing head module comprises a first laser module and a second laser module, the first laser module comprises a first laser and a first collimating mirror for emitting laser in a first waveband, the second laser module comprises a second laser and a second collimating mirror for emitting laser in a second waveband, the beam combining mirror is a beam combining wedge-shaped mirror, the laser output focusing module comprises a focusing lens and an output window sheet, the laser processing head module further comprises a laser head wedge-shaped mirror, the beam combining wedge-shaped mirror comprises a beam combining sheet first surface provided with a laser high reflection film in the first waveband and a beam combining sheet second surface provided with a laser reflection-reducing film in the second waveband, and the beam combining wedge-shaped mirror is arranged between the laser path splitting sheet and the laser output focusing module, the laser emitted by the first laser module can be reflected to the laser output focusing module through the first surface of the beam combining sheet; the laser head wedge mirror comprises a wedge mirror first surface and a wedge mirror second surface, the wedge mirror first surface is provided with a second wave band laser antireflection film, the wedge mirror second surface is provided with a first wave band laser high reflection film, the laser head wedge mirror is arranged between the second laser module and the laser light path splitting piece, the wedge mirror first surface faces the second laser module, and therefore laser emitted by the second laser can irradiate to the laser light path splitting piece through the laser head wedge mirror and irradiate to the beam combining piece second surface after being reflected by the laser light path splitting piece.
Through adopting above-mentioned technical scheme, the laser of two kinds of different wave bands that utilize first laser module and second laser module transmission to can use the laser of different wave bands or the laser combination of different proportions to carry out laser beam machining to different materials, make different material of treating to process all have higher laser beam machining efficiency. The first waveband laser high reflection film on the first surface of the beam combining sheet of the beam combining wedge-shaped mirror can better reflect the first waveband laser emitted by the first laser to the laser output focusing module, the second waveband laser reflection reducing film on the second surface of the beam combining sheet of the beam combining wedge-shaped mirror can better guide the second waveband laser emitted by the second laser into the second waveband laser, and the second waveband laser and the first waveband laser reflected by the first surface of the beam combining sheet are combined together through the first surface of the beam combining sheet to form a composite laser beam; the first reflecting surface of the beam combining piece can also reflect the first waveband laser reflected by the material to be processed, so that the first waveband laser is prevented from entering the laser light path beam splitting piece through the beam combining wedge-shaped mirror to interfere with the coaxial radiation light, and thus the second waveband laser reflection increasing film is arranged on the laser light path beam splitting piece to prevent the second waveband laser from entering the laser light path beam splitting piece and prevent the interference of the laser of two wavebands on the radiation light. And more second-waveband lasers can be guided into the laser head wedge-shaped mirror by utilizing the second-waveband laser antireflection film on the first surface of the wedge-shaped mirror of the laser head wedge-shaped mirror, reflected by the laser light path splitting piece and then emitted to the beam combining wedge-shaped mirror to be combined with the first-waveband lasers.
The laser processing equipment provided by the application adopts the multiband laser processing light path system provided by the application.
By adopting the technical scheme, the laser processing equipment can carry out laser processing on materials to be processed of different materials by utilizing the lasers with different wave bands, so that the absorptivity of the materials to be processed on laser beams is ensured, and the laser processing efficiency is improved; coaxial radiation light can be extracted from the laser light path by using the laser light path light splitting piece, so that the interference of processing laser on the coaxial radiation light is reduced; the interference light shadow in the coaxial radiation light can be filtered by utilizing the polaroid, and the imaging precision of a molten pool is improved.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the polaroid is arranged in the molten pool imaging detection light path, so that interference light shadows generated when a laser light path light splitting piece is arranged in the laser light path and coaxial radiation light is extracted from the laser light path can be filtered, the content of the interference light shadows in the imaging detection light path is reduced, and the imaging precision of the molten pool is improved;
2. the incident angle of coaxial radiation rays emitted to the radiation light emitting surface of the laser light path light splitting piece is set to be a Brewster angle, so that the reflectivity of parallel polarized light is zero when the radiation light passes through the surface of the laser light path light splitting piece, interference light shadows caused by the parallel polarized light are almost zero, and non-parallel polarized radiation light can be filtered by a polarizing film to the maximum extent, and the problem of ghost shadow of molten pool imaging is solved;
3. the annular reflector is used for splitting the coaxial radiation light, so that the on-line multi-path monitoring of the laser processing molten pool can be realized, and meanwhile, the interference of the splitting structure on the coaxial radiation light is prevented, and the imaging precision of the molten pool is prevented from being influenced; the conical lens is used for shaping the annular light beam formed by reflection of the annular reflector, a hollow-free Bessel light beam is formed, deformation in the light beam transmission process is reduced, and the detection effect of a subsequent detection module is guaranteed.
