CN115113383A - Long-lens-barrel vacuum microscopic imaging lens for observing object to be observed in ultrahigh vacuum - Google Patents
Long-lens-barrel vacuum microscopic imaging lens for observing object to be observed in ultrahigh vacuum Download PDFInfo
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 16
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 10
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- 201000009310 astigmatism Diseases 0.000 description 3
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/025—Objectives with variable magnification
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/362—Mechanical details, e.g. mountings for the camera or image sensor, housings
Abstract
The invention relates to the technical field of physical characterization of high-vacuum condensed state, in particular to a long-lens-barrel vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum, which comprises: the device comprises a collimation light source, a beam splitter, a front lens group, a rear lens group and a CCD camera, wherein the collimation light source is used for emitting collimation light or near collimation light to illuminate an observed object, the front lens group is arranged in a vacuum cavity, the working distance from the front lens group to a sample is long, and the front lens group is used for optically amplifying the observed object; the rear lens group is arranged outside the vacuum cavity, the distance between the front lens group and the rear lens group reaches 350-800 mm, the middle part is isolated from vacuum through an optical window, and the rear lens group is used for receiving reflected light rays transmitted by the front lens group, optically amplifying the reflected light rays and imaging the light rays to a rake surface of the CCD camera; the CCD camera is connected with a display of the computer and is used for digitally amplifying the image of the rake face of the CCD camera. The vacuum displacement table is used for realizing the scanning of the long-lens-barrel vacuum microscopic imaging lens on a sample, and is suitable for vacuum detection and vacuum observation of mechanical stripping.
Description
Technical Field
The invention relates to the technical field of physical characterization of a high-vacuum condensed state, in particular to a long-lens-barrel vacuum microscopic imaging lens for observing an object to be observed in ultrahigh vacuum.
Background
A microscope is an optical system that magnifies and images a small object at a short distance. The conventional microscope is to observe an image through human eyes, and thus is divided into two parts, an objective lens and an eyepiece lens. The objective lens is used for magnifying the target into a real image; the purpose of the eyepiece is to change the magnified to a magnified virtual image while pulling the system exit pupil to the eye entrance pupil location for viewing by the human eye.
Due to space limitation, the ultrahigh vacuum equipment has large requirement on the working distance of an objective lens, the aperture for observation is small and is usually less than 25.4mm, and the whole length of the lens is long and can be provided with an ultrahigh vacuum six-dimensional adjusting frame usually larger than 350mm so as to control the working distance.
Currently, most of the micro lenses do not have the condition of working in ultra-high vacuum. The microscopic imaging optical path system which can observe an internal sample in ultrahigh vacuum in real time under the ultrahigh vacuum condition, has high resolution capability and is convenient to adjust is urgently needed to be designed, so that the microscopic imaging optical path system has great application value.
Disclosure of Invention
The invention provides a long-lens-barrel vacuum microimaging lens for observing an observed object in ultrahigh vacuum, which aims to solve the problems that the microimaging lens does not have the condition of working in ultrahigh vacuum, cannot observe a sample in ultrahigh vacuum in real time, and does not have high resolution capability and an adjustable microimaging optical path system.
In order to achieve the above purpose, the embodiment of the present invention provides the following technical solutions:
in a first aspect, in an embodiment provided by the present invention, there is provided an elongated barrel vacuum microscopic imaging lens for observing an object to be observed in ultrahigh vacuum, including:
the collimating light source is used for emitting collimating light rays or near-collimating light rays to illuminate an observed object;
the front lens group is arranged in the vacuum cavity, has long working distance to the sample and is used for optically amplifying the observed object;
the rear lens group is arranged outside the vacuum cavity, the distance between the front lens group and the rear lens group reaches 350-800 mm, the middle part of the rear lens group is isolated from vacuum through an optical window, and the rear lens group is used for receiving reflected light transmitted by the front lens group, optically amplifying the reflected light and imaging the reflected light to the rake surface of the CCD camera;
and the CCD camera is connected with a display of the computer and is used for digitally amplifying the image of the rake face of the CCD camera.
