CN115113387B - High-precision high-speed light modulation device and equipment - Google Patents
High-precision high-speed light modulation device and equipment Download PDFInfo
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Abstract
The application relates to the technical field of modulation devices, in particular to a high-precision high-speed light modulation device and equipment, which can solve the problem that the traditional dynamic scene modulation process cannot be accurately modulated to a certain extent. The modulation device includes: the mask plate is arranged into a circular ring, and a pattern for modulation is arranged on the circular ring; the driving piece is fixedly connected with the inner ring of the circular ring and is used for driving the mask plate to rotate along the central axis of the mask plate; the camera is used for acquiring the image modulated by the mask plate; the encoder is integrated in the mask plate and is used for realizing absolute synchronization of the mask pattern and the camera; and based on the output electric signal of the encoder, the camera and the driving piece are controlled to synchronously operate, so that high-precision modulation is realized.
Description
Technical Field
The application relates to the technical field of modulation devices, in particular to a high-precision high-speed optical modulation device and equipment.
Background
Light waves are carriers of information, and in the optical field, the analysis and knowledge of light waves during transmission has always driven the progress of related principles and techniques. In particular, in recent years, many advanced imaging technologies are actively developed, and light modulation technologies are often not available. An optical modulation technique is a modulation technique in which one or more parameters of an information carrier are changed in accordance with the information to be transferred, and it is a signal carrying information that is superimposed on a carrier wave. The light modulation device is called a light modulation device, which can change some characteristic parameters of the light wave, such as amplitude, frequency, phase, polarization state, duration, etc., according to a certain rule, and implement light modulation.
In the implementation of the light modulation process, the light modulation device may change the amplitude or intensity, phase, polarization state, and wavelength of the spatial light distribution, or convert incoherent light to coherent light, under the control of a time-varying electrical drive signal or other signal. The light modulation device can become a constructional unit or a key device in a system such as real-time optical information processing, optical computing and optical neural network. The common modulation modes are modulation through a static mask plate and modulation through a dynamic spatial light modulator.
However, the problem of poor modulation accuracy is easily caused either by using a static mask plate for light modulation or by using a spatial light modulator for light modulation.
Disclosure of Invention
In order to solve the problem of poor modulation precision in the traditional dynamic scene modulation process, the application provides a high-precision high-speed light modulation device and equipment.
Embodiments of the present application are implemented as follows:
a first aspect of an embodiment of the present application provides a high-precision high-speed light modulation device, including: the mask plate is arranged to be a circular ring, a pattern for modulation is arranged on the circular ring, and the mask plate is applicable to static modulation scenes;
the driving piece is used for driving the mask plate to rotate along the central axis of the mask plate so that the mask plate is suitable for dynamic modulation scenes, and the driving piece is fixedly connected with the inner ring of the circular ring;
the camera is used for acquiring the image modulated by the mask plate;
the encoder is used for realizing the synchronization of the mask plate and the camera; the encoder is integrated in the mask plate, and based on the output electric signal of the encoder, the camera and the driving piece are controlled to run synchronously, so that high-precision modulation is realized;
the electric signals are used for being input to the driving piece and the camera at the same time, so that the driving piece is controlled to drive the mask plate to rotate, and the electric signals are used as external trigger signals to control the camera to take pictures.
In some embodiments, when the mask plate includes a plurality of sectors along a circumferential direction thereof, and the pattern on the mask plate uses the sectors as a distribution unit, the number of the sectors is equal to the highest line number required by the driving piece, so that the encoder can more accurately control the driving piece to drive the mask plate to rotate.
In some embodiments, the mask plate comprises a plurality of concentric rings along a radial direction thereof, wherein one of the concentric rings is arranged as a verification ring;
the check ring is used for displaying the correct pattern of the mask plate after rotation so as to compare with the result actually acquired by the camera.
In some embodiments, when each sector on the mask is a row of the mask in the spatial light modulator, and each concentric ring on the mask is a column of the mask in the spatial light modulator, if the number of rows of the pattern on the mask reaches a first threshold and the number of columns reaches a second threshold, the pixels on the mask are 1-2 orders of magnitude higher than the pixels of the spatial light modulator;
wherein the pattern corresponds to the pixel.
