CN114959901A

CN114959901A - Silicon carbide charging and crystal taking device

Info

Publication number: CN114959901A
Application number: CN202210533208.4A
Authority: CN
Inventors: 胡动力; 高树良; 刘海; 张瑶勇
Original assignee: Linton Kayex Technology Co Ltd
Current assignee: Linton Kayex Technology Co Ltd
Priority date: 2022-05-12
Filing date: 2022-05-12
Publication date: 2022-08-30
Anticipated expiration: 2042-05-12
Also published as: CN114959901B

Abstract

The invention belongs to the field of silicon carbide production, and particularly relates to a silicon carbide charging and crystal taking device which comprises a base, wherein a driving motor is fixedly installed at the top end of the base, a transmission rod is fixedly connected to the top end of the driving motor, an extension rod penetrates through the outer side of the transmission rod and is arranged close to the top end, a mechanical claw is arranged close to one end of the bottom surface of the extension rod, a lifting module is connected between the mechanical claw and the extension rod and used for driving the mechanical claw to move up and down, a heated crucible is held by the mechanical claw and lifted up, the heated crucible can be taken out, then the driving motor is started to move the crucible and the mechanical claw to a preset position and put down, after the crucible is put down, the mechanical claw is used for uncovering the crucible, the silicon carbide crystal growing on a seed crystal bracket can be taken out, and therefore, the mechanical silicon carbide crystal taking function is achieved, compared with a forklift or a gantry crane, the taking-out mode is quicker and more convenient, and complex manual operation is not needed.

Description

Silicon carbide charging and crystal taking device

Technical Field

The invention belongs to the field of silicon carbide production, and particularly relates to a silicon carbide charging and crystal taking device.

Background

The silicon carbide single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, high chemical stability and the like, and can be made into high-frequency and high-power electronic devices and photoelectronic devices which work under the conditions of high temperature and strong radiation;

silicon carbide powder is used as raw material, the silicon carbide powder in the crucible is heated to a certain temperature and is obviously sublimated, decomposed silicon carbide gas can be transported along the temperature gradient and condensed at the position of a silicon carbide seed crystal, generally, the seed crystal is placed at the upper end of a seed crystal bracket which is through in the hollow cavity, and the seed crystal bracket is placed inside the crucible. Or directly placing the seed crystal at the bottom end of the crucible cover.

A chinese patent with publication number CN112226814A discloses a silicon carbide crystal taking-off device, which comprises two supporting disks and three connecting rods, wherein the three connecting rods are positioned between the two supporting disks, the upper and lower ends of the three connecting rods are respectively fixedly connected with one side of the two supporting disks, which is close to each other, the lower ends of the three connecting rods are respectively provided with a clamping mechanism, the pressure plates generate slow and uniform pressure to the crystal, the crystal can completely fall off, and the problem of breakage caused by uneven falling of the crystal in a direct ejection mode in the prior art is solved.

When the crystal is taken out in the existing silicon carbide production flow, the crucible is slowly taken out in a mode of generally using a forklift or a gantry crane, the crucible cover is slowly put down and then opened, and meanwhile, multiple places need to be manually assisted and matched, so that the problems of high labor cost and low speed are caused.

Therefore, the invention provides a silicon carbide charging and crystal taking device.

Disclosure of Invention

To remedy the deficiencies of the prior art, at least one of the technical problems set forth in the background is addressed.

The technical scheme adopted by the invention for solving the technical problem is as follows: the invention relates to a silicon carbide charging and crystal taking device, which comprises a base, wherein a driving motor is fixedly installed at the top end of the base, a transmission rod is fixedly connected at the top end of the driving motor, an extension rod is arranged on the outer side of the transmission rod in a manner of penetrating through the transmission rod and close to the top end, a mechanical claw is arranged on the bottom surface of the extension rod and close to one end, a lifting module is connected between the mechanical claw and the extension rod and used for driving the mechanical claw to move up and down, when the device works, the driving motor drives the transmission rod and the extension rod to swing so as to drive the mechanical claw to move to a smelting furnace for producing silicon carbide, the mechanical claw is put down by using the lifting module, a heated crucible is held by the mechanical claw and lifted up again, the heated crucible can be taken out, then the driving motor is started again to move the crucible and the mechanical claw to a preset position and put down, the crucible is opened by using the mechanical claw again after the crucible is put down, the silicon carbide crystal growing on the seed crystal bracket can be taken out, so that the mechanical silicon carbide crystal taking-out function is realized, and compared with a taking-out mode of a forklift or a gantry crane, the mechanical silicon carbide crystal taking-out device is quicker and more convenient, and does not need complicated manual operation.

Preferably, the one end fixed mounting that the gripper was kept away from to the extension rod has the balancing weight, the inboard of transfer line is provided with the translation module, the translation module is connected with the extension rod transmission, the translation module is used for driving extension rod horizontal migration, and the during operation, the setting of cooperation balancing weight has guaranteed that whole device can comparatively stable laying subaerial when the crucible is pulled up, reduces the unstable problem of focus, and the setting of translation module, the position that can slightly adjust the extension rod tip guarantees that the gripper can grasp the crucible between two parties, further improves and snatchs stability.

Preferably, the middle part bottom fixed mounting of gripper has laser rangefinder module, laser rangefinder module is used for measuring the gripper to the distance of crucible, the crucible includes crucible body and crucible lid, the top of crucible lid is the bellied arc setting in center, in operation, when adjusting the gripper position, if go the adjustment through the eyes of people not only comparatively consuming time, and need experienced master, through setting up laser rangefinder module, laser rangefinder module can send laser downwards and receive laser again, with this the distance of calculating out, the structural setting of cooperation crucible lid, make its central point position be nearest apart from laser rangefinder module distance, and increase gradually from the outside to the distance at center, through letting laser rangefinder module's measured data control driving motor and translation module drive the gripper and remove, just need not the manual work and fix a position, when having reduced the cost of labor, and a full-automatic treatment process is also realized.

Preferably, the bottom of gripper rotates and is connected with four group's extension arms, and four group's extension arms are the annular and arrange, the extension arm includes two sets of deckle boards, fixed connection between two sets of deckle boards, and leaves the clearance between two sets of deckle boards, leans on bottom fixedly connected with horizontal pole between two sets of deckle boards, the outside of horizontal pole rotates and is connected with the change, the bottom fixedly connected with gripper arm of change, the top of change is provided with the screens subassembly, the screens subassembly is used for limiting the removal of change, the gripper arm is the arc setting, and during operation, when grabbing the crucible, because the whole quality of crucible is heavier, if take out the crucible through extrusion frictional force at every turn, easily lead to the lateral wall of crucible to be excessively extruded, through setting up the gripper arm, along with the opening and sinking of gripper, because the diameter of crucible is the definite value, when the central position is confirmed by laser rangefinder module, the gripper only needs to open predetermined size, just can let the extension arm just slide along the outer wall of crucible down, make the outside that the crucible can be hugged closely to the bottom surface of grabbing arm, when the grabbing arm of extension arm bottom contacted the bottom surface of smelting pot, can lead to rotatoryly because the extrusion, the arc setting of cooperation grabbing arm, make the grabbing arm can carry out the inside detain rotation to the inboard, dynamics through increasing lifting module, can let four groups of grabbing arm insert the bottom surface of crucible, let the crucible supported by the grabbing arm, use the screens subassembly to restrict the change and not let its rotatory this moment, through this kind of setting, the mode of holding the crucible with four groups of grabbing arm, compare not only more stable in extrusion friction, can not harm the lateral wall of crucible simultaneously.

Preferably, the screens subassembly is including blockking the piece, block the outside fixed connection of piece and change, the spacing section of thick bamboo of fixedly connected with between two sets of deckle boards, the inboard sliding connection of a spacing section of thick bamboo has the kelly, the kelly is located the top of change, and the during operation, rotatory back when the grab arm for block the piece and also follow the rotation, rotatory block the piece and can inhale the kelly and push up, after the kelly is crossed to blocking the piece, the kelly can the lapse under the effect of gravity, blocks the piece and blocks, lets the unable backward movement of grab arm, through this kind of setting, not only can be stable block the grab arm, and need not to set up complicated mechanical device.