Drawings
Fig. 1 is an optical path diagram of an embodiment of the multiband laser optical path system of the present application.
Fig. 2 is a schematic view of a portion of a multi-channel monitoring and light splitting structure according to an embodiment of the multi-band laser optical path system of the present application.
Fig. 3 is a structural framework diagram of an embodiment of the multiband laser light path system of the present application.
Fig. 4 is a schematic diagram of a laser beam combining and coaxial radiation light extraction portion of an embodiment of the multi-band laser optical path system of the present application.
Description of reference numerals: 1. a laser light path beam splitter; 2. a polarizing plate; 3. a molten pool imaging module; 31. an imaging lens; 32. a CMOS camera; 4. a first light splitting structure; 5. a spectrum detection module; 51. a spectrometer coupling mirror; 52. a spectrometer; 6. a second light splitting structure; 7. a temperature detection module; 71. a temperature measurement coupling mirror; 72. a pyrometer; 8. a pair of conical lenses; 91. a first laser module; 911. a first laser; 912. a first collimating mirror; 913. a first laser window sheet; 92. a second laser module; 921. a second laser; 922. a second collimating mirror; 923. a second laser window sheet; 93. a beam combining wedge-shaped mirror; 931. a first surface of a beam combining sheet; 932. a second surface of the bundling sheet; 94. a focusing lens; 95. outputting the window sheet; 96. a laser head wedge mirror; 961. a wedge mirror first face; 962. a wedge mirror second face; 10. detecting a window sheet; s1, a radiation light incidence surface; s2, radiating light emitting surface.
Detailed Description
The following detailed description of embodiments of the present application will be made with reference to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present application, are given by way of illustration and explanation only, and are not intended to limit the present application.
In the present application, unless otherwise stated, the orientation or positional relationship indicated by the use of the directional terms such as "upper and lower" is based on the orientation or positional relationship shown in the drawings of the present application, and the description of the orientation and positional relationship of the respective components in the present application is the same.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; either directly or indirectly through intervening media, either internally or in any combination thereof. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
One embodiment of the laser head monitoring module of the present application, as shown in fig. 1, includes a laser light path splitter 1, a polarizer 2, and a melt pool imaging module 3.
In the process of laser processing, processing laser irradiates on the surface of a material to be processed to form a laser spot, and the material to be processed is melted under the irradiation of the high-energy laser spot to form a molten pool. The high-temperature molten pool can emit radiation light, and part of the radiation light is reflected along a laser light path to form coaxial radiation light. The laser optical path splitting sheet 1 may be any optical device capable of extracting coaxial radiation from the laser optical path, and generally, a half-transmissive half-reflective splitting sheet having various shapes may be used.