As a further scheme of the present invention, the collimated light source includes a light source body and a collimating lens, and the collimating lens is configured to collimate light emitted by the light source body and then irradiate the light onto the light splitting sheet of the exit light path.
As a further aspect of the present invention, the light source body is an LED light source.
As a further scheme of the invention, the collimating lens is a single lens, a lens group or a zone plate.
As a further scheme of the invention, the front lens group and the rear lens group are used for imaging and amplifying reflected light of an observed object by 40 times, a rake surface of the CCD camera is imaged on a display of a computer for digital amplification, and the optical amplification and the digital amplification of the front lens group and the rear lens group are combined to form microscopic imaging with the amplification of more than 1000 times.
As a further scheme of the present invention, the distance between the front lens group and the rear lens group is as long as 350 to 800 mm, the middle is isolated by an optical window, the optical window is transparent glass arranged between the front lens group and the rear lens group, and the optical window is used for isolating the front lens group to form a vacuum cavity and transmitting light through a light path.
As a further scheme of the invention, the vacuum microscopic imaging lens adopts an 8-piece type optical structure design lens, and each lens is a spherical lens with a refractive index.
As a further scheme of the invention, the front lens group consists of 6 lens lenses to form an ultrahigh vacuum medium lens group, wherein the lens lenses of the front lens group are locked by a structural sleeve, the structural sleeve is clamped by a vacuum displacement table, and an optical window connecting flange is adopted for sealing to realize isolation protection and light transmission in a vacuum environment.
As a further scheme of the invention, the rear lens group consists of 2 lens lenses to form an air lens group.
As a further aspect of the present invention, the present invention includes, in order along an optical axis from an object side to a CCD side, a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, and an eighth lens, wherein the first lens is a positive power lens, the second lens is a positive power lens, the third lens is a positive power lens, the fourth lens is a negative power lens, the fifth lens is a positive power lens, the sixth lens is a negative power lens, the seventh lens is a negative power lens, and the eighth lens is a positive power lens.
As a further aspect of the present invention, the first lens to the sixth lens are assembled in the same lens barrel, and placed in a vacuum; the seventh lens and the eighth lens are assembled in the same lens barrel and are placed in the air; the two lens cones are arranged on the same optical axis.
The technical scheme provided by the invention has the following beneficial effects:
the invention provides a long-tube vacuum microscopic imaging lens for observing an object to be observed in ultrahigh vacuum, which is characterized in that 8-piece optical structures forming the vacuum microscopic imaging lens are arranged into a front lens group arranged in a vacuum cavity and a rear lens group arranged in air, the distance between the front lens group and the rear lens group is 350-800 mm, the vacuum and light path light transmission are isolated in the middle through an optical window, the integral magnification of more than 1000 times is achieved through the optical magnification of the front lens group and the rear lens group combined with the digital magnification of a CCD camera to a display, the long-tube vacuum microscopic imaging lens for observing the object to be observed in ultrahigh vacuum is arranged on a vacuum displacement table, and the vacuum displacement table is used for realizing the scanning of a sample by the long-tube vacuum microscopic imaging lens and is suitable for vacuum detection and mechanical stripping vacuum observation.
These and other aspects of the invention are apparent from and will be elucidated with reference to the embodiments described hereinafter. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention. In the drawings:
fig. 1 is a schematic view of an optical path structure of a long-tube vacuum microscopic imaging lens for observing an object to be observed in ultra-high vacuum according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a front lens group and a rear lens group in a long-tube vacuum microimaging lens for observing an object to be observed in ultrahigh vacuum according to an embodiment of the present invention.
Fig. 3 is a schematic top view of a long-tube vacuum micro-imaging lens for observing an object to be observed in ultra-high vacuum according to an embodiment of the present invention.
