CN115077583A - Multi-core optical fiber end surface multi-parameter sensor and preparation method thereof - Google Patents
Multi-core optical fiber end surface multi-parameter sensor and preparation method thereof Download PDFInfo
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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Abstract
The invention belongs to the technical field of optical fiber sensing, and particularly relates to a multi-core optical fiber end face multi-parameter sensor and a preparation method thereof. The invention comprises the following steps: a multicore optical fiber having a plurality of cores; the multi-terminal micro-cantilever beam is positioned on the end face of the multi-core optical fiber and is obtained by printing on the end face of the multi-core optical fiber through a femtosecond laser two-photon polymerization technology; the functional material on the upper surfaces of the terminals of the micro-cantilever is modified on the upper surface of the micro-cantilever by a magnetron sputtering coating technology and a micro-manipulator coating process. The multi-core optical fiber end surface multi-parameter sensor and the preparation method thereof provided by the invention can select functional materials sensitive to different physical quantities, so that each micro-cantilever terminal has single selective response to different physical quantities, the simultaneous measurement of multiple physical quantities is realized, and the multi-core optical fiber end surface multi-parameter sensor has the characteristics of small size, flexible design and high sensitivity, and effectively solves the problem of multi-parameter measurement in a complex environment.
Description
Technical Field
The invention belongs to the technical field of optical fiber sensing, and particularly relates to a multi-core optical fiber end face multi-parameter sensor and a preparation method thereof.
Background
The optical fiber sensor has the advantages of high sensitivity, small size, strong flexibility, remote monitoring and the like, and becomes an efficient and low-cost solution for many industries. In addition, the optical fiber sensor can still be used under severe environmental conditions such as strong electromagnetic fields, high voltage, nuclear radiation, explosive or chemically corrosive media, high temperature and the like. However, the research of the existing optical fiber sensing mainly focuses on the single-core optical fiber sensing technology, the single-core optical fiber can only demodulate one parameter of strain, temperature, bending, displacement and the like, and the multi-parameter sensing acquisition and demodulation performed by using the existing optical fiber sensor usually needs to arrange a plurality of single-core optical fiber sensors and independent acquisition systems, so that the structure is complex, and the cost is greatly increased.
With the improvement of the preparation level of optical fibers and the technical development, research and application of multi-core optical fibers are rapidly developed in order to increase the space utilization rate of a single optical fiber and improve the communication capacity. The multi-core optical fiber can integrate a plurality of mutually independent fiber cores into one optical fiber, each fiber core is an independent channel, the crosstalk among the fiber cores is low, the signal attenuation is consistent, the multi-core optical fiber has extremely high application potential in the field of space division multiplexing communication transmission, and the multi-core optical fiber also has remarkable advantages in the aspects of sensing application such as space structures, transmission integration, temperature synchronous compensation and the like. However, the multi-parameter sensor based on the multi-core optical fiber is usually realized by modulating the refractive index of the fiber core in the optical fiber axial direction, the achievable micro-nano structure and the modifiable functional material are relatively limited, and the measurable parameters are mainly focused on physical quantities such as temperature, torsion, bending and the like.
By integrating functional materials and micro-nano structures on the end face of the optical fiber, various multifunctional photonic devices can be formed. The flat end face of the optical fiber is a unique unconventional platform, has a cross-sectional area with a micron size and a very large aspect ratio, can realize rich complex micro-nano structures, and has been widely researched in the fields of remote optical sensing, imaging, shaping and the like. In the research of the micro-nano structure of the end face of the optical fiber at present, a single-core optical fiber with only one coupling channel is mostly adopted, however, in the design process of the structure of the end face of the optical fiber, the mode that light is coupled out from the optical fiber and collected back to the optical fiber must be considered, which is very difficult for the end face of the optical fiber with only a single fiber core, so that the design of the micro-nano structure has great limitation. On the endface of a multi-core fiber, each core can act as a port for coupling light into or out of the fiber, greatly expanding the functional optical configuration design space of the fiber endface. By utilizing a precise three-dimensional processing technology, a micro-nano structure can be manufactured on the end face of the multi-core optical fiber, the multi-parameter simultaneous measurement can be realized by utilizing the advantage of space division multiplexing of a plurality of fiber cores, and the functional modification processing mode of the end face is simpler and more flexible than that of the side face of the optical fiber.
