CN210005782U - novel objective lens array applied to multi-field parallel imaging - Google Patents
novel objective lens array applied to multi-field parallel imaging Download PDFInfo
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- CN210005782U CN210005782U CN201921009031.8U CN201921009031U CN210005782U CN 210005782 U CN210005782 U CN 210005782U CN 201921009031 U CN201921009031 U CN 201921009031U CN 210005782 U CN210005782 U CN 210005782U
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Abstract
objective array with multiple parallel imaging fields, which is an array-type micro-optical imaging system realized by multiple small-sized micro-objective units according to arrangement mode, and can image different parts of tissue slices while micro-amplifying, so as to realize the simultaneous observation of multiple micro-fields and the high-speed scanning of digital pathological full-section, the utility model discloses a main component parts, small-sized micro-objective units are catadioptric objective optical systems, including th lens and second lens along its optical axis direction times, th lens and second lens are meniscus lenses, the front surface of th lens and the rear surface of second lens are both plated with optical medium light splitting films, which succinctly realizes the maximum path of light diffraction in the system, and reaches the diffraction limit, among them examples, large-field high-performance small-sized micro-objective units and novel objective arrays composed of them are realized.
Description
Technical Field
The utility model relates to an optical imaging field, specific kinds of novel objective array optical system who forms images in parallel in many fields of vision that constitute by a plurality of big field of vision high performance's small-size micro objective that says so.
Background
The microobjective is which is an indispensable important optical component in the optical microscope system, and is used at the front end of the microscope equipment, and is the th lens which receives the light of the observed object in the optical system of the microscope, in , the microobjective is composed of an entrance pupil lens, an aperture diaphragm, a middle lens or a combination of middle lenses and an exit pupil lens, and is used for magnifying the local area of the observed object to realize the observation of the micro world.
The performance of the single microscope objective mainly comprises a numerical aperture, a field range, a magnification factor and an effective focal length, wherein the numerical aperture describes the size of a light-receiving cone angle of the objective and directly determines the light-receiving capability and the optical resolution of the microscope objective, for example, the larger the numerical aperture, the stronger the light-receiving capability of the microscope objective and the higher the optical resolution, the field range is the range of an observed object which can be magnified and imaged by the microscope objective, the magnification factor is the ratio of the field range to the imaging area, generally, the larger the magnification factor is, the smaller the field range is, the more the number of intermediate lenses is required (generally, the larger is three lenses) to inhibit the aberration of high-magnification imaging, and the effective focal length is the distance from the principal point of the optical system to the focal point on the optical axis, the smaller is, the larger the magnification factor is, the smaller is.
The traditional microscope objective has a small visual field range and a large lens barrel, and cannot simultaneously observe cell tissues at different parts with close distances, for example, the diameter of the lens barrel is 24 mm and the visual field range is 0.5 mm in the traditional objective with the magnification of 40 times, so that the observation range in the diameter range of 24 mm is only the central range with the diameter of 0.5 mm, other areas are blocked by the large objective lens barrel, and microscopic observation cannot be carried out, and if other areas are observed, a microscope optical system or a tissue slice must be moved.
For example, when microscopic observation is performed on pathological Tissue chips (TMAs), different Tissue specimens are closely arranged on the same slide glass in a regular array manner, and simultaneous microscopic imaging is required on the Tissue specimens, so that microscopic observation efficiency is improved, diagnosis burden and errors are reduced, in the case of using the conventional objective, each Tissue can only be observed and diagnosed one by one, the efficiency is extremely low, misdiagnosis is easily caused, in addition, when a digital pathology scanner is used for carrying out digital full-section imaging on slice tissues, different parts of the Tissue slices need to be imaged and scanned simultaneously, so that high-speed scanning is realized, and the efficiency of digital pathological diagnosis is improved, in the case of using the conventional objective, only microscopic images of the slice tissues with one view field can be shot, and then the images are spliced, so that not only accumulated errors are easily caused in the aspect of full-section imaging, but also the efficiency is extremely low, the realization of high-efficiency digital pathological diagnosis is influenced, and the clinical value of high-efficiency digital pathological diagnosis cannot be fully embodied.
In summary, there is a need for novel objective lens arrays for multi-field parallel imaging, which improves the disadvantage that the existing optical microscope can only observe microscopic fields at the same time, and meets the need of simultaneous microscopic observation of multiple microscopic fields.
