CN109282921A - Dripping electric pole type three-dimensional capacitance touch sensor - Google Patents
Dripping electric pole type three-dimensional capacitance touch sensor Download PDFInfo
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- CN109282921A CN109282921A CN201811324698.7A CN201811324698A CN109282921A CN 109282921 A CN109282921 A CN 109282921A CN 201811324698 A CN201811324698 A CN 201811324698A CN 109282921 A CN109282921 A CN 109282921A
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- dripping
- touch sensor
- top crown
- electrode
- electric pole
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- 239000003990 capacitor Substances 0.000 claims abstract description 46
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 229910001128 Sn alloy Inorganic materials 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 229920000260 silastic Polymers 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000001746 injection moulding Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000010008 shearing Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 241000283080 Proboscidea <mammal> Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001537 neural effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of dripping electric pole type three-dimensional capacitance touch sensors.Mainly successively it is composed of from bottom to up bottom crown, dielectric layer and top crown, bottom crown upper surface is provided with the square groove of four group patterns arrangement, every group of square groove includes two right angled triangle slots, each right angled triangle slot is equipped with a sensing electrode, and two sensing electrodes of every group of square groove constitute one group of capacitor cell；Semicircle ball shape structure is processed into top crown upper surface, and the processing of top crown lower surface is bonded so that forming seal cavity there are four the trapezoidal mesa-shaped slot of array arrangement, dielectric layer and top crown, and four seal cavities are filled with gallium-indium-tin alloy liquid and constitute four sensing units.The present invention substitutes the mode that traditional capacitance sensor changes pole plate spacing by the way of pole-changing plate suqare, effectively improves transducer sensitivity.
Description
Technical field
The present invention relates to a kind of touch sensors, more particularly, to a kind of dripping electric pole type three-dimensional capacitance tactile sensing
Device.
Background technique
Tactile is one of most important feeling of the mankind, the mankind by tactilely-perceptible by the geometry of contact object, texture,
Characteristic in terms of temperature, flexibility or rigidity.As the connection between Mechatronic Systems autonomous control and biological neural feedback control
Tie, artificial tactilely-perceptible system is commonly applied to artificial limb system, and provides external environment information for bottom control, to improve artificial limb
Dexterity.Therefore, high performance touch sensor is developed, the mutually coordinated ability to work of artificial limb system and external environment is improved,
It is to realize the intelligentized key technology of prosthetic hand.Capacitance sensor is production because of the features such as its low-power consumption, low cost, high stability
One of main selection of touch sensor.
In recent years, carry out many touch sensor researchs based on capacitance sensor both at home and abroad, and be gradually applied to intelligence
During the pressure functional of energy prosthetic hand is rebuild, but following emphasis and problem constantly highlight in use:
1) touch sensor size is other in the micron-scale, and traditional capacitance sensor is generally by way of changing pole plate spacing
Realize the variation of capacitance, capacitance variations section is small, and the sensitivity that this directly results in touch sensor is lower, in small-signal
Disturbed signal is easy in detection to fall into oblivion.
2) by the use of flexible material, the flexural strength and tensile property of touch sensor get a promotion, but fragile
Signal conductor integrity problem tactile is ignored, and fracture of the signal conductor in alternating bending and drawing process is that current tactile passes
One of the main reason for sensor fails.
Summary of the invention
In order to solve the problems, such as background technique, the purpose of the present invention is to provide a kind of dripping electric pole types three
Tie up capacitive haptic sensors.
The technical solution adopted by the present invention to solve the technical problems is:
It is mainly successively composed of from bottom to up bottom crown, dielectric layer and top crown, bottom crown upper surface is provided with four
The square groove of group pattern arrangement, every group of square groove includes two right angled triangle slots, and two right angled triangle slots are with bevel edge
Relative spacing arranges to form square groove, and each right angled triangle slot is equipped with a sensing electrode, the two of every group of square groove
A sensing electrode constitutes one group of capacitor cell, and eight sensing electrodes constitute four groups of capacitor cells altogether in pairs；Table on top crown
Semicircle ball shape structure is processed into face, and there are four the trapezoidal mesa-shaped slot of array arrangement, four trapezoidal mesa-shaped for the processing of top crown lower surface
Slot is located at the surface of four square grooves；Dielectric layer is connected to upper surface and the top crown that bottom crown does not open up groove
Between the lower surface for not opening up trapezoidal mesa-shaped slot, and dielectric layer and top crown do not open up the lower surface bonds of trapezoidal mesa-shaped slot and make
The trapezoidal mesa-shaped slot for obtaining top crown forms seal cavity, and four seal cavities are filled with gallium indium tin by injection molding method
Alloy liquid, since gallium-indium-tin alloy surface tension of liquid forms four dripping electrodes, each dripping electrode is under
Respectively the corresponding one group of capacitor cell in lower section constitutes a sensing unit to pole plate, four dripping electrodes respectively with bottom crown
Four groups of capacitor cells constitute four sensing units.
Respectively as input terminal and output end, dripping electrode is not connected to appoint the two panels sensing electrode of each capacitor cell
What input/output terminal only plays the role of changing the effective overlapping area of capacitor cell.
Two sensing electrodes of one group of capacitor cell draw connection external signal reciever part through winding displacement.
Dripping electrode plays the role of public electrode in sensing unit, when external force is in the upper surface of top crown
When, dripping electrode is squeezed generation deformation and dielectric layer contact area corresponding with lower section is changed, and drives
The capacitance of capacitor cell changes with contact area.
Four seal cavities are located at the surface of four groups of capacitor cells, and seal cavity bottom plane area
Greater than the effective area of capacitor cell.
The bottom crown is using flexible printed circuit board as substrate.
The dielectric layer is using membrane structure made of silastic material.
The upper level size of the trapezoidal mesa-shaped slot is less than lower horizontal size, and practical is bucking ladder structure.
The top crown is using silastic material as substrate.
Structure through the invention, four capacitor cell central symmetry distributions, external force are easy to be decomposed into X-Y-Z three-dimensional pressure
And shearing force.The present invention is by dripping electrode as public electrode, and external force causes molten drop to generate deformation, using change
The mode of polar plate area substitutes the mode that traditional capacitance sensor changes pole plate spacing, can significantly improve transducer sensitivity.
The invention has the advantages that:
1) traditional copper electrode is substituted using molten drop electrode, molten drop electrode is squeezed under pressure, is produced
Raw significant deformation, changes capacitor cell effective area, and traditional capacitance sensor is substituted by the way of pole-changing plate suqare and changes pole
The mode of plate spacing, effectively improves transducer sensitivity.
2) dripping electrode is not connected to any input/output terminal, only plays and change as the public electrode in sensing unit
Become the effect of the effective overlapping area of capacitor cell, which processes more fragile interface circuit in the smaller bottom crown of deformation
On, solve the problems, such as to a certain extent sensor because interface circuit fracture caused by sensor failure so that the sensor
It can bear bigger stretching and bending.
Detailed description of the invention
Fig. 1 is inventive sensor structural schematic diagram.
Fig. 2 is inventive sensor structural exploded view.
Fig. 3 is inventive sensor bottom crown top view.
Fig. 4 is inventive sensor top crown bottom view.
Fig. 5 is inventive sensor A-A ' cross-sectional view.
Fig. 6 is the molten drop electrode deformation figure under the effect of inventive sensor pressure.
Fig. 7 is the first sensing unit pressure measurement schematic diagram of the invention.
In figure: 1, bottom crown, 2, dielectric layer, 3, top crown, 4, sensing electrode, 5, molten drop electrode.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The device of specific implementation by bottom crown 1, dielectric layer 2 and top crown 3 as shown in Figure 1, successively combined from bottom to up
It forms.
As shown in Figure 1, Figure 2 and Figure 3, for bottom crown 1 using flexible printed circuit board as substrate, 1 upper surface of bottom crown is provided with four
The square groove of group pattern arrangement, four groups of square groove array spacings are arranged to sphere of movements for the elephants shape, and every group of square groove includes two
Right angled triangle slot, two right angled triangle slots arrange to form the square groove of a pair of of linea angulata fluting with bevel edge relative spacing, often
A right angled triangle slot is equipped with a sensing electrode 4, and two sensing electrodes 4 of every group of square groove constitute one group of capacitor cell
5, eight sensing electrodes 4 constitute four groups of capacitor cells 5 altogether in pairs, and four capacitor cells 5 are respectively first capacitor cell S11,
S12, the second capacitor cell S21, S22, third capacitor cell S31, S32With the 4th capacitor cell S41, S42, four groups of 5 centers of capacitor cell
It is arranged symmetrically, wherein first capacitor cell S11, S12With third capacitor cell S31, S32It is diagonally arranged.Two in every group of capacitor cell
Piece sensing electrode 4 is respectively as input terminal and output end, to constitute a sensing capacitance, capacitance is expressed as CS1、
CS2、CS3And CS4.The two panels sensing electrode 4 of each capacitor cell 5 is respectively as input terminal and output end, and dripping electrode 6 is not
Connect any input/output terminal.
As shown in figure 4, top crown 3, using silastic material as substrate, semicircle ball shape structure is processed into 3 upper surface of top crown,
There are four arrays to arrange centrosymmetric trapezoidal mesa-shaped slot, four bucking ladders using the processing of micro-embossing technology for 3 lower surface of top crown
Shape slot is located at the surface of four square grooves.
Dielectric layer 2 is rectangular film structure, and dielectric layer 2 is connected to bottom crown 1 and does not open up the upper surface of groove and upper
Pole plate 3 does not open up between the lower surface of trapezoidal mesa-shaped slot, and dielectric layer 2 and top crown 3 do not open up the following table of trapezoidal mesa-shaped slot
Face is bonded so that the trapezoidal mesa-shaped slot of top crown 3 forms seal cavity, and four seal cavities are located at four groups of capacitor cells 5
Surface, and seal cavity bottom plane area is greater than the effective area of capacitor cell 5, i.e., the base area of trapezoidal mesa-shaped slot is big
In the rectangular area of square groove, it is completely covered to realize.And it is arranged the half of the semicircle ball shape structure of 3 upper surface of top crown
Diameter is exactly the distance at trapezoidal 3 center of seal cavity centre distance top crown.
Four seal cavities are filled with gallium-indium-tin alloy liquid by injection molding method, due to gallium-indium-tin alloy liquid
Body surface tension forms four spherical metal dropping electrodes 6, respectively the first dripping electrode S10, the second dripping electrode
S20, third dripping electrode S30With the 4th dripping electrode S40, the respective lower section of each dripping electrode 6 and bottom crown
Corresponding one group of capacitor cell 5 constitutes a sensing unit, four dripping electrodes 6 respectively with four groups of capacitor lists of bottom crown
Member 5 constitutes four sensing units.
Two sensing electrodes 4 of one group of capacitor cell 5 draw connection external signal reciever part through winding displacement, and winding displacement can be worn
If being arranged in bottom crown 1, four dripping electrodes 6 draw without winding displacement and are not connected to external signal reciever part.
Dripping electrode 6 plays the role of public electrode in sensing unit, when external force is in the upper table of top crown 3
When face, as shown in Fig. 5 to Fig. 6 process, dripping electrode 6 is squeezed generation deformation and makes dielectric layer corresponding with lower section
2 contacts area change, and drive the capacitance of capacitor cell 5 as contact area changes.It is specific as follows:
As shown in fig. 7, each sensing unit is made of two panels sensing electrode 4 and piece of metal drop electrode 5, sensing electrode
4 and the spacing of the molten drop electrode 5 as public electrode are definite value, as dielectric layer thickness, when original state, four biographies
The capacitance that electrification holds may be expressed as:
Wherein, CS11, CS12, CS21, CS22, CS31, CS32, CS41, CS42Respectively indicate on bottom crown 1 eight sensing electrodes 4 with
The capacitance size for the capacitor subelement that molten drop electrode 5 is constituted, specifically may be expressed as:
ε0Indicate permittivity of vacuum, εrIndicate the dielectric constant of dielectric layer, AS1, AS2, AS3And AS4It is dripped for four metals
The contact area of liquid electrode 5 and dielectric layer 2, the i.e. effective capacitor plate area of four sensing units, g0Indicate dielectric layer
Thickness.
When external force is when the upper surface of top crown 3, four dripping electrodes 5 are squeezed generation deformation, with electricity
The contact area of dielectric layer 2 changes, the variation long-pending with dripping electrode contact surface of the capacitance of four capacitor cells
It changes.Since the contact area size and seal cavity of dripping electrode 5 and dielectric layer 2 are in Z-direction normal pressure, X
The proportional relationship of deformation that direction shearing force, Y-direction shearing force generate, therefore specifically may be expressed as:
In formula, kSIndicate the scale factor of contact area variation and seal cavity height change, AS0Indicate dripping electricity
The initial size of the contact area of pole 5 and dielectric layer 2, kx、ky、kzTop crown is respectively indicated in the elasticity system in the direction X-Y-Z
Number, Fx、Fy、FzRespectively indicate X-direction shearing force, Y-direction shearing force and Z-direction normal pressure, h0Indicate the first of four seal cavities
Begin height.
Thus principle is implemented as it can be seen that external pressure-shearing force is by changing the centre-height of four seal cavities to make
The contact area size of dripping electrode 5 and dielectric layer 2 generates variation, by the electric capacitance change of four capacitor cells and outside
Portion's pressure-shearing force size establishes direct connection, by analytic expression (1-3), can be obtained electric capacitance change and outside is pressed
Relationship between power-shearing force, and realize the measurement of three-dimensional pressure-shearing force.
The present invention substitutes traditional copper electrode using molten drop electrode, substitutes traditional capacitance by the way of pole-changing plate suqare
Sensor changes the mode of pole plate spacing, effectively improves transducer sensitivity, and sensor is done array in specific manufacturing process
It can be bonded completely with the irregular surface of measurand after distribution, realize X-Y-Z threedimensional haptic sensing, effectively rebuild artificial false
The pressure functional of limb improves measurement efficiency and measurement accuracy.
Claims (9)
1. a kind of dripping electric pole type three-dimensional capacitance touch sensor, it is characterised in that: mainly from bottom to up successively by lower pole
Plate (1), dielectric layer (2) and top crown (3) are composed, and bottom crown (1) upper surface is provided with the rectangular recessed of four group patterns arrangement
Slot, every group of square groove includes two right angled triangle slots, and two right angled triangle slots arrange the side of being formed with bevel edge relative spacing
Connected in star, each right angled triangle slot are equipped with a sensing electrode (4), two sensing electrode (4) structures of every group of square groove
At one group of capacitor cell (5), eight sensing electrodes (4) constitute four groups of capacitor cells (5) altogether in pairs；Table on top crown (3)
Semicircle ball shape structure is processed into face, and there are four the trapezoidal mesa-shaped slot of array arrangement, four bucking ladders for the processing of top crown (3) lower surface
Shape slot is located at the surface of four square grooves；Dielectric layer (2) is connected to the upper surface that bottom crown (1) does not open up groove
And top crown (3) does not open up between the lower surface of trapezoidal mesa-shaped slot, and dielectric layer (2) and top crown (3) do not open up bucking ladder
The lower surface bonds of shape slot make the trapezoidal mesa-shaped slot of top crown (3) form seal cavity, and four seal cavities pass through injection
Molding method is filled with gallium-indium-tin alloy liquid, since gallium-indium-tin alloy surface tension of liquid forms four dripping electrodes
(6), respectively the corresponding one group of capacitor cell (5) in lower section constitutes a sensing unit for each dripping electrode (6) and bottom crown,
Four dripping electrodes (6) constitute four sensing units with four groups of capacitor cells (5) of bottom crown respectively.
2. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: each
Respectively as input terminal and output end, dripping electrode (6) is not connected to any the two panels sensing electrode (4) of capacitor cell (5)
Input/output terminal only plays the role of changing the effective overlapping area of capacitor cell.
3. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 2, it is characterised in that: one group
Two sensing electrodes (4) of capacitor cell (5) draw connection external signal reciever part through winding displacement.
4. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: metal
Dropping electrode (6) plays the role of public electrode in sensing unit, when external force is when the upper surface of top crown (3), gold
Category dropping electrode (6) is squeezed generation deformation and dielectric layer (2) contact area corresponding with lower section is changed, and drives
The capacitance of capacitor cell (5) changes with contact area.
5. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: described
Four seal cavities be located at the surfaces of four groups of capacitor cells (5), and seal cavity bottom plane area is greater than capacitor
The effective area of unit (5).
6. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: described
Bottom crown (1) using flexible printed circuit board as substrate.
7. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: described
Dielectric layer (2) be using membrane structure made of silastic material.
8. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: described
Trapezoidal mesa-shaped slot upper level size be less than lower horizontal size.
9. a kind of dripping electric pole type three-dimensional capacitance touch sensor according to claim 1, it is characterised in that: described
Top crown (3) using silastic material as substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811324698.7A CN109282921B (en) | 2018-11-08 | 2018-11-08 | Metal drop electrode type three-dimensional capacitance touch sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811324698.7A CN109282921B (en) | 2018-11-08 | 2018-11-08 | Metal drop electrode type three-dimensional capacitance touch sensor |
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| CN109282921A true CN109282921A (en) | 2019-01-29 |
| CN109282921B CN109282921B (en) | 2024-06-21 |
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| CN201811324698.7A Active CN109282921B (en) | 2018-11-08 | 2018-11-08 | Metal drop electrode type three-dimensional capacitance touch sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813466A (en) * | 2019-03-22 | 2019-05-28 | 重庆大学 | Touch sensor with sliding perceptional function |
| CN110039533A (en) * | 2019-04-17 | 2019-07-23 | 苏州柔性智能科技有限公司 | For detecting the multi-functional software manipulator of fruit maturity |
| CN111551291A (en) * | 2020-05-25 | 2020-08-18 | 苏州大学 | Method for manufacturing liquid metal film electrode and flexible pressure sensor |
| CN111751038A (en) * | 2020-07-06 | 2020-10-09 | 安徽大学 | High-sensitivity capacitive flexible three-dimensional force touch sensor based on bionic mushroom structure |
| CN112577643A (en) * | 2020-12-11 | 2021-03-30 | 武汉大学 | Wide-range capacitive flexible sensor for realizing triaxial force measurement |
| CN114895071A (en) * | 2022-04-27 | 2022-08-12 | 东南大学 | Self-powered flexible acceleration sensor and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109813466A (en) * | 2019-03-22 | 2019-05-28 | 重庆大学 | Touch sensor with sliding perceptional function |
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| CN111751038A (en) * | 2020-07-06 | 2020-10-09 | 安徽大学 | High-sensitivity capacitive flexible three-dimensional force touch sensor based on bionic mushroom structure |
| CN112577643A (en) * | 2020-12-11 | 2021-03-30 | 武汉大学 | Wide-range capacitive flexible sensor for realizing triaxial force measurement |
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| CN114895071A (en) * | 2022-04-27 | 2022-08-12 | 东南大学 | Self-powered flexible acceleration sensor and preparation method thereof |
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| Publication number | Publication date |
|---|---|
| CN109282921B (en) | 2024-06-21 |
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