CN114923671A - Device and method for measuring spectral transmittance of infrared optical system - Google Patents
Device and method for measuring spectral transmittance of infrared optical system Download PDFInfo
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses a device and a method for measuring the spectral transmittance of an infrared optical system, which are used for measuring a focused infrared optical system and an afocal infrared optical system, wherein the device consists of an infrared light source, a retro-reflection system, a spectral light splitting system, a radiation detection system and a data processing system, the infrared light source generates standard infrared radiation, the retro-reflection system collimates the radiation emitted by the infrared light source, the infrared radiation returns along an incident path through a tested infrared optical system by a retro-reflector, the infrared radiation transmits the tested optical system for two times, the spectral light splitting system adopts a Fourier light splitting system to obtain the spectral distribution of the infrared radiation, the radiation detection system is used for receiving the infrared radiation, and the data processing system processes the detected infrared radiation to obtain the spectral transmittance of the tested optical system. The invention is mainly used for measuring and calibrating the spectral transmittance of optical infrared optical systems such as a thermal infrared imager lens, an infrared telescopic optical system, an infrared optical window, an infrared optical filter and the like.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and relates to a device and a method for measuring the spectral transmittance of an infrared optical system.
Background
The infrared thermal imaging technology is a passive infrared night vision technology, forms images by utilizing different infrared heat radiation intensities of different parts of a natural object, has the capability of monitoring targets at night and under severe weather conditions, and is widely applied to the fields of industry, medical treatment, agriculture, scientific research and military.
In any type of infrared equipment, the core of the infrared equipment consists of an infrared optical system and a detector, the quality of an image depends on the performance of the infrared optical system to a great extent, and powerful infrared equipment needs to be realized by the infrared optical system with a complex structure. The spectral transmittance is just a key performance index for evaluating the quality of the infrared optical system. If the transmittance of the system is low, the imaging quality and detection efficiency of the system will be seriously affected, so that accurate measurement and calibration of the spectral transmittance of the infrared optical system are necessary.
The invention takes the spectral transmittance test requirements of infrared optical systems such as a thermal infrared imager lens, an infrared telescope optical system, an infrared optical window, an infrared optical filter and the like as background, and has the problems that the spectral transmittance parameter of the infrared optical system is not accurately measured and the measuring equipment cannot trace the source, so that the loss degree of the spectral radiation after the infrared radiation passes through a certain optical system is not accurately measured, the accurate evaluation of the spectral transmittance parameter performance of the infrared optical system is influenced, and the spectral transmittance of the infrared optical system is one of the most important parameters influencing the imaging quality of the infrared imaging system.
Disclosure of Invention
Objects of the invention
The invention provides an infrared spectrum transmittance measuring device and method of an infrared optical system, aiming at the problem that the existing transmittance measuring system of the optical system can only measure a visible light focused optical system and an infrared optical system measuring system can only measure an afocal optical system, so as to realize accurate measurement and calibration of the spectrum transmittance of different types of infrared optical systems.
(II) technical scheme
In order to solve the technical problem, the invention provides a device for measuring the spectral transmittance of an infrared optical system, which is used for accurately calibrating the spectral transmittance of different types of infrared optical systems such as an infrared photographic system, an infrared telescopic system, an infrared light window and the like.
As shown in fig. 1, the apparatus for measuring the spectral transmittance of an infrared optical system of the present invention comprises an infrared light source, a retro-reflection system, a spectral splitting system, a radiation detection system and a computer acquisition and processing system; the infrared light source emits infrared light beams, the infrared light beams are reflected by the infrared light source beam splitter and then enter the retro-reflection system, a tested piece and the internal plane retro-reflection mirror are arranged in the retro-reflection system, the infrared light beams are reflected by the internal plane retro-reflection mirror after penetrating through the tested piece, the reflected infrared light beams penetrate through the tested piece again and return to the original path, the return light beams penetrate through the infrared light source beam splitter and then enter the spectrum light splitting system, the spectrum light splitting system performs spectrum light splitting, the radiation detection system and the computer acquisition processing system acquire radiation signals, and the spectrum transmittance test of the infrared optical system is realized through empty measurement and actual measurement comparison.
As shown in fig. 2, the infrared light source is a blackbody radiation source 1, a beam splitter 2 is arranged on the light emitting side of the infrared light source, and a retro-reflection system is arranged on the light reflecting side of the beam splitter 2.
