CN114895071A - Self-powered flexible acceleration sensor and preparation method thereof - Google Patents
Self-powered flexible acceleration sensor and preparation method thereof Download PDFInfo
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- 229910052733 gallium Inorganic materials 0.000 claims abstract description 8
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/185—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators using fluid streams
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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Abstract
The invention discloses a self-powered flexible acceleration sensor and a preparation method thereof. The base layer is a flat cube formed by flexible stretchable organic matters with certain thickness, and the middle part of the base layer is provided with a hemispherical groove. The upper surface of the substrate and the outer surface of the cavity are completely covered by the copper-plated lower electrode layer. The cavity of the groove contains gallium indium tin GaInSn metal liquid drops with high surface tension, high mass density, high elasticity and mechanical stability. The GaInSn metal droplet is sealed in the cavity by the pressure sensing layer and the upper electrode layer. The pressure sensitive layer is composed of a fluorinated ethylene propylene FEP electret film layer, and the upper electrode layer is composed of a copper-plated film. The self-powered flexible sensor disclosed by the invention can realize the detection of acceleration, and has the advantages of high sensitivity, simple and feasible preparation method and high feasibility.
Description
Technical Field
The invention relates to a flexible acceleration sensor, in particular to a self-powered flexible acceleration sensor and a preparation method thereof.
Background
The acceleration sensor is one of key MEMS sensing devices in the fields of military, national defense, aerospace, industrial application and the like. With the rise of the era of intelligent terminals and internet of things, acceleration sensors are used as basic sensing devices in the internet of things, acceleration monitoring on curved surfaces and movable substrates, and passive application requirements are promoted, such as intelligent robots, industrial applications, smart medical applications, wearable applications and the like. Because the rigid substrate of the traditional silicon-based MEMS acceleration sensor cannot be compatible with a flexible or curved surface substrate to be measured, the development of the flexible acceleration sensor capable of self-powering is urgent.
In 2012, the Lin topic group of the china university in taiwan has designed an RFID-based thermal acceleration sensor, and a flexible polyimide substrate with a low thermal conductivity is used in the design, which is a new idea of using a plastic material as a base material. Since the heat insulating property of the plastic material is superior to that of the conventional silicon material, power consumption and cost are reduced. The 2016 Lin project group created the idea of fabricating acceleration sensors either directly or stacked one on top of the other on a flexible substrate or on a plastic substrate, and proposed to replace the traditional rectangular cavity with a hemispherical or semi-cylindrical cavity. In 2013, a Zhang group at Simon Frazier university, Canada designed and manufactured a high-sensitivity uniaxial film type flexible paper acceleration sensor by using a simple spraying technology of silver nano ink. In the manufacturing process, the acceleration sensor consists of a suspended parallel plate sensing capacitor, which is prepared on a flexible paper substrate by using a low-cost nano ink printing technology. In 2015, a wireless acceleration detection system based on a carbon nanotube film of nanotechnology was designed by Zhang Tong theme group of Shandong science and technology university. The carbon nano tube has unique structural characteristics, excellent mechanical properties and electrical properties, and a carbon nano tube film is formed on a polyethylene terephthalate (PET) substrate by a layer-by-layer alternate deposition method. In 2020, a beam epitaxy subject group of Wuhan university of science and technology designs a flexible hinge acceleration sensor, the sensor is based on double fiber bragg gratings, and compared with an electric sensor, the fiber bragg grating acceleration sensor has the advantages of small size, high temperature resistance, electromagnetic interference resistance, high precision, good stability and the like. The flexible acceleration sensor needs power supply and is complex in manufacturing process, and important research value is provided for solving the problems of sensor power supply and complex process.
On the other hand, since liquid metal has characteristics such as high conductivity, high density and high surface tension, application and exploration in the fields of triboelectric nano-generators and flexible electronics are rapidly increased, and compared with harmful metals such as mercury, gallium-based alloys are safer, so that attention to gallium-based alloys is continuously promoted, and the continuously developing field receives special attention.
