CN115053139A - Test socket for detecting tested device - Google Patents

Abstract

A test socket is provided for electrically connecting a test device to a device under test. The test socket includes: a housing, a probe, and an insulating member. A through hole is formed in the housing in a vertical direction. The probe is disposed in the through hole in a vertical direction. The probe is configured to be contractible and extensible in the vertical direction, and performs signal transmission in the vertical direction. The insulating member is disposed between an inner surface of the through-hole and an outer surface of the probe, and is configured to locate the probe in the through-hole. The insulating member includes a plurality of micro-pores.

Description

Test socket for testing the device under test

technical field

The present disclosure relates to a test socket that electrically connects a detection device with a device under test and is used in electrical testing of the device under test.

Background technique

In order to test the operating characteristics of the device under test, a test socket is used in the art, which is provided between the test device and the device under test and electrically connects the test device and the device under test. As such a test stand, a test stand having a probe that is retractable due to a pressing force applied by an inspection device is known.

The operational characteristics of semiconductor devices used in mobile communication devices in high frequency bands should be examined. In test sockets for high frequency detection, in order to reduce signal loss, probes are positioned in holes formed in the housing of the test socket in a coaxial arrangement. As an example, Korean Patent Publication No. 10-1534778 proposes a test seat in which the probes are arranged coaxially.

In order to correspond to the fine pitch of the terminals of the device to be inspected, it is important that the holes of the housing are formed with the fine pitch. When the holes of the housing are formed at fine pitches, the size of the coaxially disposed dielectric body of the probe must be reduced. However, improvements in dielectrics to enable dielectrics with reduced dimensions and low dielectric constants have not been developed in the art.

SUMMARY OF THE INVENTION

technical problem

In order to achieve a coaxial arrangement of the probe with respect to the hole in the housing, a dielectric for the coaxial arrangement of the probe is provided between the hole in the housing and the probe. In order to reduce signal loss, it is preferable to keep the dielectric constant of the coaxial arrangement low. However, since the existing test sockets only focus on realizing a coaxial setup by using a dielectric body with a high permittivity, the signal loss rate cannot be minimized. In addition, the dielectrics in the existing test sockets have limitations corresponding to the trend of finer pitching.

An embodiment of the present disclosure provides a test socket that can be effectively applied to high frequency detection and minimize signal loss. An embodiment of the present disclosure provides a test socket in which the coaxially disposed dielectric holding the probe has a reduced dielectric constant.

technical solutions to problems

An embodiment of the present disclosure relates to a test socket, which is disposed between a detection device and a device to be tested to electrically connect the detection device and the device to be tested. A test socket according to an embodiment includes a housing, a probe and an insulating member. Through holes are formed in the housing in a vertical direction. The probes are arranged in the through holes of the housing in a vertical direction. The probe is configured to contract and extend in the vertical direction and to perform signal transmission in the vertical direction. The insulating member is disposed between the inner surface of the through hole and the outer surface of the probe, and is configured to locate the probe in the through hole. The insulating member includes a plurality of microvoids.

In one embodiment, the plurality of micropores are pores. The insulating member is made of a resin including the plurality of micropores, and the pores are formed by a chemical reaction of the resin in a liquid state and a foaming agent.

In one embodiment, the plurality of micropores are hollow particles. The hollow particles may include films made of any of glass, silica, zirconia, ceramics, polymethyl methacrylate, polyethylene rubber, and acrylic resins. The hollow particles may include air contained within the membrane.

In one embodiment, the insulating member may include a plurality of microvoids of 1 vol% to 50 vol%.

In one embodiment, the insulating member includes the plurality of micropores, and may be made of any one of resin, glass, silica, zirconia, and ceramic. The resin may be any of rubber, polymethyl methacrylate, polyethylene, phenolic, epoxy, and novolac.

In an embodiment, the insulating member is configured to position the probe to be vertically coaxial with the through hole.

In one embodiment, the insulating member includes: an upper insulating member having an upper fitting hole penetrating coaxially with a central axis of the through hole and being fitted with the through hole; and a lower insulating member having a center with the through hole A lower side fitting hole through which the shaft coaxially penetrates and is fitted with the through hole. The probes may be fitted into the upper and lower fitting holes so as to be positioned coaxially with the through holes.

In one embodiment, the probe includes: an upper plunger, which is in contact with the device to be tested and moves through the upper matching hole; a lower plunger, which is in contact with the detection device and moves through the lower matching hole; a sleeve, which supports the upper the side plunger and the lower side plunger enable the upper side plunger and the lower side plunger to move in the vertical direction, and are fitted in the upper side fitting hole and the lower side fitting hole; and the elastic member is provided on the upper side in the sleeve between the side plunger and the lower side plunger. The elastic member is made of a plurality of conductive particles that can be conductively contacted in the vertical direction and an elastic substance that holds the plurality of conductive particles in the vertical direction.