The retroreflection system comprises an off-axis parabolic reflector I4, a diaphragm 5 and a plane retroreflection mirror 8, the reflecting surface of the off-axis parabolic reflector I4 is opposite to the reflecting surface of the plane retroreflection mirror 8, the diaphragm 5 is arranged between the off-axis parabolic reflector I4 and the plane retroreflection mirror 8, and the measured optical system 6 is moved between the diaphragm 5 and the plane retroreflection mirror 8 through a five-dimensional precision adjusting objective table 7 during actual measurement.
The returned light beams from the back reflection system penetrate through the beam splitter 2 and are incident to the spectrum light splitting system, the spectrum light splitting system comprises an off-axis parabolic reflector II 9, a Fourier light splitting module 11 and an off-axis parabolic reflector III 12, the light beams are incident to the off-axis parabolic reflector II 9 for collimation, the collimated light beams are incident to the Fourier light splitting module 11, interference spectrum light splitting is achieved through Fourier change, outgoing radiation of the Fourier light splitting module 11 is focused by the off-axis parabolic reflector III 12, and focused light beams are incident to the radiation detection system.
The radiation detection system comprises an infrared detector 14, and signals output by the infrared detector 14 are processed by a computer acquisition and processing system 15 to obtain the spectral distribution of infrared radiation.
And a field diaphragm 3 is arranged on a light path between the beam splitter 2 and the off-axis parabolic reflector II 9 and is used for adjusting the diameter of a light beam incident to the off-axis parabolic reflector II 9.
And a plane retroreflector 10 is obliquely arranged between the off-axis parabolic reflector II 9 and the Fourier splitting module 11 and is used for realizing light path turning, changing the direction of the light path and reducing the overall volume of the system.
The device for measuring the spectral transmittance of the infrared optical system further comprises a switching reflector 13 and an uncooled observation thermal imager 16, wherein when the position of the five-dimensional precision adjustment object stage 7 is calibrated, the switching reflector 13 is cut into a light path between the off-axis parabolic reflector III 12 and the infrared detector 14, the switching reflector 13 reflects a light beam emitted by the off-axis parabolic reflector III 12, and the uncooled observation thermal imager 16 is used for imaging.
In the device for measuring the spectral transmittance of the infrared optical system, the infrared radiation emitted by the black body radiation source 1 is reflected by the beam splitter 2 and then enters the reflecting system, and the infrared radiation is collimated by the off-axis parabolic reflector I4. The field diaphragm 3 is used for adjusting the field of view of the calibrating device, and the diaphragm 5 is used for adjusting the diameter of the parallel light beam collimated by the off-axis parabolic reflector I so as to enable the diameter of the parallel light beam to be matched with the clear aperture of the system to be measured. During the null time, the detected optical system 6 does not enter the system light path, and a radiation voltage signal V during the null time is obtained. During actual measurement, the optical system 6 to be measured is moved into a light path between the diaphragm 5 and the plane retroreflector 8 through the five-dimensional precision adjusting objective table 7, and the positions of front, back, left, right, height, direction and pitching are precisely adjusted through the five-dimensional precision adjusting objective table 7 and the super-long stroke electric translation table carrying the plane retroreflector 8, so that the optical system 6 to be measured is consistent with the optical axis of the calibrating device, when the lens system is measured, the plane retroreflector 8 is precisely positioned on the focal plane of the lens system, and incident infrared radiation returns along the original path. After the infrared radiation transmits the tested optical system 5 twice, the infrared radiation passes through the focusing transmission beam splitter 2 and is collimated by the off-axis parabolic reflector II 9 to enter the Fourier splitting module 11, and the interference spectrum splitting is realized through Fourier change. The outgoing radiation of the Fourier splitting module 11 is focused by an off-axis parabolic reflector III 12 and enters an infrared detector 14, and the output signal of the infrared detector 14 is processed by a data acquisition processing system 15 to obtain the spectral distribution of the infrared radiation. Because infrared radiation cannot be directly observed by naked eyes, the switching reflector 13 is used for irradiating the off-axis parabolic reflector III 12 focused infrared radiation to the detector image surface of the uncooled observation thermal imager 16, the uncooled observation thermal imager 16 images the infrared radiation emitted by the black body radiation source 1, and the uncooled observation thermal imager 16 can be used for adjusting the five-dimensional precise adjustment object stage 7 of the calibrating device, and when the uncooled observation thermal imager 16 can clearly image the black body radiation source 1, the five-dimensional precise adjustment object stage 7 is adjusted to an ideal position.
Based on the above device for measuring the spectral transmittance of the infrared optical system, the method for measuring the spectral transmittance of the infrared optical system in this embodiment comprises the following steps:
the first step is as follows: air test
Firstly, the blackbody is arranged at a temperature point T, and a spectral voltage signal of the blackbody at the temperature point T during the null time is obtained.
The second step is that: measured in fact
The measured infrared optical system is moved into a light path, a light beam can return along an original path of an incidence direction after penetrating through the measured infrared optical system by adjusting a retro-reflector and a five-dimensional precision adjusting objective table, and a radiation voltage signal is received by an infrared detector after transmitting the measured infrared optical system twice.
The third step: calculating spectral transmittance
And calculating the spectral transmittance of the optical system to be measured after obtaining the spectral radiation distribution of the empty measurement and the actual measurement.
The spectral transmittance is a ratio of a voltage signal measured when a given infrared optical system enters the optical path and a voltage signal measured when the given infrared optical system does not enter the optical path empty. The definition can be represented by the following formula:
τ(λ)＝V'(λ)/V(λ) (1)
in the formula, V (λ) is a specific output voltage value of the detector during null measurement, and V' (λ) is a specific output voltage value of the detector during actual measurement. Spectral transmittance is generally a function of the wavelength of the radiation, and can be measured from one or more discrete wavelengths, or can be measured as an integrated average transmittance over a particular spectral band.
The temperature of the black body is set so that the radiant brightness emitted by the black body is L (lambda). When the infrared optical system to be detected does not enter the light path, the infrared optical system is in the idle detection state of the retro-reflection system, and the output voltage signal of the detector is obtained by the formula (2):
V(λ)＝L(λ)·α(λ)·R(λ)·Ω·A (2)
wherein L (lambda) blackbody emission spectral radiance (W/sr cm) 2 ·cm -1 ) Alpha (lambda) is the instrument constant of the retro-reflection system itself, and R (lambda) is the spectral responsivity (V/W-cm) of the detector -1 ) Omega is the field of view (sr) of the detector, A is the area (mm) of the light-sensitive surface of the detector 2 )。
When the infrared optical system to be detected enters the light path, the infrared optical system is in the actual measurement state of the retro-reflection system, and because the infrared radiation emitted by the black body penetrates through the infrared optical system to be detected twice, the output voltage signal of the detector is obtained by the formula (3):
V'(λ)＝L(λ)·α(λ)·R(λ)τ 2 (λ)·Ω·A (3)
thus, there are:
τ 2 (λ)＝V'(λ)/V(λ) (4)
therefore, the spectral transmittance of the infrared optical system to be measured is as follows:
(III) advantageous effects
According to the infrared spectrum transmittance measuring device and the infrared spectrum transmittance measuring method for the infrared optical system, the calibrating device can be used for testing full-aperture spectrum transmittance parameters of the infrared optical system with or without focus on one set of device, and has the advantages of high measuring precision, wide spectrum range, high spectrum resolution and the like; the invention can improve the design level of the infrared optical system product, improve the production process, discover the design defects of the product, accelerate the development progress of the product, provide reliable test measurement guarantee, widely perform the evaluation work of the spectral transmittance parameter of the infrared optical system, and provide necessary technical means for objectively and accurately evaluating the spectral transmittance parameter of the infrared optical system.
Drawings
FIG. 1 is a schematic block diagram of an apparatus for measuring spectral transmittance of an infrared optical system according to an embodiment of the present invention;
fig. 2 is a composition diagram of an apparatus for measuring spectral transmittance of an infrared optical system according to an embodiment of the present invention.
In the figure, a 1-blackbody radiation source, a 2-beam splitter, a 3-field diaphragm, a 4-off-axis parabolic reflector I, a 5-diaphragm, a 6-measured optical system, a 7-five-dimensional precision adjusting objective table, an 8-plane retroreflector, a 9-off-axis parabolic reflector II, a 10-plane retroreflector, an 11-Fourier splitting module, a 12-off-axis parabolic reflector III, a 13-switching reflector, a 14-infrared detector, a 15-data acquisition processing system and a 16-uncooled observation thermal imager are arranged.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
The invention provides a device for measuring the spectral transmittance of an infrared optical system, which can measure the spectral transmittance of the full aperture of the infrared optical system with or without focus, the wavelength range of the device covers 1-14 mu m, and the spectral resolution reaches 1cm -1 Used as a calibration device for measuring and calibrating the spectral transmittance of different types of infrared optical systems。
As shown in FIG. 1, the black body radiation source 1 is a black body of RCN1350 cavity of HGH company, and the beam splitter 2 is an infrared beam splitter made of ZnSe material, so that infrared radiation beam splitting in a wavelength range of 1-14 μm can be realized. The testing process is that infrared radiation emitted by the blackbody radiation source 1 is reflected by the beam splitter 2 and then enters the retro-reflection system. The field diaphragm 3 is used for adjusting the field of view of the calibration device, and the diaphragm 5 is used for adjusting the diameter of the collimated light beam of the off-axis parabolic reflector I so as to enable the diameter to be matched with the clear aperture of a system to be measured. During the null time, the measured optical system 6 does not enter the system light path, and a radiation voltage signal during the null time is obtained. In practical application, a five-dimensional precision adjusting mirror frame 7 developed by Zygo corporation is used for clamping a tested system to enable the tested system to enter a light path, the positions of the front and back, the left and right, the height, the direction and the pitching of the tested optical system are adjusted through the five-dimensional precision adjusting mirror frame 6 and an ultra-long stroke electric translation table carrying a plane retroreflector 8, the tested optical system 6 and a calibration device are coaxial, the plane retroreflector 8 is precisely positioned on a focal plane of a lens system, and incident infrared radiation returns along the original path. After infrared radiation transmits through the optical system 6 to be detected twice, the infrared radiation is focused and then transmits through the beam splitter 2, is collimated by the off-axis parabolic reflector II 9 and enters the OEM-kit type Fourier splitting module 11 of ABB company, and interference spectrum splitting is realized through Fourier change. The radiation emitted by the Fourier splitting module 11 is focused by an off-axis parabolic reflector III 12 and enters an Infrared detector 14 produced by Infrared company, and the output signal of the Infrared detector 14 is processed by a data acquisition processing system 15 to obtain the spectral distribution of the Infrared radiation. Because infrared radiation cannot be directly observed by naked eyes, the switching reflector 13 is used for enabling the infrared radiation focused by the off-axis parabolic reflector III 12 to be incident on the detector image surface of the uncooled observation thermal imager 16 with the wavelength of 3-14 microns of tobacco terrace Airi company, the uncooled observation thermal imager 16 images the infrared radiation emitted by the black body radiation source 1 and can be used for adjusting the five-dimensional precise adjustment object stage 5 of the calibrating device, and when the uncooled observation thermal imager 16 can clearly image the black body radiation source 1, the five-dimensional precise adjustment object stage 5 is adjusted to an ideal position.
The measurement of infrared spectrum transmittance can be divided into three steps:
the first step is the null measurement, firstly, the black body is arranged at a temperature point T, and the spectral voltage signal of the black body at the temperature point T during the null measurement is obtained.
And the second step is actual measurement, the infrared optical system to be measured is moved into a light path, the light beam can return along the original path of the incident direction after penetrating through the infrared optical system to be measured by adjusting the retroreflector and the five-dimensional precision adjustment objective table, and the radiation voltage signal is received by the infrared detector after transmitting through the infrared optical system to be measured twice.
And thirdly, calculating the spectral transmittance, and calculating the spectral transmittance of the optical system to be measured after obtaining the spectral radiation distribution of the empty measurement and the actual measurement.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make various improvements and modifications without departing from the technical principle of the present invention, and those improvements and modifications should be considered as the protection scope of the present invention.
Claims (10)
1. The device for measuring the spectral transmittance of the infrared optical system is characterized by comprising an infrared light source, a retro-reflection system, a spectral light splitting system, a radiation detection system and a computer acquisition and processing system; the infrared light source emits infrared light beams, the infrared light beams are reflected by the infrared light source beam splitter and then enter the retro-reflection system, the tested optical system and the internal plane retro-reflection mirror are arranged in the retro-reflection system, the infrared light beams penetrate through the tested optical system and then are reflected by the internal plane retro-reflection mirror, the reflected infrared light beams penetrate through the tested piece again and return back, the return light beams penetrate through the infrared light source beam splitter and then enter the spectral light splitting system, the spectral light splitting system performs spectral light splitting, the radiation detection system and the computer acquisition processing system acquire radiation signals, and the spectral transmittance test of the infrared optical system is realized by cutting out the tested optical system to perform empty test and cutting in the tested optical system to perform actual test and comparison.
2. The apparatus for measuring spectral transmittance of an infrared optical system according to claim 1, wherein the infrared light source is a blackbody radiation source (1), a beam splitter (2) is disposed on the light exit side of the infrared light source, and a retro-reflection system is disposed on the light reflection side of the beam splitter (2).
3. The device for measuring the spectral transmittance of an infrared optical system according to claim 2, wherein the retroreflection system comprises an off-axis parabolic reflector I (4), a diaphragm (5) and a planar retroreflection mirror (8), the reflecting surface of the off-axis parabolic reflector I (4) is opposite to the reflecting surface of the planar retroreflection mirror (8), the diaphragm (5) is arranged between the off-axis parabolic reflector I (4) and the planar retroreflection mirror (8), and the measured optical system (6) is cut out or into between the diaphragm (5) and the planar retroreflection mirror (8) through a five-dimensional fine adjustment stage (7) during empty measurement or actual measurement.
4. The device for measuring the spectral transmittance of an infrared optical system according to claim 3, wherein the spectral beam splitting system comprises an off-axis parabolic mirror II (9), a Fourier beam splitting module (11) and an off-axis parabolic mirror III (12), the light beam is incident on the off-axis parabolic mirror II (9) for collimation, the collimated light beam is incident on the Fourier beam splitting module (11), interference spectral splitting is realized through Fourier change, the radiation emitted from the Fourier beam splitting module (11) is focused by the off-axis parabolic mirror III (12), and the focused light beam is incident on the radiation detection system.
5. The infrared optical system spectral transmittance measurement device according to claim 4, wherein the radiation detection system comprises an infrared detector (14), and the output signal of the infrared detector (14) is processed by the computer acquisition and processing system (15) to obtain the spectral distribution of the infrared radiation.
6. The apparatus for measuring spectral transmittance of an infrared optical system according to claim 4, wherein a field stop (3) is disposed on the optical path between the beam splitter (2) and the off-axis parabolic mirror II (9) for adjusting the diameter of the light beam incident on the off-axis parabolic mirror II (9).
7. The device for measuring the spectral transmittance of an infrared optical system according to claim 4, wherein a plane reflecting mirror (10) is obliquely arranged between the off-axis parabolic mirror II (9) and the Fourier splitting module (11) for realizing the light path turning, changing the light path direction and reducing the whole volume of the system.
8. The infrared optical system spectral transmittance measurement device according to any one of claims 1 to 7, further comprising a switching mirror (13) and an uncooled thermal observation imager (16), wherein when the position of the five-dimensional fine adjustment stage (7) is calibrated, the switching mirror (13) is switched into the optical path between the off-axis parabolic mirror III (12) and the infrared detector (14), and the switching mirror (13) reflects the light beam emitted from the off-axis parabolic mirror III (12) and is imaged by the uncooled thermal observation imager (16).
9. A method for measuring spectral transmittance of an infrared optical system, characterized by using the apparatus for measuring spectral transmittance of an infrared optical system according to claim 8, the method comprising the steps of:
the first step is as follows: air test
Firstly, setting an infrared light source at a temperature point T to obtain a spectral voltage signal of the infrared light source at the temperature point T during the null measurement;
the second step: measured in fact
Moving the measured optical system into a light path, enabling the light beam to return along the original path of the incident direction after penetrating through the measured infrared optical system by adjusting a plane retroreflector and a five-dimensional precision adjusting objective table, and receiving a radiation voltage signal by an infrared detector after transmitting the measured infrared optical system twice;
the third step: calculating spectral transmittance
And after the spectral radiation distribution of the empty measurement and the actual measurement is obtained, calculating the spectral transmittance of the measured optical system.
10. The apparatus for measuring spectral transmittance of an infrared optical system according to claim 9, wherein the spectral transmittance represents a ratio of a voltage signal measured when a given infrared optical system enters the optical path in practice to a voltage signal measured when the given infrared optical system does not enter the optical path in null, and is represented by the formula:
τ(λ)＝V'(λ)/V(λ) (1)
in the formula, V (lambda) is a specific output voltage value of the detector during the null measurement, and V' (lambda) is a specific output voltage value of the detector during the actual measurement;
the temperature of the black body is set, the emergent radiation brightness of the black body is L (lambda), when the infrared optical system to be detected does not enter the light path, the infrared optical system to be detected is in the idle measurement state of the retro-reflection system, and the output voltage signal of the detector is obtained by a formula (2):
V(λ)＝L(λ)·α(λ)·R(λ)·Ω·A (2)
wherein L (lambda) blackbody emission spectral radiance/W/sr-cm 2 ·cm -1 Alpha (lambda) is the instrument constant of the retro-reflection system itself, and R (lambda) is the spectral responsivity/V/W cm of the detector -1 Omega is the field of view/sr of the detector, A is the area of the light-sensitive surface/mm of the detector 2 ；
When the infrared optical system to be detected enters the light path, the infrared optical system is in the actual measurement state of the retro-reflection system, and because the infrared radiation emitted by the black body penetrates through the infrared optical system to be detected twice, the output voltage signal of the detector is obtained by the formula (3):
V'(λ)＝L(λ)·α(λ)·R(λ)τ 2 (λ)·Ω·A (3)
thus, there are:
τ 2 (λ)＝V'(λ)/V(λ) (4)
therefore, the spectral transmittance of the infrared optical system to be measured is as follows:
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