Fig. 4 is a schematic perspective view of a viewing angle of a long-tube vacuum micro-imaging lens for observing an object to be observed in ultra-high vacuum according to an embodiment of the present invention.
Fig. 5 is a schematic perspective view of a still another view angle of a long-tube vacuum micro-imaging lens for observing an object to be observed in ultra-high vacuum according to an embodiment of the present invention.
Fig. 6 is a point array diagram of the imaging effect of the observed object in the long-tube vacuum microscopic imaging lens for observing the observed object in ultrahigh vacuum according to an embodiment of the present invention.
Fig. 7 is an MTF chart of an imaging effect of an observed object in a long-tube vacuum microimaging lens for observing the observed object in ultra-high vacuum according to an embodiment of the present invention.
Fig. 8 is a field curvature distortion diagram of an imaging effect of an observed object in a long-tube vacuum micro-imaging lens for observing the observed object in ultra-high vacuum according to an embodiment of the present invention.
Fig. 9 is a longitudinal chromatic aberration diagram of an imaging effect of an observed object in a long-tube vacuum microscopic imaging lens for observing the observed object in ultrahigh vacuum according to an embodiment of the present invention.
Fig. 10 is a lateral chromatic aberration diagram of an imaging effect of an observed object in a long-tube vacuum micro-imaging lens for observing the observed object in ultrahigh vacuum according to an embodiment of the present invention.
In the figure: 1-collimation light source, 11-light source body, 12-collimation lens, 2-beam splitter, 3-optical window, 4-front lens group, 5-rear lens group, 6-CCD camera, 7-observed object, 8-vacuum chamber, 101-structural sleeve, 102-flange connector, 103-corrugated pipe, 104-vacuum displacement table, 105-optical window flange, 106-connecting pipe and 107-light source box.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The structural diagrams shown in the figures are merely illustrative and do not necessarily include all of the contents and operations/steps, nor do they necessarily have to be performed in the order described. For example, some operations/steps may be decomposed, combined or partially combined, so that the actual execution sequence may be changed according to the actual situation.
It is to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be understood that, for the convenience of clearly describing the technical solutions of the embodiments of the present invention, the words "first", "second", and the like are used to distinguish the same items or similar items with basically the same functions and actions. For example, the first callback function and the second callback function are only used for distinguishing different callback functions, and the order of the callback functions is not limited. Those skilled in the art will appreciate that the terms "first," "second," and the like do not denote any order or importance, but rather the terms "first," "second," and the like do not denote any order or importance.
Specifically, the embodiments of the present invention will be further explained below with reference to the drawings.
Fig. 1 is a schematic structural view of a long-tube vacuum microimaging lens for observing an object to be observed in ultrahigh vacuum according to an embodiment of the present invention, and as shown in fig. 1, the long-tube vacuum microimaging lens for observing an object to be observed in ultrahigh vacuum includes a collimated light source 1, a front lens group 4, a rear lens group 5, and a CCD camera 6. The collimating light source 1 is used for emitting collimating light or near collimating light to illuminate an observed object, the front lens group 4 is arranged in the vacuum cavity, the working distance from the front lens group 4 to a sample is 21.8mm, the front lens group is used for optically amplifying the observed object, the rear lens group 5 is arranged outside the vacuum cavity, the distance between the front lens group 4 and the rear lens group 5 is 680mm, the front lens group and the rear lens group are isolated from vacuum through the optical window 3, the rear lens group 5 is used for receiving the reflecting light transmitted by the front lens group 4 and imaging the rake face of the CCD camera 6 after optical amplification, and the CCD camera 6 is connected with a display of a computer and used for digitally amplifying the imaging of the rake face of the CCD camera 6.
In the embodiment of the present invention, the front lens group 4 and the rear lens group 5 are used for imaging and magnifying the reflected light of the observed object by 40 times, the rake surface of the CCD camera 6 is 1/2 inches CCD, the diagonal length is 8mm, imaging is performed on a 21-inch display of a computer by 66.675 times digital magnification, and the optical magnification and the digital magnification of the front lens group 4 and the rear lens group 5 are combined to form microscopic imaging of 2667 times magnification.