SUMMERY OF THE UTILITY MODEL
According to above-mentioned traditional micro objective's problem and improvement needs, the utility model provides a kinds of novel objective array who is applied to many fields of vision parallel imaging can be applied to the optical microscope field, especially hypervelocity digital pathology imaging and microscopic imaging field.
The utility model provides a novel objective array of being applied to many fields of vision parallel imaging, its imaging principle is like:
A novel objective lens array for multi-view parallel imaging, an array-type micro-optical imaging system comprising multiple identical large-view high-performance small-sized micro-objective lens units arranged in a quadrilateral matrix, wherein the objective lens array comprises an lens array and a second lens array in sequence along the optical axis direction, the micro-objective lens unit comprises lens located in the th lens array and a second lens located in the second lens array, the lens is opposite to the second lens, each small-sized micro-objective lens unit is a catadioptric objective lens, the small-sized micro-objective lens unit comprises, in sequence along the optical axis direction, a lens and a second lens from the object surface (object surface) to the imaging surface (image surface), the lens is a meniscus lens, the front surface facing the object surface is a concave surface, the rear surface facing the image surface is a convex surface, the second lens is a meniscus lens, the front surface facing the object surface is a concave surface, the rear surface facing the image surface is a convex surface, the rear surface of the aperture array is a , and the front surface of the aperture of the second lens array is different from the concave surface.
The small objective unit is characterized in that a semi-transparent and semi-reflective optical medium light splitting film is coated on the front surface of the th lens and the rear surface of the second lens along the optical axis direction of the small objective unit, the semi-transparent and semi-reflective optical medium light splitting film is kinds of optical coatings, incident light can penetrate and continue to propagate along the incident direction, the incident light can be reflected along the reverse incident direction and continue to propagate along the reverse incident direction, the light which penetrates and continues to propagate along the incident direction is transmitted light, the light which is emitted along the reverse incident direction and continues to propagate along the reverse incident direction is reflected light, the sum of the energy of the reflected light and the transmitted light is equal to the energy of the incident light according to the energy conservation law, and the sum of the illumination intensity of the reflected light and the transmitted light is equal to the illumination intensity.
In the small objective lens unit, all the lenses are made of glass with low melting point and high-low dispersion.
The materials are matched in high-low dispersion, namely the th lens is made of high-dispersion material glass, the second lens is made of low-dispersion material glass, or the th lens is made of low-dispersion material glass, the second lens is made of high-dispersion material glass, and the optical dispersion is compensated with each other through the material combination and matching of the high-low dispersion, so that the elimination of chromatic aberration and the improvement of imaging quality are realized.
The imaging principle of the miniature microscope objective unit is that light from an object to be observed is irradiated to the front surface of a lens along the optical axis direction, passes through a th semi-transparent semi-reflective optical medium light splitting film, parts of the light are reflected to the outside of the optical system without imaging, another parts of the light enters the optical system through the film to form incident light, the incident light entering the optical system passes through a th lens, exits from the rear surface of a th lens, passes through an air gap between the th lens and the second lens, enters the front surface of the second lens and irradiates the rear surface of the second lens, passes through a second semi-transparent semi-reflective optical medium light splitting film on the rear surface of the second lens, parts of the light exit through the film to the outside of the optical system to form divergent light with weak illumination intensity and irradiate the image plane, another parts of the light are reflected and irradiate the th lens according to the curvature of the rear surface of the second lens, the parts of the light pass through a second semi-transparent semi-reflective optical medium light splitting film on the front surface of a lens and the front surface of the second lens, the semi-transparent semi-reflective optical medium light focusing position of the second lens is formed by the focal point of the semi-transparent semi-reflective optical medium light converging film, the semi-transparent semi-reflective optical medium converging film, the focal point.
According to the imaging principle, light components on an image surface are divergent complete transmitted light without forming a focus and convergent multiple reflected light with the imaging focus, the multiple reflected light is irradiated by far more than times of complete transmitted light, the complete transmitted light is noise in imaging, and the multiple reflected light is imaging, so that the signal-to-noise ratio of imaging contrast noise is high, and even if the complete transmitted light exists, clear imaging cannot be greatly influenced.
, the lens and the second lens are circular lenses, and the lens and the second lens have a space therebetween, and the space can be filled with air or liquid, or other lenses and other lens combinations meeting higher imaging requirements can be disposed in the space.
, the front and back surfaces of the lens are aspheric or self-defined curved surfaces, and the front and back surfaces of the second lens are aspheric or self-defined curved surfaces, so as to make the design of the optical system more easily meet the requirement of miniaturization, and to optimize the design of the optical system more easily, and to meet the requirement of system performance.
