CN114952641B - Modularized distributed plane millstone - Google Patents
Modularized distributed plane millstone Download PDFInfo
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- CN114952641B CN114952641B CN202210682426.4A CN202210682426A CN114952641B CN 114952641 B CN114952641 B CN 114952641B CN 202210682426 A CN202210682426 A CN 202210682426A CN 114952641 B CN114952641 B CN 114952641B
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- tooth
- module distribution
- distribution area
- tooth module
- millstone
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/10—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The application discloses a modularized distributed plane millstone, which is characterized in that a big tooth module distribution area and a small tooth module distribution area are arranged on the end surface of a millstone body, the big tooth module distribution area and the small tooth module distribution area are arranged along involute grooves, and the width between the involute grooves on two sides of the big tooth module distribution area is larger than the width between the involute grooves on two sides of the small tooth module distribution area; the large tooth module distribution areas are arranged in an array along the circumferential direction of the millstone body, a plurality of small tooth module distribution areas are arranged between two adjacent large tooth module distribution areas, and tooth modules are arranged in the large tooth module distribution areas and the small tooth module distribution areas; by adopting the groove structure and combining the tooth-shaped module on the grinding disc, the grinding surface structure is optimized, the secondary scratch of the cutting chip on the surface of the workpiece is effectively avoided, the problems of flow and discharge blockage of grinding fluid and grinding chip are reduced, and higher surface quality is further obtained.
Description
Technical Field
The application belongs to the field of plane grinding discs, and particularly relates to a modularized distributed plane grinding disc.
Background
The grinding and polishing process is widely applied to the processing of semiconductor materials. With further development of integrated circuit technology and increase of integration level of components, surface flatness of wafers in components is required to reach nano-scale. With the increasing size of wafers, there is a growing demand for polishing disks which are important factors affecting the quality of polishing work, surface accuracy, material removal rate, and material removal stability.
The conventional diamond grinding disc has the defects that the grinding fluid is blocked easily in the grinding process due to random and disordered arrangement of the diamonds, the utilization rate is low, chip removal is difficult, the material removal rate is low, the material removal stability is poor, the secondary damage problem is caused on the surface of a workpiece, and the surface quality is lower than expected.
The current research is mainly aimed at grinding surfaces of different designs to obtain higher workpiece surface quality, but the designs are often based on engineering experience of tribology hysteresis, the design principle of the grinding disc is not clear, the structure optimization is not systematic, and the performance improvement in the aspects of work efficiency and grinding quality is limited.
Disclosure of Invention
The application aims to provide a modularized distributed plane millstone, which solves the problems of low material removal rate, poor material removal stability, low utilization rate of cooling liquid and poor flow smoothness of the cooling liquid in the processing process caused by unordered and random arrangement of abrasive particles of the existing millstone.
A modularized distributed plane millstone comprises a millstone body and involute grooves formed in the end face of the millstone body, wherein a big tooth module distribution area and a small tooth module distribution area are arranged on the end face of the millstone body, the big tooth module distribution area and the small tooth module distribution area are arranged along the involute grooves, and the width between the involute grooves on two sides of the big tooth module distribution area is larger than the width between the involute grooves on two sides of the small tooth module distribution area; the large tooth module distribution areas are arranged in an array along the circumferential direction of the millstone body, a plurality of small tooth module distribution areas are arranged between two adjacent large tooth module distribution areas, and tooth modules are arranged in the large tooth module distribution areas and the small tooth module distribution areas; the curve parameter equation of the involute groove is:
t is in the range of 0 to 2 pi.
Preferably, the involute grooves have a depth of 3mm and a width of 2mm.
Preferably, the tooth-shaped module comprises tooth stars and tooth grooves with the same width.
Preferably, the tooth star and tooth slot depths are 2mm.
Preferably, the large tooth module distribution area and the small tooth module distribution area are equally divided into an inner ring, a middle ring and an outer ring along the radial direction of the millstone body, and the structural size of the tooth type modules in the large tooth module distribution area in the same ring is twice that of the tooth type modules in the small tooth module distribution area.
Preferably, a plurality of circular grooves are distributed on the millstone body at intervals along the radial direction, and the tooth-shaped modules are arranged between the two circular grooves along the radial direction of the millstone body.
Preferably, the depth of the circular groove is 3mm and the width is 2mm.
Preferably, the widths of the tooth-shaped modules in the large tooth-shaped module distribution area in each circle from inside to outside along the radial direction of the millstone body are sequentially increased.
Preferably, the cross section of the tooth star is U-shaped, the cross section of the tooth groove is isosceles triangle, and the depth of the tooth star and the depth of the tooth groove are both 2mm.
Preferably, two adjacent tooth-shaped modules in the radial direction of the same tooth-module distribution area are oppositely arranged.
Compared with the prior art, the application has the following beneficial technical effects:
according to the modularized distributed plane millstone, the big tooth module distribution area and the small tooth module distribution area are arranged on the end face of the millstone body, the big tooth module distribution area and the small tooth module distribution area are arranged along involute grooves, and the width between the involute grooves on two sides of the big tooth module distribution area is larger than the width between the involute grooves on two sides of the small tooth module distribution area; the large tooth module distribution areas are arranged in an array along the circumferential direction of the millstone body, a plurality of small tooth module distribution areas are arranged between two adjacent large tooth module distribution areas, and tooth modules are arranged in the large tooth module distribution areas and the small tooth module distribution areas; by adopting the groove structure and combining the tooth-shaped module on the grinding disc, the grinding surface structure is optimized, the secondary scratch of the cutting chip on the surface of the workpiece is effectively avoided, the problems of flow and discharge blockage of grinding fluid and grinding chip are reduced, and higher surface quality is further obtained.
Furthermore, the depth of the involute groove and the depth of the circular groove are 3mm, and the width of the involute groove and the circular groove are 2mm, so that the discharging efficiency of abrasive dust, the utilization rate and the fluidity of grinding fluid are improved, and the problem of secondary damage caused by uneven distribution of the grinding fluid or abrasive dust residues is reduced.
Furthermore, two adjacent tooth-shaped modules in the same tooth module distribution area along the radial direction are oppositely arranged, so that the material removal rate in the grinding process is further improved.
According to the application, the utilization rate of the cooling liquid and the discharge efficiency of the abrasive dust are improved through the involute groove and the concentric groove design, so that the secondary damage problem in the grinding process is reduced; through the design of the distribution areas of the large and small tooth modules, the material removal stability in the grinding process is optimized, and the grinding quality is effectively improved.
Drawings
Fig. 1 is a front view of a grinding disc body according to an embodiment of the application.
Fig. 2 is a schematic structural diagram of a large tooth module distribution area and a small tooth module distribution area in an embodiment of the present application.
Fig. 3 is a schematic diagram of a structure of a large tooth module distribution area and a small tooth module distribution area arranged at intervals in an embodiment of the present application.
Fig. 4 is a schematic diagram of a distribution area interval distribution structure of a large tooth module according to an embodiment of the present application.
Fig. 5 is a schematic diagram of a tooth star and tooth slot structure according to an embodiment of the present application.
Fig. 6 is a schematic view of a tooth-shaped module structure according to an embodiment of the application.
The figure indicates: the large tooth module distribution area 1, the small tooth module distribution area 2, the tooth star 3, the tooth slot 4, the involute groove 5, the inner ring 6, the middle ring 7, the outer ring 8, the concentric groove 9, the tooth module 10 and the area rotation angle 11.
Detailed Description
In order that those skilled in the art will better understand the present application, a technical solution in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, shall fall within the scope of the present application.
As shown in fig. 1, the modularized distributed plane millstone comprises a millstone body, wherein a big tooth module distribution area 1 and a small tooth module distribution area 2 are arranged on the end surface of the millstone body, the big tooth module distribution area 1 and the small tooth module distribution area 2 are arranged along involute grooves 5, and the width between the involute grooves on two sides of the big tooth module distribution area 1 is larger than the width between the involute grooves on two sides of the small tooth module distribution area 2; the large tooth module distribution areas 1 are arranged in an array along the circumferential direction of the millstone body, a plurality of small tooth module distribution areas 2 are arranged between two adjacent large tooth module distribution areas 1, and tooth modules 10 are arranged in the large tooth module distribution areas 1 and the small tooth module distribution areas 2; the curve parameter equation of the involute groove 5 is:
t has a value range of 0 to 2 pi,
the grinding disc body is arranged by a basal body layer and a working layer in the axial direction, and a big tooth module distribution area 1 and a small tooth module distribution area 2 are arranged on the working layer; the sizes of tooth-shaped modules in the large tooth module distribution area 1 and the small tooth module distribution area 2 are different, and the tooth-shaped modules are arranged in the large tooth module distribution area 1 and the small tooth module distribution area 2 in a modularized unit.
Each big tooth module distribution area 1 and each small tooth module distribution area 2 take the axis of the millstone body as the center of a circle, and the rotation angle is 60 degrees, so that a complete module distribution area is formed.
The depth of the involute groove 5 is 3mm, and the width is 2mm; six large tooth module distribution areas 1 are symmetrically distributed in a rotating way by taking the axis of the millstone body as the circle center, and a plurality of small tooth module distribution areas 2 are arranged between two adjacent large tooth module distribution areas 1.
The tooth-shaped modules arranged in the large tooth module distribution area 1 and the small tooth module distribution area 2 comprise tooth stars 3 and tooth grooves 4 with the same width, and the depths of the tooth stars 3 and the tooth grooves 4 in each tooth-shaped module are 2mm.
The arc angle occupied by each big tooth module distribution area 1 is 10 degrees, the big tooth module distribution areas are distributed from the inner boundary to the outer boundary of the working layer according to the trend of the involute groove 5, and the tooth star 3 and the tooth groove 4 of each big tooth module unit are communicated with the concentric circle groove 9; the whole small tooth module distribution area 2 occupies an arc angle of 50 degrees and is distributed with the large tooth module distribution area 1 at intervals so as to improve the material removal uniformity in the grinding process.
The large tooth module distribution area 1 and the small tooth module distribution area 2 are uniformly divided into an inner ring 6, a middle ring 7 and an outer ring 8 along the radial direction of the millstone body, and the structural size of tooth modules in the large tooth module distribution area 1 of the same ring is twice that of tooth module in the small tooth module distribution area 2; a plurality of circular grooves 9 are distributed on the millstone body at intervals along the radial direction, the tooth-shaped modules are arranged between the two circular grooves 9 along the radial direction of the millstone body, the depth of each circular groove 9 is 3mm, and the width is 2mm.
Specifically, the tooth-shaped module width in each circle from inside to outside along the radial direction of the millstone body in the large tooth module distribution area is sequentially increased, specifically, the tooth-shaped module width in the inner circle 6 in the large tooth module distribution area is 4mm, the tooth-shaped module width in the middle circle 7 in the large tooth module distribution area is 6mm, and the tooth-shaped module width in the outer circle 8 in the large tooth module distribution area is 8mm.
The width of the tooth-shaped modules in the middle and small tooth module distribution areas 2 in the same circle is 0.5 times of that of the tooth-shaped modules in the big tooth module distribution areas 1; specifically, the width of the tooth-shaped modules in the inner ring 6 of the small tooth module distribution area 2 is 2mm, the width of the tooth-shaped modules in the middle ring 7 of the tooth module distribution area 2 is 3mm, and the width of the tooth-shaped modules in the outer ring 8 of the tooth module distribution area 2 is 4mm.
As shown in fig. 5 and 6, the cross section of the tooth star 3 is U-shaped, the cross section of the tooth groove 4 is isosceles triangle, and the depth of the tooth star 3 and the depth of the tooth groove 4 are both 2mm; the front ends of the tooth star 3 and the tooth groove 4 are respectively provided with an inclination angle, and the specific tooth profile inclination angle is 13 degrees; the inclination angle of the tooth star 3 and the inclination angle of the tooth slot 4 are positioned at the same end to form the tip end of the tooth-shaped module 10, and the tooth-shaped module 10 is along the circumferential tangential direction of the millstone body.
The involute grooves 5 and the circular grooves 9 are 3mm in depth and 2mm in width, so that the discharging efficiency of abrasive dust and the utilization rate and fluidity of grinding fluid are improved, and the problem of secondary damage caused by uneven distribution of the grinding fluid or abrasive dust residues is solved.
As shown in fig. 2, two adjacent tooth modules 10 in the radial direction are oppositely arranged in the same tooth module distribution area, so as to further improve the material removal rate in the grinding process.
As shown in fig. 3 and fig. 4, the large tooth module distribution areas 1 in the inner ring 6, the middle ring 7 and the outer ring 8 are alternately arranged along the circumferential direction of the millstone body, and specifically, the area rotation angle 11 and the tooth module 10 positional relationship shown in fig. 3 and fig. 4 are shown, so as to further increase the material removal rate in the grinding process.
The modularized distributed plane millstone is provided with the tooth-shaped modules 10 at the upper end, so that the material removal rate in the processing process is further improved; the utilization rate of the cooling liquid and the discharge efficiency of the abrasive dust are improved through the involute groove and the concentric circle groove, and the secondary damage problem in the grinding process is reduced; through the design of the distribution areas of the large and small tooth modules, the material removal stability in the grinding process is optimized, and the grinding quality is effectively improved.
While the application has been described with reference to certain embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the spirit and scope of the application. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the application without departing from the essential scope thereof. Therefore, it is intended that the application not be limited to the particular embodiment disclosed, but that the application will include all embodiments falling within the scope of the appended claims.
Claims (7)
1. The modularized distributed plane millstone is characterized by comprising a millstone body and involute grooves (5) formed in the end face of the millstone body, wherein a big tooth module distribution area (1) and a small tooth module distribution area (2) are arranged on the end face of the millstone body, the big tooth module distribution area (1) and the small tooth module distribution area (2) are all arranged along the involute grooves (5), and the width between the involute grooves on two sides of the big tooth module distribution area (1) is larger than the width between the involute grooves on two sides of the small tooth module distribution area (2); a plurality of big tooth module distribution areas (1) are arranged along the circumferential direction of the millstone body in an array manner, a plurality of small tooth module distribution areas (2) are arranged between two adjacent big tooth module distribution areas (1), and tooth-shaped modules (10) are arranged in each of the big tooth module distribution areas (1) and the small tooth module distribution areas (2); the curve parameter equation of the involute groove (5) is as follows:
t is in the value range of 0-2 pi; the tooth-shaped module comprises a tooth star (3) and tooth grooves (4) with the same width, the cross section of the tooth star (3) is U-shaped, the cross section of the tooth grooves (4) is isosceles triangle, and the depth of the tooth star (3) and the depth of the tooth grooves (4) are both 2mm.
2. A modular distributed planar abrasive disc according to claim 1, characterized in that the involute grooves (5) have a depth of 3mm and a width of 2mm.
3. The modularized distributed plane millstone according to claim 1, wherein the big tooth module distribution area (1) and the small tooth module distribution area (2) are divided into an inner ring (6), a middle ring (7) and an outer ring (8) along the radial direction of the millstone body, and the structural size of the tooth type modules in the big tooth module distribution area (1) in the same ring is twice the structural size of the tooth type modules in the small tooth module distribution area (2).
4. A modular distributed planar grinding disc according to claim 1, characterized in that a plurality of circular grooves (9) are radially spaced on the disc body, and the tooth-shaped modules are arranged between two circular grooves (9) in the radial direction of the disc body.
5. A modular distributed planar grinding disc according to claim 1, characterized in that the depth of the circular groove (9) is 3mm and the width is 2mm.
6. A modular distributed planar abrasive disc according to claim 3, wherein the tooth pattern module widths in each turn in the radial direction of the disc body in the large tooth module distribution area increase in sequence.
7. A modular distributed planar grinding disc according to claim 1, characterized in that two adjacent tooth modules (10) in the radial direction are oppositely arranged in the same tooth module distribution area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682426.4A CN114952641B (en) | 2022-06-16 | 2022-06-16 | Modularized distributed plane millstone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682426.4A CN114952641B (en) | 2022-06-16 | 2022-06-16 | Modularized distributed plane millstone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114952641A CN114952641A (en) | 2022-08-30 |
| CN114952641B true CN114952641B (en) | 2023-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210682426.4A Active CN114952641B (en) | 2022-06-16 | 2022-06-16 | Modularized distributed plane millstone |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2068288A1 (en) * | 1992-05-08 | 1993-11-09 | Yvon Gagne | Abrasive member |
| JP2011025382A (en) * | 2009-07-28 | 2011-02-10 | Sanko Seito Kk | Rotary grinding wheel |
| KR20110027982A (en) * | 2009-09-11 | 2011-03-17 | 새솔다이아몬드공업 주식회사 | Diamond grinder |
| CN202964426U (en) * | 2012-12-05 | 2013-06-05 | 修明 | Grinding wheel |
| CN204487395U (en) * | 2014-11-25 | 2015-07-22 | 河南秀川新材料科技有限公司 | A kind of electric angle grinder abrasive disc |
| CN110370178A (en) * | 2019-07-31 | 2019-10-25 | 冼国强 | A kind of individual particle ordered arrangement electroplating diamond grinding block and preparation method thereof |
| CN110948381A (en) * | 2019-12-05 | 2020-04-03 | 华侨大学 | Groove grinding disc and manufacturing method thereof |
| CN113752160A (en) * | 2021-09-01 | 2021-12-07 | 广东粤港澳大湾区黄埔材料研究院 | Polishing pad with grooves on surface |
-
2022
- 2022-06-16 CN CN202210682426.4A patent/CN114952641B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2068288A1 (en) * | 1992-05-08 | 1993-11-09 | Yvon Gagne | Abrasive member |
| JP2011025382A (en) * | 2009-07-28 | 2011-02-10 | Sanko Seito Kk | Rotary grinding wheel |
| KR20110027982A (en) * | 2009-09-11 | 2011-03-17 | 새솔다이아몬드공업 주식회사 | Diamond grinder |
| CN202964426U (en) * | 2012-12-05 | 2013-06-05 | 修明 | Grinding wheel |
| CN204487395U (en) * | 2014-11-25 | 2015-07-22 | 河南秀川新材料科技有限公司 | A kind of electric angle grinder abrasive disc |
| CN110370178A (en) * | 2019-07-31 | 2019-10-25 | 冼国强 | A kind of individual particle ordered arrangement electroplating diamond grinding block and preparation method thereof |
| CN110948381A (en) * | 2019-12-05 | 2020-04-03 | 华侨大学 | Groove grinding disc and manufacturing method thereof |
| CN113752160A (en) * | 2021-09-01 | 2021-12-07 | 广东粤港澳大湾区黄埔材料研究院 | Polishing pad with grooves on surface |
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| CN114952641A (en) | 2022-08-30 |
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