The laser light path light splitting piece 1 is arranged on a laser light path of the laser head and used for obtaining coaxial radiation light emitted by a laser processing molten pool from the laser light path and carrying out online coaxial monitoring on the molten pool. When the laser light path light splitting piece 1 is used for extracting coaxial radiation light from a laser light path, the laser light path light splitting piece 1 is usually arranged at a certain included angle with the laser light path, and the coaxial radiation light enters the laser light path light splitting piece 1 after being refracted at the light incident surface of the laser light path light splitting piece 1, and is emitted to an online monitoring structure after being refracted at the light emergent surface of the laser light path light splitting piece 1 to perform online monitoring on a laser processing molten pool. When the coaxial radiation light is emitted to the light-emitting surface of the laser light path light-splitting piece 1, a part of light is reflected on the light-emitting surface of the laser light path light-splitting piece 1 and is reflected for multiple times between the two surfaces of the laser light path light-splitting piece 1, and the light which is partially reflected and generates deviation is transmitted out of the light-emitting surface of the laser light path light-splitting piece 1 and is mixed in the original coaxial radiation light to form interference light. When the radiation light is emitted to the surface of the laser light path splitting sheet 1, the formed refracted light is partially polarized light having a large vibration component parallel to the incident surface, and the formed reflected light is partially polarized light having a large vibration component perpendicular to the incident surface. Since the interference shadow is formed by reflection of the coaxial radiation light, it is also partially polarized light having a large vibration component perpendicular to the incident surface.
The molten pool imaging module 3 is arranged on an emergent light path of the coaxial radiation light, the molten pool imaging module 3 can comprise various devices which can image the coaxial radiation light and form and/or record laser processing molten pool images, such as an optical camera, an image recorder and the like, and the molten pool images can be observed and/or recorded through the molten pool imaging module 3 so as to adjust laser spots according to the molten pool images and ensure that the laser processing meets the technical requirements of design.
The polaroid 2 is arranged between the laser light path light splitting piece 1 and the molten pool imaging module 3, and the polaroid 2 is arranged to be capable of filtering polarized light in coaxial radiation light emitted by the laser light path light splitting piece 1, particularly polarized light vibrating perpendicular to an incident surface, so that interference light mixed in the coaxial radiation light can be removed more, interference light shadow formed by the interference light during imaging of the molten pool imaging module 3 is reduced, and the imaging precision of the molten pool is improved.
Can also be provided with detection window piece 10 between laser light path beam-splitting piece 1 and polaroid 2, the optical flat plate window piece of BK7 base plate can be chooseed for use to detection window piece 10, and the main part of laser beam machining head module and laser head monitoring module can be kept apart in the use of detection window piece 10, prevents that outside dust from getting into laser head monitoring module, influences the detection precision of laser head monitoring module.
In some embodiments of the laser head monitoring module of the present application, as shown in fig. 1, the laser head monitoring module of the present application further comprises a first light splitting structure 4 and a spectrum detection module 5.
The first light splitting structure 4 may use various structures, such as a light splitter, a partial reflector, etc., which can separate two different detection light paths from the coaxial radiation light. The first light splitting structure 4 is provided between the laser light path splitting sheet 1 and the polarizing plate 2, and is capable of separating a first split beam directed to the polarizing plate 2 and a second split beam separated from the first split beam from the coaxial radiation light directed to the first light splitting structure 4, the irradiation direction of the first split beam being generally the same as that of the original coaxial radiation light, and the irradiation direction of the second split beam being perpendicular to that of the original coaxial radiation light.
The spectrum detection module 5 is arranged on the light path of the second split beam, and can collect radiation spectrum information of a laser processing molten pool while not influencing molten pool imaging of the molten pool imaging module 3, so that the material composition of a material to be processed can be judged, the process analysis of laser processing can be carried out, and the quality of laser processing can be controlled and improved.
In a preferred embodiment of the laser head monitoring module of the present application, as shown in fig. 1, the laser head monitoring module of the present application further comprises a second light splitting structure 6 and a temperature detection module 7.
The second beam splitting structure 6 may use various structures capable of separating two different outgoing light beams from the incident light beam, such as a beam splitter, a partial reflector, and the like. The second light splitting structure 6 is arranged between the first light splitting structure 4 and the spectrum detection module 5, the second split beam emitted from the first light splitting structure 4 irradiates to the second light splitting structure 6, and after light splitting of the second light splitting structure 6, a third split beam and a fourth split beam which are separated from each other are formed, wherein the fourth split beam irradiates to the spectrum detection module 5 along the irradiation direction of the original second split beam to perform radiation spectrum detection of a molten pool, and the third split beam irradiates along the direction perpendicular to the irradiation direction of the original second split beam.
The temperature detection module 7 is arranged on an irradiation light path along the third split beam, can perform non-contact monitoring on the temperature of the laser processing molten pool on line while performing molten pool imaging and radiation spectrum detection on the laser processing molten pool, and can control and adjust the temperature of the laser processing molten pool by adjusting the power of the processing laser or adjusting the size of laser spots according to process requirements, thereby ensuring the quality of laser processing.
As an embodiment of the laser head monitoring module of the present application, as shown in fig. 1 and 2, the second beam splitting structure 6 is a reflective short-pass filter. Specifically, a reflective short-pass filter having a transmission wavelength of about 760nm or less and a reflection wavelength of about 800nm or more can be selected.
When the second split beam irradiates the second light splitting structure 6, visible light with the wavelength below 760nm in the second split beam passes through the second light splitting structure 6 to form a fourth split beam, and the fourth split beam is emitted to the spectrum detection module 5 to enable the spectrum detection module 5 to detect the radiation spectrum of the laser processing molten pool; and near-infrared light with the wavelength of more than 800nm in the second split beam is reflected by the second light splitting structure 6 to form a third split beam which is emitted to the temperature detection module 7, and the temperature detection module 7 detects the temperature of the laser processing molten pool according to the wave band of the near-infrared light in the third split beam. When the reflection-type short-pass filter is used as the second light splitting structure 6 to split the second split beam, most of the near-infrared light in the second split beam can be reflected by the second light splitting structure 6 into the third split beam, so that the attenuation of the near-infrared light in the third split beam is small, and the temperature measurement sensitivity of the temperature detection module 7 is hardly affected by the use of the second light splitting structure 6.
Similarly, most of the visible light in the second split beam can enter the fourth split beam through the second light splitting structure 6, so the attenuation of the visible light in the fourth split beam is small, and therefore, the use of the second light splitting structure 6 does not affect the sensitivity of the spectrum detection module 5 for detecting the visible radiation spectrum of the laser processing molten pool. Therefore, the laser head monitoring module of the application can extract the coaxial radiation light generated by the laser processing molten pool from the laser light path through the laser light path splitting piece 1, simultaneously carries out coaxial online multi-path monitoring of molten pool imaging, molten pool temperature detection and molten pool spectrum information detection of the laser processing molten pool, and has higher detection precision and detection sensitivity.
As a specific embodiment of the laser head monitoring module of the present application, as shown in fig. 1, the temperature detection module 7 includes a temperature measurement coupling mirror 71 and a pyrometer 72. The temperature measurement coupling mirror 71 generally uses a convex lens or a convex lens group with a light converging function, and the temperature measurement coupling mirror 71 is generally disposed between the second light splitting structure 6 and the pyrometer 72, and is used for converging the near infrared light in the third light splitting beam onto the detection head of the pyrometer 72, so as to improve the detection sensitivity of the pyrometer 72. The pyrometer 72 may use various pyrometer detection devices, such as an optical pyrometer, or a radiation pyrometer, capable of inferring the temperature of the object by detecting the radiant heat and wavelength band of the object without contact with the object. Because the high-temperature object is not contacted, the pyrometer 72 can generally detect higher temperature, for example, the hidden wire type optical pyrometer can detect the high temperature in the range of 700-3000 ℃, thereby conveniently detecting the temperature of the laser processing molten pool.
In some embodiments of the laser head monitoring module of the present application, as shown in fig. 1 and 3, the first light splitting structure 4 is an annular reflector, which is a metal film reflector with a central hole at a central portion, and when the coaxial radiation light irradiates the annular reflector, the coaxial radiation light irradiating the central hole portion directly passes through the central hole to form a first split beam irradiating the molten pool imaging module 3; the coaxial radiation light irradiated on the metal film forms an annular second split beam with uniform intensity through total reflection of the metal film, and is irradiated to a conical lens pair 8 arranged on a reflection light path of the annular reflector.
