CN115113387A - High-precision high-speed optical modulation device and equipment - Google Patents
High-precision high-speed optical modulation device and equipment Download PDFInfo
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Abstract
The application relates to the technical field of modulation devices, in particular to a high-precision high-speed light modulation device and equipment, which can solve the problem that the traditional dynamic scene modulation process cannot be accurately modulated to a certain extent. The modulation device includes: the mask plate is arranged to be a circular ring, and a pattern for modulation is arranged on the circular ring; the driving piece is fixedly connected with the inner ring of the circular ring and is used for driving the mask plate to rotate along the central axis of the mask plate; the camera is used for acquiring the image modulated by the mask plate; the encoder is integrated in the mask plate and is used for realizing absolute synchronization of the mask pattern and the camera; based on the encoder output electric signal, the synchronous operation of the camera and the driving part is controlled, and high-precision modulation is realized.
Description
Technical Field
The application relates to the technical field of modulation devices, in particular to a high-precision high-speed optical modulation device and equipment.
Background
The analysis and recognition of light waves in the transmission process in the optical field are always driving the progress of related principles and technologies. Especially in recent years, many advanced imaging technologies are developed vigorously, and often, the light modulation technology is not developed. Optical modulation, which is a modulation technique in which an information-carrying signal is superimposed on a carrier light wave, changes one or more parameters of an information carrier in accordance with the information to be transferred. The optical modulation can change certain characteristic parameters of the light wave such as amplitude, frequency, phase, polarization state, duration and the like according to a certain rule, and a device for realizing the optical modulation is called as an optical modulation device.
In the implementation of the light modulation process, the light modulation device can change the amplitude or intensity, phase, polarization, and wavelength of the spatially distributed light under the control of a time-varying electrical or other signal, or convert incoherent light into coherent light. The optical modulation device can become a construction unit or a key device in a system such as real-time optical information processing, optical computing and an optical neural network. The common modulation mode is modulation by a static mask and modulation by a dynamic spatial light modulator.
However, both of the optical modulation using a static mask and the optical modulation using a spatial optical modulator tend to have a problem of poor modulation accuracy.
Disclosure of Invention
In order to solve the problem of poor modulation precision in the traditional dynamic scene modulation process, the application provides a high-precision high-speed light modulation device and equipment.
The embodiment of the application is realized as follows:
a first aspect of embodiments of the present application provides a high-precision high-speed optical modulation device, including: the mask plate is arranged to be a circular ring, patterns for modulation are arranged on the circular ring, and the mask plate is suitable for a static modulation scene;
the driving piece is used for driving the mask plate to rotate along the central axis of the mask plate so as to enable the mask plate to be suitable for a dynamic modulation scene, and the driving piece is fixedly connected with the inner ring of the circular ring;
the camera is used for acquiring the image modulated by the mask plate;
the encoder is used for realizing the synchronization of the mask plate and the camera; the encoder is integrated in the mask plate, and based on the electric signal output by the encoder, the camera and the driving piece are controlled to synchronously operate, so that high-precision modulation is realized;
the electric signal is used for being simultaneously input to the driving piece and the camera to control the driving piece to drive the mask plate to rotate and serve as an external trigger signal to control the camera to take a picture.
In some embodiments, when the mask plate includes a plurality of sectors along the circumferential direction thereof, and the patterns on the mask plate use the sectors as distribution units, the number of the sectors is equal to the highest line number required by the driving member, so that the encoder more accurately controls the driving member to drive the mask plate to rotate.
In some embodiments, the mask plate comprises a plurality of concentric rings along a radial direction thereof, wherein one of the concentric rings is set as a check ring;
the check ring is used for displaying the correct pattern after the mask plate rotates so as to be compared with the result actually acquired by the camera.
In some embodiments, when each sector on the mask is a row of a mask in a spatial light modulator and each concentric ring on the mask is a column of a mask in a spatial light modulator, if the number of rows and the number of columns of the pattern on the mask reach a first threshold and a second threshold, pixels on the mask are 1-2 orders of magnitude higher than pixels of the spatial light modulator;
wherein the pattern corresponds to the pixel.
In some embodiments, the highest modulation frequency of the light modulation device is equal to or greater than a third threshold, the third threshold being greater than the highest modulation frequency of the spatial light modulator.
In some embodiments, the highest modulation frequency of the light modulation device depends on the number of sectors of the mask and the highest speed of the driver.
