CN115117195A - Solar cell heat treatment device and heat treatment method - Google Patents
Solar cell heat treatment device and heat treatment method Download PDFInfo
- Publication number
- CN115117195A CN115117195A CN202110307140.3A CN202110307140A CN115117195A CN 115117195 A CN115117195 A CN 115117195A CN 202110307140 A CN202110307140 A CN 202110307140A CN 115117195 A CN115117195 A CN 115117195A
- Authority
- CN
- China
- Prior art keywords
- solar cell
- temperature
- heat treatment
- cavity
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 100
- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 238000002347 injection Methods 0.000 claims description 28
- 239000007924 injection Substances 0.000 claims description 28
- 238000001816 cooling Methods 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000003570 air Substances 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 3
- 239000000112 cooling gas Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000002161 passivation Methods 0.000 abstract description 32
- 230000008569 process Effects 0.000 abstract description 25
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 24
- 239000001257 hydrogen Substances 0.000 abstract description 24
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 24
- 230000000694 effects Effects 0.000 abstract description 11
- 230000000052 comparative effect Effects 0.000 description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- LBZRRXXISSKCHV-UHFFFAOYSA-N [B].[O] Chemical class [B].[O] LBZRRXXISSKCHV-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a solar cell heat treatment device, which is characterized in that: there is at least one sealable cavity, each cavity comprising: the pair of clamping plates can fix the solar cell sets stacked in the same direction, and a processing station capable of accommodating the solar cell sets for heat treatment is formed between the pair of clamping plates; the heating module can increase the temperature in the cavity to be more than 200 ℃, and the heating module is an infrared lamp tube; the temperature detection module can acquire the temperature inside the cavity and on the surface of the solar cell; the temperature control module can receive the temperature information collected by the temperature detection module, compares the temperature information with a set temperature value, and sends a control instruction to the heating module to maintain the temperature in the cavity at the set temperature value. The invention also discloses a heat treatment method of the solar cell. The invention has better hydrogen passivation effect and simpler process, and is particularly suitable for the solar cell with the TOPCon structure.
Description
Technical Field
The invention relates to a processing technology of a crystalline silicon solar cell, in particular to a heat treatment device and a heat treatment method of a solar cell, and belongs to the technical field of solar cell production.
Background
Light Induced Degradation (LID), referred to as Light attenuation, refers to the phenomenon of power attenuation caused by solar cells and modules during the process of illumination. It is believed that the main cause of this phenomenon is the reduction of minority carrier lifetime by boron-oxygen complexes in P-type (boron-doped) crystalline silicon wafers. By passivating the solar cell under certain process conditions and passivating the internal defects of the crystalline silicon cell, the recombination center is reduced, the conversion efficiency of the photovoltaic cell can be effectively improved, the photoinduced attenuation and the heat-assisted attenuation of the crystalline silicon cell are effectively reduced, the generated energy in the life cycle of a photovoltaic system is improved, and finally the investment of the photovoltaic system is reduced.
On the other hand, with the continuous progress of industrial technology and the demand for low-cost internet access, people continuously explore and develop various high-efficiency crystalline silicon battery technologies. The TOPCon (Tunnel Oxide passivation contact) cell is one of the high-efficiency solar cells acknowledged in the industry, and an excellent passivation contact structure is formed by preparing a layer of ultrathin silicon Oxide layer on the back surface of a silicon wafer, doping phosphorus to form a microcrystalline amorphous mixed Si film, and performing high-temperature annealing activation.
In the prior art, in the hydrogen passivation process of the solar cell, the temperature is generally controlled to be about 150-. However, the passivation effect of different types of solar cells is not as uniform as possible due to the difference in their structures. Different hydrogen passivation processes need to be designed for different types of solar cells to achieve the best passivation effect.
Disclosure of Invention
The invention provides a solar cell heat treatment device aiming at the problems, which improves the hydrogen passivation effect of the solar cell. In another aspect of the invention, a heat treatment method for a solar cell is also provided.
Therefore, the invention adopts the following technical scheme:
a solar cell heat treatment device is characterized in that: having at least one sealable cavity (1), each cavity (1) comprising:
the pair of clamping plates (2) can fix the solar cell sets (101) stacked in the same direction, and a processing station capable of accommodating the solar cell sets to carry out heat treatment is formed between the pair of clamping plates;
the heating module can increase the temperature in the cavity to be more than 200 ℃, and the heating module is an infrared lamp tube (3);
the temperature detection module (4) can collect the temperature inside the cavity and on the surface of the solar cell;
the temperature control module can receive the temperature information collected by the temperature detection module, compares the temperature information with a set temperature value, and sends a control instruction to the heating module to maintain the temperature in the cavity at the set temperature value.
Furthermore, the infrared lamp tubes (3) are symmetrically arranged on the periphery of the electric injection cavity.
Furthermore, the infrared lamp tube (3) is arranged at the bottom of the two sides of the electric injection cavity.
Furthermore, N solar cell sets (101) can be accommodated in one cavity (1), N is larger than or equal to 1, and a heat conduction module (5) is arranged between the solar cell sets.
Further, the heat conducting module (5) includes a pair of electrically and thermally conductive metal plates (51) and a metal heat sink (52) interposed between the pair of metal plates.
Furthermore, M middle heat conduction plates (6) are arranged between the cells of each solar cell group at equal intervals, wherein M is more than or equal to 1.
Further, at least a part of the intermediate heat-conducting plate (6) is located near the center of the cell, at least one end of the intermediate heat-conducting plate extends to the edge of the cell and is provided with thermocouples (7) at the end, and the thermocouples are arranged in pairs.
Further, at least one tail end of the middle heat conduction plate (6) extends to the outside of the battery piece to form a free end, the temperature detection module comprises an infrared sensor, and the infrared sensor collects the temperature of the free end of the middle heat conduction plate.
Further, the device also comprises a cooling module (8), wherein the cooling module (8) is an air cooling device, blades or fans are used for blowing air to blow and blow up and down, and cooling gas is compressed air, nitrogen or argon.
Further, the temperature control module adopts PID control.
In another aspect of the present invention, a solar cell heat treatment method for performing heat treatment on a solar cell by using any one of the above solar cell heat treatment apparatuses is further provided, including the steps of:
s1, stacking a plurality of solar cells in the same direction;
s2, arranging N solar cell sets in a cavity together, wherein a heat conduction module is arranged between the solar cell sets, and N is more than or equal to 1;
s3, carrying out heat treatment on the solar cell piece set: the heating module works to raise the temperature in the cavity and controls the temperature at 400 ℃ of 200 plus materials, and the duration time is 30-180 min;
and S4, stopping heating, and cooling the temperature in the cavity.
Further, in step S3, the temperature is raised and controlled at 400 ℃ for 60-150 min.
Further, in step S3, the temperature is raised and controlled at 350 ℃ for 60-120 min.
According to the heat treatment device and the heat treatment method for the solar cell, the process of electric injection of the solar cell is not needed, and the hydrogen passivation process for the solar cell can be completed only through heat treatment. Meanwhile, the solar cell can obtain better passivation effect by controlling the process conditions, particularly controlling the temperature parameters in the hydrogen passivation process to carry out hydrogen passivation in a relatively high-temperature environment. In the conventional electric injection process, the heating temperature is generally not more than 200 ℃, and is generally between 100 ℃ and 180 ℃. The applicant finds that hydrogen passivation of the solar cell with the TOPCon structure in a high-temperature process of more than 200 ℃, particularly more than 250 ℃ has a better passivation effect. And traditional heating methods, like the heating methods through the metal hot plate that is located electricity injection cavity top and below, can not realize above-mentioned relative high temperature's heating demand, appear easily that the temperature inside the battery unit of piling up is not up to standard, seriously influences the passivation effect and the passivation efficiency of battery piece.
Compared with the prior art, the invention has the advantages that:
1) has better hydrogen passivation effect, and is particularly suitable for a solar cell with a TOPCon structure.
2) The temperature control process is more accurate.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a schematic structural diagram of a solar cell heat treatment apparatus according to the present invention;
fig. 2 and 3 are schematic structural views of the intermediate heat-conducting plate and the battery unit according to the present invention;
FIG. 4 is a schematic view of the construction of the intermediate heat-conducting plate of the present invention;
in the figure, a cavity 1, a clamping plate 2, an infrared lamp tube 3, a temperature detection module 4, a heat conduction module 5, a heat conduction metal plate 51, a metal radiating fin 52, an intermediate heat conduction plate 6, a thermocouple 7 and a cooling module 8; solar cell sheet 100 and solar cell sheet group 101.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.
Example 1:
as shown in fig. 1, 3 and 4, the present embodiment provides a solar cell heat treatment apparatus, which has at least one sealable cavity 1, and each cavity can constitute an independent heat treatment unit. When the heat treatment is carried out, a plurality of solar battery pieces 100 are stacked in the same direction to form a solar battery piece group 101; one solar cell sheet set 101 may be heat-treated in one cavity 1, or a plurality of solar cell sheet sets 101 may be heat-treated at the same time.
Each cavity 1 comprises:
the pair of clamping plates 2, the clamping plates 2 can clamp and fix the solar cell sheet group 101; the clamping plate 2 can be a metal plate with a heat conduction function, and has the heat conduction function in the heat treatment process; the plate material without heat conduction function can only play a role of clamping. A processing station capable of accommodating the solar cell set for heat treatment is formed between the pair of clamping plates 2;
the heating module can increase the temperature in the cavity to be more than 200 ℃, and the heating module is an infrared lamp tube 3; the infrared light tubes 3 can be symmetrically arranged on the periphery of the electric injection cavity, such as near four horizontal edges of the cavity 1, or on two sides of the bottom of the cavity 1; of course, the infrared lamp tube 3 can also be vertically disposed, for example, near four vertical edges of the cavity 1, or near two opposite vertical edges of the cavity 1;
the temperature detection module 4 can collect the temperature inside the cavity and on the surface of the solar cell;
the temperature control module can receive the temperature information collected by the temperature detection module, compare the temperature information with a set temperature value, and send a control instruction to the heating module to maintain the temperature in the cavity at the set temperature value, and specifically, the temperature control module adopts PID control.
When a plurality of solar cell pieces 101 are contained in one cavity 1, the heat conducting module 5 can be arranged between the solar cell pieces 101, so that the heat distribution is more uniform. Specifically, the heat conducting module 5 includes a pair of heat conducting metal plates 51 and a metal heat sink 52 disposed between the pair of heat conducting metal plates 51, so that heat is prevented from being accumulated while having a good heat conducting effect, thereby facilitating temperature control.
For better implementation, when the number of the solar cells 100 included in one group of the solar cell groups 101 is large, an intermediate heat conduction plate 6 may be disposed between the solar cells in the group, as shown in fig. 4; the intermediate heat conducting plate 6 is a metal plate with good heat conducting property, such as a copper plate; the number of the heat conducting plates can be determined according to the number of the battery pieces of the battery pack, and generally speaking, one heat conducting plate is arranged between every 30-50 battery pieces. Such as: in a stack of 100 battery cells, 1-2 heat-conducting plates can be provided, the 1-2 heat-conducting plates approximately equally dividing the battery cells in one battery cell in the longitudinal height.
At least a portion of the middle heat-conducting plate 6 is located near the center of the cell, at least one end of the heat-conducting plate extends to the edge of the cell and is provided with thermocouples 7 at the end, and the thermocouples 7 are arranged in pairs. Specifically, two thermocouples 7 may be embedded at the edge position of the middle heat-conducting plate 6, as shown in fig. 2; the thermocouples are respectively connected with the corresponding electrode units, each electrode unit comprises an upper electrode group and a lower electrode group which are suitable for forming a loop after being connected, and the upper electrode group comprises two upper electrodes; the lower electrode group comprises two lower electrodes, namely each two upper electrodes and each two lower electrodes correspond to a thermocouple, a group of loops are formed after the lower electrode group is connected, current signals are generated, and the lower electrode group is connected to a control system, so that real-time temperature PID control can be performed.
As shown in fig. 3, as an alternative, at least one end of the middle heat conducting plate 6 extends to the outside of the battery piece to form a free end, the temperature detection module includes an infrared sensor, the infrared sensor collects the temperature of the free end of the heat conducting plate as the temperature of the center of the battery piece inside the battery unit, and the temperature detection module is connected to the control system to perform real-time PID temperature control.
In this embodiment, after the heat treatment, the cavity is opened, and the solar cell is naturally cooled.
Example 2:
the present embodiment provides a solar cell heat treatment apparatus, which is different from embodiment 1 in that:
the device is characterized by further comprising a cooling module 8, wherein the cooling module is an air cooling device, blades or fans are used for blowing air to blow and sweep up and down, and cooling gas is compressed air, nitrogen or argon. After the heat treatment is finished, the cooling module is started, so that the temperature in the cavity can be cooled to below 50 ℃ more quickly. In the process of heating and temperature control, when the temperature is too high to exceed a set temperature and is within a certain range, the control system can also start the cooling module to enable the temperature to be close to the set temperature value quickly. The set temperature value may be any temperature value between room temperature and 50 ℃.
Example 3:
the embodiment provides a solar cell heat treatment method, which is used for carrying out heat treatment on a solar cell by using the solar cell heat treatment device, and comprises the following steps:
s1, stacking a plurality of solar battery plates in the same direction;
s2, arranging N solar cell sets together in a cavity, arranging a heat conduction module between the solar cell sets, wherein N is more than or equal to 1;
s3, carrying out heat treatment on the solar cell piece set: the heating module works to raise the temperature in the cavity, and the temperature value is one of 200 and 400 ℃, and is allowed to fluctuate within the range of +/-2.5 ℃; in the present embodiment, the temperature value is controlled at 250 ℃ and 255 ℃ for 80 min. In the process, only the battery piece is subjected to heat treatment, and the battery piece is not subjected to electric injection; the heating module is an infrared lamp tube;
s4, stopping heating, and cooling the temperature in the cavity to be lower than 50 ℃; preferably, the cooling module 8 can be activated to rapidly reduce the temperature in the cavity to below 50 ℃ to room temperature.
Example 4:
the present embodiment provides a method for heat-treating a solar cell, which is different from embodiment 3 in that:
in step S3, the temperature value is controlled 205-210 ℃ for 100 min. In this process, only the battery piece is subjected to heat treatment, and the battery piece is not subjected to electric injection. Hydrogen passivation of the solar cell is completed.
Example 5:
the present embodiment provides a method for heat-treating a solar cell, which is different from embodiment 3 in that:
in step S3, the temperature value is controlled at 390-395 ℃ for 60 min. In this process, only the battery piece is subjected to heat treatment, and the battery piece is not subjected to electrical injection. Hydrogen passivation of the solar cell is completed.
Example 6:
the present embodiment provides a method for heat-treating a solar cell, which is different from embodiment 3 in that:
in step S3, the temperature value is controlled at 350 ℃ and 355 ℃ for 80 min. In this process, only the battery piece is subjected to heat treatment, and the battery piece is not subjected to electrical injection. Hydrogen passivation of the solar cell is completed.