In the invention, the size of an observed object in the ultrahigh vacuum cavity is hundreds of microns, the imaging lens formed by the ultrahigh vacuum middle lens group formed by the front lens group 4 and the air middle lens group formed by the rear lens group 5 is optically amplified by 40 times and imaged on the CCD camera 6, and then the digital amplification from the CCD camera 6 to the display is carried out, so that the microscopic imaging of 2667 times of optical combination digital amplification is achieved. Wherein, through optical window 3 combination structure, play the isolation protection effect to the vacuum environment. The visible light source is combined with the collimating lens to be used as a light source of the whole light path. The vacuum microscopic imaging lens has the characteristics of small aperture and long lens group, and meets the use requirements of ultrahigh vacuum equipment.
In the embodiment of the present invention, the position of the optical window 3 is arranged between the front mirror group 4 and the rear mirror group 5, and the position of the optical window 3 can be adjusted in a back-and-forth movement manner without affecting the light path.
In an embodiment of the present invention, referring to fig. 1, the collimated light source 1 includes a light source body 11 and a collimating lens 12, and the collimating lens 12 is configured to collimate light emitted from the light source body 11 and irradiate the collimated light onto the light splitting sheet 2 in an outgoing light path.
The light source body 11 is an LED light source, and the collimating lens 12 is a single lens, a lens group or a zone plate.
In other embodiments of the present invention, besides the above collimated light source 1, a direct light supplement manner using LED lamp beads directly outside other optical windows of the vacuum sample chamber can be adopted to illuminate the observed object.
In the embodiment of the present invention, the front lens group 4 and the rear lens group 5 are separated by an optical window 3, the optical window 3 is transparent glass disposed between the front lens group 4 and the rear lens group 5, and the optical window 3 is used for isolating the front lens group 4 to form a vacuum chamber and for transmitting light through a light path.
In an embodiment of the present invention, referring to fig. 3, 4 and 5, the long-tube vacuum microscopic imaging lens for observing an object to be observed in ultrahigh vacuum is mounted on a vacuum displacement stage 104, the vacuum displacement stage 104 is used for scanning a sample by the long-tube vacuum microscopic imaging lens, the vacuum displacement stage 104 is connected to a bellows 103, a front end of the bellows 103 is connected to the vacuum chamber 8 through a flange connection port 102, a front end of the vacuum displacement stage 104 is connected to a front lens group 4 through a structural sleeve 101, the front lens group 4 is disposed toward the object to be observed 7, wherein the front lens group 4, the structural sleeve 101 and the object to be observed 7 are located in the vacuum chamber 8.
Referring to fig. 3, 4 and 5, the rear end of the vacuum displacement stage 104 communicates with the connection pipe 106 through an optical window flange 105, wherein the optical window flange 105 is used for vacuum isolation and light transmission. The connecting pipe 106 is connected with a light source box 107, the light source box 107 is used for installing the components of the collimated light source 1 and the light splitting sheet 2, and the light source box 107 is connected with the rear lens group 5 and the CCD camera 6.
In the embodiment of the present application, the lens lenses of the front lens group 4 are locked by the structural sleeve 101, the structural sleeve 101 is clamped by the vacuum displacement table 104, and the long-tube vacuum microscopic imaging lens scans the sample by the vacuum displacement table 104.
The utility model provides a long lens cone vacuum microscopic imaging lens of being observed thing in observation ultra-high vacuum sets up the distance than longer, sets up preceding mirror group 4 in the vacuum, sets up back mirror group 5 outside the vacuum, and the centre is isolated with glass, is fit for being used in vacuum detection, and the vacuum observation that machinery was peeled off increases vacuum displacement platform 104, realizes the scanning of long lens cone vacuum microscopic imaging lens to the sample through vacuum displacement platform 104.