Meanwhile, as research on electrets becomes deeper and deeper, excellent charge storage properties thereof are gradually being widely used. Compared with an electromechanical transducer device utilizing electromagnetic induction and piezoelectric effect, the flexible electret generator based on the electrostatic induction principle has many outstanding advantages, such as high flexibility, light weight, simple structure, low cost, large output power and the like.
Disclosure of Invention
The purpose of the invention is as follows: in view of the above prior art, a self-powered flexible acceleration sensor and a method for manufacturing the same are provided.
The technical scheme is as follows: the invention discloses a self-powered flexible acceleration sensor which comprises a substrate layer, a lower electrode layer, a pressure sensing layer and an upper electrode layer which are arranged from bottom to top in sequence; the substrate layer is made of a flexible stretchable organic material with a certain thickness, a groove is formed in the upper surface of the substrate layer, metal droplets are arranged in the groove, and the lower electrode layer covers the upper surface of the substrate layer and the inner surface of the groove; the pressure sensing layer is positioned above the groove.
The working principle of the sensor of the invention is as follows: under quiescent condition, inside the recess was placed in to the metal liquid drop under gravity in the sensor, with top pressure sensing layer contactless, when applying vertical direction acceleration, the metal liquid drop upwards moves the contact and extrudees top pressure sensing layer under the acceleration, pressure sensing layer takes place deformation, because the electret has piezoelectric effect, receive pressure and take place the deformation back, the inside electric charge of electret takes place the transfer, change at upper electrode layer output voltage, the realization is to the perception of acceleration, and in certain acceleration range, the metal liquid drop is positive correlation to pressure sensing layer extrusion deformation volume and acceleration. According to the working principle, the self-power supply capability is realized.
Further, the base layer is made of polydimethylsiloxane PDMS material.
Further, the metal droplets have high conductivity, high solid-liquid interfacial tension, high mass density, high elasticity and mechanical robustness.
Further, the metal liquid drop is a gallium indium tin GaInSn metal liquid drop. The GaInSn metal droplets are encapsulated in the grooves by the pressure sensing layer.
Further, the pressure-sensitive layer is a fluorinated ethylene propylene FEP electret film layer; the electret mode is corona polarization, and the thickness of the film is 200 mu m.
Furthermore, the lower electrode layer and the upper electrode layer are both copper-plated electrode layers. The lower electrode layer and the upper electrode layer are both prepared in a sputtering or electroplating mode, and the thickness of each electrode layer is 100 nm.
The invention discloses a preparation method of a self-powered flexible acceleration sensor, which comprises the following steps:
and 5, sputtering or electroplating an upper electrode layer on the surface of the pressure-sensitive layer after the electret.
Has the advantages that: compared with the prior art, the flexible acceleration sensor has the following innovations: firstly, an FEP film material is used for realizing a pressure sensing layer structure, and the structure can realize self power supply without an external power supply; secondly, the charge storage capacity and the ultrahigh surface-to-volume ratio of the electret FEP film and the high surface tension and the high conductivity of liquid metal enable the sensor to have high sensitivity and short response time; thirdly, the liquid metal adopts gallium indium tin alloy liquid drops, and the liquid metal has no toxicity and can be used as human body wearable equipment; fourthly, the working cavity of the device is sealed, so that the liquid metal can be effectively isolated from contacting with air, the metal liquid drops are prevented from being oxidized, and the reliability of the device is improved.
Drawings
Fig. 1 is a schematic structural view and a sectional view of an acceleration sensor in an embodiment of the present invention;
fig. 2 is a structural sectional view of a first step of a manufacturing method of an acceleration sensor in an embodiment of the present invention;
fig. 3 is a structural sectional view of a second step of the acceleration sensor manufacturing method in the embodiment of the present invention;
fig. 4 is a structural sectional view of a third step of the acceleration sensor manufacturing method in the embodiment of the invention;
FIG. 5 is a sectional view showing the structure of the fourth step of the acceleration sensor manufacturing method in the embodiment of the present invention;
fig. 6 is a structural sectional view of the fifth step of the acceleration sensor manufacturing method in the embodiment of the invention.
Wherein, 1, a basal layer; 2. a lower electrode layer; 3. a groove; 4. a metal droplet; 5. a pressure-sensitive layer; 6. and an upper electrode layer.
Detailed description of the invention
The invention is further explained below with reference to the drawings.
The invention discloses a self-powered flexible acceleration sensor, which comprises a substrate layer 1, a lower electrode layer 2, a pressure sensing layer 5 and an upper electrode layer 6 which are sequentially arranged from bottom to top as shown in figure 1; the substrate layer 1 is of a cuboid structure, a hemispherical groove 3 is formed in the upper surface of the substrate layer, metal liquid drops 4 are arranged in the groove 3, and the lower electrode layer 2 covers the upper surface of the substrate layer 1 and the inner surface of the groove 3; the lower electrode layer 2 is a copper thin film.
The substrate layer 1 is a flat cuboid structure formed by flexible stretchable organic matters; the substrate layer 1 is made of stretchable flexible organic materials with high elastic modulus, such as polydimethylsiloxane PDMS (polydimethylsiloxane), and the like, and the substrate layer 1 with the grooves 3 is prepared in a pouring and molding mode, wherein the thickness of the main body of the substrate layer 1 is 8mm, the depth of each groove 3 is smaller than the thickness of the main body and is 3mm, and the diameter of each groove 3 is 10 mm.
The metal liquid drop 4 is gallium indium tin GaInSn metal liquid drop with high conductivity, high solid-liquid interfacial tension, high mass density, high elasticity and mechanical robustness, but is not limited to harmless liquid metal such as GaInSn. The GaInSn metal droplets are enclosed in the grooves 3 by the pressure sensitive layer 5.
The pressure sensitive layer 5 is a fluorinated ethylene propylene FEP electret film layer; the electret mode is corona polarization, and the thickness of the film is 200 mu m.
The lower electrode layer 2 and the upper electrode layer 6 are both copper-plated electrode layers and are prepared in a sputtering or electroplating mode, and the thickness of each electrode layer is 100 nm.
The working principle of the sensor is as follows: under quiescent condition, metal liquid drop 4 among the sensor is stood in recess 3 under gravity, contactless with top pressure sensing layer 5, when applying vertical direction acceleration, metal liquid drop 4 upward movement contact and extrusion top pressure sensing layer 5 under the acceleration, pressure sensing layer 5 takes place deformation, because the electret has piezoelectric effect, receive the pressure and take place the deformation back, the inside electric charge of electret takes place the transfer, change at 6 output voltage of upper electrode layer, the perception to the acceleration is realized, and in certain acceleration range, metal liquid drop 4 is to 5 extrusion deformation volume and acceleration of pressure sensing layer and is positive correlation, the output voltage and the extrusion deformation volume of pressure sensing layer are positive correlation. According to the working principle, the self-power supply capability is realized.
A preparation method of a self-powered flexible acceleration sensor comprises the following steps:
and 3, treating the gallium indium tin alloy liquid drop with the mass of 0.68g (the volume is 0.113ml) by using a sodium hydroxide NaOH solution, and using the liquid drop to clean the surface of the liquid drop, remove an oxidation layer and simultaneously form a thin anti-oxidation layer. Then coating a layer of Polytetrafluoroethylene (PTFE) particles to enhance the elasticity, fluidity and mechanical stability of the liquid metal, as shown in fig. 4;
and 5, sputtering or electroplating a copper film with the thickness of 100nm on the surface of the FEP film after the electret treatment, as shown in figure 6.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and amendments can be made without departing from the principle of the present invention, and these modifications and amendments should also be considered as the protection scope of the present invention.
Claims (10)
1. A self-powered flexible acceleration sensor is characterized by comprising a substrate layer, a lower electrode layer, a pressure sensing layer and an upper electrode layer which are sequentially arranged from bottom to top;
the substrate layer is made of flexible stretchable organic materials, a groove is formed in the upper surface of the substrate layer, metal droplets are arranged in the groove, and the lower electrode layer covers the upper surface of the substrate layer and the inner surface of the groove.
2. A self-powered flexible acceleration sensor according to claim 1, characterized in, that the substrate layer is made of polydimethylsiloxane PDMS material.
3. Self-powered flexible acceleration sensor according to claim 1, characterized in, that the metal droplets have a high electrical conductivity, a high solid-liquid interface tension, a high mass density, a high elasticity and mechanical robustness.
4. A self-powered flexible acceleration sensor according to claim 1, characterized in, that said metal droplets are gallium indium tin GaInSn metal droplets.
5. A self-powered flexible acceleration sensor according to claim 1, characterized in, that the pressure sensitive layer is a fluorinated ethylene propylene FEP electret film layer.
6. A self-powered flexible acceleration sensor according to claim 5, characterized in, that the electret way is corona polarized and the film thickness is 200 μm.
7. Self-powered flexible acceleration sensor according to claim 1, characterized in, that the lower and the upper electrode layer are both copper-plated electrode layers.
8. A self-powered flexible acceleration sensor according to claim 7, characterized in, that the lower and the upper electrode layer are made by sputtering or plating, each with a thickness of 100 nm.
9. A method for manufacturing a self-powered flexible acceleration sensor according to claim 1, characterized in that it comprises the following steps:
step 1, preparing a substrate layer with a groove on the upper surface;
step 2, sputtering or electroplating a lower electrode layer on the surface of the substrate layer; the lower electrode layer covers the upper surface of the substrate layer and the inner surface of the groove;
step 3, treating the metal liquid drop with a sodium hydroxide NaOH solution, then coating a layer of polytetrafluoroethylene PTFE particles, and placing the polytetrafluoroethylene PTFE particles in the groove;
step 4, performing electret charging on the pressure-sensitive layer in a corona electret mode, and then attaching the pressure-sensitive layer to the upper surface of the substrate layer;
and 5, sputtering or electroplating an upper electrode layer on the surface of the pressure-sensitive layer after the electret.
10. A method for manufacturing a self-powered flexible acceleration sensor according to claim 9, characterized in that, in step 4, the voltage is-1.8 kV, the temperature is 25 degrees celsius, and the time is 3 minutes when the corona is electret.
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| CN202210457656.0A CN114895071A (en) | 2022-04-27 | 2022-04-27 | Self-powered flexible acceleration sensor and preparation method thereof |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009150861A (en) * | 2007-11-30 | 2009-07-09 | Seiko Instruments Inc | Liquid seal sensor |
| JP2014085306A (en) * | 2012-10-26 | 2014-05-12 | Shinshu Univ | Flexible-contact type four-axle load measuring system |
| CN108761129A (en) * | 2018-08-27 | 2018-11-06 | 北京梦之墨科技有限公司 | A kind of acceleration transducer |
| CN109282921A (en) * | 2018-11-08 | 2019-01-29 | 衢州学院 | Dripping electric pole type three-dimensional capacitance touch sensor |
| CN110017923A (en) * | 2019-05-13 | 2019-07-16 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor and preparation method thereof |
| CN112945429A (en) * | 2021-01-29 | 2021-06-11 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor and manufacturing method thereof |
| CN113325199A (en) * | 2021-06-09 | 2021-08-31 | 东南大学 | Thermopile type high-sensitivity flexible acceleration sensor and preparation method thereof |
-
2022
- 2022-04-27 CN CN202210457656.0A patent/CN114895071A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009150861A (en) * | 2007-11-30 | 2009-07-09 | Seiko Instruments Inc | Liquid seal sensor |
| JP2014085306A (en) * | 2012-10-26 | 2014-05-12 | Shinshu Univ | Flexible-contact type four-axle load measuring system |
| CN108761129A (en) * | 2018-08-27 | 2018-11-06 | 北京梦之墨科技有限公司 | A kind of acceleration transducer |
| CN109282921A (en) * | 2018-11-08 | 2019-01-29 | 衢州学院 | Dripping electric pole type three-dimensional capacitance touch sensor |
| CN110017923A (en) * | 2019-05-13 | 2019-07-16 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor and preparation method thereof |
| CN112945429A (en) * | 2021-01-29 | 2021-06-11 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor and manufacturing method thereof |
| CN113325199A (en) * | 2021-06-09 | 2021-08-31 | 东南大学 | Thermopile type high-sensitivity flexible acceleration sensor and preparation method thereof |
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