CN115105940B - CVD coating tail gas pipe condenser cleaning equipment and tail gas treatment method - Google Patents
CVD coating tail gas pipe condenser cleaning equipment and tail gas treatment method Download PDFInfo
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- CN115105940B CN115105940B CN202210692232.2A CN202210692232A CN115105940B CN 115105940 B CN115105940 B CN 115105940B CN 202210692232 A CN202210692232 A CN 202210692232A CN 115105940 B CN115105940 B CN 115105940B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method; comprises a cleaning box body; the screw rod is connected to the inside of the cleaning box body and coincides with the axis of the cleaning box body; the lower part of the rotating bracket is in threaded connection with the screw rod, and the upper part of the rotating bracket is connected with a transmission assembly in transmission connection with the screw rod; the sliding support is connected to the rotating support in a sliding manner, and spray head assemblies are arranged on two sides of the sliding support; the device can absorb alkaline solution in the cleaning box body through the spray head assembly, and the alkaline solution acts in the cleaning box body after being sprayed out through the spray head assembly, so that the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body, residues generated by the reaction of the tail gas attached to the inner wall and the solution can be cleaned.
Description
Technical Field
The invention belongs to the technical field of tail gas treatment, and particularly relates to a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method.
Background
CVD is a short term for Chemical Vapor Deposition and refers to a gas phase reaction at high temperature. In the deep processing process of the hard alloy cutter, the high-end hard alloy cutter is required to be subjected to a coating process, and is usually carried out in a CVD coating furnace. The tail gas of the CVD coating furnace is mainly AlCl3 and TiCl4, and in the cleaning process, the tail gas is directly introduced into an alkaline solution for cleaning, but the tail gas is directly introduced into the solution and cannot completely react with the AlCl3, tiCl4 and the alkaline solution in the tail gas; meanwhile, the precipitate generated after the reaction of the tail gas and the solution is attached to the inner wall of the equipment, so that the reaction of the tail gas and the solution is influenced, and the interior of the equipment is not well cleaned.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to provide a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method.
The technical scheme adopted by the invention is as follows:
a CVD coating tail gas pipe condenser cleaning device comprises a cleaning box body;
the screw rod is connected to the inside of the cleaning box body and coincides with the axis of the cleaning box body;
the lower part of the rotating bracket is in threaded connection with the screw rod, and the upper part of the rotating bracket is connected with a transmission assembly in transmission connection with the screw rod;
the sliding support is connected to the rotating support in a sliding manner, and spray head assemblies are arranged on two sides of the sliding support; the spray head assembly is further provided with a water pump, the spray head assembly is connected with the water pump through a guide pipe, and the water pump is embedded in alkaline solution.
Preferably, both ends of the screw rod are rotationally connected to the cleaning box body, and the top end of the screw rod is connected with a fixing assembly.
Preferably, the fixing assembly is sleeved on the screw rod, the fixing assembly comprises a first electromagnet, a friction pad is fixedly arranged at the moving end of the first electromagnet, and a second elastic piece is arranged between the moving end and the fixed end of the first electromagnet.
Preferably, the transmission assembly comprises a transmission sleeve rotatably connected to the rotating support, a boss is arranged on the transmission sleeve, and the boss is embedded into the groove of the screw rod in a sliding connection mode.
Preferably, the transmission sleeve is sleeved with a sliding sleeve, the sliding sleeve is in transmission connection with the transmission sleeve, the bottom end of the sliding sleeve is fixedly connected with a transmission wheel, and a second electromagnet is arranged between the sliding sleeve and the transmission sleeve.
Preferably, a transmission bar is fixedly arranged on the sliding support, and the transmission bar is in transmission connection with the transmission wheel.
Preferably, the sliding support is further provided with a mounting lug and a sliding rail, a first elastic piece is arranged between the mounting lug and the rotating support, and the sliding rail is slidably connected to the rotating support.
Preferably, the side of the lower part of the cleaning box body is provided with an air inlet and a liquid outlet, the top of the cleaning box body is provided with an air outlet and a liquid filling opening, and the liquid filling opening is provided with a sealing detachable upper cover.
Preferably, the inside of clearance box is provided with protruding platform, protruding platform adopts odd setting.
