CN217869179U

CN217869179U - Slag hanging device and crystal growth equipment with same

Info

Publication number: CN217869179U
Application number: CN202222324682.4U
Authority: CN
Inventors: 李向阳; 陈俊宏
Original assignee: Xuzhou Xinjing Semiconductor Technology Co Ltd
Current assignee: Zhonghuan Leading Xuzhou Semiconductor Materials Co ltd; Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority date: 2022-08-31
Filing date: 2022-08-31
Publication date: 2022-11-22
Anticipated expiration: 2032-08-31

Abstract

The utility model discloses a hang sediment device and crystal growth equipment that has it, hang the sediment device and include support piece, connecting rod, first grabbing piece and first tractive piece, the connecting rod is suitable for along vertical direction up-and-down motion between first position and second position, first grabbing piece includes first connecting portion and first dish body, the upper end of first connecting portion is connected with the lower extreme of connecting rod pivotally, when the connecting rod moves from the first position to the second position, the bottom wall of first dish body switches to the tilt state from the horizontal state, and first dish body is suitable for stretching into the melt in crucible; when the connecting rod moves from the second position to the first position, the bottom wall of the first disc body is switched to a horizontal state from an inclined state, and the first disc body is suitable for moving out molten soup so as to take out slag in the molten soup. According to the utility model discloses a hang sediment device, even when facing to have more or the great slag charge of volume in the melt soup, also can be betterly with other slag charges such as quartz pellet in the melt soup take out, efficient.

Description

Hang sediment device and have its crystal growth equipment

Technical Field

The utility model belongs to the technical field of crystal growth equipment technique and specifically relates to a hang sediment device and have its crystal growth equipment is related to.

Background

At present, in order to increase the yield of crystals prepared by crystal growth equipment, silicon materials are added into a crucible for the first time by using a secondary feeding pipe, however, the material of the feeding pipe used in secondary feeding generally consists of quartz materials, and in the using process, the secondary feeding pipe consisting of quartz materials is easy to break in the feeding process. In the related art, the seed crystal is often used for hanging slag such as quartz particles out in an adhering manner, but when the slag such as quartz particles is too much or the volume of the slag is large, the slag cannot be hung out once in an adhering manner, and the slag adhered to the seed crystal is easy to drop into the molten liquid again in the hanging-out process, so that the preparation efficiency of the crystal is affected.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, an object of the utility model is to provide a hang sediment device, hang getting rid of sediment material of sediment device effectual, efficient.

According to the utility model discloses hang sediment device of first aspect embodiment, it is used for crystal growth equipment to hang the sediment device, crystal growth equipment includes: furnace body and crucible, the growth chamber is injectd to the furnace body, the top in growth chamber has the portion of bearing, the crucible is established in the growth chamber, hang the sediment device and include: the support part is suitable for being supported on the bearing part; the connecting rod penetrates through the supporting piece and is suitable for moving up and down between a first position and a second position along the vertical direction, and the first position is located on the upper side of the second position; the first gripper includes: the crucible pot comprises a first connecting part and a first disc part, wherein the upper end of the first connecting part is pivotally connected with the lower end of the connecting rod, the lower end of the first connecting part is detachably connected with the upper end of the first disc part, the first disc part defines a first accommodating cavity, the first accommodating cavity is open towards one side of the central axis of the crucible pot, and a first liquid leakage hole which penetrates through the first accommodating cavity is formed in the bottom wall of the first disc part; the upper end of the first traction piece is pivotally connected with the bottom wall of the support piece, and the lower end of the first traction piece is pivotally connected with the outer side wall of the first grabbing piece; when the connecting rod moves from the first position to the second position, the bottom wall of the first tray body is switched from a horizontal state to an inclined state, and the first tray body is suitable for extending into the molten liquid in the crucible; when the connecting rod moves from the second position to the first position, the bottom wall of the first tray body is switched to a horizontal state from an inclined state, and the first tray body is suitable for moving out the molten soup to take out slag in the molten soup.

According to the utility model discloses hang sediment device through the linkage between connecting rod, first grabbing piece and the first traction rod, even if there are slag charges such as a large amount of quartz particles in facing the melt liquid, perhaps when facing the volume of slag charges such as quartz particles, weight are great, also can be betterly with other slag charges such as quartz particles in the melt liquid take out, easy operation can not influence the subsequent system crystal operation of crystal growth equipment. Moreover, the slag removing effect of the slag lifting device is good, and the efficiency is high.

The slag hanging device of the utility model can also have the following additional technical characteristics:

in some embodiments of the present invention, the first disk body portion includes: the first liquid leakage holes are formed in the bottom plate and are arranged in multiple rows and multiple columns on the bottom plate; the first baffle, first baffle with the bottom plate deviates from the one side of crucible central axis is connected, by lower supreme orientation, first baffle orientation is close to the first direction slope that holds the chamber central axis extends, the lower extreme of first tractive spare with the deviation of first baffle but first side pivot ground of holding the chamber is connected.

Optionally, the first tray body further comprises: the bottom plate, first baffle, second baffle with the third baffle is in the width direction of bottom plate sets up relatively, the second baffle with the third baffle all with the bottom plate is connected, just the second baffle with the third baffle distribute in the relative both sides of first baffle, the second baffle with the third baffle all with first baffle is connected, wherein, the bottom plate the first baffle the second baffle with the third baffle prescribes a limit to jointly the first chamber that holds.

Optionally, in a direction from bottom to top, the second baffle plate and the third baffle plate both extend obliquely toward a direction close to a central axis of the first accommodating cavity, and a width of the bottom plate gradually increases in a direction from a side of the bottom plate departing from the central axis of the crucible to a side of the bottom plate close to the central axis of the crucible; and/or the included angle a between the first baffle and the bottom plate is more than or equal to 45 degrees and less than or equal to 70 degrees.

In some embodiments of the present invention, an end of the first baffle connected to the first connection portion has a first insertion portion, an end of the first connection portion connected to the first baffle has a second insertion portion, one of the first insertion portion and the second insertion portion is formed as a slot, and the other of the first insertion portion and the second insertion portion is formed as a tongue fitted to the slot, wherein a cross-sectional area of the tongue is gradually reduced in a direction from a free end of the tongue to a fixed end of the tongue; and/or a first fixing hole suitable for a fastener to pass through is arranged on the first insertion part, a second fixing hole suitable for the fastener to pass through is arranged on the second insertion part, and the first insertion part and the second insertion part are connected through the fastener.

In some embodiments of the utility model, hang the sediment device and still include: a second grasping member, the second grasping member comprising: the crucible comprises a first connecting part, a first disk body part and a second disk body part, wherein the first connecting part is arranged on the bottom wall of the first disk body part, the second connecting part is opposite to the first connecting part, the upper end of the second connecting part is connected with the lower end of the connecting rod in a pivoting manner, the second disk body part and the first disk body part are arranged opposite to each other along the radial direction of the crucible, the upper end of the second disk body part is detachably connected with the lower end of the second connecting part, the second disk body part defines a second accommodating cavity, the second accommodating cavity is opened towards one side of the central axis of the crucible, and a penetrating second liquid leakage hole is formed in the bottom wall of the second disk body part; the second traction piece and the first traction piece are distributed on two opposite sides of the supporting piece, the upper end of the second traction piece is pivotally connected with the bottom wall of the supporting piece, and the lower end of the second traction piece is pivotally connected with the outer side wall of the second grabbing piece; wherein when the connecting rod moves from the first position to the second position, the bottom wall of the second disk portion is switched from a horizontal state to an inclined state, the second disk portion is adapted to project into the molten soup of the crucible, and a radially inner side of the bottom wall of the second disk portion is spaced apart from a radially inner side of the bottom wall of the first disk portion; when the connecting rod moves from the second position to the first position, the bottom wall of the second disc body is switched to a horizontal state from an inclined state, the radial inner side of the bottom wall of the second disc body is abutted to the radial inner side of the bottom wall of the first disc body, and the first disc body and the second disc body are suitable for moving out the molten soup to take out slag in the molten soup.

Optionally, the first disk portion and the second disk portion are made of quartz or silicon nitride, or both the first disk portion and the second disk portion include: the multilayer ceramic capacitor comprises an inner layer structure and an outer layer structure which are arranged in a stacked mode, wherein the inner layer structure is a silicon nitride piece, and the outer layer structure is a quartz piece.

In some embodiments of the present invention, the first disk portion is provided with a plurality of first disk portions, the plurality of first disk portions are replaceably connected to the first connecting portion, and the first weep holes of each of the first disk portions have different hole diameters.

The utility model discloses an in some embodiments, support piece's center is equipped with the through hole, the connecting rod is worn to establish with sliding from top to bottom in the through hole, be equipped with the dog on the connecting rod, the dog is fixed on the periphery wall of connecting rod, just the dog is followed the circumference direction of connecting rod extends and is the annular, the dog is located support piece's downside, the through hole is in orthographic projection on the dog is located the within range that the periphery of dog was followed, perhaps, the connecting rod is the lead screw, hang the sediment device and still include: the driving mechanism is fixedly arranged on the supporting piece, and the output end of the driving mechanism is suitable for being matched with the connecting rod so as to drive the connecting rod to move up and down along the axial direction.

The utility model also provides a crystal growth equipment of hanging sediment device with above-mentioned embodiment.

According to the utility model discloses crystal growth equipment of second aspect embodiment is including hanging the sediment device, through the sediment device of hanging that is equipped with above-mentioned embodiment, can drag for the slag charge such as quartz particle in the molten bath betterly, even if there are a large amount of slag charges such as quartz particle in facing the molten bath, perhaps when facing the volume of slag charge such as quartz particle, weight are great, also can be betterly with other slag charges such as quartz particle in the molten bath take out, easy operation can not influence the subsequent brilliant operation of making of crystal growth equipment. Moreover, the slag removing effect of the slag hoisting device is good and the efficiency is high.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

fig. 1 is a schematic view of a slag lifting device according to a first embodiment of the present invention, wherein a connecting rod is in a first position;

FIG. 2 is an enlarged view of area B of FIG. 1;

FIG. 3 is a schematic view of a bottom plate of a slag lifting device according to an embodiment of the present invention;

FIG. 4 is a cross-sectional view of a first pan body portion of a slag lifting device according to an embodiment of the present invention;

fig. 5 is a schematic view of a slag lifting device according to a first embodiment of the present invention, wherein the connecting rod is in a second position;

fig. 6 is a schematic view of a slag lifting device according to a second embodiment of the present invention, wherein the connecting rod is in the first position;

fig. 7 is a schematic view of a slag lifting device according to the second embodiment of the present invention, wherein the connecting rod is in the second position.

Reference numerals:

a slag hoisting device 10,

A supporting piece 1, a through hole 11,

A connecting rod 2, a stop block 21,

The first grasping member 3, the first connecting portion 31, the first inserting portion 311, the first tray portion 32, the bottom plate 321, the first weep hole 3211, the first baffle 322, the second inserting portion 3221, the second baffle 323, the third baffle 324, the first catch, the second catch, the third catch, the second inserting portion 3221, the second catch, the third catch, and the third catch,

A first traction piece 4,

A second grasping member 5, a second connecting portion 51, a second disk portion 52, a second weep hole 5211, a second drain hole,

A second traction piece 6,

A driving mechanism 7,

A bearing part 20 and a seed crystal rope 30.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Firstly, it should be noted that a crystal growth apparatus includes a furnace body and a crucible, the furnace body defines a growth cavity, the crucible is disposed in the growth cavity, taking polysilicon production as an example, a silicon material can be hot-melted in the crucible to produce polysilicon, at present, in order to increase the yield of crystals prepared by the crystal growth apparatus, the silicon material is added again into the crucible by using a secondary feeding pipe after the silicon material is firstly added into the crucible, however, the material of the feeding pipe used in the secondary feeding is generally made of quartz material, during the use process, the secondary feeding pipe made of quartz material is easy to collide with the silicon material or the furnace body or the crucible, taking the secondary feeding pipe as an example, after the secondary feeding pipe is damaged, quartz particles generated by the secondary feeding pipe fall into the molten liquid and float on the surface of the molten liquid, thus, when the crystal bar is pulled, slag materials such as quartz particles are easy to adhere to the pulled crystal bar, thereby easily affecting the quality of the crystal bar, and therefore, slag materials such as quartz particles floating on the surface of the molten liquid need to be removed. In the related art, the seed crystal is often used for hanging slag such as quartz particles out in an adhering manner, but when the slag such as quartz particles is too much or the volume of the slag is large, the slag cannot be hung out once in an adhering manner, and the slag adhered to the seed crystal is easy to drop into the molten liquid again in the hanging-out process, so that the preparation efficiency of the crystal is affected.

Based on this, this application has proposed a hang sediment device 10, even the slag charge such as quartz particle in the molten steel is too much or the volume is great, the sediment device 10 of this application also can take out the slag charge such as quartz particle from the molten steel betterly to guarantee the production efficiency of polycrystalline silicon.

A slag lifting device 10 according to an embodiment of the present invention will be described with reference to fig. 1 to 7.

As shown in fig. 1-7, according to the slag hanging device 10 of the embodiment of the present invention, the slag hanging device 10 includes a support member 1, a connecting rod 2, a first grabbing member 3 and a first pulling member 4, a bearing portion 20 may be provided at the top of the growth cavity, the support member 1 is adapted to be supported on the bearing portion 20, in a specific example, the bearing portion 20 may be constructed at a furnace mouth of the furnace body, when the slag material such as quartz particles in the crucible is required to be fished out from the molten liquid by the slag hanging device 10, the support member 1 may be placed at the furnace mouth in a lapping manner, so that the connecting rod 2, the first grabbing member 3, and the first pulling member 4 extend into the growth cavity to remove the slag material in the molten liquid, in an example, when the support member 1 is lapped at the furnace mouth, the furnace mouth may also be closed, thereby the growth cavity is closed, so as to prevent the slag hanging device 10 from dropping into the growth cavity again when the slag material such as quartz particles are fished out, thereby affecting the removal work of the slag material. In addition, it can be understood that the bearing part 20 may also be a structure configured on the furnace body and used for bearing the support 1 alone, for example, the bearing part 20 is configured in the growth chamber, and of course, the bearing part 20 may also be disposed at other positions of the furnace body, which is not described herein again.

Connecting rod 2 wears to establish on support piece 1, and connecting rod 2 is suitable for along vertical direction up-and-down motion between the primary importance and the second place, and the primary importance lies in the upside of second place, refers to as shown in figure 1, and first grabbing piece 3 includes: the crucible device comprises a first connecting part 31 and a first disk body part 32, wherein the upper end of the first connecting part 31 is pivotally connected with the lower end of a connecting rod 2, the lower end of the first connecting part 31 is detachably connected with the upper end of the first disk body part 32, the first disk body part 32 defines a first accommodating cavity, one side of the first accommodating cavity facing to the central axis of the crucible is open, a first liquid leakage hole 3211 penetrating through the bottom wall of the first disk body part 32 is formed, the upper end of a first pulling part 4 is pivotally connected with the bottom wall of a supporting part 1, and the lower end of the first pulling part 4 is pivotally connected with a first grabbing part 3; when the connecting rod 2 moves from the first position to the second position, the bottom wall of the first tray body 32 is switched from a horizontal state to an inclined state, and the first tray body 32 is suitable for extending into the molten liquid in the crucible; when the connecting rod 2 moves from the second position to the first position, the bottom wall of the first pan body 32 is switched from the inclined state to the horizontal state, and the first pan body 32 is adapted to move out the molten soup to take out slag in the molten soup. In an example of the present invention, the central axis of the crucible can refer to the straight line of the seed crystal string 30 in the drawing.

In addition, utilize hanging sediment device 10 in this application can extract the slag charge that weight is bigger, can not appear hanging the sediment problem when utilizing the seed crystal adhesion among the relevant art.

Further, in an example of the present application, the length of the first pulling member 4 is adjustable, and the slag hanging position of the first disc body 32 can be adjusted by adjusting the length of the first pulling member 4. Specifically, the first pulling member 4 may be a flexible rope, and a unrolling mechanism is disposed at one end of the first pulling member 4 connected to the supporting member 1.

Referring to a specific example shown in fig. 1 and 5, the support member 1 has a through hole 11 penetrating through the support member 1 in the up-down direction, and the connecting rod 2 can be inserted into the through hole 11, it can be understood that when the connecting rod 2 moves in the up-down direction, the through hole 11 can limit the relative position of the connecting rod 2, which can facilitate the connecting rod 2 to move stably in the up-down direction.

Further, the first connecting portion 31 may be a rod-shaped first connecting rod, an upper end of the first connecting rod is hinged to a lower end of the connecting rod 2, where the hinge may be a bolt connection, and a lower end of the first connecting rod may be detachably connected to an upper end of the first disk body portion 32, where the detachable connection may be a socket connection, a screw connection, a rivet connection, or the like, and is not limited herein.

Furthermore, the first pulling part 4 may be a pulling rope, the upper end of the pulling rope is fixedly connected with the bottom wall of the support part 1, the lower end of the pulling rope is fixedly connected with the first grabbing part 3, the pulling rope can satisfy the pivotal connection between the first pulling part 4 and the support part 1 and the pivotal connection between the first pulling part 4 and the first grabbing part 3, and the structure is simple and the cost is low. In addition, it can be understood that the first traction member 4 can also be a rod-shaped traction rod, and the upper end and the lower end of the traction rod are respectively hinged with the support member 1 and the first grabbing member 3, which is not limited herein.

In this example, referring to fig. 1 and 5, taking as an example that the lower end of the first pulling member 4 is pivotally connected to the first disc portion 32, when the connecting rod 2 is in the first position, the first disc portion 32 is in a horizontal state, where the horizontal state refers to a state that a plane of the bottom wall of the first disc portion 32 is substantially parallel to a straight line in the left-right direction shown in fig. 1, when the connecting rod 2 moves from top to bottom (i.e. moves from the first position to the second position), the connecting rod 2 can drive the upper end of the first connecting rod to move from top to bottom, so that the first connecting rod can rotate around the lower end of the pulling rope, when the connecting rod 2 moves to the second position, the first disc portion 32 is in an inclined state, where the inclined state refers to a state that an included angle exists between the plane of the bottom wall of the first disc portion 32 and the straight line in the left-right direction shown in fig. 1, at this time, the connecting rod 2 can move from the second position to the first position, so that the bottom wall of the first tray body 32 is switched from the inclined state to the horizontal state, and in the process that the bottom wall of the first tray body 32 is switched from the inclined state to the horizontal state, the first tray body 32 can scoop slag such as quartz particles in molten soup into the first accommodating cavity in a manner similar to a fishing net fishing manner, the molten soup in the first accommodating cavity can return to the crucible from the first liquid leaking hole 3211, and after the slag such as quartz particles is scooped out by the first tray body 32, the slag lifting device 10 can be taken out from the furnace body High efficiency and no influence on the subsequent crystal making operation of the crystal growth equipment.

Alternatively, the lower end of the first pulling member 4 may be pivotally connected to the first connecting portion 31, and the lower end of the first pulling member 4 may also be pivotally connected to the first tray body portion 32, which is not limited herein. In a preferred example, the lower end of the first pulling member 4 is pivotally connected to the outer sidewall of the first grabbing member 3, where the outer sidewall refers to the sidewall of the first grabbing member 3 on the side away from the central axis, and specifically referring to fig. 1, the lower end of the first pulling member 4 is pivotally connected to the sidewall of the first pan body 32 on the side away from the central axis, so that the first pan body 32 can have a larger rotation angle when switching between the inclined state and the horizontal state, and the first pan body 32 can be facilitated to fish up slag in the molten steel.

From this, according to the utility model discloses hang sediment device 10 through the linkage between connecting rod 2, first grabbing 3 and the first traction rod, even there are slag charges such as a large amount of quartz particles in the melt, perhaps when the volume of slag charges such as quartz particles, weight are great, also can be betterly with other slag charges such as quartz particles in the melt fish out, easy operation can not influence the subsequent brilliant operation of system of crystal growth equipment. In addition, the slag removing effect of the slag lifting device 10 is good, and the efficiency is high.

In some embodiments of the present invention, referring to fig. 1, the first tray portion 32 includes a bottom plate 321 and a first baffle 322, a plurality of first liquid leaking holes 3211 are formed on the bottom plate 321, and the plurality of first liquid leaking holes 3211 are arranged in multiple rows and multiple columns on the bottom plate 321, and the plurality of first liquid leaking holes 3211 can improve the efficiency of the first containing cavity for flowing out the molten soup. Referring to a specific example shown in fig. 3, eight rows and nine columns of the first liquid leaking holes 3211 are arranged on the bottom plate 321, but it should be understood that ten rows and eleven columns or ten rows and nine columns may also be arranged on the bottom plate 321 according to actual requirements, which is not limited herein.

Further, the first baffle 322 is connected with one side of the bottom plate 321 departing from the central axis of the crucible, in the direction from bottom to top, the first baffle 322 extends obliquely towards the direction close to the central axis of the first containing cavity, and the lower end of the first pulling member 4 is pivotally connected with one side of the first baffle 322 departing from the first containing cavity. Referring to fig. 1, the first connecting portion 31 may be a first connecting rod, the first connecting rod is inserted into the upper end of the first baffle 322, a mounting portion is provided at a joint of the bottom plate 321 and the first baffle 322, and the lower end of the first pulling member 4 is pivotally connected to the mounting portion of the first tray portion 32, so that when the connecting rod 2 moves up and down, the first tray portion 32 may have a large rotation range, so as to well fish up slag such as quartz particles in molten soup, and the first baffle 322 extends obliquely toward a direction close to the central axis of the first accommodating cavity, thereby preventing the first tray portion 32 from fishing up slag such as quartz particles in a rotating process, and slag such as quartz particles from spilling out of the first baffle 322. In an example of the present invention, the central axis of the first accommodating chamber may refer to a straight line of the attached drawings where the seed crystal string 30 is located.

Further, the first pan body 32 further includes a second baffle 323 and a third baffle 324, as shown in fig. 1 and 4, the second baffle 323 and the third baffle 324 are disposed opposite to each other in a width direction of the bottom plate 321 (the width direction can refer to a front-back direction shown in fig. 4), the second baffle 323 and the third baffle 324 are connected to the bottom plate 321, the second baffle 323 and the third baffle 324 are disposed on opposite sides of the first baffle 322, and the second baffle 323 and the third baffle 324 are connected to the first baffle 322, wherein the bottom plate 321, the first baffle 322, the second baffle 323 and the third baffle 324 jointly define a first accommodating cavity, which has a first opening facing upward and a second opening facing a central axis, as shown in fig. 1 in a vertical direction, and the first accommodating cavity has a first opening facing upward and the second opening facing the central axis, so that when the first pan body 32 is switched from an inclined state to a horizontal state, slag such as slag particles and slag particles on the melt can enter the first accommodating cavity from the first opening and the second opening, and thus, a larger volume of the slag particles and the slag particles can be extracted efficiently.

