CN115586812A - Silicon carbide epitaxial electrical control equipment - Google Patents
Silicon carbide epitaxial electrical control equipment Download PDFInfo
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- CN115586812A CN115586812A CN202211353252.3A CN202211353252A CN115586812A CN 115586812 A CN115586812 A CN 115586812A CN 202211353252 A CN202211353252 A CN 202211353252A CN 115586812 A CN115586812 A CN 115586812A
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 57
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 230000001105 regulatory effect Effects 0.000 claims abstract description 8
- 210000001503 joint Anatomy 0.000 claims description 25
- 230000000903 blocking effect Effects 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 239000013013 elastic material Substances 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 claims description 2
- 230000008602 contraction Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 30
- 230000008569 process Effects 0.000 abstract description 29
- 238000006243 chemical reaction Methods 0.000 abstract description 20
- 230000001276 controlling effect Effects 0.000 abstract description 14
- 238000012545 processing Methods 0.000 abstract description 8
- 230000003044 adaptive effect Effects 0.000 abstract description 4
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 240000007643 Phytolacca americana Species 0.000 description 23
- 230000009471 action Effects 0.000 description 17
- 238000003032 molecular docking Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 11
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05G—CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
- G05G5/00—Means for preventing, limiting or returning the movements of parts of a control mechanism, e.g. locking controlling member
- G05G5/02—Means preventing undesired movements of a controlling member which can be moved in two or more separate steps or ways, e.g. restricting to a stepwise movement or to a particular sequence of movements
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the field of silicon carbide processing, in particular to a gas supply device of a silicon carbide chemical vapor deposition system, which comprises a base frame, a regulating and controlling plate, a control screen, a control key, a position adjusting mechanism and a handle, wherein the base frame is provided with a gas inlet and a gas outlet; the invention solves the problems that the display control equipment of the traditional silicon carbide epitaxial electric control equipment is often fixedly installed, is difficult to perform adaptive adjustment along with the reaction process and the side operation and observation direction of a worker in the working process, increases the observation and operation distance of the worker, reduces the rapidity of operating and controlling the silicon carbide reaction process and also reduces the operation and control accuracy of the silicon carbide reaction process.
Description
Technical Field
The invention relates to the field of silicon carbide processing, in particular to silicon carbide epitaxial electrical control equipment.
Background
Silicon carbide is an inorganic substance, has a chemical formula of SiC, and is prepared by smelting quartz sand, petroleum coke (or coal coke), wood chips (salt is required when green silicon carbide is produced) and other raw materials in a resistance furnace at high temperature. Silicon carbide also has a rare mineral in nature, morusite. Among the non-oxide high-technology refractory raw materials such as C, N, B and the like, silicon carbide is the most widely applied and economical one, and can be called as corundum or refractory sand; silicon carbide has many other uses besides being used as an abrasive, for example, because of its chemical stability, high thermal conductivity, small thermal expansion coefficient and good wear resistance: the silicon carbide powder is coated on the inner wall of the impeller or the cylinder body of the water turbine by a special process, so that the wear resistance of the water turbine can be improved, and the service life of the water turbine can be prolonged by 1-2 times; the high-grade refractory material has the advantages of thermal shock resistance, small volume, light weight, high strength and good energy-saving effect. Low grade silicon carbide (containing about 85% SiC) is an excellent deoxidizer, which can accelerate steel making, facilitate control of chemical composition, and improve steel quality.
The production technology and the application of the silicon carbide are complex and various, the production, processing and refining processes of the silicon carbide are often assisted by epitaxial electrical control equipment, the reaction process of the silicon carbide is regulated, controlled and monitored in real time, the connection mode and the connection direction between the silicon carbide reaction equipment and the epitaxial auxiliary equipment are complex and changeable due to the limitation of the processing reaction process in the processing operation process, and the traditional epitaxial electrical control equipment often has the following problems in the application process:
1. traditional silicon carbide epitaxy electrical control equipment, its display control equipment often is fixed installation, is difficult to follow reaction process and staff's the control observation position and carries out the adaptability adjustment in the course of the work, has increased staff's observation and control the distance, has reduced the rapidity degree of controlling silicon carbide reaction process, has also reduced the accuracy nature of controlling silicon carbide reaction process.
2. Traditional silicon carbide epitaxial electrical control equipment is difficult to carry out adaptability to controlling the circuit and hugs the centre gripping tightly, at artifical manual control adjustment in-process, has increased the probability that contact is bad and the pine takes off between the circuit, has reduced signal of telecommunication transmission's rapidity, has increased the fault rate of equipment.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides silicon carbide epitaxial electrical control equipment.
The technical scheme adopted by the invention for solving the technical problems is as follows: the utility model provides a silicon carbide electrical control equipment that extends, includes bed frame, regulation and control board, control screen, control key, positioning mechanism and handle, bed frame middle part movable mounting have the regulation and control board, the middle part fixed mounting of regulation and control board has the control screen, a plurality of control keys are all installed at the both ends of regulation and control board, the handle is installed to the both ends symmetry of regulation and control board, the mid-mounting of bed frame has positioning mechanism, and positioning mechanism and regulation and control board swing joint.
The positioning mechanism comprises extension rods, guide sliding sleeves, a V-shaped frame, positioning sliding sleeves, positioning rings and dislocation frames, wherein the extension rods are symmetrically arranged at the left and right sides of the rear side of the middle part of the base frame
Preferably, the pedestal front portion seted up hollow installation notch, the regulation and control board is located the installation notch, and all reserve between the lateral wall all around of the edge of positioning plate and installation notch and have the gyration clearance.
Preferably, a hollow notch is formed in the middle of the position adjusting ring, a stop rod is uniformly inserted into the hollow notch, a limiting rod is fixedly mounted in the middle of the lift-type rack, a limiting ring is fixedly sleeved in the middle of the limiting rod, the limiting ring is positioned between the symmetrically arranged position adjusting sliding sleeves, and elastic engaging teeth are uniformly arranged on the arc side wall of the limiting ring and are engaged with the stop rod.
Preferably, the engaging teeth are capable of undergoing self-restorable shrinkage deformation under the sliding compression of the stop lever.
Preferably, the permanent magnet strips are uniformly arranged on the periphery of the extension rod arc outer wall in the delayed manner, and the permanent magnet strips and the guide sliding sleeve are mutually adsorbed.
Preferably, the positioning ring is of a semicircular structure, the opening positions at the upper end and the lower end of the positioning ring are symmetrically provided with a stop block, and the stop block is positioned outside the positioning sliding sleeve and is in clamping fit with the positioning sliding sleeve.
Preferably, the dislocation frame still include the dislocation pivot, the link, the dislocation carousel, the electro-magnet, the butt joint storehouse, butt joint slide bar and butt joint spring, the fixed dislocation pivot of pegging graft in middle part of dislocation frame, the equal fixed mounting in upper and lower both ends middle part of regulation and control board has the link, the lower extreme of dislocation pivot is pegged graft on the link through normal running fit's mode and the lower extreme tip fixed mounting of dislocation pivot has the dislocation carousel, dislocation carousel and link normal running fit, the hole groove has evenly been seted up along its circumference on the dislocation carousel, equal fixed mounting has the electro-magnet in the hole groove, the equal fixed mounting in upper and lower both ends middle part of regulation and control board has the butt joint storehouse, install the butt joint slide bar through sliding fit's mode on the butt joint storehouse, the hole groove sliding fit on the one end of butt joint slide bar and the dislocation carousel, the other end of butt joint slide bar is connected with the butt joint storehouse through the butt joint spring.
Preferably, the diameter of the circumference of the outer wall of the butt joint sliding rod is slightly smaller than the diameter of a notch of the hole groove on the dislocation turntable, and the adsorption force between the permanent magnet and the butt joint sliding rod during working is larger than the spring tension of the butt joint spring in a telescopic state.
Preferably, the control plate is provided with two groups of wire clamping rotating shafts in a rotation fit mode, the two groups of wire clamping rotating shafts correspond to the control keys at the two ends of the control plate respectively, poke rods are symmetrically arranged at the end parts of the two ends of the wire clamping rotating shafts and connected with the control plate through torsional springs, wire clamping rods are jointly arranged between the poke rods at the two ends of the same wire clamping rotating shaft, and wire clamping rods are located above the control keys and are fixedly provided with wire clamping rings.
Preferably, the wire clamping rings correspond to the control keys one by one, and elastic pads are arranged on the inner walls of the wire clamping rings.
The invention has the beneficial effects that:
1. according to the silicon carbide epitaxial electrical control equipment, the control screen and the control keys of the silicon carbide electrical control can adapt to observation and control operation modes of workers in different directions and at different heights through the active adjustment of the positioning mechanism, the observation and control distances of the workers are reduced, the rapidness of controlling the silicon carbide reaction process is improved, and the control accuracy of the silicon carbide reaction process is also improved.
2. According to the silicon carbide epitaxial electrical control equipment, the elastic pad arranged on the wire clamping ring can increase the contact friction force between the elastic pad and a connecting circuit, meanwhile, indentation is avoided from being generated on the connecting circuit, and an electronic circuit in a large area of a rotating path can be enabled to carry out integral adaptive deflection movement along with the rotation of the regulating and controlling plate through the holding effect of the wire clamping ring and the reserved length processing of the circuit in the initial stage, so that the electronic circuit is prevented from being greatly pulled in the manual control and adjustment process, the probability of poor contact and loosening between circuits is reduced, the rapidness of electrical signal transmission is improved, and the failure rate of the equipment is reduced.
Drawings
The invention is further illustrated with reference to the following figures and examples.
Fig. 1 is a schematic structural diagram of an overall structure of a preferred embodiment of an electrical control apparatus for silicon carbide epitaxy according to the present invention;
FIG. 2 is a top view of FIG. 1 in accordance with the present invention;
FIG. 3 is an enlarged view of FIG. 2 at C according to the present invention;
FIG. 4 isbase:Sub>A schematic sectional view taken along line A-A of FIG. 2 according to the present invention;
FIG. 5 is an enlarged view of FIG. 4 at D according to the present invention;
FIG. 6 is an enlarged view of the invention at E in FIG. 4;
FIG. 7 is a schematic cross-sectional view taken along line B-B of FIG. 2 in accordance with the present invention;
FIG. 8 is a first partial perspective view of the positioning mechanism of the present invention;
FIG. 9 is a second partial perspective view of the positioning mechanism of the present invention;
FIG. 10 is a schematic view of a partial perspective structure of the dislocation frame of the present invention;
fig. 11 is a schematic partial perspective view of the control panel of the present invention.
In the figure: 1. a base frame; 2. a control panel; 3. a control screen; 4. a control key; 5. a position adjusting mechanism; 6. a handle; 51. an extension rod; 52. a guide sliding sleeve; 53. model frame of 21274; 54. a fixing rod; 55. a V-shaped frame; 56. adjusting the sliding sleeve; 57. a position adjusting ring; 58. a dislocation rack; 571. a stop lever; 531. a limiting rod; 532. a limiting ring; 533. meshing teeth; 511. a permanent magnet strip; 572. a stopper; 581. a dislocation rotating shaft; 582. a connecting frame; 583. a staggered rotary table; 584. an electromagnet; 585. butting a bin; 586. butt-jointing the sliding rods; 587. a docking spring; 21. a wire clamping rotating shaft; 22. a poke rod; 23. a torsion spring; 24. a wire clamping rod; 25. a wire clamping ring.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As an embodiment of the present invention, as shown in fig. 1 and 2, a silicon carbide epitaxial electrical control device includes a base frame 1, a control panel 2, a control screen 3, a control key 4, a positioning mechanism 5 and a handle 6, wherein a hollow mounting notch is formed in a front portion of the base frame 1, the control panel 2 is located in the mounting notch, and a rotation gap is reserved between a peripheral edge of the positioning panel and a peripheral side wall of the mounting notch; the middle part fixed mounting of regulation and control board 2 has control screen 3, and a plurality of control keys 4 are all installed at the both ends of regulation and control board 2, and handle 6 is installed to the both ends symmetry of regulation and control board 2, and the mid-mounting of bed frame 1 has positioning mechanism 5, and positioning mechanism 5 and regulation and control board 2 swing joint.
During specific work, firstly, the base frame 1 is integrally installed on the control table of the existing silicon carbide machine table through the staff, then, the control circuit of the silicon carbide machine table is electrically connected with the control screen 3 and the control key 4 through the staff, after the connection is completed, the silicon carbide machine table is in an operating state, and then, the control and monitoring of the silicon carbide reaction process are realized through the control of the staff on the control screen 3 and the control key 4.
As an embodiment of the present invention, as shown in fig. 2, fig. 3, fig. 7 and fig. 11, two sets of wire clamping rotating shafts 21 are installed on the adjusting and controlling plate 2 in a rotation matching manner, the two sets of wire clamping rotating shafts 21 respectively correspond to the control keys 4 at both ends of the adjusting and controlling plate 2, shifting rods 22 are symmetrically installed at both end portions of the wire clamping rotating shafts 21, the shifting rods 22 are connected with the adjusting and controlling plate 2 through torsion springs 23, wire clamping rods 24 are installed between the shifting rods 22 at both ends of the same wire clamping rotating shaft 21, the wire clamping rods 24 are located above the control keys 4, wire clamping rings 25 are fixedly installed on the wire clamping rods 24, the wire clamping rings 25 correspond to the control keys 4 one to one, and elastic pads are respectively installed on inner walls of the wire clamping rings 25.
During the specific operation, during the connection process between the control key 4 and the existing circuit, the poke rod 22 is preferentially pushed to rotate obliquely, the wire clamping rotating shaft 21 is driven to rotate synchronously by the poke rod 22, during the oblique rotation process of the poke rod 22, the deformation degree of the torsion spring 23 is increased, during the rotation process of the poke rod 22, two rows of wire clamping rods 24 and wire clamping rings 25 above the control key 4 are far away from each other, when the poke rod 22 rotates to a preset angle, the poke operation of the poke rod 22 is stopped, the electrical connection operation between the control key 4 circuit and the existing circuit is performed by the operator, after the circuit electrical connection is completed, the poke action on the poke rod 22 is released, then, under the torsion force reset action of the torsion spring 23, the poke rod 22 performs the automatic reset rotation, during the rotation process drives the wire clamping rods 24 and the wire clamping rings 25 to perform the synchronous reset rotation, and during the reset process of the wire clamping rings 25, the previous connecting lines are intensively tied in the clamping wire clamping rings 25 of indentations, the adjacent connecting wires are in the clamping rings 25, the loose notches of the connecting wires 4 and the connecting wires are in the contact with the wire clamping rings 25, and the clamping rings are in the limiting pads, and the connecting lines can be prevented from being increased by the friction pads.
As an embodiment of the present invention, as shown in fig. 4, fig. 7, fig. 8 and fig. 9, the positioning mechanism 5 includes an extension rod 51, a guide sliding sleeve 52, a V-shaped frame 53, a fixed rod 54, a V-shaped frame 55, a positioning sliding sleeve 56, a positioning ring 57 and a dislocation frame 58, the extension rod 51 is symmetrically installed at the rear side of the middle part of the base frame 1 from left to right, the guide sliding sleeve 52 is installed on the extension rod 51 in a sliding fit manner, permanent magnetic strips 511 are uniformly installed around the arc outer wall of the extension rod 51 in an extending manner, the permanent magnetic strips 511 and the guide sliding sleeve 52 are mutually adsorbed, the V-shaped frame 53 is installed between the guide sliding sleeves 52, the opening position of the V-shaped frame 53 faces the direction of the positioning plate 2, the fixed rod 54 is fixedly installed in the 2127453, the positioning sliding sleeve 56 is symmetrically installed at the upper and lower ends of the V-shaped frame 55, the positioning sliding sleeve 56 is provided with positioning sliding sleeves 572 in a sliding fit manner, the positioning ring 57 is provided with positioning blocks 58 which are symmetrically installed at the upper and the lower ends of the positioning sliding sleeve 58 and are connected with the positioning blocks 58 in a sliding fit manner.
During the operation, in the subsequent operation and monitoring processes of the silicon carbide reaction process, in order to facilitate observation and operation effects of workers in different directions and at different heights, in the process of transferring positions of the workers, firstly, the handle 6 is pulled to move in the direction away from the base frame 1, the regulation and control plate 2 is driven to synchronously move through the handle 6, the dislocation frame 58 is driven to synchronously move through the regulation and control plate 2, the dislocation ring 57 is driven to synchronously move through the dislocation frame 58, the locating bracket 2127453 is driven to synchronously move through the limit fit between the dislocation ring 57, the locating sliding sleeve 56 and the V-shaped bracket 55, in the process of moving the 2127453, the guiding sliding sleeve 52 is driven to synchronously slide on the extending rod 51, and in the process of moving and sliding the extending rod 51, the resistance value suffered during moving and sliding can be increased through the magnetic force adsorption effect, after the position adjustment of the guiding sliding sleeve 52 is completed, the relative position between the guiding sliding sleeve 52 and the extending rod 52 is adjusted, the relative position of the guiding sliding sleeve 52 and the extending rod is further adjusted to realize the locking of the regulation and control plate 2 in the horizontal position of the regulation and control plate 2, when the regulation and control of the silicon carbide reaction process is controlled by the regulation and control plate 2, and the regulation and control plate 2, when the regulation and control plate 2 is located on the front and the horizontal position of the front and the regulation and control plate 2;
then, along with the proceeding of the reaction work, after the next working position of the worker deviates from the regulation and control board 2, at the initial stage of the shift position of the worker, the worker pushes one end of the left and right ends of the regulation and control board 2, and then, under the pushing action of the worker and the rotating connection action of the dislocation frame 58, the regulation and control board 2 starts to perform the tilting rotation in the left and right direction between the positioning rings 57, further drives the control panel 3 and the control key 4 to perform the synchronous tilting rotation, and in the rotating process of the control panel 3 and the control key 4, through the clasping action of the wire clamping ring 25 and the reserved length processing at the initial stage of the circuit, the electronic circuit in a larger area of the rotating path can perform the integral adaptive tilting movement along with the rotation of the regulation and control board 2, thereby avoiding the larger pulling of the single electronic circuit, reducing the probability of poor contact and loose between the circuits, also improving the rapidity of the transmission of the electric signals, and stopping the pushing action of the worker after the regulation and control board 2 is adjusted to the preset tilting angle.
As an embodiment of the present invention, as shown in fig. 4, fig. 5, fig. 9 and fig. 10, the dislocation frame 58 further includes a dislocation rotating shaft 581, a connecting frame 582, a dislocation rotating disc 583, an electromagnet 584, a docking cabin 585, a docking sliding rod 586 and a docking spring 587, the middle of the dislocation frame 58 is fixedly inserted with the dislocation rotating shaft 581, the middle of the upper and lower ends of the control panel 2 is fixedly installed with the connecting frame 582, the lower end of the dislocation rotating shaft 581 is inserted in the connecting frame 582 in a rotation fit manner, the end of the lower end of the dislocation rotating shaft 581 is fixedly installed with the dislocation rotating disc 583, the dislocation rotating disc 583 is in rotation fit with the connecting frame 582, the dislocation rotating disc 583 is uniformly provided with hole slots along the circumference thereof, the electromagnet 584 is fixedly installed in the hole slots, the middle of the upper and lower ends of the control panel 2 are fixedly installed with the docking cabin 585, the docking sliding rod 585 is installed in the docking cabin 585 in a sliding fit manner, one end of the docking sliding rod 586 is in sliding fit with the hole slot on the docking rotating disc 583, the other end of the docking sliding rod is connected with the docking cabin 586 through the docking spring 586, the diameter of the outer wall of the docking rotating disc 586 is slightly smaller than the tensile force of the pole 587, when the working slot is larger than the tension of the docking spring 586, and the docking spring 586;
during operation, at an initial position, the electromagnet 584 is always in an energized state, the magnetic force of the electromagnet 584 on the abutting slide bar 586 overcomes the tensile force of the abutting spring 587 in an extended state, and under the attraction of the electromagnet 584, the end of the abutting slide bar 586 is located in the hole slot of the dislocation rotary disc 583, at this time, through the snap-fit between the abutting slide bar 586 and the hole slot of the dislocation rotary disc 583, the relative locking of the positions between the positioning ring 57 and the positioning plate 2 can be realized, during the process of adjusting the inclination angle of the positioning plate 2 in the left-right direction by a worker, the energization operation of the electromagnet 584 is released in advance, after the magnetic force attraction is lost, the abutting slide bar 586 is pulled by the elastic force of the abutting spring 587 and starts to fall down under the self gravity, after the end of the abutting slide bar 586 slides down from the hole slot of the dislocation rotary disc 583, the positioning ring 57 and the positioning plate 2 are in a relatively rotatable state, then, the worker pushes one of the left and right ends of the positioning plate 2 to rotate, then, the control panel 3 and the control key 4 synchronously rotate, after the left-right inclination of the positioning plate 586 slides down, after the adjustment, the positioning ring 584 stops, the work, the electromagnet 584 and after the electromagnet 584 is pushed again, the electromagnet 584 and the electromagnet 584 moves up and the electromagnet is moved to the positioning ring, and the electromagnet 584 is also synchronously.
As an embodiment of the present invention, as shown in fig. 4, 6 and 9, a hollow notch is formed in the middle of the positioning ring 57, a blocking rod 571 is uniformly inserted into the hollow notch, a limiting rod 531 is fixedly installed in the middle of the v-shaped frame 53, a limiting ring 532 is fixedly sleeved in the middle of the limiting rod 531, the limiting ring 532 is located between the symmetrically arranged positioning sliding sleeves 56, engaging teeth 533 made of elastic material are uniformly arranged on the arc side wall of the limiting ring 532, and the engaging teeth 533 are engaged with the blocking rod 571, and the engaging teeth 533 can perform self-restorable shrinkage deformation under the sliding and squeezing of the blocking rod 571;
during specific work, after the front and rear positions and the left and right positions of the control plate 2 are adjusted and locked, the multi-angle adaptability of the orientation is displayed for the lifting control screen 3 and the control keys 4, the upper end and the lower end of the control plate 2 are pushed by a worker to rotate clockwise or anticlockwise, the control plate 2 drives the positioning ring 57 to slide in the positioning sliding sleeve 56 under the limiting clamping action between the abutting sliding rod 586 and the dislocation rotating disc 583, the rotating path of the positioning ring 57 can be limited by the limiting guiding action of the positioning sliding sleeve 56, the blocking rod is driven to rotate synchronously and circumferentially during the rotation of the positioning ring 57, the meshing teeth 533 are of an elastic structure, the meshing teeth 533 can contract and deform per se under extrusion during the circumferential rotation of the blocking rod 571, the rotating path of the blocking rod is abducted, after the upper and lower inclination angles of the control plate 2 are adjusted, the positioning ring 57 stops moving synchronously and is meshed with the blocking ring 571 again after the upper and lower inclination angles of the control rod 57 are adjusted, the control rod 533 and the control rod is meshed with the adjacent blocking ring 57 and the control rod after the locking of the locking ring 533 and the control rod is further locked.
When in work:
the first step is as follows: firstly, the base frame 1 is integrally installed on an operation control table of an existing silicon carbide machine table by an operator, then a control circuit of the silicon carbide machine table is electrically connected with the control screen 3 and the control keys 4 by the operator, the silicon carbide machine table is in an operation state after the connection is finished, and then the control and monitoring of a silicon carbide reaction process are realized by the operation of the operator on the control screen 3 and the control keys 4;
the second step is that: in the process that a worker connects a control key 4 with an existing circuit, the poke rod 22 is preferentially pushed to rotate obliquely, the poke rod 22 drives the wire clamping rotating shaft 21 to rotate synchronously, in the process that the poke rod 22 rotates obliquely, the deformation degree of the torsion spring 23 is increased, in the process that the poke rod 22 rotates, two rows of wire clamping rods 24 and wire clamping rings 25 above the control key 4 are far away from each other, when the poke rod 22 rotates to a preset angle, the poke operation on the poke rod 22 is stopped, in addition, the worker carries out the electric connection operation between the circuit of the control key 4 and the existing circuit, in the process that the circuit electric connection is completed, the poke action on the poke rod 22 is released, then, under the torsion reset action of the torsion spring 23, the poke rod 22 carries out the automatic reset rotation, in the rotating process, the wire clamping rods 24 and the wire clamping rings 25 are driven to synchronously reset and rotate, in the reset process that the previous close connecting circuits are intensively bound in a notch of the wire clamping rings 25, in the connecting wire rings are in a loose state, and the connecting wires are arranged on the clamping rings through the elastic clamping pads, and the clamping pressure of the connecting wires can be increased;
the third step: in the subsequent control and monitoring process of the silicon carbide reaction process, in order to facilitate observation and control effects of workers in different directions and different heights, in the process of transferring positions of the workers, firstly, the handle 6 is pulled to move in the direction away from the base frame 1, the regulation and control plate 2 is driven to synchronously move through the handle 6, the dislocation frame 58 is driven to synchronously move through the regulation and control plate 2, the dislocation ring 57 is driven to synchronously move through the dislocation frame 58, the locating slide sleeve 56 and the V-shaped frame 55 are driven to synchronously move through the limit fit among the dislocation ring 57, the locating slide sleeve 56 and the V-shaped frame 53, and the guide slide sleeve 52 is driven to synchronously slide on the extension rod 51 in the process of moving the locating slide sleeve 53, and as the outer wall of the extension rod 51 is provided with a permanent magnet strip 511 mutually adsorbed with the guide slide sleeve 52, in the process of the displacement sliding of the guide sliding sleeve 52, the resistance value borne by the displacement sliding can be increased through the magnetic adsorption effect, after the position adjustment of the guide sliding sleeve 52 is completed, the relative position between the guide sliding sleeve 52 and the extension rod 51 is locked, the locking of the regulating and controlling plate 2 in the horizontal position direction is further realized, after the position adjustment of the regulating and controlling plate 2 is completed, the control screen 3 and the control key 4 which are positioned on the regulating and controlling plate 2 are both positioned outside the base frame 1, at the moment, when a worker works at a position far away from a silicon carbide reaction machine, the observation distance of the worker can be reduced by adjusting the space position of the regulating and controlling plate 2 in the front and back positions, and the quick control degree of the silicon carbide reaction process is improved;
the fourth step: along with the proceeding of the reaction work, after the next working position of the worker deviates from the regulation and control board 2, at the initial stage of the shift position of the worker, the worker pushes one end of the left and right ends of the regulation and control board 2, then, under the pushing action of the worker and the rotating connection action of the dislocation rack 58, the regulation and control board 2 starts to perform the tilting rotation in the left and right direction between the positioning rings 57, further drives the control panel 3 and the control key 4 to perform the synchronous tilting rotation, and in the rotating process of the control panel 3 and the control key 4, through the clasping action of the wire clamping ring 25 and the reserved length processing at the initial stage of the circuit, the electronic circuit in a larger area of the rotating path can perform the integral adaptive tilting movement along with the rotation of the regulation and control board 2, thereby avoiding causing larger pulling to a single electronic circuit, reducing the probability of poor contact and loosening between circuits, also improving the rapidity of the transmission of the electric signals, and stopping the pushing action of the worker after the regulation and control board 2 is adjusted to a preset tilting angle;
the fifth step: in the initial position, the electromagnet 584 is always in a powered state, the magnetic force adsorption effect of the electromagnet 584 on the abutting slide bar 586 overcomes the tensile force of the abutting spring 587 in the extended state, and under the adsorption effect of the electromagnet 584, the end of the abutting slide bar 586 is located in the hole groove of the dislocation rotary disc 583, at this time, the relative locking of the position between the positioning ring 57 and the control plate 2 can be realized through the clamping fit between the abutting slide bar 586 and the hole groove of the dislocation rotary disc 583, in the process of adjusting the inclined angle of the control plate 2 in the left and right direction, the power-on operation of the electromagnet 584 is released in advance, after the magnetic force adsorption effect is lost, the abutting slide bar 586 is pulled by the elastic force of the abutting spring 587 and starts to fall down under the self gravity, after the end of the abutting slide bar 586 slides down from the hole groove of the dislocation rotary disc 583, the positioning ring 57 and the control plate 2 are in a relatively rotatable state, then, the operator pushes one of the left and right ends of the control plate 2 to rotate, then, the control panel 3 and the control key 4 synchronously rotate, after the left and right inclined position adjustment of the adjusting plate 2 is finished, the clamping effect, the electromagnet 584 is pushed again, the electromagnet 584 is moved to the electromagnet, and the electromagnet 583 is synchronously;
and a sixth step: after the front and rear positions and the left and right positions of the control plate 2 are adjusted and locked, in order to improve the multi-angle adaptability of the orientation displayed by the control screen 3 and the control key 4, the upper and lower ends of the control plate 2 are pushed by a worker to rotate clockwise or counterclockwise, and at this time, under the limit clamping action between the abutting slide bar 586 and the dislocation rotating disc 583, the control plate 2 and the dislocation ring 57 are in a relative locking state, and then, under the rotating action of the worker pushing the control plate 2, the control plate 2 drives the dislocation ring 57 to slide in the dislocation sliding sleeve 56, the rotation path of the dislocation ring 57 can be limited by the limit guiding action of the dislocation sliding sleeve 56, and in the rotation process of the dislocation ring 57, the barrier bars are driven to rotate synchronously and circumferentially, because the meshing teeth 533 are of an elastic structure, in the circumferential rotation process of the barrier bars 571, the meshing teeth 533 are extruded to contract and deform, and move, after the upper and the dislocation ring 571 is pressed, the meshing teeth 533 and the control bar is meshed with the adjacent control ring 533 and reset to the adjacent locking position after the adjustment of the up and down angle adjustment of the control plate 2 is adjusted, and the control screen is meshed with the control screen, and the control screen is further locked.
The foregoing shows and describes the general principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the embodiments and descriptions given above are only illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which fall within the scope of the claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a silicon carbide electrical control equipment that extends, includes bed frame (1) regulation and control board (2), control panel (3), control key (4), positioning mechanism (5) and handle (6), its characterized in that: the middle part of the base frame (1) is movably provided with a regulation and control plate (2), the middle part of the regulation and control plate (2) is fixedly provided with a control screen (3), both ends of the regulation and control plate (2) are respectively provided with a plurality of control keys (4), both ends of the regulation and control plate (2) are symmetrically provided with handles (6), the middle part of the base frame (1) is provided with a positioning mechanism (5), and the positioning mechanism (5) is movably connected with the regulation and control plate (2);
the positioning mechanism (5) comprises an extension rod (51), guide sliding sleeves (52), a V-shaped frame (55), positioning sliding sleeves (56), positioning rings (57) and a dislocation frame (58), the extension rod (51) is symmetrically arranged at the left and right sides of the rear side of the middle part of the base frame (1), the guide sliding sleeves (52) are arranged on the extension rod (51) in a sliding fit manner, the V-shaped frames (53) are jointly arranged between the guide sliding sleeves (52), the opening positions of the V-shaped frames (53) face the direction of the regulating plate (2), the fixing rods (54) are fixedly arranged in the V-shaped frames (53), the V-shaped frames (55) are fixedly sleeved in the middle parts of the fixing rods (54), the positioning sliding sleeves (56) are symmetrically arranged at the upper and lower ends of the V-shaped frames (55), the positioning rings (57) are jointly arranged between the positioning sliding sleeves (56) in a sliding fit manner, and the dislocation frames (58) are connected with the dislocation plate (2) in a rotating fit manner.
2. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: bed frame (1) front portion seted up hollow installation notch, regulation and control board (2) are located the installation notch, and all reserve between the lateral wall all around of the edge of positioning board and installation notch and have the gyration clearance.
3. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: the middle part of the positioning ring (57) is provided with a hollow notch, blocking rods (571) are uniformly inserted into the hollow notch, the middle part of the 2127453 is fixedly provided with a limiting rod (531), the middle part of the limiting rod (531) is fixedly sleeved with a limiting ring (532), the limiting ring (532) is positioned between the positioning sliding sleeves (56) which are symmetrically arranged, the arc side wall of the limiting ring (532) is uniformly provided with meshing teeth (533) made of elastic materials, and the meshing teeth (533) are meshed with the blocking rods (571).
4. A silicon carbide epitaxial electrical control apparatus according to claim 3, wherein: the meshing teeth (533) can perform self-recoverable contraction deformation under the sliding extrusion of the blocking rod (571).
5. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: the extension rod (51) is provided with permanent magnetic strips (511) uniformly around the extension of the arc outer wall, and the permanent magnetic strips (511) and the guide sliding sleeve (52) are mutually adsorbed.
6. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: the position adjusting ring (57) is of a semicircular structure, the opening positions of the upper end and the lower end of the position adjusting ring (57) are symmetrically provided with a stop block (572), and the stop block (572) is located outside the position adjusting sliding sleeve (56) and is in clamping fit with the position adjusting sliding sleeve (56).
7. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: dislocation frame (58) still include dislocation pivot (581), link (582), dislocation carousel (583), electro-magnet (584), butt joint storehouse (585), butt joint slide bar (586) and butt joint spring (587), the fixed grafting in middle part of dislocation frame (58) has dislocation pivot (581), the equal fixed mounting in middle part of the upper and lower both ends of regulation and control board (2) has link (582), the lower extreme of dislocation pivot (581) is pegged graft on link (582) and the lower extreme tip fixed mounting of dislocation pivot (581) has dislocation carousel (583), dislocation carousel (583) and link (582) normal running fit, the hole groove has evenly been seted up along its circumference on dislocation carousel (583), equal fixed mounting has electro-magnet (584) in the hole groove, the equal fixed mounting in middle part of the upper and lower both ends of regulation and control board (2) has butt joint storehouse (585), install butt joint slide bar (586) through sliding fit's mode on butt joint storehouse (585), the one end of butt joint slide bar (586) and the dislocation carousel (583) sliding fit, the other end of butt joint spring (586) is connected with butt joint storehouse (585).
8. A silicon carbide epitaxial electrical control apparatus according to claim 7, wherein: the diameter of the circumference of the outer wall of the butt joint sliding rod (586) is slightly smaller than the diameter of the notch of the upper hole groove of the dislocation turntable (583), and the adsorption force between the permanent magnet and the butt joint sliding rod (586) when the permanent magnet works is larger than the spring tension of the butt joint spring (587) in a telescopic state.
9. A silicon carbide epitaxial electrical control apparatus according to claim 1, wherein: control board (2) on install two sets of double-layered line pivot (21) through normal running fit's mode, two sets of double-layered line pivot (21) are corresponding with control key (4) at control board (2) both ends respectively, poker rod (22) are installed to the both ends tip symmetry of double-layered line pivot (21), poker rod (22) are connected with control board (2) through torsional spring (23), and install between poker rod (22) at same double-layered line pivot (21) both ends jointly and press from both sides line pole (24), fixed mounting has wire clamping ring (25) on the top that is located control key (4) and presss from both sides line pole (24) of pressing from both sides line pole (24).
10. A silicon carbide epitaxial electrical control apparatus according to claim 9, wherein: the wire clamping rings (25) correspond to the control keys (4) one by one, and elastic pads are arranged on the inner walls of the wire clamping rings (25).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108995061A (en) * | 2018-07-26 | 2018-12-14 | 合肥米弘智能科技有限公司 | A kind of semiconductor chip donor wafer system of processing and its processing technology |
| JP2021024046A (en) * | 2019-08-06 | 2021-02-22 | 株式会社マキタ | Desktop cutting machine |
| CN114608329A (en) * | 2022-04-12 | 2022-06-10 | 广州志橙半导体有限公司 | Sintering frock of carborundum oar |
| CN114842627A (en) * | 2022-05-06 | 2022-08-02 | 连城凯克斯科技有限公司 | Early warning device for silicon carbide production and use method thereof |
| CN114959901A (en) * | 2022-05-12 | 2022-08-30 | 连城凯克斯科技有限公司 | Silicon carbide charging and crystal taking device |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108995061A (en) * | 2018-07-26 | 2018-12-14 | 合肥米弘智能科技有限公司 | A kind of semiconductor chip donor wafer system of processing and its processing technology |
| JP2021024046A (en) * | 2019-08-06 | 2021-02-22 | 株式会社マキタ | Desktop cutting machine |
| CN114608329A (en) * | 2022-04-12 | 2022-06-10 | 广州志橙半导体有限公司 | Sintering frock of carborundum oar |
| CN114842627A (en) * | 2022-05-06 | 2022-08-02 | 连城凯克斯科技有限公司 | Early warning device for silicon carbide production and use method thereof |
| CN114959901A (en) * | 2022-05-12 | 2022-08-30 | 连城凯克斯科技有限公司 | Silicon carbide charging and crystal taking device |
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