The conical lens pair 8 is a lens with two plane side surfaces and a conical surface other side surfaces, the optical axes of the two lenses are mutually overlapped and the planes are oppositely arranged, the distance between the two lenses is set, after the annular second split beam is refracted by the conical lens pair 8, the second split beam without a hollow part can be just formed and is emitted to the spectrum detection module 5, or the second split structure 6 is arranged on the light path of the second split beam.
Because the annular reflector is used for light splitting, the light cannot be refracted and reflected for multiple times, interference light can be prevented, moreover, the second split beam can form a Bessel beam after being refracted by the conical lens pair 8, interference deformation in the light transmission process is reduced, and the precision of subsequent detection is improved.
The size of the central hole of the ring-shaped reflector can be determined according to the size of the view field of the molten pool image formed by the molten pool imaging module 3, and the diameter of the central hole can be generally set to be one third to two thirds of the overall diameter of the ring-shaped reflector.
In some embodiments of the laser head monitoring module of the present application, as shown in fig. 1, the spectral detection module 5 includes a spectrometer coupling mirror 51 and a spectrometer 52. The spectrometer coupling mirror 51 generally uses a convex lens or a lens group capable of converging visible light, and the spectrometer coupling mirror 51 converges the fourth light beam onto the detecting component of the spectrometer 52, so as to improve the intensity of the detected light sensed by the detecting component of the spectrometer 52, thereby improving the sensitivity of detection. The spectrometer 52 can use a common visible light spectrometer, and the spectrometer 52 can detect the distribution information of visible light spectral lines in the radiation light excited by the laser processing molten pool, and obtain the material composition change of the workpiece to be processed according to the spectral line distribution information, so that the laser processing parameters can be adjusted according to the material composition of the workpiece to be processed, and the laser processing quality can be ensured and improved.
As a specific embodiment of the laser head monitoring module of the present application, as shown in fig. 1, the molten pool imaging module 3 includes an imaging lens 31 and a CMOS camera 32. The imaging lens 31 is generally disposed on the optical path of the first split beam using a convex lens or a lens group, and is used to adjust the focusing state of the first split beam. The CMOS camera 32 is a digital camera using a CMOS sensor as a light sensing device, and has the advantages of high light sensing speed and high resolution. In cooperation with the imaging lens 31, the first split beam can be focused on the whole CMOS sensor through the imaging lens, and the imaging definition of the molten pool on the CMOS camera 32 is improved.
In some embodiments of the laser head monitoring module of the present application, as shown in fig. 1 and 4, the laser path splitter 1 is a wedge-shaped splitter, wherein a surface of the wedge-shaped splitter facing the laser processing molten pool is referred to as a radiation light incident surface S1, and a surface of the wedge-shaped splitter facing away from the laser processing molten pool is referred to as a radiation light emergent surface S2. The use of a wedge-shaped beamsplitter increases the deflection of the light as it is reflected between the two surfaces of the beamsplitter, thereby reducing the proportion of interfering light in the outgoing light.
The wedge-shaped beam splitter is disposed in the optical path of the laser light such that the incident angle of the coaxial radiation light to the radiation light incident surface S1 is 45 °. Meanwhile, the wedge angle of the wedge-shaped light splitting sheet is set so that after the coaxial radiation light which is emitted to the radiation light incident surface S1 is refracted by the radiation light incident surface S1, the incident angle of the coaxial radiation light which is emitted to the radiation light emitting surface S2 is the Brewster angle of the wedge-shaped light splitting sheet. In the case of a wedge-shaped spectroscopic plate made of a general optical glass, the brewster angle thereof is about 55 ° 32', and when the coaxial radiation light is emitted to the radiation light emitting surface S2 at this angle, the radiation light having the polarization direction parallel to the light emitting surface S2 is hardly reflected by the light emitting surface S2, and is almost entirely transmitted through the light emitting surface S2 to the polarizing plate 2. The polarized light having the other polarization direction is reflected and shifted by the light exit surface S2 and the light entrance surface S1 to form the interference light, and the interference light is also emitted to the polarizer 2. The polarizing plate 2 is arranged such that linearly polarized light with the polarization direction parallel to the light exit surface S2 can pass through the polarizing plate 2, and interference light with the polarization direction in other directions can be filtered by the polarizing plate 2, so that the interference light can be removed to the maximum extent by the polarizing plate 2, a ghost image formed during molten pool imaging is eliminated, and the accuracy of molten pool imaging is improved.
The radiation light incident surface S1 can be provided with a reflection increasing film corresponding to the laser wave band, so that the reflection performance of the processing laser is improved, and the processing laser is prevented from being mixed into the coaxial radiation light to interfere the detection of the coaxial radiation light. An antireflection film for coaxial radiation light may also be disposed on the radiation light emitting surface S2, so as to reduce reflection of the coaxial radiation light on the radiation light emitting surface S2, thereby reducing formation of interference light.
One embodiment of the multi-band laser optical path system of the present application, as shown in fig. 1 and 3, includes a laser processing head module and a laser head monitoring module of any of the embodiments of the present application. The laser processing head module comprises a laser output focusing module, at least two laser modules with different wave bands and at least one beam combining lens.
Each laser module can emit a laser beam of one waveband; the beam combining lens is a transparent optical device with a reflecting surface, and the beam combining lens is arranged to be capable of combining at least two laser beams incident through different incident surfaces to form a same composite laser beam to be emitted. Generally, the beam combining lens can superpose the light rays incident through two different incidence surfaces to form a same composite light beam to be emitted. At the moment, the number of the beam combining lenses is one less than that of the laser modules, and after the laser beams emitted by the two laser modules are combined through one beam combining lens, the laser beams are combined with the laser beams emitted by the other laser module through the other beam combining lens to form a combined laser beam. The laser output focusing module is arranged on a light path of the composite laser beam and can converge the composite laser beam to a material to be processed to form a laser spot. The laser facula melts the material to be processed to form a molten pool, and the material to be processed is correspondingly processed by laser.
The laser light path splitting piece 1 is arranged on one side, away from the laser output focusing module, of a beam combining lens facing the laser output focusing module, and coaxial radiation light formed by the molten pool reversely passes through the laser output focusing module and the beam combining lens along a light path same as that of the composite laser beam and is emitted to the laser light path splitting piece 1. The laser light path light splitting piece 1 separates out coaxial radiation light from a laser light path, and the laser head monitoring module of the application is used for carrying out on-line monitoring on a laser processing molten pool.
In some embodiments of the multi-band laser optical path system of the present application, as shown in fig. 1 and 3, the laser processing head module includes two laser modules and one beam combining lens. Specifically, the laser processing head module comprises a first laser module 91 and a second laser module 92, wherein the first laser module 91 comprises a first laser 911 and a first collimating mirror 912. The first laser 911 can emit laser light in a first wavelength band, such as infrared laser light, and the first collimating mirror 912 is disposed at a laser light emitting port of the first laser 911 to collimate the laser light in the first wavelength band. A first laser window piece 913 may be further disposed between the first collimating mirror 912 and the first laser 911, and the first laser window piece 913 may be a window piece applied to an infrared band, such as a zinc selenide window piece. The second laser module 92 includes a second laser 921 and a second collimating mirror 922, the second laser 921 is capable of emitting laser light of a second wavelength band, such as blue laser light, and the second collimating mirror 922 is disposed at a laser light emitting port of the second laser 921 to collimate the laser light of the second wavelength band. A second laser window 923 may be further disposed between the second collimating mirror 922 and the second laser 921, and the second laser window 923 may be a window used in a visible light band, such as a K9 window. The beam combining lens uses a beam combining wedge-shaped lens 93, the beam combining wedge-shaped lens 93 is provided with two lens surfaces, namely a beam combining sheet first surface 931 and a beam combining sheet second surface 932, and a lens with a certain included angle is formed between the beam combining sheet first surface 931 and the beam combining sheet second surface 932. The beam combining wedge-shaped mirror 93 is arranged such that the first surface 931 of the beam combining sheet forms an angle of 45 ° with both the first laser 911 and the laser output focusing module, and the second surface 932 of the beam combining sheet faces the laser light path splitting sheet 1. A first surface 931 of the beam combining sheet is plated with a first-waveband laser high-reflection film, such as an infrared reflection increasing film; a second-band laser antireflection