CN115015295A - X-ray detection device and method for micro-channel plate collimator - Google Patents
X-ray detection device and method for micro-channel plate collimator Download PDFInfo
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- CN115015295A CN115015295A CN202210518495.1A CN202210518495A CN115015295A CN 115015295 A CN115015295 A CN 115015295A CN 202210518495 A CN202210518495 A CN 202210518495A CN 115015295 A CN115015295 A CN 115015295A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/316—Accessories, mechanical or electrical features collimators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/401—Imaging image processing
Abstract
The invention discloses an X-ray detection device and a detection method for a collimator of a microchannel plate, and the X-ray detection device comprises an X-ray source, an objective table, the collimator, an X-ray camera and a shielding device, wherein the objective table is provided with a through hole, the collimator is arranged on the objective table and positioned at the rear side of the objective table, the X-ray source and the X-ray camera are respectively arranged at the front and rear parts of the collimator, and the X-ray source, the collimator and the X-ray camera are positioned on the same axis. The detection device of the invention obviously shortens the distance between the X-ray source and the X-ray camera, thereby reducing the volume of the detection device and lowering the cost; the use method can obtain a two-dimensional swing curve through one-time measurement, and the light source distance is short, the particle flux is large, the single measurement time is short, the detection operation efficiency is effectively improved, and meanwhile, the danger of personnel exposure is reduced.
Description
Technical Field
The invention relates to the technical field of X-ray optical imaging devices, in particular to an X-ray detection device and a detection method for a microchannel plate collimator.
Background
A capillary lead glass microchannel plate is a lead glass panel that is covered with an array of tiny through holes, and is generally used as an X-ray optical component. Before the microchannel plate is applied, each microchannel plate needs to be detected, and the parameters of the microchannel plate are ensured to meet the use requirements.
The existing detection methods for the microchannel plate all adopt X-ray parallel light to carry out detection by incidence at different angles, and because the X-ray parallel light is difficult to obtain, the existing common method is to prolong the light path, so that the size of a common beam line detection device is longer. The specific detection method of the beam line detection device is to perform angle scanning on two dimensions, draw a rocking curve and then analyze the rocking curve to obtain a result. However, the detection device and the detection method have the big problems, and the beam line detection device has the defects of large volume and high cost; during detection, each angle needs to count enough time or accumulate enough counts, so that the accuracy of the result can be guaranteed, the consumed time is long, meanwhile, the X-ray can also influence the personal health of detection personnel through multiple long-time detections, even if the protection is enhanced, the cost is seriously increased, and the harm caused by multiple tests can not be avoided.
The invention provides an X-ray detection device and a detection method for a micro-channel plate collimator, which solve the problems.
Disclosure of Invention
The invention provides an X-ray detection device and a detection method for a micro-channel plate collimator, which reduce the volume of the detection device and realize one-time imaging and simultaneously meet the detection requirements.
The technical scheme adopted by the invention for solving the technical problems is as follows:
an X-ray detection device for a collimator of a microchannel plate comprises an X-ray source, an object stage, a collimator, an X-ray camera and a shielding device, wherein the object stage is provided with a through hole;
the X-ray source emits a point light source, the X-ray camera receives X-rays and images, the distance between the X-ray source and the X-ray camera is L, and the distance L is determined by adopting the following formula:
tg(θ)＝d/L
where θ is the angular resolution of the system measurement and d is the pixel size of the X-ray camera.
Further, the detection indexes of the collimator comprise pointing accuracy, an opening area ratio and a field of view, wherein the pointing accuracy comprises hole-hole parallelism and hole-surface perpendicularity.
Further, the imaging result of the X-ray camera is a circle with gradually dimming brightness from the center to the outside.
A use method of an X-ray detection device of a microchannel plate collimator comprises the following steps:
s1, system preparation: adjusting the relative positions of the X-ray source, the objective table and the X-ray camera according to the requirement of measurement precision, ensuring that the X-ray source, the objective table and the X-ray camera are positioned on the same axis, and installing a collimator after the adjustment is finished;
s2, connecting system: connecting the X-ray source, the objective table and the X-ray camera with a test system;
s3, test: operating an X-ray source and an X-ray camera, and receiving and imaging the X-ray by the X-ray camera;
s4, result conversion: and converting the virtual original image imaged by the X-ray camera to obtain a PicC brightness distribution three-dimensional graph, obtaining a parameter index of the collimator according to the PicC brightness distribution three-dimensional graph, and comparing the parameter index with an expected value.
