CN205719985U - LIBS spectrographic detection and the multifunction system of micro-imaging - Google Patents
LIBS spectrographic detection and the multifunction system of micro-imaging Download PDFInfo
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- CN205719985U CN205719985U CN201620319450.1U CN201620319450U CN205719985U CN 205719985 U CN205719985 U CN 205719985U CN 201620319450 U CN201620319450 U CN 201620319450U CN 205719985 U CN205719985 U CN 205719985U
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- 238000003384 imaging method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 35
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 title claims abstract description 23
- 230000004075 alteration Effects 0.000 claims abstract description 13
- 238000012937 correction Methods 0.000 claims abstract description 9
- 238000000926 separation method Methods 0.000 claims description 22
- 238000004611 spectroscopical analysis Methods 0.000 claims description 10
- 239000013307 optical fiber Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
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- 238000007747 plating Methods 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims description 4
- 241000931526 Acer campestre Species 0.000 claims description 2
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- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
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- 230000009897 systematic effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
This patent relates to a kind of LIBS spectrographic detection and the multifunction system of micro-imaging, it is primarily characterized in that: a piece of Schmidt corrector is inserted in the primary mirror light path with testee, the one side of Schmidt corrector is designed to high order aspheric surface, the topmost effect of Schmidt corrector is the spherical aberration that correction primary and secondary mirror produces, it not only makes laser focusing spot diameter become less, it is also possible to make this LIBS system have the dual-use function of spectrographic detection and micro-imaging.
Description
Technical field
This patent relates to optical design arts, a kind of LIBS spectrographic detection and micro-imaging multi-functional
System.
Background technology
LIBS technology (LIBS Detection Techniques) is that one utilizes superpower laser to send
High-octane laser, focuses on remote body surface through laser focusing system, and object is by high energy
When the laser of amount irradiates, plasma spectrometry can be given off, by analyzing the characteristic spectrum in plasma spectrometry
Line comes the elementary composition of detecting material and content.Due to this technology prepare without sample, can measure simultaneously multiple
The advantage such as element and contactless quick measurement, is very suitable for on-line analysis, through extensively
Being applied to all trades and professions, its wide prospect and huge potential market are the focuses of countries in the world research.
Two very important problems of LIBS technology existence at present: first, due to gathering of laser focusing system
Burnt limited in one's ability, within the scope of only laser facula can being focused on 1mm, the power of laser instrument is the most relatively
Height, the design of laser instrument cooling system is the most extremely complex；Second, current LIBS technology is only by light
The method of spectrum detection carrys out composition and the content of detectable substance prime element, it is impossible to enough geometric shapes to material surface are entered
Row micro-imaging, lacks the visual imaging identification function to object.
In existing LIBS technology, as it is shown in figure 1, its device specifically includes that generating device of laser 1,
Laser primary beam-expanding system 2, reflecting mirror 3, dichroic mirror 4, telescope receives system (by primary mirror 5 and pair
Mirror 6 forms), fiber coupling system 8, optical fiber 9.Generating device of laser 1 works in a pulsed fashion, produces
A branch of high-octane laser, optical maser wavelength is 1064nm, after primary beam-expanding system 2 amplifies, by instead
Penetrate mirror 3 and dichroic mirror 4 enters telescope and receives system, focused on remote objects by primary mirror 5 reflection afterwards
The surface of 7, object 7 can produce plasma spectrometry after being irradiated by laser, and plasma spectrometry is through hoping
Remote mirror receives system and is reflexed to fiber coupling system 8 by secondary mirror 6, enters optical fiber 9 afterwards, finally by light
Spectrometer carries out spectrographic detection to material element composition and content.Owing to, in this technology, telescope receives system
System can produce bigger aberration, and then light path system anaberration is limited in one's ability, causes the MTF of laser receiver system
The lowest, therefore this technology cannot carry out imaging to remote objects surface geometry form；Secondly as telescope
The aberration of reception system is relatively big, therefore laser focusing spot diameter reduces and is restricted, and is only capable of at present focusing on light
Within spot diameter is 1mm scope, laser focusing hot spot cannot reduce further, and this will make laser instrument merit
Rate is the biggest, and then causes the design of laser instrument cooling system the most complex.
Summary of the invention
For solving problems of the prior art, this patent provides one can make laser focusing hot spot assemble
Within the less scope of diameter, both the elementary composition of remote objects and content can be carried out spectrographic detection, again
The geometric shape on remote objects surface can be carried out the multifunction system of micro-imaging.