film, such as a blue-light antireflection film, is coated on the second surface 932 of the beam combining sheet. When the first band laser light emitted by the first laser module 91 is emitted to the first surface 931 of the beam combining sheet, the first band laser light can be reflected by the first surface 931 of the beam combining sheet to the laser output focusing module. Be provided with laser head wedge mirror 96 on the laser light path of second laser module 92, laser head wedge mirror 96 is a lens that has two mirror surfaces of wedge mirror first face 961 and wedge mirror second face 962, and becomes certain contained angle between wedge mirror first face 961 and the wedge mirror second face 962. A second band laser antireflection film, such as a blue light antireflection film, is coated on the first surface 961 of the wedge-shaped mirror, and a first band laser high-reflection film, such as an infrared high-reflection film, is coated on the second surface 962 of the wedge-shaped mirror. Laser head wedge mirror 96 sets up to wedge mirror first face 961 and the laser beam that second laser 921 sent become 45 jiaos, and wedge mirror second face 962 is divided piece 1 towards the laser light path, and the second wave band laser that second laser 921 emitted shines to laser light path through laser head wedge mirror 96 after divides piece 1, shines on beam combining piece second face 932 after the reflection of laser light path minute piece 1 to through beam combining piece first face 931 jets out, and the first wave band laser that reflects through beam combining piece first face 931 combines together, forms compound laser beam, like infrared blue light compound laser beam, shoots to laser output focusing module. The laser output focusing module comprises a focusing lens 94 and an output window sheet 95, wherein the focusing lens 94 can focus the composite laser beam on the material to be processed to form a laser spot with a set shape and a set size, so that the material to be processed can be better subjected to laser processing. The first-waveband laser high-reflection film on the first surface 931 of the beam combining sheet can improve the reflectivity of the first surface 931 of the beam combining sheet to the first-waveband laser, reflect more first-waveband lasers to the laser output focusing module, and improve the utilization rate of the first-waveband lasers; the anti-reflection films of the second-waveband laser on the first surface 961 of the wedge-shaped mirror and the second surface 932 of the beam combining sheet can improve the transmittance of the second-waveband laser and reduce the reflection loss of the second-waveband laser; the first waveband laser high reflection film on the wedge-shaped mirror second face 962 can reflect the first waveband laser reflected along the laser light path, and the first waveband laser is prevented from influencing the second laser 921. First laser window piece 913, second laser window piece 923 and output window piece 95 can keep apart laser optical path system and outside processing space, reduce the influence of outside dust to laser optical path system.
The laser processing equipment of the application uses the multiband laser processing optical path system of any embodiment of the application, and has the advantages.
In the description of the present invention, reference to the description of "one embodiment," "a specific embodiment," "a preferred embodiment," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In the present disclosure, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (12)
1. The utility model provides a laser head monitoring module which characterized in that: comprises a laser light path splitting piece (1), a polaroid (2) and a molten pool imaging module (3);
laser light path beam-splitting piece (1) sets up on the laser light path of laser head to can acquire the coaxial radiation light that laser beam machining molten bath formed, polaroid sheet (2) with molten bath imaging module (3) set gradually on the light path of coaxial radiation light.
2. The laser head monitoring module of claim 1, wherein: the device also comprises a first light splitting structure (4) and a spectrum detection module (5); the first light splitting structure (4) is arranged between the laser light path light splitting piece (1) and the polaroid (2) so as to split the coaxial radiation light to form a first split beam and a second split beam which are separated from each other, and the spectrum detection module (5) is arranged on the light path of the second split beam.
3. The laser head monitoring module of claim 2, wherein: the device also comprises a second light splitting structure (6) and a temperature detection module (7); the second light splitting structure (6) is arranged between the first light splitting structure (4) and the spectrum detection module (5) to split the second light splitting beam to form a third light splitting beam and a fourth light splitting beam which are separated from each other, the temperature detection module (7) is arranged on a light path of the third light splitting beam, and the spectrum detection module (5) is arranged on a light path of the fourth light splitting beam.