In some embodiments, the highest modulation frequency of the light modulation device is greater than or equal to a third threshold value, the third threshold value being greater than the highest modulation frequency of the spatial light modulator.
In some embodiments, the highest modulation frequency of the light modulation device is dependent on the number of sectors of the mask and the highest speed of the driver.
In some embodiments, the encoder is integrated into the outer ring of the mask plate to make the mask plate compatible with the circuit.
In some embodiments, the pattern of the mask plate is processed and manufactured by adopting a metal punching mode, a film etching mode or a chromium plate etching mode;
when a metal punching mode is adopted, the highest resolution of the mask plate is 40-55 mu m;
when a film etching mode is adopted, the highest resolution of the mask plate is 18-22 mu m;
when the chromium plate etching mode is adopted, the highest resolution of the mask plate is 4-6 mu m.
In some embodiments, the drive member employs a servo motor or a direct drive motor.
By adopting the technical scheme, the driving piece and the mask plate can synchronously operate, so that the high-precision modulation of the light modulation device is realized; by arranging the circular mask plate, the mask plate is favorable for bearing more pixels, and the modulation precision of the light modulation device is improved; by providing the check ring, the modulation accuracy of the optical modulation device can be further promoted.
Another aspect of the embodiments of the present application provides a high-precision high-speed optical modulation device, including: any one of the above-described high-precision high-speed light modulation devices of the first aspect. By using the high-precision high-speed optical modulation device, the purpose of high-precision modulation can be achieved.
The beneficial effects of this application: the driving piece drives the mask plate to rotate, and the encoder is arranged, so that the driving piece and the camera work synchronously, high precision and high speed of the light modulation device are realized, the precision and speed limit of the original product is broken through, and the mask plate is applicable to dynamic modulation scenes and static modulation scenes; further, by arranging the check ring, the precision of the optical modulator is facilitated, and the highest modulation frequency of the optical modulator is greater than or equal to the highest modulation frequency of the spatial optical modulator; the mask plate is arranged into the circular ring, so that the mask plate can adapt to a camera when rotating, the data volume of the mask plate can be greatly improved, and the cost is reduced due to material saving; the encoder is further arranged on the outer ring of the mask plate, so that the circuit is not easy to bend in the mask plate, and the circuit integrated on the mask plate is not easy to damage; the number of the sectors on the mask plate is further equal to the highest line number required by the driving piece, and the encoder can more accurately control the driving piece to drive the mask plate to rotate.
Drawings
In order to more clearly illustrate the technical solutions of embodiments or conventional technologies of the present application, the following description will briefly describe the drawings required to be used in the embodiments or conventional technologies, and it is obvious that, in the following description, the drawings are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort to those skilled in the art.
FIG. 1 is a schematic diagram of different types of modems in the prior art;
FIG. 2 is a schematic diagram of a static rectangular mask plate in the prior art in a rotating state;
FIG. 3 is a schematic diagram showing the operation state of a grating in the prior art;
FIG. 4 is a schematic diagram showing a spatial light modulator according to the prior art;
FIG. 5 is a schematic diagram of a control light modulator in the prior art in operation;
FIG. 6 is a schematic diagram of the modulation result of a spatial light modulator;
FIG. 7 is a schematic diagram of a rectangular mask plate in the prior art;
fig. 8 is a schematic plan view of a mask in accordance with one or more embodiments of the present disclosure.
Detailed Description
For purposes of clarity, embodiments and advantages of the present application, the following description will make clear and complete the exemplary embodiments of the present application, with reference to the accompanying drawings in the exemplary embodiments of the present application, it being apparent that the exemplary embodiments described are only some, but not all, of the examples of the present application.
It should be noted that the brief description of the terms in the present application is only for convenience in understanding the embodiments described below, and is not intended to limit the embodiments of the present application. Unless otherwise indicated, these terms should be construed in their ordinary and customary meaning.
The terms "first," second, "" third and the like in the description and in the claims and in the above drawings are used for distinguishing between similar or similar objects or entities and not necessarily for describing a particular sequential or chronological order, unless otherwise indicated. It is to be understood that the terms so used are interchangeable under appropriate circumstances.
The terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a product or apparatus that comprises a list of elements is not necessarily limited to all elements explicitly listed, but may include other elements not expressly listed or inherent to such product or apparatus.
The light modulation device can modulate characteristic parameters such as amplitude, frequency, phase, polarization state and duration of the light waves, so that the parameters are changed according to a preset rule. In the process of modulating light intensity, a spatial domain modulation mode is generally adopted. The spatial domain modulation scheme, as shown in connection with fig. 1-3, comprises the following:
(1) Modulation of the modulation disc. The modulation disc is a typical light modulation device, and information to be loaded is manufactured on the disc in a printing, etching and other modes, so that information such as light intensity, phase and even polarization of passing light can be changed according to a set mode. As shown in fig. 1, the modulation disc can be used for photoelectric scanning amplitude modulation, rotation frequency modulation, phase modulation and pulse width modulation, and in the conventional technology, the modulation disc is mainly used for suppressing background noise, spatial filtering and determining target azimuth. Similarly, there is also a mask plate, and the effect of modulation is achieved by processing different types of patterns on the surfaces of different materials.
However, due to the influence of processing precision, the traditional dynamic modulation disc is mainly used in the field of spatial filtering noise reduction of infrared radiation, while the static modulation disc is used for determining the target azimuth in the fields of military industry, surveying and mapping and the like, and is not applied to the field of visible light optical imaging, particularly the field of machine vision imaging at present.
In addition, as shown in fig. 2, because the pixels of the camera are rectangular, the shape of the static mask plate which is processed and customized in the prior art is rectangular, and the pixels in the static mask plate are rectangular so as to be matched with the acquired images of the camera, but when the static mask plate moves dynamically, if a translational movement mode is adopted, the size of the mask plate is required to be far greater than that of the target surface of the camera, otherwise, the number of modulation patterns is insufficient, the diversity of modulation is difficult to realize, but the cost is greatly increased due to the fact that the mask plate is too large; if a rotary motion mode is adopted, the situation that the pattern acquired by the camera cannot be matched with the modulation pattern on the mask plate is caused, and the whole modulation precision is poor.
(2) And (5) grating modulation. A grating is an optical element having a periodic spatial structure or optical properties (transmittance, reflectance, etc.), and as shown in fig. 3, moire fringes can be formed by the movement of the grating, thereby causing amplitude modulation of luminous flux.
The realization of amplitude modulation by using grating requires two gratings to move in a staggered way, which is widely used in the field of optical communication and cannot be applied to the field of optical imaging at present.
(3) Optoelectronic modulation. The photoelectron modulation is also divided into electrooptical, acousto-optic and magneto-optic modulation, which means that an electric field, an acoustic wave and a magnetic field which change with time are applied to certain crystals, and the properties of emergent light intensity, phase, polarization and the like are controlled through the birefringence effect generated therewith. The spatial light modulator is used for modulating a certain parameter of a light field through liquid crystal molecules under active control, such as modulating the amplitude of the light field, modulating the phase through refractive index, modulating the polarization state through rotation of a polarization plane, or realizing the conversion of incoherent-coherent light, so that certain information is written into the light wave to achieve the purpose of light wave modulation.
As shown in fig. 4, the spatial light modulator incorporates a plurality of individual cells, spatially arranged in a one-dimensional or two-dimensional array, each of which can independently receive control of an optical or electrical signal and alter its optical properties in response thereto to modulate the light wave illuminated thereon. Such devices may change the amplitude or intensity, phase, polarization, and wavelength of the spatial light distribution, or convert incoherent light to coherent light, under the control of a time-varying electrical drive signal or other signal. Because of its nature, it can be used as a building block or key device in real-time optical information processing, optical computing, and optical neural networks.
The spatial light modulator is composed of a plurality of micro-optical elements, and is composed of up to millions of micro-mirrors and a plurality of micro-motors, for example, a digital micro-mirror array (Digital Micromirror Devices, DMD), and can realize high-precision intensity modulation at the pixel level by matching with an electric signal, and can realize angle setting for each micro-mirror by arranging millions of micro-mirrors in a matrix form and controlling the micro-motors individually equipped with the micro-mirrors. However, it also has a high cost, ranging from tens of thousands to hundreds of thousands. Meanwhile, since each micro-mirror is driven by a micro-motor, the modulation frequency of the micro-mirror is limited by the frequency of the motor, and the spatial light modulator is not adequate for the ultra-high speed modulation process.
It can be understood that the spatial domain modulation is to artificially superimpose known two-dimensional or three-dimensional spatial distribution information on the light wave, and then analyze and extract information in the imaging result by analyzing the illuminance distribution of the image space, so as to improve the image resolution of the imaging result. Among them, the most representative spatial light modulator in recent years is the most leading one in the field of optical imaging.
As shown in fig. 5 (in the figure, the gray square indicates a micro mirror; the central green dotted line indicates the turning axis of the mirror), during imaging, the light emitted from the sample itself is imaged onto the surface of the modulator through the optical system, and when all the micro mirrors are set to the same angle, the spatial light modulator can be considered to be a large planar mirror, and the direction of the emitted light can be selected by controlling the angle. If the outgoing light is reflected into the light path of the subsequent part, the image information can still be transmitted along with the light waves, and if the outgoing light is reflected out of the light path, the image information is lost, and the camera cannot receive signals.
The angle of each reflector is set by the controller, so that the information of part of pixels can be kept and transmitted, and the information of part of pixels is deliberately lost, thereby realizing the modulation effect of different patterns, as shown in fig. 6 (white representing information is kept and black representing information is lost), and the arrangement pattern of the micro-reflectors can be recorded and used in the subsequent algorithm demodulation process because the angles of the reflectors in the spatial modulator are manually set.
Fig. 7 is a schematic diagram of a static rectangular mask in the conventional art.
As shown in fig. 7, the static rectangular mask plate in the conventional technology is similar to the modulation disc, and is processed in advance to obtain a mask with etched patterns, wherein the black part of the mask is not light-transmitting, and the rest part of the mask can be light-transmitting, so that the intensity modulation of the image is realized.
According to the analysis, when the processed static rectangular mask plate is adopted to conduct light modulation in a static scene, the pattern on the mask plate is known when the camera shoots an image at each moment, and the pattern can be corresponding to the image shot by the camera. However, the static rectangular mask plate is adopted to carry out light modulation in a dynamic scene, so that the problem that the pattern acquired by a camera cannot be matched with the modulation pattern on the mask plate is easily generated, and further the subsequent demodulation cannot be carried out through an algorithm. While the spatial light modulator is controlled by the computer to give out an electric signal when the angle of the micro-mirror is adjusted every time in the working process, the electric signal can be synchronously given to the camera to control the two, but the mask plate in the spatial light modulator has fewer pixels, and has the problems of low modulation frequency, poor modulation precision and high cost.
Based on the above phenomenon, the application provides a high-precision high-speed modulation device for realizing spatial domain intensity modulation of an image in the field of optical imaging, compared with the traditional scheme, the method has the advantages that the pixel distribution of the modulation device is optimized to reduce the cost, the mask pattern on the modulation device is strictly synchronous with a camera, the application range, the highest modulation frequency and the highest modulation precision of the modulation device are improved, and the cost of the modulation device is greatly reduced. The specific explanation is as follows:
fig. 8 is a schematic plan view of a mask in an embodiment of the present application.
As shown in fig. 7, the high-precision high-speed modulation device comprises a mask plate, a driving piece, an encoder and a camera, wherein the mask plate is arranged into a circular ring, patterns for modulation are etched on the circular ring, and the mask plate is applicable to static modulation scenes; the driving piece is fixedly connected with the inner ring of the circular ring and is used for driving the mask plate to rotate along the central axis of the driving piece so that the mask plate is suitable for dynamic modulation scenes; the camera is positioned on the other side of the mask plate, which is far away from the light emission source, and is used for collecting images of the light modulated by the mask plate; the encoder is used for realizing the synchronization of the mask pattern and the camera; the encoder is integrated in the mask plate and is arrayed along the circumferential direction of the mask plate, and the camera and the driving piece are controlled to synchronously operate based on the output of an electric signal of the encoder so as to realize high-precision modulation; the electric signals are used for being input to the driving piece and the camera at the same time so as to control the driving piece to drive the mask plate to rotate, and the electric signals are used as external trigger signals to control the camera to take pictures.
The driving piece can be arranged as a direct-drive motor or a servo motor, and the driving shaft of the motor is connected with the inner ring key of the mask plate. The motor structure is relatively simple, and the process of driving the mask plate to rotate is efficient. The high-precision high-speed modulation device further comprises an optical system, wherein the optical system is used for emitting irradiation light irradiated on one side of the mask plate, and can collect and image the light beam passing through the mask plate so as to enable the camera to acquire an image.
The rotation process of the motor is controlled by continuously outputting pulses through the encoder, and the reading head of the motor reads the pulses and outputs an electric signal to control the triggering of the camera, so that the motor and the camera are synchronized. Under the condition of reaching the same pixel precision, the cost of the mask plate custom processing cost and the purchasing cost of the motor are about 1 ten thousand yuan, and the selling price of the spatial light modulator on the market is about 8 ten thousand yuan to 15 ten thousand yuan, so that the cost of the high-precision high-speed modulation device in the application is greatly reduced.
It can be understood that the mask plate is designed into a circular ring, and can be sleeved on the driving shaft of the motor and driven by the motor to rotate, so that the defect that the traditional mask plate can only be subjected to static modulation is overcome, and the modulation device can be used for static modulation scenes and dynamic modulation scenes. In addition, the mask plate is arranged to be round, compared with a spatial light modulator, the number of pixels carried under the same area is large, the required area is reduced, the cost is further reduced, and the highest modulation frequency of the mask plate is improved.
In some embodiments, the encoder is integrated into the outer ring of the mask plate to make the mask plate compatible with the circuit. When the encoder is integrated on the outer ring of the mask plate, the area for the compatible circuit in the whole mask plate is larger, so that the circuit in the encoder is not easy to damage due to bending. It should be noted that, in fig. 8, the white area between the mask portion and the area where the encoder is located is the line integration area.
In some embodiments, when the mask includes a plurality of sectors (corresponding to the central angle θ shown in fig. 8) along the circumferential direction of the mask, and the pattern on the mask takes the sectors as a distribution unit, the number of the sectors is equal to the highest line number required by the motor, so that the encoder can more accurately control the motor to drive the mask to rotate. For example, a selected motor can only accept up to 5000 lines of encoders, and the mask can be designed to have exactly 5000 sectors, one for each sector. At this time, because the encoder corresponds with fan-shaped one by one, mask pattern and encoder belong to same fan-shaped, so encoder and mask pattern also correspond strictly, in the course of the work, when the mask board rotated certain angle at every turn, the encoder of outer lane all can output the electrical signal for the motor, and this electrical signal can be used for exporting to the camera simultaneously, as outer trigger signal control camera shooting.
In some embodiments, as shown in fig. 8, the pattern on the mask is composed of black blocks and white blocks alternating between black and white, and each black block or white block is a pixel of the static rectangular mask, and the difference is that the arrangement is changed from rectangular arrangement to circular arrangement. When the mask plate includes a plurality of concentric rings along the radial direction thereof (a ring formed by a dotted line and an inner ring of the mask plate as shown in fig. 8), each concentric ring is a column of the mask plate in the spatial light modulator, and if the sectors are used as distribution units, each sector is a row of the mask plate in the pattern on the mask plate.
It should be noted that the number of sectors and rings in the mask image determines the highest precision that the final modulation device can modulate, and if the number of lines of the pattern on the mask reaches the first threshold and the number of columns reaches the second threshold, the pixels on the mask are 1-2 orders of magnitude higher than the pixels of the mask in the spatial light modulator. When the outer diameter of the mask plate is 30cm, the first threshold value may be 15000, the second threshold value may be 7500, that is, the pattern on the mask plate may be set to 15000 rows and 7500 columns, at this time, the number of pixels of the mask plate is much higher than that of the existing spatial light modulator (the existing spatial light modulator can only realize about 4000 rows and 3000 columns of pattern design at the highest). Therefore, the pixel number of the mask plate in the application is about 1-2 orders of magnitude higher under the condition of the same area, so that the modulation precision of the modulation device in the application is higher than that of a spatial light modulator in the traditional technology.
In some embodiments, in order to promote more accurate synchronization of the motor and the camera, one of the concentric rings on the mask plate is set as a check ring, and the check ring is also etched with a pattern design of black-white intervals. In this embodiment, the check ring is disposed on the inner ring of the mask plate. The check ring is used for displaying the correct pattern of the mask plate after rotation so as to compare with the result actually acquired by the camera. When the image result actually collected by the camera is compared with the pattern on the check ring, the comparison result shows that the actual result received by the camera is different from the theoretical result modulated by the mask plate, so that the problem of the modulation result is solved, and the problem can be checked in time.
The patterning of the mask may be performed in a variety of ways, for example, in some embodiments, the patterning of the mask may be performed by metal punching, where the highest resolution of the mask is 40-55 μm, e.g., the highest resolution of the mask is 50 μm. In some embodiments, the patterning of the mask may be performed by film etching, where the highest resolution of the mask is 18-22 μm, e.g., the highest resolution of the mask is 20 μm; in other embodiments, the patterning of the mask is performed by etching the mask with chromium, where the highest resolution of the mask is 4-6 μm, e.g., the highest resolution of the mask is 5 μm.
It should be noted that, when the patterning of the mask is implemented by etching a chrome plate, the modulation accuracy of the modulation device in the present application can reach the micrometer level, for example, in some embodiments, the modulation accuracy of the modulation device is 4 μm.
It should be noted that, the highest modulation frequency of the light modulation device is greater than or equal to the third threshold, and the third threshold is greater than the highest modulation frequency of the spatial light modulator, and in some embodiments, the highest modulation frequency of the light modulation device is 2MHz, and the highest modulation frequency of the conventional spatial light modulator is 20kHz, so that the highest modulation frequency of the light modulation device in the present application is 100 times that of the highest modulation frequency of the conventional spatial light modulator.
The highest modulation frequency of the optical modulation device depends on the number of sectors of the mask plate and the highest speed of the motor. For example, when the number of sectors of the mask plate is 15000 and the highest speed of the motor is 8000rpm, the highest modulation frequency of the optical modulation device is 2MHz, so that the upper limit of the modulation frequency of the optical modulation device is greatly improved.
When the high-precision high-speed modulation device is used, the circular mask plate can bear more pixels under a smaller required area, so that the cost is saved, and the highest precision of the modulation device can be improved; the encoder is integrated on the mask plate, and can output electric signals to the driving piece and the camera at the same time, so that the driving piece and the camera can synchronously operate, and the purpose of enabling the modulation device to be modulated with high precision is achieved; the number of the sectors on the mask plate is equal to the highest line number required by the driving piece, so that the encoder can further control the driving piece to drive the mask plate to rotate more accurately, and the final modulation result is accurate; and a certain concentric ring in the mask pattern is further arranged as a check ring, and the check ring is compared with the modulation result, so that the accuracy of the modulation result is promoted, and the accuracy of the modulation result is further promoted.
Based on the above description of the scheme of the high-precision high-speed modulation device and the related drawings, the application also provides a high-precision high-speed light modulation device, which comprises any high-precision high-speed light modulation device in the first aspect, and has the advantages of being applicable to static modulation scenes and dynamic modulation scenes at the same time, high in modulation frequency, high in modulation precision, relatively low in production cost and the like.
The embodiment of the part has the beneficial effects that the dynamic modulation of the optical image with extremely high precision and extremely high frequency is realized by matching the static mask plate with the motor and integrating the encoder on the mask plate; during modulation, the mask pattern and the camera can synchronously operate, so that the possibility of inaccurate synchronization is eliminated, and the modulation precision of a modulation device is greatly improved; the mask plate is further arranged into a circular ring, so that the pixel bearing capacity is improved under the same area, and compared with a spatial light modulator in the traditional technology, the same performance is realized, and the cost of a modulating device in the method is only one tenth of that of the spatial light modulator; further, by arranging the check ring, more accurate synchronization is realized, and further, the light modulation device is accurately modulated.
The foregoing description, for purposes of explanation, has been presented in conjunction with specific embodiments. However, the above discussion in some examples is not intended to be exhaustive or to limit the embodiments to the precise forms disclosed above. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles and the practical application, to thereby enable others skilled in the art to best utilize the embodiments and various embodiments with various modifications as are suited to the particular use contemplated.
Claims (9)
1. A high-precision high-speed light modulation device, comprising:
the mask plate is arranged to be a circular ring, a pattern for modulation is arranged on the circular ring, and the mask plate is applicable to static modulation scenes;
the driving piece is used for driving the mask plate to rotate along the central axis of the mask plate so that the mask plate is suitable for dynamic modulation scenes, and the driving piece is fixedly connected with the inner ring of the circular ring;
the camera is used for acquiring the image modulated by the mask plate;
the encoder is used for realizing the synchronization of the mask plate and the camera; the encoder is integrated in the mask plate, and based on the output electric signal of the encoder, the camera and the driving piece are controlled to run synchronously, so that high-precision modulation is realized;
the electric signals are used for being input to the driving piece and the camera at the same time so as to control the driving piece to drive the mask plate to rotate and serve as external trigger signals to control the camera to take pictures; when the mask plate comprises a plurality of sectors along the circumferential direction, and the patterns on the mask plate take the sectors as distribution units, the number of the sectors is equal to the highest line number required by the driving piece, and each sector corresponds to one encoder, so that the encoder can control the driving piece to drive the mask plate to rotate more accurately.
2. The high-precision high-speed optical modulation device according to claim 1, wherein the mask plate comprises a plurality of concentric rings along a radial direction thereof, wherein one of the concentric rings is configured as a check ring;
the check ring is used for displaying the correct pattern of the mask plate after rotation so as to compare with the result actually acquired by the camera.
3. The high-precision high-speed light modulation device according to claim 2, wherein when each sector on the mask plate is a row of the mask plate in the spatial light modulator, and each concentric ring on the mask plate is a column of the mask plate in the spatial light modulator, if the number of rows of the pattern on the mask plate reaches a first threshold value and the number of columns reaches a second threshold value, the number of columns of the pattern on the mask plate is 1-2 orders of magnitude higher than the number of pixels of the spatial light modulator;
wherein the pattern corresponds to the pixel.
4. The high-precision high-speed optical modulation device according to claim 1, wherein a highest modulation frequency of the optical modulation device is equal to or greater than a third threshold value, the third threshold value being greater than the highest modulation frequency of the spatial optical modulator.
5. The high-precision high-speed optical modulation device according to claim 1, wherein: the maximum modulation frequency of the light modulation device depends on the number of sectors and the maximum speed of the driver.
6. The high-precision high-speed optical modulation device according to claim 1, wherein the encoder is integrated on the outer ring of the mask plate so as to make the mask plate compatible with a circuit.
7. The high-precision high-speed light modulation device according to claim 1, wherein the pattern of the mask plate is processed and manufactured by adopting a metal punching mode, a film etching mode or a chromium plate etching mode;
when a metal punching mode is adopted, the highest resolution of the mask plate is 40-55 mu m;
when a film etching mode is adopted, the highest resolution of the mask plate is 18-22 mu m;
when the chromium plate etching mode is adopted, the highest resolution of the mask plate is 4-6 mu m.
8. The high-precision high-speed light modulation device according to claim 1, wherein the driving member is a servo motor or a direct-drive motor.
9. A high-precision high-speed optical modulation apparatus comprising the high-precision high-speed optical modulation device according to any one of claims 1 to 8.
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| CN202210849754.9A CN115113387B (en) | 2022-07-19 | 2022-07-19 | High-precision high-speed light modulation device and equipment |
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| CN202210849754.9A CN115113387B (en) | 2022-07-19 | 2022-07-19 | High-precision high-speed light modulation device and equipment |
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| CN115113387A (en) | 2022-09-27 |
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