Disclosure of Invention
The invention aims to provide a multi-core optical fiber end face multi-parameter sensor with small size, flexible design and high sensitivity and a preparation method thereof.
The invention provides a multi-core optical fiber end surface multi-parameter sensor, which comprises:
the multi-core optical fiber is characterized in that a cladding of a single optical fiber contains a plurality of parallel fiber cores;
the micro-cantilever comprises a supporting block and a plurality of micro-cantilever terminals;
the micro-cantilever is positioned on the end face of the multi-core optical fiber, and the supporting block is connected with the end face of the optical fiber and the plurality of micro-cantilever terminals; the multi-core optical fiber end surface micro-cantilever is obtained by printing on the multi-core optical fiber end surface once through a femtosecond laser two-photon polymerization technology; the multiple micro-cantilever beam terminals shield the fiber cores to form multiple Fabry-Perot interferometer sensing core components;
the micro-cantilever terminals are modified with functional materials sensitive to different physical quantities, so that the micro-cantilever terminals have single selective response to different parameters, and the multi-parameter simultaneous measurement is realized by utilizing the advantages of multi-core optical fibers and multi-channels; here, the physical quantity includes the temperature, humidity, and the like of the environment, and the composition of the gas, and the like.
Further:
the supporting block is positioned at the geometric center of the micro-cantilever structure and at the position of the middle core of the multi-core optical fiber so as to connect the micro-cantilever and the end face of the optical fiber;
the number of the cores of the multi-core optical fiber is N, and N is more than or equal to 2;
the number of the terminals of the micro cantilever beam is M, and M is more than or equal to 2;
the supporting block is not limited to be cylindrical, and the length of the supporting block is 5-150 mu m;
the width, the length and the position of each terminal of the micro-cantilever beam are adjusted according to the core diameter and the core spacing of the multi-core optical fiber, so that the formed Fabry-Perot interferometer has a high-quality spectrum;
the thickness of the micro-cantilever terminal is 2-10 mu m.
The invention also provides a preparation method of the multi-core optical fiber end face multi-parameter sensor, which comprises the following specific steps:
(1) designing a matched micro-cantilever structure according to the core diameter and the core spacing of the multi-core optical fiber;
(2) assembling the multi-core optical fiber to a 3D photoetching machine platform by using an optical fiber clamp, adjusting a focusing platform, focusing femtosecond laser by using a high-numerical-aperture objective lens, and printing the micro-cantilever beam designed in the step (2) by matching with a precise displacement platform;
(3) placing the micro cantilever beam printed in the step (2) in a developing solution, removing the cured photoresist, and irradiating the developed micro cantilever beam by using ultraviolet light to further enhance curing;
(4) and (4) modifying the upper surface of the terminal of the micro-cantilever beam reinforced in the step (3) with a functional material by utilizing a magnetron sputtering technology or a micro-manipulator coating process.
According to the multi-core optical fiber end face multi-parameter sensor and the preparation method thereof, the micro-cantilever beams are printed on the multi-core optical fiber end face at one time by using the femtosecond laser two-photon polymerization technology, so that the integration of the single optical fiber end faces of a plurality of parallel Fabry-Perot interferometers is realized, each micro-cantilever beam terminal is modified by selecting functional materials sensitive to different parameters, so that each micro-cantilever beam terminal has single selective response to different parameters, the simultaneous measurement of the multiple parameters is realized by using the advantages of multi-core optical fiber and multi-channel, and the multi-core optical fiber end face multi-parameter sensor has the characteristics of small size, flexible design and high sensitivity, and effectively solves the problem of multi-parameter measurement in a complex environment.
Drawings
Fig. 1 is a schematic structural diagram of embodiment 1 of the present invention.
Fig. 2 is a schematic diagram of the end face of the multicore optical fiber and the micro-cantilever structure in example 1 of the present invention.
Fig. 3 is a schematic structural diagram of embodiment 2 of the present invention.
FIG. 4 is a flow chart of a method for manufacturing a multi-parameter sensor with a multi-core fiber end surface according to the present invention.
Reference numbers in the figures: 1 is a multi-core optical fiber, 2 is a micro-cantilever, 21 is a supporting block, 22 is a micro-cantilever terminal, and 23 is a functional material modified on the upper surface of the micro-cantilever terminal.
Detailed Description
To more clearly illustrate the objects and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Example 1
The structure of the multi-core optical fiber end-face multi-parameter sensor in this embodiment, as shown in fig. 1, includes:
the optical fiber comprises a multi-core optical fiber 1 and a micro-cantilever 2, wherein the micro-cantilever 2 comprises a supporting block 21, a micro-cantilever terminal 22 and a functional material 23 modified on the upper surface of the micro-cantilever terminal.
As shown in fig. 2, the multicore fiber has 7 cores, the peripheral cores are distributed in a hexagonal shape, and the central core is located at the center of the hexagonal shape. The number of the terminals of the micro-cantilever beam is 6, and the supporting block is positioned at the geometric center of the micro-cantilever beam structure and at the position of the middle core of the multi-core optical fiber so as to connect the micro-cantilever beam with the end face of the optical fiber.
The length of the micro-cantilever terminal is adjusted according to the core distance D, and the width is adjusted according to the core diameter R, so that the formed Fabry-Perot interferometer has a high-quality spectrum.
The thickness of the micro-cantilever terminal is as thin as possible on the premise that the micro-cantilever terminal is not deformed, so that the micro-cantilever terminal has higher sensitivity.
Example 2
Fig. 3 is a schematic structural diagram of a multi-core optical fiber end-face multi-parameter sensor in another embodiment. The multi-core optical fiber end surface multi-parameter sensor provided by the embodiment comprises:
the optical fiber comprises a multi-core optical fiber 1 and a micro-cantilever 2, wherein the micro-cantilever 2 comprises a supporting block 21, a micro-cantilever terminal 22 and a functional material 23 modified on the upper surface of the micro-cantilever terminal.
The number of the fiber cores of the multi-core optical fiber is 3, the fiber cores are distributed in a straight line shape, and the middle fiber core is positioned in the center of the optical fiber. The terminal number of the micro-cantilever beam is 2, and the supporting block is positioned at the geometric center of the micro-cantilever beam structure and at the position of the middle core of the multi-core optical fiber so as to connect the micro-cantilever beam with the end face of the optical fiber.
The length of the micro-cantilever terminal is adjusted according to the core distance D, and the width is adjusted according to the core diameter R, so that the formed Fabry-Perot interferometer has a high-quality spectrum.
The thickness of the micro-cantilever terminal is as thin as possible on the premise of not causing deformation of the micro-cantilever terminal, so that the micro-cantilever terminal has higher sensitivity.
Example 3
The embodiment provides a method for preparing a multi-core fiber end face multi-parameter sensor, as shown in fig. 4, the method comprises the following specific steps:
(1) designing a matched micro-cantilever structure according to the core diameter and the core spacing of the multi-core optical fiber;
in the step, the proper position, length and width of the micro-cantilever terminal are determined by measuring the core distribution, core diameter and core spacing of the multi-core optical fiber, and the designed three-dimensional micro-cantilever structure is subjected to entity modeling by using software;
(2) assembling the multi-core optical fiber to a 3D photoetching machine platform by using an optical fiber clamp, adjusting a focusing platform, focusing femtosecond laser by using a high-numerical-aperture objective lens, and printing the micro-cantilever beam designed in the step (1) by matching with a precise displacement platform;
in the step, vertically assembling the multi-core optical fiber on a 3D photoetching machine platform by using an optical fiber clamp, positioning a cover glass above the end face of the optical fiber, adjusting the distance to be hundreds of microns, filling photoresist in the gap, and immersing the whole end face of the optical fiber; dripping refractive index matching oil on the upper surface of the cover glass, and immersing the high-numerical-aperture oil lens; the focusing plane is adjusted to the end face of the optical fiber by observing the CCD, the precise displacement platform and the femtosecond laser are controlled by a program, processing parameters such as a scanning path, laser energy, line spacing, interlayer spacing and the like are optimized, and the micro-cantilever structure is printed;
(3) placing the micro-cantilever beam printed in the step (2) in a developing solution, removing uncured photoresist, and irradiating the developed micro-cantilever beam by using ultraviolet light to further strengthen curing;
in the step, the polymerized sample is taken out of the optical fiber clamp and placed in a developing solution for developing, and the effect of fully removing the uncured photoresist is achieved on the premise of not damaging the structure by controlling the solution components and the developing time of the developing solution; irradiating the developed micro-cantilever beam by using ultraviolet light to achieve the effect of further strengthening curing;
(4) modifying the upper surface of the micro-cantilever terminal reinforced in the step (3) with a functional material by utilizing a magnetron sputtering technology and a micro-manipulator coating process;
in the step, the reinforced sample is placed in an optical fiber magnetron sputtering coating instrument, selective coating of partial functional metal materials is carried out on the upper surface of the micro-cantilever terminal, and other functional materials are selectively coated by using a tip probe of a micro-manipulator.
