JPS63187144A - Space resolving spectrometer using collimator - Google Patents

Abstract

PURPOSE:To facilitate mounting, to freely set the size of a collimator and to enhance resolving power, by using a combination optical system composed of a hollow fibrous flux collimator and a plane Bragg type diffraction meter. CONSTITUTION:An optical system is formed of a combination of a hollow fibrous flux collimator 2 and a plane Bragg type diffraction meter 3 and the wavelength light of a gamma-ray region is converged from the vacuum ultraviolet rays from a radiation source 1 by the collimator 2 to become parallel beam and, when order, a wavelength, the spacing of the diffraction meter, an oblique incident angle thetaB or the like satisfy a predetermined condition in the plane Bragg type diffraction meter 3, said parallel beam is reflected from the diffraction meter 3 and a two-dimensional image 4 having space and spectrum resolving power is obtained in a detection system by the reflected beam. By this constitution, the mounting of the optical system becomes easy and the size of the collimator can be made free and the correspondence to various radiation source and specimens having various sizes can be realized while an aperture is large and dose take-in quantity is much and resolving power is enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a spatially resolved spectrometer that can obtain two-dimensional images with spatial and spectral resolution in the wavelength range from vacuum ultraviolet rays to gamma rays. The present invention has a wide range of applications such as high temperature plasma diagnosis and physical property and material testing that require spatial resolution.

[Summary of the invention]

The present invention uses a collimator consisting of an optical system that combines a hollow fibrous beam collimator that is approximately equal to the radiation source in the wavelength range from vacuum ultraviolet rays to gamma rays, a flat Bragg diffractometer, and a detection system that detects the collimator. By using a spatially resolved spectrometer, we can now combine the spatially resolved spectroscopy and two-dimensional images that were previously obtained independently.
It can be obtained with two types of equipment.

The features of a spatially resolved spectrometer using this collimator are: (1) The optical system can be simplified and installation is easy.

(2) Since the hollow fiber bundle collimator can be of any size, it can be applied to various types of radiation sources and samples of various sizes.

etc. are mentioned. Furthermore, by using a bundle of hollow conduits with a diameter of 50 μm or less on a glass plate containing lead or other heavy metals as the collimator for the hollow fiber bundle, and by using a multilayer spectroscopic crystal as the planar Bragg diffractometer, energy loss can be reduced. A spatially resolved spectrometer with high resolution can be obtained.

[Conventional technology]

Conventionally, two-dimensional images and spatially resolved spectroscopy have been obtained using separate methods. A typical method for obtaining a 1:1 two-dimensional image is to use a filter and a pinhole. On the other hand, in order to perform spatially resolved spectroscopy, combinations of crystals or combinations of slits and crystals have been used.

(Problems to be solved by the invention) In this way, the conventional method uses separate optical systems for obtaining two-dimensional images and spatially resolved spectroscopy.As a result, two simultaneous pieces of information can be obtained. It has the disadvantage that it takes time to obtain two pieces of information.In addition, it is difficult to set up the optical system because a pinhole or slit is used, and the resolution is not sufficient because the amount of absorbed dose is small. There were drawbacks.

[Means for solving problems]

The present invention has been made to eliminate the above-mentioned drawbacks, and uses a hollow fibrous beam bundle as a collimator in the wavelength range from vacuum ultraviolet rays to gamma rays to create a parallel beam with an area equal to the area of the radiation source. Another object of the present invention is to provide a spatially resolved spectrometer that can obtain a two-dimensional image using reflection from a planar Bragg diffractometer.

[Effect]

A spatially resolved spectrometer whose source wavelength is in the range from vacuum ultraviolet rays to gamma rays uses a collimator consisting of an optical system that combines a hollow fibrous beam collimator and a flat Bragg diffractometer, and a detection system that detects the optical system. This is a spatially resolved spectrometer that can obtain two-dimensional images. This has a simple optical system and is easy to install.

In addition, since it is a hollow fibrous beam collimator, the size can be adjusted freely, so it can be applied to various types of radiation sources and samples of various sizes, and the collimator's large aperture area allows for high resolution. .

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a configuration diagram of a spatially resolved spectrometer using a collimator according to the present invention. A radiation source in the wavelength range specified in the present invention, such as X-rays, is converted into a parallel beam by a hollow fiber bundle, and in a flat Bragg diffractometer, nλ=2ds inθ.

n: order λ: wavelength d: interplanar spacing θI of planar Bragg diffractometer: reflected only when the oblique incidence angle is satisfied, and a two-dimensional image is obtained in the detection system.

The spatial resolution is determined by l×Δθ1, where the distance from the radiation source to the detection unit is 2, and the divergence of the hollow fiber bundle when passing through a collimator is Δθ.

This means that the hollow resolution is dependent on the position of the collimator.

Embodiment 1 FIG. 2 is an explanatory diagram showing an embodiment of a spatially resolved spectrometer using a collimator according to the present invention. In Figure 2,
Reference numeral 5 denotes accelerated electrons for excitation, and a sample target 6 collided with the accelerated electrons generates X-rays. 2 is a hollow fibrous wire bundle collimator, and this collimator 2 has xN! Aa
The X-rays are made into a parallel beam with an area equal to . The collimated X-ray beam is reflected by a planar Bragg diffractometer 7 according to Bragg diffraction conditions, and detected by a camera 5. The sample target 6 used was made of two types of metals as shown in FIG. 3 and had a thickness of about 10 μm.

The XvA source is a foil target X&1 tube. The hollow fibrous wire bundle has a diameter of about 10 μm, a length of 2 mm, and an interval between conduits of 15 μm. For a planar Bragg diffractometer, L
i F (200) 7 was used. An X-ray image with no resolution is obtained for 8(a+).If a LiF crystal is thefted at the Bragg angle of the element contained in the sample target, only the elements that meet the Bragg condition will be 8(b) or 8(C). ) etc.

The spatial resolution is 77 fins from the X-ray source to the film;
Since the divergence of the line beam is 6 mrad, it is calculated to be about 0.5 cranes, and the actual measurement was about the same.

The above explanation describes LiF as a planar Bragg diffractometer in a spatially resolved spectrometer using a collimator according to the present invention.
Although a crystal was used and transmitted X-rays were used as the X-ray source, resolution can be improved by using a multilayer spectroscopic crystal as a planar Bragg diffractometer. Furthermore, any type of radiation source can be used in the wavelength range specified by the present invention.

(Effects of the Invention) As described above, the spatially resolved spectrometer using a collimator according to the present invention uses an optical system that combines a hollow fibrous beam collimator and a flat Brang type diffractometer, so it has spatial and spectral resolution. A two-dimensional image can be obtained, the optical system can be simplified, and installation is easy. Furthermore, since the hollow fiber bundle collimator can be of any size, it can be applied to various types of radiation sources and samples of various sizes. Furthermore, since the amount of absorbed dose is large, there is an advantage that high-resolution spatially resolved spectroscopy can be obtained.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram showing the configuration of a spatially resolved spectrometer using a collimator according to the present invention, Fig. 2 is an explanatory diagram showing an embodiment of the present invention, and Fig. 3 is an enlarged front view of a sample target. be. ■...Radiation source 2...Hollow fibrous beam collimator 3...Plane Bragg diffractometer 4...Two-dimensional image 5...X-ray tube 6...Sample target 7... L i F (200) 8...Camera (film) and above

Claims (3)

[Claims] (1) The source wavelength of the sample is in the range from vacuum ultraviolet rays to gamma rays, and it is characterized by an optical system that combines a hollow fibrous beam collimator and a flat Bragg diffractometer, and a detection system that detects the optical system. A spatially resolved spectrometer using a collimator. (2) The collimator for the hollow fibrous wire bundle is made of a bundle of hollow conduits of 50 μm or less in diameter on a glass plate containing lead or other heavy metals. A spatially resolved spectrometer. (3) A spatially resolving spectrometer using a collimator according to claim 1, wherein the planar Bragg diffractometer is made of a multilayer spectroscopic crystal.