CN115105940A - CVD coating exhaust pipe condenser cleaning equipment and exhaust gas treatment method - Google Patents

CVD coating exhaust pipe condenser cleaning equipment and exhaust gas treatment method Download PDF

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Publication number
CN115105940A
CN115105940A CN202210692232.2A CN202210692232A CN115105940A CN 115105940 A CN115105940 A CN 115105940A CN 202210692232 A CN202210692232 A CN 202210692232A CN 115105940 A CN115105940 A CN 115105940A
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Prior art keywords
box body
cleaning box
tail gas
alkaline solution
transmission
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CN202210692232.2A
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CN115105940B (en
Inventor
王以任
徐同康
袁鹏
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Hunan Fuou Technology Co ltd
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Hunan Fuou Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77Liquid phase processes
    • B01D53/78Liquid phase processes with gas-liquid contact
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08Cleaning containers, e.g. tanks
    • B08B9/093Cleaning containers, e.g. tanks by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/20Halogens or halogen compounds
    • B01D2257/204Inorganic halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2258/00Sources of waste gases
    • B01D2258/02Other waste gases
    • B01D2258/0216Other waste gases from CVD treatment or semi-conductor manufacturing

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention discloses a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method; comprises a cleaning box body; the screw rod is connected inside the cleaning box body and is coincided with the axis of the cleaning box body; the lower part of the rotating bracket is in threaded connection with the screw rod, and the upper part of the rotating bracket is connected with a transmission assembly in transmission connection with the screw rod; the rotating bracket is connected to the rotating bracket in a sliding manner, and both sides of the sliding bracket are provided with spray head assemblies; the device can absorb the alkaline solution in the cleaning box body through the spray head assembly, the alkaline solution is sprayed out through the spray head assembly and then acts on the interior of the cleaning box body, the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body, the residue generated by the reaction of the tail gas attached to the inner wall and the solution can be cleaned.

Description

CVD coating exhaust pipe condenser cleaning equipment and exhaust gas treatment method
Technical Field
The invention belongs to the technical field of tail gas treatment, and particularly relates to a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method.
Background
CVD is short for Chemical Vapor Deposition and refers to a gas phase reaction at high temperature. In the deep processing process of the hard alloy cutter, the high-end hard alloy cutter needs to be subjected to a coating process, and the coating process is usually carried out in a CVD coating furnace. The tail gas of the CVD coating furnace mainly becomes AlCl3 and TiCl4, and in the cleaning process, the tail gas is directly introduced into an alkaline solution for cleaning, but the tail gas is directly introduced into the solution, so that AlCl3 and TiCl4 in the tail gas can not completely react with the alkaline solution; meanwhile, the precipitate generated after the reaction of the tail gas and the solution is attached to the inner wall of the equipment, so that the inside of the equipment is not well cleaned while the reaction of the tail gas and the solution is influenced.
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention aims to provide a CVD coating exhaust pipe condenser cleaning apparatus and an exhaust gas treatment method.
The technical scheme adopted by the invention is as follows:
a CVD coating tail gas pipe condenser cleaning device comprises a cleaning box body;
the screw rod is connected inside the cleaning box body and is coincided with the axis of the cleaning box body;
the lower part of the rotating bracket is in threaded connection with the screw rod, and the upper part of the rotating bracket is connected with a transmission assembly in transmission connection with the screw rod;
the rotating bracket is connected to the rotating bracket in a sliding manner, and both sides of the sliding bracket are provided with spray head assemblies; the sprayer assembly is further provided with a water pump, the sprayer assembly is connected with the water pump through a guide pipe, and the water pump is embedded in the alkaline solution.
Preferably, both ends of the screw rod are rotatably connected to the cleaning box body, and the top end of the screw rod is connected with a fixing assembly.
Preferably, the fixed component is sleeved on the lead screw and comprises a first electromagnet, a friction pad is fixedly arranged on the moving end of the first electromagnet, and a second elastic piece is arranged between the moving end and the fixed end of the first electromagnet.
Preferably, the transmission assembly comprises a transmission sleeve rotatably connected to the rotating support, a boss is arranged on the transmission sleeve, and the boss is embedded into the groove of the screw rod in a sliding manner.
Preferably, a sliding sleeve is sleeved on the transmission sleeve, the sliding sleeve is in transmission connection with the transmission sleeve, a transmission wheel is fixedly connected to the section of the sliding sleeve, and a second electromagnet is arranged between the sliding sleeve and the transmission sleeve.