A tail gas treatment method for a CVD coating tail gas pipe condenser cleaning device is characterized by comprising the following steps of: the tail gas treatment method comprises the following steps:
(1) The alkaline solution in the cleaning box body is sucked by the nozzle assembly and is sprayed out by the nozzle assembly to act on the interior of the cleaning box body, so that the alkaline solution is diffused and atomized;
(2) Installing a suction pump at an air inlet hole of the condenser cleaning equipment, and starting the suction pump to enable tail gas to react with alkaline solution in the condenser cleaning equipment after entering from the air inlet hole;
(3) The tail gas enters the cleaning equipment and then is divided into two stages:
in the first stage, the tail gas is directly communicated with the bottom of the cleaning box body to react with alkaline solution:
in the second stage, the filtered tail gas reacts with the atomized alkaline solution at the upper part of the cleaning box body;
after the tail gas reacts with the atomized alkaline solution, impurities attached to the inner wall of the cleaning box body are cleaned by the alkaline solution sprayed out by the spray head assembly.
The beneficial effects of the invention are as follows:
1. the device absorbs alkaline solution in the cleaning box body through the nozzle assembly, and acts inside the cleaning box body after being sprayed out through the nozzle assembly, so that the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body, residues generated by the reaction of the tail gas attached to the inner wall and the solution can be cleaned.
2. According to the method, through the first stage, the tail gas reacts with the alkaline solution directly, and then reacts with the atomized alkaline solution after the second stage, so that the tail gas reacts with the alkaline solution more fully, and the capability of the device for cleaning the tail gas is improved.
Drawings
The invention will be described in further detail with reference to the accompanying drawings and detailed description.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the structure of the cleaning tank of the present invention;
FIG. 3 is a schematic diagram of a portion of the present invention;
FIG. 4 is a schematic view of the structure of the fixing assembly of the present invention;
FIG. 5 is a schematic diagram of a portion of the present invention;
fig. 6 is a schematic view of the structure of the transmission assembly of the present invention.
In the figure: the cleaning device comprises a 1-cleaning box body, 101-air inlet holes, 102-liquid outlet holes, 103-air outlet holes, 104-liquid filling holes, 105-upper covers, 106-raised platforms, 2-screw rods, 3-rotating supports, 4-sliding supports, 401-mounting lugs, 402-sliding rails, 403-transmission strips, 5-transmission components, 501-transmission sleeves, 502-sliding sleeves, 503-transmission wheels, 504-second electromagnets, 6-spray head components, 7-fixing components, 701-first electromagnets, 702-friction pads and 703-second elastic pieces.
Detailed Description
The invention is further described with reference to the drawings and specific examples.
The following describes a specific embodiment of the present invention with reference to fig. 1 to 6, a CVD coating tail gas pipe condenser cleaning apparatus and a tail gas treatment method, including a cleaning tank 1;
the screw rod 2 is connected to the inside of the cleaning box body 1 and coincides with the axis of the cleaning box body 1;
the screw rod 2 is connected with the lower part of the rotating bracket 3, and the transmission assembly 5 in transmission connection with the screw rod 2 is connected with the upper part of the rotating bracket 3;
the sliding support 4 is connected to the rotating support 3 in a sliding manner, and spray head assemblies 6 are arranged on two sides of the sliding support 4; the spray head assembly 6 is further provided with a water pump, the spray head assembly 6 is connected with the water pump through a guide pipe, and the water pump is embedded in alkaline solution.
The spray head assembly 6 sucks alkaline solution in the cleaning box body 1, and the alkaline solution acts inside the cleaning box body 1 after being sprayed out by the spray head assembly 6, so that the alkaline solution is atomized and fully reacts with tail gas, and the cleaning effect of the device is further improved; meanwhile, after the high-pressure liquid directly acts on the inner wall of the cleaning box body 1, residues generated by the reaction of the tail gas and the solution attached to the inner wall can be cleaned.
Preferably, in a specific embodiment of the present invention, referring again to fig. 1-6, both ends of the screw 2 are rotatably connected to the cleaning box 1, and a fixing assembly 7 is connected to the top end of the screw 2; the fixing assembly 7 is sleeved on the screw rod 2, the fixing assembly 7 comprises a first electromagnet 701, a friction pad 702 is fixedly arranged at the moving end of the first electromagnet 701, and a second elastic piece 703 is arranged between the moving end and the fixed end of the first electromagnet 701.
After the first electromagnet 701 is arranged to rotate the bracket 3 to descend to the lowest position, the moving end of the first electromagnet 701 is driven to approach one side of the fixed end through the position sensor arranged in the cleaning box body 1, so that the friction pad 702 is separated from contact with the top end of the cleaning box body 1, at the moment, the screw rod 2 is in a rotating state, and after the rotating bracket 3 is reversely lifted to the highest position, the friction pad 702 on the first electromagnet 701 is in contact with the top end of the cleaning box body 1, and then the position of the screw rod is fixed.
Preferably, in one embodiment of the present invention, referring again to fig. 1-6, the transmission assembly 5 comprises a transmission sleeve 501 rotatably connected to the rotation bracket 3, the transmission sleeve 501 is provided with a boss, and the boss is embedded and slidingly connected in a groove of the screw rod 2; a sliding sleeve 502 is sleeved on the transmission sleeve 501, the sliding sleeve 502 is in transmission connection with the transmission sleeve 501, a driving wheel 503 is fixedly connected to the bottom end of the sliding sleeve 502, and a second electromagnet 504 is arranged between the sliding sleeve 502 and the transmission sleeve 501; a transmission bar 403 is fixedly arranged on the sliding bracket 4, and the transmission bar 403 is in transmission connection with the transmission wheel 503; the driving wheel 503 is a ratchet wheel.
The high-pressure spray head assembly 6 sucks alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure spray head assembly 6 and then acts in the cleaning box body 1, and under the condition that reverse thrust generated by the spray head assembly 6 is different (the distance between the sprayed out point of liquid and the acting surface is different), the sliding support 4 moves, and meanwhile, due to the fact that a certain inclination angle is arranged on the spray head assembly 6, the rotating support 3 can be pushed to rotate;
after the rotating bracket 3 moves to the lowest end, the second electromagnet 504 is driven, so that the transmission bar 403 on the sliding bracket 4 is driven by the transmission wheel 503, the screw rod 2 is driven to rotate by the transmission sleeve 501, a rotation difference is formed between the screw rod 2 and the rotating bracket 3, and the rotating bracket 3 is pushed to move upwards by utilizing the rotation difference between the screw rod 2 and the rotating bracket 3 and the threaded connection between the rotating bracket 3 and the screw rod 2.
Preferably, in an embodiment of the present invention, referring again to fig. 1-6, the sliding bracket 4 is further provided with a mounting lug 401 and a sliding rail 402, a first elastic member is disposed between the mounting lug 401 and the rotating bracket 3, and the sliding rail 402 is slidably connected to the rotating bracket 3.
The first elastic member can provide a certain elastic force for the sliding support 4, so that the sliding support is convenient to restore to the original position.
Preferably, in one embodiment of the present invention, referring again to fig. 1-6, an air inlet hole 101 and a liquid outlet 102 are provided on the side edge of the lower portion of the cleaning box 1, an air outlet hole 103 and a liquid filling opening 104 are provided on the top of the cleaning box 1, and a sealing detachable upper cover 105 is provided on the liquid filling opening 104.
The tail gas generated by the coating furnace enters through the air outlet 103, and after the alkaline liquid flowing through the bottom of the cleaning box body 1 reacts, the tail gas fully reacts with the alkaline liquid atomized at the top of the cleaning box body 1, and is discharged through the air outlet 103, and the liquid adding port 104 are arranged to be used for adding new alkaline solution and discharging waste liquid.
Preferably, in a specific embodiment of the present invention, referring again to fig. 1-6, the cleaning tank 1 is provided with a raised platform 106 inside, and the raised platform 106 is provided in an odd number.
The raised table 106 is arranged in an odd number, so that the raised table 106 is not arranged at the opposite side of the connecting line between the raised table 106 and the center of the cleaning box body 1; so that the opposite thrust generated by the nozzle assemblies 6 at both sides of the sliding support 4 is not the same (the distance between the point of liquid ejection and the acting surface is different), so as to push the sliding support 4 to reciprocate.