For solving prior art problem and realize above-mentioned functions, this patent by the following technical solutions:
The laser of 1064nm launched by laser instrument 1, after expanding module 2 and amplifying, then by reflecting mirror 3 with inclined
The first color separation film 4 being placed between primary mirror 5 and secondary mirror 6 enters reflective microscopic system, after through aberration school
Positive plate 7 focuses on testee 8, and testee 8 produces plasma spectrometry after being irradiated by laser,
Plasma spectrometry enters coupled lens group 9 through primary mirror 5, secondary mirror 6 and the first color separation film 4, by coupling
The second color separation film 10 being offset to after coupled lens group 9, the second color separation film 10 is arrived after battery of lens 9
Light beam is divided into two-way, and a road light enters spectrographic detection module 11 and carries out spectrographic detection, and another road light enters
Imaging detector 12 carries out micro-imaging.
Described aberration correction plate 7 is added in reflective microscopic system, and is positioned over primary mirror 5 and testee 8
Between light path in, its can be greatly reduced reflective microscopic system produce aberration.
Described coupled lens group 9 is positioned over primary mirror central hole, is made up of two panels lens, two panels lens material
Abbe number difference more than 30, and bi-material at the spectral transmittance of 240nm-1000nm wave band all 90%
Above, not only make the hot spot being coupled in spectrographic detection module 11 become less, and improve system
MTF.
Described first color separation film is offset between primary mirror 5 and secondary mirror 6 so that whole system is compacter, the
The anti-reflection film of one color separation film plating 240nm-2400nm.
Described second color separation film is offset on the systematic optical axis after coupled lens group 9 with 45° angle, and it plates
240-850nm anti-reflection film so that the light of this wave band enters in spectrographic detection module 11；Plating 900-100nm
Anti-reflection film so that the light of this wave band enters on imaging detector 12.
The technique scheme of this patent has the advantage that compared to existing technology
(1) under different distance, laser can preferably be focused on, and focal beam spot diameter is less than 0.5mm,
This both ensure that testee surface can produce high-energy, highdensity plasma, reduces the most simultaneously
The power of laser instrument and the difficulty of laser instrument cooling system design；
(2) improve the MTF of system, be possible not only to and content elementary composition to object and carry out spectrographic detection, and
And the geometric shape of body surface can be carried out micro-imaging simultaneously, it is achieved that the spectrum of LIBS technology
Detection and the dual-use function of micro-imaging.
Accompanying drawing explanation
Fig. 1 is the focusing collector system optics structural representation of looking in the distance of existing LIBS remote probe；
Fig. 2 is the optical texture schematic diagram of the multifunction system of the LIBS spectrographic detection of this patent and micro-imaging；
Wherein, 1 is laser instrument, and 2 for expanding module, and 3 is reflecting mirror, and 4 first is color separation film, and 5 is main
Mirror, 6 is secondary mirror, and 7 is aberration correction plate, and 8 is testee, and 9 is coupled lens group, and 10 is second point
Color chips, 11 is spectrographic detection module, and 12 is imaging detector.
Detailed description of the invention
LIBS spectrographic detection described in this patent and the multifunction system of micro-imaging, as in figure 2 it is shown, laser
The laser of 1064nm launched by device 1, after expanding module 2 and amplifying, then by reflecting mirror 3 be offset to main
The first color separation film 4 between mirror 5 and secondary mirror 6 enters reflective microscopic system, after through aberration correction plate 7
Focusing on testee 8, testee 8 produces plasma spectrometry, plasma after being irradiated by laser
Body spectrum enters coupled lens group 9, by coupled lens group 9 through primary mirror 5, secondary mirror 6 and the first color separation film 4
Arriving the second color separation film 10 being offset to after coupled lens group 9 afterwards, light beam is divided by the second color separation film 10
Becoming two-way, a road light to enter spectrographic detection module 11 and carry out spectrographic detection, another road light enters imaging detection
Device 12 carries out micro-imaging.
Detailed description of the invention is as follows:
The beam of laser that wavelength is 1064nm launched by laser instrument 1, and laser spot diameter is 3mm, the angle of divergence
For 1mrad, laser pulse repetition frequency is 10Hz；
The laser that laser instrument 1 is launched is exaggerated after expanding module 2, and angle enlargement ratio is 0.13, amplifies
After spot diameter be 25mm；
Laser is reflexed to the secondary mirror 6 of microscopic system after expanding module 2 by reflecting mirror 3 and the first color separation film 4
On, focus on testee 8 through primary mirror 5 and aberration correction plate 7 the most again；
Testee 8 can produce plasma spectrum after being irradiated by laser, and plasma spectrometry is reflected formula
Enter in coupled lens group 9 after microscopic system；
By being divided into two-way light by the second color separation film 10 after coupled lens group 9, the spectral region of a road light is
240nm-850nm, it enters in optical fiber probe module 11 through the second color separation film 10, and optical fiber core diameter is
600um；The spectral region of another road light is 900nm-1000nm, is reflexed to imaging by the second color separation film 10 and visits
Surveying on device 12, the size of imaging detector is 1.92mm × 1.92mm.
Understanding according to optical software simulation, the laser focusing hot spot footmark size at 5m is 0.25mm, makes
Obtain this system laser focal beam spot diameter within 0.5mm scope.
Object at 5m is carried out spectrographic detection and micro-imaging, the coupled battery of lens of 240nm-850nm spectrum
After 9 when spot radius reaches 270um, encircled energy reaches more than 90%, therefore optical fiber probe module
The optical fiber core diameter used in 11 is 600um；At detector after the coupled battery of lens of 900nm-1000nm spectrum 9
MTF curve on 12 (spatial-cut-off frequency of detector is 16lp/mm) can reach more than 0.8, makes
Obtain this system and be provided with the dual-use function of spectrographic detection and micro-imaging.
Claims (9)
1. LIBS spectrographic detection and a multifunction system for micro-imaging, including: laser instrument (1), expands
Bundle module (2), reflective microscopic system, aberration correction plate (7), coupled lens group (9), fiber-optic probe
Module (11), imaging detector (12), it is characterised in that:
The laser of 1064nm launched by laser instrument (1), after expanding module (2) and expanding, by reflecting mirror
And the first color separation film (4) of being offset between primary mirror (5) and secondary mirror (6) enters reflective micro-(3)
System, after focus on testee (8) through aberration correction plate (7), testee (8) is subject to
Laser produces plasma spectrometry after irradiating, and plasma spectrometry is through primary mirror (5), secondary mirror (6) and first
Color separation film (4) enters coupled lens group (9), is offset to coupling by arriving after coupled lens group (9)
The second color separation film (10) after battery of lens (9), light beam is divided into two-way by the second color separation film (10), and one
Road light enters spectrographic detection module (11) and carries out spectrographic detection, and another road light enters imaging detector (12)
Carry out micro-imaging.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: described reflective microscopic system is by primary mirror (5), secondary mirror (6) and aberration correction plate (7)
Composition, aberration correction plate (7) is positioned in the light path between primary mirror (5) and testee (8), as
Difference correcting plate (7) is Schmidt corrector, and one of them surface is high order aspheric surface.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: the optical maser wavelength of described laser instrument (1) is 1064nm, emergent light spot diameter 3mm, sends out
Scattered angle is 1mrad.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: the described module (2) that expands is made up of two panels lens, and angle amplification is 0.13.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: described coupled lens group (9) is made up of two panels lens, the Abbe number difference of two panels lens
More than 30, and bi-material at the spectral transmittance of 240nm-1000nm wave band all more than 90%.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: described the first color separation film (4) upper plating 1064nm reflectance coating, 240nm-1000nm anti-reflection film.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: described the second color separation film (10) upper plating 900nm-1000nm reflectance coating, 240nm-850nm
Anti-reflection film.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: the optical fiber core diameter used in described optical fiber probe module (11) is 600um, and is divided into
Tri-wave bands of 240nm-340nm, 340nm-540nm, 540nm-850nm carry out spectrographic detection respectively.
LIBS spectrographic detection the most according to claim 1 and the multifunction system of micro-imaging, its
It is characterised by: the pixel size of described imaging detector (12) is 64 × 64, and pixel dimension size is
30um。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620319450.1U CN205719985U (en) | 2016-04-15 | 2016-04-15 | LIBS spectrographic detection and the multifunction system of micro-imaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620319450.1U CN205719985U (en) | 2016-04-15 | 2016-04-15 | LIBS spectrographic detection and the multifunction system of micro-imaging |
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| Publication Number | Publication Date |
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| CN205719985U true CN205719985U (en) | 2016-11-23 |
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| CN201620319450.1U Expired - Fee Related CN205719985U (en) | 2016-04-15 | 2016-04-15 | LIBS spectrographic detection and the multifunction system of micro-imaging |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220074424A (en) * | 2020-11-27 | 2022-06-03 | 한국생산기술연구원 | Laser induced breakdown spectroscopy system using reflective lens |
-
2016
- 2016-04-15 CN CN201620319450.1U patent/CN205719985U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220074424A (en) * | 2020-11-27 | 2022-06-03 | 한국생산기술연구원 | Laser induced breakdown spectroscopy system using reflective lens |
| KR102595202B1 (en) * | 2020-11-27 | 2023-10-30 | 한국생산기술연구원 | Laser induced breakdown spectroscopy system using reflective lens |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161123 |
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