Preferably, the free end of grab arm is circular-arc setting, it sets up to block the piece and be barb-shaped, block the piece and be relative setting with the grab arm, and the during operation, the arc setting of grab arm tip can increase the contact surface with the crucible, and the contact surface is mellow simultaneously can also reduce single-point pressure, and blocks the structural setting of piece for when blocking piece anticlockwise rotation, can effectually push up the kelly, and when returning, can't push back the piece again, can only resume through artifical or other power pulling kellies.

Preferably, a spacing section of thick bamboo and kelly all are the slope setting with vertical plane, the kelly is close to the one end that blocks the piece and is adduction arc setting, and the during operation, the slope setting of cooperation kelly and the adduction arc setting that blocks piece one end let block piece anticlockwise rotation time push away the process of kelly lighter, but when returning, because the contained angle between block piece and the kelly is too big, lead to being difficult to push up the kelly, guaranteed the stable lift process of crucible.

Preferably, four extension arm homonymy is adjacent to be a set of, totally two sets of, be provided with the series connection rope between two sets of extension arms, the top fixed connection of one side and two kellies that the deckle board is run through at series connection rope both ends, in operation, after the crucible is taken out and is put, need retrieve the grab arm, only need control the gripper to open this moment, four sets of extension arms also can the alternate segregation this moment, along with the separation of extension arm, can make the series connection rope straightened, and then can let the kellies rebound, the blockking of kellies has not been had, the grab arm can return vertical state under the effect of gravity this moment, later can normally upwards press from both sides the crucible lid, through this kind of setting, still need not to set up complicated mechanical structure when having realized effectively retrieving the kellies, the cost is reduced, and the emergence of trouble has been reduced.

Preferably, one of them the inboard of deckle board seted up the spout, the inboard sliding connection of spout has the driving strip, the bottom surface fixed mounting of driving strip has the latch that a plurality of groups equidistance set up, the one end fixed mounting of change has the gear, gear and latch intermeshing, the during operation, the seed crystal bracket that a lot of carborundum grows all lays directly on the bottom surface of crucible cover, consequently need guarantee the stable promotion and the removal process of crucible cover, when the side of extension arm extrusion crucible cover, can extrude and remove the driving strip for latch and gear take place the transmission and then drive the grab arm rotation, can let the grab arm internal buckle, withhold crucible cover the bottom, and then guaranteed the stable supporting effect of crucible cover.

Preferably, spout and drive strip all are the arc setting, the drive strip includes the elastic metal board that a plurality of mutual fixed connect, the tip of latch rotates and is connected with the slippery ball, the outside of drive strip is provided with the extrusion cover, the extrusion cover is woven for the elastic metal net and is formed, one side fixed connection of extrusion cover and deckle board, the during operation, the structure setting of cooperation drive strip for the drive strip can upwards carry out the crooked rolling, not only can not deviate from the outside of deckle board, can also return with the help of gravity simultaneously, cooperates the slippery ball in the latch outside simultaneously, can let the slip process of drive strip become light swift, and the setting of extrusion cover not only can reduce during external foreign matter gets into the spout, can also let the drive strip correctly extruded.

The invention has the following beneficial effects:

1. according to the silicon carbide crystal loading and taking device, the mechanical silicon carbide crystal taking function is realized through the mutual matching arrangement of the driving motor, the lifting module and the mechanical claw, and compared with a taking mode of a forklift or a gantry crane, the taking device is quicker and more convenient, and does not need complex manual operation.

2. According to the silicon carbide charging and crystal taking device, the laser ranging module is arranged, the laser ranging module can emit laser downwards and then receive the laser, so that the distance is calculated, the distance between the center of the laser ranging module and the laser ranging module is the closest to the structure of the crucible cover, the distance from the outer side to the center of the laser ranging module is gradually increased, the driving motor and the translation module are controlled by the measuring data of the laser ranging module to drive the mechanical claw to move, manual positioning is not needed, the labor cost is reduced, and meanwhile, the full-automatic processing process is realized.

3. According to the silicon carbide charging and crystal taking device, the four groups of the grabbing arms are arranged to support the crucible, so that the silicon carbide charging and crystal taking device is more stable compared with extrusion friction, and the outer side wall of the crucible cannot be damaged.

Drawings

The invention will be further explained with reference to the drawings.

FIG. 1 is a perspective view of the present invention;

FIG. 2 is a side view of the gripper of the present invention;

FIG. 3 is a cross-sectional view of an extension arm of the present invention;

FIG. 4 is a partial structural view of the deckle plate of the present invention;

in the figure: 1. a base; 2. a transmission rod; 3. an extension pole; 4. a lifting module; 5. a gripper; 6. a laser ranging module; 8. an extension arm; 9. a frame plate; 10. a limiting cylinder; 11. a clamping rod; 12. a blocking block; 13. rotating the ring; 14. a grasping arm; 15. connecting ropes in series; 16. a drive motor; 17. a drive bar; 18. a gear; 19. clamping teeth; 20. a chute; 21. and extruding the cover.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

Example one

As shown in fig. 1 to fig. 2, a silicon carbide charging and crystal taking device according to an embodiment of the present invention includes a base 1, a driving motor 16 is fixedly installed at a top end of the base 1, a driving rod 2 is fixedly connected to a top end of the driving motor 16, an extension rod 3 is provided near a top end of the driving rod 2, a gripper 5 is provided near one end of a bottom surface of the extension rod 3, a lifting module 4 is connected between the gripper 5 and the extension rod 3, the lifting module 4 is used for driving the gripper 5 to move up and down, when the device is in operation, the driving motor 16 drives the driving rod 2 and the extension rod 3 to swing to drive the gripper 5 to move to a furnace for producing silicon carbide, the gripper 5 is lowered by using the lifting module 4, the heated crucible is gripped by the gripper 5 and lifted up, the heated crucible can be taken out, and then the driving motor 16 is started to move the crucible and the gripper 5 to a predetermined position and put down, after the crucible is put down, the mechanical claw 5 is used again to uncover the crucible, and the silicon carbide crystal growing on the seed crystal bracket can be taken out, so that the mechanical silicon carbide crystal taking-out function is realized, and compared with a taking-out mode of a forklift or a gantry crane, the mechanical silicon carbide crystal taking-out device is quicker and more convenient, and does not need complex manual operation.

As shown in fig. 1-2, the one end fixed mounting that gripper 5 was kept away from to extension rod 3 has the balancing weight, the inboard of transfer line 2 is provided with the translation module, the translation module is connected with extension rod 3 transmission, the translation module is used for driving extension rod 3 horizontal migration, and the during operation, the setting of cooperation balancing weight has guaranteed that whole device can comparatively stable laying subaerial when pulling up the crucible, reduces the unstable problem of focus, and the setting of translation module can slightly adjust the position of extension rod 3 tip, guarantees that gripper 5 can grasp the crucible between two parties, further improves and snatchs stability.

As shown in fig. 1 to 2, the middle bottom of the gripper 5 is fixedly provided with a laser ranging module 6, the laser ranging module 6 is used for measuring the distance from the gripper 5 to the crucible, the crucible comprises a crucible body and a crucible cover, the top end of the crucible cover is in an arc shape with a convex center, when the crucible is in operation, when the position of the gripper 5 is adjusted, if the position is adjusted by human eyes, the crucible is time-consuming and needs experienced teachers, by arranging the laser ranging module 6, the laser ranging module 6 can downwards emit laser and then receive laser, so as to measure the distance, the structure of the crucible cover is matched, so that the distance from the center position to the laser ranging module 6 is nearest, and the distance from the outer side to the center is gradually increased, the driving motor 16 and the translation module are controlled by the measurement data of the laser ranging module 6 to drive the gripper 5 to move, the positioning is not needed manually, so that the labor cost is reduced, and the full-automatic treatment process is realized.

As shown in fig. 2 to 3, the bottom end of the gripper 5 is rotatably connected with four sets of extension arms 8, the four sets of extension arms 8 are annularly arranged, each extension arm 8 comprises two sets of frame plates 9, the two sets of frame plates 9 are fixedly connected, a gap is reserved between the two sets of frame plates 9, a cross bar is fixedly connected between the two sets of frame plates 9 by the bottom end, the outer side of the cross bar is rotatably connected with a swivel 13, the bottom end of the swivel 13 is fixedly connected with a gripping arm 14, the top end of the swivel 13 is provided with a clamping component for limiting the movement of the swivel 13, the gripping arm 14 is arranged in an arc shape, when the crucible is gripped, because the crucible has a heavy overall mass, if the crucible is taken out by extrusion friction force each time, the side wall of the crucible is easily extruded excessively, and because the diameter of the crucible is a determined value by arranging the gripping arm 14 along with the opening and sinking of the gripper 5, after the central point is determined by the laser ranging module 6, the gripper 5 only needs to open a preset size, the extension arm 8 can just slide down along the outer wall of the crucible, the bottom surface of the gripper arm 14 can be tightly attached to the outer side of the crucible, when the gripper arm 14 at the bottom end of the extension arm 8 contacts the bottom surface of the crucible, the crucible can rotate due to extrusion, the gripper arm 14 is matched with the arc-shaped setting, the gripper arm 14 can rotate inwards in a buckled mode, the four groups of gripper arms 14 can be inserted into the bottom surface of the crucible by increasing the force of the lifting module 4, the crucible is supported by the gripper arms 14, the rotating ring 13 is limited by the clamping component at the moment, the crucible is not rotated, and through the arrangement, the crucible is supported by the four groups of gripper arms 14, the crucible supporting mode is more stable compared with extrusion friction, and meanwhile the outer side wall of the crucible cannot be damaged.

As shown in fig. 3, the clamping assembly includes a blocking piece 12, the blocking piece 12 is fixedly connected with the outer side of the rotating ring 13, a limiting cylinder 10 is fixedly connected between two sets of frame plates 9, a clamping rod 11 is slidably connected to the inner side of the limiting cylinder 10, the clamping rod 11 is located above the rotating ring 13, when the clamping arm 14 rotates, the blocking piece 12 rotates accordingly, the clamping rod 11 can be sucked up and ejected by the rotating blocking piece 12, after the blocking piece 12 passes over the clamping rod 11, the clamping rod 11 can slide downwards under the action of gravity, the blocking piece 12 is blocked, the clamping arm 14 cannot move backwards, and by means of the arrangement, the clamping arm 14 can be stably clamped without a complex mechanical device.

As shown in fig. 3, the free end of the gripping arm 14 is arc-shaped, the blocking piece 12 is in a barb shape, the blocking piece 12 and the gripping arm 14 are oppositely arranged, during operation, the arc-shaped end of the gripping arm 14 can increase the contact surface with the crucible, and the contact surface is round and smooth and can also reduce the single-point pressure, and the blocking piece 12 is structurally arranged, so that when the blocking piece 12 rotates anticlockwise, the blocking rod 11 can be effectively pushed upwards, and when returning, the blocking piece 12 cannot be pushed back, and only the blocking rod 11 can be recovered by pulling the blocking rod 11 manually or by other power.

As shown in fig. 3, a spacing section of thick bamboo 10 and kelly 11 all are the slope setting with vertical plane, kelly 11 is close to the one end that blocks piece 12 and is the adduction arc setting, and during operation, the slope setting of cooperation kelly 11 and the adduction arc setting that blocks piece 12 one end let block piece 12 during counter-clockwise turning push away the process of kelly 11 more light, but when returning, because the contained angle between block piece 12 and the kelly 11 is too big, lead to being difficult to push up kelly 11, guaranteed the stable lift process of crucible.

As shown in fig. 3, four extension arms 8 are adjacent to each other at the same side and are in a group, two groups are provided, a series rope 15 is provided between two groups of extension arms 8, two ends of the series rope 15 penetrate through one side of a frame plate 9 and the top ends of two clamping rods 11, when the crucible is taken out and placed, the grabbing arm 14 needs to be recovered, only the control gripper 5 is required to be opened at the moment, the four groups of extension arms 8 can be separated from each other, the series rope 15 can be straightened along with the separation of the extension arms 8, the clamping rods 11 can slide upwards, the blocking of the clamping rods 11 is avoided, the grabbing arm 14 can return to a vertical state under the action of gravity at the moment, and then the crucible cover can be normally clamped upwards.

Example two

As shown in fig. 4, a first comparative example, in which another embodiment of the present invention is: one of them the inboard of framed panel 9 seted up spout 20, the inboard sliding connection of spout 20 has a driving strip 17, the bottom surface fixed mounting of driving strip 17 has latch 19 that a plurality of groups equidistance set up, the one end fixed mounting of change 13 has gear 18, gear 18 and latch 19 intermeshing, the during operation, the seed crystal bracket that a lot of carborundum grow all directly lays on the bottom surface of crucible cover, consequently need guarantee the stable promotion and the removal process of crucible cover, when the side of extension arm 8 extrusion crucible cover, can extrude and remove driving strip 17 for latch 19 and gear 18 take place the transmission and then drive the rotation of grapple 14, can let grapple 14 interior knot, withhold crucible cover bottom, and then guaranteed the stable support effect of crucible cover.

The utility model discloses a transmission strip 17, including driving strip 17, chute 20 and driving strip 17, driving strip 17 includes the elastic metal board that a plurality of reciprocal fixings connect, the tip of latch 19 rotates and is connected with the ball, the outside of driving strip 17 is provided with extrusion cover 21, extrusion cover 21 is woven for the elastic metal net and forms, one side fixed connection of extrusion cover 21 and framed board 9, the during operation, cooperation driving strip 17's structure setting for driving strip 17 can upwards carry out the bending rolling, not only can not deviate from the outside of framed board 9, can also return with the help of gravity simultaneously, cooperates the ball in the 19 outsides of latch simultaneously, can let the slip process of driving strip 17 become light swift, and the setting of extrusion cover 21 not only can reduce during external foreign matter gets into chute 20, can also let driving strip 17 can be correctly extruded.

When the silicon carbide crystal taking-out device works, the driving motor 16 drives the driving rod 2 and the extension rod 3 to swing to drive the mechanical claw 5 to move to a smelting furnace for producing silicon carbide, the lifting module 4 is used for putting down the mechanical claw 5, the heated crucible is held by the mechanical claw 5 and lifted up again, the heated crucible can be taken out, then the driving motor 16 is started again to move the crucible and the mechanical claw 5 to preset positions and put down, after the crucible is put down, the mechanical claw 5 is used for uncovering the crucible again, and the silicon carbide crystal growing on the seed crystal bracket can be taken out, so that the mechanical silicon carbide crystal taking-out function is realized, and compared with a taking-out mode of a forklift or a gantry crane, the mechanical silicon carbide crystal taking-out device is quicker and more convenient without complex manual operation; when the crucible lifting device works, the arrangement of the balancing weight is matched, the whole device can be stably placed on the ground when a crucible is pulled up, the problem of unstable gravity center is solved, the arrangement of the translation module can slightly adjust the position of the end part of the extension rod 3, the mechanical claw 5 can be ensured to grasp the crucible in the middle, and the grasping stability is further improved; when the automatic positioning device works, when the position of the mechanical claw 5 is adjusted, if the adjustment is carried out through human eyes, the time is long, and an experienced teacher is needed, the laser ranging module 6 is arranged, the laser ranging module 6 can downwards emit laser and then receive the laser, so that the distance is measured, the distance between the central position of the crucible cover and the laser ranging module 6 is enabled to be the nearest by matching with the structural arrangement of the crucible cover, the distance from the outer side to the center is gradually increased, the mechanical claw 5 is driven to move by controlling the driving motor 16 and the translation module through the measurement data of the laser ranging module 6, the manual positioning is not needed, the labor cost is reduced, and meanwhile, the full-automatic processing process is also realized; when the crucible gripping device works, when a crucible is gripped, the overall mass of the crucible is heavier, if the crucible is taken out through extrusion friction force at each time, the side wall of the crucible is easily extruded excessively, the gripper arm 14 is arranged, along with the opening and sinking of the gripper arm 5, the diameter of the crucible is a determined value, after the central position is determined by the laser ranging module 6, the gripper arm 5 only needs to be opened by a predetermined size, the extension arm 8 can just slide down along the outer wall of the crucible, so that the bottom surface of the gripper arm 14 can be tightly attached to the outer side of the crucible, when the gripper arm 14 at the bottom end of the extension arm 8 contacts the bottom surface of the melting furnace, the gripper arm 14 rotates due to extrusion, the gripper arm 14 is arranged in an arc shape, so that the gripper arm 14 can rotate inwards in a buckling manner, the four groups of gripper arms 14 can be inserted into the bottom surface of the crucible by increasing the force of the lifting module 4, the crucible is supported by the gripper arms 14, at this time, the clamping assembly is used for limiting the swivel 13 not to rotate, through the arrangement, compared with the mode of extruding and rubbing, the mode of supporting the crucible by the four groups of gripping arms 14 is more stable, and the outer side wall of the crucible cannot be damaged; when the clamping device works, after the grabbing arm 14 rotates, the blocking block 12 can suck the clamping rod 11 to jack up, after the blocking block 12 passes over the clamping rod 11, the clamping rod 11 can slide downwards under the action of gravity to block the blocking block 12, and the grabbing arm 14 cannot move backwards; when the crucible lifting device works, the arc-shaped end parts of the gripping arms 14 are arranged, so that the contact surface with a crucible can be increased, the contact surface is smooth and can also reduce single-point pressure, and the blocking block 12 is structurally arranged, so that the blocking block 12 can be effectively pushed upwards when rotating anticlockwise, and the blocking block 12 cannot be pushed back when returning, and can be recovered only by pulling the blocking block 11 manually or by other power; when the crucible lifting device works, the inclined arrangement of the clamping rod 11 and the inward-contracting arc-shaped arrangement of one end of the blocking block 12 are matched, so that the process of pushing the clamping rod 11 open when the blocking block 12 rotates anticlockwise is easier, but when the crucible lifting device returns, the clamping rod 11 is difficult to push upwards due to the fact that the included angle between the blocking block 12 and the clamping rod 11 is too large, and the stable lifting process of the crucible is guaranteed; when the crucible taking-out and placing device works, after a crucible is taken out and placed, the grabbing arm 14 needs to be recovered, at the moment, only the mechanical claw 5 needs to be controlled to be opened, at the moment, the four groups of extension arms 8 are separated from each other, the serial rope 15 can be straightened along with the separation of the extension arms 8, the clamping rod 11 can slide upwards, the blocking of the clamping rod 11 is avoided, at the moment, the grabbing arm 14 returns to the vertical state under the action of gravity, then, the crucible cover can be normally clamped upwards, through the arrangement, the effective recovery of the clamping rod 11 is realized, meanwhile, a complex mechanical structure does not need to be arranged, the cost is reduced, and the occurrence of faults is reduced; when the crucible cover is in work, a plurality of seed crystal brackets for growing silicon carbide are directly arranged on the bottom surface of the crucible cover, so that the stable lifting and moving processes of the crucible cover need to be ensured, and when the extension arm 8 extrudes the side surface of the crucible cover, the movable transmission strip 17 is extruded, so that the latch 19 and the gear 18 are driven to drive the grabbing arm 14 to rotate, the grabbing arm 14 can be internally buckled, the bottom end of the crucible cover is buckled, and the stable supporting effect of the crucible cover is ensured; the during operation, the structure setting of cooperation transmission strip 17 for transmission strip 17 can upwards carry out the crooked rolling, not only can not deviate from the outside of framed board 9, can also return with the help of gravity simultaneously, and the smooth ball in the 19 outsides of cooperation latch simultaneously can let the slip process of transmission strip 17 become light swift, and the setting of extrusion cover 21 not only can reduce external foreign matter and get into during spout 20, can also let transmission strip 17 can be correctly extruded.

The front, the back, the left, the right, the upper and the lower are all based on figure 1 in the attached drawings of the specification, according to the standard of the observation angle of a person, the side of the device facing an observer is defined as the front, the left side of the observer is defined as the left, and the like.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are merely intended to facilitate the description of the present invention and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the scope of the present invention.

The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A silicon carbide charging and crystal taking device is characterized in that: including base (1), the top fixed mounting of base (1) has driving motor (16), top fixedly connected with transfer line (2) of driving motor (16) runs through the outside of transfer line (2) is provided with extension rod (3) by the top, the bottom surface of extension rod (3) is provided with gripper (5) by one end, be connected with between gripper (5) and extension rod (3) lifting module (4), lifting module (4) are used for driving gripper (5) and reciprocate.

2. A silicon carbide charge crystal puller as set forth in claim 1 in which: one end of the extension rod (3) far away from the mechanical claw (5) is fixedly provided with a balancing weight, the inner side of the transmission rod (2) is provided with a translation module, the translation module is in transmission connection with the extension rod (3), and the translation module is used for driving the extension rod (3) to move horizontally.

3. A silicon carbide charge crystal puller as set forth in claim 2 in which: the middle part bottom fixed mounting of gripper (5) has laser rangefinder module (6), laser rangefinder module (6) are used for measuring gripper (5) to the distance of crucible, the crucible includes crucible body and crucible lid, the top of crucible lid is the bellied arc in center and sets up.

4. A silicon carbide charge crystal puller as set forth in claim 3 in which: the bottom of gripper (5) is rotated and is connected with four group extension arms (8), and four group extension arms (8) are the annular and arrange, extension arm (8) are including two sets of deckle boards (9), fixed connection between two sets of deckle boards (9), and leave the clearance between two sets of deckle boards (9), lean on the bottom fixedly connected with horizontal pole between two sets of deckle boards (9), the outside of horizontal pole is rotated and is connected with swivel (13), the bottom fixedly connected with of swivel (13) grabs arm (14), the top of swivel (13) is provided with the screens subassembly, the screens subassembly is used for restricting the removal of swivel (13), it is the arc setting to grab arm (14).

5. A silicon carbide crystal loading and taking apparatus as set forth in claim 4, wherein: the screens subassembly is including blockking block (12), block the outside fixed connection of block (12) and change (13), spacing section of thick bamboo of fixedly connected with (10) between two sets of deckle boards (9), the inboard sliding connection of spacing section of thick bamboo (10) has kelly (11), kelly (11) are located the top of change (13).

6. A silicon carbide charge crystal puller as set forth in claim 5 in which: the free end of the grabbing arm (14) is arc-shaped, the blocking block (12) is arranged in a barb shape, and the blocking block (12) and the grabbing arm (14) are oppositely arranged.

7. A silicon carbide charge crystal puller as set forth in claim 6 in which: spacing section of thick bamboo (10) and kelly (11) all are the slope setting with vertical plane, kelly (11) are close to the one end that blocks piece (12) and are adduction arc setting.

8. A silicon carbide charge crystal puller as set forth in claim 7 in which: four extension arm (8) homonymy is adjacent for a set of, totally two sets of, is provided with series connection rope (15) between two sets of extension arms (8), the top fixed connection of one side and two kelly (11) that frame plate (9) were run through at series connection rope (15) both ends.

9. A silicon carbide charge crystal puller as set forth in claim 8, wherein: one of them the inboard of framed panel (9) seted up spout (20), the inboard sliding connection of spout (20) has drive strip (17), the bottom surface fixed mounting of drive strip (17) has latch (19) that a plurality of groups equidistance set up, the one end fixed mounting of swivel (13) has gear (18), gear (18) and latch (19) intermeshing.

10. A silicon carbide charge withdrawal crystal apparatus as set forth in claim 9, wherein: spout (20) and drive strip (17) all are the arc setting, drive strip (17) include the elastic metal plate that a plurality of mutual fixed connects, the tip of latch (19) is rotated and is connected with the ball, the outside of drive strip (17) is provided with extrusion cover (21), extrusion cover (21) are woven for the elastic metal net and are formed, one side fixed connection of extrusion cover (21) and framed board (9).