Further, in step S4, the spatial coordinate of the horizontal direction of the three-dimensional map of the PicC luminance distribution is the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is an opening area ratio parameter of the collimator; the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is a pointing precision parameter of the collimator, and the half width height of the peak value of the PicC brightness distribution three-dimensional graph is a field-of-view parameter of the collimator.
The invention has the following beneficial effects:
the detection device obviously shortens the distance between the X-ray source and the X-ray camera, thereby reducing the volume of the detection device and lowering the cost;
a two-dimensional swing curve can be obtained through one-time measurement, the light source distance is short, the particle flux is large, the single-time measurement time is short, the detection operation efficiency is effectively improved, and meanwhile, the danger of personnel exposure is reduced;
the invention has the advantages of simple structure, simple and convenient operation and high detection result precision, has higher safety and lower cost, and effectively improves the operation efficiency.
Drawings
FIG. 1 is a schematic view of the apparatus of the present invention;
FIG. 2 is a schematic diagram of a virtual original image according to the present invention;
FIG. 3 is a three-dimensional graphical illustration of the PicC luminance distribution of the present invention;
fig. 4 is a schematic diagram of a rocking curve of the prior art.
Reference numerals: 1-X-ray source, 2-objective table, 3-collimator, 4-X camera.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the specification, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
When the existing beam line device is used for detection, a sample is placed on a high-precision rotary table, the transmission efficiency is measured at different inclination angles, then the number of X-ray particles penetrating through the sample is counted, and a two-dimensional rocking curve is drawn, wherein the peak height of the rocking curve is the opening area ratio; the peak coordinate is the pointing accuracy; the width at half height of the peak is the field of view. However, the device has larger volume and higher precision, and the optical path length of the device is in the hundred meter level; the optical path length is in the meter level, and the precision requirement of detection cannot be completely met due to the limitation of precision and structure. Meanwhile, the devices have the common defect that angle scanning needs to be carried out on two dimensions, each angle needs to count enough time or accumulate enough counts to draw a rocking curve, so that the test time is long, and the measurement result of each inclination angle has statistical significance, so that the measurement time cannot be shortened.
As shown in fig. 1, 2, 3, and 4, an X-ray detection device for a microchannel plate collimator includes an X-ray source 1, an object stage 2, a collimator 3, an X-ray camera 4, and a shielding device, where the object stage 2 is provided with a through hole, the collimator 3 is arranged on the object stage 2 and located at the rear side of the object stage 2, the X-ray source 1 and the X-ray camera 4 are respectively arranged at the front and rear of the collimator 3, and the X-ray source 1, the collimator 3, and the X-ray camera 4 are located on the same axis;
the X-ray source 1 is a micro-focus X-ray source and is used for emitting a point light source, the X-ray camera receives X-rays and images, the distance between the X-ray source 1 and the X-ray camera 4 is L, and the distance of the L is determined by adopting the following formula:
tg(θ)＝d/L
where θ is the angular resolution of the system measurement and d is the pixel size of the X-ray camera.
The principle of the invention is as follows: a point light source is emitted through an X-ray source 1 to form divergent light, the emitted X-rays are received by an X-ray camera 4 after passing through a collimator 3, a circular imaging result is formed on the X-ray camera 4, then an original image obtained by the X-ray camera 4 is converted to obtain a virtual image, and further corresponding parameter data are obtained. According to the X-ray particle imaging device, a large number of X-ray particles are emitted at one time through the point light source, and due to the fact that the L value is small, an image can be formed on the X-ray camera 4 through one-time emission measurement, an imaging result can be obtained through image calculation, and the X-ray particle imaging device is quicker in comparison with an existing detection mode.
Preferred embodiments of the present invention are those wherein d is 10.8um, L is 331.8mm, and θ is 6.7 arcsec. Compared with a wire bunching device with the length of 103 meters, the optical path length of the device is 331.8mm, and the optical path distance is greatly shortened; compared with a beam line device with the length of 1m, the detection precision of the device is 6.7arc seconds, and the precision is higher.
Further, the detection indexes of the collimator 3 include pointing accuracy including hole-hole parallelism and hole-plane perpendicularity, an opening area ratio, and a field of view. The hole-hole parallelism is the parallelism between the micropores, and the expected value is 0'; hole-to-surface perpendicularity is the degree of perpendicularity between the micro-hole and the mounting surface. The expected value is 90 °; the ratio of the opening area is the proportion of the area of the micropores in the total area; the field of view is an area that can be effectively observed, and is the field angle θ.
Further, the imaging result of the X-ray camera is a circle with maximum central brightness and gradually darkened outwards.
A detection method of an X-ray detection device of a micro-channel plate collimator comprises the following steps:
s1, system preparation: according to the requirement of measurement accuracy, adjusting the relative positions of the X-ray source 1, the objective table 2 and the X-ray camera 4, ensuring that the X-ray source, the objective table and the X-ray camera are positioned on the same axis, and installing a collimator 3 after the adjustment is finished;
s2, connecting system: connecting the X-ray source 1, the objective table 2 and the X-ray camera 4 with a test system;
s3, test: operating the X-ray source 1 and the X-ray camera 4, and receiving and imaging the X-ray by the X-ray camera 4;
s4, result conversion: and converting the virtual original image imaged by the X-ray camera 4 to obtain a PicC brightness distribution three-dimensional graph, obtaining a parameter index of the collimator 3 according to the PicC brightness distribution three-dimensional graph, and comparing the parameter index with an expected value.
Further, in step S4, the spatial coordinate of the horizontal direction of the three-dimensional map of the PicC luminance distribution is the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is the opening area ratio parameter of the collimator 3; the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is the pointing precision parameter of the collimator 3, and the half width height of the peak value of the PicC brightness distribution three-dimensional graph is the field of view parameter of the collimator 3.
Further, in step S3, the operation of eliminating the systematic error of the pointing accuracy is as follows: firstly, measuring once to obtain an imaging result, rotating 180 degrees along the mounting surface after obtaining a circle center coordinate A, then measuring once to obtain an imaging result, and obtaining a circle center coordinate B, wherein (A + B)/2 is a system error; (A-B)/2 is the absolute pointing accuracy value of the collimator 3.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Claims (5)
1. An X-ray detection device for a microchannel plate collimator is characterized by comprising an X-ray source (1), an object stage (2), a collimator (3), an X-ray camera (4) and a shielding device, wherein the object stage (2) is provided with a through hole, the collimator (3) is arranged on the object stage (2) and is positioned at the rear side of the object stage (2), the X-ray source (1) and the X-ray camera (4) are respectively arranged at the front and rear of the collimator (3), and the X-ray source (1), the collimator (3) and the X-ray camera (4) are positioned on the same axis;
the X-ray source (1) emits a point light source, the X-ray camera receives X-rays and images, the distance between the X-ray source (1) and the X-ray camera (4) is L, and the distance L is determined by adopting the following formula:
tg(θ)＝d/L
where θ is the angular resolution of the system measurement and d is the pixel size of the X-ray camera.
2. The microchannel plate collimator X-ray inspection apparatus as claimed in claim 1, wherein the inspection indexes of the collimator (3) include pointing accuracy, including hole-hole parallelism and hole-plane perpendicularity, an opening area ratio, and a field of view.
3. The apparatus as claimed in claim 1, wherein the image of the X-ray camera is a circle with gradually dimming brightness from the center to the outside.
4. The detection method of the X-ray detection device of the microchannel plate collimator as set forth in any one of claims 1 to 3, comprising the steps of:
s1, system preparation: according to the requirement of measurement accuracy, adjusting the relative positions of an X-ray source (1), an objective table (2) and an X-ray camera (4), ensuring that the X-ray source, the objective table and the X-ray camera are positioned on the same axis, and installing a collimator (3) after the adjustment is finished;
s2, connecting system: connecting the X-ray source (1), the objective table (2) and the X-ray camera (4) with a test system;
s3, test: operating the X-ray source (1) and the X-ray camera (4), wherein the X-ray camera (4) receives X-rays and images;
s4, result conversion: and converting the virtual original image imaged by the X-ray camera (4) to obtain a PicC brightness distribution three-dimensional graph, obtaining a parameter index of the collimator (3) according to the PicC brightness distribution three-dimensional graph, and comparing the parameter index with an expected value.
5. The detection method of the X-ray detection device of the microchannel plate collimator as claimed in claim 4, wherein: in step S4, the spatial coordinate of the horizontal direction of the PicC luminance distribution three-dimensional graph is the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is the opening area ratio parameter of the collimator (3); the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is the pointing precision parameter of the collimator (3), and the half width height of the peak value of the PicC brightness distribution three-dimensional graph is the view field parameter of the collimator (3).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210518495.1A CN115015295A (en) | 2022-05-13 | 2022-05-13 | X-ray detection device and method for micro-channel plate collimator |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210518495.1A CN115015295A (en) | 2022-05-13 | 2022-05-13 | X-ray detection device and method for micro-channel plate collimator |
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| CN115015295A true CN115015295A (en) | 2022-09-06 |
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| CN202210518495.1A Pending CN115015295A (en) | 2022-05-13 | 2022-05-13 | X-ray detection device and method for micro-channel plate collimator |
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- 2022-05-13 CN CN202210518495.1A patent/CN115015295A/en active Pending
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