Optionally, in a direction from bottom to top, the second baffle 323 and the third baffle 324 extend obliquely toward a direction close to the central axis of the first accommodating chamber, so that the molten liquid and slag such as quartz particles on the molten liquid are not easily spilled from the second baffle 323 or the third baffle 324 after entering the first accommodating chamber from the first opening and the second opening.

Further, in the first example, the width of the bottom plate 321 gradually increases in a direction from a side of the bottom plate 321 facing away from the crucible center axis to a side of the bottom plate 321 closer to the crucible center axis; in a second example, shown with reference to FIG. 1, the angle, a, between the first baffle 322 and the base 321 satisfies 45 ≦ a ≦ 70; in the third example, the width of the bottom plate 321 gradually increases in the direction from the side of the bottom plate 321 that faces away from the central axis of the crucible to the side of the bottom plate 321 that is close to the central axis of the crucible, and the angle a between the first shutter 322 and the bottom plate 321 satisfies 45 ≦ 70 °. The third example is exemplarily described, so that the width of the bottom plate 321 is gradually increased in a direction from a side of the bottom plate 321 departing from the central axis of the crucible to a side of the bottom plate 321 close to the central axis of the crucible, more or larger slag, such as quartz particles, can enter the first containing chamber, in addition, an included angle a between the first baffle 322 and the bottom plate 321 satisfies 45 ° ≦ 70 °, and slag, such as quartz particles, entering the first containing chamber can be better prevented from spilling, wherein an included angle a between the first baffle 322 and the bottom plate 321 may be 45 °, 46 °, 47 °, 50 °, 55 °, 56 °, 60 °, 61 °, 64 °, 69 °, 70 °.

In some embodiments of the present invention, as shown in fig. 1 and fig. 2, an end of the first baffle 322 connected to the first connection portion 31 has a first insertion portion 311, an end of the first connection portion 31 connected to the first baffle 322 has a second insertion portion 3221, one of the first insertion portion 311 and the second insertion portion 3221 is formed as a slot, and the other of the first insertion portion 311 and the second insertion portion 3221 is formed as a tongue engaged with the slot, in a specific example shown in fig. 2, the first insertion portion 311 is formed as a slot, and the second insertion portion 3221 is formed as a tongue, so that the first baffle 322 can be better engaged with the first connection portion 31 by engaging the tongue with the slot. Further, when the first blocking plate 322 is inserted into the first connecting portion 31, the cross-sectional area of the tongue gradually decreases from the free end of the tongue to the fixed end of the tongue, and as shown in fig. 2, the cross-sectional area of the tongue gradually decreases from the first connecting portion 31 to the first blocking plate 322, so that the first blocking plate 322 is not easily separated from the first connecting portion 31.

Optionally, a first fixing hole suitable for a fastener to pass through is formed in the first plugging portion 311, a second fixing hole suitable for a fastener to pass through is formed in the second plugging portion 3221, and the first plugging portion 311 and the second plugging portion 3221 are connected by the fastener, that is, after the first plugging portion 311 and the second plugging portion 3221 are plugged and matched, the first plugging portion 311 and the second plugging portion 3221 can be fixedly connected by matching of the fastener with the first fixing hole and the second fixing hole, so that the first baffle 322 and the first connecting portion 31 can be prevented from being separated. In a specific example, the fastener may be a screw, a rivet, or a bolt, which is not limited herein.

In some embodiments of the present invention, referring to fig. 1 and 5, the slag lifting device 10 further includes a second grasping element 5 and a second pulling element 6, wherein the second grasping element 5 includes: the second connecting part 51 and the second disk body part 52, the second connecting part 51 is arranged opposite to the first connecting part 31, the upper end of the second connecting part 51 is pivotally connected with the lower end of the connecting rod 2, the second disk body part 52 is arranged opposite to the first disk body part 32 along the radial direction of the crucible, the upper end of the second disk body part 52 is detachably connected with the lower end of the second connecting part 51, the second disk body part 52 defines a second accommodating cavity, the second accommodating cavity is opened towards one side of the central axis of the crucible, a second leakage hole penetrating through the second disk body part 52 is arranged on the bottom wall of the second disk body part 52, the second drawing part 6 and the first drawing part 4 are distributed on two opposite sides of the supporting part 1, the upper end of the second drawing part 6 is pivotally connected with the bottom wall of the supporting part 1, and the lower end of the second drawing part 6 is pivotally connected with the second grabbing part 5; wherein when the connecting rod 2 moves from the first position to the second position, the bottom wall of the second pan body part 52 is switched from a horizontal state to an inclined state, the second pan body part 52 is suitable for extending into the molten liquid of the crucible, and the radial inner side of the bottom wall of the second pan body part 52 is spaced from the radial inner side of the bottom wall of the first pan body part 32; when the connecting rod 2 moves from the second position to the first position, the bottom wall of the second pan body portion 52 is switched from the inclined state to the horizontal state, and the radially inner side of the bottom wall of the second pan body portion 52 abuts against the radially inner side of the bottom wall of the first pan body portion 32, the first pan body portion 32 and the second pan body portion 52 are adapted to move out the molten soup to take out slag in the molten soup.

Further, in one example of the present application, the length of the second pulling member 6 is adjustable, and the slag hanging position of the second pan body part 52 can be adjusted by adjusting the length of the second pulling member 6. Specifically, the second pulling member 6 may be a flexible rope, and a unrolling mechanism is disposed at one end of the second pulling member 6 connected to the supporting member 1.

Referring to a specific example shown in fig. 1 and 5, a left side of fig. 1 is used as the first grasping element 3 and the first pulling element 4, and a right side of fig. 1 is used as the second grasping element 5 and the second pulling element 6, wherein the first connecting portion 31 is a rod-shaped first connecting rod, the second connecting portion 51 is a rod-shaped second connecting rod, the first pulling element 4 is a first pulling rope, the second pulling element 6 is a second pulling rope, the first connecting rod and the second connecting rod are symmetrically hinged on left and right sides of the connecting rod 2, the first pulling rope and the second pulling rope are also stacked and disposed on left and right sides of the connecting rod 2, in this example, the first tray body 32 and the second tray body 52 may have the same structure, that is, the second tray body 52 also has a bottom plate 321, a first baffle 322, a second baffle 323, a third baffle 324, and second leakage holes are also disposed on the bottom plate 321 of the second tray body 52, the second leakage holes are provided with a plurality of first leakage holes, a plurality of rows of the first leakage holes 322, a plurality of the second leakage holes 323, and a plurality of the second leakage holes are not repeated in the same layout form of the first tray body 321 and the second leakage baffle plate 324 and the second leakage holes.

Thus, when the connecting rod 2 is in the first position, the first disk body 32 and the second disk body 52 are both in a horizontal state, where the horizontal state refers to a state where the plane of the bottom wall of the first disk body 32 and the plane of the bottom wall of the second disk body 52 are both substantially parallel to the straight line in the left-right direction shown in fig. 1, and when the first disk body 32 and the second disk body 52 are both in the horizontal state, the opening of the first disk body 32 facing the right side is opposite to the opening of the second disk body 52 facing the left side, so that the first accommodating cavity of the first disk body 32 and the second accommodating cavity of the second disk body 52 form a large accommodating cavity with an upward opening.

When the connecting rod 2 moves from top to bottom (i.e. moves from the first position to the second position), the connecting rod 2 can simultaneously drive the upper end of the first connecting rod and the upper end of the second connecting rod to move from top to bottom, so that the first connecting rod can rotate around the lower end of the first pulling rope and the second connecting rod rotates around the lower end of the second pulling rope, when the connecting rod 2 moves to the second position, the first disk body 32 and the second disk body 52 are both in an inclined state, where the inclined state refers to a state where an included angle is formed between a plane where the bottom wall of the first disk body 32 is located and a straight line where the left-right direction is located as shown in fig. 1, and a state where an included angle is formed between a plane where the bottom wall of the second disk body 52 is located and a straight line where the left-right direction is located as shown in fig. 1 (specifically, as shown in fig. 1), at this time, the connecting rod 2 can move from the second position to the first position, therefore, the bottom wall of the first disk body 32 is switched from an inclined state to a horizontal state, the bottom wall of the second disk body 52 is switched from an inclined state to a horizontal state, in the process that the first disk body 32 and the second disk body 52 are switched from the inclined state to the horizontal state, the first disk body 32 and the second disk body 52 can respectively drag other slag such as quartz particles in molten liquid into the first accommodating cavity and the second accommodating cavity in a manner similar to fishing with a net, the molten liquid in the first accommodating cavity can flow back into the crucible from the first liquid leakage hole 3211, the molten liquid in the second accommodating cavity can flow back into the crucible from the second liquid leakage hole, when the first disk body 32 and the second disk body 52 are both in the horizontal state, the first accommodating cavity and the second accommodating cavity construct a large accommodating cavity with upward openings again, so that the other slag such as quartz particles and the like are not easy to fall into the crucible again after being dragged, at the moment, the slag hanging device 10 can be taken out of the furnace body, the operation is simple, and the subsequent crystal manufacturing operation of the crystal growth equipment cannot be influenced.

In some embodiments of the present invention, the first disk body 32 and the second disk body 52 are quartz or silicon nitride, and therefore, when the first disk body 32 extends into the melt, or the second disk body 52 extends into the melt, the first disk body 32 and the second disk body 52 will not be melted into the melt, and therefore the melt will not be contaminated, and the subsequent crystal manufacturing operation will not be affected.

In one example, the first and second disk portions 32, 52 each include: the inner layer structure and the outer layer structure of the stacked arrangement, the inner layer structure is a silicon nitride piece, the outer layer structure is a quartz piece, here, it should be noted that, when the quartz piece contacts the molten liquid, softening easily occurs, thereby affecting the fishing of the slag in the molten liquid by the first disk part 32 or the second disk part 52, and making the silicon nitride piece as the inner layer structure, the quartz piece as the outer layer structure, the silicon nitride piece can support the outer quartz piece, thereby ensuring the fishing effect of the slag in the molten liquid by the first disk part 32 or the second disk part 52, in addition, in some crystal preparation processes, there can not be nitrogen material in the required molten liquid, therefore, the silicon nitride piece can not be used as the first disk part 32 and the second disk part 52 for fishing, while the silicon nitride piece is used as the inner layer structure in this example, the quartz piece as the outer layer structure, the contact of the silicon nitride piece with the molten liquid can be avoided, and the fishing effect of the slag can be better improved, therefore, the first disk part 32 and the second disk part 52 in this example have better practicability.

In some embodiments of the present invention, the first disk portion 32 is provided with a plurality of first disk portions 32, the plurality of first disk portions 32 are alternatively connected to the first connecting portion 31, and the first weep holes 3211 of each first disk portion 32 have different hole diameters. Therefore, in one example, the first pan body 32 having the first weep holes 3211 with a suitable hole diameter can be selected according to actual requirements, and then the first pan body 32 is mounted on the first connecting portion 31, so that slag such as quartz particles in the molten steel can be fished, and the flexibility is high; in another example, when there is more slag such as quartz particles in the molten liquid and slag with a larger volume exists, at this time, the first pan body portion 32 of the first liquid leaking hole 3211 with a larger aperture may be selected first, then the first pan body portion 32 is mounted on the first connecting portion 31 to fish up the particulate matter with a larger volume in the molten liquid, then the first pan body portion 32 of the first liquid leaking hole 3211 with a smaller aperture is selected, and then the first pan body portion 32 is mounted on the first connecting portion 31 to fish up the particulate matter with a smaller volume in the molten liquid, so that the difficulty of the fishing operation may be reduced, and the effect of the fishing operation may be improved.

Optionally, the first weep hole 3211 and the second weep hole may both be circular holes, and the diameter R1 of the first weep hole 3211 may satisfy: r1 is more than or equal to 2mm and less than or equal to 10mm, and the diameter R2 of the second weep hole can satisfy the following conditions: r2 is more than or equal to 2mm and less than or equal to 10mm, and it is understood that the first liquid leaking hole 3211 and the second liquid leaking hole may be polygonal holes, elliptical holes, or the like, without limitation.

In some embodiments of the present invention, as shown in fig. 1 and 5, the through hole 11 is disposed at the center of the supporting member 1, the connecting rod 2 is slidably inserted into the through hole 11 up and down, the stopper 21 is disposed on the connecting rod 2, the stopper 21 is fixed on the outer circumferential wall of the connecting rod 2, the stopper 21 extends along the circumferential direction of the connecting rod 2 and is in a ring shape, the stopper 21 is located at the lower side of the supporting member 1, and the orthographic projection of the through hole 11 on the stopper 21 is located within the range of the outer circumferential edge of the stopper 21. It can be understood that the cross sectional area of the stop block is larger than that of the inner contour of the through hole, after the connecting rod 2 moves from the second position to the first position, the connecting rod 2 continues to move upwards, the stop block 21 cannot penetrate through the through hole, and the stop block 21 can be abutted against the support piece 1, so that the support piece 1 can be taken out of the furnace body together along with the connecting rod 2, the taking-out efficiency is improved, and the time is saved. In addition, the stopper 21 can be directly abutted and limited with the support 1, so that the first disk body part 32 and the second disk body part 52 are kept in a horizontal state in the lifting process, and the shaking is avoided.

In the utility model discloses a in a concrete example, refer to fig. 1 and fig. 5, the upper end of connecting rod 2 can be dismantled with the seed crystal rope 30 of crystal growth equipment and be connected, therefore, when needs carry out the slag charge to the molten bath and fish for, can make connecting rod 2 link to each other with seed crystal rope 30, then through the mode of seed crystal rope 30 hoist and mount, make support piece 1 support in the fire door department of furnace body, then seed crystal rope 30 continues downwards, can drive connecting rod 2 downward movement, also be from first position activity to second position, and then make first dish portion 32 and second dish portion 52 all switch to the tilt state from the horizontality, at this moment, first dish portion 32 and second dish portion 52 can stretch into in the molten bath of crucible.

It can be understood that, when the first pan body 32 and the second pan body 52 do not extend into the molten liquid, the crucible can be moved upwards, so that the first pan body 32 and the second pan body 52 can extend into the molten liquid, and after the first pan body 32 and the second pan body 52 can extend into the molten liquid of the crucible, the seed crystal rope 30 can be moved upwards, so that the first pan body 32 and the second pan body 52 are both switched from the inclined state to the horizontal state to fish up the slag in the molten liquid, and since the stopper 21 is matched with the support 1, so that the first pan body 32 and the second pan body 52 are both kept in the horizontal state, the fished slag can be stably contained in the first pan body 32 and the second pan body 52, and at this time, the seed crystal rope 30 can continue to move upwards, and the whole slag hanging device 10 can be hung out from the furnace body.

Further, the upper end of the connection rod 2 is detachably connected to the seed crystal string 30 of the crystal growth apparatus. Therefore, an additional lifting mechanism is not required to be arranged, the number of parts of the slag lifting device is simplified, the complexity of the slag lifting device is simplified, and the processing and manufacturing cost is reduced.

In another specific example of the present invention, referring to fig. 6 and 7, the connecting rod 2 is a lead screw, and the slag-lifting device 10 further includes: and the driving mechanism 7 is fixedly arranged on the supporting piece 1, and the output end of the driving mechanism 7 is suitable for being matched with the connecting rod 2 so as to drive the connecting rod 2 to move up and down along the axial direction. Specifically, the driving mechanism 7 may include a rotating motor having a nut engaged with the lead screw therein, and thus the rotating motor may rotate forward or reverse to drive the connecting rod 2 to move upward or downward, and the rotating motor controls the connecting rod 2 to move upward and downward, so as to control the rotation angle of the first grabbing part 3 relative to the connecting rod 2 and the rotation angle of the second grabbing part 5 relative to the connecting rod 2 according to actual requirements, and the flexibility is strong. In addition, the upper end of the connecting rod 2 can also be fixedly connected with the seed crystal rope 30, so that the slag lifting device 10 is lifted, and the lifting process is not described herein.

The utility model also provides a crystal growth equipment of hanging sediment device 10 that has above-mentioned embodiment.

According to the utility model discloses crystal growth equipment is including hanging sediment device 10, through hanging sediment device 10 that is equipped with above-mentioned embodiment, can drag for the slag charge such as the quartz particle in the molten bath betterly, even if there are a large amount of slag charges such as quartz particle in facing the molten bath, perhaps when facing the volume of slag charge such as quartz particle, weight are great, also can be betterly with other slag charges such as quartz particle in the molten bath take out, easy operation can not influence the subsequent brilliant operation of system of crystal growth equipment. Moreover, the slag removing effect of the slag lifting device 10 is good, and the efficiency is high.

Other configurations and operations of crystal growth apparatus according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present specification, reference to the description of "some embodiments," "optionally," "further" or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. The utility model provides a hang sediment device, it is used for crystal growth equipment to hang sediment device, its characterized in that, crystal growth equipment includes: furnace body and crucible, the growth chamber is injectd to the furnace body, the top in growth chamber has the supporting part, the crucible is established the growth intracavity, hang the sediment device and include:

a support adapted to be supported on the carrier;

the connecting rod penetrates through the supporting piece and is suitable for moving up and down between a first position and a second position along the vertical direction, and the first position is located on the upper side of the second position;

a first grasping member, the first grasping member comprising: the crucible pot comprises a first connecting part and a first disc part, wherein the upper end of the first connecting part is pivotally connected with the lower end of the connecting rod, the lower end of the first connecting part is detachably connected with the upper end of the first disc part, the first disc part defines a first accommodating cavity, the first accommodating cavity is open towards one side of the central axis of the crucible pot, and a first liquid leakage hole which penetrates through the first accommodating cavity is formed in the bottom wall of the first disc part;

the upper end of the first traction piece is pivotally connected with the bottom wall of the support piece, and the lower end of the first traction piece is pivotally connected with the outer side wall of the first grabbing piece; wherein the content of the first and second substances,

when the connecting rod moves from the first position to the second position, the bottom wall of the first tray body is switched from a horizontal state to an inclined state, and the first tray body is suitable for extending into the molten liquid in the crucible; when the connecting rod moves from the second position to the first position, the bottom wall of the first tray body is switched to a horizontal state from an inclined state, and the first tray body is suitable for moving out the molten soup to take out slag in the molten soup.

2. The slag sling device according to claim 1, wherein the first pan body portion comprises:

the first liquid leakage holes are formed in the bottom plate and are arranged in multiple rows and multiple columns on the bottom plate;

the first baffle is connected with one side of the bottom plate, which is deviated from the central axis of the crucible, and the first baffle extends obliquely towards the direction close to the central axis of the first accommodating cavity in the direction from bottom to top,

the lower end of the first traction piece is pivotally connected with one side, away from the first accommodating cavity, of the first baffle plate.

3. The slag lifting device according to claim 2, wherein the first tray body further comprises:

the second baffle and third baffle, the second baffle with the third baffle is in relative setting in the width direction of bottom plate, the second baffle with the third baffle all with the bottom plate is connected, just the second baffle with the third baffle distribute in the relative both sides of first baffle, the second baffle with the third baffle all with first baffle is connected, wherein, the bottom plate the first baffle the second baffle with the third baffle is injectd jointly the first chamber that holds.

4. The slag lifting device according to claim 3, wherein the second baffle plate and the third baffle plate extend obliquely towards the direction close to the central axis of the first accommodating cavity in the direction from bottom to top, and the width of the bottom plate gradually increases in the direction from the side of the bottom plate departing from the central axis of the crucible to the side of the bottom plate close to the central axis of the crucible; and/or the presence of a gas in the gas,

an included angle a between the first baffle and the bottom plate is more than or equal to 45 degrees and less than or equal to 70 degrees.

5. The slag lifting device according to claim 2, wherein one end of the first baffle plate connected to the first connecting portion has a first insertion portion, one end of the first connecting portion connected to the first baffle plate has a second insertion portion, one of the first insertion portion and the second insertion portion is formed as a slot, and the other of the first insertion portion and the second insertion portion is formed as a tongue fitted to the slot, wherein,

in the direction from the free end of the insertion tongue to the fixed end of the insertion tongue, the cross-sectional area of the insertion tongue is gradually reduced; and/or the presence of a gas in the atmosphere,

the first inserting part is provided with a first fixing hole suitable for a fastener to penetrate through, the second inserting part is provided with a second fixing hole suitable for the fastener to penetrate through, and the first inserting part and the second inserting part are connected through the fastener.

6. The slag hoist according to claim 1, characterized by further comprising:

a second grasping member, the second grasping member comprising: the crucible comprises a first connecting part, a first disk body part and a second disk body part, wherein the first connecting part is arranged on the bottom wall of the first disk body part, the second connecting part is opposite to the first connecting part, the upper end of the second connecting part is connected with the lower end of the connecting rod in a pivoting manner, the second disk body part and the first disk body part are arranged opposite to each other along the radial direction of the crucible, the upper end of the second disk body part is detachably connected with the lower end of the second connecting part, the second disk body part defines a second accommodating cavity, the second accommodating cavity is opened towards one side of the central axis of the crucible, and a penetrating second liquid leakage hole is formed in the bottom wall of the second disk body part;

the second traction piece and the first traction piece are distributed on two opposite sides of the supporting piece, the upper end of the second traction piece is pivotally connected with the bottom wall of the supporting piece, and the lower end of the second traction piece is pivotally connected with the outer side wall of the second grabbing piece; wherein the content of the first and second substances,

when the connecting rod moves from the first position to the second position, the bottom wall of the second disk body is switched from a horizontal state to an inclined state, the second disk body is suitable for extending into the molten liquid of the crucible, and the radial inner side of the bottom wall of the second disk body is spaced from the radial inner side of the bottom wall of the first disk body; when the connecting rod moves from the second position to the first position, the bottom wall of the second disc body is switched to a horizontal state from an inclined state, the radial inner side of the bottom wall of the second disc body is abutted to the radial inner side of the bottom wall of the first disc body, and the first disc body and the second disc body are suitable for moving out the molten soup to take out slag in the molten soup.

7. A slag lifting device according to claim 6, wherein the first and second disk bodies are quartz or silicon nitride or,

the first and second disk portions each include: the multilayer ceramic capacitor comprises an inner layer structure and an outer layer structure which are arranged in a stacked mode, wherein the inner layer structure is a silicon nitride piece, and the outer layer structure is a quartz piece.

8. The slag hanging device according to claim 1, wherein a plurality of the first disc portions are provided, the plurality of the first disc portions are replaceably connected to the first connecting portion, and the first weep holes of each of the first disc portions have different hole diameters.

9. The slag hanging device according to claim 1, wherein a through hole is provided at the center of the support member, the connecting rod is slidably inserted into the through hole up and down, a stopper is provided on the connecting rod, the stopper is fixed on the outer circumferential wall of the connecting rod, and extends in a ring shape along the circumferential direction of the connecting rod, the stopper is located at the lower side of the support member, and the orthographic projection of the through hole on the stopper is located within the range of the outer circumferential edge of the stopper, or,

the connecting rod is the lead screw, hang the sediment device and still include: the driving mechanism is fixedly arranged on the supporting piece, and the output end of the driving mechanism is suitable for being matched with the connecting rod so as to drive the connecting rod to move up and down along the axial direction.

10. A crystal growing apparatus comprising the slag sling device as defined in any one of claims 1 to 9.