In some embodiments, the encoder is integrated on the outer ring of the mask plate, so that the mask plate is compatible with the line.
In some embodiments, the pattern of the mask is processed in a metal punching mode, a film etching mode or a chromium plate etching mode;
when a metal punching mode is adopted, the highest resolution of the mask plate is 40-55 mu m;
when a film etching mode is adopted, the highest resolution of the mask plate is 18-22 mu m;
when a chromium plate etching mode is adopted, the highest resolution of the mask plate is 4-6 mu m.
In some embodiments, the drive member employs a servo motor or a direct drive motor.
By adopting the technical scheme, the driving piece and the mask plate can synchronously run, so that the high-precision modulation of the light modulation device is realized; the mask plate in the shape of the circular ring is arranged, so that more pixels can be borne on the mask plate, and the modulation precision of the light modulation device is improved; the calibration ring is arranged, so that the modulation precision of the optical modulation device can be further promoted.
Another aspect of embodiments of the present application provides a high-precision high-speed optical modulation apparatus, including: a high-precision high-speed optical modulation device according to any one of the first to third aspects. By using the high-precision high-speed optical modulation device, the purpose of high-precision modulation can be achieved.
The beneficial effect of this application: the driving part drives the mask plate to rotate, and the encoder is arranged, so that the driving part and the camera work synchronously, high precision and high speed of the optical modulation device are facilitated, the precision and speed limit of an original product is broken through, and the mask plate is suitable for a dynamic modulation scene and a static modulation scene; furthermore, the calibration ring is arranged, so that the precision of the optical modulator is facilitated, and the highest modulation frequency of the optical modulation device is greater than or equal to that of the spatial optical modulator; the mask plate is arranged to be a circular ring, so that the mask plate can adapt to a camera when rotating, the data volume of the mask plate can be greatly improved, and the cost is reduced due to the fact that materials are saved; the encoder is further arranged on the outer ring of the mask plate, so that the circuit is not easy to bend in the mask plate, and the circuit integrated on the mask plate is not easy to damage; further make on the mask plate sectorial number with the highest line number that the driving piece required equals, the encoder can control more accurately the driving piece drive the mask plate rotates.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings needed to be used in the description of the embodiments or the conventional technologies will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of different types of chopper wheels in a conventional art;
FIG. 2 is a schematic view showing a state of a static rectangular mask plate in a conventional technique when the mask plate is rotated;
FIG. 3 is a diagram illustrating the operation of a conventional grating;
FIG. 4 is a schematic perspective view of a prior art spatial light modulator;
FIG. 5 is a schematic diagram of a control light modulator in operation according to the prior art;
FIG. 6 is a diagram showing the modulation results of a spatial light modulator;
FIG. 7 is a schematic diagram of a rectangular mask in the prior art;
fig. 8 is a schematic plan structure view of a mask according to one or more embodiments of the present application.
Detailed Description
To make the objects, embodiments and advantages of the present application clearer, the following description of exemplary embodiments of the present application will clearly and completely describe the exemplary embodiments of the present application with reference to the accompanying drawings in the exemplary embodiments of the present application, and it is to be understood that the described exemplary embodiments are only a part of the embodiments of the present application, and not all of the embodiments.
It should be noted that the brief descriptions of the terms in the present application are only for the convenience of understanding the embodiments described below, and are not intended to limit the embodiments of the present application. These terms should be understood in their ordinary and customary meaning unless otherwise indicated.
The terms "first," "second," "third," and the like in the description and claims of this application and in the above-described drawings are used for distinguishing between similar or analogous objects or entities and not necessarily for describing a particular sequential or chronological order, unless otherwise indicated. It is to be understood that the terms so used are interchangeable under appropriate circumstances.
The terms "comprises" and "comprising," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a product or apparatus that comprises a list of elements is not necessarily limited to all elements expressly listed, but may include other elements not expressly listed or inherent to such product or apparatus.
The optical modulation device can modulate characteristic parameters such as amplitude, frequency, phase, polarization state and duration of an optical wave, so that the parameters change according to a preset rule. In the process of modulating the light intensity, a spatial domain modulation mode is usually adopted. As shown in fig. 1-3, the spatial domain modulation method includes the following steps:
(1) and modulating by a modulation disk. The modulation disk is a typical light modulation device, information to be loaded is manufactured on the disk through printing, etching and the like, and the information such as the light intensity, the phase, even the polarization and the like of the light passing through can be changed according to a set mode. As shown in fig. 1, the chopper wheel can be used for optical scanning type amplitude modulation, rotational frequency modulation, phase modulation and pulse width modulation, and in the conventional technology, the chopper wheel is mainly used for suppressing background noise, spatial filtering and determining the target orientation. Similarly, there is also a mask plate, which is also used to process different types of patterns on the surfaces of different materials to achieve the modulation effect.
However, due to the influence of the processing precision, the conventional dynamic reticle is mainly used in the field of spatial filtering and noise reduction of infrared radiation, while the static reticle is used for determining the target orientation in the fields of military industry, surveying and mapping and the like, and the application in the field of visible light optical imaging, especially in the field of machine vision imaging is not available at present.
In addition, as shown in fig. 2, because the pixels of the camera are all rectangular, the appearance of the traditional processing customized static mask plate is rectangular, and the pixels inside the static mask plate are also rectangular so as to be matched with the image collected by the camera, but when the static mask plate moves dynamically, if a translational motion mode is adopted, the size of the mask plate is required to be far larger than the target surface of the camera, otherwise, the number of modulation patterns is insufficient, the modulation diversity is difficult to realize, but the mask plate is excessively large, which causes the cost to be greatly increased; if a rotating motion mode is adopted, the situation that the patterns acquired by the camera cannot be matched with the modulation patterns on the mask plate can be caused, and the whole modulation precision is poor.
(2) And (5) grating modulation. The grating is an optical element having a periodic spatial structure or optical properties (transmittance, reflectance, etc.), and as shown in fig. 3, moire fringes may be formed by the movement of the grating, thereby causing amplitude modulation of the light flux.
The two gratings need to move in a staggered manner when the gratings are used for realizing amplitude modulation, and the method is mainly used in the field of optical communication and cannot be applied to the field of optical imaging at present.
(3) And (4) photoelectronic modulation. The photoelectron modulation is divided into electro-optic, acousto-optic and magneto-optic modulation, which means that an electric field, an acoustic wave and a magnetic field which change along with time are applied to some crystals, and the properties of emergent light intensity, phase, polarization and the like are controlled through the generated birefringence effect. The spatial light modulator modulates a parameter of the light field through liquid crystal molecules under active control, for example, modulates the amplitude of the light field, modulates the phase through a refractive index, modulates the polarization state through rotation of a polarization plane, or realizes conversion of incoherent-coherent light, so that certain information is written into the light wave to achieve the purpose of light wave modulation.
As shown in fig. 4, the spatial light modulator incorporates a plurality of individual cells spatially arranged in a one-or two-dimensional array, each of which can independently receive control of an optical or electrical signal and change its optical properties in response to the signal, thereby modulating the light waves illuminated thereon. Such devices may change the amplitude or intensity, phase, polarization, and wavelength of a spatially distributed light distribution or convert incoherent light into coherent light under the control of a time-varying electrical or other signal. Due to the property, the optical fiber can be used as a construction unit or a key device in systems such as real-time optical information processing, optical computation, optical neural networks and the like.
It should be noted that the spatial light modulator is composed of a plurality of micro optical elements, for example, a Digital Micromirror array (DMD), and is composed of up to a million micro mirrors and a plurality of micro motors, and high-precision intensity modulation at a pixel level can be realized by matching electrical signals, and by arranging the millions of micro mirrors in a matrix form, and by controlling the micro motors individually provided thereto, angle setting of each micro mirror can be realized. However, it also has a high cost, ranging from tens of thousands of dollars to tens of thousands of dollars. Meanwhile, each micro reflector is driven by a micro motor, the modulation frequency of the micro reflector is limited by the frequency of the motor, and the spatial light modulator is insufficient for the ultra-high-speed modulation process.
It can be understood that the spatial domain modulation is to artificially superimpose known two-dimensional or three-dimensional spatial distribution information onto the light wave, and analyze and extract information in the imaging result by analyzing the illumination distribution of the imaging space, so as to improve the image resolution of the imaging result. Among them, spatial light modulators, which are most representative in recent years and are the forefront in the field of optical imaging, are representative.
As shown in fig. 5 (in the figure, the gray square represents the micro-mirror, and the central green dotted line represents the flip axis of the mirror), in the imaging process, the light emitted by the sample itself is imaged on the surface of the modulator through the optical system, when all the micro-mirrors are set to the same angle, the spatial light modulator can be considered to be a large plane mirror, and the direction of the emergent light can be selected by controlling the angle. If the emergent light is reflected to the optical path of the subsequent part, the image information can still be transmitted along with the light wave, and if the emergent light is reflected to the outside of the optical path, the image information is lost, and the camera cannot receive signals.
The angle of each mirror is set by the controller, so that information of a part of pixels can be kept transmitted, and information of a part of pixels is intentionally lost, so that the modulation effect of different patterns is realized, as shown in fig. 6 (in the figure, white represents that information is reserved, and black represents that information is lost), and as the angles of the mirrors in the spatial modulator are all set artificially, the arrangement patterns of the micro mirrors can be recorded and used in the subsequent algorithm demodulation process.
FIG. 7 is a schematic diagram of a static rectangular mask in the prior art.
As shown in fig. 7, the static rectangular mask in the conventional technology is similar to the reticle, and is processed in advance to obtain a patterned mask, and the black part of the mask is not transparent, and the rest is transparent, so as to implement intensity modulation of the image.
Through the analysis, for the processed static rectangular mask plate, when the static rectangular mask plate is used for carrying out light modulation in a static scene, at each moment, when a camera shoots an image, patterns on the mask plate are known and can be corresponding to the image shot by the camera. However, when a static rectangular mask is used for light modulation in a dynamic scene, the problem that patterns acquired by a camera cannot be matched with modulation patterns on the mask is easily caused, and further, the subsequent demodulation cannot be performed through an algorithm. Although the spatial light modulator is controlled by an electric signal given by a computer every time when the angle of the micro reflector is adjusted in the working process, the electric signal can be synchronously given to the camera and controlled to be simultaneously carried out, the number of pixels borne by a mask plate in the spatial light modulator is small, and the problems of low modulation frequency, poor modulation precision and high cost exist.
Based on the phenomenon, the high-precision high-speed modulation device is used for realizing the spatial domain intensity modulation of images in the field of optical imaging, compared with the traditional scheme, the pixel distribution of the modulation device is optimized to reduce the cost, the mask pattern on the modulation device is strictly synchronized with a camera, the application range, the highest modulation frequency and the highest modulation precision of the modulation device are improved, and the cost of the modulation device is greatly reduced. The specific description is as follows:
fig. 8 shows a schematic plane structure diagram of a mask plate in an embodiment of the present application.
As shown in fig. 7, the high-precision high-speed modulation device includes a mask plate, a driving member, an encoder, and a camera, the mask plate is configured as a circular ring, a pattern for modulation is etched on the circular ring, and the mask plate is suitable for a static modulation scene; the driving piece is fixedly connected with the inner ring of the circular ring and is used for driving the mask plate to rotate along the central axis of the circular ring so that the mask plate is suitable for a dynamic modulation scene; the camera is positioned on the other side of the mask plate, which is far away from the light emission source, and is used for collecting an image of light modulated by the mask plate; the encoder is used for realizing the synchronization of the mask pattern and the camera; the encoders are integrated in the mask plate and arrayed along the circumferential direction of the mask plate, and based on the output electric signals of the encoders, the cameras and the driving parts are controlled to synchronously operate, so that high-precision modulation is realized; the electric signal is used for being simultaneously input to the driving piece and the camera to control the driving piece to drive the mask plate to rotate and serve as an external trigger signal to control the camera to take pictures.
The driving piece can be set as a direct drive motor or a servo motor, and a driving shaft of the motor is connected with the inner circle key of the mask plate. The motor structure is simple relatively, and the process of driving the mask plate to rotate is efficient. The high-precision high-speed modulation device further comprises an optical system which is used for emitting irradiation light irradiating one side of the mask plate and can collect light beams passing through the mask plate and image the light beams so as to enable the camera to acquire images.
It should be noted that the rotation process of the motor is controlled by outputting pulses continuously through the encoder, and outputting an electrical signal after the reading head of the motor reads the pulses, so that the electrical signal can also be used for controlling the triggering of the camera, and the motor and the camera are synchronized. Under the condition of achieving the same pixel precision, the cost of the method is the customization processing cost of the mask plate and the purchase cost of the motor, the cost is about 1 ten thousand yuan, and the selling price of the spatial light modulator on the market is about 8-15 ten thousand yuan, so that the cost of the high-precision high-speed modulation device is greatly reduced.
It can be understood that the mask plate is designed into a circular ring, and the mask plate can be sleeved on a driving shaft of the motor and driven by the motor to rotate, so that the defect that the traditional mask plate can only be statically modulated is overcome, and the modulation device can be used for both static modulation scenes and dynamic modulation scenes. In addition, the mask plate is set to be circular, compared with a spatial light modulator, the mask plate has the advantages that the number of pixels borne under the same area is large, the required area is reduced, the cost is further reduced, and the highest modulation frequency of the mask plate is improved.
In some embodiments, the encoder is integrated on the outer rim of the mask to make the mask compatible with the lines. When the encoder is integrated on the outer ring of the mask plate, the area for compatible lines in the whole mask plate is large, and the circuit in the encoder is not easy to damage due to bending. It should be noted that, in fig. 8, a white area between the mask portion and the area where the encoder is located is a line integration area.
In some embodiments, when the mask plate includes a plurality of fan shapes (the fan shape corresponding to the central angle θ shown in fig. 8) along the circumferential direction of the mask plate, and the pattern on the mask plate is distributed in units of fan shapes, the number of the fan shapes is equal to the highest line number required by the motor, so that the encoder more accurately controls the motor to drive the mask plate to rotate. For example, if the motor of the selected type can only accommodate up to 5000 lines of encoders, the mask can be designed to have exactly 5000 sectors, one encoder for each sector. At this moment, because encoder and fan-shaped one-to-one, the mask pattern belongs to same fan-shaped with the encoder, so the encoder also corresponds strictly with the mask pattern, and in the course of the work, when the mask plate rotated certain angle at every turn, the encoder of outer lane all can export the signal of telecommunication for the motor, and this signal of telecommunication can be used for exporting the camera simultaneously, shoots as outer trigger signal control camera.
In some embodiments, as shown in fig. 8, the pattern on the mask consists of black and white color blocks alternating between black and white, each black or white color block is a pixel of a static rectangular mask, except that the rectangular arrangement is changed into a circular arrangement. When the mask plate includes a plurality of concentric rings (e.g., a ring formed by a dotted line and an inner ring of the mask plate as shown in fig. 8) along a radial direction of the mask plate, each of the concentric rings is a row of the mask plate in the spatial light modulator, and if a sector is used as a distribution unit, each sector is a row of the mask plate in the spatial light modulator in a pattern on the mask plate.
It should be noted that the number of sectors and rings in the image of the mask determines the highest possible modulation precision of the final modulation device, and if the number of rows of the pattern on the mask reaches the first threshold and the number of columns reaches the second threshold, the number of pixels on the mask is 1-2 orders higher than the number of pixels on the mask in the spatial light modulator. When the outer diameter of the mask plate is 30cm, the first threshold may be 15000, and the second threshold may be 7500, that is, the pattern on the mask plate may be set to 15000 rows and 7500 columns, at this time, the number of pixels of the mask plate is much higher than that of the existing spatial light modulator (the existing spatial light modulator can only realize a pattern design of about 4000 rows and 3000 columns at most). Therefore, under the condition of the same area, the pixel number of the mask plate is higher than about 1-2 orders of magnitude, and therefore the modulation precision of the modulation device in the application is higher than that of a spatial light modulator in the traditional technology.
In some embodiments, in order to promote more accurate synchronization of the motor and the camera, one of the concentric rings on the mask plate is set as a check ring, and the check ring is also etched with a pattern design between black and white. In this embodiment, the check ring is arranged at the inner ring of the mask plate. The check ring is used for displaying the correct pattern of the mask plate after rotation so as to compare the correct pattern with the result actually acquired by the camera. When the image result actually acquired by the camera is compared with the pattern on the check ring, the comparison result shows that the actual result received by the camera is different from the theoretical result modulated by the mask plate, and the modulation result is problematic, so that the problem can be timely checked.
The pattern on the mask can be processed in various ways, for example, in some embodiments, the pattern processing of the mask can be implemented by metal punching, and at this time, the highest resolution of the mask is 40-55 μm, for example, the highest resolution of the mask is 50 μm. In some embodiments, the patterning of the mask may be implemented by a film etching method, and at this time, the highest resolution of the mask is 18 to 22 μm, for example, the highest resolution of the mask is 20 μm; in other embodiments, the pattern processing of the mask is implemented by using a chrome plate etching method, and at this time, the highest resolutions of the masks are respectively 4 to 6 μm, for example, the highest resolution of the mask is 5 μm.
It should be noted that, when the patterning of the mask is implemented by using a chrome plate etching method, the modulation precision of the modulation device in the present application can reach a micron level, for example, in some embodiments, the modulation precision of the modulation device is 4 μm.
It should be noted that the highest modulation frequency of the light modulation device is equal to or greater than the third threshold, and the third threshold is greater than the highest modulation frequency of the spatial light modulator, and in some embodiments, the highest modulation frequency of the light modulation device is 2MHz, and the highest modulation frequency of the conventional spatial light modulator is 20kHz, so that the highest modulation frequency of the light modulation device in the present application is 100 times that of the conventional spatial light modulator.
The highest modulation frequency of the light modulation device depends on the number of sectors of the mask plate and the highest speed of the motor. For example, when the number of sectors of the mask plate is 15000 and the highest speed of the motor is 8000rpm, the highest modulation frequency of the optical modulation device is 2MHz, which greatly improves the upper limit of the modulation frequency of the optical modulation device.
When the high-precision high-speed modulation device is used, the annular mask plate can bear more pixels in a smaller required area, so that the cost is saved, and the highest modulatable precision of the modulation device is improved; the encoder is integrated on the mask plate, and can simultaneously output electric signals to the driving part and the camera, so that the driving part and the camera can synchronously run, and the purpose of high-precision modulation of the modulation device is achieved; the number of the fan-shaped mask plates is equal to the highest line number required by the driving part, so that the encoder can further more accurately control the driving part to drive the mask plates to rotate, and the final modulation result is accurate; and a certain concentric ring in the pattern of the mask plate is further set as a check ring, and the check ring is compared with the modulation result, so that the accuracy of the modulation result is promoted, and the accuracy of the modulation result is further promoted.
Based on the above description of the high-precision high-speed modulation device scheme and the related drawings, the present application further provides a high-precision high-speed optical modulation apparatus, including any of the high-precision high-speed optical modulation devices in the first aspect, having advantages of being applicable to both static modulation scenarios and dynamic modulation scenarios, high modulation frequency, high modulation precision, relatively low production cost, and the like.
The embodiment has the advantages that the static mask plate is matched with the motor, and the encoder is integrated on the mask plate, so that the optical image dynamic modulation with extremely high precision and extremely high frequency is realized; during modulation, the mask pattern and the camera can run synchronously, so that the possibility of inaccurate synchronization is eliminated, and the modulation precision of a modulation device is greatly improved; the mask plate is further arranged to be a circular ring, so that the pixel bearing capacity is improved under the same area, and compared with a spatial light modulator in the prior art, the spatial light modulator has the same performance, and the cost of a modulation device in the application is only one tenth of that of the spatial light modulator; further, the calibration ring is arranged, so that more accurate synchronization can be realized, and the optical modulation device can be accurately modulated.
The foregoing description, for purposes of explanation, has been presented in conjunction with specific embodiments. However, the foregoing discussion in some embodiments is not intended to be exhaustive or to limit the implementations to the precise forms disclosed above. Many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles and the practical application, to thereby enable others skilled in the art to best utilize the embodiments and various embodiments with various modifications as are suited to the particular use contemplated.
Claims (10)
1. A high-precision high-speed optical modulation device, comprising:
the mask plate is arranged to be a circular ring, patterns for modulation are arranged on the circular ring, and the mask plate is suitable for a static modulation scene;
the driving piece is used for driving the mask plate to rotate along the central axis of the mask plate so as to enable the mask plate to be suitable for a dynamic modulation scene, and the driving piece is fixedly connected with the inner ring of the circular ring;
the camera is used for acquiring the image modulated by the mask plate;
the encoder is used for realizing the synchronization of the mask plate and the camera; the encoder is integrated in the mask plate, and based on the electric signal output by the encoder, the camera and the driving piece are controlled to synchronously operate, so that high-precision modulation is realized;
the electric signal is used for being simultaneously input to the driving piece and the camera to control the driving piece to drive the mask plate to rotate and serve as an external trigger signal to control the camera to take a picture.
2. The high-precision high-speed optical modulator according to claim 1, wherein when the mask plate includes a plurality of sectors along its circumferential direction and the pattern on the mask plate is distributed in units of the sectors, the number of the sectors is equal to the highest number of lines required by the driving member, so that the encoder more precisely controls the driving member to drive the mask plate to rotate.
3. The high-precision high-speed optical modulation device according to claim 2, wherein the mask plate includes a plurality of concentric rings in a radial direction thereof, one of the concentric rings being set as a check ring;
the check ring is used for displaying a correct pattern after the mask plate rotates so as to be compared with a result actually acquired by the camera.
4. The high-precision high-speed optical modulation device according to claim 3, wherein when each sector on the mask is a row of a mask in the spatial optical modulator and each concentric ring on the mask is a column of the mask in the spatial optical modulator, if the number of rows and the number of columns of the pattern on the mask reach a first threshold and a second threshold, the number of pixels on the mask is 1-2 orders of magnitude higher than the number of pixels on the spatial optical modulator;
wherein the pattern corresponds to the pixel.
5. A high precision high speed optical modulation device as defined in claim 1 wherein the highest modulation frequency of the optical modulation device is equal to or greater than a third threshold, the third threshold being greater than the highest modulation frequency of the spatial light modulator.
6. A high-precision high-speed optical modulation device according to claim 2, wherein: the highest modulation frequency of the light modulation device depends on the number of sectors and the highest speed of the driver.
7. The high-precision high-speed optical modulation device according to claim 1, wherein the encoder is integrated on the outer periphery of the mask plate to make the mask plate compatible with the line.
8. The high-precision high-speed optical modulator according to claim 1, wherein the pattern of the mask is processed by a metal punching method, a film etching method or a chrome plate etching method;
when a metal punching mode is adopted, the highest resolution of the mask plate is 40-55 mu m;
when a film etching mode is adopted, the highest resolution of the mask plate is 18-22 mu m;
when a chromium plate etching mode is adopted, the highest resolution of the mask plate is 4-6 mu m.
9. A high-precision high-speed optical modulator device as defined in claim 1 wherein said driving element is a servo motor or a direct drive motor.
10. A high-precision high-speed optical modulation apparatus comprising the high-precision high-speed optical modulation device according to any one of claims 1 to 9.
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005091096A (en) * | 2003-09-16 | 2005-04-07 | Canon Inc | Structure for generating near field light, near field light head having the structure, and record regenerator and surface observation device having the head |
CN102495526A (en) * | 2011-11-16 | 2012-06-13 | 中国科学院物理研究所 | Optical exposing method, and method for applying optical exposure in preparation of silicon material vertical hollow structure |
CN111999616A (en) * | 2020-08-31 | 2020-11-27 | 南京工程学院 | Single-pixel solar blind ultraviolet imaging system based on space coding mask plate |
CN112230507A (en) * | 2020-10-22 | 2021-01-15 | 泉芯集成电路制造(济南)有限公司 | Optical proximity correction model construction method and device and computer equipment |
CN113033723A (en) * | 2021-03-08 | 2021-06-25 | 山东大学 | Annular mask, light field regulation and control method, single-pixel imaging method and system |
CN114270259A (en) * | 2019-08-12 | 2022-04-01 | Asml控股股份有限公司 | Apparatus and method for reticle identification in a lithographic apparatus |
-
2022
- 2022-07-19 CN CN202210849754.9A patent/CN115113387B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005091096A (en) * | 2003-09-16 | 2005-04-07 | Canon Inc | Structure for generating near field light, near field light head having the structure, and record regenerator and surface observation device having the head |
CN102495526A (en) * | 2011-11-16 | 2012-06-13 | 中国科学院物理研究所 | Optical exposing method, and method for applying optical exposure in preparation of silicon material vertical hollow structure |
CN114270259A (en) * | 2019-08-12 | 2022-04-01 | Asml控股股份有限公司 | Apparatus and method for reticle identification in a lithographic apparatus |
CN111999616A (en) * | 2020-08-31 | 2020-11-27 | 南京工程学院 | Single-pixel solar blind ultraviolet imaging system based on space coding mask plate |
CN112230507A (en) * | 2020-10-22 | 2021-01-15 | 泉芯集成电路制造(济南)有限公司 | Optical proximity correction model construction method and device and computer equipment |
CN113033723A (en) * | 2021-03-08 | 2021-06-25 | 山东大学 | Annular mask, light field regulation and control method, single-pixel imaging method and system |
Non-Patent Citations (1)
Title |
---|
WENJIE JIANG 等: "Single-pixel camera based on a spinning mask", OPTICS LETTERS, vol. 46, no. 19, pages 4859 - 4862 * |
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