In step , the rectangular matrix arrangement is a rectangular objective array formed by splicing and arranging a plurality of large-field high-performance small-sized microscope objective units side by side.
The utility model discloses a parallel formation of image's of many fields of vision novel objective array and component part thereof: compared with the prior art, the small-sized microscope objective unit with large visual field and high performance has the following performance advantages:
(1) the utility model adopts a catadioptric structure in the large-visual-field high-performance small-sized microscope objective unit, which not only can realize high-performance optical microscope objective with few lens quantity, but also increases the path length of light transmitted in an optical system, reaches the diffraction limit of the light, and exerts the optical performance of two lenses to the utmost;
(2) the utility model discloses a small-size micro objective of big field of vision high performance, because reduced the quantity of lens when guaranteeing high performance, bring the very big reduction of volume, the very big saving of manufacturing cost to and the very big reduction of the production degree of difficulty;
(3) the utility model discloses a small-size microscope objective of big field of vision high performance can realize the convergence of formation of image light, forms high energy formation of image focus, greatly promotes the SNR of formation of image, realizes the high quality clear imaging in big microscope field of vision;
(4) the utility model discloses a novel objective array of parallel formation of image in many fields, be the array optical system who comprises two lens arrays, lens array towards the object plane is the lens array of the lens of a plurality of above-mentioned big field of vision high performance towards the object plane through processing integration at lenses, second lens array towards image plane is the lens array of a plurality of above-mentioned big field of vision high performance small-size micro objective unit towards the second lens of image plane through processing integration at lenses, above-mentioned lens array constitutes novel objective array with second lens array, can carry out simultaneous micro-imaging to a plurality of tissue areas that the position is close, effectively realize efficient pathological tissue chip observation and diagnosis, high-speed digital pathological scanning.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
Fig. 1 is a structure and light path diagram of an optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 2 is a structural diagram of the th lens of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 3 is a structural diagram of the second lens of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 4 is a modulation transfer function MTF diagram of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 5 is a light characteristic fan diagram of a longitudinal section of an optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 6 is a light characteristic fan diagram of a cross section of an optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 7 is an optical path fan diagram of a longitudinal section of an optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 8 is a cross-sectional optical path fan diagram of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 9 is a dot-column diagram of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 10 is a field curvature diagram of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 11 is a distortion diagram of the optical system of large-field high-performance small-sized microscope objective units in the novel objective array for multi-field parallel imaging according to the present invention;
fig. 12 is a cross-sectional view of the novel objective lens array for multi-view parallel imaging according to the present invention.
Fig. 13 is an imaging schematic diagram of the novel objective array for multi-view parallel imaging according to the present invention.
The reference numbers are 1-object plane, 2-cover glass, 301- th semitransparent and semi-reflective optical medium light splitting film, 302- th lens, 303- th lens back surface, 401-second lens front surface, 402-second lens, 403-second semitransparent and semi-reflective optical medium light splitting film and 5-image plane.
Detailed Description
The technical solution in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. under a certain posture (as shown in the attached drawings), and if the specific posture is changed, the directional indications are changed accordingly.
The following will make the detailed description of the steps on the novel objective array optical system applied to multi-view parallel imaging according to the present invention, but should not limit the scope of the present invention.
An object of the utility model is to provide novel objective array optical system who is applied to many fields of vision parallel imaging, for the optical microscope field provides many fields of vision parallel imaging and microscopic observation's realization scheme and imaging optical system, especially, for digital pathology field provides realization scheme and the imaging optical system of hypervelocity and equipment miniaturization, for organize chip field provide many fields of vision observe simultaneously with diagnostic realization scheme and imaging optical system.
The specific performance parameters of embodiments of objective lens units in the novel objective lens array optical system applied to multi-view parallel imaging are that the diameter of a view field range is 1 mm, the numerical aperture is 0.6, the effective focal length is 0.78 mm, the diameter of an entrance pupil is 1.17 mm, the view field range is 1.17 mm, the total length of the system is 4.23 mm, the magnification is 5.14 times, the imaging resolution is 0.24 microns/pixel, the working wavelength is a visible light wavelength region of 0.4 microns to 0.7 microns, the design wavelengths are 0.643 microns, 0.591 microns, 0.542 microns, 0.5 microns and 0.466 microns, and the design center wavelength is 0.542 microns.