Comparative example 1:
the passivation method of the solar cell by hydrogen through electric injection comprises the following steps:
s1, stacking a plurality of solar cells in the same direction and connecting the solar cells in series to form an electrically injected cell unit;
s2, placing a plurality of battery units together in an electric injection space of an electric injection cavity, and arranging a heat conduction module between the battery units;
s3, loading the current of 15A to each battery unit, and simultaneously, operating the heating module to raise the temperature in the cavity and controlling the temperature to be between 150 ℃ and 155 ℃, wherein the duration is 100 min; the heating module is used for heating a metal block;
and S4, stopping heating, and enabling the cooling module to work to cool the temperature in the cavity to room temperature.
Comparative example 2:
the passivation method of the solar cell by hydrogen electro-injection comprises the following steps:
s1, stacking a plurality of solar cells in the same direction and connecting the solar cells in series to form an electrically injected cell unit;
s2, placing a plurality of battery units together in an electric injection space of an electric injection cavity, and arranging a heat conduction module between the battery units;
s3, loading 20A current to each battery unit, and simultaneously, enabling the temperature in the cavity to rise and be controlled between 105 ℃ and 110 ℃ by the operation of the heating module, wherein the duration time is 100 min; the heating module is used for heating the metal block;
and S4, stopping heating, and enabling the cooling module to work to cool the temperature in the cavity to room temperature.
Comparative example 3:
the passivation method of the solar cell by hydrogen electro-injection comprises the following steps:
s1, stacking a plurality of solar battery plates in the same direction to form an electric injection battery unit;
s2, placing a plurality of battery units together in an electric injection space (2) of an electric injection cavity, and arranging a heat conduction module between the battery units;
s3, loading the current of 15A to each battery unit, and simultaneously, operating the heating module to raise the temperature in the cavity and controlling the temperature to be between 180 ℃ and 185 ℃, wherein the duration is 100 min; the heating module is used for heating the metal block;
and S4, stopping heating, and enabling the cooling module to work to cool the temperature in the cavity to room temperature.
Comparative example 4:
the passivation method of the solar cell by hydrogen through electric injection comprises the following steps:
s1, stacking a plurality of solar cells in the same direction and connecting the solar cells in series to form an electrically injected cell unit;
s2, placing a plurality of battery units together in an electric injection space (2) of an electric injection cavity, and arranging a heat conduction module between the battery units;
s3, loading 10A current to each battery unit, and simultaneously, enabling the temperature in the cavity to rise and be controlled between 160 ℃ and 165 ℃ by the operation of the heating module, wherein the duration time is 100 min; the heating module is used for heating the metal block;
and S4, stopping heating, and enabling the cooling module to work to cool the temperature in the cavity to room temperature.
By adopting the heat treatment method of the solar cell, the hydrogen passivation process of the solar cell is completed only in a heat treatment mode, and the process of electricity injection is not needed; compared with the heating temperature of the passivation of the hydrogen by electrical injection in the prior art, the method has the advantages that the hydrogen passivation is carried out at a higher temperature, namely the temperature is controlled to be more than 200 ℃, the better hydrogen passivation effect is achieved, and the method is particularly suitable for the solar cell with the TOPCon structure. On the other hand, under the relatively high temperature environment, the time of the hydrogen passivation process can be shortened, and the hydrogen passivation efficiency can be improved. A comparison of inventive example 3 with the comparative examples is given in table 1 below:
table 1: the process consumes time and the LID attenuation rate of the solar cell is as follows:
the attenuation rate of the cell is measured by selecting the upper, middle and lower three layers of cells to perform a standard LID attenuation test under the conditions of illumination power of 1000W and illumination time of 60h, wherein the attenuation rate is (efficiency after attenuation-efficiency before attenuation) ÷ efficiency before attenuation × 100%.
From the above table, it can be seen that, under approximately equal process time, by adopting the relatively high-temperature process environment of the invention, the cell slice has better hydrogen passivation effect, and the longitudinal attenuation uniformity is obviously improved; meanwhile, the time of electric injection can be shortened, and the production efficiency is improved.
In order to match with a relatively high-temperature hydrogen passivation process, the heating module of the solar cell heat treatment device adopts the infrared tube, compared with the traditional metal module heating module, the heating temperature can be higher and more stable, the temperature fluctuation in the cavity can be controlled within the range of +/-2 ℃, the surface temperature of the cell can be more uniform by combining the heat conduction module and the middle heat conduction plate, and the surface temperature of the cell can be controlled within the range of +/-2.5 ℃ through tests.
The five-point temperature distribution in the solar cell 100 is obtained by testing the thermocouple randomly clamped between the cells, and after the middle heat-conducting plate 6 is added, the results of the five-point temperature distribution in the solar cell and the temperature distribution without the heat-conducting plate are shown in the following table 2, and it can be seen that the uniformity of the temperature distribution in the solar cell is obviously improved.
TABLE 2: five point temperature distribution in solar cell
| Temperature/. degree.C | Example 3 | Comparative example 1 |
| Z1 | 253 | 151 |
| Z2 | 252 | 152 |
| Z3 | 251 | 155 |
| Z4 | 251 | 153 |
| Z5 | 253 | 154 |
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit of the invention.
Claims (13)
1. A solar cell heat treatment device is characterized in that: having at least one sealable cavity (1), each cavity (1) comprising:
the pair of clamping plates (2) can fix the solar cell sets (101) stacked in the same direction, and a processing station capable of accommodating the solar cell sets to carry out heat treatment is formed between the pair of clamping plates;
the heating module can increase the temperature in the cavity to be more than 200 ℃, and the heating module is an infrared lamp tube (3);
the temperature detection module (4) can collect the temperature inside the cavity and on the surface of the solar cell;
the temperature control module can receive the temperature information collected by the temperature detection module, compares the temperature information with a set temperature value, and sends a control instruction to the heating module to maintain the temperature in the cavity at the set temperature value.
2. The solar cell heat treatment apparatus according to claim 1, wherein: the infrared lamp tubes (3) are symmetrically arranged on the periphery of the electric injection cavity.
3. The solar cell heat treatment apparatus according to claim 1, wherein: the infrared lamp tube (3) is arranged at the bottom of the two sides of the electricity injection cavity.
4. The solar cell heat treatment apparatus according to claim 1, wherein: n solar cell groups (101) can be accommodated in one cavity (1), N is more than or equal to 1, and a heat conduction module (5) is arranged between the solar cell groups.
5. The solar cell heat treatment apparatus according to claim 1, wherein: the heat conducting module (5) includes a pair of electrically and thermally conductive metal plates (51) and a metal heat sink (52) interposed between the pair of metal plates.
6. The solar cell heat treatment apparatus according to claim 1, wherein: m middle heat-conducting plates (6) are arranged between the cells of each solar cell group at equal intervals, wherein M is more than or equal to 1.
7. The solar cell heat treatment apparatus according to claim 1, wherein: at least one part of the middle heat conduction plate (6) is positioned near the center of the battery piece, at least one tail end of the middle heat conduction plate extends to the edge of the battery piece, a thermocouple (7) is arranged at the tail end, and the thermocouples are arranged in pairs.
8. The solar cell heat treatment apparatus according to claim 1, wherein: the battery piece is characterized in that at least one tail end of the middle heat-conducting plate (6) extends to the outside of the battery piece to form a free end, the temperature detection module comprises an infrared sensor, and the infrared sensor collects the temperature of the free end of the middle heat-conducting plate.
9. The solar cell heat treatment apparatus according to claim 1, wherein: the device is characterized by further comprising a cooling module (8), wherein the cooling module (8) is an air cooling device, blades or fans are used for blowing air to blow and sweep up and down, and cooling gas is compressed air, nitrogen or argon.