In one embodiment of the invention, the vacuum microscopic imaging lens adopts 8-piece optical structure design lenses, each lens is a spherical lens with a refractive index, one group of 6-piece lenses is placed in vacuum, and a structure opening mode is adopted to ensure that the vacuum environment is not influenced; a set of 2-piece lenses was placed in air.
The front lens group 4 is a lens group in ultrahigh vacuum, which is composed of 6 lens lenses, wherein the lens lenses of the front lens group 4 are locked by a structural sleeve, the structural sleeve is clamped by a vacuum displacement table, and the optical window 3 is connected with a flange for sealing to perform isolation protection and light transmission on a vacuum environment.
The rear lens group 5 is a lens group in the air consisting of 2 lens lenses.
Referring to fig. 1 and 2, the optical system includes, in order along an optical axis from an object side to a CCD side, a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, and an eighth lens, where the first lens is a positive power lens, the second lens is a positive power lens, the third lens is a positive power lens, the fourth lens is a negative power lens, the fifth lens is a positive power lens, the sixth lens is a negative power lens, the seventh lens is a negative power lens, and the eighth lens is a positive power lens.
In an embodiment of the present invention, when the vacuum microscopic imaging lens adopts an 8-piece optical structure design lens, the vacuum microscopic imaging lens further includes:
the third lens (L3) and the fourth lens (L4) constitute a combined lens (L34);
the fifth lens (L5) and the sixth lens (L6) constitute a combined lens (L56);
the fifth lens (L7) and the sixth lens (L8) constitute a combined lens (L78);
wherein a focal length of the first lens (L1) is f1, a focal length of the second lens (L2) is f2, a focal length of the combined lens (L34) is f34, a focal length of the combined lens (L56) is f56, a focal length of the combined lens (L78) is f78, a system focal length of the optical lens system is fs, and the following relations are satisfied:
50<f1/fs<70；
10<f2/fs<20；
-20<f34/fs<-10；
20<f56/fs<30；
-35<f78/fs<20。
in an embodiment of the present invention, the combined lens (L34) may be replaced by a single lens that satisfies the above focal length relationship;
the combined lens (L56) can be replaced by a single lens satisfying the above focal length relation;
the combined lens (L78) can be replaced by a single lens that satisfies the above focal length relationship.
In the embodiment of the present invention, the sum of air gaps on the optical axis (I) between the first lens (L1) to the eighth lens (L8) is AGa, a distance between the sixth lens and the seventh lens of the optical lens system is L67, and the following conditional expressions are also satisfied: L67/AGa is more than or equal to 0.85 and less than 1.
The first lens to the sixth lens are assembled in the same lens barrel and are placed in vacuum; the seventh lens and the eighth lens are assembled in the same lens barrel and are placed in the air; the two lens cones are arranged on the same optical axis.
In the embodiment of the invention, the invention ensures the characteristics of small caliber, long distance, excellent imaging quality, no distortion, high magnification and the like of a vacuum application environment.
The first curvature radius R1 and the second curvature radius R2 of the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens and the eighth lens along the incident direction of light, the optical refractive index, the Abbe coefficient and the lens thickness are in the following value ranges as shown in the table:
the following are specifically mentioned: the observed object is at the rightmost side, the first lens is closest to the observed object, and the like, and the eighth lens is closest to the CCD. The convexity is positive to the left and negative to the right.
In the embodiment of the invention, optical glass is used as an isolation protection window of the vacuum cavity, a semi-transparent and semi-reflective glass is used for introducing a light source into the vacuum cavity, and meanwhile, reflected light of an observed object in the vacuum cavity is transmitted into the lens group in the air and finally imaged on a target surface of the CCD camera 6.
