CN114959901B - Crystal device is got to carborundum feeding - Google Patents
Crystal device is got to carborundum feeding Download PDFInfo
- Publication number
- CN114959901B CN114959901B CN202210533208.4A CN202210533208A CN114959901B CN 114959901 B CN114959901 B CN 114959901B CN 202210533208 A CN202210533208 A CN 202210533208A CN 114959901 B CN114959901 B CN 114959901B
- Authority
- CN
- China
- Prior art keywords
- crucible
- rod
- silicon carbide
- mechanical claw
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 40
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 40
- 210000000078 claw Anatomy 0.000 claims abstract description 42
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims abstract description 35
- 230000000903 blocking effect Effects 0.000 claims description 61
- 238000001125 extrusion Methods 0.000 claims description 23
- 238000013519 translation Methods 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 6
- 238000009941 weaving Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 17
- 230000005484 gravity Effects 0.000 description 10
- 230000008093 supporting effect Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 238000003723 Smelting Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to the field of silicon carbide production, in particular to a silicon carbide charging and crystal taking device, which comprises a base, wherein a driving motor is fixedly arranged at the top end of the base, a transmission rod is fixedly connected at the top end of the driving motor, an extension rod is arranged near the top end and penetrates through the outer side of the transmission rod, a mechanical claw is arranged near one end of the bottom surface of the extension rod, a lifting module is connected between the mechanical claw and the extension rod and used for driving the mechanical claw to move up and down, the mechanical claw is used for grabbing a heated crucible, then lifting the crucible, the heated crucible can be taken out, then the driving motor is started to move the crucible and the mechanical claw to a preset position and put down, and after the crucible is put down, the mechanical claw is used for uncovering the crucible again, so that silicon carbide crystals growing on a seed crystal bracket can be taken out, and the mechanical silicon carbide crystal taking function is realized.
Description
Technical Field
The invention belongs to the field of silicon carbide production, and particularly relates to a silicon carbide charging and crystal taking device.
Background
The silicon carbide monocrystal has excellent semiconductor physical properties such as high heat conductivity, high breakdown voltage, high chemical stability and the like, and can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under high-temperature and strong radiation conditions;
silicon carbide powder is taken as a raw material, the silicon carbide powder in the crucible is obviously sublimated when being heated to a certain temperature, and decomposed silicon carbide gas is transported along a temperature gradient and is condensed at a silicon carbide seed crystal, and in general, the seed crystal is placed at the upper end of a hollow and through seed crystal bracket, and the seed crystal bracket is placed in the crucible. Or directly placing the seed crystal at the bottom end of the crucible cover.
One chinese patent with publication number CN112226814a discloses a silicon carbide crystal removing device, including two supporting plates and three connecting rods, three connecting rods are located between two supporting plates, the upper and lower both ends of three connecting rods respectively with two supporting plates one side fixed connection that is close to each other, clamping mechanism is all installed to the lower extreme of three connecting rods, the pressure disk produces slow and even pressure to the crystal, can make the crystal drop completely, solved the problem that the prior art makes the crystal drop inhomogeneous with direct ejecting mode and leads to breaking.
When the existing silicon carbide production process takes out crystals, a fork truck or a gantry crane is generally used for slowly taking out the crucible, the crucible cover is opened after being slowly put down, and meanwhile, a plurality of parts of the process are needed to be manually used for assisting in matching, so that the problems of high labor cost and low speed are solved.
To this end, the invention provides a silicon carbide charge crystal taking device.
Disclosure of Invention
In order to overcome the deficiencies of the prior art, at least one technical problem presented in the background art is solved.
The technical scheme adopted for solving the technical problems is as follows: the invention relates to a silicon carbide charging and crystal taking device, which comprises a base, wherein a driving motor is fixedly arranged at the top end of the base, a transmission rod is fixedly connected at the top end of the driving motor, an extension rod is arranged near the top end and penetrates through the outer side of the transmission rod, a mechanical claw is arranged near one end of the bottom surface of the extension rod, a lifting module is connected between the mechanical claw and the extension rod, the lifting module is used for driving the mechanical claw to move up and down, and when the silicon carbide charging and crystal taking device works, the driving motor drives the transmission rod and the extension rod to swing, the mechanical claw is driven to move onto a smelting furnace for producing silicon carbide, the mechanical claw is put down by using the lifting module, a heated crucible is grabbed by the mechanical claw, the heated crucible can be taken out by being lifted up again, then the driving motor is started to move the crucible and the mechanical claw to a preset position and put down, and after the crucible is taken down, the mechanical claw is used for uncovering the crucible, and the silicon carbide crystal growing on a bracket can be taken out, so that compared with a fork truck or a portal, the taking mode is faster and more convenient, and a complex manual operation is not needed.
Preferably, the one end fixed mounting that the gripper was kept away from to the extension rod has the balancing weight, the inboard of transfer line is provided with translation module, translation module is connected with the extension rod transmission, translation module is used for driving extension rod horizontal migration, and during operation, the setting of cooperation balancing weight has guaranteed that whole device can be comparatively stable lay subaerial when drawing up the crucible, reduces the unstable problem of focus, and translation module's setting, can slightly adjust the position of extension rod tip, guarantees that the gripper can grasp the crucible in the middle, further improves and snatchs stability.
Preferably, the middle part bottom fixed mounting of gripper has laser rangefinder module, laser rangefinder module is used for measuring the distance of gripper to crucible, the crucible includes crucible body and crucible cover, the top of crucible cover is the bellied arc setting in center, during operation, when adjusting the gripper position, if go the adjustment through the people's eye and not only comparatively consuming time, and need the old master of experience abundant, through setting up laser rangefinder module, laser rangefinder module can send down and receive laser again, thereby calculate the distance, the structure setting of cooperation crucible cover, make its central position distance laser rangefinder module distance nearest, and from outside to central distance increase gradually, through letting laser rangefinder module's measured data control driving motor and translation module drive gripper remove, just need not the manual work and fix a position, still realized full automatization handling process when having reduced the cost of labor.
Preferably, the bottom rotation of gripper is connected with four sets of extension arms, and four sets of extension arms are the annular and arrange, the extension arm includes two sets of deckle boards, fixed connection between two sets of deckle boards, and leaves the clearance between two sets of deckle boards, lean on bottom fixedly connected with horizontal pole between the two sets of deckle boards, the outer turnover of horizontal pole is connected with the swivel, the bottom fixedly connected with gripping arm of swivel, the top of swivel is provided with screens subassembly, screens subassembly is used for restricting the removal of swivel, the gripping arm is the arc setting, and during operation, because the whole quality of crucible is heavier, if take out the crucible through extrusion frictional force at every turn, easily lead to the lateral wall of crucible to be excessively extruded, along with opening and sinking of gripper, because the diameter of crucible is the definite value, after the central position is confirmed by laser rangefinder module, the outer turnover of swivel just need open the predetermined size, just can let the extension arm just along the outer wall down for the bottom surface of furnace arm can hug closely the bottom surface of crucible, and when the bottom surface that the extension arm was used for gripping crucible, can not make the side wall setting up the rotation of the crucible, can not make the side wall of the crucible to the side wall of the crucible through the expansion arm, can not holding down the rotation of the side of the crucible, can not be more than the side by the rotation module, can not be more than the setting up to the rotation, and can not be had the side to the side of the crucible through the rotation, and can be more than the side the rotation, and can be more stable to the side.
Preferably, the clamping component comprises a blocking block, the blocking block is fixedly connected with the periphery of the swivel, a limiting cylinder is fixedly connected between two groups of frame plates, a clamping rod is connected to the inner side of the limiting cylinder in a sliding mode, the clamping rod is located above the swivel, when the clamping arm rotates, the blocking block also rotates, the blocking block rotates to suck the clamping rod upwards to prop up, after the blocking block passes through the clamping rod, the blocking rod can slide downwards under the action of gravity, the blocking block is blocked, the clamping arm cannot move backwards, through the arrangement, the clamping arm can be stably clamped, and a complex mechanical device is not required to be arranged.
Preferably, the free end of arm is circular-arc setting, the blocking piece is the barb shape setting, the blocking piece is relative setting with the arm of grabbing, during operation, the arc setting of arm tip of grabbing can increase the contact surface with the crucible, and the contact surface is round and moist can also reduce single-point pressure simultaneously, and the structure setting of blocking piece for when blocking the anticlockwise rotation of piece, can effectually upwards push up the draw-in lever, and when returning, can't be again with blocking the piece and push back, only can resume through manual work or other power pulling draw-in lever.
Preferably, the limiting cylinder and the clamping rod are all obliquely arranged with the vertical plane, one end of the clamping rod, which is close to the blocking block, is arranged in an adduction arc shape, and is arranged in an adduction arc shape when in operation, the clamping rod is matched with the inclined arrangement of the clamping rod and one end of the blocking block, so that the process of pushing the clamping rod open when the blocking block rotates anticlockwise is easier, but when the blocking block returns, the clamping rod is difficult to push upwards due to overlarge included angle between the blocking block and the clamping rod, and the stable lifting process of the crucible is ensured.
Preferably, four extension arm homonymy is adjacent to be a set of, totally two sets of, is provided with the rope of establishing ties between the two sets of extension arms, the rope both ends of establishing ties runs through one side of deckle and the top fixed connection of two clamping bars, during operation, when the crucible is taken out and is placed the back, need retrieve the arm of grabbing, only need control gripper opens this moment, four sets of extension arms also can mutually separate this moment, can make the rope of establishing ties straightened along with the separation of extension arm, and then can let the clamping bar upwards slide, the blocking of clamping bar has not been had, the arm of grabbing can return to vertical state under the effect of gravity this moment afterwards can normally upwards clamp the crucible lid, still need not to set up complicated mechanical structure when having realized effectively retrieving the clamping bar through this kind of setting, not only the cost is reduced, and the emergence of trouble has been reduced.
Preferably, one of them the inboard of frame plate seted up the spout, the inboard sliding connection of spout has the transmission strip, the bottom surface fixed mounting of transmission strip has the latch that a plurality of groups equidistance set up, the one end fixed mounting of swivel has the gear, gear and latch intermeshing, during operation, the seed crystal bracket that many carborundum grew all is directly laid on the bottom surface of crucible cover, consequently needs to guarantee the stable promotion and the removal process of crucible cover, when the side of extension arm extrusion crucible cover, can extrude the removal transmission strip for latch and gear take place the transmission and then drive the arm of grabbing rotatory, can let the arm of grabbing detain in, withhold the crucible cover bottom, and then guaranteed the steady supporting effect of crucible cover.
Preferably, spout and drive bar all are the arc setting, the drive bar includes the elastic metal plate of a plurality of mutual fixed joint, the tip rotation of latch is connected with the slide ball, the outside of drive bar is provided with the extrusion cover, the extrusion cover is woven for elastic metal mesh and forms, one side fixed connection of extrusion cover and frame board, during operation, the structure setting of cooperation drive bar for the drive bar can upwards crooked rolling, not only can not deviate from the outside of frame board, can also return by means of gravity simultaneously, and the slide ball in the cooperation latch outside simultaneously can let the slip process of drive bar become light loose swift, and the setting of extrusion cover not only can reduce external foreign matter and get into the spout, can also let the drive bar can be by the correct extrusion.
The beneficial effects of the invention are as follows:
1. according to the silicon carbide charging and crystal taking device, through the mutual matching of the driving motor, the lifting module and the mechanical claw, the mechanical silicon carbide crystal taking function is realized, and compared with a forklift or a gantry crane, the silicon carbide charging and crystal taking device is faster and more convenient to take out, and complex manual operation is not needed.
2. According to the silicon carbide charging and crystal taking device, the laser ranging module is arranged, the laser ranging module can downwards emit laser and then receive the laser, so that the distance is calculated, the structural arrangement of the crucible cover is matched, the distance between the center of the laser ranging module and the laser ranging module is nearest, the distance from the outer side to the center of the laser ranging module is gradually increased, the driving motor and the translation module are controlled by the measurement data of the laser ranging module to drive the mechanical claw to move, manual positioning is not needed, labor cost is reduced, and meanwhile the full-automatic treatment process is realized.
3. According to the silicon carbide charging and crystal taking device, the gripping arms are arranged, and the crucible is supported by the four groups of gripping arms, so that the silicon carbide charging and crystal taking device is more stable compared with extrusion friction, and meanwhile, the outer side wall of the crucible is not damaged.
Drawings
The invention is further described below with reference to the accompanying drawings.
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a side view of the gripper of the present invention;
FIG. 3 is a cross-sectional view of an extender arm of the present invention;
FIG. 4 is a schematic view of a portion of the structure of a frame plate according to the present invention;
in the figure: 1. a base; 2. a transmission rod; 3. an extension rod; 4. a lifting module; 5. a mechanical claw; 6. a laser ranging module; 8. an extension arm; 9. a frame plate; 10. a limiting cylinder; 11. a clamping rod; 12. a blocking piece; 13. a swivel; 14. a gripping arm; 15. a rope connected in series; 16. a driving motor; 17. a transmission bar; 18. a gear; 19. latch teeth; 20. a chute; 21. the cover is pressed.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
Example 1
As shown in fig. 1 to 2, the device for taking out the silicon carbide loaded crystal according to the embodiment of the invention comprises a base 1, wherein a driving motor 16 is fixedly arranged at the top end of the base 1, a driving rod 2 is fixedly connected at the top end of the driving motor 16, an extension rod 3 is arranged at the top end of the extension rod 2, a mechanical claw 5 is arranged at one end of the bottom surface of the extension rod 3, a lifting module 4 is connected between the mechanical claw 5 and the extension rod 3, the lifting module 4 is used for driving the mechanical claw 5 to move up and down, during operation, the driving motor 16 drives the driving rod 2 and the extension rod 3 to swing, the mechanical claw 5 is driven to move onto a furnace for producing silicon carbide, the mechanical claw 5 is lowered by using the lifting module 4, the heated crucible is grasped by the mechanical claw 5, the heated crucible can be taken out by lifting, then the driving motor 16 is started to move the crucible and the mechanical claw 5 to a preset position and put down, and after the crucible is lowered down, the mechanical claw 5 is used for taking out again, the silicon carbide crystal growing on the bracket, so that the mechanical crystal is taken out, compared with the mechanical crystal of a fork truck, the silicon carbide can be taken out more conveniently, and the mechanical crystal can be taken out more conveniently.
As shown in fig. 1 to 2, the one end fixed mounting that gripper 5 was kept away from to extension rod 3 has the balancing weight, the inboard of transfer line 2 is provided with translation module, translation module is connected with extension rod 3 transmission, translation module is used for driving extension rod 3 horizontal migration, and during operation, cooperation balancing weight's setting has guaranteed that whole device can be comparatively stable lay subaerial when pulling up the crucible, reduces the unstable problem of focus, and translation module's setting, can slightly adjust the position of extension rod 3 tip, guarantees that gripper 5 can grasp the crucible in the middle, further improves and snatchs stability.
As shown in fig. 1 to 2, the laser ranging module 6 is fixedly installed at the bottom end of the middle part of the gripper 5, the laser ranging module 6 is used for measuring the distance from the gripper 5 to the crucible, the crucible comprises a crucible body and a crucible cover, the top end of the crucible cover is in a central protruding arc-shaped arrangement, when the gripper 5 is adjusted in work, if the gripper 5 is adjusted by human eyes, the adjustment is time-consuming and requires a master with rich experience, the laser ranging module 6 can downwards emit laser and then receive the laser, so as to measure and calculate the distance, and the structural arrangement of the crucible cover is matched, so that the distance from the center position to the laser ranging module 6 is closest, and the distance from the outer side to the center is gradually increased, and the driving motor 16 and the translation module are controlled by the measurement data of the laser ranging module 6 to drive the gripper 5 to move without manual positioning, so that the manual cost is reduced, and the full-automatic treatment process is realized.
As shown in fig. 2 to 3, the bottom rotation of gripper 5 is connected with four sets of extension arms 8, and four sets of extension arms 8 are the annular and arrange, extension arm 8 includes two sets of deckle boards 9, fixed connection between two sets of deckle boards 9, and leaves the clearance between two sets of deckle boards 9, lean on bottom fixedly connected with horizontal pole between two sets of deckle boards 9, the outer turnover of horizontal pole is connected with swivel 13, swivel 13's bottom fixedly connected with arm 14 is gripped to the bottom, swivel 13's top is provided with screens subassembly, the screens subassembly is used for restricting the removal of swivel 13, arm 14 is the arc setting, and during operation, because crucible bulk mass is heavier, if take out the crucible through extrusion frictional force at every time, the lateral wall that leads to the crucible is excessively extruded easily, through setting up arm 14, opens and sink along with mechanical 5, because the diameter of crucible is definite value, and after middle position is confirmed by laser range module 6, mechanical gripper 5 only need predetermined size, just can be along arm 8 the bottom surface that grips arm 14 can be held down to the bottom surface that the outer side 14 is held down to the arm 14, can not be held down in order to make the mode of the rotation of the arm 14 and can not be held down in order to make the outer side 14 of the outer side of the extension arm 14 to the side of crucible, can not be held down the side 14 when the rotation of the arm is held down, and the mode is held down, the side 14 is more than setting up to the side 14 is more than the side 14, and can be more stable and can be held down to the side 14 is more than the side 14.
As shown in fig. 3, the clamping component comprises a blocking block 12, the blocking block 12 is fixedly connected with the periphery of the swivel 13, a limiting cylinder 10 is fixedly connected between the two groups of frame plates 9, a clamping rod 11 is slidably connected to the inner side of the limiting cylinder 10, the clamping rod 11 is located above the swivel 13, when the clamping arm 14 rotates during operation, the blocking block 12 also rotates, the blocking rod 11 is sucked and jacked by the rotating blocking e block 12, when the blocking block 12 passes over the blocking rod 11, the blocking rod 11 slides downwards under the action of gravity, the blocking block 12 is blocked, the clamping arm 14 cannot move back, and through the arrangement, the clamping arm 14 can be stably blocked without complex mechanical devices.
As shown in fig. 3, the free end of the gripping arm 14 is arranged in an arc shape, the blocking block 12 is arranged in a barb shape, the blocking block 12 and the gripping arm 14 are arranged oppositely, when in operation, the arc-shaped end of the gripping arm 14 is arranged, the contact surface with the crucible can be increased, the contact surface is round and smooth, the single-point pressure can be reduced, the structure of the blocking block 12 is arranged, when the blocking block 12 rotates anticlockwise, the blocking rod 11 can be effectively pushed upwards, and when returning, the blocking block 12 can not be pushed backwards, and only the blocking rod 11 can be restored by manual or other power pulling.
As shown in fig. 3, the limiting cylinder 10 and the clamping rod 11 are both inclined with the vertical plane, one end of the clamping rod 11, which is close to the blocking block 12, is provided with an inward arc, and the inclined arrangement of the clamping rod 11 and the inward arc arrangement of one end of the blocking block 12 are matched during working, so that the process of pushing the clamping rod 11 open when the blocking block 12 rotates anticlockwise is easier, but during regression, the clamping rod 11 is difficult to push upwards due to overlarge included angle between the blocking block 12 and the clamping rod 11, and the stable lifting process of the crucible is ensured.
As shown in fig. 3, four extension arms 8 are adjacent to each other on the same side, two groups are provided, a series rope 15 is arranged between the two groups of extension arms 8, two ends of the series rope 15 penetrate through one side of the frame plate 9 and the top ends of the two clamping rods 11, when the crucible is taken out and placed, the gripping arms 14 need to be recovered, at the moment, only the mechanical claws 5 are required to be controlled to be opened, at the moment, the four groups of extension arms 8 can be separated from each other, the series rope 15 can be straightened, the clamping rods 11 can slide upwards, the blocking of the clamping rods 11 is avoided, at the moment, the gripping arms 14 can return to a vertical state under the action of gravity, then the crucible cover can be clamped upwards normally, through the arrangement, the efficient recovery of the clamping rods 11 is realized, meanwhile, complicated mechanical structures are not only reduced, but also the occurrence of faults is reduced.
Example two
As shown in fig. 4, in comparative example one, another embodiment of the present invention is: one of them the inboard of frame 9 seted up spout 20, the inboard sliding connection of spout 20 has drive bar 17, the bottom surface fixed mounting of drive bar 17 has the latch 19 that a plurality of groups equidistance set up, the one end fixed mounting of swivel 13 has gear 18, gear 18 and latch 19 intermeshing, during operation, the seed crystal bracket that a lot of carborundum grew all is directly laid on the bottom surface of crucible cover, consequently needs to guarantee the stable promotion and the removal process of crucible cover, when extension arm 8 extrusion crucible cover's side, can extrude and remove drive bar 17 for latch 19 and gear 18 take place the transmission and then drive arm 14 rotation, can let arm 14 inner clip, detain the crucible cover bottom, and then guaranteed the steady supporting effect of crucible cover.
The spout 20 and the transmission strip 17 are the arc setting, the transmission strip 17 includes the elastic metal board of a plurality of mutual fixed joint, the tip rotation of latch 19 is connected with the slide ball, the outside of transmission strip 17 is provided with extrusion cover 21, extrusion cover 21 is woven for elastic metal mesh and forms, extrusion cover 21 and one side fixed connection of frame plate 9, during operation, cooperation transmission strip 17's structure setting for transmission strip 17 can upwards bend the rolling, can not deviate from the outside of frame plate 9, can also return by gravity simultaneously, and the sliding process of cooperation latch 19 outside can become light and loose swiftly, and the setting of extrusion cover 21 not only can reduce external foreign matter and get into spout 20, can also let transmission strip 17 can be by the correct extrusion.
During operation, the driving motor 16 drives the transmission rod 2 and the extension rod 3 to swing, the mechanical claw 5 is driven to move to a smelting furnace for producing silicon carbide, the mechanical claw 5 is put down by using the lifting module 4, the heated crucible is grasped by the mechanical claw 5 and lifted up, the heated crucible can be taken out, then the driving motor 16 is started again to move the crucible and the mechanical claw 5 to a preset position and put down, after the crucible is lifted down, the mechanical claw 5 is used for lifting the crucible again, and the silicon carbide crystal growing on the seed crystal bracket can be taken out, so that the mechanical silicon carbide crystal taking-out function is realized, compared with a taking-out mode of a forklift or a gantry crane, the mechanical silicon carbide crystal taking-out function is faster and more convenient, and complex manual operation is not required; when the device works, the balance weight is matched, so that the whole device can be stably placed on the ground when the crucible is pulled up, the problem of unstable gravity center is solved, the position of the end part of the extension rod 3 can be slightly adjusted by arranging the translation module, the gripper 5 can grasp the crucible in the middle, and the grasping stability is further improved; when the laser distance measuring device is in operation, if the position of the mechanical claw 5 is adjusted by human eyes, the laser distance measuring module 6 is arranged, the laser distance measuring module 6 can downwards emit laser and then receive the laser, so that the distance is measured, the structural arrangement of the crucible cover is matched, the center position is closest to the laser distance measuring module 6, the distance from the outer side to the center is gradually increased, and the driving motor 16 and the translation module are controlled by the measurement data of the laser distance measuring module 6 to drive the mechanical claw 5 to move, so that manual positioning is not needed, the labor cost is reduced, and the full-automatic treatment process is realized; when the crucible is gripped, the crucible is heavy in overall mass, if the crucible is taken out through extrusion friction force each time, the side wall of the crucible is easy to excessively extrude, through the arrangement of the gripping arms 14, as the mechanical claws 5 are opened and sunk, the diameter of the crucible is a determined value, after the central position is determined by the laser ranging module 6, the mechanical claws 5 only need to be opened by a predetermined size, the extending arms 8 just slide down along the outer wall of the crucible, the bottom surfaces of the gripping arms 14 can be tightly attached to the outer side of the crucible, when the gripping arms 14 at the bottom ends of the extending arms 8 contact the bottom surface of the melting furnace, rotation is caused by extrusion, the gripping arms 14 are matched with the arc-shaped arrangement of the gripping arms 14, so that the gripping arms 14 can inwards buckle and rotate, and the crucible is supported by the gripping arms 14 by the gripping arms, at the moment, the rotating ring 13 is limited not to rotate by the clamping component, and the crucible is supported by the gripping arms 14 in a mode of being more stable than extrusion, and the side wall is not damaged at the same time; when the gripper arm 14 rotates, the blocking block 12 rotates, the blocking rod 11 is sucked up and pushed away by the rotating blocking block 12, the blocking rod 11 slides downwards under the action of gravity after the blocking block 12 passes over the blocking rod 11, the blocking block 12 is blocked, the gripper arm 14 cannot move backwards, and through the arrangement, the gripper arm 14 can be stably blocked without complex mechanical devices; when the device works, the arc-shaped arrangement of the end part of the grabbing arm 14 can increase the contact surface with the crucible, meanwhile, the contact surface is round, the single-point pressure can be reduced, and the blocking block 12 is structurally arranged, so that when the blocking block 12 rotates anticlockwise, the clamping rod 11 can be effectively pushed upwards, and when the blocking block returns, the blocking block 12 can not be pushed backwards any more, and the blocking block 11 can only be restored by pulling the clamping rod 11 manually or by other power; when the crucible lifting device works, the inclined arrangement of the clamping rod 11 and the inward-folding arc arrangement of one end of the blocking block 12 are matched, so that the process of pushing the clamping rod 11 open when the blocking block 12 rotates anticlockwise is easier, but when the crucible lifting device returns, the clamping rod 11 is difficult to push upwards due to the fact that the included angle between the blocking block 12 and the clamping rod 11 is too large, and the stable lifting process of the crucible is guaranteed; when the crucible is taken out and placed, the gripping arms 14 are required to be recovered, only the mechanical claws 5 are required to be controlled to be opened, at the moment, the four groups of extension arms 8 are also mutually separated, the series ropes 15 are straightened along with the separation of the extension arms 8, the clamping rods 11 are enabled to slide upwards, the blocking of the clamping rods 11 is avoided, at the moment, the gripping arms 14 return to a vertical state under the action of gravity, and then the crucible cover can be normally clamped upwards; during operation, a plurality of seed crystal brackets for silicon carbide growth are directly placed on the bottom surface of the crucible cover, so that stable lifting and moving processes of the crucible cover are required to be ensured, when the extension arm 8 extrudes the side surface of the crucible cover, the movable transmission bar 17 is extruded, so that the latch 19 and the gear 18 are transmitted to drive the grabbing arm 14 to rotate, the bottom end of the crucible cover can be buckled by the grabbing arm 14, and the stable supporting effect of the crucible cover is further ensured; during operation, the structure setting of cooperation transmission strip 17 for transmission strip 17 can upwards bend the rolling, can not deviate from the outside of framed board 9, can also return by means of gravity simultaneously, cooperates the smooth ball in the latch 19 outside simultaneously, can let the slip process of transmission strip 17 become light swift, and the setting of extrusion cover 21, not only can reduce external foreign matter and get into spout 20 in, can also let transmission strip 17 by the correct extrusion.
The front, rear, left, right, up and down are all based on fig. 1 in the drawings of the specification, the face of the device facing the observer is defined as front, the left side of the observer is defined as left, and so on, according to the viewing angle of the person.
In the description of the present invention, it should be understood that the terms "center," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present invention.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. A silicon carbide charge crystal taking device, characterized in that: the lifting device comprises a base (1), wherein a driving motor (16) is fixedly arranged at the top end of the base (1), a transmission rod (2) is fixedly connected to the top end of the driving motor (16), an extension rod (3) is arranged near the top end and penetrates through the outer side of the transmission rod (2), a mechanical claw (5) is arranged near one end of the bottom surface of the extension rod (3), a lifting module (4) is connected between the mechanical claw (5) and the extension rod (3), and the lifting module (4) is used for driving the mechanical claw (5) to move up and down;
one end of the extension rod (3) far away from the mechanical claw (5) is fixedly provided with a balancing weight, the inner side of the transmission rod (2) is provided with a translation module, the translation module is in transmission connection with the extension rod (3), and the translation module is used for driving the extension rod (3) to horizontally move;
the device is characterized in that a laser ranging module (6) is fixedly arranged at the bottom end of the middle of the mechanical claw (5), the laser ranging module (6) is used for measuring the distance from the mechanical claw (5) to a crucible, the crucible comprises a crucible body and a crucible cover, and the top end of the crucible cover is arranged in an arc shape with a raised center;
the mechanical gripper is characterized in that four groups of extension arms (8) are rotationally connected to the bottom end of the mechanical gripper (5), the four groups of extension arms (8) are annularly arranged, the extension arms (8) comprise two groups of frame plates (9), the two groups of frame plates (9) are fixedly connected, a gap is reserved between the two groups of frame plates (9), a cross rod is fixedly connected to the two groups of frame plates (9) through the bottom end, a swivel (13) is rotationally connected to the outer periphery of the cross rod, a gripping arm (14) is fixedly connected to the bottom end of the swivel (13), a clamping component is arranged at the top end of the swivel (13) and used for limiting movement of the swivel (13), and the gripping arm (14) is in an arc-shaped arrangement;
the clamping assembly comprises a blocking block (12), the blocking block (12) is fixedly connected with the periphery of the swivel (13), a limiting cylinder (10) is fixedly connected between two groups of frame plates (9), a clamping rod (11) is slidably connected to the inner side of the limiting cylinder (10), and the clamping rod (11) is located above the swivel (13);
the free end of the grabbing arm (14) is arranged in an arc shape, the blocking piece (12) is arranged in a barb shape, and the blocking piece (12) and the grabbing arm (14) are arranged oppositely.
2. A silicon carbide charge crystal-taking apparatus according to claim 1, wherein: the limiting cylinder (10) and the clamping rod (11) are inclined with the vertical plane, and one end of the clamping rod (11) close to the blocking block (12) is in an inward-folding arc-shaped arrangement.
3. A silicon carbide charge crystal-taking apparatus according to claim 2, wherein: four extension arms (8) are adjacent in the same side and are in a group, two groups are arranged, a series rope (15) is arranged between the two groups of extension arms (8), and two ends of the series rope (15) penetrate through one side of the frame plate (9) and are fixedly connected with the top ends of the two clamping rods (11).
4. A silicon carbide charge crystal-taking apparatus according to claim 3, wherein: one of them the inboard of frame board (9) seted up spout (20), the inboard sliding connection of spout (20) has transmission strip (17), the bottom surface fixed mounting of transmission strip (17) has latch (19) that a plurality of group equidistance set up, the one end fixed mounting of swivel (13) has gear (18), gear (18) and latch (19) intermeshing.
5. A silicon carbide charge crystal-taking apparatus according to claim 4, wherein: the sliding chute (20) and the transmission strip (17) are all arc-shaped, the transmission strip (17) comprises a plurality of elastic metal plates which are fixedly connected with each other, the end parts of the clamping teeth (19) are rotationally connected with sliding balls, the outer side of the transmission strip (17) is provided with an extrusion cover (21), the extrusion cover (21) is formed by weaving elastic metal nets, and one side of the extrusion cover (21) is fixedly connected with one side of the frame plate (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210533208.4A CN114959901B (en) | 2022-05-12 | 2022-05-12 | Crystal device is got to carborundum feeding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210533208.4A CN114959901B (en) | 2022-05-12 | 2022-05-12 | Crystal device is got to carborundum feeding |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114959901A CN114959901A (en) | 2022-08-30 |
| CN114959901B true CN114959901B (en) | 2024-01-19 |
Family
ID=82983176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210533208.4A Active CN114959901B (en) | 2022-05-12 | 2022-05-12 | Crystal device is got to carborundum feeding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114959901B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115586812B (en) * | 2022-11-01 | 2023-10-31 | 江苏汉印机电科技股份有限公司 | Silicon carbide epitaxy electrical control equipment |
| CN116411351B (en) * | 2023-03-07 | 2023-09-26 | 襄阳鸿凯智能装备有限公司 | Silicon carbon material apparatus for producing |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206367989U (en) * | 2016-12-28 | 2017-08-01 | 山东天岳先进材料科技有限公司 | Long crystal furnace crucible hanging apparatus |
| CN109625945A (en) * | 2019-01-30 | 2019-04-16 | 魏必文 | A kind of round tube commutation gripping body for assembly line |
| CN211104085U (en) * | 2019-12-19 | 2020-07-28 | 广西现代职业技术学院 | Mechanical-electrical control rotating arm manipulator |
| CN112226814A (en) * | 2020-12-14 | 2021-01-15 | 烟台工程职业技术学院(烟台市技师学院) | Silicon carbide crystal taking-off device |
| CN213061107U (en) * | 2020-08-20 | 2021-04-27 | 福建北电新材料科技有限公司 | Be used for carborundum wafer corrosion equipment |
| CN216180604U (en) * | 2021-11-01 | 2022-04-05 | 攀枝花学院 | Mechanical arm |
-
2022
- 2022-05-12 CN CN202210533208.4A patent/CN114959901B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206367989U (en) * | 2016-12-28 | 2017-08-01 | 山东天岳先进材料科技有限公司 | Long crystal furnace crucible hanging apparatus |
| CN109625945A (en) * | 2019-01-30 | 2019-04-16 | 魏必文 | A kind of round tube commutation gripping body for assembly line |
| CN211104085U (en) * | 2019-12-19 | 2020-07-28 | 广西现代职业技术学院 | Mechanical-electrical control rotating arm manipulator |
| CN213061107U (en) * | 2020-08-20 | 2021-04-27 | 福建北电新材料科技有限公司 | Be used for carborundum wafer corrosion equipment |
| CN112226814A (en) * | 2020-12-14 | 2021-01-15 | 烟台工程职业技术学院(烟台市技师学院) | Silicon carbide crystal taking-off device |
| CN216180604U (en) * | 2021-11-01 | 2022-04-05 | 攀枝花学院 | Mechanical arm |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114959901A (en) | 2022-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114959901B (en) | Crystal device is got to carborundum feeding | |
| EP0449260A2 (en) | Apparatus for producing czochralski-grown single crystals | |
| JP4121697B2 (en) | Crystal sheet manufacturing method and manufacturing apparatus thereof | |
| BR0206303B1 (en) | Method and apparatus for feeding a medal of metal blades into a melting furnace. | |
| CN109944180B (en) | Long-distance road cone placing and recycling device | |
| CN112795986A (en) | Single crystal growth device capable of regulating and controlling crystallization solid-liquid interface in real time and use method | |
| JPH03285893A (en) | Crystal pulling-up apparatus | |
| CN112481745A (en) | Disconnected edulcoration device is prevented to cotton | |
| TWI404837B (en) | Vorrichtung zum ziehen eines einkristalls | |
| CN215856461U (en) | Continuous efficient crystalline silicon stress release equipment | |
| CN114277440A (en) | Clamp, crystal bar grabbing device and single crystal furnace | |
| CN112501682B (en) | Furnace barrel lifting and rotating device in semiconductor single crystal furnace | |
| CN116853779B (en) | Junction box feeding system and feeding method | |
| CN207682628U (en) | A kind of concrete aerated brick longitudinal cutting device | |
| CN117604610A (en) | Automatic crystal growth system | |
| CN203080106U (en) | Clamping tool for sapphire growth crucible | |
| CN116590786A (en) | Single crystal furnace thermal field dismounting device | |
| CN209987199U (en) | Crystal bar picking and placing vehicle | |
| CN207331105U (en) | A kind of CZ crystal for straight drawing monocrystal stove concubine takes bar device | |
| CN214399473U (en) | Graphite crucible clamp | |
| EP0388208A2 (en) | Ingot removal device for a single crystal pulling apparatus | |
| CN221701698U (en) | Czochralski single crystal purifying equipment | |
| CN201276607Y (en) | Feeder for monocrystal silicon | |
| CN219906706U (en) | New energy automobile battery box lifts by crane frock | |
| CN218968143U (en) | Ring changing combined mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |