CN115981017A - Multi-path laser color separation and beam combination module and adjusting method thereof - Google Patents
Multi-path laser color separation and beam combination module and adjusting method thereof Download PDFInfo
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Abstract
The invention discloses a multi-path laser color separation beam combination module and an adjusting method thereof, wherein the multi-path laser color separation beam combination module comprises a beam combination body (1), the beam combination body (1) is an optical monomer, a plane on one side of the beam combination body (1) is an incident plane (2), and a plane on the opposite side parallel to the incident plane (2) is divided into an emergent plane (4) at one end and a reflecting plane (3) outside the emergent plane (4); the incident surface (2) is divided into N coating areas, the surfaces of the N coating areas are correspondingly provided with color separation dielectric films with different high reflection coefficients, and the surface of the reflecting surface (3) is provided with a broadband high reflection dielectric film; and a broadband antireflection film is arranged on the surface of the emergent surface (4). The multi-path laser color separation and beam combination module provided by the invention is integrated, can realize high-quality synthesis of multi-path lasers with different wavelengths according to the adjustment method, has the outstanding advantages of good optical axis stability and compact optical path layout, and can be used for high-stability and high-precision synthesis of multi-path lasers with different wavelengths.
Description
Technical Field
The invention relates to the technical field of laser synthesis, in particular to a multi-path laser color separation and beam combination module and an adjusting method thereof.
Background
The laser synthesis technology has important functions of improving the laser output power and expanding the working wavelength range of laser. The current laser synthesis technology mainly comprises two technical routes of coherent synthesis and incoherent synthesis. The coherent synthesis has very high requirements on the coherence of each path of laser participating in the synthesis, and needs complex closed-loop control and complex technology. Therefore, the laser synthesis technology applied in the field of laser technology at present mostly adopts color separation synthesis. The laser with multiple wavelengths can be synthesized into a laser beam to be output through a plurality of dichroic mirrors, so that the power of the output laser is expanded, and the wave band is widened.
However, in practical engineering, because each lens is designed independently and is affected by environmental temperature change and vibration, misalignment of each lens in different directions causes relative change of laser output optical axes with different wavelengths, and the quality of output light beams is affected; meanwhile, under the high-power working condition, because the power borne by each mirror surface is inconsistent, different dynamic angle deviations are generated on each mirror surface, the optical axes of the laser with different wavelengths participating in synthesis can be dynamically changed, the synthesized laser generates obvious light spot expansion in a far field (the surface of an action object), the quality of an output light beam is reduced, and the using effect is influenced.
Disclosure of Invention
In order to overcome the technical problems, the invention aims to provide a multi-path laser color separation and beam combination module and an adjusting method thereof.
The invention provides the following technical scheme:
a multi-path laser color separation and beam combination module comprises a beam combination body (1), wherein the beam combination body (1) is an optical monomer; the plane on one side of the beam combining body (1) is an incident plane (2), and the plane on the opposite side parallel to the incident plane (2) is divided into an emergent plane (4) at one end and a reflecting plane (3) outside the emergent plane (4);
the incident surface (2) is divided into N coating areas, N paths of laser beams enter the beam combining body (1) from the corresponding N coating areas respectively, and the incident angle between the ith path of collimated laser and the incident surface (2) is alpha i Wherein N is a natural number greater than or equal to 1, and i is a natural number greater than or equal to 1 and less than or equal to N; delta lambada i is the ith laser spectral width, lambada i The central wavelength of the ith laser; the surface of the ith coating area corresponding to the ith laser is correspondingly provided with a color separation dielectric film, and the wavelength range of the color separation dielectric film of the ith coating area is more than or equal to lambda i -Δλ i/ 2 and lambda or less i +Δλ i The incident laser light of/2 is highly transparent and has a wavelength less than lambda i -Δλ i/ 2, high laser reflection;
a broadband high-reflection dielectric film is arranged on the surface of the reflecting surface (3);
and a broadband antireflection film is arranged on the surface of the emergent surface (4).
In the above embodiment, the beam combining module is an optical single structure, and the incident angle between the ith laser beam and the incident surface (2) is α i And correspondingly plating color separation dielectric films with different high reflection coefficients in an ith film plating area corresponding to the ith path of collimated laser, and setting the color separation dielectric films with different high reflection coefficients so as to highly transmit or highly reflect the laser with different wavelengths. The broadband high-reflection dielectric film is used for performing high reflection on laser light emitted to the reflecting surface, and the laser light is emitted from the emitting surface.
Further, the beam combining body (1) is an optical monomer, and the bulk absorption coefficient of the optical monomer to the laser of each wavelength participating in synthesis is less than 0.02/cm.
Furthermore, after the ith path of laser is incident into the beam combining body (1), the refraction angle between the ith path of laser and the incident surface (2) is beta i The spot diameter of the ith laser is d i ，
The width W of the beam combining body (1) satisfies the following conditions: w>max{d i /(cosα i tanβ i )}；
The length L of the beam combining body (1) satisfies the following conditions: l is>N×max{d i /cosα i }；
The height H of the beam combining body (1) meets the following requirements: h>max{d i }。
Further, the N coating areas are N equally divided areas of the incident surface (2) along the length L.
Further, the length of the emitting surface (4) is L 1 ，L 1 >max{d i }。
Further, the laser medium film plated in the ith film plating area is opposite to incident laser lambda i Transmittance of more than 97% and wavelength of less than lambda i -Δλ i The laser reflectivity of the/2 is more than 99 percent.
Further, the reflectivity of the broadband high-reflectivity dielectric film is greater than 98%.
Furthermore, the broadband antireflection film on the surface of the emergent surface (4) has laser transmittance of more than 99% for the wavelength lambada i.
Further, the beam combining body is a cuboid.
The invention also provides a method for adjusting the multi-path laser color separation and beam combination module, which is used for adjusting the ith laser incidence angle alpha i The step of adjusting comprises:
s1: a long focal lens (7) is correspondingly arranged outside the emergent surface (4), and the optical axis of the long focal lens (7) is collinear with the optical axis of the emergent laser;
s2: placing a photoelectric detection device (8) at the focal plane of the tele lens (7);
s3: the ith laser incidence angle is adjusted by observing the spot center on the focal plane of the long focal lens (7)α i The centers of all paths of emergent laser spots are all positioned at the same imaging pixel position of the photoelectric detection device (8);
s4: and fixing the angle of the ith incident laser beam.
In the above embodiments, the photodetector device is selected from one of a four quadrant sensor, a CCD, or a CMOS imaging device.
Compared with the prior art, the invention has the following beneficial effects:
the multi-path laser color separation beam combination module is integrated, has a simple structure, realizes high-quality combination of multi-path lasers with different wavelengths, has the outstanding advantages of good optical axis stability and compact light path layout, can be used for high-stability and high-precision combination of multi-path lasers with different wavelengths, has good output light beam quality, and obviously improves the long-term stability of the system.
Drawings
Fig. 1 is a schematic diagram of a multi-channel laser color-splitting beam-combining module provided by the invention.
Fig. 2 is a schematic diagram of a multi-channel laser color splitting and beam combining module according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of an adjusting method of the multi-path laser color-separating beam-combining module according to the present invention.
Fig. 4 is a schematic multi-view diagram of embodiment 1 provided in the present invention.
The reference numbers in the figures are:
1. a bundling body; 2. an incident surface; 3. a reflective surface; 4. an exit surface; 5. two-dimensionally adjusting the optical frame; 6. a laser collimator; 7. a telephoto lens; 8. a photodetector device.
Detailed Description
The present invention is described in detail with reference to the following embodiments and drawings, but it should be understood that the embodiments and drawings are only for illustrative purposes and are not intended to limit the scope of the present invention. All reasonable variations and combinations that fall within the spirit of the invention are intended to be within the scope of the invention.
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1, the basic principle of the present invention is that multiple paths of collimated lasers with different wavelengths enter a beam combining module from corresponding coating regions at corresponding incident angles, and are selectively and highly transmitted or reflected between a reflection surface 3 and an incident surface 2 of the beam combining module, and after the nth path of laser is combined with the first N-1 paths of laser at the incident surface 2, the nth path of laser is transmitted to an exit surface 4 to realize the beam combining module for outputting combined laser.
As shown in fig. 2, the beam combining body 1 of the multi-path laser color separation beam combining module is a cuboid optical monomer, the left plane of the beam combining body is an incident plane 2, a reflecting plane 3 is arranged above the right plane parallel to the left plane, and an emergent plane 4 is arranged below the right plane; the incidence surface 2 is divided into 5 coating areas from top to bottom, and the number of the laser beams and the number of the coating areas are 5 in the figure. 5 paths of laser beams are arranged from top to bottom and respectively enter the beam combining body 1 from the corresponding coating areas in an incident mode, wherein the central wavelength of the ith path of laser is lambda i The incident angle of the ith laser beam to the incident surface 2 is set to alpha i ，Δλ i The spectrum width of the ith laser is shown, wherein i is a natural number between 1 and 5; plating a color separation dielectric film on the ith film coating region corresponding to the ith laser, wherein the color separation dielectric film has a wavelength range of more than or equal to lambda to the incident laser i -Δλ i A/2 and λ or less i +Δλ i The incident laser light of/2 is highly transparent and has a wavelength less than lambda i -Δλ i The laser light of/2 is high-reflection; the surface of the reflecting surface 3 is plated with a broadband high-reflection dielectric film which is highly reflective to laser; the exit surface 4 is coated with a material having a wavelength λ i A broadband antireflection film with the transmittance of more than 99 percent. The beam combination body 1 is subjected to optical processing and is coated with films on the incident surface 2, the reflecting surface 3 and the emergent surface 4 of the laser in different regions, and the lasers with different wavelengths can be selectively subjected to high transmission or reflection, so that the aim of color separation and beam combination of multi-path lasers is fulfilled.
Based on the above structure, N paths of collimated laser with different wavelengths respectively enter the corresponding ith coating region at the corresponding incident angle α i The beam enters the beam combining body 1, is reflected between the reflecting surface 3 and the incident surface 2, and the Nth path of laser and the front N-1 paths of laser are combined at the incident surface 2 and then transmitted to the emergent surface 4 to realize the output of the combined laser beam combining body 1. Wherein N is 1 or moreThe number i is a natural number of 1 or more and N or less.
More specifically, the ith laser has a center wavelength of λ i More than 90% of energy falls at a wavelength of λ or more i -Δλ i λ 2 and less than or equal to i +Δλ i Range of/2, Δ λ i The spectral width of the ith laser; the spot diameter of the ith laser is d i 。
The optical monomer is made of a single optical material with a wavelength of lambda i The absorption coefficient of the laser body is less than 0.02/cm, so that the beam combining body 1 is ensured not to generate excessive thermal expansion.
After the ith laser beam is incident into the beam combining body 1, the refraction angle between the ith laser beam and the incident surface 2 is beta i (ii) a The spot diameter of the ith laser is d i ；
The incident angle of the ith laser beam at the incident surface 2 is alpha i After being incident to the single beam combining module, the refraction angle is beta i The following can be obtained:
sinβ i ＝sinα i /n i
wherein n is i Is a single optical material with a central wavelength of λ for the ith path i The refractive index of the laser.
Wherein, close and restraint body 1 width W and satisfy: w is a group of>max{d i /(cosα i tanβ i )}；
The length L of the bundling body 1 satisfies the following conditions: l is a radical of an alcohol>N×max{d i /cosα i }；
The height H of the bundling body 1 satisfies the following conditions: h>max{d i }。
In fig. 2, the bundling body 1 has a width W along the Y-axis direction, a length along the Z-axis direction, and a height H along the X-axis.
The laser dielectric film can be coated for N times, and the rest area of the incident surface 2 is shielded in the coating machine each time, so that the laser dielectric film coated in the ith area can be used for the incident laser lambda i Transmittance of more than 97% and wavelength of less than lambda i -Δλ i The laser reflectivity of the/2 is more than 99 percent.
The reflecting surface 3 is plated with a high-reflection dielectric film to realize high reflectivity of the laser beams at all wavelengths, and the reflectivity of the high-reflection dielectric film is larger than 98%.
The exit surface 4 is located on the same plane as the reflection surface 3. And after the Nth path of laser is combined with the first N-1 paths of laser on the incident surface 2, the combined laser is transmitted to the emergent surface 4 to realize beam combination laser output. The length of the emission surface 4 is L 1 Wherein L is 1 >max di. This region is plated with a pair of i (i =1 to N) a film system having a transmittance of more than 99% realizes a combined laser output.
After the laser with different wavelengths and the same incident angle passes through the beam combining body 1, due to the weak difference of the optical material to the refractive indexes of the laser with different wavelengths, mainly the dispersion effect and the processing wedge angle error when the beam combining body 1 of the optical monomer is processed, the error enables the incident surface 2 and the reflecting surface 3 to have an included angle gamma, and the final emergent angles of the laser with different wavelengths at the output surface have the weak difference. Therefore, in the actual engineering manufacture, the incident angle alpha of the ith laser can be finely adjusted i So that the optical axes of the laser lights with different wavelengths on the emergent surface 4 of the beam combining module are kept consistent.
The invention also provides an adjusting method of the multi-path laser color separation beam combination module, as shown in fig. 3, the precise adjusting method of the i-th path collimation laser incidence angle comprises the following steps:
s1: a long-focus lens is correspondingly arranged outside the emergent surface 4, and the optical axis of the long-focus lens 7 is collinear with the optical axis of the 1 st path of emergent laser;
s2: a photoelectric detection device 8 is arranged at the focal plane of the long-focus lens 7;
s3: the ith laser incidence angle alpha is precisely adjusted by observing the center of a light spot on the focal plane of the tele lens 7 i So that the centers of all the paths of emergent laser light spots are all positioned at the same imaging pixel position of the photoelectric detector 8;
and S4, after the incident angle is precisely adjusted, fixing the angle of the i-th path of incident laser beam.
The photoelectric detection device 8 is selected from an existing four-quadrant sensor, a CCD or a CMOS imaging device; the focal length of the long-focus lens 7 is an anti-aberration lens with the focal length larger than 1 m; the way of fixing the angle of the incident laser beam may be selected from gluing or mechanical locking. And repeating the adjusting method until the incident angles of all the paths of laser are precisely adjusted, and removing the long-focus lens 7 and the photoelectric detection device 8 after the adjustment is finished.
The method for precisely adjusting the incident angle of the incident laser beam is well known in the art, and the adjustment of the incident angle of the incident laser beam can be achieved by using an existing two-dimensional adjusting optical frame 5.
Example 1:
fig. 4, view a is a front view, view b is a left view, view c is a top view, and view d is an isometric view. The laser wavelengths participating in synthesis are respectively 1056nm,1062nm,1068nm,1074nm and 1080nm 5 paths of optical fiber lasers, and the spectrum width of each path of laser is 2nm. Each path of fiber laser is connected to an industrial end cap and a laser collimator 6 through a tail fiber, and the diameters of light beams emitted by the laser collimator 6 are d i =10mm; the collimation beam expander is clamped by a two-dimensional adjusting optical frame 5 and is arranged on the same substrate. The two-dimensional adjusting optical frame 5 is sequentially arranged along the X axis from a long wave band to a short wave band, and is respectively 1080nm, 1074nm, 1068nm, 1062nm and 1056nm laser. Through mechanical installation and the preliminary adjustment of the two-dimensional adjusting optical frame 5, the optical axes of the five outgoing beams are parallel to the Z direction of the substrate, the height between each laser outgoing optical axis and the XOZ surface is 25mm, and the distance between the optical axes is 50mm.
The material of the beam combining body 1 is selected from a Corning 7980 quartz material, and the bulk absorption coefficient of the laser beam with the particle size of 1-1.1 mu m is very small; the size is as follows: width W =80mm, height H =50mm, length L =250mm.
The incident surface 2, the reflecting surface 3 and the output surface 4 on the beam combining module are processed into planes, the PV value of the plane type precision is better than 0.1 lambda, wherein lambda is the shortest wavelength participating in synthesis, namely lambda =1056nm, and the included angle of the two planes is less than 3 arc seconds.
