CN115069673B - 一种用于半导体槽式清洗设备的过程强化系统 - Google Patents
一种用于半导体槽式清洗设备的过程强化系统 Download PDFInfo
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- CN115069673B CN115069673B CN202210989583.XA CN202210989583A CN115069673B CN 115069673 B CN115069673 B CN 115069673B CN 202210989583 A CN202210989583 A CN 202210989583A CN 115069673 B CN115069673 B CN 115069673B
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- 238000004140 cleaning Methods 0.000 title claims abstract description 257
- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000008569 process Effects 0.000 title claims abstract description 33
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 238000005728 strengthening Methods 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 182
- 238000003860 storage Methods 0.000 claims abstract description 87
- 238000005406 washing Methods 0.000 claims abstract description 60
- 239000002101 nanobubble Substances 0.000 claims abstract description 27
- 239000002245 particle Substances 0.000 claims abstract description 17
- 235000013547 stew Nutrition 0.000 claims abstract description 17
- 238000010521 absorption reaction Methods 0.000 claims abstract description 6
- 239000012528 membrane Substances 0.000 claims description 67
- 230000007246 mechanism Effects 0.000 claims description 59
- 238000000108 ultra-filtration Methods 0.000 claims description 58
- 238000001914 filtration Methods 0.000 claims description 44
- 239000007787 solid Substances 0.000 claims description 22
- 238000001802 infusion Methods 0.000 claims description 21
- 230000009471 action Effects 0.000 claims description 20
- 238000009434 installation Methods 0.000 claims description 17
- 238000001179 sorption measurement Methods 0.000 claims description 17
- 239000013618 particulate matter Substances 0.000 claims description 13
- 238000002360 preparation method Methods 0.000 claims description 11
- 238000000746 purification Methods 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 5
- 239000012905 visible particle Substances 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 10
- 238000000926 separation method Methods 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 description 11
- 210000004907 gland Anatomy 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 238000011085 pressure filtration Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/007—Heating the liquid
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210989583.XA CN115069673B (zh) | 2022-08-18 | 2022-08-18 | 一种用于半导体槽式清洗设备的过程强化系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210989583.XA CN115069673B (zh) | 2022-08-18 | 2022-08-18 | 一种用于半导体槽式清洗设备的过程强化系统 |
Publications (2)
Publication Number | Publication Date |
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CN115069673A CN115069673A (zh) | 2022-09-20 |
CN115069673B true CN115069673B (zh) | 2023-04-11 |
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CN202210989583.XA Active CN115069673B (zh) | 2022-08-18 | 2022-08-18 | 一种用于半导体槽式清洗设备的过程强化系统 |
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CN (1) | CN115069673B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115646938B (zh) * | 2022-11-19 | 2023-06-13 | 苏州智程半导体科技股份有限公司 | 利用具有膜包覆的纳米气泡强化兆声清洗硅片的方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7392814B2 (en) * | 2004-12-24 | 2008-07-01 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus and method |
KR100845966B1 (ko) * | 2007-06-28 | 2008-07-11 | 주식회사 실트론 | 웨이퍼 세정 방법 |
JP5243849B2 (ja) * | 2008-06-03 | 2013-07-24 | 芝浦メカトロニクス株式会社 | 基板処理装置および基板処理方法 |
CN106140714B (zh) * | 2016-06-23 | 2018-10-09 | 中国科学院上海高等研究院 | 动力泵循环式微纳米气泡水清洗出水文物的方法及装置 |
CN206199794U (zh) * | 2016-11-17 | 2017-05-31 | 福州德森精工有限公司 | 一种气泡超声波清洗机 |
CN206925084U (zh) * | 2017-05-26 | 2018-01-26 | 深圳市鑫承诺环保产业股份有限公司 | 紊流超声波清洗机 |
CN111558575A (zh) * | 2019-02-14 | 2020-08-21 | 英属开曼群岛商纳诺股份有限公司 | 纳米微气泡制造和清洗系统 |
CN110422935A (zh) * | 2019-07-10 | 2019-11-08 | 南京博约环境科技有限公司 | 一种废水处理用过滤膜组件 |
CN110759488A (zh) * | 2019-11-05 | 2020-02-07 | 徐州健一家健康管理有限公司 | 一种应用于水产养殖的生物絮团过滤设备 |
CN211888182U (zh) * | 2020-03-28 | 2020-11-10 | 天津全诚桓金环保科技有限公司 | 一种基于微纳米气泡的绿色清洗装置 |
CN213824212U (zh) * | 2020-10-19 | 2021-07-30 | 上海航翼高新技术发展研究院有限公司 | 一种用于飞机清洗的微纳米气泡水发生装置 |
CN215627349U (zh) * | 2021-07-23 | 2022-01-25 | 成都全兴矿泉水业有限公司 | 一种天然矿泉水的多介质高效过滤设备 |
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Address after: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
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Address after: 215000, No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, 299 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |