CN114985906B - Laser scanning optical system and method based on rotary three optical wedges - Google Patents
Laser scanning optical system and method based on rotary three optical wedges Download PDFInfo
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- CN114985906B CN114985906B CN202210751295.0A CN202210751295A CN114985906B CN 114985906 B CN114985906 B CN 114985906B CN 202210751295 A CN202210751295 A CN 202210751295A CN 114985906 B CN114985906 B CN 114985906B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 20
- 229920000535 Tan II Polymers 0.000 claims description 7
- 238000003754 machining Methods 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 9
- 238000005553 drilling Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000004080 punching Methods 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/108—Scanning systems having one or more prisms as scanning elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention relates to a laser scanning optical system and a method based on a rotary three-optical wedge, which belong to the technical field of laser application and comprise a first wedge-shaped mirror, a second wedge-shaped mirror, a third wedge-shaped mirror and a focusing mirror which are sequentially arranged along the incidence direction of light, wherein the first wedge-shaped mirror, the second wedge-shaped mirror, the third wedge-shaped mirror and the focusing mirror are coaxially arranged; the scanning radius of the graph on the focal plane of the focusing mirror is continuously adjustable by adjusting the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror. The invention is used for processing small micropores, and can effectively avoid the situation that the laser is blocked by the upper surface of the hole to form a conical hole when processing a deep hole; the processed holes are ensured to be straight holes, and the quality of the processed holes is ensured.
Description
Technical Field
The invention belongs to the technical field of laser application, relates to a laser drilling technology, and particularly relates to a laser scanning optical system and method based on a rotary three-optical wedge.
Background
Laser drilling is one of the main application fields of laser processing, with the rapid development of modern industry and technology level, materials with large hardness and high melting point are increasingly used, and particularly in the aviation field, the properties of the materials must have the characteristics of high strength, high hardness, high wear resistance and the like, so that the materials need to be processed by non-contact laser processing.
With the development of processing technology, more and more holes with large depth-diameter ratio need to be processed on a workpiece, the traditional laser drilling method is that a laser beam is fixed and repeatedly drilled on a fixed point of the workpiece, which is called impact drilling, and the method has the defects that when the holes with large depth-diameter ratio are drilled, the problem that the upper hole aperture is larger than the lower hole aperture can occur, and the vertical holes cannot be processed, because the laser beam is only minimum at a focus after focusing, and when the laser focus is deep into a material, the light spot on the surface of the material is larger, so that the upper hole is enlarged. Still another method is to use a scanning galvanometer, and use the scanning galvanometer to make the laser beam scan circularly or scan spirally to process the small hole, the disadvantage of the method is: because of the limitation of scanning galvanometer precision, when processing a small hole with the diameter within 300 micrometers, the circular arc is generally polygonal, and is similar to impact drilling, the hole taper is large, the aperture of an incident surface is large, the diameter of an outlet hole is small, and the processing requirement cannot be met generally. Some combined systems utilizing optical wedges and reflecting mirrors achieve the aim of adjusting the taper and the radius of processing, but because the adjustment precision and the positioning precision of the processing radius are lower, when small micropores are processed, the aperture has larger deviation from the expected value, and in order to compensate the deviation, a complex structure is required to be added. Therefore, in the prior art, when a hole with a small hole diameter and a large depth-to-diameter ratio is processed, the structure is often complicated or the precision is low.
Disclosure of Invention
The method aims at the problems of low precision, complex structure and the like when the prior art processes holes with large depth-diameter ratio by a laser drilling mode. The invention provides a laser scanning optical system and method based on a rotary three-optical wedge.
The invention discloses a laser scanning optical system based on a rotary three-optical wedge, which comprises a first wedge-shaped mirror, a second wedge-shaped mirror, a third wedge-shaped mirror and a focusing mirror, wherein the first wedge-shaped mirror, the second wedge-shaped mirror, the third wedge-shaped mirror and the focusing mirror are arranged in sequence along the incidence direction of light; the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror is adjusted to enable the scanning radius of the graph on the focal plane of the focusing mirror to be continuously adjustable;
The relation formula of the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
F is the focal length of the focusing mirror; n is the refractive index of the first wedge mirror, the refractive index of the second wedge mirror or the refractive index of the third wedge mirror, the refractive index of the first wedge mirror, the refractive index of the second wedge mirror and the refractive index of the third wedge mirror being equal; alpha is the phase difference between the first wedge mirror and the second wedge mirror; r is the scanning radius of the graph on the focal plane of the focusing lens; beta is the phase difference between the second wedge mirror and the third wedge mirror;
the calculation formula of the phase difference beta between the second wedge-shaped mirror and the third wedge-shaped mirror is as follows:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge-shaped mirror, b is the wedge angle of the second wedge-shaped mirror or the wedge angle of the third wedge-shaped mirror, and the wedge angle of the second wedge-shaped mirror and the wedge angle of the third wedge-shaped mirror are equal.
Further defined, by adjusting the spacing L between the wedge surface of the second wedge mirror and the wedge surface of the third wedge mirror such that the machine cone angle δ is adjustable, the adjustment relationship is:
tanδ＝L×tan((n-1)×b)/F (3)。
Further defined, the wedge surface of the first wedge mirror is disposed opposite or opposite the wedge surface of the second wedge mirror, and the wedge surface of the second wedge mirror is disposed opposite or opposite the wedge surface of the third wedge mirror.
Further defined, the second wedge mirror has a wedge angle greater than the wedge angle of the first wedge mirror.
Further defined, the first wedge mirror has a wedge angle of 0.1 ° to 2 °, and the second wedge mirror has a wedge angle of 5 ° to 30 °.
Further defined, the incident beam on the first wedge mirror is a collimated laser beam.
Further limited, the laser scanning optical system based on the rotary three optical wedges further comprises a high-precision motor I, a high-precision motor II, a high-precision motor III and a guiding device, wherein the power output end of the high-precision motor I is connected with the first wedge-shaped mirror, the power output end of the high-precision motor II is connected with the second wedge-shaped mirror, and the power output end of the high-precision motor III is connected with the third wedge-shaped mirror through the guiding device.
The laser scanning light method based on the rotary three-optical wedge formed by the laser scanning optical system based on the rotary three-optical wedge comprises the following steps:
The first wedge-shaped mirror, the second wedge-shaped mirror, the third wedge-shaped mirror and the focusing mirror are coaxially arranged in sequence along the incidence direction of light, and the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror is adjusted, so that the scanning radius of a graph on the focal plane of the focusing mirror is adjusted;
The relation formula of the phase difference between the first wedge mirror and the second wedge mirror and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
F is the focal length of the focusing mirror; n is the refractive index of the first wedge mirror, the refractive index of the second wedge mirror or the refractive index of the third wedge mirror, the refractive index of the first wedge mirror, the refractive index of the second wedge mirror and the refractive index of the third wedge mirror being equal; alpha is the phase difference between the first wedge mirror and the second wedge mirror; r is the scanning radius of the graph on the focal plane of the focusing lens; beta is the phase difference between the second wedge mirror and the third wedge mirror;
the calculation formula of the phase difference beta between the second wedge mirror and the third wedge mirror is as follows:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge-shaped mirror, b is the wedge angle of the second wedge-shaped mirror or the wedge angle of the third wedge-shaped mirror, and the wedge angle of the second wedge-shaped mirror (2) and the wedge angle of the third wedge-shaped mirror are equal.
Further defined, the steps further comprise:
The adjustment of the machining cone angle delta is realized by adjusting the distance L between the wedge surface of the second wedge-shaped mirror and the wedge surface of the third wedge-shaped mirror, and the adjustment relationship is as follows:
tanδ＝L×tan((n-1)×b)/F (3)。
compared with the prior art, the invention has the beneficial effects that:
1. The invention realizes smaller scanning radius change between the second wedge-shaped mirror and the third wedge-shaped mirror by utilizing the larger phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror, thereby achieving the purpose of high-precision adjustment of the scanning radius; and when the machining aperture is 0, the combination of the second wedge-shaped mirror and the third wedge-shaped mirror can compensate deflection of the first wedge-shaped mirror to incident laser, can be suitable for holes with large depth-to-diameter ratio, and has simple structure and high precision.
2. The invention relates to a laser scanning optical system based on a rotary three-wedge, which comprises a first wedge-shaped mirror, a second wedge-shaped mirror, a third wedge-shaped mirror and a focusing mirror which are sequentially arranged along the incidence direction of light, wherein when a hole is machined, the rotation speed of a high-precision motor I and a high-precision motor II is regulated, the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror is controlled, and the synchronous rotation is matched to realize continuous adjustment of the radius of a scanning graph of a light beam on the focusing plane of the focusing mirror; the angle rotated by the high-precision motor III is synchronously controlled, the interval between the second wedge-shaped mirror and the third wedge-shaped mirror is controlled, the included angle (processing cone angle) between the focused light beam and the central shaft formed by the first wedge-shaped mirror, the second wedge-shaped mirror, the third wedge-shaped mirror and the focusing mirror can be adjusted, the larger the interval is, the larger the processing cone angle is, and the situation that the upper surface of a laser hole is blocked to form a cone hole when a deep hole is processed can be effectively avoided; the processed holes are ensured to be straight holes, and the quality of the processed holes is ensured. The laser scanning optical system can process air film holes on an aero-engine blade, for example, the depth of the air film holes is hundreds of micrometers, and the depth of the air film holes is millimeters; the resolution of the rotation angle can reach 0.001 degrees, so that the resolution of the scanning radius of the graph on the focal plane of the focusing mirror can reach the nanometer level, and the adjustment precision is high.
3. The invention only needs two to three high-precision motors, has simple mechanical structure and can improve the reliability of long-term operation of equipment.
Drawings
FIG. 1 is a schematic diagram of a rotary three wedge based laser scanning optical system of the present invention;
FIG. 2 is a schematic diagram of initial phase adjustment of a rotary three wedge based laser scanning optical system according to the present invention;
FIG. 3 is a schematic illustration of the drilling of a rotating three wedge based laser scanning optical system of the present invention; wherein, a in fig. 3 represents a hole punching aperture when the phase between the second wedge-shaped mirror and the third wedge-shaped mirror is enlarged, and b in fig. 3 represents a hole punching aperture when the phase between the second wedge-shaped mirror and the third wedge-shaped mirror is reduced;
FIG. 4 is a schematic diagram of the definition of the phase difference between the wedge mirrors mentioned herein, wherein (a) is a schematic diagram of the phase difference of 0 ° for two wedge mirrors; (b) is a schematic view of two wedge mirrors 180 ° out of phase; (c) Is a schematic diagram with the phase difference of theta degrees of two wedge-shaped mirrors, and the theta degrees are less than 0 DEG and less than 180 DEG;
The device comprises a first wedge-shaped mirror, a second wedge-shaped mirror, a third wedge-shaped mirror, a 4-focusing mirror, a 5-laser beam, a 6-CCD probe, a 7-sample to be processed, an 8-high-precision motor I, a 9-high-precision motor II, a 10-high-precision motor III and a 11-guiding device.
Detailed Description
The technical scheme of the present invention will be further explained with reference to the drawings and examples, but the present invention is not limited to the embodiments described below.
Example 1
Referring to fig. 2, the laser scanning optical system based on a rotating three optical wedges of the present embodiment includes a first wedge-shaped mirror 1, a second wedge-shaped mirror 2, a third wedge-shaped mirror 3 and a focusing mirror 4 sequentially arranged along the incident direction of light, the first wedge-shaped mirror 1, the second wedge-shaped mirror 2, the third wedge-shaped mirror 3 and the focusing mirror 4 are coaxially arranged, and the scanning radius of the pattern on the focal plane of the focusing mirror 4 is continuously adjustable by adjusting the phase difference between the first wedge-shaped mirror 1 and the second wedge-shaped mirror 2; referring to FIG. 4, a schematic diagram of phase difference adjustment of two wedge-shaped mirrors is shown, wherein (a) is a schematic diagram of phase difference of 0 DEG for the two wedge-shaped mirrors, (b) is a schematic diagram of phase difference of 180 DEG for the two wedge-shaped mirrors, and (c) is a schematic diagram of phase difference of theta DEG for the two wedge-shaped mirrors, and 0 DEG < theta DEG < 180 DEG;
The relation formula of the phase difference between the first wedge mirror 1 and the second wedge mirror 2 and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
F is the focal length of the focusing mirror 4; n is the refractive index of the first wedge mirror 1, the refractive index of the second wedge mirror 2 or the refractive index of the third wedge mirror 3, the refractive index of the first wedge mirror 1, the refractive index of the second wedge mirror 2 and the refractive index of the third wedge mirror 3 being equal; alpha is the phase difference between the first wedge mirror 1 and the second wedge mirror 2; r is the scanning radius of the graph on the focal plane of the focusing mirror 4; beta is the phase difference between the second wedge mirror 2 and the third wedge mirror 3;
The calculation formula of the phase difference β between the second wedge mirror 2 and the third wedge mirror 3 is:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge mirror 1, b is the wedge angle of the second wedge mirror 2 or the wedge angle of the third wedge mirror 3, and the wedge angle of the second wedge mirror 2 and the wedge angle of the third wedge mirror 3 are equal.
Substituting formula (2) into formula (1) yields r=f×tan (2× (n-1) ×a×cos ((α+ arccos (a/2 b))/2)), when n=1.5, a=0.35 ° (0.005 radian), b=15 ° (0.26 radian), f=100 mm, α=80 ° (1.396 radian) is brought into formula, yielding r=0.057 mm, α=81 ° (1.414 radian) is brought into formula, yielding r=0.051 mm. It can be seen that the scan radius of the pattern on the focal plane of the focusing mirror 4 changes by about 0.006mm for every 1 change in the phase difference α between the first wedge mirror 1 and the second wedge mirror 2. Referring to fig. 1, in combination with the high precision motor, the resolution of the scanning radius of the pattern on the focal plane of the focusing mirror 4 is up to the nanometer level.
Preferably, the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 are wedge-shaped mirrors with one plane, and the corresponding planes are circular planes, and the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 can rotate around the central axis.
The wedge surface of the first wedge-shaped mirror 1 is opposite to or opposite to the wedge surface of the second wedge-shaped mirror 2, and the wedge surface of the second wedge-shaped mirror 2 is opposite to or opposite to the wedge surface of the third wedge-shaped mirror 3.
Preferably, in this embodiment, the first wedge mirror 1, the second wedge mirror 2, the third wedge mirror 3 and the focusing mirror 4 are all made of fused silica.
When in use, the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 can rotate around a central shaft (the central shaft formed by the first wedge-shaped mirror 1, the second wedge-shaped mirror 2, the third wedge-shaped mirror 3 and the focusing mirror 4), the distance between the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 is fixed, and the scanning radius of the pattern on the focusing plane of the focusing mirror 4 can be continuously adjustable by matching synchronous and homodromous rotation through adjusting the phase difference between the first wedge-shaped mirror 1 and the second wedge-shaped mirror 2. In this embodiment, only the high-precision motor I8 and the high-precision motor II9 are needed, the high-precision motor I8 is used for controlling the rotation speed of the first wedge-shaped mirror 1, and the high-precision motor II9 is used for controlling the rotation speeds of the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3, so that the mechanical complexity is greatly reduced.
Example 2
In this embodiment, the pitch L between the wedge surface of the second wedge-shaped mirror 2 and the wedge surface of the third wedge-shaped mirror 3 is adjusted to make the machining cone angle δ adjustable, and the adjustment relationship is:
tanδ＝L×tan((n-1)×b)/F (3)。
Preferably, the wedge angle of the second wedge mirror 2 and the third wedge mirror 3 is 15 °, and when the distance between the second wedge mirror 2 and the third wedge mirror 3 is 0mm to 90mm, the laser processing taper angle is 0 ° to 6.21 ° based on the above calculation formula.
Wherein the wedge angle of the second wedge mirror 2 is larger than the wedge angle of the first wedge mirror 1. Specifically, the wedge angle of the first wedge-shaped mirror 1 is 0.1 ° to 2 °, which may be 0.1 °, 0.3 °, 0.5 °, 0.8 °, 1.0 °, 1.2 °, 1.5 °, 1.8 °, or 2.0 °, and the wedge angle of the second wedge-shaped mirror 2 is 5 ° to 30 °, which may be 5 °, 8 °,10 °,12 °, 15 °, 18 °, 20 °, 22 °,25 °, 28 °, or 30 °. Preferably, in order to process holes with larger apertures, the laser beam 5 is kept in the same plane as the central axis of the system, the wedge angle of the first wedge mirror 1 should be larger than 0 ° and smaller than 1 °.
Preferably, the incident beam on the first wedge mirror 1 is a collimated laser beam.
Referring to fig. 1, the laser scanning optical system based on three rotary wedges in this embodiment further includes a high-precision motor I8, a high-precision motor II9, a high-precision motor III10, and a guiding device 11, where a power output end of the high-precision motor I8 is connected to the first wedge-shaped mirror 1, a power output end of the high-precision motor II9 is connected to the second wedge-shaped mirror 2, a power output end of the high-precision motor III10 is connected to the third wedge-shaped mirror 3 through the guiding device 11, and the guiding device 11 can enable the third wedge-shaped mirror 3 to move up and down, so as to adjust a distance between the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3; the guide 11 is a structure that can realize up-and-down movement of the third wedge mirror 3, for example: an internal thread sleeve is arranged on one side of the third wedge-shaped mirror 3, a screw rod is arranged in the internal thread sleeve, and the screw rod is driven to rotate through a high-precision motor III10, so that the third wedge-shaped mirror 3 moves up and down along the optical axis direction.
When the optical scanning device is used, the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 can rotate around a central shaft (central shafts of the first wedge-shaped mirror 1, the second wedge-shaped mirror 2, the third wedge-shaped mirror 3 and the focusing mirror 4), the second wedge-shaped mirror 2 can move back and forth relative to the third wedge-shaped mirror 3, and the scanning radius of the graph on the focusing plane of the focusing mirror 4 can be continuously adjustable by adjusting the phase difference between the first wedge-shaped mirror 1 and the second wedge-shaped mirror 2 and matching synchronous homodromous rotation. The continuous adjustment of the included angle between the focused light beam and the rotation center axis is realized by adjusting the interval between the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3. Compared with embodiment 1, embodiment 2 needs more than one high-precision motor III10, the high-precision motor III10 controls the distance between the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3, the online adjustability of the processing cone angle is increased, the requirements of more application scenes are met, the processing requirements of more diversification are met, and the flexible adjustment of the processing cone angle of the sample 7 to be processed is met.
Example 3
The laser scanning light method based on the rotating three optical wedges of the present embodiment is formed based on the laser scanning optical system based on the rotating three optical wedges of embodiment 2, and includes the following steps:
the first wedge-shaped mirror 1, the second wedge-shaped mirror 2, the third wedge-shaped mirror 3 and the focusing mirror 4 are coaxially arranged in sequence along the incidence direction of light, and the phase difference between the first wedge-shaped mirror 1 and the second wedge-shaped mirror 2 is regulated so as to regulate the scanning radius of the graph on the focal plane of the focusing mirror 4;
The relation formula of the phase difference between the first wedge mirror 1 and the second wedge mirror 2 and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
F is the focal length of the focusing mirror 4; n is the refractive index of the first wedge mirror 1, the refractive index of the second wedge mirror 2 or the refractive index of the third wedge mirror 3, the refractive index of the first wedge mirror 1, the refractive index of the second wedge mirror 2 and the refractive index of the third wedge mirror 3 being equal; alpha is the phase difference between the first wedge mirror 1 and the second wedge mirror 2; r is the scanning radius of the graph on the focal plane of the focusing mirror 4; beta is the phase difference between the second wedge mirror 2 and the third wedge mirror 3;
The calculation formula of the phase difference β between the second wedge mirror 2 and the third wedge mirror 3 is:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge mirror 1, b is the wedge angle of the second wedge mirror 2 or the wedge angle of the third wedge mirror 3, and the wedge angle of the second wedge mirror 2 and the wedge angle of the third wedge mirror 3 are equal.
The method further comprises the following steps:
The adjustment of the taper angle delta is realized by adjusting the distance L between the wedge surface of the second wedge-shaped mirror 2 and the wedge surface of the third wedge-shaped mirror 3, and the adjustment relationship is as follows:
tanδ＝L×tan((n-1)×b)/F (3)。
The following description is of the phase initialization adjustment work that needs to be done during the initial installation of the entire inventive patent system including embodiment 1, embodiment 2:
In the initial installation process of the system, the initial phase of each wedge-shaped mirror needs to be accurately positioned to serve as a reference for starting up and zeroing, and the following method for accurately positioning the initial phase of each wedge-shaped mirror is provided, see fig. 2 and 3, and specifically comprises the following steps:
1. adjusting the receiving surface of the CCD probe 6 to the focal plane position of the focusing mirror 4 or slightly smaller than the focal plane position of the focusing mirror 4; setting the punching radius to be zero at the same time;
2. Adjusting the first wedge mirror 1: the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 rotate in the same speed and the same direction, and the light spot track on the receiving screen of the CCD probe 6 is passed through; stopping rotating, changing the initial phase of the first wedge-shaped mirror 1, continuously rotating the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 in the same speed and the same direction, and recording the track radius of the light spot on the receiving screen. The above steps are repeated until the initial phase of the first wedge-shaped mirror 1 corresponding to the spot track radius which is the smallest is found.
3. The second wedge mirror 2 and the third wedge mirror 3 are adjusted: and the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 rotate at the same speed and in the same direction, the light spot track radius on the receiving screen is recorded, the rotation is stopped, the phase position of the third wedge-shaped mirror 3 relative to the second wedge-shaped mirror 2 is changed, the rotation is continued, the light spot track radius on the receiving screen is recorded, and the steps are repeated until the light spot track radius on the receiving screen is minimum.
4. The steps 2 and 3 are repeated until the spot track radius is minimum when the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 synchronously rotate. Smaller radius turns indicate more accurate turns.
5. After the light spot track radiuses of the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 are determined, the punching radius is set, the first wedge-shaped mirror 1, the second wedge-shaped mirror 2 and the third wedge-shaped mirror 3 are started to synchronously rotate, whether the phase difference between the first wedge-shaped mirror 1 and the second wedge-shaped mirror 2 is positive or negative is determined, the receiving screen is moved towards the focusing mirror 4, if the light spot track radius is displayed to be firstly reduced and then is enlarged, the phase difference adjusting direction of the first wedge-shaped mirror 1 is correct, and if the light spot track radius is not the same, the opposite direction is needed.
6. And (5) punching.
Claims (8)
1. The laser scanning optical system based on the rotary three optical wedges is characterized by comprising a first wedge-shaped mirror (1), a second wedge-shaped mirror (2), a third wedge-shaped mirror (3) and a focusing mirror (4) which are sequentially arranged along the incidence direction of light, wherein the first wedge-shaped mirror (1), the second wedge-shaped mirror (2), the third wedge-shaped mirror (3) and the focusing mirror (4) are coaxially arranged; the phase difference between the first wedge-shaped mirror (1) and the second wedge-shaped mirror (2) is adjusted to enable the scanning radius of the graph on the focal plane of the focusing mirror (4) to be continuously adjustable;
The relation formula of the phase difference between the first wedge-shaped mirror (1) and the second wedge-shaped mirror (2) and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
f is the focal length of the focusing mirror (4); n is the refractive index of the first wedge mirror (1), the refractive index of the second wedge mirror (2) or the refractive index of the third wedge mirror (3), the refractive index of the first wedge mirror (1), the refractive index of the second wedge mirror (2) and the refractive index of the third wedge mirror (3) being equal; alpha is the phase difference between the first wedge mirror (1) and the second wedge mirror (2); r is the scanning radius of the graph on the focal plane of the focusing mirror (4); beta is the phase difference between the second wedge-shaped mirror (2) and the third wedge-shaped mirror (3), and a is the wedge angle of the first wedge-shaped mirror (1);
the calculation formula of the phase difference beta between the second wedge-shaped mirror (2) and the third wedge-shaped mirror (3) is as follows:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge-shaped mirror (1), b is the wedge angle of the second wedge-shaped mirror (2) or the wedge angle of the third wedge-shaped mirror (3), and the wedge angle of the second wedge-shaped mirror (2) and the wedge angle of the third wedge-shaped mirror (3) are equal;
the machining cone angle delta is adjustable by adjusting the distance L between the wedge surface of the second wedge-shaped mirror (2) and the wedge surface of the third wedge-shaped mirror (3), and the adjusting relation is as follows:
tanδ＝L×tan((n-1)×b)/F(3)；
n is the refractive index of the first wedge mirror (1), the refractive index of the second wedge mirror (2) or the refractive index of the third wedge mirror (3); b is the wedge angle of the second wedge-shaped mirror (2) or the wedge angle of the third wedge-shaped mirror (3); f is the focal length of the focusing mirror (4).
2. The laser scanning optical system based on the rotary three optical wedges according to claim 1, characterized in that the wedge surface of the first wedge mirror (1) is arranged opposite or opposite to the wedge surface of the second wedge mirror (2), and the wedge surface of the second wedge mirror (2) is arranged opposite or opposite to the wedge surface of the third wedge mirror (3).
3. A rotating three optical wedge based laser scanning optical system according to claim 2, characterized in that the wedge angle of the second wedge mirror (2) is larger than the wedge angle of the first wedge mirror (1).
4. A rotating three optical wedge based laser scanning optical system according to claim 3, wherein the wedge angle of the first wedge mirror (1) is 0.1 ° to 2 ° and the wedge angle of the second wedge mirror (2) is 5 ° to 30 °.
5. A rotating three wedge based laser scanning optical system according to claim 4, characterized in that the incident beam on the first wedge mirror (1) is a collimated laser beam.
6. The laser scanning optical system based on the rotary three optical wedges according to claim 5, further comprising a high-precision motor I (8), a high-precision motor II (9), a high-precision motor III (10) and a guiding device (11), wherein the power output end of the high-precision motor I (8) is connected with the first wedge-shaped mirror (1), the power output end of the high-precision motor II (9) is connected with the second wedge-shaped mirror (2), and the power output end of the high-precision motor III (10) is connected with the third wedge-shaped mirror (3) through the guiding device (11).
7. The rotary three optical wedge based laser scanning method formed by the rotary three optical wedge based laser scanning optical system of claim 1, comprising the steps of:
the first wedge-shaped mirror (1), the second wedge-shaped mirror (2), the third wedge-shaped mirror (3) and the focusing mirror (4) are coaxially arranged in sequence along the incidence direction of light, and the phase difference between the first wedge-shaped mirror (1) and the second wedge-shaped mirror (2) is regulated, so that the scanning radius of a graph on the focal plane of the focusing mirror (4) is regulated;
the relation formula of the phase difference between the first wedge-shaped mirror (1) and the second wedge-shaped mirror (2) and the scanning radius of the graph on the focal plane is as follows:
R＝F×tan(2×(n-1)×a×cos((α+β/2)/2)) (1)
f is the focal length of the focusing mirror (4); n is the refractive index of the first wedge mirror (1), the refractive index of the second wedge mirror (2) or the refractive index of the third wedge mirror (3), the refractive index of the first wedge mirror (1), the refractive index of the second wedge mirror (2) and the refractive index of the third wedge mirror (3) being equal; alpha is the phase difference between the first wedge mirror (1) and the second wedge mirror (2); r is the scanning radius of the graph on the focal plane of the focusing mirror (4); beta is the phase difference between the second wedge-shaped mirror (2) and the third wedge-shaped mirror (3), and a is the wedge angle of the first wedge-shaped mirror (1);
The calculation formula of the phase difference beta between the second wedge-shaped mirror (2) and the third wedge-shaped mirror (3) is as follows:
β＝2×arccos(a/2b) (2)
a is the wedge angle of the first wedge-shaped mirror (1), b is the wedge angle of the second wedge-shaped mirror (2) or the wedge angle of the third wedge-shaped mirror (3), and the wedge angle of the second wedge-shaped mirror (2) and the wedge angle of the third wedge-shaped mirror (3) are equal.
8. The rotary three wedge based laser scanning method of claim 7, wherein the steps further comprise:
The adjustment of the machining cone angle delta is realized by adjusting the distance L between the wedge surface of the second wedge-shaped mirror (2) and the wedge surface of the third wedge-shaped mirror (3), and the adjustment relationship is as follows:
tanδ＝L×tan((n-1)×b)/F(3)；
a is the wedge angle of the first wedge-shaped mirror (1), b is the wedge angle of the second wedge-shaped mirror (2) or the wedge angle of the third wedge-shaped mirror (3), and the wedge angle of the second wedge-shaped mirror (2) and the wedge angle of the third wedge-shaped mirror (3) are equal.
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