Preferably, a transmission strip is fixedly installed on the sliding support and is in transmission connection with the transmission wheel.
Preferably, the sliding support is further provided with an installation lug and a sliding rail, a first elastic piece is arranged between the installation lug and the rotating support, and the sliding rail is connected to the rotating support in a sliding mode.
Preferably, an air inlet and a liquid outlet are arranged on the side edge of the lower part of the cleaning box body, an air outlet and a liquid filling port are arranged at the top of the cleaning box body, and a sealed detachable upper cover is arranged on the liquid filling port.
Preferably, the cleaning box body is internally provided with a raised table which is arranged in an odd number.
A tail gas treatment method for CVD coating tail gas pipe condenser cleaning equipment is characterized in that: the tail gas treatment method comprises the following steps:
(1) the spray head component can be used for absorbing the alkaline solution in the cleaning box body, and the alkaline solution is sprayed out by the spray head component and then acts on the interior of the cleaning box body, so that the alkaline solution is diffused and atomized;
(2) installing an air suction pump at an air inlet of condenser cleaning equipment, and starting the air suction pump to enable tail gas to enter from the air inlet and then react with alkaline solution in the condenser cleaning equipment;
(3) the tail gas enters the cleaning equipment and then is divided into two powder stages:
in the first stage, tail gas is directly introduced into the bottom of the cleaning box body to react with alkaline solution:
in the second stage, the filtered tail gas reacts with the atomized alkaline solution on the upper part of the cleaning box body;
after the tail gas reacts with the atomized alkaline solution, impurities attached to the inner wall of the cleaning box body can be cleaned by the alkaline solution sprayed by the spray head assembly.
The beneficial effects of the invention are as follows:
1. the device can absorb alkaline solution in the cleaning box body through the spray head assembly, the alkaline solution is sprayed out through the spray head assembly and then acts on the interior of the cleaning box body, the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body, the residue generated by the reaction of the tail gas attached to the inner wall and the solution can be cleaned.
2. According to the method, through the first stage, the tail gas is directly reacted with the alkaline solution, and then the tail gas is reacted with the atomized alkaline solution through the second stage, so that the tail gas and the alkaline solution can be reacted more fully, and the tail gas cleaning capacity of the device is improved.
Drawings
The invention is described in further detail below with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic structural view of the present invention as a whole;
FIG. 2 is a schematic view of the cleaning tank of the present invention;
FIG. 3 is a first schematic structural view of a portion of the present invention;
FIG. 4 is a schematic structural view of the fixing assembly of the present invention;
FIG. 5 is a second schematic structural view of a portion of the present invention;
fig. 6 is a schematic view of the construction of the transmission assembly of the present invention.
In the figure: 1-cleaning box body, 101-air inlet hole, 102-liquid outlet hole, 103-air outlet hole, 104-liquid filling hole, 105-upper cover, 106-boss, 2-screw rod, 3-rotating bracket, 4-sliding bracket, 401-mounting lug, 402-sliding rail, 403-driving strip, 5-driving component, 501-driving sleeve, 502-sliding sleeve, 503-driving wheel, 504-second electromagnet, 6-spray head component, 7-fixing component, 701-first electromagnet, 702-friction pad and 703-second elastic component.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
The following describes an embodiment of the invention with reference to fig. 1-6, a CVD coating exhaust pipe condenser cleaning device and an exhaust gas treatment method, including a cleaning box body 1;
the screw rod 2 is connected inside the cleaning box body 1 and is overlapped with the axis of the cleaning box body 1;
the lower part of the rotating bracket 3 is in threaded connection with the screw rod 2, and the upper part of the rotating bracket 3 is connected with a transmission assembly 5 in transmission connection with the screw rod 2;
the rotating bracket 3 is connected to the rotating bracket 3 in a sliding mode, and the two sides of the sliding bracket 4 are provided with the spray head assemblies 6; the sprayer assembly 6 is further provided with a water pump, the sprayer assembly 6 is connected with the water pump through a guide pipe, and the water pump is embedded in the alkaline solution.
The spray head assembly 6 can absorb the alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the spray head assembly 6 and acts on the interior of the cleaning box body 1, the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body 1, the residue generated by the reaction of the tail gas attached to the inner wall and the solution can be cleaned.
Preferably, in an embodiment of the present invention, referring to fig. 1 to 6 again, both ends of the screw rod 2 are rotatably connected to the cleaning box 1, and the top end of the screw rod 2 is connected to a fixing assembly 7; the fixed component 7 is sleeved on the screw rod 2, the fixed component 7 comprises a first electromagnet 701, a friction pad 702 is fixedly arranged on a moving end of the first electromagnet 701, and a second elastic piece 703 is arranged between the moving end and a fixed end of the first electromagnet 701.
After the first electromagnet 701 is arranged to rotate the bracket 3 to descend to the lowest position, the movable end of the first electromagnet 701 is driven to approach to one side of the fixed end through a position sensor arranged in the cleaning box body 1, so that the friction pad 702 is separated from the contact with the top end of the cleaning box body 1, the screw rod 2 is in a rotating state at the moment, and after the opposite rotating bracket 3 ascends to the highest position, the friction pad 702 on the first electromagnet 701 is in contact with the top end of the cleaning box body 1, so that the position of the screw rod is fixed.
Preferably, in a specific embodiment of the present invention, referring again to fig. 1 to 6, the transmission assembly 5 includes a transmission sleeve 501 rotatably connected to the rotating bracket 3, the transmission sleeve 501 is provided with a boss, and the boss is inserted into a groove slidably connected to the screw rod 2; a sliding sleeve 502 is sleeved on the transmission sleeve 501, the sliding sleeve 502 is in transmission connection with the transmission sleeve 501, a transmission wheel 503 is fixedly connected to the section of the sliding sleeve 502, and a second electromagnet 504 is arranged between the sliding sleeve 502 and the transmission sleeve 501; a transmission strip 403 is fixedly installed on the sliding support 4, and the transmission strip 403 is in transmission connection with the transmission wheel 503; the driving wheel 503 is a ratchet wheel.
The high-pressure spray head assembly 6 can absorb alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure spray head assembly 6 and acts on the interior of the cleaning box body 1, the sliding support 4 moves under the condition that reverse thrust generated by the spray head assembly 6 is different (the distance between the sprayed point of the liquid and an acting surface is different), and meanwhile, the rotating support 3 can be pushed to rotate due to the fact that the spray head assembly 6 is provided with a certain inclination angle;
after the rotating bracket 3 moves to the lowest end, the second electromagnet 504 is driven, so that the transmission strip 403 on the sliding bracket 4 is transmitted with the transmission wheel 503, the screw rod 2 is driven to rotate through the transmission sleeve 501, and further a rotation difference is formed between the screw rod 2 and the rotating bracket 3, and the rotating bracket 3 is pushed to move upwards by utilizing the rotation difference between the screw rod 2 and the rotating bracket 3 and the threaded connection between the rotating bracket 3 and the screw rod 2.
Preferably, in an embodiment of the present invention, referring to fig. 1 to 6 again, the sliding bracket 4 is further provided with a mounting ear 401 and a sliding rail 402, a first elastic member is disposed between the mounting ear 401 and the rotating bracket 3, and the sliding rail 402 is slidably connected to the rotating bracket 3.
The first elastic member is arranged to provide a certain elastic force to the sliding support 4, so that the sliding support is convenient to restore to its original position.
Preferably, in an embodiment of the present invention, referring again to fig. 1-6, the cleaning box 1 is provided with an air inlet 101 and a liquid outlet 102 on the lower side, the cleaning box 1 is provided with an air outlet 103 and a liquid filling opening 104 on the top, and the liquid filling opening 104 is provided with a sealing detachable upper cover 105.
The tail gas generated by the coating furnace enters from the air outlet 103, and after the tail gas reacts with the alkaline liquid flowing through the bottom of the cleaning box body 1, the tail gas fully reacts with the alkaline liquid distributed on the top of the cleaning box body 1 after atomization, and the tail gas is discharged through the air outlet 103, and the liquid adding opening 104 are arranged to be used for adding new alkaline solution and discharging waste liquid.
Preferably, in a specific embodiment of the present invention, referring again to fig. 1-6, the interior of the cleaning tank 1 is provided with raised tables 106, the raised tables 106 being arranged in an odd number.
The arrangement of the odd number of the convex tables 106 can ensure that the convex tables 106 are not arranged at the positions opposite to the connecting line of the convex tables 106 and the center of the cleaning box body 1; the reverse thrusts generated by the head units 6 on both sides of the sliding holder 4 are different (the distance between the point of liquid ejection and the action surface is different), and the sliding holder 4 is pushed to reciprocate.
A tail gas treatment method of CVD coating tail gas pipe condenser cleaning equipment is characterized in that: the tail gas treatment method comprises the following steps:
(1) the spray head assembly 6 can be used for sucking the alkaline solution in the cleaning box body 1, and the alkaline solution is sprayed out by the spray head assembly 6 and then acts on the interior of the cleaning box body 1 to diffuse and atomize the alkaline solution;
(2) installing an air suction pump at an air inlet 101 of condenser cleaning equipment, and starting the air suction pump to enable tail gas to enter from the air inlet 101 and then react with an alkaline solution in the condenser cleaning equipment;
(3) the tail gas enters the cleaning equipment and then is divided into two powder stages:
in the first stage, tail gas is directly introduced into the bottom of the cleaning box body 1 to react with alkaline solution:
in the second stage, the filtered tail gas reacts with the atomized alkaline solution on the upper part of the cleaning box body;
after the tail gas reacts with the atomized alkaline solution, impurities attached to the inner wall of the cleaning box body 1 can be cleaned by the alkaline solution sprayed by the spray head assembly 6.
The tail gas mainly comprises AlCl3 and TiCl4, and the tail gas is directly introduced into an alkaline solution in the cleaning process, the AlCl3 and TiCl4 in the tail gas can not completely react with the alkaline solution, and the alkaline solution is atomized to be more uniformly distributed in the gas, after the reaction with AlCl3 and TiCl4, TiCl4 reacts with alkaline solution to generate Ti (OH), AlCl3 reacts with alkaline solution to generate NaAlO2, the NaAlO2 reacts with a small amount of CO2 to generate Al (OH)3, the Ti (OH) and the Al (OH)3 are not dissolved in the alkaline solution and are easily attached to the inner wall of the cleaning box body 1, the high-pressure spray head assembly 6 can suck the alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure spray head assembly 6 to act on the interior of the cleaning box body 1, can directly erode the inner wall of the cleaning box body 1, and then can erode the cleaning box body 1 when improving the reaction efficiency of the device.
The invention relates to a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method, wherein the working principle of the device is as follows:
in the using process, the high-pressure spray head assembly 6 can absorb alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure spray head assembly 6 and acts on the interior of the cleaning box body 1, the sliding support 4 moves under the condition that reverse thrust generated by the spray head assembly 6 is different (the distance between the sprayed point of liquid and an acting surface is different), and meanwhile, the rotating support 3 can be pushed to rotate due to the fact that the spray head assembly 6 is provided with a certain inclination angle;
when the rotating bracket 3 moves downwards, the friction pad 702 on the first electromagnet 701 is in contact with the top end of the cleaning box body 1, so that the position of the screw rod is fixed, and meanwhile, the second electromagnet 504 enables the transmission strip 403 and the transmission wheel 503 to be separated from transmission and rotate under the thrust action of the spray head assembly 6;
after the rotating bracket 3 moves downwards to the first break, the first electromagnet 701 is arranged to enable the rotating bracket 3 to descend to the lowest position, the moving end of the first electromagnet 701 is driven to approach to one side of the fixed end through a position sensor arranged in the cleaning box body 1, so that the friction pad 702 is separated from contact with the top end of the cleaning box body 1, and the screw rod 2 is in a rotating state at the moment; the second electromagnet 504 is driven to drive the transmission strip 403 on the sliding support 4 to transmit with the transmission wheel 503, the screw rod 2 is driven to rotate through the transmission sleeve 501, and further a rotation difference is formed between the screw rod 2 and the rotating support 3, and the rotating support 3 is pushed to move upwards by utilizing the rotation difference between the screw rod 2 and the rotating support 3 and the threaded connection between the rotating support 3 and the screw rod 2;
after the rotating bracket 2 moves to the uppermost end, the first electromagnet 701 and the second electromagnet 504 return to their original states, and the rotating bracket 3 moves downward.
The invention is not limited to the above alternative embodiments, and any other various forms of products can be obtained by anyone in the light of the present invention, but any changes in shape or structure thereof, which fall within the scope of the present invention as defined in the claims, fall within the scope of the present invention.