4. The laser head monitoring module of claim 3, wherein: the second light splitting structure (6) is a reflection type short-pass filter.
5. The laser head monitoring module of claim 3, wherein: the temperature detection module (7) comprises a temperature measurement coupling mirror (71) and a pyrometer (72).
6. The laser head monitoring module of claim 2, wherein: the first light splitting structure (4) is an annular reflector, one part of the coaxial radiation light passes through a central hole of the annular reflector to form the first light splitting beam, and the other part of the coaxial radiation light is reflected by the annular reflector to form the second light splitting beam; and a conical lens pair (8) is arranged on the optical path of the second split beam and adjacent to the annular reflecting mirror.
7. The laser head monitoring module of claim 2, wherein: the spectrum detection module (5) comprises a spectrometer coupling mirror (51) and a spectrometer (52).
8. The laser head monitoring module of claim 1, wherein: the molten pool imaging module (3) comprises an imaging lens (31) and a CMOS camera (32).
9. The laser head monitoring module of any one of claims 1 to 8, wherein: the laser light path light splitting piece (1) is a wedge-shaped light splitting piece, the wedge-shaped light splitting piece comprises a radiation light incoming surface (S1) facing the laser processing melting pool and a radiation light outgoing surface (S2) back to the laser processing melting pool, the wedge-shaped light splitting piece is set such that the incident angle of the coaxial radiation light towards the radiation light incoming surface (S1) is 45 degrees, and after the coaxial radiation light is refracted by the radiation light incoming surface (S1), the incident angle of the coaxial radiation light towards the radiation light outgoing surface (S2) is the Brewster angle of the wedge-shaped light splitting piece.
10. A multi-band laser optical path system is characterized in that: including laser processing head module and according to any one of claims 1-9 laser processing head monitoring module, laser processing head module includes laser output focus module, the laser module and at least one beam combining lens of at least two different wave bands, the laser beam that laser module sent can be in combine each other under the beam combining lens effect, form compound laser beam, laser output focus module sets up compound laser beam's light path, with can with compound laser beam assembles on treating the processing material, forms the laser facula, laser light path beam-splitting piece (1) sets up beam combining lens keeps away from one side of laser output focus module.
11. The system of claim 10, wherein: the laser processing head module comprises two laser modules and a beam combining lens, the laser processing head module comprises a first laser module (91) and a second laser module (92), the first laser module (91) comprises a first laser (911) and a first collimating mirror (912) which are used for emitting laser in a first waveband, the second laser module (92) comprises a second laser (921) and a second collimating mirror (922) which are used for emitting laser in a second waveband, the beam combining lens is a beam combining wedge-shaped mirror (93), the laser output focusing module comprises a focusing lens (94) and an output window sheet (95), the laser processing head module further comprises a laser head wedge-shaped mirror (96), the beam combining wedge-shaped mirror (93) comprises a beam combining sheet first surface (931) provided with a laser high reflection film in the first waveband and a beam combining sheet second surface (932) provided with a laser reflection reducing film in the second waveband, the beam combining wedge-shaped mirror (93) is arranged between the laser light path splitting piece (1) and the laser output focusing module, and can reflect the laser emitted by the first laser module (91) to the laser output focusing module through a first surface (931) of the beam combining piece; laser head wedge mirror (96) including be provided with the first face of wedge mirror (961) of second wave band laser antireflection coating and be provided with wedge mirror second face (962) of the high reflection coating of first wave band laser, laser head wedge mirror (96) set up second laser module (92) with between laser light path beam-splitting piece (1), just the first face of wedge mirror (961) orientation second laser module (92), so that the laser of second laser instrument (921) transmission can pass through laser head wedge mirror (96) back irradiation to laser light path beam-splitting piece (1), and the warp shine behind the reflection of laser light path beam-splitting piece (1) combine beam piece second face (932).
12. A laser machining apparatus characterized by: comprising the multiband laser processing optical path system according to claim 10 or 11.
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