The incidence surface 2 of the beam combining module is divided into five equally divided areas along the length L direction, and the films are sequentially coated according to the sequence from short wave to long wave, and the size of each film coating area is 50mm multiplied by 50mm. When each area is coated, other areas need to be protected, and the influence on the transmittance/reflectivity of other areas during coating is avoided.
The requirements of the coating system of the area 1 are as follows: the transmittance between 1055nm and 1057nm is more than 99 percent;
the requirements of the coating system of the area 2 are as follows: the transmittance between 1061nm and 1063nm is more than 99 percent; the reflectivity of 1055 nm-1057 nm is more than 99 percent;
the requirements of the coating system of the area 3 are as follows: the transmittance between 1067nm and 1069nm is more than 99 percent; the reflectivity of 1055 nm-1063 nm is more than 99%;
the requirements of the coating system of the area 4 are as follows: the transmittance of 1073 nm-1075 nm is more than 99 percent; the reflectivity of 1055 nm-1069 nm is more than 99%;
the requirements of the coating system of the area 5 are as follows: the transmittance of 1079 nm-1081 nm is more than 99 percent; the reflectivity of 1055 nm-1075 nm is more than 99 percent;
the coating requirements of the reflecting surface 3 are as follows: the reflectivity of 1055 nm-1081 nm is more than 99 percent;
the coating requirements of the emergent surface 4 are as follows: the transmittance of 1055 nm-1081 nm is more than 99 percent;
a beam combining module mounting area with a recess of 1mm is processed on the XOZ surface of the substrate, the size of the beam combining module mounting area is 250mm (L) multiplied by 80mm (W), and the angle between the long edge L and the Z axis is 80 degrees. And the beam combining module is arranged in the concave mounting area, so that the incident surface 2 faces the incoming light direction, and the laser light with different wavelengths is incident to the corresponding high-transmittance coating area. The bundling modules are fixed using mechanical clamping or gluing. This ensures that the initial incident angle of the five laser beams on the incident surface 2 of the beam combining module is 10 °.
A telephoto lens 7 having a focal length of 1m is provided on the emission surface 4 so that the laser light having a wavelength of 1056nm is normally incident on the telephoto lens 7, and a focal spot is formed at the focal plane of the telephoto lens 7. The laser light is attenuated using obliquely placed mirrors and attenuation sheets in front of the tele lens 7 so that the laser power at the focal plane is less than 1mW. A CMOS camera or a commercial light spot analyzer is arranged on a focal plane, the light spot morphology is collected, the pixel coordinates (X0 and Y0) of the light spot centroid position on the camera can be calculated, and the coordinate data is recorded to be used as the reference for fine adjustment of other 4 laser incidence angles.
And sequentially finely adjusting two-dimensional inclination adjusting knobs of the rest 4 paths of optical adjusting frames to enable the light spot mass centers of the rest 4 paths of laser to be located at the (X0, Y0) positions, and indicating that the emergent optical axes of the 5 paths of laser are adjusted with high precision.
And removing the reflector, the attenuation sheet, the tele lens 7 and the CMOS camera, simultaneously starting 5 paths of laser, and emitting laser on the emitting surface 4 of the beam combination module, namely, the single-path laser beam formed by combining five paths of laser with different wavelengths.
Due to the existence of dispersion, the initial incident angle alpha can be paired according to the pixel coordinate of each path of monitored light spot on the focal plane i Are all set to 10 degrees and then are set according to the ith laser incidence angle alpha i The step of adjusting (2) is fine-tuned.
The above examples are merely preferred embodiments of the present invention, and the scope of the present invention is not limited to the above examples. All technical schemes belonging to the idea of the invention belong to the protection scope of the invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention, and such modifications and embellishments should also be considered as within the scope of the invention.
Claims (10)
1. A multi-path laser color separation beam combination module is characterized in that: the optical fiber bundle combining device comprises a bundle combining body (1), wherein the bundle combining body (1) is an optical monomer; the plane on one side of the beam combining body (1) is an incident plane (2), and the plane on the opposite side parallel to the incident plane (2) is divided into an emergent plane (4) at one end and a reflecting plane (3) outside the emergent plane (4);
the incident surface (2) is divided into N coating areas, N paths of laser beams enter the beam combining body (1) from the corresponding N coating areas respectively, and the incident angle between the ith path of collimated laser and the incident surface (2) is alpha i Wherein N is a natural number greater than or equal to 1, and i is a natural number greater than or equal to 1 and less than or equal to N; delta lambda i Is the ith laser spectral width, lambda i The central wavelength of the ith laser; the surface of the ith coating area corresponding to the ith laser is correspondingly provided with color separation dielectric films with different high reflection coefficients, and the wavelength range of the color separation dielectric film of the ith coating area is more than or equal to lambda i -Δλ i A/2 and λ or less i +Δλ i The incident laser light of/2 is highly transparent and has a wavelength less than lambda i -Δλ i The incident laser light of/2 is high-reflection;
a broadband high-reflection dielectric film is arranged on the surface of the reflecting surface (3);
and a broadband antireflection film is arranged on the surface of the emergent surface (4).
2. The multi-channel laser color-splitting beam-combining module according to claim 1, wherein: the beam combination body (1) is an optical monomer, and the bulk absorption coefficient of the optical monomer to the laser with each wavelength participating in the synthesis is less than 0.02/cm.
3. The multi-channel laser color-splitting beam-combining module according to claim 1, characterized in that: after the ith path of laser is incident into the beam combining body (1), the refraction angle between the ith path of laser and the incident surface (2) is beta i The spot diameter of the ith laser is d i ，
The width W of the beam combining body (1) satisfies the following condition: w is a group of>max{d i /(cosα i tanβ i )}；
The length L of the beam combining body (1) satisfies the following conditions: l is>N×max{d i /cosα i }；
The height H of the beam combining body (1) meets the following requirements: h>max{d i }。
4. The multi-channel laser color-splitting beam-combining module according to claim 3, wherein: the N coating areas are N equally divided areas of the incident face (2) along the length L.
5. The multi-channel laser color-splitting beam-combining module according to claim 3, wherein: the length of the emergent surface (4) is L 1 ，L 1 >max{d i }。
6. The multi-channel laser color-splitting beam-combining module according to claim 1, characterized in that: the color separation dielectric film plated in the ith film plating area is opposite to the incident laser lambda i The transmittance is more than 97%, and the wavelength is less than lambda i -Δλ i The laser reflectivity of the/2 is more than 99 percent.
7. Root of herbaceous plantsThe multi-channel laser color-splitting beam-combining module of claim 1, wherein: the broadband high-reflectivity dielectric film has a lambda wavelength i The reflectivity of the laser is greater than 98%.
8. The multi-channel laser color-splitting beam-combining module according to claim 1, characterized in that: the broadband antireflection film on the surface of the emergent surface (4) has a wavelength of lambda i The laser transmittances are all more than 99 percent.
9. The multi-channel laser color-splitting beam-combining module according to claim 1, characterized in that: the beam combining body (1) is a cuboid.
10. The method for adjusting any of the multi-channel laser color-splitting and beam-combining modules according to claims 1 to 9, wherein the incident angle α for the ith channel of laser light is i The step of adjusting comprises:
s1: a long-focus lens (7) is correspondingly arranged outside the emergent surface (4), and the optical axis of the long-focus lens (7) is collinear with the optical axis of the emergent laser;
s2: placing a photoelectric detection device (8) at the focal plane of the tele lens (7);
s3: adjusting the i-th laser incidence angle alpha by observing the spot center on the focal plane of the tele lens (7) i The centers of all paths of emergent laser spots are all positioned at the same imaging pixel position of the photoelectric detection device (8);
s4: and fixing the angle of the ith incident laser beam.
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| CN116154599A (en) * | 2023-04-23 | 2023-05-23 | 中国工程物理研究院激光聚变研究中心 | Compact spectrum synthesizer |
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| CN116154599A (en) * | 2023-04-23 | 2023-05-23 | 中国工程物理研究院激光聚变研究中心 | Compact spectrum synthesizer |
| CN116154599B (en) * | 2023-04-23 | 2023-12-29 | 中国工程物理研究院激光聚变研究中心 | Compact spectrum synthesizer |
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