Claims (10)

1. The utility model provides a CVD coating tail gas pipe condenser cleaning equipment which characterized in that: comprises a cleaning box body (1);
the screw rod (2) is connected inside the cleaning box body (1) and is overlapped with the axis of the cleaning box body (1);
the lower part of the rotating support (3) is in threaded connection with the screw rod (2), and the upper part of the rotating support (3) is connected with a transmission assembly (5) in transmission connection with the screw rod (2);
the spray nozzle is characterized by comprising a sliding support (4), wherein the rotating support (3) is connected to the rotating support (3) in a sliding mode, and spray nozzle assemblies (6) are arranged on two sides of the sliding support (4).
2. The CVD coated exhaust condenser cleaning apparatus of claim 1, wherein: the two ends of the screw rod (2) are rotatably connected to the cleaning box body (1), and the top end of the screw rod (2) is connected with a fixing assembly (7).
3. The CVD coated exhaust condenser cleaning apparatus of claim 2, wherein: the fixed component (7) is sleeved on the screw rod (2), the fixed component (7) comprises a first electromagnet (701), a friction pad (702) is fixedly arranged on a moving end of the first electromagnet (701), and a second elastic piece (703) is arranged between the moving end and a fixed end of the first electromagnet (701).
4. The CVD coated exhaust condenser cleaning apparatus of claim 1, wherein: the transmission assembly (5) comprises a transmission sleeve (501) which is rotatably connected to the rotating support (3), a boss is arranged on the transmission sleeve (501), and the boss is embedded into the groove of the screw rod (2) in a sliding connection mode.
5. The CVD coated exhaust condenser cleaning apparatus according to claim 4, wherein: the transmission sleeve (501) is sleeved with a sliding sleeve (502), the sliding sleeve (502) is in transmission connection with the transmission sleeve (501), a transmission wheel (503) is fixedly connected to the section of the sliding sleeve (502), and a second electromagnet (504) is arranged between the sliding sleeve (502) and the transmission sleeve (501).
6. The CVD coated exhaust condenser cleaning apparatus according to claim 5, wherein: and a transmission strip (403) is fixedly installed on the sliding support (4), and the transmission strip (403) is in transmission connection with the transmission wheel (503).
7. The CVD coated exhaust condenser cleaning apparatus of claim 1, wherein: the sliding support (4) is further provided with an installation ear (401) and a sliding rail (402), a first elastic piece is arranged between the installation ear (401) and the rotating support (3), and the sliding rail (402) is connected to the rotating support (3) in a sliding mode.
8. The CVD coated exhaust condenser cleaning apparatus of claim 1, wherein: an air inlet (101) and a liquid outlet (102) are arranged on the side edge of the lower portion of the cleaning box body (1), an air outlet (103) and a liquid filling opening (104) are arranged at the top of the cleaning box body (1), and a sealing detachable upper cover (105) is arranged on the liquid filling opening (104).
9. The CVD coated exhaust condenser cleaning apparatus of claim 1, wherein: a protruding table (106) is arranged inside the cleaning box body of the cleaning box body, and the protruding table (106) is arranged in an odd number.
10. A method of treating off-gas using the CVD coated off-gas line condenser cleaning apparatus of any of claims 1 to 8, characterized by: the tail gas treatment method comprises the following steps:
(1) the spray head assembly (6) can be used for sucking the alkaline solution in the cleaning box body (1), and the alkaline solution is sprayed out by the spray head assembly (6) and then acts on the interior of the cleaning box body (1) to be diffused and atomized;
(2) installing an air suction pump at an air inlet (101) of condenser cleaning equipment, and starting the air suction pump to enable tail gas to enter from the air inlet (101) and then react with alkaline solution in the condenser cleaning equipment;
(3) the tail gas enters the cleaning equipment and then is divided into two powder stages:
in the first stage, tail gas is directly introduced into the bottom of the cleaning box body (1) to react with alkaline solution:
in the second stage, the filtered tail gas reacts with the alkaline solution atomized at the upper part of the cleaning box body (1);
(4) after the tail gas reacts with the atomized alkaline solution, impurities attached to the inner wall of the cleaning box body (1) can be cleaned by the alkaline solution sprayed by the spray head assembly (6).
CN202210692232.2A 2022-06-17 2022-06-17 CVD coating tail gas pipe condenser cleaning equipment and tail gas treatment method Active CN115105940B (en)

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