The embodiments of objective lens units in the large-field high-performance subminiature microscope objective optical system specifically satisfy the following relations among main performance parameters:
numerical aperture versus working medium refractive index and half angle of maximum cone angle of incident light:
NA ═ n × sin θ - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -formula 1
Where NA represents the numerical aperture, n represents the refractive index of the working medium, and θ represents the half angle of the maximum cone angle of incident light.
Relationship between half angle of maximum cone angle of incident light and entrance pupil diameter and effective focal length:
tan θ ═ EPD/(2 × EFL) - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -
Where θ represents the half angle of the maximum cone angle of incident light, EPD represents the entrance pupil diameter, and EFL represents the effective focal length.
The relationship between imaging resolution and magnification and field of view:
δ＝ρ2- - (Mag. U) - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - -
Where δ represents an imaging resolution, ρ represents a pixel size of the image sensor, Mag represents a magnification, and U represents a unit length; in this example ρ is specifically 1.12 microns, U is specifically 1 micron, and Mag is specifically 5.14, so the imaging resolution is specifically 0.24 microns per pixel.
As shown in FIG. 12 and FIG. 13, novel objective lens arrays for multi-view parallel imaging are array type micro-optical imaging systems, which are implemented by a plurality of identical large-view high-performance small-sized micro-objective lens units arranged in a quadrilateral matrix.
As shown in fig. 12, the objective lens array of the present invention includes, in order along the optical axis direction thereof, an th lens array and a second lens array, the micro objective lens unit includes a th lens 302 located in the th lens array and a second lens 402 located in the second lens array, the th lens 302 is opposite to the second lens 402, each small-sized micro objective lens unit is a catadioptric objective lens, the embodiments of objective lens units in the large-field high-performance micro objective optical system specifically use two pieces of optical lenses, the materials are glasses with high melting point and high and low dispersion, specifically, the th lens 302 uses glass with high dispersion and low dispersion in the second lens 402, or the th lens 302 uses glass with low dispersion and high dispersion in the second lens 402, for example, the materials with NLAF35 (Vd — 2.6444) and NSK 8 (Vd — 0.7) or with — 0.9575 (nbaf) and 4682 (mbvd — 3527) (mbhd — 4682) (no).
embodiments of objective lens units in the large-field high-performance subminiature microscope objective optical system are specifically an object plane 1, a th lens 302, a second lens 402 and an image plane 5 which are respectively arranged from left to right along an optical axis direction, wherein the object plane 1 is positioned at the leftmost and limitedly, the image plane 5 is positioned at the rightmost and limitedly, the front surface of the th lens 302 and the rear surface of the second lens 402 are respectively coated with a semi-transparent and semi-reflective optical medium light splitting film, and the semi-transparent and semi-reflective optical medium light splitting film is specifically semi-transparent and semi-reflective optical medium light splitting coatings, and by utilizing the optical performance of the semi-transparent and semi-reflective optical medium light splitting coatings, light incident to the coating surfaces is transmitted by parts, and the parts are reflected.
In embodiments of 0 of objective lens units in a large-field high-performance subminiature microscope objective optical system, as shown in fig. 1 to 3, the light propagation path in the system is specifically that light from an observed object is irradiated to the front surface of a th semi-transparent and semi-reflective optical medium spectroscopic film 301 coated with a 1 th semi-transparent and semi-reflective optical medium in the optical axis direction, the front surface of a th lens 302 faces the object plane 1 and is a concave surface, the image plane 5 faces a convex surface, the curvature of the th semi-transparent and semi-reflective optical medium spectroscopic film 301 is the same as that of the front surface of a th lens 302, light reflected by the front surface coating of a th lens 302 is not imaged, the other part of the transmitted light passes through the th lens 302 and the rear surface 303 thereof, is irradiated to the front surface 401 of a second lens 402, the rear surface 303 of a th lens 302 faces the object plane 1 and is a concave surface, the image plane 5 faces the object plane 5, the front surface of the second lens 402 faces the concave surface of the second lens 402, the optical surface of the semi-transparent and the rear surface of the second lens 402 faces the optical medium reflective optical medium and the rear surface of the semi-reflective optical medium reflective film 402, the front surface is a concave surface 401, the front surface of the second lens 402, the second lens 402 faces the rear surface of the second lens 402, the optical film.
Then, the light entering the optical system again is focused by the second lens 402, enters the th lens 302 again, is reflected by the th transflective optical medium light splitting film 301 on the front surface of the th lens 302, and finally is focused and irradiated on the image surface 5, so that the th scattered light propagating and transmitting light and the focused refracted light are arranged on the image surface 5, but the illumination intensity of the focused light is far greater than that of the scattered light, so that a high-definition high-quality microscopic image with high signal-to-noise ratio can be formed on the image surface 5.