10. The solar cell heat treatment apparatus according to claim 1, wherein: and the temperature control module adopts PID control.
11. A heat treatment method of a solar cell is characterized in that: the solar cell is heat-treated by using the solar cell heat treatment apparatus according to any one of claims 1 to 10, comprising the steps of:
s1 solar cell group with a plurality of solar cells stacked in the same direction,
s2, arranging N solar cell sets in a cavity together, wherein a heat conduction module is arranged between the solar cell sets, and N is more than or equal to 1;
s3, carrying out heat treatment on the solar cell piece set: the heating module works to enable the temperature in the cavity to rise and be controlled at 400 ℃ at 200-;
and S4, stopping heating, and cooling the temperature in the cavity.
12. The heat treatment method for the solar cell according to claim 11, wherein: in step S3, the temperature is raised and controlled at 400 ℃ for 60-150 min.
13. The heat treatment method for the solar cell according to claim 11, wherein: in step S3, the temperature is raised and controlled at 350 ℃ for 60-120 min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110307140.3A CN115117195A (en) | 2021-03-23 | 2021-03-23 | Solar cell heat treatment device and heat treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110307140.3A CN115117195A (en) | 2021-03-23 | 2021-03-23 | Solar cell heat treatment device and heat treatment method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115117195A true CN115117195A (en) | 2022-09-27 |
Family
ID=83324217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110307140.3A Pending CN115117195A (en) | 2021-03-23 | 2021-03-23 | Solar cell heat treatment device and heat treatment method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115117195A (en) |
-
2021
- 2021-03-23 CN CN202110307140.3A patent/CN115117195A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20090093081A1 (en) | Process of phosphorus diffusion for manufacturing solar cell | |
| CN104505424B (en) | A kind of devices and methods therefor reducing solaode photo attenuation | |
| WO2021004521A1 (en) | Heterojunction battery hydrogen passivation method and hydrogen passivation device, battery, battery assembly, and solar power station | |
| CN105140347B (en) | Quickly improve mass production device and its using method of p-type crystal silicon battery photo attenuation | |
| CN110880595B (en) | Cu 3 Preparation method of P-CuO composite flexible lithium ion battery cathode material | |
| CN111987191A (en) | Method for repairing PERC battery laser membrane opening damage | |
| CN204966525U (en) | Improve volume production device of photic decay of P type crystal silicon battery fast | |
| CN112768564B (en) | Light injection passivation method for Topcon battery | |
| CN102153089B (en) | Method for gettering phosphorus in N-type polysilicon slice by metallurgical method | |
| CN107946402B (en) | Solar cell diffusion method | |
| CN102153090A (en) | Boron gettering method for metallurgical N-type polycrystalline silicon chip | |
| CN112864470A (en) | Water-cooling integrated formation grading equipment | |
| CN214542269U (en) | Solar cell electrical injection hydrogen passivation device | |
| CN214542268U (en) | Solar cell heat treatment device | |
| WO2021120495A1 (en) | Solar cell electrical injection device | |
| CN115117195A (en) | Solar cell heat treatment device and heat treatment method | |
| CN110544730A (en) | Selective emitter, preparation method thereof and selective emitter battery | |
| CN206098426U (en) | Be used for thin -film solar cell continuous annealer | |
| CN110739366B (en) | Method for repairing PERC solar cell back film laser grooving damage | |
| CN104300040A (en) | Phosphorus gettering process of silicon chips | |
| CN115117196A (en) | Passivation method and device for solar cell by electrically injecting hydrogen | |
| CN210073782U (en) | Electric injection equipment for solar cell | |
| CN112993086A (en) | Electrical injection method and preparation method of N-type crystalline silicon battery | |
| CN111146308B (en) | Light source regeneration furnace and method for reducing efficiency attenuation of PERC double-sided battery | |
| CN113265602A (en) | Heat treatment method for rapidly improving strength of aluminum alloy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |