CN115014713A - Ultraviolet parallel light detection device and detection method for micro-channel plate collimator - Google Patents
Ultraviolet parallel light detection device and detection method for micro-channel plate collimator Download PDFInfo
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- CN115014713A CN115014713A CN202210518269.3A CN202210518269A CN115014713A CN 115014713 A CN115014713 A CN 115014713A CN 202210518269 A CN202210518269 A CN 202210518269A CN 115014713 A CN115014713 A CN 115014713A
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- collimator
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/04—Optical benches therefor
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Abstract
The invention discloses an ultraviolet parallel light detection device and a detection method for a microchannel plate collimator. According to the invention, the ultraviolet light is used for replacing X rays, so that the problem that the X rays are difficult to generate parallel light is avoided, and the size of equipment is further reduced; ultraviolet rays are not radiated, so that the defect of long detection period caused by X-ray radiation is avoided, and the danger of personnel exposure is reduced; the invention has the advantages of simple structure, convenient operation, high detection result precision, high safety and low cost, and can effectively improve the operation efficiency.
Description
Technical Field
The invention relates to the technical field of ultraviolet imaging devices, in particular to an ultraviolet parallel light detection device and a detection method for a collimator of a microchannel plate.
Background
The capillary lead glass microchannel plate is a lead glass panel which is fully distributed with a micro through hole array and is generally used as an X-ray optical component, and is also called a capillary collimator. Before the microchannel plate is applied, each microchannel plate needs to be detected, and the parameters of the microchannel plate are ensured to meet the use requirements.
The existing detection method for the microchannel plate adopts a beam line detection device, and the beam line detection device utilizes X-ray parallel light to carry out detection by incidence at different angles, but the detection method has more technical problems. Firstly, the size of the beam line detection device is large, in order to ensure the parallelism of X rays, the size of the beam line detection device is more than one hundred meters, the beam line detection device is large in size and high in cost, and cannot be constructed in a large quantity, secondly, the strong radiation performance of the X rays is realized, when the X rays are used for detection, the detection device needs to be shielded, and the radiation characteristic of the X rays and the shielding device can cause that operators cannot realize high-efficiency operation, and the operators can be more easily irradiated by the X rays due to long-time operation.
The invention provides an ultraviolet parallel light detection device and a detection method for a micro-channel plate collimator, which solve the problems.
Disclosure of Invention
The invention provides an ultraviolet parallel light detection device and a detection method for a micro-channel plate collimator, which solve the technical problem of detection by adopting X rays in the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a micro-channel plate collimator ultraviolet parallel light detection device comprises an ultraviolet light source, an objective table, a collimator and an ultraviolet power meter, wherein the collimator is arranged on the objective table, the ultraviolet light source and the ultraviolet power meter are respectively arranged on the front side and the rear side of the collimator, and the ultraviolet light source, the collimator and the ultraviolet power meter are located on the same axis;
the ultraviolet light source comprises a light source, a single-mode fiber and a fiber collimator, the light source is connected with the fiber collimator through the single-mode fiber, and the fiber collimator emits parallel ultraviolet light.
Further, the wavelength range of the ultraviolet light emitted by the light source is 288-338 nm.
Further, the detection indexes of the collimator comprise pointing accuracy, an opening area ratio and a field of view, wherein the pointing accuracy comprises hole-hole parallelism and hole-surface perpendicularity.
Further, the stage has motion in both horizontal rotation and vertical pitch dimensions.
Further, the distance between the optical fiber collimator and the ultraviolet power meter is not less than 150 mm.
Further, the divergence angle of the ultraviolet light emitted by the fiber collimator is not more than 9.7 ".
Preferably, the light source is an ultraviolet LED light source.