A tail gas treatment method for a CVD coating tail gas pipe condenser cleaning device is characterized by comprising the following steps of: the tail gas treatment method comprises the following steps:
(1) The alkaline solution in the cleaning box body 1 is sucked by the nozzle assembly 6, and is sprayed out by the nozzle assembly 6 to act on the interior of the cleaning box body 1 so as to be diffused and atomized;
(2) Installing a suction pump at an air inlet hole 101 of the condenser cleaning equipment, and starting the suction pump to enable tail gas to react with alkaline solution in the condenser cleaning equipment after entering from the air inlet hole 101;
(3) The tail gas enters the cleaning equipment and then is divided into two stages:
in the first stage, the tail gas is directly introduced into the bottom of the cleaning box body 1 to react with alkaline solution:
in the second stage, the filtered tail gas reacts with the atomized alkaline solution at the upper part of the cleaning box body;
after the tail gas reacts with the atomized alkaline solution, the impurities attached to the inner wall of the cleaning box body 1 are cleaned by the alkaline solution sprayed by the spray head assembly 6.
The tail gas mainly becomes AlCl3 and TiCl4, the tail gas is directly introduced into the alkaline solution in the cleaning process, alCl3, tiCl4 and the alkaline solution in the tail gas cannot be completely reacted, the alkaline solution is atomized and can be more uniformly distributed in the gas, the AlCl3 and the TiCl4 react to generate Ti (OH), the AlCl3 reacts with the alkaline solution to generate NaAlO2, a small amount of CO2 reacts with the alkaline solution to generate Al (OH) 3, ti (OH) and Al (OH) 3 are not dissolved in the alkaline solution and are easily attached to the inner wall of the cleaning box body 1, the high-pressure nozzle assembly 6 absorbs the alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure nozzle assembly 6 and then acts on the inner wall of the cleaning box body 1, the inner wall of the cleaning box body 1 can be directly washed, and the cleaning box body 1 can be washed while the reaction efficiency of the device is improved.
The invention relates to a CVD coating tail gas pipe condenser cleaning device and a tail gas treatment method, wherein the working principle of the device is as follows:
in the using process, the high-pressure spray head assembly 6 sucks alkaline solution in the cleaning box body 1, the alkaline solution is sprayed out by the high-pressure spray head assembly 6 and then acts in the cleaning box body 1, and under the condition that reverse thrust generated by the spray head assembly 6 is different (the distance between the sprayed out point of liquid and the acting surface is different), the sliding support 4 moves, and meanwhile, due to the fact that a certain inclination angle is arranged on the spray head assembly 6, the rotating support 3 can be pushed to rotate;
when the rotating bracket 3 moves downwards, the friction pad 702 on the first electromagnet 701 is in contact with the top end of the cleaning box body 1, so that the position of the screw rod is fixed, and meanwhile, the second electromagnet 504 is used for disengaging the transmission between the transmission bar 403 and the transmission wheel 503 and rotating under the thrust action of the spray head assembly 6;
after the rotating bracket 3 moves downwards to the first break, the first electromagnet 701 can rotate the bracket 3 to descend to the lowest position, and the moving end of the first electromagnet 701 is driven to approach to one side of the fixed end through the position sensor arranged in the cleaning box body 1, so that the friction pad 702 is separated from contact with the top end of the cleaning box body 1, and the screw rod 2 is in a rotating state at the moment; the second electromagnet 504 is driven to drive the transmission bar 403 on the sliding support 4 and the transmission wheel 503, the transmission sleeve 501 drives the screw rod 2 to rotate, a rotation difference is formed between the screw rod 2 and the rotating support 3, and the screw connection between the rotating support 3 and the screw rod 2 is utilized to push the rotating support 3 to move upwards;
after the rotating bracket 2 moves to the uppermost end, the first electromagnet 701 and the second electromagnet 504 restore to the original state, so that the rotating bracket 3 moves downwards.
The invention is not limited to the above-described alternative embodiments, and any person who may derive other various forms of products in the light of the present invention, however, any changes in shape or structure thereof, all falling within the technical solutions defined in the scope of the claims of the present invention, fall within the scope of protection of the present invention.
Claims (6)
1. The utility model provides a CVD coating tail gas pipe condenser cleaning equipment which characterized in that: comprises a cleaning box body (1);
the screw rod (2) is connected to the inside of the cleaning box body (1) and coincides with the axis of the cleaning box body (1);
the screw rod (2) is connected with the rotary support (3) through screw threads, and a transmission assembly (5) in transmission connection with the screw rod (2) is connected with the upper part of the rotary support (3);
the sliding support (4) is connected to the rotating support (3) in a sliding manner, and spray head assemblies (6) are arranged on two sides of the sliding support (4);
the transmission assembly (5) comprises a transmission sleeve (501) which is rotatably connected to the rotating bracket (3), a boss is arranged on the transmission sleeve (501), and the boss is embedded and slidably connected in a groove of the screw rod (2);
the transmission sleeve (501) is sleeved with a sliding sleeve (502), the sliding sleeve (502) is in transmission connection with the transmission sleeve (501), the bottom end of the sliding sleeve (502) is fixedly connected with a transmission wheel (503), and a second electromagnet (504) is arranged between the sliding sleeve (502) and the transmission sleeve (501);
a transmission bar (403) is fixedly arranged on the sliding bracket (4), and the transmission bar (403) is in transmission connection with the transmission wheel (503);
the sliding support (4) is further provided with a mounting lug (401) and a sliding rail (402), a first elastic piece is arranged between the mounting lug (401) and the rotating support (3), and the sliding rail (402) is in sliding connection with the rotating support (3).
2. A CVD coated tail gas tube condenser cleaning apparatus according to claim 1, wherein: both ends of the screw rod (2) are rotationally connected to the cleaning box body (1), and the top end of the screw rod (2) is connected with a fixing assembly (7).
3. A CVD coated tail gas tube condenser cleaning apparatus according to claim 2, wherein: the fixed assembly (7) is sleeved on the screw rod (2), the fixed assembly (7) comprises a first electromagnet (701), a friction pad (702) is fixedly arranged at the moving end of the first electromagnet (701), and a second elastic piece (703) is arranged between the moving end and the fixed end of the first electromagnet (701).
4. A CVD coated tail gas tube condenser cleaning apparatus according to claim 1, wherein: the cleaning box comprises a cleaning box body (1), wherein an air inlet hole (101) and a liquid outlet (102) are formed in the side edge of the lower portion of the cleaning box body (1), an air outlet hole (103) and a liquid adding opening (104) are formed in the top of the cleaning box body (1), and a sealing detachable upper cover (105) is arranged on the liquid adding opening (104).
5. A CVD coated tail gas tube condenser cleaning apparatus according to claim 1, wherein: the cleaning box body is characterized in that a protruding table (106) is arranged in the cleaning box body, and the protruding table (106) is arranged in an odd number.
6. A method of treating exhaust gas using the CVD coated exhaust gas condenser cleaning apparatus according to any one of claims 1 to 5, wherein: the tail gas treatment method comprises the following steps:
(1) The alkaline solution in the cleaning box body (1) is sucked by the nozzle assembly (6), and is sprayed out by the nozzle assembly (6) and then acts on the interior of the cleaning box body (1) to diffuse and atomize the alkaline solution;
(2) Installing a suction pump at an air inlet hole (101) of the condenser cleaning equipment, and starting the suction pump to enable tail gas to react with alkaline solution in the condenser cleaning equipment after entering from the air inlet hole (101);
(3) The tail gas enters the cleaning equipment and then is divided into two stages:
in the first stage, the tail gas is directly communicated with the bottom of the cleaning box body (1) and reacts with alkaline solution:
in the second stage, the filtered tail gas reacts with the atomized alkaline solution at the upper part of the cleaning box body (1);
after the tail gas reacts with the atomized alkaline solution, impurities attached to the inner wall of the cleaning box body (1) are cleaned by the alkaline solution sprayed by the spray head assembly (6).
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CN111068481A (en) * | 2020-02-15 | 2020-04-28 | 丁昌林 | Denitration and desulfurization device for industrial boiler |
CN215823862U (en) * | 2021-09-18 | 2022-02-15 | 于振鑫 | Water works basin cleaning device |
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