The front surface and the back surface of each lens in the th lens array can be aspheric, and the front surface and the back surface of each lens in the second lens array can also be aspheric.
The design data of objective units in the large-visual-field high-performance subminiature microscope objective optical system is shown in table 1. table 1 shows the specific design parameter values of lens surfaces of objective units in the large-visual-field high-performance subminiature microscope objective optical system and the semi-transparent semi-reflective optical medium light splitting film in the embodiment.
Table 1 design parameters of objective lens units in subminiature microscope objective optical systems with large visual field and high performance.
Fig. 4 shows modulation transfer function MTF of objective units in the large-field high-performance subminiature microscope objective optical system of the present embodiment, which is close to diffraction limit, fig. 5 shows light characteristics of a longitudinal section of the present embodiment, fig. 6 shows light characteristics of a cross section of the optical system of the present embodiment, fig. 7 shows a light path characteristic diagram of a longitudinal section of the present embodiment, fig. 8 shows a light path characteristic diagram of a cross section of the present embodiment, fig. 9 shows a dot-column diagram of the present embodiment, fig. 10 shows a field curvature diagram of a field of the present embodiment, fig. 11 shows a distortion diagram of the present embodiment, and these performance diagrams all show that the novel objective array composed of multiple objective units and applied to multi-field parallel imaging of the present invention has good optical performance, and imaging quality is close to perfect imaging, and completely meets requirements of multi-field parallel optical microscope observation and digital pathology high-speed imaging.
It should be noted that, in the case of no conflict, those skilled in the art may combine the technical features related to the above examples with each other according to practical situations to achieve corresponding technical effects, and details of various combining cases are not described in herein.
It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (4)
- The novel objective lens arrays applied to multi-view parallel imaging are characterized in that the array type microscopic optical imaging system is realized by a plurality of large-view high-performance small microscopic objective lens units according to a quadrilateral matrix arrangement mode;the objective lens array sequentially comprises an th lens array and a second lens array along the optical axis direction;the microobjective unit comprises a lens positioned in an th lens array and a second lens positioned in a second lens array, wherein the th lens is opposite to the second lens, the surface of the th lens facing an object plane is a front surface, the surface facing an image plane is a rear surface, the surface of the second lens facing the object plane is a front surface, and the surface facing the image plane is a rear surface, the th lens and the second lens form a catadioptric optical system, the front surface of the th lens is plated with a half-transmitting and half-reflecting optical medium light splitting film, and the rear surface of the second lens is plated with a second half-transmitting and half-reflecting optical medium light splitting film.
- 2. The objective lens array for multi-view parallel imaging as claimed in claim 1, wherein each lenses of the th lens array and the second lens array are circular lenses, the th lens and the second lens array have a space therebetween, the space is filled with air or liquid, or a lens combination is disposed in the space.
- 3. The objective lens array for multi-view parallel imaging as claimed in claim 1 or 2, wherein the front and back surfaces of each lenses in the th lens array are aspheric, and the front and back surfaces of each lenses in the second lens array are aspheric.
- 4. The objective lens array for multi-view parallel imaging according to claim 1 or 2, wherein the rectangular array is formed by splicing and arranging a plurality of large-view high-performance small-sized microscope objective lens units side by side.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110244442A (en) * | 2019-07-01 | 2019-09-17 | 达科为（深圳）医疗设备有限公司 | A kind of novel objective lens array applied to more visual field parallel imagings |
| WO2022220678A1 (en) | 2021-04-12 | 2022-10-20 | Nearfield Instruments B.V. | Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device |
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2019
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110244442A (en) * | 2019-07-01 | 2019-09-17 | 达科为（深圳）医疗设备有限公司 | A kind of novel objective lens array applied to more visual field parallel imagings |
| WO2021000566A1 (en) * | 2019-07-01 | 2021-01-07 | 达科为（深圳）医疗设备有限公司 | Novel objective lens array applied to multi-field parallel imaging |
| CN110244442B (en) * | 2019-07-01 | 2024-07-02 | 达科为（深圳）医疗设备有限公司 | Novel objective lens array applied to multi-view parallel imaging |
| WO2022220678A1 (en) | 2021-04-12 | 2022-10-20 | Nearfield Instruments B.V. | Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device |
| NL2027950B1 (en) | 2021-04-12 | 2022-10-21 | Nearfield Instr B V | Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device |
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