Referring to fig. 6, in the dot array diagram of the imaging effect of the observed object, the details of the observed object in the distinguishable vacuum cavity are several tens of micrometers, and fig. 6 is a dot array diagram of an image plane 0 view field, a 0.5 view field, a 0.7 view field and a full view field. The black circle is the area of the Airy spots. The diffuse spots are designed in the range of Airy spots in each field of view. Referring to FIG. 7, a plot of MTF for an observed object, wherein the Geometric MTF is the calculated Geometric MTF, and the aberration data is an approximation of the diffraction MTF. The MTF in the graph is 580 lp/mm. Referring to fig. 8, fig. 8 is a Field Curvature distortion diagram of an observed object, wherein the Field Curvature is also called as Field Curvature, and Field Curvature, as the name suggests, means that after a planar object passes through a lens system, image planes focused by all planar object points do not coincide with an ideal image plane, but appear as a curved image plane, and this phenomenon is called as Field Curvature.
The astigmatism means that light rays are thin off-axis light beams emitted by a point light source refracted by the spherical system, the third light ray on the left side in the Field Curvature represents a pair of meridional light rays, and the second light ray on the left side in the Field Curvature represents a pair of sagittal light rays. It can be seen that the convergence points of the meridional and sagittal rays are at a distance- δ x' along the optical axis, which is called astigmatism. The curvature of the sagittal field of the midday field in the figure, astigmatism are less than 2um, and aberration correction is good. Distortion is defined as the difference between the actual image height and the ideal image height, and in practical applications it is often expressed as a percentage of the ideal image height, called relative distortion. In fig. 8, the distortion is less than 0.5%, and the aberration correction is good.
Referring to fig. 9, a longitudinal chromatic aberration diagram of an observed object and a transverse chromatic aberration diagram of the observed object are shown in fig. 10.
The long-lens-barrel vacuum microimaging lens for observing an object to be observed in ultrahigh vacuum provided by the invention is used for observing an internal sample in ultrahigh vacuum in real time under the condition of ultrahigh vacuum, and has high resolution capability and a microimaging optical path system which is convenient to adjust, so that the long-lens-barrel vacuum microimaging lens has great application value. The 8-piece type optical structure forming the vacuum microscopic imaging lens is arranged into a front lens group 4 arranged in a vacuum cavity and a rear lens group 5 arranged in air, the distance between the front lens group 4 and the rear lens group 5 reaches 350-800 mm, the vacuum and light path light transmission are isolated in the middle through an optical window 3, the whole microscopic imaging with the magnification of more than 1000 times is achieved by combining the optical magnification of the front lens group 4 and the rear lens group 5 with the digital magnification of a CCD camera 6 to a display, and the vacuum microscopic imaging lens is suitable for vacuum detection and mechanical stripping vacuum observation.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A long-lens-barrel vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum is characterized by comprising:
the device comprises a collimated light source (1), a light source control unit and a control unit, wherein the collimated light source (1) is used for emitting collimated light rays or near-collimated light rays to illuminate an observed object;
the front lens group (4) is arranged in the vacuum cavity and is used for optically amplifying an observed object;
the rear lens group (5) is arranged outside the vacuum cavity, the distance between the front lens group (4) and the rear lens group (5) is 350-800 mm, the middle part of the front lens group is isolated from vacuum through the optical window (3), and the rear lens group (5) is used for receiving the reflected light transmitted by the front lens group (4), optically amplifying the reflected light and imaging the reflected light to the rake surface of the CCD camera (6);
the CCD camera (6) is connected with a display of the computer and is used for digitally amplifying the image of the rake face of the CCD camera (6).
2. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum according to claim 1, wherein the collimating light source (1) comprises a light source body (11) and a collimating lens (12), and the collimating lens (12) is used for collimating light emitted from the light source body (11) and then irradiating the light on the light splitting sheet (2) of the emergent light path.
3. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum according to claim 2, wherein the light source body (11) is an LED light source, and the collimating lens (12) is a single lens, a lens group or a zone plate.
4. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum as claimed in claim 1, wherein said front lens group (4) and said rear lens group (5) are used for imaging and amplifying the reflected light of the observed object by 40 times, the rake surface of said CCD camera (6) is imaged to the display of the computer for digital amplification, and the optical amplification and the digital amplification of said front lens group (4) and said rear lens group (5) are combined to form an amplified microscopic image.
5. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum according to claim 1 or 4, wherein the front lens group (4) and the rear lens group (5) are isolated by an optical window (3), the optical window (3) is transparent glass arranged between the front lens group (4) and the rear lens group (5), and the optical window (3) is used for isolating the front lens group (4) to form a vacuum cavity and transmitting light for an optical path.
6. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum as claimed in claim 1, wherein said vacuum microscopic imaging lens adopts 8-piece optical structure design lens, each lens is a spherical lens with refractive index.
7. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum as claimed in claim 6, wherein the front lens group (4) comprises 6 lens elements to form a lens group in ultrahigh vacuum, wherein the lens elements of the front lens group (4) are locked by a structural sleeve, a vacuum displacement table is used for clamping the structural sleeve, and an optical window (3) is used for connecting a flange seal to realize isolation protection and light transmission for a vacuum environment.
8. The long-tube vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum as claimed in claim 6, wherein said rear lens group (5) is a lens group in air composed of 2 lens pieces.
9. The long-tube vacuum microscopic imaging lens for observing an object to be observed in ultrahigh vacuum as claimed in claim 6, wherein the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens and the eighth lens are sequentially included along the optical axis from the object side to the CCD side, wherein the first lens is a positive power lens, the second lens is a positive power lens, the third lens is a positive power lens, the fourth lens is a negative power lens, the fifth lens is a positive power lens, the sixth lens is a negative power lens, the seventh lens is a negative power lens, and the eighth lens is a positive power lens.
10. The long-barrel vacuum microscopic imaging lens for observing an observed object in ultrahigh vacuum as claimed in claim 9, wherein said first lens to said sixth lens are assembled in the same barrel and placed in vacuum; the seventh lens and the eighth lens are assembled in the same lens barrel and are placed in the air; the two lens cones are arranged on the same optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN113031240A (en) * | 2021-03-10 | 2021-06-25 | 北京理工大学珠海学院 | Microscope objective |
| CN113219651A (en) * | 2021-05-14 | 2021-08-06 | 湖北大学 | Straight-barrel type combination design method of miniaturized optical microscope |
| CN114324436A (en) * | 2021-12-23 | 2022-04-12 | 江苏大学 | Micro-nano structure laser processing and real-time in-situ high-resolution observation device |
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| US20050007676A1 (en) * | 2003-07-07 | 2005-01-13 | Leica Microsystems Inc. | Optical arrangement for high power microobjective |
| US20070164194A1 (en) * | 2004-09-16 | 2007-07-19 | Olympus Corporation | Observation apparatus with focal position control mechanism |
| US20120075693A1 (en) * | 2009-11-13 | 2012-03-29 | Geon Hee Kim | Optical system for thermal image microscope |
| US20150374235A1 (en) * | 2014-06-26 | 2015-12-31 | Carl Zeiss Meditec Ag | Illumination device for an optical viewing apparatus |
| CN109828364A (en) * | 2019-01-30 | 2019-05-31 | 中国科学技术大学 | Confocal microscopic image system and method in a kind of vacuum chamber based on cage construction |
| CN113031240A (en) * | 2021-03-10 | 2021-06-25 | 北京理工大学珠海学院 | Microscope objective |
| CN113219651A (en) * | 2021-05-14 | 2021-08-06 | 湖北大学 | Straight-barrel type combination design method of miniaturized optical microscope |
| CN114324436A (en) * | 2021-12-23 | 2022-04-12 | 江苏大学 | Micro-nano structure laser processing and real-time in-situ high-resolution observation device |
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| CN115113383B (en) | 2023-11-28 |
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