Finally, the above-described embodiments may be modified in various ways by those skilled in the art without departing from the principle and spirit of the invention, and are not intended to limit the scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A multi-core optical fiber end face multi-parameter sensor, comprising: the multi-core optical fiber and the micro-cantilever beam are positioned on the end face of the multi-core optical fiber; the micro cantilever comprises a supporting block and a plurality of micro cantilever terminals; the supporting block is connected with the end face of the optical fiber and the plurality of micro cantilever beam terminals; the multi-core optical fiber end surface micro-cantilever beam is obtained by printing on the multi-core optical fiber end surface once through a femtosecond laser two-photon polymerization technology; the multiple micro-cantilever beam terminals shield the fiber cores to form multiple Fabry-Perot interferometer sensing core components;
functional materials sensitive to different physics are modified on each micro-cantilever terminal, so that each micro-cantilever terminal has single selective response to different parameters, and the multi-parameter simultaneous measurement is realized by using the advantages of multi-core optical fiber and multi-channel.
2. The multi-core optical fiber end face multi-parameter sensor of claim 1, wherein the support block is located at the geometric center of the micro-cantilever structure and at the position of the middle core of the multi-core optical fiber to connect the micro-cantilever and the optical fiber end face.
3. The multi-core optical fiber end-face multi-parameter sensor of claim 2,
the number of the cores of the multi-core optical fiber is N, and N is more than or equal to 2;
the number of the terminals of the micro cantilever beam is M, and M is more than or equal to 2;
the supporting block is cylindrical or square column-shaped, and the length of the supporting block is 5-150 mu m.
4. The multi-core fiber end-face multi-parameter sensor of claim 3, wherein the width, length and position of each end of the micro-cantilever are adjusted according to the core diameter and core pitch of the multi-core fiber, so that the Fabry-Perot interferometer has a high quality spectrum.
5. The multi-core optical fiber end-face multi-parameter sensor of claim 3, wherein the thickness of the micro-cantilever terminal is 2-10 μm.
6. The method for preparing a multi-parameter sensor with a multi-core fiber end face according to any one of claims 1 to 5, comprising the following steps:
(1) designing a matched micro-cantilever structure according to the core diameter and the core spacing of the multi-core optical fiber;
(2) assembling the multi-core optical fiber to a 3D photoetching machine platform by using an optical fiber clamp, adjusting a focusing platform, focusing femtosecond laser by using a high-numerical-aperture objective lens, and printing the micro-cantilever beam designed in the step (2) by matching with a precise displacement platform;
(3) placing the micro cantilever beam printed in the step (2) in a developing solution, removing the cured photoresist, and irradiating the developed micro cantilever beam by using ultraviolet light to further enhance curing;
(4) and (4) modifying the upper surface of the terminal of the micro-cantilever beam reinforced in the step (3) with a functional material by utilizing a magnetron sputtering technology or a micro-manipulator coating process.
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