Invention effect

According to an embodiment of the present invention, the insulating member positions the probe to be coaxial with the central axis of the through hole within the through hole of the housing, and the insulating member is made of an insulating material including a plurality of micropores. An insulating member including microvoids has a lower dielectric constant than an insulating member having the same size and made of only an insulating resin material. Therefore, the test socket according to an embodiment can reduce signal loss, realize impedance matching, and can be effectively used for high-frequency detection of a device to be detected.

In addition, since the insulating member has microporosity and low dielectric constant, the properties of the test seat are improved while maintaining the strength and workability of the insulating member without changing the material or size of the insulating member.

In addition, an insulating member having microvoids and a low dielectric constant can be formed to have a smaller size than an insulating member made of only an insulating resin material. Therefore, the test seat according to an embodiment can achieve fine spacing between probes.

Description of drawings

FIG. 1 is a cross-sectional view schematically showing an example to which a test socket according to an embodiment is applied.

2 is a cross-sectional view illustrating a portion of a test socket according to an embodiment.

FIG. 3 is a perspective view showing a part of the test socket shown in FIG. 2 .

FIG. 4 is a cross-sectional view schematically showing a portion of a probe according to an embodiment, and showing one example of micropores.

FIG. 5 is a cross-sectional view schematically showing a portion of a probe according to an embodiment, and showing another example of micropores.

6 is a cross-sectional view showing a portion of a test socket according to an embodiment, and showing another example of a probe.

7 is a graph showing simulation results with respect to insertion loss of a test socket according to an embodiment.

FIG. 8 is a graph showing simulation results regarding insertion loss of a test socket according to a comparative example.

9 is a graph showing simulation results with respect to reflection loss for a test socket according to an embodiment.

FIG. 10 is a graph showing a simulation result with respect to reflection loss of a test seat according to a comparative example.

Detailed ways

Embodiments of the present invention are shown for the purpose of illustrating the technical idea of the present invention. The scope of rights according to the present invention is not limited to the embodiments presented below or the specific descriptions of these embodiments.

Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by one of ordinary skill in the art. All terms used in the present invention are chosen for the purpose of explaining the present invention more clearly, and not for the purpose of limiting the scope of rights according to the present invention.

Expressions such as "including", "having", "having" and the like used in the present invention should be understood as open-ended terms including the possibility of other embodiments, unless in the context of including the expression otherwise stated in the statement or article.

Unless otherwise specified, the expression in the singular form described in the present invention may include the meaning of the plural forms, and the same applies to the expression in the singular form described in the scope of the patent application.

Expressions such as "first", "second" and the like used in the present invention are used to distinguish a plurality of components from each other, and do not limit the order or importance of the corresponding components.

In the present invention, when it is mentioned that a certain component is "connected" or "coupled" to another component, the specific component may be directly connected or coupled to the other component, and it should be understood that it may be connected via a new component. to be linked or combined with another component.

The direction indicator "upper" used in the present invention is based on the direction in which the test seat is arranged relative to the detection device, and the direction indicator "below" indicates the opposite direction of the upper direction. It should be understood that the directional term "vertical direction" used in the present invention includes an upper direction and a lower direction, but does not mean a specific one of the upper direction and the lower direction.

Embodiments are described with reference to the examples shown in the accompanying drawings. In the drawings, identical or corresponding components are given the same reference numerals. In addition, in the description of the following embodiments, repeated descriptions of the same or corresponding components may be omitted. However, even if the description of a component is omitted, it does not mean that the component is not included in a specific embodiment.

The embodiments described below and the examples shown in the figures relate to test sockets that can be used when inspecting a device to be inspected. The test seat of the embodiment is arranged between the detection device and the device to be detected, and can be used for electrical connection and detection of the detection device and the device to be detected. As an example, the test seat of the embodiment can be used for final electrical inspection of the semiconductor device in the post-processing in the manufacturing process of the semiconductor device, but the test seat of the embodiment is not limited to this example.

Figure 1 shows an example of a test socket suitable for use according to an embodiment. FIG. 1 schematically shows a test seat, components of the test seat, a testing device, and a device to be tested, and the shapes shown in FIG. 1 are only examples selected for understanding the embodiments.

Referring to FIG. 1 , the test seat 10 according to an embodiment may be an assembly having a sheet shape. When performing electrical inspection on the device to be inspected 30 , the test seat 10 is provided between the inspection device 20 and the device to be inspected 30 . As an example, the test seat 10 may be disposed between the device to be tested 30 and the detection device 20 to perform high-frequency detection of the device to be tested 30 .

The detected device 30 may be a semiconductor device in which a semiconductor IC chip and a plurality of terminals are packaged in a hexahedral shape by using a resin material. As an example, the detected device 30 may be a semiconductor device used in a mobile communication device, but is not limited thereto. The detected device 30 has a plurality of terminals 31 on its lower side.

The detection device 20 can detect various operational characteristics of the device to be detected 30 . The detection device 20 may have a board on which detection is performed, and the board may have a detection circuit 21 for detecting the device 30 to be detected. The detection circuit 21 has a plurality of terminals 22 that are electrically connected to the terminals 31 of the device to be detected through the test socket 10 . The terminals 22 of the detection device 20 can send electrical test signals and receive response signals.

The test socket 10 may be configured to contact the terminals 22 of the detection device 20 through the socket guides 40 . When detecting the device to be tested 30 , the test socket 10 electrically connects the terminal 31 of the device to be tested and the terminal 22 of the corresponding detection device in the vertical direction VD, and the device to be tested 30 is executed by the detection device 20 through the test socket 10 . detection. The socket guide 40 is detachably mounted to the detection device 20 . The socket guide 40 accommodates the device under test 30 therein, which is transported to the testing apparatus 20 manually or by transport equipment, and aligns the device under test 30 relative to the test seat 10 .

Referring to FIG. 1 , a test socket 10 according to an embodiment includes a housing 110 , at least one probe 120 and at least one insulating member 130 . The housing 110 constitutes the main body of the test stand in which the probes 120 are arranged in the vertical direction VD. The housing 110 may be attached to the socket guide 40 . The probe 120 is configured to transmit signals in the vertical direction VD. The probe 120 can be in contact with the terminal 31 of the device to be inspected 30 at its upper end, and can be in contact with the terminal 22 of the detection device 20 at its lower end. The probe 120 is configured to be able to contract and extend in the vertical direction VD. The insulating member 130 positions the probe 120 in the vertical direction VD in the housing 110 .

In order to test the device to be tested 30 , a pressurizing force P is applied to the test seat 10 through the device to be tested 30 by mechanical means or manually. As the terminal 31 of the device to be inspected presses down the upper end of the probe 120 by the pressing force P, the probe 120 contracts so that its length in the vertical direction is reduced. As the pressing force P is applied to the test seat 10, the probe needle 120 is pressed in the vertical direction, and the probe needle 120 contacts the terminal 31 of the device to be inspected and the terminal 22 of the inspection device. When the pressing force P is removed from the test seat 10, the probe 120 is vertically extended to the original length.

The test seat 10 may include a plurality of probes 120 . A plurality of probes 120 may be disposed in the housing 110 in a matrix form and spaced apart in the horizontal direction HD by the housing 110 .

To illustrate a test socket according to an embodiment, reference is made to FIGS. 2 to 6 . 2 to 6 schematically show the shapes of the constituent elements of the test seat. The shapes shown in FIGS. 2-6 are merely examples selected for understanding of the embodiments. FIG. 2 is a cross-sectional view showing a part of a test socket according to an embodiment of the present application, and FIG. 3 is a perspective view showing a part of the test socket shown in FIG. 2 . 4 and 5 are cross-sectional views schematically illustrating a portion of a probe of a test seat according to an embodiment. 6 is a cross-sectional view schematically showing another example of a probe of a test seat according to an embodiment.

2 and 3, the test socket 10 according to an embodiment includes: a housing 110; a probe 120 disposed in the housing 110 and configured to perform signal transmission in a vertical direction VD; and positioning the probe 120 The insulating member 130 in the housing 110 .

The housing 110 constitutes the main body of the test seat, and may have a hexahedral shape. The case 110 may be made of a metal material such as aluminum, but the material constituting the case is not limited thereto. The probe 120 is arranged in the casing 110 and is held by the casing 110 in the vertical direction VD. In order to dispose the probe 120 in the housing 110, a through hole 111 is formed in the housing 110 in a vertical direction. The through hole 111 penetrates the casing 110 in the vertical direction VD. That is, the through hole 111 is perforated in the housing in the vertical direction from the lower surface of the housing 110 to the upper surface of the housing 110 .

In one embodiment, the casing 110 includes an upper casing 112 and a lower casing 113 that are combined in the vertical direction VD. The upper casing 112 is perforated with an upper through hole 114 in the vertical direction VD, and the lower casing 113 is perforated with a lower through hole 115 in the vertical direction VD. When the upper case 112 and the lower case 113 are combined, the upper through hole 114 and the lower through hole 115 form a through hole 111 penetrating the case 110 in the vertical direction VD.

The probe 120 is disposed in the through hole 111 of the housing in the vertical direction VD. The probe 120 is configured to be retractable and extendable in the vertical direction VD. The probe 120 held by the housing 110 electrically connects the detection device and the device to be detected, and performs signal transmission between them.