A detection method of a micro-channel plate collimator ultraviolet parallel light detection device comprises the following steps:
s1, system preparation: according to the requirement of measurement accuracy, adjusting the relative positions of the ultraviolet light source and the ultraviolet light power meter, and ensuring that the ultraviolet light source and the ultraviolet light power meter are positioned on the same axis;
s2, calibration measurement: when the collimator is not placed, the ultraviolet light power meter receives the light intensity of the ultraviolet light source as calibration data;
s3, placing a collimator: placing a collimator on the objective table, and adjusting the ultraviolet light source, the collimator and the ultraviolet power meter to be positioned on the same axis;
s4, X-direction measurement: controlling the object stage to rotate along the X direction, wherein the rotating step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter to obtain the relation between the ultraviolet light intensity and the angle in the X direction;
s5, X-direction reset: rotating the object stage to an angle with the maximum ultraviolet light intensity in the X direction;
s6, Y-direction measurement: keeping the angle in the X direction unchanged, driving the two-dimensional turntable to rotate along the Y direction, wherein the rotation step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter to obtain the relation between the ultraviolet light intensity and the angle in the Y direction;
s7, process data: and fitting the ultraviolet light intensity-angle relation in the Y direction to obtain a rocking curve.
Further, the peak height of the rocking curve in step S7 represents the opening area ratio parameter of the collimator; the angle corresponding to the peak value represents the pointing precision parameter; the full width at half maximum of the spectral line characterizes the field angle parameter.
The invention has the following beneficial effects:
the ultraviolet light is used for replacing X rays, so that the problem that the X rays are difficult to generate parallel light is avoided, and the size of equipment is reduced; ultraviolet rays are not radiated, so that the defect of long detection period caused by X-ray radiation is avoided, and the danger of personnel exposure is reduced;
the invention has the advantages of simple structure, convenient operation, high detection result precision, high safety and low cost, and can effectively improve the operation efficiency.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention;
FIG. 2 is a schematic diagram of the UV rocking curve of the present invention.
Reference numerals are as follows: 1-ultraviolet light source, 11-light source, 12-single mode fiber, 13-fiber collimator, 2-object stage, 3-collimator and 4-ultraviolet light power meter.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the specification, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
The existing X-ray detection microchannel plate collimator is applied to a detection satellite for detecting X-rays, and in order to ensure that the result is accurate and reliable, the X-rays are adopted in the prior art to carry out detection operation on the microchannel plate collimator. For example, the prior art adopts a method of extending the optical path L, and the beam lengths of currently used beam line detection apparatuses are 500m, 120m, and 103m, respectively.
When the optical characteristics of the collimator of the microchannel plate are analyzed and detected, the detection of the collimator of the microchannel plate has high ultraviolet absorptivity, and the light absorptivity is greater than 97% in the sensitive wavelength range of the collimator of the microchannel plate to ultraviolet rays, so that the collimator of the microchannel plate is detected by adopting ultraviolet light, the detection efficiency is improved, and the precision of a detection result is ensured to meet the use requirement. And ultraviolet parallel light is easier to obtain, and the ultraviolet light source is generally incident to the surface of the reflector at a specific position through the single-mode fiber, so that the reflected parallel light can be obtained.
As shown in fig. 1, the ultraviolet parallel light detection device for the microchannel plate collimator comprises an ultraviolet light source 1, an object stage 2, a collimator 3 and an ultraviolet power meter 4, wherein the collimator 3 is arranged on the object stage 2, the ultraviolet light source 1 and the ultraviolet power meter 4 are respectively arranged on the front side and the rear side of the collimator 3, and the ultraviolet light source 1, the collimator 3 and the ultraviolet power meter 4 are located on the same axis.
After the ultraviolet irradiation, the ultraviolet ray irradiated on the collimator 3 body is absorbed, and the ultraviolet ray injected into the through hole of the collimator 3 can pass through the through hole and then be received by the ultraviolet light power meter 4 to obtain the luminous flux, through changing the irradiation angle of the ultraviolet ray, the incident angle of the ultraviolet ray entering the through hole is different, so that the ultraviolet ray passes through different reflection times in the through hole, the reflection times are more, the intensity of the ultraviolet ray is lower, the luminous flux received by the ultraviolet light power meter 4 is different, and finally, an ultraviolet ray swing curve is obtained.
The ultraviolet light source 1 comprises a light source 11, a single-mode fiber 12 and a fiber collimator 13, wherein the light source 11 is connected with the fiber collimator 13 through the single-mode fiber 12, and the fiber collimator 13 emits parallel ultraviolet light.
Furthermore, the wavelength range of the ultraviolet light emitted by the light source 11 is 288-338nm, and the transmittance of the collimator 3 to the ultraviolet light in the wavelength range is lower than 2%, so that the measurement requirement can be met.
Further, the detection indexes of the collimator 3 include pointing accuracy including hole-hole parallelism and hole-plane perpendicularity, an opening area ratio, and a field of view. The hole-hole parallelism is the parallelism between the micropores, and the expected value is 0'; the hole-plane perpendicularity is the perpendicular degree between the micropores and the mounting surface, and the expected value is 90 degrees; the ratio of the opening area is the proportion of the area of the micropores in the total area; the field of view is an area that can be effectively observed, and is the field angle θ.
Furthermore, be equipped with the through-hole on the objective table 2, collimator 3 establishes in the through-hole department of objective table 2, objective table 2 has horizontal rotation and the ascending action of vertical every single move two-dimensional direction, and horizontal rotation is used for realizing the rotation of X to, and vertical every single move is used for realizing the rotation of Y to.
Further, the distance between the fiber collimator 13 and the ultraviolet power meter 4 is not less than 150 mm.
Further, the divergence angle of the ultraviolet light emitted by the optical fiber collimator 13 is not more than 9.7 ″, and the calculation formula of the reflection divergence angle of the optical fiber collimator 13 is as follows:
in the formula, RFL is 50.8mm, MFD of the single-mode fiber 12 is 2.0-2.4 um, and the divergence angle is not more than 9.7' and meets the precision requirement of detection.
Preferably, the parallelism of the ultraviolet light emitted by the fiber collimator 13 is not more than 20 arcsec.
Preferably, the light source 11 is an ultraviolet LED light source, and the ultraviolet power meter 4 is a photomultiplier tube.
As shown in fig. 2, a detection method of an ultraviolet parallel light detection device of a microchannel plate collimator includes the following steps:
s1, system preparation: according to the requirement of measurement accuracy, adjusting the relative positions of the ultraviolet light source 1 and the ultraviolet light power meter 4, and ensuring that the ultraviolet light source and the ultraviolet light power meter are positioned on the same axis;
s2, calibration measurement: when the collimator 3 is not placed, the ultraviolet power meter 4 receives the light intensity of the ultraviolet light source 1 as calibration data;
s3, placing a collimator: placing a collimator 3 on the objective table 2, and adjusting the ultraviolet light source 1, the collimator 3 and the ultraviolet power meter 4 to be positioned on the same axis;
s4, X-direction measurement: controlling the object stage 2 to rotate along the X direction, wherein the rotation step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter 4 to obtain the relation between the ultraviolet light intensity and the angle in the X direction;
s5, X-direction reset: rotating the object stage 2 to an angle with the maximum ultraviolet light intensity in the X direction;
s6, Y-direction measurement: keeping the angle in the X direction unchanged, driving the two-dimensional turntable to rotate along the Y direction, wherein the rotation step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter 4 to obtain the relation between the ultraviolet light intensity and the angle in the Y direction;
s7, process data: and fitting the ultraviolet light intensity-angle relation in the Y direction to obtain a rocking curve.
The X-direction measurement is performed to find the angle with the maximum X-direction light intensity, and then the Y-direction measurement is performed on the angle with the maximum X-direction light intensity, so that the accuracy of the result is ensured.
Further, the peak height of the ultraviolet light rocking curve in step S7 represents the opening area ratio parameter of the collimator; the angle corresponding to the peak value represents the pointing precision parameter; the full width at half maximum of the spectral line characterizes the field angle parameter.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Claims (9)
1. The ultraviolet parallel light detection device of the micro-channel plate collimator is characterized by comprising an ultraviolet light source (1), an objective table (2), a collimator (3) and an ultraviolet power meter (4), wherein the collimator (3) is arranged on the objective table (2), the ultraviolet light source (1) and the ultraviolet power meter (4) are respectively arranged on the front side and the rear side of the collimator (3), and the ultraviolet light source (1), the collimator (3) and the ultraviolet power meter (4) are positioned on the same axis;
ultraviolet light source (1) includes light source (11), single mode fiber (12) and fiber collimator (13), light source (11) are connected with fiber collimator (13) through single mode fiber (12), fiber collimator (13) launch parallel ultraviolet light.
2. The ultraviolet parallel light detection device of the micro-channel plate collimator, as claimed in claim 1, wherein: the wavelength range of the ultraviolet light emitted by the light source (11) is 288-338 nm.
3. The ultraviolet parallel light detection device of the micro-channel plate collimator, as claimed in claim 1, wherein: the detection indexes of the collimator (3) comprise pointing accuracy, opening area ratio and field of view, wherein the pointing accuracy comprises hole-hole parallelism and hole-surface perpendicularity.
4. The ultraviolet parallel light detection device of the micro-channel plate collimator, as claimed in claim 1, wherein: the object stage (2) has horizontal rotation and vertical pitching two-dimensional directions.
5. The ultraviolet parallel light detection device of the micro-channel plate collimator, as claimed in claim 1, wherein: the distance between the optical fiber collimator (13) and the ultraviolet power meter (4) is not less than 150 mm.
6. The ultraviolet parallel light detection device of the micro-channel plate collimator, as claimed in claim 1, wherein: the divergence angle of the ultraviolet light emitted by the optical fiber collimator (13) is not more than 9.7'.
7. The ultraviolet parallel light detection device of the micro-channel plate collimator as claimed in claim 1, wherein: the light source (11) is an ultraviolet LED light source.
8. The detection method of the ultraviolet parallel light detection device of the micro-channel plate collimator, which is characterized by comprising the following steps of:
s1, system preparation: according to the requirement of measurement accuracy, adjusting the relative positions of the ultraviolet light source (1) and the ultraviolet light power meter (4) and ensuring that the ultraviolet light source and the ultraviolet light power meter are positioned on the same axis;
s2, calibration measurement: when the collimator (3) is not placed, the ultraviolet power meter (4) receives the light intensity of the ultraviolet light source (1) as calibration data;
s3, placing a collimator: placing a collimator (3) on the objective table (2), and adjusting the ultraviolet light source (1), the collimator (3) and the ultraviolet light power meter (4) to be positioned on the same axis;
s4, X-direction measurement: controlling the object stage (2) to rotate along the X direction, wherein the rotating step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter (4) to obtain the relation between the intensity and the angle of the ultraviolet light in the X direction;
s5, X-direction reset: rotating the objective table (2) to an angle with the maximum ultraviolet light intensity in the X direction;
s6, Y-direction measurement: keeping the angle in the X direction unchanged, driving the two-dimensional turntable to rotate along the Y direction, wherein the rotation step length is 1', and receiving ultraviolet light on each graduation through an ultraviolet light power meter (4) to obtain the relation between the ultraviolet light intensity and the angle in the Y direction;
s7, process data: and fitting the ultraviolet light intensity-angle relation in the Y direction to obtain a rocking curve.
9. The detection method of the ultraviolet parallel light detection device of the micro-channel plate collimator as claimed in claim 8, wherein: the peak height of the rocking curve in step S7 represents the opening area ratio parameter of the collimator; the angle corresponding to the peak value represents the pointing precision parameter; the full width at half maximum of the spectral line characterizes the field angle parameter.
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| CN202210518269.3A CN115014713A (en) | 2022-05-13 | 2022-05-13 | Ultraviolet parallel light detection device and detection method for micro-channel plate collimator |
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| CN202210518269.3A CN115014713A (en) | 2022-05-13 | 2022-05-13 | Ultraviolet parallel light detection device and detection method for micro-channel plate collimator |
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2022
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| JPS63187144A (en) * | 1987-01-30 | 1988-08-02 | Seiko Instr & Electronics Ltd | Space resolving spectrometer using collimator |
| US6624431B1 (en) * | 1999-07-21 | 2003-09-23 | Jmar Research, Inc. | High collection angle short wavelength radiation collimator and focusing optic |
| US20060093292A1 (en) * | 2004-11-04 | 2006-05-04 | Palo Alto Research Center Incorporated | Elastic microchannel collimating arrays and method of fabrication |
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| CN210037146U (en) * | 2019-06-18 | 2020-02-07 | 南京杉捷鑫电气科技有限公司 | Micro-channel plate and fluorescent screen dynamic testing device |
| CN211014002U (en) * | 2019-11-19 | 2020-07-14 | 西安中科英威特光电技术有限公司 | Spectrometer based on electric vacuum device |
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