The probe 120 includes: an upper plunger 121 arranged on the upper side; a lower plunger 122 arranged on the lower side; so that the upper plunger and the lower plungers 121, 122 can be in the vertical direction VD A barrel 123 that supports and holds the upper and lower plungers 121 and 122 in a moving manner; an elastic member 124 is provided in the sleeve 123 between the upper and lower plungers 121 and 122 . The upper plunger 121 is in contact with the device to be detected. The lower plunger 122 is in contact with the detection device. The sleeve 123 may be formed in a cylindrical shape, and the upper-side plunger 121 and the lower-side plunger 122 are partially inserted into the cylindrical space of the sleeve 123 . The elastic member 124 is provided in the inner space of the sleeve 123 . The elastic member 124 is located between the upper plunger 121 and the lower plunger 122, and applies elastic force to the upper plunger 121 and the lower plunger 122 in the vertical direction VD. As an example, the elastic member 124 shown in FIG. 2 may be a compression coil spring. The upper-side plunger 121 and the lower-side plunger 122 and the sleeve 123 are made of conductive metal material. The probe 120 is an assembly composed of the upper plunger 121 , the lower plunger 122 , the sleeve 123 and the elastic member 124 . Such probes 120 may be referred to in the art as contact probes or pogo pins.

The upper plunger 121 and the lower plunger 122 are pushed into the inside of the sleeve 123 by the elastic force of the elastic member 124 by the pressing force (refer to the pressure P shown in FIG. 1 ) applied downward by the device to be detected. Therefore, the probe 120 can be retracted in the vertical direction. When the pressing force is removed, the upper plunger 121 and the lower plunger 122 return to their original positions by the elastic force of the elastic members. Therefore, the probe 120 may be elongated in the vertical direction VD. In this way, the probe 120 can contract in the vertical direction due to the above-mentioned pressing force applied to the device to be inspected. In addition, when the aforementioned pressing force is removed, the probe 120 may be elongated to its original state.

The upper plunger 121 is in contact with a terminal (refer to the terminal 31 shown in FIG. 1 ) of the device to be detected at its upper end. The lower plunger 122 is in contact with a terminal (refer to the terminal 22 shown in FIG. 1 ) of the detection device at its lower end. The sleeve 123 is in conductive contact with the upper plunger 121 and the lower plunger 122 . Therefore, between the terminal 22 of the detection device corresponding to one probe 120 and the terminal 31 of the device to be inspected, the probe 120 can be used as an intermediary to perform signal transmission in the vertical direction. Therefore, the test signal of the detection device can be transmitted from the terminal 22 of the detection device to the terminal 31 of the detected device through the probe 120, and the response signal of the detected device can be transmitted from the terminal 31 of the detected device to the detected device through the probe 120. Terminal 22 of the detection device.

The probes 120 are disposed in the through holes 111 in the vertical direction VD through the insulating member 130 . The insulating member 130 is configured such that the probe needle 120 is located in the through hole 111 . The insulating member 130 is disposed between the inner surface of the through hole 111 and the outer surface of the probe 120 . The insulating member 130 insulates the probe 120 from the housing 110, and is made of an insulating material.

The probe 120 is arranged in the housing 110 so as to be coaxial with the central axis CA of the through hole 111 in the vertical direction VD. The insulating member 130 enables the coaxial arrangement of the probe 120 . In order to make the central axis CA of the through hole 111 coincide with the central axis of the probe needle 120 , the insulating member 130 positions the probe needle 120 in the through hole 111 . The insulating member 130 is configured such that the probe needle 120 is positioned to be coaxial with the through hole 111 in the vertical direction VD. The insulating member 130 is formed in a ring shape. Therefore, the insulating member 130 is provided between the inner surface of the through hole 111 and the outer surface of the probe 120, and a part of the probe 120 penetrates the insulating member 130 in the vertical direction VD.

In one embodiment, the insulating part 130 includes: an upper insulating part 131 and a lower insulating part 132 which can be matched with the through hole 111 of the housing.

The upper insulating member 131 is provided in the upper housing 112 and is fitted to the upper through hole 114 in the vicinity of the upper end of the upper through hole 114 . The upper insulating member 131 has an upper fitting hole 133 penetrating the upper insulating member coaxially with the central axis CA of the through hole 111 . When the upper end of the sleeve 123 is matched with the upper fitting hole 133 in the vertical direction VD, the upper plunger 121 penetrates the upper fitting hole 133, and the upper end of the upper plunger 121 protrudes upward, the probe 120 The upper portion is combined with the upper insulating member 131 . When the terminal of the device to be tested is in contact with the probe, the upper plunger 121 can move to the inside of the sleeve 123 through the upper matching hole 133 . The upper end surface of the upper insulating member 131 may be at the same height as the upper surface of the upper housing 112 , and the upper end surface of the upper insulating member 131 may have a vertical difference with respect to the upper surface of the upper housing 112 .

The lower side insulating member 132 is provided in the lower side housing 113 and is fitted to the lower side through hole 115 in the vicinity of the lower end of the lower side through hole 115 . The lower insulating member 132 has a lower fitting hole 134 penetrating the lower insulating member coaxially with the central axis CA of the through hole 111 . When the lower end of the sleeve 123 is engaged with the lower fitting hole 134 in the vertical direction VD, the lower plunger 122 penetrates the lower fitting hole 134 and the lower end of the lower plunger 122 protrudes downward, the probe 120 The lower side portion of the lower side is combined with the lower side insulating member 132 . When the terminal of the detection device is in contact with the probe, the lower plunger 122 can move to the inside of the sleeve 123 through the lower matching hole 133 .

The central axis of the upper fitting hole 133 and the central axis of the lower fitting hole 134 are coaxial with the central axis CA of the through hole 111 of the housing 110 . The probe needle 120 is fitted to the upper side fitting hole 133 and the lower side fitting hole 134 in the vertical direction VD. The probe needle 120 is provided in the through hole 111 in a state of being supported by the upper side insulating member 131 and the lower side insulating member 132 , and is positioned to be coaxial with the central axis CA of the through hole 111 .

The upper side fitting hole 133 is formed such that the upper end portion of the sleeve 123 is fitted into the upper side fitting hole and the upper side plunger 121 is inserted into the upper side fitting hole with a certain gap therebetween. The lower side fitting hole 134 is formed such that the lower end portion of the sleeve 123 is fitted into the lower side fitting hole and the lower side plunger 122 is inserted into the lower side fitting hole with a certain gap therebetween. The upper insulating member 131 may be fitted to the upper through hole 114 from bottom to top, and the lower insulating member 132 may be fitted to the lower through hole 115 from top to bottom. The lower end portion of the upper insulating member 131 has a flange portion 135 , and the upper end portion of the lower insulating member 132 has a flange portion 135 . The upper through holes 114 and the lower through holes 115 have stepped portions 116 corresponding to the flange portions 135 , and the flange portions 135 can be fitted with the stepped portions 116 .

As an example, the test socket 10 may be assembled and manufactured by combining the upper case 112 and the lower case 113 . The upper insulating member 131 is provided in the upper through hole 114 of the upper housing 112 , and the upper end portion of the probe 120 can be inserted into the upper fitting hole 133 of the upper insulating member 131 . Therefore, the upper end portion of the probe 120 can be temporarily assembled to the upper housing 112 . Next, the lower insulating member 132 may be provided in the lower through hole 115 of the lower housing 113 . After that, in order to insert the lower end portion of the probe 120 into the lower fitting hole 134 of the lower insulating member 132, the upper housing 112 and the lower housing 113 may be combined in the vertical direction VD. Therefore, the probe 120 is disposed to be coaxial with the central axis CA of the through hole 111 of the housing 110 while assembling and manufacturing the test seat 10 .

The insulating member 130 positions the probe 120 in the through hole 111 in a coaxial manner with the central axis of the through hole, and functions as a dielectric in signal transmission of the probe 120 . According to the test seat of an embodiment, the insulating member 130 is not only made of an insulating material, but also configured to have a low dielectric constant. The insulating material constituting the upper insulating member 131 and the lower insulating member 132 as insulating members may be any one of resin, glass, silica, zirconia, and ceramics. In addition, the resin constituting the insulating member may be any one of rubber, polymethyl methacrylate, polyethylene, phenolic, epoxy resin, and novolac, but is not limited thereto.

In the through hole 111 of the housing 110 , the upper and lower insulating members 131 and 132 and the probe needle 120 are arranged to be coaxial with the central axis CA of the through hole 111 . Due to such a coaxial arrangement, the loss of the signal passing through the probe 120 can be reduced when performing high frequency inspection of the device under inspection. In addition, the housing 110 can eliminate leakage current generated during signal transmission of the probe 120 .

In signal transmission of the probe 120, the dielectric constants of the upper insulating member and the lower insulating member have an effect on reducing signal loss. The lower the dielectric constant of the upper insulating member and the lower insulating member, the greater the reduction in signal loss. In addition, the lower the dielectric constants of the upper insulating member and the lower insulating member, the better the impedance of the probe 120 can be matched with the impedance of the device to be detected and the impedance of the detection circuit of the detection device. The upper and lower insulating members are machined to have a specific shape and size for positioning the probe 120 in a coaxial arrangement. Therefore, lower dielectric constants of the upper and lower insulating members while maintaining the workability of the upper and lower insulating members will be beneficial for reducing signal loss and impedance matching.

According to an embodiment, the insulating member 130 of the test seat 10 may be made of the above-described insulating material and have a porous structure to have a low dielectric constant. That is, the upper insulating member 131 and the lower insulating member 132 are made of insulating material having a porous structure. The upper-side insulating member 131 and the lower-side insulating member 132 are formed to have a shape and size for coaxial arrangement of probes, and include a plurality of micropores in order to reduce the dielectric constant. In this way, the upper insulating member 131 and the lower insulating member 132 include a plurality of microvoids, and are made of the above-described insulating material. The upper insulating member 131 and the lower insulating member 132 including microvoids have lower dielectric constants than insulating members without microvoids, which can further reduce signal loss in signal transmission of the probe 120 . Although such micropores may be included in the upper insulating member 131 and the lower insulating member 132 in the form of gaspores or hollow particles, the form of the micropores is not limited to the gaspores or hollow particles.

Figures 4 and 5 show examples of micropores, respectively. The shapes of the microvoids shown in Figures 4 and 5 are merely examples selected for understanding of the embodiments.

In the test seat of an embodiment, the insulating member that locates the probe in the through hole in the form of coaxial with the central axis of the through hole may be made of an insulating material including a plurality of micropores. The insulating material may be the above-mentioned resin, and the plurality of microvoids may be pores. Referring to FIG. 4 , the upper insulating member 131 and the lower insulating member 132 include a plurality of air holes 136 as the micropores. The air holes 136 are irregularly distributed throughout the insulating resin constituting the upper insulating member 131 and the lower insulating member 132 .

The air holes 136 may be formed by a chemical reaction between a liquid resin constituting the insulating member and a foaming agent. A foaming agent may be added to the liquid resin for molding the upper insulating member 131 and the lower insulating member 132 when molding the upper insulating member 131 and the lower insulating member 132 . The upper and lower insulating members 131, 132 may be molded by injecting the above-described liquid resin into a molding die, and the above-described foaming agent may be added to the liquid resin. During the molding process of the upper side insulating member and the lower side insulating member, the above-mentioned foaming agent chemically reacts with the liquid resin to generate gas. The gas generated is inside the liquid resin and pushes the liquid resin away. Therefore, the generated gas partially deprives the liquid resin in the molding process of the upper and lower insulating members 131 and 132, so that various sizes of A plurality of air holes 136 . As another example, a resin-made workpiece including air holes may be prepared, and such a workpiece may be processed into an insulating member.

The plurality of air holes 136 may be filled with gas. As an example, the plurality of air holes 136 may be filled with gas generated in the process of forming the air holes 136 . Alternatively, the air holes 136 may be filled with air or a vacuum.

In the test seat according to an embodiment, the insulating member may be made of the above-mentioned insulating material, and at the same time includes a plurality of micropores, and the plurality of micropores may be hollow particles. Referring to FIG. 5 , the upper insulating member 131 and the lower insulating member 132 include a plurality of hollow particles 137 as the above-described micropores. The hollow particles 137 are irregularly distributed throughout the insulating material constituting the upper insulating member 131 and the lower insulating member 132 . As an example, the size of the hollow particles 137 may be about 10 μm to about 30 μm, but is not limited thereto. The hollow particles 137 may be added to the liquid insulating material for molding the upper insulating member 131 and the lower insulating member 132 at the time of molding the upper insulating member 131 and the lower insulating member 132 . The upper-side insulating member 131 and the lower-side insulating member 132 may be molded by injecting the above-described liquid material into a molding die, and hollow particles 137 may be added to the liquid material. As another example, a workpiece of the above-described insulating material including hollow particles may be prepared, and an insulating member may be processed from such a workpiece.

The hollow particles 137 may include a gas 138 and a shell 139 containing the gas. Membrane 139 may have any shape capable of containing gas 138 therein. As an example, the membrane 139 may be in the shape of a sphere, but is not limited thereto. The film 139 may be made of the same or different material as the insulating material constituting the upper insulating member 131 and the lower insulating member 132 . As an example, the membrane 139 may be made of any one of glass, silica, zirconia, ceramic, polymethyl methacrylate, polyethylene rubber, acrylic resin. The gas 138 contained inside the membrane 139 may be air. As an example, when the upper insulating member and the lower insulating member are made of epoxy resin, the dielectric constant of the epoxy resin may be about 3.6. The dielectric constant of air contained in the hollow particles may be about 1. Therefore, the upper-side insulating member and the lower-side insulating member made of the resin material containing the hollow particles can exhibit a low dielectric constant. The gas 138 contained in the film 139 is not particularly limited. As another example, the interior of membrane 139 may be a vacuum.

When the volume of the insulating member is taken as 100%, the insulating member may include a plurality of micropores (air holes 136 or hollow particles 137 ) of 1 vol % to 50 vol %. That is, when the volume of the upper insulating member and the lower insulating member is taken as 100%, a plurality of microvoids (air holes 136 or hollow particles 137 ) are contained in the upper insulating member 131 and the lower insulating member at a ratio of 1 to 50 vol %. in component 132. The dielectric constant of the insulating member can be adjusted by appropriately selecting the content of microvoids (air holes or hollow particles). When the content rate of pores or hollow particles is too low, the effect of reducing the dielectric constant of the insulating member becomes small. When the content rate of pores or hollow particles exceeds 50 vol%, the workability related to the molding of the insulating member may decrease, and the durability of the insulating member may deteriorate.

FIG. 4 shows that the upper insulating member and the lower insulating member include air holes, and FIG. 5 illustrates that the upper insulating member and the lower insulating member include hollow particles. As another example, one of the upper and lower insulating members may include air holes, and the other of the upper and lower insulating members may include hollow particles.

According to the test seat of an embodiment, the upper insulating member 131 and the lower insulating member 132 include a plurality of micropores (air holes 136 or hollow particles 137 ). Therefore, the upper insulating member 131 and the lower insulating member 131 and the lower insulating member 131 are compared with an insulating member made of an insulating resin material without the above-mentioned microvoids and having the same outer diameter as that of the upper insulating member and the lower insulating member. Component 132 may have a lower dielectric constant and further reduce signal loss in signal transmission of probe 120 . In addition, since the impedance of the probe 120 matches the impedance of the device to be tested and the impedance of the detection circuit, signal loss due to impedance mismatch does not occur, therefore, the test socket according to an embodiment can be effectively used for High-frequency inspection of the device under test.

By adding the above-described foaming agent or the above-described hollow particles to the material for molding the upper and lower insulating members, microvoids can be formed in the upper insulating member and the lower insulating portion. Therefore, while maintaining the workability of the upper and lower insulating members, the upper and lower insulating members can be reduced in size without changing the materials and dimensions constituting the upper and lower insulating members. The dielectric constant of the side insulating parts. In addition, by adjusting the volume ratio or size of pores or hollow particles included in the upper insulating member and the lower insulating member, the characteristic value of the test seat of an embodiment can be controlled. In addition, the upper-side insulating member and the lower-side insulating member, which have a lower dielectric constant due to microvoids, can be formed to have a smaller outer diameter size, which can further reduce the separation distance between the probes 120 (ie, probes 120 ). spacing between pins). Accordingly, the test socket of an embodiment may be configured to further reduce the spacing between probes 120 . In addition, instead of the insulating member having no microvoids as described above, the upper insulating member and the lower insulating member according to an embodiment can be easily applied to the test seat, and the strength and workability of the insulating member can be easily maintained while maintaining the strength and workability of the insulating member. The ground gives the test seat excellent signal transmission capability.

A columnar structure capable of conducting electricity in the vertical direction and also capable of contracting and expanding in the vertical direction can be used as the elastic part of the probe. Referring to FIG. 6 , the probe 120 is provided in the sleeve 123 and has an elastic member 125 that applies elastic force to the upper plunger 121 and the lower plunger 122 . The elastic member 125 illustrated in FIG. 6 has a columnar shape and is provided between the upper plunger 121 and the lower plunger 122 . The elastic member 125 is in contact with the lower end of the upper plunger 121 at its upper end, and is in contact with the upper end of the lower plunger 122 at its lower end. The elastic member 125 is made of a plurality of conductive particles 126 that can be conductively contacted in the vertical direction VD, and an elastic substance 127 that holds the plurality of conductive particles 126 in the vertical direction.

The plurality of conductive particles 126 are made of a conductive metal material. The conductive particles 126 are irregularly distributed in the upper end to the lower end of the elastic member 125 . The conductive particles 126 can be conductively contacted in the vertical direction VD, and are assembled in the vertical direction VD (for example, in a columnar shape). The conductive particles 126 that can be conductively contacted in the vertical direction VD function as conductors that perform signal transmission between the upper plunger 121 and the lower plunger 122 . The elastic material 127 holds the conductive particles 126 in the vertical direction VD in order to assemble the conductive particles 126 in a columnar shape. The elastic material 127 may be filled between the conductive particles 126 . The elastic material 127 is integrally formed with the conductive particles 126 to constitute the elastic member 125 . The elastic substance 127 includes silicone rubber.

Through the elastic restoring force of the elastic material 127, the elastic member 125 can contract in the vertical direction VD, and can also expand to the original state before the contraction. For example, the elastic member 125 can be contracted in the vertical direction VD by the pressing force applied via the upper side plunger 121 when the detected device is detected. When the above-mentioned pressing force is removed, the elastic member 125 expands to its original state due to the elastic restoring force of the elastic substance 127 .

The improved performance of the test socket of an embodiment can be verified using software for simulating high frequency electromagnetic fields. 7 to 10 show graphs of simulation results performed using software for simulating high frequency electromagnetic fields. The above-described simulations were performed in a test socket according to an embodiment and a test socket according to a comparative example. In the graphs shown in FIGS. 7 to 10 , the horizontal axis represents the value of frequency, the unit of which is GHz, and the vertical axis has the unit of decibel dB. Regarding the above simulation, the upper insulating member and the lower insulating member of the test seat of one embodiment are made of epoxy resin having a dielectric constant of 3.6, and include the above-described hollow particles. The upper side insulating part and the lower side insulating part of the test seat of the comparative example were made of epoxy resin having a dielectric constant of 3.6, but did not include the above-mentioned hollow particles or the above-mentioned air holes at all.

7 and 8 show simulation results regarding insertion loss, which refers to the degree of signal loss during signal transmission. FIG. 7 shows a curve corresponding to a test seat of an embodiment, and FIG. 8 shows a curve corresponding to a test seat of a comparative example. In the graphs shown in Figures 7 and 8, a curve close to 0db indicates less signal loss. From the comparison of FIG. 7 and FIG. 8 , it can be confirmed that the test socket of an embodiment has less signal loss in the high frequency range of 0 GHz to 50 GHz than the test socket of the comparative example.

Figures 9 and 10 show simulation results of return loss, which refers to the degree of signal reflection during signal transmission. FIG. 9 shows a curve corresponding to a test seat of an embodiment, and FIG. 10 shows a curve corresponding to a test seat of a comparative example. In the graphs shown in Figures 9 and 10, the curves close to 0 dB represent large signal reflections. From the comparison of FIGS. 9 and 10 , it can be confirmed that the test socket of an embodiment has less signal reflection in the high frequency range of 20 GHz to 40 GHz than the test socket of the comparative example. Therefore, the test seat of an embodiment in which the upper insulating member and the lower insulating member include a plurality of air holes or a plurality of hollow particles has reduced reflection loss, especially in the high frequency range of 20 GHz to 40 GHz where high frequency detection is performed, Less signal loss occurs.

In addition, according to the graphs of the simulation results shown in FIGS. 7 to 10 , it can be confirmed that the upper insulating member and the lower insulating member in the test seat of one embodiment have a dielectric constant reduced by about 10%.

Although the technical idea of the present invention has been described through the above embodiments and the examples shown in the accompanying drawings, it should be understood that the technical idea and scope of the present invention can be understood by those skilled in the art to which the present invention belongs. Various substitutions, modifications and changes can be made. In addition, such substitutions, modifications and changes should be considered to be within the scope of the appended claims.

Claims (13)

1. A test socket for electrical connection of a test device to a device under test, comprising:

a housing formed with a through hole in a vertical direction;

a probe disposed in the through hole in the vertical direction, and configured to contract and elongate in the vertical direction and perform signal transmission in the vertical direction; and

an insulating part disposed between an inner surface of the through-hole and an outer surface of the probe, and configured such that the probe is located in the through-hole, and the insulating part includes a plurality of micro-pores.

2. The test socket of claim 1, wherein the plurality of microporosities are air holes.

3. The test socket of claim 2, wherein said insulating member is made of a resin including said plurality of micro-pores, said pores being formed by a chemical reaction of said resin in a liquid state and a foaming agent.

4. The test socket of claim 1, wherein the plurality of micro-pores are hollow particles.

5. The test socket of claim 4, wherein the hollow particles comprise a membrane made of any one of glass, silica, zirconia, ceramic, polymethylmethacrylate, polyethylene rubber, and acrylic resin.

6. The test socket of claim 5, wherein the hollow particles comprise air contained within the membrane.

7. The test socket of claim 1, wherein the insulating member comprises 1 vol% to 50 vol% of the plurality of micro-pores.

8. The test socket of claim 1, wherein the insulating member is made of any one of resin, glass, silica, zirconia, and ceramic while including the plurality of micro-pores.

9. The test socket of claim 8, wherein the resin is any one of rubber, polymethylmethacrylate, polyethylene, phenolic, epoxy, novolac.

10. The test socket of claim 1, wherein the insulating member is configured such that the probe is positioned coaxially with the through-hole in the vertical direction.

11. The test socket of claim 10, wherein said insulating member comprises:

an upper insulating member having an upper fitting hole coaxially penetrating a center axis of the through hole and fitted to the through hole; and

a lower insulating member having a lower fitting hole coaxially penetrating a central axis of the through hole and fitted to the through hole;

wherein the probe is fitted in the upper side fitting hole and the lower side fitting hole and positioned coaxially with the through hole.

12. The test socket of claim 11, wherein said probe comprises:

an upper plunger which contacts the device to be tested and moves through the upper mating hole;

a lower plunger contacting the detecting means and moving through the lower fitting hole;

a sleeve that supports the upper plunger and the lower plunger so that the upper plunger and the lower plunger can move in the vertical direction and fit in the upper fitting hole and the lower fitting hole; and

an elastic member is provided between the upper plunger and the lower plunger in the sleeve.

13. The test socket of claim 12, wherein the elastic member is made of a plurality of conductive particles that are conductively contactable in the vertical direction and an elastic substance that holds the plurality of conductive particles in the vertical direction.

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